JPH08210913A - Infrared sensor and infrared detection device - Google Patents

Abstract

PURPOSE: To provide a small-sized and low cost infrared sensor which can obtain a two dimensional thermal image. CONSTITUTION: Pyroelectric elements 601a to 601h equivalent to plural elements detecting infrared are arranged in two rows of three upper row elements and two lower row elements. Three elements 611, 612, 613 equivalent to the elements detecting the infrared are arranged comb teeth-like and are connected in parallel so as to form the pyroelectric element 601a. The pyroelectric elements 601a to 601h are arranged two-dimensionally so as to allow no rotating mechanism of an element portion to provide a low cost device. The pyroelectric elements 601a to 601h are arranged in two rows of three upper row elements and five lower row elements so as to reduce the number of the elements to the necessary minimum so that the increase of output circuits and processing units is suppressed so as to downsize the device. The plural elements are arranged comb teeth-like and are connected in parallel so as to form the pyroelectric element so that the movement of a high temperature stuff in an arrangement direction can be captured with higher accuracy.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared sensor for measuring infrared intensity distribution and radiation temperature of an object and detecting the presence of a person.

[0002]

2. Description of the Related Art In recent years, infrared sensors have been used in various fields such as radiation temperature measurement, automatic door person detection, intruder detection for crime prevention, and fire detection for disaster prevention.

Infrared sensors are roughly classified into quantum type and thermal type,
The quantum type has high sensitivity and fast response speed, but requires cooling (about −
Since the temperature is 200 ° C.), it is more often used for special purposes such as infrared cameras than for consumer use in terms of maintenance and device size. On the other hand, the thermal type has lower sensitivity than the quantum type, but operates at room temperature and has no wavelength dependence with respect to infrared rays. Widely used in various forms.

The thermal type is classified into a thermistor type which obtains infrared intensity by converting infrared rays into heat and measures a resistance value which changes according to temperature, and a pyroelectric type which produces an output according to temperature changes. A pyroelectric type sensor is widely used as the sensor.

In a conventional infrared sensor, a structure in which a plurality of elements are arranged in a matrix to obtain a two-dimensional thermal image is a well known structure, and a quantum infrared camera or the like adopts this structure.

In this structure, as the number of elements increases, the number of output circuits and processing systems for extracting the signals of the elements increases, and the device becomes large, which is not suitable for downsizing.

Japanese Patent Application H02-3034337 is a small infrared sensor for obtaining a two-dimensional thermal image. This infrared sensor has a structure in which a sensor array in which a plurality of pyroelectric elements are arranged in a straight line is rotated around a rotation axis inclined at a constant angle with respect to the previous straight line to obtain a two-dimensional thermal image.

In this infrared sensor, a stepping motor for rotating the sensor array is indispensable, and it is expensive despite the simple structure of the elements and the like.

[0009]

DISCLOSURE OF THE INVENTION In the infrared sensor for obtaining a two-dimensional thermal image, the present invention is expensive in spite of the simple configuration of elements and the like in the configuration for rotating the sensor array to obtain a two-dimensional thermal image. It solves the problem of being. Then, a plurality of elements are arranged in a matrix to form 2
The configuration for obtaining a three-dimensional thermal image solves the problem that it is difficult to reduce the size of the device when there are more elements than necessary in consideration of the actual visual field range.

[0010]

In order to solve the above problems, the present invention provides a plurality of elements for detecting infrared rays, an output circuit for extracting an output signal from each of the plurality of elements, and an infrared ray on the plurality of elements. An infrared optical system for forming an image and a shutter means for controlling the incidence of infrared rays are provided, and a plurality of elements are arranged in a plurality of rows with a unique number of elements for each row.

In order to solve the above problems, the present invention provides a plurality of elements for detecting infrared rays, an output circuit for extracting an output signal from each of the plurality of elements, and an infrared ray for forming infrared rays on the plurality of elements. It consists of an optical system and shutter means for controlling the incidence of infrared rays.The rows are arranged in the direction in which there is a large change in the intensity of infrared rays in the plane onto which the infrared rays from the measured space are projected, and the number of elements in each row is greater than the number of rows A plurality of elements are arranged to increase the number.

In order to solve the above problems, the present invention solves the above-mentioned problems by providing a plurality of circular elements for detecting infrared rays, an output circuit for extracting an output signal from each element, and forming infrared rays on the plurality of elements. An infrared optical system and a shutter means for controlling the incidence of infrared rays are arranged, and a plurality of elements are arranged in a plurality of rows with a unique number of elements for each row.

In order to solve the above problems, the present invention provides a plurality of elements for detecting infrared rays, an output circuit for extracting an output signal from each of the plurality of elements, and an infrared ray for forming infrared rays on the plurality of elements. An optical system and shutter means for controlling the incidence of infrared rays are arranged in a plurality of rows with a unique number of elements for each row, and infrared rays from a reference width area at an arbitrary distance are projected in the vertical and horizontal widths of the elements. The detection width of each element in the measurement space is made uniform.

In order to solve the above problems, the present invention provides a plurality of elements in which a plurality of infrared detecting elements are electrically connected in parallel, and an output circuit for extracting an output signal from each of the elements. It consists of an infrared optical system that forms an image of infrared rays on a plurality of elements.

In order to solve the above problems, the present invention provides a plurality of elements for detecting infrared rays arranged in a comb-teeth shape and electrically connecting the plurality of elements in parallel.
An output circuit for extracting an output signal from each of the elements and an infrared optical system for forming infrared rays on the plurality of elements are formed.

In order to solve the above problems, the present invention electrically connects a plurality of infrared detecting elements in parallel, and the widths of the elements and the widths between the elements correspond to the shoulder width of the human body in the space to be measured. A plurality of elements arranged in parallel, an element output circuit for extracting an output signal from each element, and an infrared optical system for forming infrared rays on the plurality of elements.

In order to solve the above problems, the present invention provides an element substrate made of an infrared detecting material, a light receiving electrode made of a material that absorbs infrared rays, and a back electrode provided on the opposite side of the light receiving electrode. Consists of an element in which a plurality of elements for detecting infrared rays are electrically connected in parallel, an output circuit for extracting an output signal from the element, and an infrared optical system for forming an image of infrared rays on a plurality of elements. Stipulate.

In order to solve the above problems, the present invention provides an element substrate made of an infrared detecting material, a light receiving electrode made of a material that absorbs infrared rays, and a back electrode provided on the opposite side of the light receiving electrode. Consists of an element in which multiple infrared sensing elements are electrically connected in parallel, an output circuit that extracts the output signal from the element, and an infrared optical system that images infrared rays onto the multiple elements. Stipulate.

In order to solve the above problems, the present invention provides an element substrate made of an infrared detecting material, a light receiving electrode made of a material that absorbs infrared rays, and a back electrode provided on the opposite side of the light receiving electrode. Consisting of a plurality of elements for electrically detecting infrared rays electrically connected in parallel, an output circuit for extracting an output signal from the elements, and an infrared optical system for forming infrared rays on the plurality of elements, and the width of the element substrate. Specifies the width of the light receiving electrode.

In order to solve the above-mentioned problems, the present invention has an element for detecting infrared rays and an output circuit for taking out an output signal from the element. The element shape was adjusted so that the aberration of the outer optical system was corrected and measured.

In order to solve the above-mentioned problems, the present invention has a plurality of elements for detecting infrared rays and an output circuit for extracting an output signal from each element, and an infrared ray incident by an infrared optical system is imaged on the element. Then, the element arrangement was adjusted so as to correct the aberration of the infrared optical system and perform the measurement.

