JPH08211074A - Probe microscope - Google Patents

Abstract

PURPOSE: To provide a probe microscope which can automatically switch between a plurality of probes or a cantilever without any interference between axes and can perform high-speed scanning. CONSTITUTION: A fine-adjustment mechanism 1 consists of a cylindrical piezoelectric body 2 and a plurality of electrodes 3X1 -3Y4 and the scanning in the direction of X and Y axes and the displacement in the direction of Z axis are performed by applying a specific voltage to the electrodes 3X1 -3Y4 . A base 21 with a plurality of cantilevers 4 (a probe 5 is fixed to the tip) which are fixed in parallel in the direction of Y axis is pressed against the free edge of the piezoelectric body 2. By applying a specific voltage to the electrodes 3X3 -3Y4 , the base 21 is moved in the direction of Y axis based on the principles of ultrasonic wave motor using the piezoelectric body 2, thus replacing the cantilevers 4 by new ones.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe microscope used for measuring a fine surface shape of an object and other minute physical quantities.

[0002]

2. Description of the Related Art As a probe microscope, there are tunnel microscopes, atomic force microscopes, magnetic force microscopes, etc. depending on the detected physical quantity, and they have a measurement resolution of atomic order and are applied to various fields such as shape measurement of various objects. ing. Among such probe microscopes, an atomic force microscope will be described with reference to the drawings.

FIG. 12 is a side view of the atomic force microscope, and FIG.
FIG. 13 is a sectional view taken along line XIII-XIII shown in FIG. 12.
In each figure, X, Y, and Z indicate coordinate axes. Reference numeral 1 denotes a fine movement mechanism. The fine movement mechanism 1 is composed of a cylindrical piezoelectric body 2 and a plurality of electrodes arranged on the piezoelectric body 2 by sticking, vapor deposition or the like. Of these electrodes, electrodes 3X ₁ , 3X
₂ counter electrode arranged opposite to the X-axis direction in the upper portion of the piezoelectric body 2, the electrode 3X _3, 3X ₄ counter electrode arranged opposite to the X-axis direction in the lower part of the piezoelectric body 2, electrodes 3
Y ₁ and 3Y ₂ are counter electrodes arranged above the piezoelectric body 2 so as to face each other in the Y-axis direction, and electrodes 3Y ₃ and 3Y ₄ are counter electrodes arranged so as to face each other below the piezoelectric body 2 in the Y-axis direction. 3Z is an electrode arranged in the middle of the piezoelectric body 2 and around the entire circumference thereof. As shown in FIG. 13, a common electrode 3C is arranged around the entire inner surface of the piezoelectric body 2. Such a fine movement mechanism 1 is disclosed in, for example, Japanese Patent Laid-Open No. 2-266201.

Reference numeral 4 is a cantilever, 5 is a probe fixed to the tip of the cantilever 4, and 6 is a fixing member for fixing the cantilever 4 to the end of the fine movement mechanism 1. Reference numeral 7 denotes an object to be measured by the atomic force microscope, and the surface shape of the object is measured by making the probes 5 correspond to each other at intervals of nm order. Reference numeral 8 is a laser oscillator, and 9 is a photodetector. As shown by the chain double-dashed line in the figure, the laser beam from the laser oscillator 8 is reflected on the back surface of the cantilever 4, and the reflected light is detected by the photodetector 9. To detect.

In the above structure, the piezoelectric body 2 expands when a positive polarity voltage is applied, and contracts when a negative polarity voltage is applied. Therefore, the common electrode 3C of the fine movement mechanism 1 is set to 0 volt (V), the electrode 3X ₁ is + E (V), and the electrode 3X ₂ is −.
E (V), -E (V ) to the electrode 3X _3, the electrode 3X ₄ + E
When (V) is applied, the piezoelectric body 2 is deformed as shown by the broken line in FIG. As a result, the probe 5 is displaced by the distance x in the X-axis direction. Usually, the size of the fine movement mechanism is several tens of mm, and the displacement is in the region of several μm to 100 μm. As can be seen from this, the deformation of the broken line shown in the figure is exaggerated.

