JPH0820673A - Inorganic filler for resin and epoxy resin composition - Google Patents

Inorganic filler for resin and epoxy resin composition

Info

Publication number
JPH0820673A
JPH0820673A JP17597794A JP17597794A JPH0820673A JP H0820673 A JPH0820673 A JP H0820673A JP 17597794 A JP17597794 A JP 17597794A JP 17597794 A JP17597794 A JP 17597794A JP H0820673 A JPH0820673 A JP H0820673A
Authority
JP
Japan
Prior art keywords
inorganic filler
epoxy resin
resin
filler
pts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17597794A
Other languages
Japanese (ja)
Other versions
JP3033445B2 (en
Inventor
Koji Futatsumori
浩二 二ッ森
Kazutoshi Tomiyoshi
和俊 富吉
Toshio Shiobara
利夫 塩原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP6175977A priority Critical patent/JP3033445B2/en
Publication of JPH0820673A publication Critical patent/JPH0820673A/en
Application granted granted Critical
Publication of JP3033445B2 publication Critical patent/JP3033445B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To obtain an inorganic filler consisting of a specific composition, having a low viscosity at a room temperature or when melted at a high temperature even in the case where a large amount of the filler is compounded into an epoxy resin, etc., excellent in fluidity and little in aggregate generation when added to a resin. CONSTITUTION:This filler is obtained by compounding (A) 100 pts.wt., of a surface-treated filler obtained by treating 100 pts.wt. of an inorganic filler (e.g. crystalline silica and alumina) having an average particle diameter of 5-40mum with an alkoxy-containing silane (e.g. 3-glycidoxypropyltrimethoxysilane or phenyltrimethoxysilane) or its partially hydrated substance with (B) 1-40 pts.wt. of an inorganic filler which is not treated with the alkoxy-containing silane or its partially hydrated material and having an average diameter of <=4mum. Further, the amount of the alkoxy-containing silane used in the component A is preferably 0.1-0.6 pts.wt. based on 100 pts.wt. of the inorganic filler. The mixture of the component A with the component B is preferably passed through a 100-200 mesh sieve to remove aggregates.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、吸湿性低下などを目的
としてエポキシ樹脂などに大量に配合しても、常温乃至
高温溶融状態における粘度が低く、流動特性が良好であ
ると共に、樹脂組成物中で凝集物を与えることが少ない
樹脂用無機質充填剤及び該充填剤を用いたエポキシ樹脂
組成物に関する。
BACKGROUND OF THE INVENTION The present invention provides a resin composition which has a low viscosity at room temperature to a high temperature in a molten state and has good flow characteristics even when it is mixed in a large amount with an epoxy resin for the purpose of lowering hygroscopicity. Among them, the present invention relates to an inorganic filler for a resin that rarely gives an aggregate and an epoxy resin composition using the filler.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】現在、
半導体産業の中で樹脂封止型のダイオード、トランジス
タ、IC、LSI、超LSIが主流となっており、この
封止樹脂としてエポキシ樹脂は一般に他の熱硬化性樹脂
に比べて成形性、接着性、電気特性、機械特性、耐湿性
などに優れているため、エポキシ樹脂組成物で半導体装
置を封止することが多く行われている。
2. Description of the Related Art
In the semiconductor industry, resin-encapsulated diodes, transistors, ICs, LSIs, and VLSIs are the mainstream, and epoxy resin is generally used as the encapsulating resin in comparison with other thermosetting resins in terms of moldability and adhesiveness. Because of its excellent electrical properties, mechanical properties, moisture resistance, etc., semiconductor devices are often sealed with epoxy resin compositions.

【0003】最近においては、これらの半導体装置は集
積度が益々大きくなり、それに応じてチップ寸法も大き
くなりつつある。一方、これに対してパッケージ外観寸
法は電子機器の小型化、軽量化の要求に伴い、薄型化が
進んでいる。更に、半導体部品を回路基板へ取り付ける
方法も、基板上の部品の高密度化や基板の薄型化のた
め、半導体部品の表面実装化が幅広く行われるようにな
ってきた。
Recently, the degree of integration of these semiconductor devices has been increasing, and the chip size has been increasing accordingly. On the other hand, the external dimensions of the package are becoming thinner along with the demand for smaller and lighter electronic devices. Further, also in the method of mounting a semiconductor component on a circuit board, the surface mounting of the semiconductor component has been widely performed due to the high density of components on the substrate and the thinning of the substrate.

【0004】しかしながら、半導体装置を表面実装する
場合、半導体装置全体を半田槽に浸漬するか又は半田が
溶融するゾーンを通過させる方法が一般的であるが、そ
の際の熱衝撃により封止樹脂層にクラックが発生した
り、リードフレームやチップと封止樹脂との界面に剥離
が生じたりする。このようなクラックや剥離は、表面実
装時の熱衝撃以前に半導体装置の封止樹脂層が吸湿して
いると更に顕著なものとなるが、実際の作業工程におい
ては、封止樹脂層の吸湿は避けられず、このため実装後
のエポキシ樹脂で封止した半導体装置の信頼性が大きく
損なわれる場合がある。
However, when the semiconductor device is surface-mounted, a method of immersing the entire semiconductor device in a solder bath or passing it through a zone where the solder is melted is generally used. However, the thermal shock at that time causes a sealing resin layer. Cracks may occur, or peeling may occur at the interface between the lead frame or chip and the sealing resin. Such cracks and peeling become more noticeable if the sealing resin layer of the semiconductor device absorbs moisture before the thermal shock during surface mounting, but in the actual working process, the moisture absorption of the sealing resin layer Inevitably, the reliability of the semiconductor device sealed with the epoxy resin after mounting may be greatly impaired.

