JPH08200521A - Gate valve device - Google Patents

Abstract

PURPOSE: To reduce the cost, to realize the miniaturization, and to reduce the heating value by miniaturizing an electromagnet part. CONSTITUTION: A neck part 4 is provided on a lid body 2 to open/close an opening part 3, and the radial levitation of the neck part 4 is achieved by a radial electromagnet part 12 while the axial levitation of the neck part 4 is achieved by outer permanent magnet bodies 16, 17. The outer permanent magnet bodies 16, 17 axially levitate the neck part 4 by the repulsive force with inner permanent magnet bodies 16, 17 which are integratedly fitted to the neck part 4. That means, the thrust load of the neck part 4 is borne by the outer permanent magnet bodies 14, 15 so as to miniaturize the radial electromagnet part 12, and the role of the radial electromagnet part 12 is only the radial levitation of the neck part 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to two chambers having a pressure difference used in a semiconductor manufacturing / inspection apparatus, for example, two chambers in a vacuum state and an atmospheric pressure, or a high vacuum state and an ultra-high vacuum state. The present invention relates to a gate valve device for opening and closing an opening connecting between rooms.

[0002]

2. Description of the Related Art Conventionally, a gate valve device of this type is shown in FIG.
The rod 50 has a rod 50 as shown in FIG. 5, and a seal portion 5 for opening and closing the opening 52 of the vacuum container 51 is provided at the tip of the rod 50.
3 is provided, and the rod 50 is arranged in a partition 54 communicating with the vacuum container 51.

A displacement sensor section 55 and an electromagnet section 56 are arranged outside the partition wall 54. The displacement sensor section 55 detects the displacement of the rod 50, and the electromagnet section 56 detects the displacement sensor section 55. The magnetic target 57 of the rod 50 is attracted by the magnetic force, and the rod 50 is levitationally supported in both the radial direction and the axial direction.

When closing the opening 52 in the gate valve device having such a configuration, the exciting current of the electromagnet portion 56 is controlled to move the rod 50 in parallel in the radial direction. The O-ring 58 of the seal portion 53 is elastically deformed by this contact force. When opening the opening 52, the rod 50 is moved in parallel in a direction opposite to the above, and the seal 53 is moved away from the opening 52.

[0005]

However, in the conventional gate valve device, the distance from the electromagnet portion 56 to the magnetic target 57 is determined by the crushing amount of the O-ring 58 (about 1 mm), the O-ring 58 and the vacuum. It is the total (2.5 mm or more) obtained by adding the gap (about 0.5 mm) of the container 51 and the gap (about 0.5 mm) between the partition wall 54 and the electromagnet portion 56, and thus between the electromagnet portion 56 and the magnetic target 57. Is long, and the electromagnet portion 56 not only supports the rod 50 in the radial direction, but also receives the thrust load of the rod 50. For this reason, a large electromagnet is required, so that the whole device becomes large, the cost of the device is increased, and the amount of heat generated from the electromagnet is large.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a gate valve device suitable for reducing cost, size, and heat generation by reducing the size of an electromagnet portion. To provide.

[0007]

In order to achieve the above object, according to the first aspect of the present invention, a lid is provided at a position facing an opening of a container, and the lid is integrally provided on one side of the lid. A radial magnetic supporting means having a radial electromagnet portion for floatingly supporting the neck with a magnetic force in a radial direction, and an inner permanent magnet body integrally attached to the neck to repel the neck in the axial direction. And a swing means for swinging the neck back and forth toward the opening of the container, and opening and closing the opening with the lid by the swing operation. It is characterized by.

According to a second aspect of the invention, the swinging means comprises a radial magnetic support means and a rotating mechanism for rotating the outer permanent magnet body.

According to a third aspect of the present invention, the first and second radial magnetic support means are disposed along the axial direction of the neck.
A oscillating control unit for controlling the exciting current of at least one of the two diametrical electromagnet units to change the radial floating position of the neck. It is characterized by.

According to a fourth aspect of the present invention, the lid is formed of a magnetic material, an elastic seal member is provided between the opening of the container and the lid, and the lid is sucked into the opening of the container. A sealing electromagnet is provided.