In the above structure, the polarities of the upper and lower counter electrodes are reversed and the deformation modes of the upper and lower portions of the piezoelectric body 2 are reversed, whereby the parallel displacement of the probe 5 is caused. It will be possible. For displacement in the Y-axis direction, electrode 3Y ₁
It is possible to perform displacement in the same manner by applying the same voltage to ~3Y _4. By changing the magnitude of the voltage of each electrode, scanning of the probe 5 in the X and Y axis directions can be performed accurately. When a voltage is applied to the electrode 3Z, the piezoelectric body 2 expands and contracts in the Z-axis direction according to the voltage.

When an atomic force acts between the probe 5 and the subject 7 during scanning using the above means, the cantilever 4
Bending is generated, and the amount of this bending is detected by the laser transmitter 8 and the photodetector 9. Here, when the piezoelectric body 2 is expanded / contracted by controlling the voltage of the electrode 3Z so as to keep the amount of the deflection of the cantilever 4 constant during the scanning, this expansion / contraction amount (voltage) is the surface of the subject 7. It represents the shape and can measure it. In such a measurement, if scanning in the X and Y axis directions is performed by deforming only the upper part or only the lower part of the piezoelectric body 2, an arc motion of the probe 5 occurs as shown by a dashed line arrow A in the figure. , It becomes impossible to perform scanning parallel to the X-axis and Y-axis directions, and the surface shape of the subject 7 cannot be measured with high accuracy.

As described above, there are various types of probe microscopes, such as tunnel microscopes, atomic force microscopes, magnetic force microscopes. For example, tunnel microscopes are suitable for measuring electrical characteristics, and atomic force microscopes are used for the surface of a subject. Is suitable for measuring the shape of the cantilever 4 and the magnetic force microscope is suitable for measuring the magnetic characteristics, and the cantilever 4 is exchanged for these measuring purposes. or,
There are various probe shapes, and even in the same atomic force microscope, it is necessary to replace with a different type of cantilever or probe that is more suitable for measurement. Since such replacement of the cantilever and the probe has been done manually, there is a problem that the replacement requires time and labor.

In order to solve this problem, an automatic exchange means is disclosed in, for example, Japanese Patent Laid-Open No. 157508/1993. The outline of such automatic exchange means will be described with reference to the drawings. 14 is a plan view of a base to which a plurality of cantilevers are attached, and FIG. 15 is a side view of a probe microscope using the base shown in FIG. In each figure, 4 is a cantilever, 5
Is a probe, and 11 is a base to which a plurality of cantilevers 4 are fixed. 1 is a fine movement mechanism for scanning as shown in FIG. 12, 7 is a subject placed on the fine movement mechanism 1, and 12 is XY.
A stage, 13 is a rotating mechanism fixed on the XY stage 12, 14 is a base for rotatably supporting the base 11, 1
Reference numeral 5 is a leaf spring for pressing the base 11 against the base portion 14.
By rotating the rotating mechanism 13, the cantilever 4 fixed to the base 11 is selectively switched,
The replacement of the cantilever 4 or the probe 5 can be automatically performed without manual labor.

[0010]

In the configuration shown in FIG. 15, since the fine movement mechanism 1 and the cantilever 4 are not integrally formed as in the configuration shown in FIG. 12, the fine movement operation and rotation in the XYZ axis directions are performed. It is not preferable because the replacement operation due to will interfere between the axes. Further, in the configuration shown in FIG. 15, since the subject 7 is scanned by the fine movement mechanism 1, when the subject 7 is a large one such as an 8 inch (200 mm) silicon wafer, the scanning mass is large and therefore the high speed is achieved. There is also a problem that scanning becomes impossible and it takes a long time for measurement.

An object of the present invention is to solve the above problems in the prior art and to provide a probe microscope capable of automatically switching a plurality of probes or cantilevers without inter-axis interference and capable of high-speed scanning. It is in.

[0012]

To achieve the above object, the invention according to claim 1 is provided with a base having a plurality of probes or a plurality of cantilevers to which the probes are fixed. In a probe microscope using the needle or the cantilever as a replacement, a fine movement mechanism comprising a cylindrical piezoelectric body and a plurality of electrodes arranged on the piezoelectric body, one end of which is fixed and the other end is a free end. And a pressing means for movably pressing the base to the free end of the fine movement mechanism, and driving the base with the base pressed against the free end of the fine movement mechanism to move the probe or the cantilever. And a base driving means for switching.