【0005】このような状況から、封止樹脂層の吸湿を
少なくして表面実装時のクラックや剥離の発生を防止す
るため、低吸湿性の封止樹脂が要求されてきており、こ
のような低吸湿性の封止樹脂を得る方法の一つに無機質
充填剤を多量に配合することが有効であることが知られ
ている。
Under these circumstances, a low hygroscopic encapsulating resin has been required in order to reduce moisture absorption of the encapsulating resin layer and prevent cracks and peeling during surface mounting. It is known that adding a large amount of an inorganic filler is effective as one of the methods for obtaining a low hygroscopic sealing resin.

【0006】ところが、封止樹脂組成物に無機質充填剤
を多量に配合すると、溶融粘度が高くなってしまい、流
動特性が悪くなってしまうという問題があるが、上述し
た半導体装置をトランスファー成形する場合、樹脂組成
物の溶融粘度はできる限り低くする必要がある。
However, when a large amount of an inorganic filler is added to the encapsulating resin composition, there is a problem that the melt viscosity increases and the flow characteristics deteriorate, but when the above-mentioned semiconductor device is transfer molded. The melt viscosity of the resin composition should be as low as possible.

【0007】この場合、溶融粘度を低くするため、粒径
の大きい充填剤と粒径の小さい充填剤とを併用する方法
が知られており、また樹脂と無機質充填剤との界面を制
御するため、無機質充填剤をシランカップリング剤で表
面処理する方法が知られているが、これらの方法でもな
お常温乃至高温溶融状態における粘度の低下が不十分で
あると共に、無機質充填剤の凝集物が多量に発生して硬
化物の機械的強度が低下するという問題がある。
In this case, in order to lower the melt viscosity, a method of using a filler having a large particle diameter and a filler having a small particle diameter in combination is known, and in order to control the interface between the resin and the inorganic filler. , There are known methods of surface-treating an inorganic filler with a silane coupling agent. However, even with these methods, the decrease in the viscosity in the molten state at room temperature to high temperature is insufficient, and the aggregate of the inorganic filler is large. However, there is a problem in that the mechanical strength of the cured product decreases.

【0008】本発明は、上記事情に鑑みなされたもの
で、吸湿性を低下させる目的でエポキシ樹脂等に大量に
配合した場合でも室温乃至高温溶融状態における粘度が
低く、流動特性が良好であり、かつ樹脂に配合した場
合、無機質充填剤の凝集物を与えることが少ない樹脂用
無機質充填剤及び該充填剤を用いたエポキシ樹脂組成物
を提供することを目的とする。
The present invention has been made in view of the above circumstances and has a low viscosity at room temperature to a high temperature molten state and good flow characteristics even when a large amount is blended with an epoxy resin or the like for the purpose of lowering hygroscopicity. Further, it is an object of the present invention to provide an inorganic filler for a resin that hardly gives an aggregate of the inorganic filler when blended with the resin, and an epoxy resin composition using the filler.

【0009】[0009]

【課題を解決するための手段及び作用】本発明者らは、
上記目的を達成するため鋭意検討を重ねた結果、平均粒
径5〜40μmの無機質充填剤100重量部をアルコキ
シ基含有シラン又はその部分加水分解物で処理した表面
処理充填剤100重量部と、アルコキシ基含有シラン又
はその部分加水分解物で表面処理されていない平均粒径
4μm以下の無機質充填剤1〜40重量部とを混合して
なる充填剤が有効であることを知見した。
Means and Action for Solving the Problems The present inventors have
As a result of extensive studies to achieve the above object, 100 parts by weight of an inorganic filler having an average particle diameter of 5 to 40 μm treated with an alkoxy group-containing silane or a partial hydrolyzate thereof, and 100 parts by weight of an alkoxy It has been found that a filler obtained by mixing 1 to 40 parts by weight of an inorganic filler having an average particle size of 4 μm or less, which is not surface-treated with a group-containing silane or a partial hydrolyzate thereof, is effective.

【0010】即ち、従来より平均粒径の異なる充填剤を
併用することは公知であり、またアルコキシ基含有シラ
ン又はその部分加水分解物で無機質充填剤の表面を処理
することも公知であり、本発明者らは、これらを組み合
わせて平均粒径の異なる充填剤を用いると共に、それぞ
れをアルコキシ基含有シラン又はその部分加水分解物で
処理することを試みたが、流動性は良好であるものの、
充填剤の凝集物が多く、そのため硬化物の機械的強度が
劣るものであるのに対し、平均粒径の異なる充填剤を併
用する場合、粒径の大きい方のみをアルコキシ基含有シ
ラン又はその部分加水分解物で処理し、粒径の小さい方
をアルコキシ基含有シラン又はその部分加水分解物で表
面処理せずにこれらを混合することで、意外にも樹脂に
配合した場合に凝集物が少なく、かつ常温乃至高温溶融
時における粘度が低く流動性が良好であることを見い出
し、本発明をなすに至ったものである。
That is, it is conventionally known to use fillers having different average particle sizes together, and it is also known to treat the surface of an inorganic filler with an alkoxy group-containing silane or a partial hydrolyzate thereof. The inventors have tried to combine these with fillers having different average particle sizes and treat each with an alkoxy group-containing silane or a partial hydrolyzate thereof, but the fluidity is good,
While there are many filler agglomerates and therefore the mechanical strength of the cured product is inferior, when using fillers with different average particle diameters, only the larger particle diameter is used for the alkoxy group-containing silane or its portion. Treated with a hydrolyzate, by mixing these with a smaller particle size without surface treatment with an alkoxy group-containing silane or a partial hydrolyzate thereof, surprisingly less agglomerates when compounded into the resin, Further, they have found that the viscosity is low at room temperature to high temperature melting and the fluidity is good, and the present invention has been completed.