[0022]

In the present invention, a plurality of elements for detecting infrared rays are used.
The three-dimensional arrangement eliminates the mechanism for rotating the element section. Furthermore, by arranging a plurality of elements in a plurality of rows with a unique number of elements for each row, the number of elements is minimized, and an increase in output circuits and processing systems is suppressed.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging a plurality of elements for detecting infrared rays two-dimensionally. Furthermore, by forming a row in the direction in which the change in the infrared intensity in the plane on which infrared rays from the measured space are projected is large, and arranging a plurality of elements so that the number of elements in each row is larger than the number of rows, The number of elements was minimized while preventing a decrease in measurement accuracy, and the increase in output circuits and processing systems was suppressed.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging a plurality of elements for detecting infrared rays two-dimensionally. Furthermore, by making the shape of the element circular,
The directionality of the element was eliminated and the degree of freedom in layout was increased.
Furthermore, the number of elements has been reduced to the necessary minimum, and the increase in output circuits and processing systems has been suppressed.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging a plurality of elements for detecting infrared rays two-dimensionally. Furthermore, by arranging a plurality of elements in a plurality of rows with a unique number of elements for each row, the number of elements is minimized, and an increase in output circuits and processing systems is suppressed. Further, by setting the vertical and horizontal widths of the plurality of elements to the widths at which infrared rays are projected from the reference width region at an arbitrary distance, the accuracy of detecting the existing position of the high temperature object is unified.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging the plurality of elements two-dimensionally. Furthermore, by arranging a plurality of elements in a plurality of rows with a unique number of elements for each row, the number of elements is minimized, and an increase in output circuits and processing systems is suppressed. Furthermore, since the element is configured by electrically connecting a plurality of elements that detect infrared rays in parallel, it is possible to detect that a high-temperature object is moving within the visual field of one element.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging the plurality of elements two-dimensionally. Furthermore, by arranging a plurality of elements in a plurality of rows with a unique number of elements for each row, the number of elements is minimized, and an increase in output circuits and processing systems is suppressed. Furthermore, by arranging a plurality of elements for detecting infrared rays in a comb-teeth shape and electrically connecting the plurality of elements in parallel, the arrangement direction of the high temperature object in the field of view of one element, in particular, the element The movement of can be noticed.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging the plurality of elements two-dimensionally. Furthermore, by arranging a plurality of elements in a plurality of rows with a unique number of elements for each row, the number of elements is minimized, and an increase in output circuits and processing systems is suppressed. Further, by connecting a plurality of elements for electrically detecting infrared rays electrically in parallel, and by arranging the widths of the elements and the widths between the elements so as to correspond to the shoulder width of the human body in the measured space, the elements are particularly configured. The movement of the human body can be captured.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging the plurality of elements two-dimensionally. Furthermore, by arranging a plurality of elements in a plurality of rows with a unique number of elements for each row, the number of elements is minimized, and an increase in output circuits and processing systems is suppressed. Furthermore, since a plurality of elements that detect infrared rays are electrically connected in parallel, it is possible to detect that a high-temperature object is moving within the visual field of one element. Further, an element substrate made of an infrared detecting material, a light receiving electrode made of a material that absorbs infrared rays, and a back electrode provided on the opposite side of the light receiving electrode constitute an element for detecting infrared rays. By defining the width, it is possible to easily connect the elements electrically in parallel without wasteful wiring.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging the plurality of elements two-dimensionally. Furthermore, by arranging a plurality of elements in a plurality of rows with a unique number of elements for each row, the number of elements is minimized, and an increase in output circuits and processing systems is suppressed. Furthermore, since the element is configured by electrically connecting a plurality of elements that detect infrared rays in parallel, it is possible to detect that a high-temperature object is moving within the visual field of one element. Further, an element substrate made of an infrared detecting material, a light receiving electrode made of a material that absorbs infrared rays, and a back electrode provided on the side opposite to the light receiving electrode constitute an element for detecting infrared rays, By defining the width, the element substrate can be easily manufactured.

Further, in the present invention, the mechanism for rotating the element portion is eliminated by arranging the plurality of elements two-dimensionally. Furthermore, by arranging a plurality of elements in a plurality of rows with a unique number of elements for each row, the number of elements is minimized, and an increase in output circuits and processing systems is suppressed. Furthermore, since the element is configured by electrically connecting a plurality of elements that detect infrared rays in parallel, it is possible to detect that a high-temperature object is moving within the visual field of one element. Further, an element substrate made of an infrared detecting material, a light receiving electrode made of a material that absorbs infrared rays, and a back electrode provided on the opposite side of the light receiving electrode constitute an element for detecting infrared rays. By defining the width and the width of the light receiving electrode, an infrared sensor with high sensitivity can be obtained.

Furthermore, in the present invention, the distortion-free visual field can be obtained by adjusting the element shape so as to correct the aberration of the infrared optical system and measure an arbitrary portion of the space to be measured.

Further, in the present invention, the element arrangement is arranged so as to correct the aberration of the infrared optical system and measure an arbitrary portion of the space to be measured, so that a visual field arrangement without distortion can be obtained.

[0034]

EXAMPLE A first example of the present invention will be described.

In FIG. 1, 101a, 101b, 1
01c, 101d, 101e, 101f, 101g, 1
Reference numeral 01h is a pyroelectric element corresponding to a plurality of elements for detecting infrared rays, and is arranged in two rows of three elements in the upper row and five elements in the lower row as shown in FIG. The pyroelectric element is formed by forming lead lanthanum titanate (PLT) in a thin film and attaching electrodes above and below the thin film. When the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. In the first embodiment,
Although the element is a pyroelectric element in which PLT is formed in a thin film, P
Not only ceramics and thin films such as T, PZT and PLZT, but also crystalline materials such as lithium tantalate and TGS and organic films such as PVDF can be used.

The output from each of the pyroelectric elements is the output circuit 1
02a, 102b, 102c, 102d, 102e, 1
It is taken out as an output signal via 02f, 102g, 102h.

An infrared lens 103 corresponds to an infrared optical system and forms an image of incident infrared rays on the pyroelectric elements 101a to 101h. Although the infrared lens is used in the first embodiment, the infrared optical system can be configured by using an optical system using a concave mirror or a pinhole.

Reference numeral 104 denotes a rotary chopper corresponding to shutter means for controlling the incidence of infrared rays, which rotates about its center and intermittently interrupts the infrared light path.

Infrared rays from the space to be measured are intermittently incident on the infrared lens 103 by the rotary chopper 104. When the rotary chopper 104 blocks the optical path, infrared rays corresponding to the temperature of the rotary chopper 104 enter the infrared lens 103.

After the infrared rays pass through the infrared lens 103, the pyroelectric elements 101a ...
What forms an image on 101h is detected. Pyroelectric element 10
1a to 101h are arranged without waste so as to detect only infrared rays from a necessary portion in consideration of the characteristics of the space to be measured.

As shown above, the pyroelectric elements 101a-10a
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 1
By arranging 01a to 101h in two rows of three rows in the upper row and five rows in the lower row, the number of elements can be minimized, the output circuit and the processing system can be prevented from increasing, and the size can be reduced.

Next, a second embodiment of the present invention will be described. (FIG. 2) 201a, 201b, 201c, 201
Reference numerals d, 201e, 201f, 201g, and 201h denote pyroelectric elements corresponding to a plurality of elements that detect infrared rays (FIG. 2).
As shown in FIG. 5, the upper and lower four elements are arranged in two rows so that the number of elements in each row is larger than the number of rows. The pyroelectric element is formed by forming lead lanthanum titanate (PLT) in a thin film and attaching electrodes above and below the thin film. When the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. In the first embodiment, the element is a pyroelectric element in which PLT is formed as a thin film, but not only ceramics such as PT, PZT, PLZT and thin films, but also crystalline materials such as lithium tantalate and TGS, organic materials such as PVDF and the like. It can also be configured by using a film.

The output from each of the pyroelectric elements is the output circuit 2
02a, 202b, 202c, 202d, 202e, 2
It is taken out as an output signal via 02f, 202g and 202h.

Reference numeral 203 denotes an infrared lens corresponding to an infrared optical system, which forms an image of incident infrared light on the pyroelectric elements 201a to 201h. Although the infrared lens is used in the first embodiment, the infrared optical system can be configured by using an optical system using a concave mirror or a pinhole.

Reference numeral 204 denotes a rotary chopper corresponding to shutter means for controlling the incidence of infrared rays, which rotates about its center and intermittently interrupts the optical path of infrared rays.