According to a fifth aspect of the present invention, there is provided a cylindrical seal block having a front end formed with an inclined end having a predetermined angle and a rear end connected to an opening of a container; A lid provided with a slope on the surface facing the inclined end, an elastic seal member disposed between the slope of the lid and the inclined end of the seal block, and a neck attached to a lower portion of the lid. A radial electromagnet portion for floating and supporting the neck with a magnetic force in the radial direction, and an outer permanent magnet body for floatingly supporting the neck in the axial direction with a repulsive force of an inner permanent magnet body integrally attached to the neck portion. And a sealing electromagnet for sucking the neck in the axial direction and for bringing the inclined surface of the lid and the inclined end of the seal block into close contact with the suction force.

[0012]

In the present invention, the outer permanent magnet body receives the thrust load of the neck portion. Therefore, the role of the radial electromagnet part is only the radial floating support of the neck.

In particular, according to the first to third aspects of the present invention, when opening and closing the opening, the head is swung. Therefore, even if the neck portion is slightly shaken, the neck portion is enlarged and the lid body is largely moved back and forth, and a sufficient movement stroke of the lid body required to open and close the opening portion can be obtained.

According to the fourth aspect of the invention, the sealing electromagnet generates an elastic deformation force (crushing force) of the elastic sealing member.

According to the fifth aspect of the present invention, when opening and closing the opening, the neck of the lid moves back and forth in the axial direction, and the sealing electromagnet generates an elastic deformation force (crushing force) of the elastic sealing member. .

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a gate valve device according to the present invention will be described below in detail with reference to FIGS.

As shown in FIG. 1, this gate valve device is provided with a lid body 2 in a vacuum vessel 1, the lid body 2 is disposed at a position facing the opening 3 of the vacuum vessel 1, and the lid body is also provided. A rod-shaped neck portion 4 is integrally provided on one side of 2.

The neck portion 4 is inserted into the through hole 5 of the vacuum vessel 1 so as to be vertically movable, and its front end 4a is located in the vacuum vessel 1, while its rear end 4b is a partition for shutting off vacuum and the atmosphere. 6.

The partition wall 6 is disposed outside the vacuum vessel 1 and is formed in a cylindrical shape. One end of the partition wall 6 opens into the through hole 5 and is fixed to the vacuum vessel 1, while the partition wall 6 is fixed. Is hermetically closed by a sealing lid 7.

The partition 6 is fixed to the vacuum vessel 1 by a flange 8 provided on the outer peripheral edge of one end of the partition 6 and a screw (not shown) connecting the flange 8 to the vacuum vessel 1.
Further, a seal member 10 is inserted between the flange portion 8 and the vacuum container 1 to block the gap.

A radial magnetic support means 11 is provided on the outer peripheral surface side of the partition wall 6, and the radial magnetic support means 11 is composed of a radial electromagnet portion 12, a radial displacement sensor portion (not shown) and the like.

The radial electromagnet portion 12 is, as shown in FIG. 2, electromagnets 12a, 12 which are annularly installed on the outer peripheral surface side of the partition wall 6.
a. A radial displacement sensor (not shown) detects a radial displacement of the neck 4 and outputs it to a control circuit (not shown). The control circuit controls the exciting current of the radial electromagnet section 12 based on the detection result of the radial displacement sensor section, thereby adjusting the attractive force of the radial electromagnet section 12.

A magnetic target 13 is provided inside the partition 6, and the magnetic target 13 is provided integrally on the outer peripheral surface of the neck 4 and faces the radial electromagnet section 12 via the partition 6. It is installed as follows.

The radial magnetic support means 11 is configured to attract the magnetic target 13 by the magnetic force of the radial electromagnet section 12, thereby supporting the neck portion 4 in a floating manner in the radial direction.