【0011】従って、本発明は、(A)平均粒径5〜4
0μmの無機質充填剤100重量部をアルコキシ基含有
シラン又はその部分加水分解物で処理した表面処理充填
剤100重量部と、(B)アルコキシ基含有シラン又は
その部分加水分解物で表面処理されていない平均粒径4
μm以下の無機質充填剤1〜40重量部とを混合してな
ることを特徴とする樹脂用無機質充填剤、及びエポキシ
樹脂と硬化剤と無機質充填剤とを含有してなるエポキシ
樹脂組成物において、上記無機質充填剤として上記樹脂
用無機質充填剤を使用したことを特徴とするエポキシ樹
脂組成物を提供する。
Therefore, the present invention provides (A) an average particle size of 5-4.
100 parts by weight of a 0 μm inorganic filler treated with an alkoxy group-containing silane or a partial hydrolyzate thereof, and 100 parts by weight of a filler (B) which is not surface-treated with an alkoxy group-containing silane or a partial hydrolyzate thereof. Average particle size 4
An inorganic filler for resin, characterized by being mixed with 1 to 40 parts by weight of an inorganic filler having a size of μm or less, and an epoxy resin composition containing an epoxy resin, a curing agent, and an inorganic filler, There is provided an epoxy resin composition characterized by using the inorganic filler for resin as the inorganic filler.

【0012】以下、本発明について更に詳しく説明する
と、本発明の樹脂用無機質充填剤は、上述したように
(A)アルコキシ基含有シラン又はその部分加水分解物
で処理した平均粒径の大きい無機質充填剤と、(B)ア
ルコキシ基含有シラン又はその部分加水分解物で表面処
理されていない平均粒径の小さい無機質充填剤とを混合
したものである。
The present invention will be described in more detail below. The inorganic filler for resin of the present invention is the inorganic filler having a large average particle diameter treated with (A) alkoxy group-containing silane or a partial hydrolyzate thereof as described above. The agent is mixed with (B) an alkoxy group-containing silane or a partial hydrolyzate thereof, which is not surface-treated and has a small average particle size.

【0013】本発明においては、(A)成分の無機質充
填剤の平均粒径は5〜40μm、好ましくは7〜30μ
mの範囲とする必要がある。平均粒径が5μmより小さ
いと(B)成分のより小さい平均粒径の無機質充填剤と
併用した効果が発現せず、一方40μmより平均粒径が
大きいと溶融時の流動性が悪くなる。使用できる無機質
充填剤の種類としては、従来公知の無機質充填剤を使用
することができ、例えば破砕状や球状の溶融シリカ、結
晶性シリカの他、アルミナ、窒化ケイ素、窒化アルミニ
ウム等を挙げることができる。また、平均粒径、材質、
形状の異なる2種以上の無機質充填剤を併用してもよ
く、硬化物の低膨張化と成形性とを両立させるためには
球状品と破砕品との併用、あるいは球状品のみを用いる
ことが推奨される。
In the present invention, the inorganic filler as the component (A) has an average particle size of 5 to 40 μm, preferably 7 to 30 μm.
It must be within the range of m. If the average particle size is smaller than 5 μm, the effect of using the inorganic filler having a smaller average particle size of the component (B) will not be exhibited, while if the average particle size is larger than 40 μm, the fluidity at the time of melting will be deteriorated. As the type of inorganic filler that can be used, conventionally known inorganic fillers can be used, and examples thereof include crushed or spherical fused silica, crystalline silica, alumina, silicon nitride, and aluminum nitride. it can. Also, the average particle size, material,
Two or more kinds of inorganic fillers having different shapes may be used in combination, and in order to achieve both low expansion of the cured product and moldability, spherical products and crushed products are used in combination, or only spherical products are used. Recommended.

【0014】このような無機質充填剤を処理するアルコ
キシ基含有シランとしては、従来公知のものが使用可能
であり、例えば3―グリシドキシプロピルトリメトキシ
シラン、3―アミノプロピルトリメトキシシラン、1,
3−ビス(γ−グリシドキシプロピル)−1,1,3,
3−テトラメトキシ−1,3−ジシロキサン、1,3−
ジメチル−1,1,3,3−テトラメトキシ−1,3−
ジシロキサン、フェニルトリメトキシシラン、メチルト
リエトキシシラン等を挙げることができ、これらの部分
加水分解物を使用することもできる。
As the alkoxy group-containing silane for treating such an inorganic filler, conventionally known ones can be used, for example, 3-glycidoxypropyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 1,
3-bis (γ-glycidoxypropyl) -1,1,3
3-tetramethoxy-1,3-disiloxane, 1,3-
Dimethyl-1,1,3,3-tetramethoxy-1,3-
Examples thereof include disiloxane, phenyltrimethoxysilane, and methyltriethoxysilane, and partial hydrolysates of these can also be used.

【0015】アルコキシ基含有シラン又はその部分加水
分解物の使用量は、無機質充填剤100部(重量部、以
下同様)に対して0.1〜1部が好ましく、より好まし
くは0.1〜0.6部の範囲である。0.1部より使用
量が少ないと、樹脂組成物に配合した場合、樹脂と無機
質充填剤との界面制御が十分にできない場合が生じ、一
方1部より使用量が多いと、凝集物ができやすくなるお
それがある。
The amount of the alkoxy group-containing silane or its partial hydrolyzate used is preferably 0.1 to 1 part, and more preferably 0.1 to 0 part, relative to 100 parts (parts by weight, the same hereinafter) of the inorganic filler. The range is 6 parts. If the amount used is less than 0.1 part, when mixed with the resin composition, the interface between the resin and the inorganic filler may not be sufficiently controlled. On the other hand, if the amount used is more than 1 part, aggregates may form. May be easier.