The invention according to claim 5 further comprises a probe having a plurality of probes or a plurality of cantilevers to which the probes are fixed, the probe being used by replacing the probes or the cantilevers. In a microscope, a fine movement mechanism that is made up of a cylindrical piezoelectric body and a plurality of electrodes arranged on the piezoelectric body to obtain a minute displacement by deforming the piezoelectric body, and the fine movement mechanism fixed to one end of the fine movement mechanism are A rotation mechanism for rotating, a fixing means for fixing the base to the other end of the fine movement mechanism, and a coordinate conversion means for converting coordinates according to the replacement each time the probe or the cantilever is replaced are provided. It is also characterized.

[0014]

In the structure of claim 1, the selection of the probe or the cantilever is performed by moving the base against the pressure of the pressure contact means by the base driving means and selecting the required one of the probe or the cantilever attached to the base. This is done by placing things in place. In this state, the base is pressed against the fine movement mechanism by the pressure contact means. Therefore, when the fine movement mechanism is operated, the probe or the cantilever moves together with the fine movement mechanism to perform a predetermined scan.

In the structure of claim 5, the probe or the cantilever is selected by rotating the rotating mechanism to rotate the base through the fine movement mechanism, and selecting the probe or the cantilever from the base. This is done by placing the required ones in a predetermined position. In this case, since the fine movement mechanism rotates, the coordinates also rotate with it, and the scanning by the fine movement mechanism is performed according to the coordinates converted by the coordinate conversion means based on the rotation angle.

[0016]

The present invention will be described below with reference to the illustrated embodiments. 1 is a side view of an atomic force microscope according to a first embodiment of the present invention, and FIG. 2 is a plan view of a base and a cantilever shown in FIG. In each figure, X, Y, and Z are coordinate axes, and 7 is a subject, which are the same as those shown in FIG. Reference numeral 1 denotes a fine movement mechanism, which is the same as the fine movement mechanism shown in FIG. 12 except for the slit described later. Reference numeral 20 is a slit, which is formed between the adjacent electrodes 3X ₃ , 3X ₄ , 3Y ₃ , 3Y ₄ at the free end of the piezoelectric body 2. In this case, the common electrode 3C arranged on the inner surface of the piezoelectric body 2 is also separated at the slit 20 but electrically connected to each other. The fine movement mechanism 1 of the present embodiment is different from the fine movement mechanism shown in FIG. 12 only in that the slit 20 is formed, but the function as the fine movement mechanism is the same.

Reference numeral 21 denotes a base, and as shown in FIG. 2, a plurality of (three in the figure) cantilevers 4 are mounted in parallel in the Y-axis direction. Reference numeral 22 denotes a spring that passes through the inside of the piezoelectric body 2 and is mounted between the upper fixed portion and the base 21. The base 21 is pressed against the free end of the piezoelectric body 2 by the spring 22. A magnet may be used instead of the spring 22. In this case, the fixing portion and the base 21 are made of a magnetic material (the same applies to the second and third embodiments described below). The operation of the fine movement mechanism 1 is the same as that shown in FIG. Therefore, when the fine movement mechanism 1 is deformed as described above, the base 2 pressed against the free end of the piezoelectric body 2
1, the cantilever 4 attached to this base 21,
The probe 5 is displaced in the same manner as shown in FIG. 12 according to the deformation.

Next, the replacement operation of the cantilever 4 of this embodiment, that is, the drive means of the base 21 will be described with reference to FIG. FIG. 3 is a view showing a free end portion of the piezoelectric body 2 shown in FIG. In FIG. 3, the same parts as those shown in FIG. 1 are designated by the same reference numerals. In this figure, the arrangement portion of the electrodes 3Y ₃ and 3Y ₄ is shown in cross section for easy understanding. When moving the base 21 along the Y-axis direction, first, the common electrode 3C, the electrodes 3X ₃ and 3X ₄ are set to 0.
(V), the electrode 3Y ₃ -E (V), the electrode 3Y ₄ + E
(V) is applied. As a result, at the free end of the piezoelectric body 2, as shown in FIG. 3A, the electrode 3Y ₃ is contracted and the electrode 3Y ₄ is expanded, so that the end of the deformed part A gap g is generated between the base 21 and the base 21. The end portions of the electrodes 3X ₃ and 3X ₄ of the piezoelectric body 2 are kept pressed against the base 21.