In the space to be measured, the high-temperature object 205 moves in the moving direction 206, and the infrared intensity in the direction perpendicular to the moving direction 206 does not change so much.

Infrared rays from the space to be measured are intermittently incident on the infrared lens 203 by the rotary chopper 204. When the rotary chopper 204 blocks the optical path, infrared rays according to the temperature of the rotary chopper 204 enter the infrared lens 203.

After the infrared rays pass through the infrared lens 203, the pyroelectric elements 201a ...
What forms an image on 201h is detected. Pyroelectric element 10
1a to 101h consider the characteristics of the space under measurement so that the position of the high temperature object 205 can be detected with high accuracy.
The column direction is set parallel to the moving direction 206 of No. 5, and the pyroelectric elements 201a to 201h are arranged without waste so that the number of elements in one row is larger than the number of rows.

As described above, the pyroelectric elements 201a-20
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 2
By arranging 01a to 201h in two rows of four elements in each row so that the number of elements in one row is larger than the number of rows, the position of the high temperature object 205 can be accurately detected, and the number of elements can be minimized to the minimum necessary. It is possible to reduce the size of the processing system and reduce the size.

Next, a third embodiment of the present invention will be described. In FIG. 3, 301a, 301b, 301c, 301
Reference numerals d, 301e, 301f, 301g, and 301h are pyroelectric elements corresponding to a plurality of elements that detect infrared rays (FIG. 3).
As shown in FIG. 5, circular elements are arranged in two rows of upper and lower four elements. Pyroelectric element is lead lanthanum titanate (PLT)
Is formed in a thin film, and electrodes are attached to the upper and lower sides of the thin film. When the intensity of infrared rays incident on the electrodes changes, an output is output according to the magnitude of the change. In the third embodiment, the element is PL
Although the pyroelectric element in which T is formed in a thin film is used, PT, PZT,
Not only ceramics such as PLZT and thin films, but also crystalline materials such as lithium tantalate and TGS, PVDF
It can also be configured by using an organic film such as.

When rectangular elements are used, it is difficult to arrange a large number of elements in the direction of the long side, and the number of elements arranged varies depending on the direction. Further, due to the distortion aberration of the infrared lens, sharpening and obtuse angles at the corners of the field of view become remarkable in the peripheral portion of the sensor.

On the other hand, when the element shape is circular, it is possible to arrange the same number of elements in any direction, and it is possible to avoid the extreme distortion of the visual field even in the peripheral portion of the sensor. Fewer items to consider when designing and more freedom in layout.

The output from each of the pyroelectric elements is the output circuit 3
02a, 302b, 302c, 302d, 302e, 3
It is taken out as an output signal via 02f, 302g, 302h.

An infrared lens 303 corresponds to an infrared optical system and forms an image of incident infrared rays on the pyroelectric elements 301a to 301h. Although the infrared lens is used in the third embodiment, the infrared optical system can be constructed by using an optical system using a concave mirror or a pinhole.

Reference numeral 304 denotes a rotary chopper corresponding to shutter means for controlling the incidence of infrared rays, which rotates about its center and intermittently interrupts the optical path of infrared rays.

Infrared rays from the space to be measured are intermittently incident on the infrared lens 303 by the rotary chopper 304. When the rotary chopper 304 blocks the optical path, infrared rays corresponding to the temperature of the rotary chopper 304 enter the infrared lens 303.

After the infrared rays pass through the infrared lens 303, the pyroelectric elements 301a ...
What forms an image on 301h is detected. Pyroelectric element 30
1a to 301h are arranged without waste so as to detect only infrared rays from necessary portions in consideration of the characteristics of the space under measurement.

As described above, the pyroelectric elements 301a-30
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 3
By arranging 01a to 301h in two rows of upper and lower four elements, the number of elements can be minimized, an increase in output circuits and processing systems can be suppressed, and miniaturization can be achieved. Furthermore, the pyroelectric element 301
By making a to 301h circular, it is possible to eliminate the directionality of the element and increase the degree of freedom in layout.

Next, a fourth embodiment of the present invention will be described. In FIG. 4, 401a, 401b, 401c, 401
Reference numerals d, 401e, 401f, 401g, and 401h are pyroelectric elements corresponding to a plurality of elements that detect infrared rays (FIG. 4).
As shown in FIG. 5, the elements are arranged in two rows of three elements in the upper row and five elements in the lower row. The pyroelectric element is formed by forming lead lanthanum titanate (PLT) in a thin film and attaching electrodes above and below the thin film.
When the intensity of infrared rays incident on the electrodes changes, an output is produced according to the magnitude of the change. In the fourth embodiment, the element is a pyroelectric element in which PLT is formed in a thin film, but PT, PZT, PL
Not only ceramics such as ZT and thin films, but also crystalline materials such as lithium tantalate and TGS, and organic films such as PVDF can be used.

The output from each of the pyroelectric elements is output by the output circuit 4.
02a, 402b, 402c, 402d, 402e, 4
It is taken out as an output signal via 02f, 402g, 402h.

Reference numeral 403 denotes an infrared lens corresponding to an infrared optical system, which forms an image of incident infrared light on the pyroelectric elements 401a to 401h. Although the infrared lens is used in the fourth embodiment, the infrared optical system can be configured by using an optical system using a concave mirror or a pinhole.

The widths of the pyroelectric elements 401a to 401h are the same reference length 407 placed at a distance desired to be captured by each element.
a to 407h are set to the length projected by the infrared lens 403, the lateral width of the pyroelectric element 401a is the projected length of 407a, and the lateral width of the pyroelectric element 401b is the projected length of 407b. Hereinafter, pyroelectric elements 401c to 40
A width of 1h is set. Reference lengths 407a to 407 whose distance from the infrared lens 403 is D (D <D ')
The widths of the pyroelectric elements 401a to 401h in which c is reflected are the reference lengths 407d to 407 whose distance is D '(D <D').
The width h is larger than the lateral width of the pyroelectric elements 401d to 401h. In addition, because of the aberration of the infrared lens 403, the projected length of 407b among 407a to 407c at the same distance is the longest, so that the horizontal width of 401b is set to be the longest.

Similarly, the vertical width is set to a length at which the same reference lengths 408a to 408h placed at the distances to be captured by the respective elements are projected by the infrared lens 403, and the vertical width of the pyroelectric element 401a is set. The vertical widths of the pyroelectric elements 401c to 401h are set such that the projected length of the 408a and the vertical width of the pyroelectric element 401b are the projected length of 408b.

As a result, the fields of view of the pyroelectric elements 401d to 401h can be made to have the same size at the distances desired to be captured by the respective elements.

Reference numeral 404 is a rotary chopper corresponding to shutter means for controlling the incidence of infrared rays, which rotates about its center and intermittently interrupts the optical path of infrared rays.

Infrared rays from the space to be measured enter the infrared lens 403 intermittently by the rotary chopper 404. When the rotary chopper 404 blocks the optical path, infrared rays corresponding to the temperature of the rotary chopper 404 enter the infrared lens 403.

After the infrared rays pass through the infrared lens 403, the pyroelectric elements 401a ...
What forms an image on 401h is detected. Pyroelectric element 40
1a to 401h are arranged without waste so as to detect only infrared rays from necessary portions in consideration of the characteristics of the measured space.

As shown above, the pyroelectric elements 401a-40
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 4
By arranging 01a to 401h in two rows of three elements in the upper row and five elements in the lower row, the number of elements can be minimized, the output circuit and the processing system can be prevented from increasing, and the size can be reduced. In addition, the pyroelectric elements 401d to 401d at the distances that each element wants to capture.
By setting the fields of view h to have the same size, it is possible to uniformize the position detection accuracy of the high temperature object.