As shown in FIG. 1, upper and lower outer permanent magnets 14 and 15 are provided on the outer peripheral surface side of the partition 6, and upper and lower inner permanent magnets 16 and 17 are provided inside the partition 6. The outer permanent magnets 14 and 15 are located on both sides of the radial electromagnet section 12 and are installed so as to face the inner permanent magnets 16 and 17 with the partition 6 interposed therebetween. The bodies 16 and 17 are located on both sides of the magnetic target 13 and are integrally attached to the neck 4.

The outer permanent magnets 14, 15 are set to repel the inner permanent magnets 16, 17, and the upper outer permanent magnet 14 is slightly closer to the through hole 5 than the upper inner permanent magnet 16. Further, the lower outer permanent magnet body 15 is disposed slightly closer to the lid 7 than the lower inner permanent magnet body 17.

The outer permanent magnet bodies 14 and 15 thus constructed support the neck portion 4 in the axial direction by the repulsive force of the inner permanent magnet bodies 16 and 17, and receive the axial load (thrust force) applied to the neck portion 4. Works like.

The radial electromagnet portion 12, the radial displacement sensor portion (not shown), the outer permanent magnet members 14, 15 and the like are all mounted on a block 18. Near the block 18, a rotating mechanism as a swinging means is provided. 19 are provided.

The rotating mechanism 19 is a mechanism for rotating the block 18 in a fixed direction via the rotating pin 20. When the block 18 is rotated forward and backward by the rotating mechanism 19, the neck 4 moves forward and backward. A so-called swinging motion of the neck portion 4 is performed.

The direction of the swinging operation as described above is set so that the neck 4 swings back and forth toward the opening 3 of the vacuum vessel 1.

The block 18 is also configured so as to entirely move back and forth along the partition 6. Such a block 18 is moved by a slide mechanism (not shown), and when the block 18 moves back and forth. Following this, the neck 4 also moves back and forth in the same direction as the block 18.

A cylindrical seal block 21 and an O-ring 22 as an elastic seal member are disposed between the opening 3 of the vacuum vessel 1 and the lid 2, and the cylindrical seal block 21 has an open rear portion. The O-ring 22 is attached to the lid 2 side to seal the contact portion between the seal block 21 and the lid 2. Have been.

While the lid 2 is formed of a magnetic material, a sealing electromagnet 23 is disposed in the opening 3 of the vacuum vessel 1, and the sealing electromagnet 23 is located on the outer peripheral surface side of the seal block 21. And the lid 2 is sucked, and O
It is provided to elastically deform the ring 22.

Next, the operation of the gate valve device configured as described above will be described with reference to FIGS.

According to this gate valve device, when the radial magnetic support means 11 operates, the radial electromagnet portion 12 attracts the magnetic target 13, whereby the neck portion 4 is floated and supported in the radial direction.

In addition, the outer permanent magnets 14 and 15
Supports the neck portion 4 in the axial direction by repulsion with the inner permanent magnet bodies 16 and 17.

That is, the radial levitation support of the neck portion 4 is individually handled by the radial electromagnet portion 12, and the axial levitation support is individually handled by the outer permanent magnet bodies 14 and 15.

When the entire block 18 moves back and forth along the partition wall 6 in a state where the neck portion 4 is supported by floating as described above, the neck portion 4 moves forward and backward in the same direction as the block 18 following this. Lid 2 using a simple following movement
Is set so as to face the opening 3 of the vacuum vessel 1.

Thereafter, the rotation mechanism 18 is operated, and a swing operation for bringing the opening 3 and the lid 2 into close contact is performed.

That is, the block 18 rotates at a fixed angle, and the neck 4 rotates and moves in the same direction in synchronization with the rotation of the block 18, whereby the lid 2 advances toward the opening 3, and The body 2 and the seal block 21 abut.

In this way, the lid 2 is
When it comes into contact with 1, the exciting current is supplied to the sealing electromagnet 23, whereby the lid body 2 is attracted to the sealing electromagnet 23 side, and the O-ring 22 is elastically deformed by this attractive force, so that the opening 3 is opened. Completely closed.