[0019] Then, the electrode 3X _3, 3X _4, the application of a large negative voltage than previously to the electrode 3Y _3, the voltage level applied to the 3Y _4, the electrode 3X _3, part of the 3X ₄ of the piezoelectric element 2 contracts greatly As a result, as shown in FIG. 3B, the end portions of the electrodes 3Y ₃ and 3Y ₄ of the piezoelectric body 2 are pressed against the base 21 in a deformed state,
A gap g is generated at the ends of the portions X ₃ , 3X ₄ .

Furthermore, from this state, contrary to the In the case of (a), the electrode _{3Y 3 + E (V),} -E to electrode 3Y ₄
When (V) is applied, as shown in (c) of FIG. 3, the electrode 3Y ₃ of the piezoelectric body 2 is expanded and the electrode 3Y ₄ is contracted. Since this deformation occurs while the end portion is in pressure contact with the base 21, the base 21 is dragged by the deformation and moves in the direction of the arrow y as shown in FIG. 3C. After this movement, the voltage applied to each electrode is removed. By repeating the above operation, the base 2
1 can be moved in the Y-axis direction.

During the above operation, the base 21 moves in a state of being pressed against the free end of the piezoelectric body 2. However, the piezoelectric body 2 itself is made of a material having less friction, or a lubricating sheet such as a Teflon sheet is used. By interposing it or making the contact pressure as small as possible, the movement of the base 21 can be performed without any trouble (the same applies to the second and third embodiments described below).

In the above example, the voltage applied to each electrode is a DC voltage. However, in reality, the base driving means by AC voltage application adopted in a general ultrasonic motor is used. desirable. The applied voltage in that case is ω is the angular frequency, t is the time, E ₁ , E ₂ (E ₁ > E
_{When 2} ) is the voltage amplitude, it is as follows.

Electrode 3C: 0 (V) Electrode 3X ₃ , 3X ₄ : E ₁ cos (ωt) (V) Electrode 3Y ₃ : E ₂ cos (ωt + 90 °) (V) Electrode 3Y ₄ : E ₂ cos (ωt-) 90 degrees) (V) As described above, in this embodiment, the base is pressed against the ends of the piezoelectric body that constitutes the fine movement mechanism, slits for separating each electrode are provided at the ends, and a predetermined voltage is applied to these electrodes. Since the voltage is applied to the cantilever, the base can be moved and the cantilever can be exchanged without human intervention and without causing inter-axis interference. Further, since the scanning is performed by the cantilever, it is possible to perform high-speed scanning on any object as compared with the conventional apparatus shown in FIG.

FIG. 4 is a side view of an atomic force microscope according to the second embodiment of the present invention, and FIG. 5 is a plan view of the base and cantilever shown in FIG. In FIG. 4, X, Y and Z are coordinate axes and 22 is a spring, which are the same as those shown in FIG. Reference numeral 1 denotes a fine movement mechanism, which has the same configuration as the fine movement mechanism 1 shown in FIG. 12 except that a rotary electrode, which will be described later, is arranged. 3Z _θ is a rotating electrode, which is located above the electrode 3Z for displacing the piezoelectric body 2 in the Z-axis direction, and is arranged over the entire circumference of the piezoelectric body 2. Reference numeral 23 denotes a base, and as shown in FIG. 5, a plurality of (three in the figure) cantilevers 4 are attached to the periphery of the base 23 at intervals of 90 degrees. This base 2
3 is pressed against the end of the piezoelectric body 2 by a spring 22.
Also in this embodiment, the cantilever 4 and the probe 5 attached to the base 21 are displaced according to the deformation of the fine movement mechanism 1.