Next, a fifth embodiment of the present invention will be described. (FIG. 5) 501a, 501b, 501c, 501
Reference numerals d, 501e, 501f, 501g, and 501h are pyroelectric elements corresponding to a plurality of elements for detecting infrared rays (FIG. 5).
As shown in FIG. 5, the elements are arranged in two rows of three elements in the upper row and five elements in the lower row. The pyroelectric element 501a includes four elements 511, 512, 513, and 514 corresponding to elements that detect infrared rays.
It is configured by connecting two in parallel. Although omitted in FIG. 5 for the sake of brevity, the pyroelectric elements 501b to 501h also have the same configuration as the pyroelectric element 501a.

The element is lead lanthanum titanate (PL
T) is formed in a thin film and electrodes are attached to the upper and lower sides of the thin film, and when the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. In the fifth embodiment, the element is P
Although LT is a thin film element, PT, PZ
Not to mention ceramics such as T and PLZT and thin films,
Crystal materials such as lithium tantalate and TGS, PV
It can also be configured by using an organic film such as DF.

The output from each of the pyroelectric elements is output by the output circuit 5.
02a, 502b, 502c, 502d, 502e, 5
It is taken out as an output signal via 02f, 502g, 502h.

Reference numeral 503 is an infrared lens corresponding to an infrared optical system, which forms an image of incident infrared light on the pyroelectric elements 501a to 501h. Although the infrared lens is used in the fifth embodiment, the infrared optical system can be configured by using an optical system using a concave mirror or a pinhole.

After the infrared rays pass through the infrared lens 503, the pyroelectric elements 501a ...
What forms an image on the element 501h is detected.
The pyroelectric elements 501a to 501h are arranged without waste so that only the infrared rays from the necessary portions are detected in consideration of the characteristics of the measurement space.

Each of the pyroelectric elements 501a to 501h has four
Since the two elements are connected in parallel, it is possible to detect the movement of the hot object even if the element projected when the hot object moves does not change. For example, a high-temperature object moves and is reflected on the element 511 of the pyroelectric element 501a,
If it moves further and is reflected on the element 514, the output signal of the output circuit 502a at this time is as shown in FIG.
It changes like 3). First, one peak waveform is generated at the time when it is reflected on the element 511 (t = t1), and since the projected image passes through the dead region while moving from the element 511 to the element 512, the output signal is once dropped, and when it is reflected on the element 512. A peak waveform occurs at (t = t2). By capturing this peak waveform, it is possible to know where the hot object moves. If the pyroelectric element is composed of one element, the movement of the hot object within one element cannot be detected.

As shown above, the pyroelectric elements 501a-50
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 5
By arranging 01a to 501h in two rows of three elements in the upper row and five elements in the lower row, the number of elements can be minimized, an increase in output circuits and processing systems can be suppressed, and miniaturization can be achieved. Furthermore, since the pyroelectric element is configured by connecting a plurality of elements in parallel, the motion of the high temperature object can be more accurately captured.

Next, a sixth embodiment of the present invention will be described. (FIG. 6) 601a, 601b, 601c, 601
d, 601e, 601f, 601g, and 601h are pyroelectric elements corresponding to a plurality of elements that detect infrared rays (FIG. 6).
As shown in FIG. 5, the elements are arranged in two rows of three elements in the upper row and five elements in the lower row. The pyroelectric element 601a is configured by arranging three elements 611, 612, and 613, which correspond to elements that detect infrared rays, in a comb shape and connecting them in parallel. Although omitted in FIG. 6 for simplicity, the pyroelectric elements 601b-60
1h also has the same configuration as the pyroelectric element 601a.

The element is lead lanthanum titanate (PL
T) is formed in a thin film and electrodes are attached to the upper and lower sides of the thin film, and when the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. In the sixth embodiment, the element is P
Although LT is a thin film element, PT, PZ
Not to mention ceramics such as T and PLZT and thin films,
Crystal materials such as lithium tantalate and TGS, PV
It can also be configured by using an organic film such as DF.

The output from each of the pyroelectric elements is the output circuit 6
02a, 602b, 602c, 602d, 602e, 6
It is taken out as an output signal through 02f, 602g and 602h.

An infrared lens 603 corresponds to an infrared optical system and forms an image of incident infrared rays on the pyroelectric elements 601a to 601h. Although the infrared lens is used in the sixth embodiment, the infrared optical system can be constructed by using an optical system using a concave mirror or a pinhole.

After the infrared rays pass through the infrared lens 603, the pyroelectric elements 601a ...
What forms an image on the element of 601h is detected.
The pyroelectric elements 601a to 601h are arranged without waste so as to detect only infrared rays from necessary portions in consideration of the characteristics of the space to be measured.

Each of the pyroelectric elements 601a to 601h has three
Since the two elements are connected in parallel, it is possible to detect the movement of the hot object even if the element projected when the hot object moves does not change. If the pyroelectric element is composed of one element, the movement of the hot object within one element cannot be detected. By arranging the three elements like comb teeth like the elements 611, 612, and 613 in the pyroelectric element 601a, it is possible to detect the movement of the high-temperature objects in the arranging direction with higher accuracy.

As described above, the pyroelectric elements 601a-60
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 6
By arranging 01a to 601h in two rows of three elements in the upper row and five elements in the lower row, the number of elements can be minimized, an increase in output circuits and processing systems can be suppressed, and miniaturization can be achieved. Furthermore, by arranging a plurality of elements in a comb-teeth shape and connecting them in parallel, the pyroelectric element can more accurately capture the motion of the high-temperature objects in the arranging direction.

Next, a seventh embodiment of the present invention will be described. (FIG. 7) 701a, 701b, 701c, 701
Reference numerals d, 701e, 701f, 701g, and 701h are pyroelectric elements corresponding to a plurality of elements that detect infrared rays (FIG. 7).
As shown in FIG. 5, the elements are arranged in two rows of three elements in the upper row and five elements in the lower row. The pyroelectric element 701a is configured by arranging three elements 711, 712, and 713, which correspond to elements for detecting infrared rays, in a comb shape and connecting them in parallel. Although omitted for simplicity in FIG. 7, the pyroelectric elements 701b to 701b
1h also has the same structure as the pyroelectric element 701a.

The element is lead lanthanum titanate (PL
T) is formed in a thin film and electrodes are attached to the upper and lower sides of the thin film, and when the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. In the seventh embodiment, the element is P
Although LT is a thin film element, PT, PZ
Not to mention ceramics such as T and PLZT and thin films,
Crystal materials such as lithium tantalate and TGS, PV
It can also be configured by using an organic film such as DF.

The output from each of the pyroelectric elements is output by the output circuit 7.
02a, 702b, 702c, 702d, 702e, 7
It is taken out as an output signal through 02f, 702g, and 702h.

Reference numeral 703 denotes an infrared lens corresponding to an infrared optical system, which forms an image of incident infrared light on the pyroelectric elements 701a to 701h. Although the infrared lens is used in the seventh embodiment, the infrared optical system can be constructed by using an optical system using a concave mirror or a pinhole.

After the infrared rays pass through the infrared lens 703, the pyroelectric elements 701a ...
What forms an image on the element 701h is detected.
The pyroelectric elements 701a to 701h are arranged without waste so as to detect only infrared rays from necessary portions in consideration of the characteristics of the measurement space.

Each of the pyroelectric elements 701a to 701h has three
Since the two elements are connected in parallel, it is possible to detect the movement of the hot object even if the element projected when the hot object moves does not change. If the pyroelectric element is composed of one element, the movement of the hot object within one element cannot be detected. By arranging the three elements like comb teeth like the elements 711, 712, and 713 in the pyroelectric element 701a, it is possible to detect the movement of the high-temperature objects in the arranging direction with higher accuracy.

Further, the elements 711, 712, 71
When the widths of the three elements and the widths between the elements are set to the shoulder width of the human body on the measurement distance as in 3, the movement of the human body can be detected particularly accurately. Explaining with (FIG. 7), the elements 711 and 7 forming the pyroelectric element 701a.
12,713 element width W1, inter-element width W2
When is equal to the width in which the shoulder width W of the human body 709 on the measurement distance is reflected, the movement of the human body can be captured well.