When the opening 3 is opened, the reverse operation is performed. That is, the current supply to the sealing electromagnet 23 is stopped, and thereafter, the swinging operation for releasing the close contact between the opening 3 and the lid 2 is performed. The swing motion for releasing the close contact is to rotate the block 18 in the opposite direction to the above.

FIG. 4 shows another embodiment of the present invention. The difference between the gate valve device shown in FIG. 4 and the above embodiment is that the radial magnetic support means 11 includes first and second radial electromagnet portions 24. , 25, and the swinging means comprises a swing control unit 26.

That is, the radial magnetic support means 11 adopts a structure for supporting the neck portion 4 at two points in the radial direction by magnetic force. In order to perform such two-point support, the first and second radial directions are provided. The electromagnet parts 24 and 25 are arranged along the axial direction of the neck part 4. It should be noted that the first and second radial electromagnet parts 24 and 25 are both composed of a plurality of electromagnets, as in the above-described embodiment.

The swing control section 26 controls the exciting current of the first radial electromagnet section 24, the exciting current of the second radial electromagnet section 25, or the exciting current of the two radial electromagnet sections 24, 25 to control the neck section. 4 is changed, thereby causing the neck portion 4 to swing.

In other words, when the attraction force of the first or second radial electromagnet section 24, 25 is controlled by controlling the exciting current, the radial floating position of the neck 4 on the first radial electromagnet section 24 side, or Since the radial floating position of the neck portion 4 on the second radial electromagnet portion 25 side can be freely changed, the swing control unit 26 changes the floating position by controlling the exciting current as described above. Thus, the swing motion of the neck portion 4 is executed.

When only the first radial electromagnet portion 24 is controlled by the exciting current for the swinging motion, the second
Fulcrum swiveling operation, also when only the second radial electromagnets 25 a supporting center O ₂ of the first radial electromagnet portion 24 for supporting the center O ₁ of the radial electromagnets 25 of the fulcrum When the controlled object is the both electromagnet sections 24 and 25, the fulcrum of the swing operation can be set to O ₃ between the two electromagnet sections 24 and 25. .

The direction of the swing operation is set to the direction in which the neck 4 swings back and forth toward the opening 3 of the vacuum vessel 1 as in the above embodiment.

Next, the operation of the gate valve device configured as described above will be described with reference to FIG.

In this gate valve device, the radial floating support of the neck 4 is provided by the radial electromagnets 24 and 25,
Are supported individually by the outer permanent magnet bodies 14 and 15. When the entire block 18 moves back and forth along the partition wall 6 in a state where the neck 4 is floated and supported in this way, the neck 4 also moves forward and backward in the same direction as the block 18 following this. The lid 2 is set so as to be used so as to face the opening 3 of the vacuum vessel 1.

After that, the swing control section 26 controls the exciting current of the first radial electromagnet section 24 so that the opening 3 and the lid 2 are controlled.
Perform a swinging motion to bring the two into close contact.

That is, the neck portion 4 rotates around the support point of the second radial electromagnet portion 25, whereby the cover 2 advances to the opening 3 side, and the cover 2 and the seal block 21 contact each other. Touch

Thus, the lid 2 and the seal block 2
After the abutment, the lid 2 is attracted by the sealing electromagnet 23 and the O-ring 22 is elastically deformed by the attraction force, as in the above embodiment, and the opening 3 is completely closed. When the opening 3 is opened, an operation reverse to the above operation may be performed.

FIG. 5 shows another embodiment of the present invention, and the same members as those in the above embodiment are denoted by the same reference numerals.

The gate valve device shown in the figure also has a cylindrical seal block 21 as in the above embodiment, but the seal block 21 of this embodiment is different from that of the above embodiment, and its tip has a fixed angle. It is provided as an inclined end 21a, and the inclined end 21a has a shape obtained by obliquely cutting the abdomen of the cylinder at a certain angle. The seal block 21
The rear portion 21b is connected to the periphery of the opening 3 of the vacuum vessel 1 as in the above embodiment.

The lid 2 is disposed on the side of the inclined end 21a of the seal block 21, and a slope 26 is formed on the surface of the lid 2 facing the inclined end 21a, and the inclined end 21a and the inclined section 26 are formed. Are provided at equal inclination angles.