Next, the replacement operation of the cantilever 4 of this embodiment, that is, the drive means of the base 21 will be described with reference to FIG. FIG. 6 shows the rotary electrode 3Z _{θ of the} piezoelectric body 2 shown in FIG.
It is a figure which shows the lower part. In this embodiment, the cantilever 4 is switched by rotating the base 23 with the newly added rotating electrode 3Z _θ and the electrode 3Z arranged conventionally. Therefore, the rotating electrode 3Z _θ has Ec
os (ωt) (V), Ecos (ωt
AC voltage of (± 90 degrees) (V) is applied. Note that ω is the angular frequency, t is the time, and E is the voltage amplitude. When the above voltage is applied to the rotating electrode 3Z _θ and the electrode 3Z, the end portion of the piezoelectric body 2 (contact portion with the base 23) is rotationally deformed as shown by an arrow θ in FIG. 6, and the base 23 is rotated around the Z axis. It can be moved. Since this operation principle is the same as that of a general ultrasonic motor, detailed description thereof will be omitted.

As described above, in this embodiment, the rotating electrode is separately provided, and the base is rotated by applying a predetermined voltage to the rotating electrode and the conventional electrode that causes displacement in the Z-axis direction. The same effect as the previous embodiment is achieved.

FIG. 7 is a side view of a probe microscope according to the third embodiment of the present invention. In this figure, X, Y, and Z indicate coordinate axes. Reference numeral 1 denotes a fine movement mechanism, which is the same as that shown in FIG. The probe microscope of this embodiment is also provided with the spring 22 shown in FIG. 1 and FIG.
Are omitted to avoid complication of the drawing. Reference numeral 24 denotes a base, and like the base 23 shown in FIG. 5, three cantilevers 4 are fixed around the base at intervals of 90 degrees. Two of these cantilevers 4 are shown in the figure. A connecting ring 25 is fixed to the free end of the piezoelectric body 2 and sets the cantilever 4 at a predetermined inclination. 26
Is a fixing member for fixing the fine movement mechanism 1, and 27 is a rotating mechanism fixed to the fixing member. Although not shown as described above, the spring 22 is provided between the fixing member 26 and the base 24.
The base 24 is pressed against the connecting ring 25. 28 is a rotating shaft of the rotating mechanism 27,
It is connected to the base 24. Reference numeral 29 is a rotation transmission mechanism interposed in the middle of the rotary shaft 28. This rotation transmission mechanism 29
The configuration of is shown in FIG.

FIG. 8 is a perspective view of the rotation transmission mechanism shown in FIG. In this figure, X, Y and Z are the same coordinate axes as shown in FIG. Reference numeral 28 denotes the rotation shaft shown in FIG. The rotation transmission mechanism 29 is composed of rigid blocks 29B ₁ and 29B ₂ . Through holes 29H ₁ and 29H ₂ are formed in the block 29B ₁ in directions orthogonal to each other, and the through holes 29H are formed.
Thin portions parallel to each other by _one of the formation 29a _1, 29a ₂
And the thin portions 29b ₁ and 29b ₂ parallel to each other are formed by forming the through hole 29H ₂ . The block 29B ₂ has a through hole 29 in the same direction as the through hole 29H _1.
H ₃ is formed, and by forming this through hole 29H ₃ , two thin portions 29c ₁ and 29c ₂ are formed. Thin part 29
The surfaces of a ₁ and 29a _2, the surfaces of the thin portions 29b ₁ and 29b ₂ , and the surfaces of the thin portions 29c ₁ and 29c ₂ are orthogonal to each other.

In such a rotation transmitting mechanism 29, the thin-walled portions 29a ₁ and 29a ₂ are deflected with respect to the force along the X-axis direction, and the thin-walled portion 2 with respect to the force along the Y-axis direction.
The bending of 9b ₁ and 29b ₂ further softens the thin-walled portions 29c ₁ and 29c ₂ with respect to the force along the Z-axis direction, but the rigidity is high with respect to the moment around the Z-axis. Show.

Next, the replacement operation of the cantilever 4 of this embodiment, that is, the drive means of the base 24 will be described. When the rotation mechanism 27 is driven, the rotation is transmitted to the base 24 via the rotation shaft 28 and the rotation transmission mechanism 29, and the base 24 is rotated. In this case, the rotation transmission is performed without trouble because the rigidity of the rotation transmission mechanism 29 around the rotation shaft 28 is high as described above. By this rotation, any cantilever 4 can be replaced. On the other hand, during the measurement by the atomic force microscope, the piezoelectric body 2 is deformed in the X-, Y-, and Z-axis directions, but since the rotation transmission mechanism 29 is flexible with respect to the forces in these directions, the base 24 rotates. Even if it is connected to the rotation mechanism 27 by the shaft 28, the deformation does not have any adverse effect.