When the element width W1 and the inter-element width W2 of the elements 711, 712, 713 are made equal to the width of the shoulder width W of the human body 709 reflected on the measurement distance (FIG. 14), as shown in FIG. The peak waveform becomes maximum or minimum in a state A in which is just inserted between the elements or a state B in which the projected image of the human body is just reflected on the element. If the element width W1 and the element-to-element width W2 are narrower than in the state of (FIG. 14),
A state in which the projected image of the human body spans two elements occurs, the minimum value of the peak waveform rises, the difference between the maximum and minimum becomes small, and it becomes difficult to detect the movement of the human body. Conversely, when the element width W1 and the inter-element width W2 become wider than in the state of (FIG. 14), the output signal from the output circuit 702a is output by averaging the infrared rays reflected by the elements 711, 712, 713, and thus the human body. Is reflected in B
In the state, the peak maximum of the output is reduced by the increase of the element area, and it becomes difficult to detect the human body. Therefore, if the element width W1 and the element-to-element width W2 are made equal to the width in which the shoulder width W of the human body 709 on the measurement distance is reflected, the movement of the human body is most easily detected.

As described above, the pyroelectric elements 701a to 701a
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 7
By arranging 01a to 701h in two rows of three rows in the upper row and five rows in the lower row, the number of elements can be minimized, the output circuit and the processing system can be prevented from increasing, and the size can be reduced. Furthermore, by arranging a plurality of elements in a comb-teeth shape and connecting them in parallel, the pyroelectric element can more accurately capture the motion of the high-temperature objects in the arranging direction. In addition, element 7
By setting the widths of the three elements and the widths between the elements as 11, 712 and 713 to the shoulder width of the human body on the measurement distance, the movement of the human body can be detected particularly accurately.

Next, an eighth embodiment of the present invention will be described. (FIG. 8) 801a, 801b, 801c, 801
Reference numerals d, 801e, 801f, 801g, and 801h are pyroelectric elements corresponding to a plurality of elements that detect infrared rays (FIG. 8).
As shown in FIG. 5, the elements are arranged in two rows of three elements in the upper row and five elements in the lower row. The pyroelectric element 801a is configured by arranging three elements 811, 812 and 813 corresponding to elements for detecting infrared rays in a comb shape and connecting them in parallel. Although omitted in FIG. 8 for simplicity, the pyroelectric elements 801b-80
1h also has the same configuration as the pyroelectric element 601a.

The element is lead lanthanum titanate (P
A PLT thin film 822 which is a thin film and which corresponds to an element substrate, and a nichrome upper electrode 821 which corresponds to a light receiving electrode,
It is configured by attaching a nichrome lower electrode 823 corresponding to the back electrode, and when the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. The PLT thin film 822, the nichrome upper electrode 821, and the nichrome lower electrode 823 are all formed by a method such as sputtering, and a mask is used for pattern generation.

The output from each of the pyroelectric elements is output by the output circuit 8
02a, 802b, 802c, 802d, 802e, 8
It is taken out as an output signal via 02f, 802g, and 802h.

In (b), reference numeral 803 denotes an infrared lens corresponding to an infrared optical system, which detects incident infrared rays by a pyroelectric element 801a.
Image on ˜801 h. Although the infrared lens is used in the eighth embodiment, the infrared optical system can be configured by using an optical system using a concave mirror or a pinhole.

After the infrared rays pass through the infrared lens 803, the pyroelectric elements 801a to 801a ...
What forms an image on the element of 801h is detected.
The pyroelectric elements 801a to 801h are arranged without waste so as to detect only infrared rays from necessary portions in consideration of the characteristics of the space to be measured.

Each of the pyroelectric elements 801a to 801h has three
Since the two elements are connected in parallel, it is possible to detect the movement of the hot object even if the element projected when the hot object moves does not change. If the pyroelectric element is composed of one element, the movement of the hot object within one element cannot be detected. By arranging the three elements like comb teeth like the elements 811, 812, and 813 in the pyroelectric element 801a, it is possible to detect the movement of the high temperature object in the arranging direction with higher accuracy.

In the pyroelectric element 801a, the element width W1 and the width W2 between elements are the PLT thin film 822.
, And the nichrome upper electrode 821 and the nichrome lower electrode 823 are formed as one each. Therefore, the elements 811, 812, and 813 are inevitably connected in parallel when the nichrome upper electrode 821 and the nichrome lower electrode 823 are formed by a method such as sputtering, so that the elements can be easily connected to each other. Further, since the width of the connection is widened, failures and defects such as disconnection can be reduced, and reliability and yield can be improved.

As shown above, the pyroelectric elements 801a-80
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 8
By arranging 01a to 801h in two rows of three elements in the upper row and five elements in the lower row, the number of elements can be minimized, an increase in output circuits and processing systems can be suppressed, and miniaturization can be achieved. Furthermore, by arranging a plurality of elements in a comb-teeth shape and connecting them in parallel, the pyroelectric element can more accurately capture the motion of the high-temperature objects in the arranging direction. Further, the width W1 of the element and the width W2 between the elements are set to the PLT thin film 82.
According to the definition in 2, the elements can be easily connected to each other and the width of the connection is widened, so that failures and defects such as disconnection can be reduced, and reliability and yield can be improved.

Next, a ninth embodiment of the present invention will be described. (FIG. 9) 901a, 901b, 901c, 901
Reference numerals d, 901e, 901f, 901g, and 901h denote pyroelectric elements corresponding to a plurality of elements for detecting infrared rays (FIG. 9).
As shown in FIG. 5, the elements are arranged in two rows of three elements in the upper row and five elements in the lower row. The pyroelectric element 901a is configured by arranging three elements 911, 912, and 913 corresponding to elements that detect infrared rays in a comb tooth shape and connecting them in parallel. Although omitted in FIG. 9 for simplicity, the pyroelectric elements 901b to 901b
1h also has the same configuration as the pyroelectric element 901a.

The element is lead lanthanum titanate (P
A PLT thin film 922 corresponding to an element substrate, in which LT) is formed into a thin film, and a nichrome upper electrode 921 corresponding to a light receiving electrode,
It is configured by attaching a nichrome lower electrode 923 corresponding to the back electrode, and when the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. The PLT thin film 922, the nichrome upper electrode 921, and the nichrome lower electrode 923 are all formed by a method such as sputtering, and a mask is used for pattern generation.

The output from each of the pyroelectric elements is output by the output circuit 9
02a, 902b, 902c, 902d, 902e, 9
It is taken out as an output signal through 02f, 902g and 902h.

In (b), reference numeral 903 denotes an infrared lens corresponding to an infrared optical system, which detects incident infrared rays by a pyroelectric element 901a.
Image on ˜901h. Although the infrared lens is used in the ninth embodiment, the infrared optical system can be constructed by using an optical system using a concave mirror or a pinhole.

After the infrared rays pass through the infrared lens 903, the pyroelectric elements 901a ...
What forms an image on the element of 901h is detected.
The pyroelectric elements 901a to 901h are arranged without waste so as to detect only infrared rays from necessary portions in consideration of the characteristics of the space to be measured.

Each of the pyroelectric elements 901a to 901h has three
Since the two elements are connected in parallel, it is possible to detect the movement of the hot object even if the element projected when the hot object moves does not change. If the pyroelectric element is composed of one element, the movement of the hot object within one element cannot be detected. Then, by arranging the three elements like comb teeth like the elements 911, 912, and 913 in the pyroelectric element 901a, the motion of the high temperature objects in the arranging direction can be detected more accurately.

In the pyroelectric element 901a, the element width W1 and the element width W2 can be defined by the nichrome upper electrode 921 and the nichrome lower electrode 923,
The PLT thin film 922 is formed as one. As the size of the PLT thin film 922 is reduced, the uniformity of the curtain is deteriorated due to the influence of the edge of the mask, and the sensitivity variation between the elements becomes large, making it unusable. When the element width W1 and the element width W2 are defined by the nichrome upper electrode 921 and the nichrome lower electrode 923, a finer pattern can be formed and the resolution can be improved.