【0016】(A)成分の表面処理充填剤を作成する方
法としては、特に制限されないが、ヘンシェルミキサー
等の公知の混合機に入れた無機質充填剤にスプレー等の
散布手段でアルコキシ基含有シラン又はその部分加水分
解物を散布し、その後無機質充填剤を混合して得ること
ができる。このままで(B)成分の無機質充填剤と混合
してもよいが、より凝集物を少なくするために室温で数
日間放置したり、あるいは熱処理したりした後、100
〜200メッシュの篩を通して凝集物を除くことが好ま
しい。
The method for preparing the surface-treated filler as the component (A) is not particularly limited, but an alkoxy group-containing silane or an alkoxy group-containing silane can be added to the inorganic filler placed in a known mixer such as a Henschel mixer by a spraying means or the like. It can be obtained by sprinkling the partial hydrolyzate and then mixing the inorganic filler. Although it may be mixed with the inorganic filler of the component (B) as it is, it is allowed to stand at room temperature for several days in order to further reduce agglomerates, or after heat treatment, 100
It is preferred to remove agglomerates through a ~ 200 mesh screen.

【0017】一方、(B)成分の平均粒径が4μm以
下、好ましくは0.2〜3μmの無機質充填剤として
は、従来公知の無機質充填剤を使用でき、例えば破砕状
や球状の溶融シリカ、結晶性シリカの他、アルミナ、窒
化ケイ素、窒化アルミニウム等を挙げることができる。
また、平均粒径、材質、形状の異なる2種以上の無機質
充填剤を併用してもよい。
On the other hand, as the inorganic filler having an average particle diameter of the component (B) of 4 μm or less, preferably 0.2 to 3 μm, conventionally known inorganic fillers can be used. For example, crushed or spherical fused silica, In addition to crystalline silica, alumina, silicon nitride, aluminum nitride and the like can be mentioned.
Moreover, you may use together 2 or more types of inorganic fillers from which an average particle diameter, a material, and a shape differ.

【0018】この(B)成分の無機質充填剤の使用量
は、(A)成分の表面処理無機質充填剤100部に対し
て1〜40部、好ましくは3〜30部の範囲とする必要
がある。使用量が1部より少ないと、樹脂と混合した場
合の常温乃至高温溶融状態における粘度を十分に低くす
ることができず、一方40部を超えると経済的に不利に
なったり、凝集が起こりやすくなる。
The amount of the inorganic filler as the component (B) used should be in the range of 1 to 40 parts, preferably 3 to 30 parts, relative to 100 parts of the surface-treated inorganic filler as the component (A). . If the amount used is less than 1 part, the viscosity at room temperature to high temperature when mixed with the resin cannot be sufficiently lowered, while if it exceeds 40 parts, it is economically disadvantageous and aggregation easily occurs. Become.

【0019】(A)成分と(B)成分の充填剤の混合
は、従来公知の混合装置を使用することができる。具体
的にはヘンシェルミキサー、バーチカルミキサー、ボー
ルミル、コンクリートミキサー等の混合機を挙げること
ができる。なお、混合後100〜200メッシュの篩で
凝集物を除いておくことが好ましい。
For mixing the fillers of the component (A) and the component (B), a conventionally known mixing device can be used. Specific examples thereof include mixers such as a Henschel mixer, a vertical mixer, a ball mill and a concrete mixer. After mixing, it is preferable to remove aggregates with a 100-200 mesh screen.

【0020】本発明の樹脂用無機質充填剤は、樹脂に多
量配合した場合、常温乃至高温溶融時における粘度が低
く、良好な流動性を保つと共に、樹脂に配合した場合の
凝集物が可及的に少ないので、樹脂の機械的強度を低下
させるおそれが可及的に少ない。このため、硬化性エポ
キシ樹脂、シリコーン樹脂、熱可塑性樹脂などの各種の
樹脂の充填剤として有用であり、とりわけ半導体封止用
エポキシ樹脂組成物の充填剤として極めて有用である。
When a large amount of the inorganic filler for a resin of the present invention is blended with the resin, it has a low viscosity at room temperature to a high temperature and maintains good fluidity, and aggregates when blended with the resin as much as possible. Since it is extremely small, the possibility of lowering the mechanical strength of the resin is as small as possible. Therefore, it is useful as a filler for various resins such as curable epoxy resin, silicone resin, and thermoplastic resin, and is especially useful as a filler for epoxy resin composition for semiconductor encapsulation.

【0021】以下、かかる樹脂用無機質充填剤を配合し
た本発明のエポキシ樹脂組成物について説明すると、本
発明のエポキシ樹脂組成物は、エポキシ樹脂、硬化剤及
び上記樹脂用無機質充填剤を主成分として配合したもの
である。
Hereinafter, the epoxy resin composition of the present invention containing such an inorganic filler for a resin will be described. The epoxy resin composition of the present invention comprises an epoxy resin, a curing agent and the above inorganic filler for a resin as main components. It is a mixture.