An O-ring 22 is disposed as an elastic sealing member between the sloped portion 26 and the inclined end 21a, and the O-ring 22 seals the contact portion between the inclined end 21a and the sloped portion 26. It is attached to the lid 2 side.

A neck 4 is attached to the lower part of the lid 2. The neck 4 and its surrounding structure, that is, the neck 4
Is vertically movably inserted into the through hole 5 of the vacuum container 1, the rear end 4b thereof is located inside the partition wall 6, the partition wall 6 is disposed outside the vacuum container 1, and the outer peripheral surface side of the partition wall 6 is located. The radial magnetic support means 11 and the outer permanent magnet bodies 14, 15
Is provided, the radial magnetic support means 11 attracts the magnetic target 13 by the magnetic force of the radial electromagnet portion 12,
As a result, the neck 4 is supported in the radial direction by levitation, while the outer permanent magnet bodies 14, 15 support the neck 4 by the repulsive force with the inner permanent magnets 16, 17 in the axial direction. Since they are similar, detailed description thereof will be omitted.

The partition 6 has a middle portion 27 at the rear end 4b of the neck portion 4, and a portion from the middle portion 27 to the sealing lid 7 is provided as a large-diameter enlarged chamber 28. Is provided with a suction plate 29, and the electromagnet 2 for sealing is provided outside the expanded diameter chamber 28.
3 are provided.

The suction plate 29 is integrally attached to the rear end 4b of the neck 4 via the connection lot 30, and the sealing electromagnet 23 is installed at a position facing the suction plate 29.
The neck 4 is sucked in the axial direction through the suction plate 29, and the O-ring 22 is elastically deformed by the suction force.

A cushion member 31 is provided on the surface of the suction plate 29 to reduce the shock during suction.

Next, the operation of the gate valve device configured as described above will be described with reference to FIG.

In this gate valve device as well, the radial electromagnet portion 21 supports the neck portion 4 in the radial direction, and the outer permanent magnet members 14 and 15 individually support the axial floating support of the neck portion 4, as in the above embodiment. Handle.

With the neck part 4 floating and supported as described above, the entire block 18 rises along the partition wall 6 as it is. Following this, the neck 4 moves upward, and the slope 26 of the lid 2 approaches and faces the inclined end 21 a of the seal block 21.

Thereafter, when an exciting current is supplied to the electromagnet 23 for sealing, the electromagnet 23 for sealing attracts the neck portion 4 in the axial direction through the attraction plate 29, and the O-ring 22
Is elastically deformed, and the opening 3 is completely closed. When the opening 3 is opened, an operation reverse to the above operation may be performed.

Therefore, in the apparatus of each of the above-described embodiments, the thrust load of the neck 4 is reduced by the outer permanent magnet 1
4 and 15, and the elastic deformation force (crushing force) of the O-ring 22 is generated by the electromagnet 23 for sealing. For this reason, the radial electromagnet parts 12, 2
Since the roles of the members 4 and 25 are limited to the radial floating support of the neck portion 4 and the radial electromagnet portion can be reduced in size, the overall device can be made compact, low in cost, and the amount of heat generated from the electromagnet portion can be reduced. Reduction can be achieved.

In particular, the devices of the first and second embodiments
When the opening 3 is opened and closed, the neck 4 of the lid 2 is not moved in parallel in the radial direction, but is swung. Therefore, just shake the neck 4 slightly,
This is enlarged and the lid 2 moves largely back and forth, so that a sufficient movement stroke of the lid 2 required for opening and closing the opening 3 can be obtained. Therefore, from the radial electromagnets 12, 24, 25 to the neck 4
It is sufficient to secure a minute space required for a slight rotation of the neck portion 4 up to the magnetic target 13, and the radial electromagnet portion can be miniaturized in that the distance between them can be set short.