As described above, the pyroelectric elements 901a-90
By arranging 1h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element part. Furthermore, the pyroelectric element 9
By arranging 01a to 901h in two rows of three elements in the upper row and five elements in the lower row, the number of elements can be minimized, an increase in output circuits and processing systems can be suppressed, and miniaturization can be achieved. Furthermore, by arranging a plurality of elements in a comb-teeth shape and connecting them in parallel, the pyroelectric element can more accurately capture the motion of the high-temperature objects in the arranging direction. Further, the width W1 of the element and the width W2 between the elements are defined by the nichrome upper electrode 921 and the nichrome lower electrode 923, so that the resolution can be improved.

Next, a tenth embodiment of the present invention will be described.
(Fig. 10) 1001a, 1001b, 1001
c, 1001d, 1001e, 1001f, 1001
Reference numerals g and 1001h denote pyroelectric elements corresponding to a plurality of elements that detect infrared rays, and are arranged in two rows of three rows in the upper row and five rows in the lower row as shown in FIG. Pyroelectric element 1001a
Is an element 101 corresponding to an element for detecting infrared rays
It is configured by arranging three of 1, 10, 12 and 1013 in a comb shape and connecting them in parallel. Although omitted in FIG. 10 for the sake of brevity, the pyroelectric elements 1001b to 1001h also have the same configuration as the pyroelectric element 1001a.

The element is lead lanthanum titanate (P
The PLT thin film 1022 corresponding to the element substrate and the nichrome upper electrode 1021 corresponding to the light receiving electrode in which LT) is formed in a thin film.
And a nichrome lower electrode 1023, which corresponds to the back electrode, is attached, and when the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. PLT thin film 102
2, Nichrome upper electrode 1021, Nichrome lower electrode 1023
Are formed by a method such as sputtering, and a mask is used for pattern generation.

The output from each of the pyroelectric elements is the output circuit 1
002a, 1002b, 1002c, 1002d, 10
It is taken out as an output signal through 02e, 1002f, 1002g, 1002h.

In (b), reference numeral 1003 denotes an infrared lens corresponding to an infrared optical system, which detects incident infrared rays by the pyroelectric element 100.
An image is formed on 1a to 1001h. Although the infrared lens is used in the tenth embodiment, the infrared optical system can be constructed by using an optical system using a concave mirror or a pinhole.

After the infrared rays pass through the infrared lens 1003, the pyroelectric element 1001 arranged at a preset position.
What forms an image on the elements a to 1001h is detected. The pyroelectric elements 1001a to 1001h are arranged without waste in consideration of the characteristics of the space to be measured so as to detect only infrared rays from necessary portions.

Since each of the pyroelectric elements 1001a to 1001h has three elements connected in parallel, it is possible to detect the movement of the high temperature object even if the element projected when the high temperature object moves does not change. If the pyroelectric element is composed of one element, the movement of the hot object within one element cannot be detected. By arranging the three elements like comb teeth like the elements 1011, 1012, and 1013 in the pyroelectric element 1001a, it is possible to detect the motion of the high temperature object in the arranging direction with higher accuracy.

In the pyroelectric element 1001a, the element width W1 and the element-to-element width W2 are the Nichrome upper electrode 1021, the Nichrome lower electrode 1023, and the PLT thin film 10.
22 is defined. If the nichrome upper electrode 1021, the nichrome lower electrode 1023, and the PLT thin film 1022 have an extra area, the infrared rays focused on the extra area and the heat conduction have an effect. Therefore, if the element width W1 and the element-to-element width W2 are defined as in the tenth embodiment, disturbance is reduced and detection can be performed with high sensitivity.

As described above, the pyroelectric elements 1001a-1001
By arranging 001h two-dimensionally, a mechanism for rotating the element portion can be eliminated and an inexpensive device can be supplied. Further, by arranging the pyroelectric elements 1001a to 1001h in two rows of three elements in the upper row and five elements in the lower row, the number of elements can be minimized, the output circuit and the processing system can be prevented from increasing, and the size can be reduced. Furthermore, by arranging a plurality of elements in a comb-teeth shape and connecting them in parallel, the pyroelectric element can more accurately capture the motion of the high-temperature objects in the arranging direction. Further, the width W1 of the element and the width W2 between the elements are defined by the nichrome upper electrode 1021, the nichrome lower electrode 1023, and the PLT thin film 1022, so that the sensitivity can be improved.

Next, an eleventh embodiment of the present invention will be described.
In FIG. 11, 1101a, 1101b, 1101
c, 1101d, 1101e, 1101f, 1101
Reference numerals g and 1101h are pyroelectric elements corresponding to a plurality of elements for detecting infrared rays, and are arranged in two rows of three elements in the upper row and five elements in the lower row as shown in FIG. The pyroelectric element is formed by forming lead lanthanum titanate (PLT) in a thin film and attaching electrodes above and below the thin film, and when the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. In the eleventh embodiment, the element is a pyroelectric element in which PLT is formed into a thin film. However, not only ceramics such as PT, PZT, PLZT and thin films, but also crystalline materials such as lithium tantalate and TGS, organic materials such as PVDF, etc. It can also be configured by using a film.

The output from each of the pyroelectric elements is the output circuit 1
102a, 1102b, 1102c, 1102d, 11
It is taken out as an output signal via 02e, 1102f, 1102g, 1102h.

Reference numeral 1103 denotes an infrared lens corresponding to an infrared optical system, which detects incident infrared rays by pyroelectric elements 1101a to 1101.
Image on h. Although the infrared lens is used in the eleventh embodiment, the infrared optical system can be configured by using an optical system using a concave mirror or a pinhole.

After the infrared ray passes through the infrared lens 1103, the pyroelectric element 1101 arranged at a preset position.
What forms an image on a to 1101h is detected. The pyroelectric elements 1101a to 1101h are arranged without waste so as to detect only infrared rays from a necessary portion in consideration of the characteristics of the measured space.

Further, there is an aberration of the infrared lens 1103, and particularly in a wide-angle lens, the aberration becomes large as the distance from the optical axis increases, and what is originally a straight line becomes a curved projected image. In the eleventh embodiment, as shown in (FIG. 11), the outer peripheral shape of the pyroelectric elements 1101 a to 1101 h in which the aberration is particularly large is formed in consideration of the aberration, so that a visual field without distortion can be obtained.

As described above, the pyroelectric elements 1101a to 1101a-1
By arranging 101h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element portion. Further, by arranging the pyroelectric elements 1101a to 1101h in two rows of three rows in the upper row and five rows in the lower row, the number of elements can be minimized, the output circuit and the processing system can be prevented from increasing, and the size can be reduced. Further, by making the outer peripheral shape of the pyroelectric elements 1101a to 1101h into a shape in consideration of aberration, it is possible to obtain a visual field without distortion.

Next, a twelfth embodiment of the present invention will be described.
(FIG. 12) 1201a, 1201b, 1201
c, 1201d, 1201e, 1201f, 1201
Reference numerals g and 1201h are pyroelectric elements corresponding to a plurality of elements that detect infrared rays, and are arranged in two rows of three elements in the upper row and five elements in the lower row as shown in FIG. The pyroelectric element is formed by forming lead lanthanum titanate (PLT) in a thin film and attaching electrodes above and below the thin film, and when the intensity of infrared rays incident on the electrode changes, an output is output according to the magnitude of the change. In the twelfth embodiment, the element is a pyroelectric element in which PLT is formed in a thin film, but not only ceramics such as PT, PZT, PLZT and a thin film, but also crystalline materials such as lithium tantalate and TGS, organic materials such as PVDF and the like. It can also be configured by using a film.

The output from each of the pyroelectric elements is the output circuit 1
202a, 1202b, 1202c, 1202d, 12
It is taken out as an output signal through 02e, 1202f, 1202g, 1202h.

Reference numeral 1203 denotes an infrared lens corresponding to an infrared optical system, which detects incident infrared rays from the pyroelectric elements 1201a to 1201.
Image on h. Although the infrared lens is used in the twelfth embodiment, the infrared optical system can be configured by using an optical system using a concave mirror or a pinhole.