【0022】ここで、エポキシ樹脂としては、一分子中
にエポキシ基を少なくとも2個有するエポキシ樹脂であ
ればいずれのものも使用可能であり、具体的にはビスフ
ェノールA型エポキシ樹脂、フェノールノボラック型エ
ポキシ樹脂、トリフェノールアルカン型エポキシ樹脂及
びその重合物、ビフェニル型エポキシ樹脂、ジシクロペ
ンタジエン―フェノールノボラック樹脂、フェノールア
ラルキル型エポキシ樹脂、ナフタレン環含有エポキシ樹
脂、グリシジルエステル型エポキシ樹脂、脂環式エポキ
シ樹脂、複素環型エポキシ樹脂、臭素化エポキシ樹脂等
を用いることができる。これらのエポキシ樹脂の中では
ナフタレン環含有エポキシ樹脂やビフェニル型エポキシ
樹脂が低吸湿、高接着性を得る点で好ましい。なお、こ
れらのエポキシ樹脂は、その使用にあたっては必ずしも
1種類に限定されるものではなく、2種類又はそれ以上
を混合して使用してもよい。
As the epoxy resin, any epoxy resin can be used as long as it is an epoxy resin having at least two epoxy groups in one molecule, specifically, bisphenol A type epoxy resin and phenol novolac type epoxy resin. Resin, triphenolalkane type epoxy resin and its polymer, biphenyl type epoxy resin, dicyclopentadiene-phenol novolac resin, phenol aralkyl type epoxy resin, naphthalene ring-containing epoxy resin, glycidyl ester type epoxy resin, alicyclic epoxy resin, A heterocyclic epoxy resin, a brominated epoxy resin, etc. can be used. Among these epoxy resins, naphthalene ring-containing epoxy resin and biphenyl type epoxy resin are preferable from the viewpoint of obtaining low moisture absorption and high adhesiveness. It should be noted that these epoxy resins are not necessarily limited to one kind in use, and two or more kinds may be mixed and used.

【0023】また、硬化剤は特に制限されるものではな
く、使用するエポキシ樹脂に応じて適宜選定することが
でき、例えばアミン系硬化剤、酸無水物系硬化剤、フェ
ノールノボラック樹脂、クレゾールノボラック樹脂等の
フェノールノボラック型硬化剤等が挙げられるが、中で
もフェノールノボラック型硬化剤が好ましい。
The curing agent is not particularly limited and can be appropriately selected depending on the epoxy resin used, and examples thereof include amine curing agents, acid anhydride curing agents, phenol novolac resins, cresol novolac resins. Examples thereof include phenol novolac type curing agents, and among them, phenol novolac type curing agents are preferable.

【0024】硬化剤の配合量は、エポキシ樹脂を硬化さ
せ得る量であり、通常使用される量とすることができ、
フェノールノボラック型硬化剤を用いた場合、エポキシ
樹脂中のエポキシ基と硬化剤中のOH基との比がモル比
で1:0.5〜1:1.5となるように配合することが
好ましい。
The compounding amount of the curing agent is an amount capable of curing the epoxy resin, and can be an amount usually used,
When a phenol novolac type curing agent is used, it is preferable to mix it so that the molar ratio of the epoxy groups in the epoxy resin to the OH groups in the curing agent is 1: 0.5 to 1: 1.5. .

【0025】なお、本発明では、エポキシ樹脂と硬化剤
との反応を促進させる目的で各種硬化促進剤、例えばイ
ミダゾール類、三級アミン類、ホスフィン系化合物、シ
クロアミジン化合物などを配合することができる。硬化
促進剤の配合量は、特に制限はないが、通常全系に対し
て0.05〜1重量%程度とすることがよい。
In the present invention, various curing accelerators such as imidazoles, tertiary amines, phosphine compounds and cycloamidine compounds may be added for the purpose of accelerating the reaction between the epoxy resin and the curing agent. . The compounding amount of the curing accelerator is not particularly limited, but usually it is preferable to be about 0.05 to 1% by weight based on the whole system.

【0026】また更に、本発明では硬化物の応力を低下
させる目的で組成物中にシリコーン系ポリマーを配合し
てもよい。シリコーン系ポリマーを配合すると、硬化物
の熱衝撃テストにおけるパッケージクラックの発生を著
しく少なくすることが可能である。このシリコーン系ポ
リマーとしては、例えばエポキシ基、アミノ基、カルボ
キシル基、水酸基、ヒドロシリル基、ビニル基等を有す
るシリコーンオイル、シリコーンレジン、シリコーンゴ
ム等やこれらシリコーンポリマーと有機重合体、例えば
置換又は非置換のフェノールノボラック樹脂等の重合体
を挙げることができる。
Furthermore, in the present invention, a silicone polymer may be added to the composition for the purpose of reducing the stress of the cured product. When a silicone-based polymer is blended, it is possible to significantly reduce the occurrence of package cracks in the thermal shock test of the cured product. Examples of the silicone-based polymer include silicone oil having an epoxy group, an amino group, a carboxyl group, a hydroxyl group, a hydrosilyl group, a vinyl group and the like, a silicone resin, a silicone rubber and the like, and these silicone polymers and organic polymers, for example, substituted or unsubstituted. Examples thereof include polymers such as phenol novolac resins.

【0027】なお、シリコーン系ポリマーの添加量は特
に限定されないが、通常エポキシ樹脂と硬化剤との合計
量100部に対し、1〜50部とすることが好ましい。
The addition amount of the silicone-based polymer is not particularly limited, but it is usually preferably 1 to 50 parts per 100 parts of the total amount of the epoxy resin and the curing agent.

【0028】更に、硬化物に可撓性や強靭性を付与する
目的で、各種有機合成ゴム、メタクリル酸メチル―スチ
レン―ブタジエン共重合体、スチレン―エチレン―ブテ
ン―スチレン共重合体等の熱可塑性樹脂を添加すること
ができ、これによって硬化物に低応力を付与することが
できる。
Further, for the purpose of imparting flexibility and toughness to the cured product, thermoplastics such as various organic synthetic rubbers, methyl methacrylate-styrene-butadiene copolymers, styrene-ethylene-butene-styrene copolymers, etc. A resin can be added, which can impart low stress to the cured product.