As described above, in this embodiment, the base is rotated by the rotation mechanism via the rotation transmission mechanism which is flexible with respect to the forces in the X-, Y-, and Z-axis directions, which is the same as the previous embodiment. Produce an effect.

FIG. 9 is a side view of an atomic force microscope according to a fourth embodiment of the present invention, and FIG. 10 is a plan view of the base and cantilever shown in FIG. In the above-described first to third embodiments, the configuration in which the base provided with a plurality of cantilevers is pressed against the free end of the piezoelectric body and the base is moved independently of the piezoelectric body has been exemplified, but in the present embodiment, , The free end of the piezoelectric body and the base are fixed to each other. In FIG. 9, X,
Y and Z indicate coordinate axes. 1 is the same fine movement mechanism as that shown in FIG. Reference numeral 31 is a rotating mechanism that fixes the upper end of the piezoelectric body 2 and rotates it. Reference numeral 32 denotes a base fixed to the free end of the piezoelectric body 2. As shown in FIG. 10, three cantilevers 4 are provided around the base 32 at intervals of 90 degrees.
a, 4b, and 4c are fixed.

Next, the cantilever replacement operation of this embodiment, that is, the drive means for the base 24 will be described. Now, FIG.
When the cantilever 4a shown in (1) is replaced with the cantilever 4b or the cantilever 4c, when the rotating mechanism 31 is driven, the piezoelectric body 2 rotates and the base 32 also rotates. This allows the cantilever to be replaced. However, since the coordinate axis of the fine movement mechanism changes due to the rotation of the piezoelectric body 2, the desired measurement cannot be performed simply by rotating the base 32 and replacing the cantilever.
Therefore, in this embodiment, coordinate conversion is performed every time the cantilever is replaced. This coordinate conversion will be described with reference to FIG.

FIG. 11 is a block diagram showing the control system of the atomic force microscope. In this figure, the same parts as those shown in FIG. 9 are designated by the same reference numerals. Reference numeral 34 is a detector for detecting the amount of rotation (rotation angle) of the rotating mechanism 31, and reference numeral 35 is a control unit of an atomic force microscope composed of a microcomputer. When the rotating mechanism 31 is driven and the cantilever is replaced, the control unit 35 determines which cantilever is used by the signal from the detector 34 and performs coordinate conversion according to this.

For example, assuming that the cantilever 4a is used on the coordinate axes shown in FIG. 9, when the cantilever 4a is replaced by the cantilever 4b, the control unit 35 performs coordinate conversion, and the electrode 3X ₁ is replaced by the electrode 3Y ₁ and the electrode 3Y ₁ . 3X ₂ is treated as electrode 3Y ₂ , electrode 3Y ₁ as electrode 3X ₂ , and electrode 3Y ₂ as electrode 3X ₁ . Similarly, when the cantilever 4a is replaced with the cantilever 4c, the control unit 35
Electrode 3X ₁ to electrode 3X ₂ , electrode 3X ₂ to electrode 3X
₁ , electrode 3Y ₁ is electrode 3Y ₂ , electrode 3Y ₂ is electrode 3Y ₁
Process as. Performs the same coordinate transformation processing for the free-end-side electrode 3X ₃ ~3Y _4.

As described above, in this embodiment, the base to which a plurality of cantilevers are fixed is fixed to the free end of the piezoelectric body, the piezoelectric body is fixed to the rotating mechanism, the rotating mechanism is driven to replace the cantilever, and the coordinates are adjusted. Since the conversion is performed, the same effect as that of the previous embodiment can be obtained.

In the description of each of the above embodiments, the atomic force microscope has been described, but it is obvious that it can be applied to other probe microscopes. Further, it can be applied to a probe only without a cantilever.