After the infrared rays pass through the infrared lens 1203, the pyroelectric element 1201 arranged at a preset position.
What forms an image on a to 1201h is detected. The pyroelectric elements 1201a to 1201h are arranged without waste so as to detect only infrared rays from necessary portions in consideration of the characteristics of the space to be measured.

Further, there is an aberration of the infrared lens 1203, and particularly in a wide-angle lens, the aberration becomes large as the distance from the optical axis increases, and what is originally a straight line becomes a curved projected image. In the twelfth embodiment, as shown in (FIG. 12), by disposing the pyroelectric elements 1201a to 1201h at positions taking into consideration aberrations, it is possible to obtain a visual field without distortion.

As described above, the pyroelectric elements 1201a to 1201a-1
By arranging 201h two-dimensionally, an inexpensive device can be supplied without a mechanism for rotating the element portion. Further, by arranging the pyroelectric elements 1201a to 1201h in two rows of three elements in the upper row and five elements in the lower row, the number of elements can be minimized, the output circuit and the processing system can be prevented from increasing, and the size can be reduced. Furthermore, by making the outer peripheral shapes of the pyroelectric elements 1201a to 1201h into shapes in consideration of aberration, it is possible to obtain a visual field arrangement without distortion.

[0128]

As described above, the present invention eliminates the mechanism for rotating the element portion by arranging a plurality of elements for detecting infrared rays two-dimensionally, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. Since the number of elements is set to the required minimum number and the increase of the output circuit and the processing system is suppressed by arranging in the above, a compact and inexpensive infrared detecting device can be supplied.

Further, according to the present invention, by arranging a plurality of elements for detecting infrared rays two-dimensionally, the mechanism for rotating the element section is eliminated, and the change of the infrared intensity in the plane where the infrared rays from the space to be measured are projected. The rows are arranged in a larger direction, and by arranging multiple elements so that the number of elements in each row is larger than the number of rows, the number of elements can be minimized while preventing deterioration of measurement accuracy, and the output circuit and processing system can By suppressing the increase,
It is possible to supply an infrared detector that is compact and inexpensive and has high measurement accuracy.

Further, in the present invention, by arranging a plurality of elements for detecting infrared rays two-dimensionally, the mechanism for rotating the element part is eliminated, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. In order to suppress the increase in the output circuit and processing system by reducing the number of elements to the required minimum number, and by making the shape of the element circular, the directionality of the element was eliminated and the degree of freedom of layout was increased. It is possible to supply an infrared sensor that is compact and inexpensive and has an optimal field of view.

Further, in the present invention, as described above, a plurality of elements for detecting infrared rays are two-dimensionally arranged to eliminate the mechanism for rotating the element part, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. In order to minimize the number of elements and increase the number of output circuits and processing systems, the vertical and horizontal widths of the multiple elements are set to the width at which infrared rays are projected from the reference width at the distance specific to each element. As a result, it is possible to provide an infrared detection device in which the measurement fields of view have equal intervals in the measurement space, are small in size, are inexpensive, and have the same accuracy in detecting the existence position of a high-temperature object.

Further, in the present invention, as described above, the mechanism for rotating the element portion by arranging a plurality of elements for detecting infrared rays two-dimensionally is eliminated, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. By arranging the number of elements to the required minimum number and suppressing the increase of output circuits and processing systems, the elements are configured by electrically connecting multiple elements that detect infrared rays in parallel. When moving, the movement can be detected even within the range equivalent to the visual field of one element, and it is possible to supply an infrared sensor that is small and inexpensive, and can detect small movement of a high temperature object.

Further, in the present invention, as described above, a mechanism for rotating the element portion by arranging a plurality of elements for detecting infrared rays two-dimensionally is eliminated, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. By arranging them, the number of elements is minimized to prevent the output circuit and processing system from increasing, and a plurality of elements that detect infrared rays are arranged in a comb shape and electrically connected in parallel. An infrared sensor that can detect movement of a high-temperature object within the range equivalent to the field of view of one element, especially in the direction along which elements are arranged, is small and inexpensive, and detects small movements of a high-temperature object in the direction in which elements are arranged. Can be supplied.

Further, in the present invention, as described above, a plurality of elements for detecting infrared rays are two-dimensionally arranged to eliminate the mechanism for rotating the element part, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. In order to minimize the number of elements and increase the number of output circuits and processing systems, it is possible to electrically connect multiple elements that detect infrared rays in parallel to reduce the width of elements and the width between elements. Since the elements are arranged side by side so as to correspond to the shoulder width of the human body in the space to be measured, it is possible to provide an infrared sensor that is small and inexpensive, and that also detects a small movement of the human body in the arrangement direction of the elements.

Further, in the present invention, as described above, a plurality of elements for detecting infrared rays are two-dimensionally arranged to eliminate the mechanism for rotating the element section, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. The number of elements is reduced to the required minimum by increasing the number of elements to prevent the output circuit and the processing system from increasing, and a plurality of elements that detect infrared rays are electrically connected in parallel to form an element. The movement of the high-temperature object, especially in the direction of the elements, within the range equivalent to the field of view can be noticed remarkably, and an element substrate made of an infrared detection material and a light-receiving electrode made of a material that absorbs infrared rays are provided. By configuring the element that detects infrared rays with the light-receiving electrode and the back electrode provided on the opposite side, and defining the width of the element substrate, it is small and inexpensive, and it can detect small movements of high-temperature objects in the element arrangement direction. Useless wiring around Without electrical parallel connection of elements it can provide easy infrared sensor.

Further, in the present invention, as described above, the mechanism for rotating the element portion by arranging a plurality of elements for detecting infrared rays in a two-dimensional manner is eliminated, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. By arranging the elements, the number of elements is reduced to the required minimum to prevent an increase in output circuits and processing systems, and a plurality of elements that detect infrared rays are electrically connected in parallel to form an element. It becomes possible to remarkably move especially in the direction in which elements are arranged in a high-temperature object within a range equivalent to a visual field, an element substrate made of an infrared detection material, and a light-receiving electrode made of a material that absorbs infrared rays, An element that detects infrared rays is composed of the light-receiving electrode and the back electrode provided on the opposite side, and by defining the width of the light-receiving electrode, it is small and inexpensive, and can detect small movements of high-temperature objects in the direction in which the elements are arranged. Easy to make element base It can supply an infrared sensor.

Further, in the present invention, as described above, the plurality of elements for detecting infrared rays are two-dimensionally arranged to eliminate the mechanism for rotating the element section, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. The number of elements is reduced to the required minimum by increasing the number of elements to prevent the output circuit and the processing system from increasing, and a plurality of elements that detect infrared rays are electrically connected in parallel to form an element. The movement of the high-temperature object, especially in the direction of the elements, within the range equivalent to the field of view can be noticed remarkably, and an element substrate made of an infrared detection material and a light-receiving electrode made of a material that absorbs infrared rays are provided. By configuring an element for detecting infrared rays with the light receiving electrode and the back electrode provided on the opposite side, and defining the width of the element substrate and the width of the light receiving electrode,
It is small and inexpensive, and can detect small movements of high-temperature objects in the direction in which elements are arranged, and can also provide an infrared sensor with high sensitivity.

Further, according to the present invention, as described above, the mechanism for rotating the element portion by arranging a plurality of elements for detecting infrared rays two-dimensionally is eliminated, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. By arranging it, the number of elements is reduced to the required minimum to prevent the output circuit and processing system from increasing, and the element shape is adjusted to correct the aberration of the infrared optical system and measure any part of the measured space. As a result, it is possible to supply an infrared sensor that is small in size, inexpensive, and has a field of view without distortion.

Further, in the present invention, as described above, the mechanism for rotating the element portion is eliminated by arranging a plurality of elements for detecting infrared rays two-dimensionally, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. By arranging it, the number of elements is minimized to prevent the output circuit and processing system from increasing, and the element arrangement is arranged so that the aberration of the infrared optical system is corrected and any part of the measured space is measured. As a result, it is possible to supply an infrared sensor that is small in size, inexpensive, and has a visual field arrangement without distortion.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a first embodiment of the present invention.