【0029】本発明のエポキシ樹脂組成物には、上述し
た樹脂用無機質充填剤を配合するものであり、その配合
量はエポキシ樹脂組成物全体に対し70〜94重量%、
特に75〜92重量%の範囲とすることが好ましい。配
合量が70重量%未満では、得られた硬化物の膨張係数
が大きくなってしまうため応力特性が悪くなってしまう
場合があり、一方94重量%を超えると、成形時の溶融
粘度が高くなりすぎてボイド、未充填などが発生するお
それがある。
The above-mentioned inorganic filler for resin is blended in the epoxy resin composition of the present invention, and the blending amount thereof is 70 to 94% by weight based on the whole epoxy resin composition.
In particular, it is preferably in the range of 75 to 92% by weight. If the blending amount is less than 70% by weight, the expansion coefficient of the obtained cured product becomes large and the stress characteristics may deteriorate. On the other hand, if it exceeds 94% by weight, the melt viscosity at the time of molding becomes high. There is a possibility that voids, unfilling, etc. may occur due to excessive flow.

【0030】本発明のエポキシ樹脂組成物には、更に必
要により各種の添加剤を配合することができ、例えばカ
ルナバワックス等のワックス類、ステアリン酸などの脂
肪酸やその金属塩などの離型剤(中でも接着性、離型性
の面からカルナバワックスが好適に用いられる)、有機
ゴム系の可撓性付与剤、カーボンブラック、コバルトブ
ルー、ベンガラ等の顔料、酸化アンチモン、ハロゲン化
合物等の難燃化剤、γ―グリシドキシプロピルトリメト
キシシラン等のシランカップリング剤、老化防止剤、そ
の他の添加剤の1種又は2種以上を配合することができ
る。
If desired, various additives may be added to the epoxy resin composition of the present invention. For example, waxes such as carnauba wax, fatty acids such as stearic acid and release agents such as metal salts thereof ( Among them, carnauba wax is preferably used in terms of adhesiveness and releasability), organic rubber-based flexibility-imparting agents, pigments such as carbon black, cobalt blue and red iron oxide, antimony oxide, and flame retardant halogen compounds. One or two or more types of agents, silane coupling agents such as γ-glycidoxypropyltrimethoxysilane, antiaging agents, and other additives can be added.

【0031】本発明のエポキシ樹脂組成物は、その製造
に際し、上述した成分の所定量を均一に撹拌、混合し予
め70〜95℃に加熱してあるニーダー、ロール、エク
ストルーダー等で混練、冷却し、粉砕するなどの方法で
得ることができるが、特にミキシングロール、押出機を
用いた溶融混合法が好適に採用される。ここで、各成分
の配合順序に特に制限はない。
In the production of the epoxy resin composition of the present invention, predetermined amounts of the above-mentioned components are uniformly stirred and mixed, and kneaded with a kneader, roll, extruder or the like which has been preheated to 70 to 95 ° C., and cooled. It can be obtained by a method such as pulverization and pulverization, and a melt mixing method using a mixing roll and an extruder is particularly preferably used. Here, there is no particular limitation on the order of mixing the components.

【0032】かくして得られる本発明のエポキシ樹脂組
成物は、DIP型、フラットパック型、PLCC型、S
O型などの半導体パッケージに有効であり、この場合従
来より採用されている成形法、例えばトランスファー成
形、インジェクション成形、注型法等により行うことが
できる。なお、本発明のエポキシ樹脂組成物の成形温度
は150〜180℃、ポストキュアーは150〜185
℃で2〜6時間行うことが好ましい。
The epoxy resin composition of the present invention thus obtained is a DIP type, a flat pack type, a PLCC type, an S type.
It is effective for semiconductor packages of O type and the like, and in this case, it can be performed by a conventionally used molding method, for example, transfer molding, injection molding, casting method or the like. The molding temperature of the epoxy resin composition of the present invention is 150 to 180 ° C., and the post cure is 150 to 185.
It is preferable to carry out at 2 ° C for 2 to 6 hours.

【0033】[0033]

【発明の効果】本発明の樹脂用無機質充填剤は、樹脂に
大量に配合した場合でも室温乃至高温溶融状態における
粘度が低く、流動特性が良好であり、かつ無機質充填剤
の凝集物の発生が可及的に少ない樹脂組成物を与えるこ
とができるものである。
INDUSTRIAL APPLICABILITY The inorganic filler for a resin of the present invention has a low viscosity at room temperature to a high temperature molten state even when it is blended in a large amount in a resin, has good flow characteristics, and does not generate aggregates of the inorganic filler. It is possible to provide a resin composition that is as small as possible.

【0034】また、本発明のエポキシ樹脂組成物は、無
機質充填剤を大量に配合し、吸湿性を可及的に低下させ
ることができると共に、室温乃至高温溶融状態における
粘度が低く、流動特性が良好であり、かつ組成物中の無
機質充填剤の凝集物が可及的に少なく、このため半導体
封止用として好適に使用できるものである。
The epoxy resin composition of the present invention contains a large amount of an inorganic filler to reduce hygroscopicity as much as possible, has a low viscosity in a room temperature to high temperature molten state, and has a fluidity characteristic. The composition is good, and the aggregate of the inorganic filler in the composition is as small as possible. Therefore, it can be suitably used for semiconductor encapsulation.

【0035】[0035]

【実施例】以下、実施例と比較例を示して本発明を具体
的に説明するが、本発明は下記実施例に制限されるもの
ではない。なお、以下の例において部はいずれも重量部
を示す。
EXAMPLES The present invention will be specifically described below with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples. In the following examples, all parts are parts by weight.

【0036】[実施例1〜3、比較例1〜3]表1に示
す各種無機質充填剤及びγ−グリシドキシプロピルトリ
アルコキシシランを表1に示す量でヘンシェルミキサー
を用いて混合して無機質充填剤混合物を調製した。
[Examples 1 to 3 and Comparative Examples 1 to 3] Various inorganic fillers shown in Table 1 and γ-glycidoxypropyltrialkoxysilane were mixed in the amounts shown in Table 1 by using a Henschel mixer. A filler mixture was prepared.