[0038]

As described above, according to the present invention, the base is pressed against the free end of the fine movement mechanism (piezoelectric body), and the base is driven while being pressed to switch the probe or the cantilever. Alternatively, the fine movement mechanism and the base fixed to the fine movement mechanism are integrally rotated by the rotation mechanism to switch the probe or the cantilever, so that the plurality of probe or the cantilever can be automatically switched without inter-axis interference, and High-speed scanning can be performed on any object.

[Brief description of drawings]

FIG. 1 is a side view of an atomic force microscope according to a first embodiment of the present invention.

FIG. 2 is a plan view of a base and a cantilever shown in FIG.

FIG. 3 is a diagram for explaining the operation of the configuration shown in FIG.

FIG. 4 is a side view of an atomic force microscope according to a second embodiment of the present invention.

5 is a plan view of the base and cantilever shown in FIG. 4. FIG.

FIG. 6 is a diagram for explaining the operation of the configuration shown in FIG.

FIG. 7 is a side view of an atomic force microscope according to a third embodiment of the present invention.

8 is a perspective view of the rotation transmission mechanism shown in FIG.

FIG. 9 is a side view of an atomic force microscope according to a fourth embodiment of the present invention.

10 is a plan view of the base and the cantilever shown in FIG.

11 is a block diagram of a control system used in the atomic force microscope shown in FIG.

FIG. 12 is a side view of a conventional atomic force microscope.

13 is a cross-sectional view taken along the line XIII-XIII shown in FIG.

FIG. 14 is a plan view of a base having a plurality of cantilevers.

FIG. 15 is a side view of a conventional probe microscope.

[Explanation of symbols]

4 cantilever 5 probe 1 fine movement mechanism 2 piezoelectric 3X ₁ ～3Y ₄ electrode 20 slit 21 base

Claims (6)

[Claims] 1. A probe having a plurality of cantilevers having a plurality of probes or fixed cantilevers to which the probes are fixed,
Alternatively, in the probe microscope used by replacing the cantilever, a fine movement mechanism in which a piezoelectric body having a cylindrical shape and a plurality of electrodes arranged on the piezoelectric body are fixed and one end of the piezoelectric body is fixed, and the other end is a free end, A pressing means for movably pressing the base to the free end of the fine movement mechanism, and a base for driving the base in a state where the base is pressed against the free end of the fine movement mechanism to switch the probe or the cantilever. A probe microscope provided with driving means. 2. The probe microscope according to claim 1, wherein the base driving unit is a piezoelectric body deforming unit that deforms a piezoelectric body itself to move the base. 3. The piezoelectric body deforming means according to claim 2, wherein the piezoelectric body deforming means is arranged in the vicinity of the free end of the fine movement mechanism and displaces the fine movement mechanism in a first axial direction orthogonal to the axial direction of the cylindrical body. A first counter electrode composed of two electrodes, and a second electrode orthogonal to the axial direction of the cylindrical body and the first axial direction.
Second electrode consisting of two opposing electrodes for axial displacement
And a slit extending from a free end of the fine movement mechanism and separating each electrode of the electrode group. 4. The piezoelectric body deforming means according to claim 2, wherein the piezoelectric body deforming means includes two electrodes for expanding and contracting the piezoelectric body in the axial direction of the cylindrical body, and a voltage applying means for applying alternating voltages having different phases to these electrodes. A probe microscope comprising: 5. The base driving means according to claim 1, wherein the base drive means includes a rotation mechanism, a rotation shaft connecting the rotation mechanism and the base through the inside of the cylindrical body of the fine movement mechanism, and a middle of the rotation shaft. A probe microscope, which is provided with a rotation transmission mechanism that is flexible with respect to the displacement direction of the fine movement mechanism and is rigid with respect to the rotation direction of the rotation shaft. 6. A probe having a plurality of probes or a base having a plurality of cantilevers having the probes fixed thereto,
Alternatively, in a probe microscope in which the cantilever is replaced and used, a fine movement mechanism configured by a cylindrical piezoelectric body and a plurality of electrodes arranged on the piezoelectric body to obtain a minute displacement by deforming the piezoelectric body, and the fine movement mechanism. A rotation mechanism fixed to one end of the fine rotation mechanism for rotating the fine movement mechanism, a fixing means for fixing the base to the other end of the fine movement mechanism, and a coordinate corresponding to each exchange of the probe or the cantilever. And a coordinate transformation means for performing the transformation.