FIG. 2 is an explanatory diagram of a second embodiment of the present invention.

FIG. 3 is an explanatory diagram of a third embodiment of the present invention.

FIG. 4 is an explanatory diagram of a fourth embodiment of the present invention.

FIG. 5 is an explanatory diagram of a fifth embodiment of the present invention.

FIG. 6 is an explanatory diagram of a sixth embodiment of the present invention.

FIG. 7 is an explanatory diagram of a seventh embodiment of the present invention.

8A and 8B are explanatory views of an eighth embodiment of the present invention, in which FIG. 8A is an element layout diagram and FIG. 8B is a sensor cross-sectional view.

9A and 9B are explanatory views of a ninth embodiment of the present invention, in which FIG. 9A is an element layout diagram and FIG. 9B is a sensor cross-sectional view.

10A and 10B are explanatory views of a tenth embodiment of the present invention, in which FIG. 10A is an element layout diagram and FIG.

FIG. 11 is an explanatory diagram of an eleventh embodiment of the present invention.

FIG. 12 is an explanatory diagram of a twelfth embodiment of the present invention.

FIG. 13 is a graph of the output signal of the pyroelectric element according to the fifth embodiment of the present invention.

FIG. 14 is an explanatory diagram related to the element width in the seventh embodiment of the present invention.

[Explanation of symbols]

 101a to 101h Pyroelectric element 102a to 102h Output circuit 103 Infrared lens 104 Rotating chopper 201a to 201h Pyroelectric element 202a to 202h Output circuit 203 Infrared lens 204 Rotating chopper 205 High temperature object 206 Moving direction 301a to 301h Pyroelectric element 302a to 302h Output circuit 303 Infrared lens 304 Rotating chopper 401a to 401h Pyroelectric element 402a to 402h Output circuit 403 Infrared lens 404 Rotating chopper 407a to 407h Reference length 408a to 408h Reference length 501a to 501h Pyroelectric element 502a to 502h Output Circuit 503 Infrared lens 511-514 Element 601a-601h Pyroelectric element 602a-602h Output circuit 603 Infrared lens 611-613 Element 701a-701h Focus Element 702a-702h Output circuit 703 Infrared lens 711-713 Element 709 Measurement position Human body 801a-801h Pyroelectric element 802a-802h Output circuit 803 Infrared lens 811-813 Element 821 Nichrome upper electrode 822 PLT thin film 823 Nichrome lower electrode 901a- 901h Pyroelectric element 902a to 902h Output circuit 903 Infrared lens 911 to 913 Element 921 Nichrome upper electrode 922 PLT thin film 923 Nichrome lower electrode 1001a to 1001h Pyroelectric element 1002a to 1002h Output circuit 1003 Infrared lens 1011 to 1013 Element 1021 Nichrome upper Electrode 1022 PLT thin film 1023 Nichrome lower electrode 1101a to 1101h Pyroelectric element 1102a to 1102h Output circuit 1103 Infrared lens S 1111-1113 element 1201a-1201h pyroelectric element 1202a-1202h output circuit 1203 infrared lens 1211-1213 element

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Reference number within the agency FI Technical display location G01J 5/02 Q 5/10 A (72) Inventor Satoshi Ito 1006 Kadoma, Kadoma, Osaka Prefecture Matsushita Denki Sangyo Co., Ltd.

Claims (13)

[Claims] 1. A plurality of elements for detecting infrared rays, an output circuit for extracting an output signal from each of the plurality of elements, an infrared optical system for forming an image of the infrared rays on the plurality of elements, and an infrared ray incidence unit. An infrared detection device comprising shutter means for controlling, wherein the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. 2. A plurality of elements for detecting infrared rays, an output circuit for extracting an output signal from each of the plurality of elements, an infrared optical system for forming an image of the infrared rays on the plurality of elements, and an infrared ray incidence unit. The shutter means for controlling the infrared rays from the space to be measured forms a row in the direction in which the change of the infrared intensity is large in the plane where the infrared rays are projected, and the plurality of elements in each row are larger than the number of rows. Infrared detector characterized by arranging elements. 3. A plurality of circular elements for detecting infrared rays, an output circuit for extracting an output signal from each of the elements, an infrared optical system for forming infrared rays on the plurality of elements, and an infrared ray incident. An infrared sensor comprising a shutter unit for controlling a plurality of rows, the plurality of elements being arranged in a plurality of rows with a unique number of elements for each row. 4. A plurality of elements for detecting infrared rays, an output circuit for extracting an output signal from each of the plurality of elements, an infrared optical system for forming an image of the infrared rays on the plurality of elements, and control of incidence of infrared rays. Comprising a shutter means for arranging the plurality of elements in a plurality of rows with a unique number of elements for each row, the vertical and horizontal widths of the elements are the widths at which infrared rays are projected from the reference width area at an arbitrary distance, Infrared detection device, wherein the detection width of the element in the measurement space is uniform. 5. A plurality of elements in which a plurality of elements for detecting infrared rays are electrically connected in parallel, an output circuit for extracting an output signal from each of the elements, and infrared rays on the plurality of elements. An infrared sensor comprising an infrared optical system for forming an image, wherein the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. 6. An output circuit for extracting an output signal from each of a plurality of elements in which a plurality of elements for detecting infrared rays are arranged in a comb shape and the plurality of elements are electrically connected in parallel. And an infrared optical system for forming an image of infrared rays on the plurality of elements, and the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. 7. A plurality of elements for detecting infrared rays are electrically connected in parallel, and the width of the elements and the width between the elements are
A plurality of elements arranged so as to correspond to the shoulder width of the human body in the space to be measured, the element output circuit for extracting an output signal from each of the elements, and infrared optics for forming infrared rays on the plurality of elements. An infrared sensor comprising a system, wherein the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. 8. A plurality of infrared detecting elements, each of which is composed of an element substrate made of an infrared detecting material, a light receiving electrode made of an infrared absorbing material, and a back electrode provided on the opposite side of the light receiving electrode. An element electrically connected in parallel, an output circuit for extracting an output signal from the element, and an infrared optical system for forming infrared rays on the plurality of elements, the number of elements unique to each column. The infrared sensor is characterized by being arranged in a plurality of rows and defining only the width of the element substrate. 9. A plurality of elements for detecting infrared rays, each of which includes an element substrate made of an infrared ray detecting material, a light receiving electrode made of a material that absorbs infrared rays, and a back electrode provided on the opposite side of the light receiving electrode. An element electrically connected in parallel, an output circuit for extracting an output signal from the element, and an infrared optical system for forming infrared rays on the plurality of elements, the number of elements unique to each column. The infrared sensor is characterized by being arranged in a plurality of rows and defining only the width of the light receiving electrode. 10. An element substrate made of an infrared detecting material,
A light receiving electrode made of a material that absorbs infrared rays, and an element in which a plurality of elements for detecting infrared rays, which are composed of a back electrode provided on the side opposite to the light receiving electrode, are electrically connected in parallel, and an output signal from the element is output. An output optical circuit for taking out light and an infrared optical system for forming an infrared ray on the plurality of elements are arranged. The plurality of elements are arranged in a plurality of rows with a unique number of elements for each row, and the width of the element base and the light receiving An infrared sensor characterized by defining the width of an electrode. 11. An infrared optical system having a plurality of elements for detecting infrared rays and an output circuit for extracting an output signal from each of the elements, wherein the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. An infrared sensor and an infrared detector characterized in that the element shape is adjusted so that the incident infrared ray is imaged on the element and the aberration of the infrared optical system is corrected and measured. 12. An infrared optical system having a plurality of elements for detecting infrared rays and an output circuit for extracting an output signal from each of the elements, wherein the plurality of elements are arranged in a plurality of rows with a unique number of elements for each row. An infrared sensor characterized by arranging the elements so that the incident infrared rays are imaged on the element and the aberration of the infrared optical system is corrected and measured. 13. An element for detecting infrared rays is formed by forming a material having a pyroelectric property into a thin film to form an element for detecting infrared rays. 10, 11,
13. The infrared detection device and infrared sensor according to any one of 12.