【0037】なお、表中の処理方法及びフィラー凝集物
の測定方法を次に示す。 <処理方法> (A):表1中Aで示した充填剤のみを5分間混合した
後、スプレーにてγ−グリシドキシプロピルトリアルコ
キシシランを用いてシランカップリング処理し、その後
10分間混合し、室温で1日放置後に100メッシュ篩
処理を行った。その後、表1の比率でBで示した充填剤
を加えて20分間混合した後に100メッシュ篩で篩分
けを行った。 (A+B):全ての充填剤を5分間混合した後に、スプ
レーにてシランカップリング処理し、その後10分間混
合し、室温で1日放置後に100メッシュ篩で篩分け処
理を行った。 <フィラー凝集物測定方法>得られた無機質充填剤混合
物100gをアセトン300gに溶解したものを200
メッシュ篩にアセトンで洗浄しながら通したときの篩上
の重量を計り、この重量を全体の重量に対する%で表し
た。
The treatment methods in the table and the measuring method of filler aggregates are shown below. <Treatment Method> (A): After mixing only the fillers indicated by A in Table 1 for 5 minutes, silane coupling treatment is performed by using γ-glycidoxypropyltrialkoxysilane by spraying, and then mixing for 10 minutes. Then, it was allowed to stand at room temperature for 1 day and then subjected to 100-mesh sieving. Then, the filler shown by B in the ratio shown in Table 1 was added, mixed for 20 minutes, and then sieved with a 100 mesh sieve. (A + B): After all the fillers were mixed for 5 minutes, silane coupling treatment was performed by spraying, then mixed for 10 minutes, and allowed to stand at room temperature for 1 day, followed by sieving treatment with a 100 mesh sieve. <Filler aggregate measuring method> 200 g of the obtained inorganic filler mixture dissolved in 300 g of acetone is 200
The weight on the sieve when passing through the mesh sieve while being washed with acetone was measured, and this weight was expressed as% of the total weight.

【0038】次に、エポキシ当量198、軟化点60℃
のエポキシ化クレゾールノボラック樹脂51部、エポキ
シ当量280の臭素化エポキシ化フェノールノボラック
樹脂6部、フェノール当量110、軟化点90℃のフェ
ノールノボラック樹脂33部、下記式(a)で示される
化合物60部と下記式(b)で示される化合物40部と
の反応生成物10部、トリフェニルホスフィン0.65
部、三酸化アンチモン10部、カルナバワックス1.2
部、γ―グリシドキシプロピルトリメトキシシラン1.
0部、カーボン1部及び上記方法で得られた無機質充填
剤混合物400部を配合し、80℃のミキシングロール
で5分間溶融混合した後、シート状にして取り出し、こ
れを冷却粉砕して組成物を得た。
Next, the epoxy equivalent is 198 and the softening point is 60 ° C.
51 parts of epoxidized cresol novolac resin, 6 parts of brominated epoxidized phenol novolac resin having an epoxy equivalent of 280, phenol equivalent of 110, 33 parts of phenol novolac resin having a softening point of 90 ° C., and 60 parts of a compound represented by the following formula (a): 10 parts of a reaction product with 40 parts of a compound represented by the following formula (b), 0.65 of triphenylphosphine
Parts, antimony trioxide 10 parts, carnauba wax 1.2
Part, γ-glycidoxypropyltrimethoxysilane 1.
0 parts, 1 part of carbon, and 400 parts of the inorganic filler mixture obtained by the above method were mixed, melt-mixed with a mixing roll at 80 ° C. for 5 minutes, taken out as a sheet, cooled and pulverized to obtain a composition. Got

【0039】[0039]

【化1】 Embedded image

【0040】得られた組成物について、下記に示す
(イ)〜(ニ)の諸試験を行った。結果を表1に併記す
る。 (イ)組成物中の凝集物 組成物の粉体100gをアセトン300gに溶解したも
のを200メッシュ篩にアセトンで洗浄しながら通した
ときの篩上の重量を計り、凝集物とした。 (ロ)溶融粘度 島津製作所製高化式フローテスターを用いて175℃、
10kg荷重における粘度を測定した。 (ハ)スパイラルフロー EMMI規格に準じた金型を使用して175℃、70k
gf/cm2の条件で測定した。 (ニ)曲げ強度 JIS―K6911に準じて、175℃、70kgf/
cm2、成形時間2分の条件で10×4×100mmの
抗折棒を成形し、室温で測定した。
The following tests (a) to (d) were conducted on the obtained composition. The results are also shown in Table 1. (A) Aggregate in composition A powder obtained by dissolving 100 g of the powder of the composition in 300 g of acetone was passed through a 200 mesh sieve while washing with acetone, and the weight on the sieve was weighed to obtain an aggregate. (B) Melt viscosity 175 ° C using a Shimadzu high-performance flow tester,
The viscosity under a load of 10 kg was measured. (C) Spiral flow 175 ° C, 70k using a mold conforming to EMMI standard
It was measured under the condition of gf / cm 2 . (D) Bending strength According to JIS-K6911, 175 ° C, 70 kgf /
A bending bar having a size of 10 × 4 × 100 mm was molded under the conditions of cm 2 and a molding time of 2 minutes and measured at room temperature.