Further, in the apparatus of the third embodiment, when opening and closing the opening 3, the neck 4 of the lid 2 is not moved in parallel in the radial direction but is moved back and forth in the axial direction. There is no need to provide a space for radial translation of the neck portion 4 between the directional electromagnet portion 12 and the magnetic target 13 of the neck portion 4, and the distance therebetween can be set short.
As in the above embodiment, the size of the radial electromagnet can be reduced.

[0069]

According to the gate valve device of the present invention, the thrust load on the neck portion is received by the outer permanent magnet. For this reason, the role of the radial electromagnet portion is only the radial floating support of the neck portion, and the radial electromagnet portion can be made smaller, so that the overall apparatus can be made compact, low cost, and heat generation from the electromagnet portion. The amount can be reduced.

In particular, according to the first to third aspects of the invention, when opening and closing the opening, the neck portion of the lid is not moved in parallel in the radial direction, but is swung. . Therefore, even if the neck portion is slightly shaken, the neck portion is enlarged and the lid body is largely moved back and forth, and a sufficient movement stroke of the lid body required to open and close the opening portion can be obtained. Therefore, only a small space required for a slight rotation of the neck is required between the radial electromagnet and the neck, and the radial electromagnet can be downsized in that the distance therebetween can be set short.

According to the fifth aspect of the present invention, when opening and closing the opening, the neck portion of the lid is moved axially back and forth instead of being translated in the radial direction. It is not necessary to provide a space for radial translation of the neck portion up to the body target, and the distance between them can be set short, so that the radial electromagnet can be downsized in the same manner as described above.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of a gate valve device according to the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is an operation explanatory view of the gate valve device shown in FIG. 1;

FIG. 4 is a sectional view showing another embodiment of the present invention.

FIG. 5 is a sectional view showing another embodiment of the present invention.

FIG. 6 is a sectional view of a conventional gate valve device.

[Explanation of symbols]

 1 Container 2 Lid 3 Opening 4 Neck 12 Radial Electromagnet 11 Radial Magnetic Supporting Means 14, 15 Outer Permanent Magnet 19 Rotating Mechanism (Swinging) 21 Seal Block 22 O-ring (Elastic Seal) 23 For Sealing Electromagnet 24 First radial electromagnet section 25 Second radial electromagnet section 26 Swing controller (swing means)

Claims (5)

[Claims] 1. A lid body disposed at a position facing an opening of a container, a neck portion integrally provided on one side of the lid body, and a radial direction for levitationally supporting the neck portion by a magnetic force in the radial direction. An outer permanent magnet body that axially levitates and supports the neck portion by the repulsive force of the radial magnetic support means including an electromagnet portion and the inner permanent magnet body integrally attached to the neck portion, and the neck portion faces the opening of the container. And a swinging means that swings back and forth and opens and closes the opening in the lid by this swinging operation. 2. The gate valve device according to claim 1, wherein the swing means comprises a radial magnetic support means and a rotating mechanism for rotating the outer permanent magnet body. 3. The radial magnetic supporting means has first and second radial electromagnets disposed along the axial direction of the neck, and the oscillating means includes at least one of the two radial electromagnets. 2. The gate valve device according to claim 1, further comprising a swing control unit that controls one of the exciting currents to change a radial floating position of the neck. 4. A lid is formed of a magnetic material, an elastic sealing member is provided between the opening of the container and the lid, and a seal for sucking the lid is provided in the opening of the container. The gate valve device according to claim 1, further comprising an electromagnet. 5. A cylindrical seal block having a front end formed as an inclined end with a constant angle and a rear part connected to an opening of a container, and a cylindrical seal block located on the inclined end side of the seal block and facing the inclined end. A lid having a slope portion on its surface, an elastic seal member disposed between the slope portion of the lid body and the inclined end of the seal block, a neck portion attached to the lower portion of the lid body, and a diameter of the neck portion. A radial electromagnet for levitationally supporting the neck in the direction, and an outer permanent magnet body for levitationally supporting the neck in the axial direction by the repulsive force of the inner permanent magnet body integrally attached to the neck, and the neck as an axis. A gate valve device, comprising: a sealing electromagnet that sucks in a direction and closely contacts the inclined surface portion of the lid and the inclined end of the seal block by the suction force.