【0041】[0041]

【表1】 [Table 1]

【0042】表1から、同じ2種のシリカを用いた実施
例1と比較例1とを比較してみると、2種のシリカの両
方をアルコキシ基含有シランで処理した場合(比較例
1)は、凝集物が多く、その結果曲げ強度が低くなるの
に対し、2種のシリカのうち粒径の大きい方のみをアル
コキシ基含有シランで処理した場合(実施例1)は、凝
集物が少なく、溶融粘度が低く、曲げ強度も高いことが
認められる。また、粒径の小さなシリカを配合しないと
(比較例2、3)、溶融粘度が非常に高く、流動性が悪
い(スパイラルフローが低い)ことが認められる。
From Table 1, a comparison between Example 1 using the same two types of silica and Comparative Example 1 shows that both types of silica were treated with an alkoxy group-containing silane (Comparative Example 1). Has a large amount of agglomerates, resulting in low bending strength, whereas when only one of the two types of silica having a larger particle size is treated with the alkoxy group-containing silane (Example 1), less agglomerates are obtained. It is recognized that the melt viscosity is low and the bending strength is high. Further, it is recognized that unless silica having a small particle size is blended (Comparative Examples 2 and 3), the melt viscosity is very high and the fluidity is poor (the spiral flow is low).

───────────────────────────────────────────────────── フロントページの続き (72)発明者 塩原 利夫 群馬県碓氷郡松井田町大字人見1番地10 信越化学工業株式会社シリコーン電子材料 技術研究所内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Toshio Shiobara 1 Hitomi, Oita, Matsuida-cho, Usui-gun, Gunma Shin-Etsu Chemical Co., Ltd. Silicone Electronic Materials Research Laboratory

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 (A)平均粒径5〜40μmの無機質充
填剤100重量部をアルコキシ基含有シラン又はその部
分加水分解物で処理した表面処理充填剤100重量部
と、(B)アルコキシ基含有シラン又はその部分加水分
解物で表面処理されていない平均粒径4μm以下の無機
質充填剤1〜40重量部とを混合してなることを特徴と
する樹脂用無機質充填剤。
1. (A) 100 parts by weight of a surface-treated filler obtained by treating 100 parts by weight of an inorganic filler having an average particle diameter of 5 to 40 μm with an alkoxy group-containing silane or a partial hydrolyzate thereof, and (B) containing an alkoxy group. An inorganic filler for resin, characterized by being mixed with 1 to 40 parts by weight of an inorganic filler having an average particle size of 4 μm or less which is not surface-treated with silane or a partial hydrolyzate thereof.
【請求項2】 エポキシ樹脂と硬化剤と無機質充填剤と
を含有してなるエポキシ樹脂組成物において、上記無機
質充填剤として請求項1記載の樹脂用無機質充填剤を使
用したことを特徴とするエポキシ樹脂組成物。
2. An epoxy resin composition comprising an epoxy resin, a curing agent and an inorganic filler, wherein the inorganic filler for resin according to claim 1 is used as the inorganic filler. Resin composition.
JP6175977A 1994-07-05 1994-07-05 Inorganic filler for resin and epoxy resin composition Expired - Lifetime JP3033445B2 (en)

Priority Applications (1)

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JP6175977A JP3033445B2 (en) 1994-07-05 1994-07-05 Inorganic filler for resin and epoxy resin composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6175977A JP3033445B2 (en) 1994-07-05 1994-07-05 Inorganic filler for resin and epoxy resin composition

Publications (2)

Publication Number Publication Date
JPH0820673A true JPH0820673A (en) 1996-01-23
JP3033445B2 JP3033445B2 (en) 2000-04-17

Family

ID=16005554

Family Applications (1)

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002322243A (en) * 2001-04-26 2002-11-08 Sumitomo Bakelite Co Ltd Method of production for epoxy resin composition and semiconductor device
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JP2002322243A (en) * 2001-04-26 2002-11-08 Sumitomo Bakelite Co Ltd Method of production for epoxy resin composition and semiconductor device
JP4665336B2 (en) * 2001-04-26 2011-04-06 住友ベークライト株式会社 Epoxy resin composition manufacturing method and semiconductor device
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US7291684B2 (en) 2003-03-11 2007-11-06 Sumitomo Bakelite Co., Ltd. Resin composition for encapsulating semiconductor chip and semiconductor device therewith
KR100697938B1 (en) * 2003-03-25 2007-03-20 스미토모 베이클라이트 가부시키가이샤 Resin composition for sealing semiconductor and semiconductor device using the same
US7781063B2 (en) * 2003-07-11 2010-08-24 Siemens Energy, Inc. High thermal conductivity materials with grafted surface functional groups
US7431990B2 (en) 2004-05-27 2008-10-07 Sumitomo Bakelite Co Resin composition for encapsulating semiconductor chip and semiconductor device therewith
US7956136B2 (en) 2004-07-22 2011-06-07 Sumitomo Bakelite Company, Ltd. Resin composition for semiconductor encapsulation and semiconductor device
US8124695B2 (en) 2004-07-22 2012-02-28 Sumitomo Bakelite Company, Ltd. Resin composition for semiconductor encapsulation and semiconductor device
US7612458B2 (en) 2005-01-13 2009-11-03 Sumitomo Bakelite Company Limited Epoxy resin composition for semiconductor encapsulating use, and semiconductor device
US7655295B2 (en) * 2005-06-14 2010-02-02 Siemens Energy, Inc. Mix of grafted and non-grafted particles in a resin
US8138266B2 (en) 2007-03-23 2012-03-20 Sumitomo Bakelite Co., Ltd. Semiconductor-encapsulating resin composition and semiconductor device
KR20120026573A (en) 2009-06-03 2012-03-19 스미또모 베이크라이트 가부시키가이샤 Resin composition for semiconductor encapsulation, and semiconductor device
US8883883B2 (en) 2009-06-03 2014-11-11 Sumitomo Bakelite Co., Ltd. Resin composition for encapsulating semiconductor and semiconductor device
JP2013010848A (en) * 2011-06-29 2013-01-17 Nippon Zeon Co Ltd Resin composition, film, laminate, cured product, and composite
US9994729B2 (en) 2014-05-16 2018-06-12 Namics Corporation Liquid sealing material, and electronic component using same
JP2018030971A (en) * 2016-08-26 2018-03-01 国立大学法人横浜国立大学 Adhesive composition

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