JPH08193963A - Visual field position display of inspection device - Google Patents

Abstract

PURPOSE: To constantly and accurately display the center position and range of visual field even when an object to be inspected moves up and down in parallel by arranging two slit light projectors so that each slit light crosses at right angle on the object to be inspected. CONSTITUTION: When two slit laser projectors 5a and 5b are arranged so that slit beams (a) and (b) cross at right angle on an object 2 to be inspected, two slit beams (a) and (b) mutually are shifted in the longitudinal direction of slit when the object 2 to be inspected moves up and down in parallel. However, the two slit beams do not deviate in the direction of width so that the cross position (X-ray focus) of the laser beams (a) and (b) does not move on the object 2 to be inspected. Also, when the object 2 to be inspected moves up and down in parallel, the change (the spread of a1, a2, b1, and b2) in the X-ray visual field range generated by a visual field angle for connecting the X-ray focus and an image pick-up part 3 can be coped with by providing a spread angle for the laser beams (a) and (b) with a lens and a vibration mirror in advance, thus judging the position and range of visual field without being affected by the up/down motion of the object 2 to be inspected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a visual field position indicating device for instructing an operator of an inspection position or a visual field position in various inspection devices and the like.

[0002]

2. Description of the Related Art FIGS. 2 and 3 are views showing a conventional method in an X-ray inspection apparatus.

In FIG. 2, 1 is an X-ray source, 2 is an object to be inspected,
Reference numeral 3 is an image pickup unit, and 4 is a point laser projector.

The X-ray emitted from the X-ray source 1 is an object to be inspected 2
And is incident on the imaging unit 3. At this time, the point laser projector 4 irradiates the point laser projector 4 directly from an oblique direction so that the position where the X-ray passes through the inspection object 2 can be confirmed with the naked eye and is displayed.

In the example of FIG. 3, 1 is an X-ray source,
Reference numeral 2 is an object to be inspected, 3 is an image pickup unit, 4 is a point laser projector, and 6 is a mirror.

The X-rays emitted from the X-ray source 1 pass through the mirror 6 and the inspection object 2 and enter the image pickup section 3. At this time X
The position where the X-ray passes through the inspection object 2 by the mirror 6 between the radiation source 1 and the inspection object 2 is illuminated with the laser light reflected by the mirror 6 and displayed so that it can be visually confirmed.

[0007]

The above-mentioned prior art has the following problems.

In the example of FIG. 2, when a Z stage for varying the geometric magnification is used as the stage on which the object to be inspected is mounted,
When the stage is driven in the direction of arrow Z, the point laser projector irradiation position changes.

In the example of FIG. 3, the X-ray source 1 and the inspection object 2 cannot be brought into close contact with or close to each other due to the physical dead zone of the mirror. For this reason,
Geometric magnification is reduced. Furthermore, attenuation of X-rays by the mirror 6 occurs.

2 and 3, there is a problem that the field of view cannot be displayed even though the field of view can be known by the point laser.

SUMMARY OF THE INVENTION It is an object of the present invention to eliminate these drawbacks so that the pointing position does not change even when the Z stage for varying the geometric magnification is driven, and that the visual field range can be discriminated by the area display. .

[0012]

In order to achieve the above object, the present invention arranges two slit light projectors at a 90 ° pitch so that slit light intersects 90 ° on an object to be inspected. Further, in the case of area display, the width of the slit laser light is set to be wide.

[0013]

[Operation] Two slit light beams from the slit light projector
By crossing 90 °, the crossing position of the slit light in the vertical axis (Z) direction does not change and the visual field position can be determined even during the parallel vertical movement of the inspection object.

Further, when the Z stage is driven, the change in the visual field range caused by the visual field angle connecting the focal point and the image pickup section is determined by setting the angle of the slit light so that the slit light has a divergence angle. I do.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. 1 using an X-ray inspection apparatus as an example.

Reference numeral 1 is an X-ray source for emitting X-rays, and 2 is an object to be inspected, which is mainly an electronic circuit board. The patterns on the front and back surfaces and inner layers, and the soldering state of mounted components are inspected. Three
Is a device for outputting the state of the object to be inspected from an X-ray transmitted through the object to be inspected 2 in the imaging unit to an external monitor (not shown) or the like, and 5 is a slit laser projector, which is formed on the object to be inspected 90. It is a device that irradiates a slit laser beam that intersects with °.

Two slit laser lights a and b which are formed by the slit laser projectors 5a and 5b and which are orthogonal to each other and which are shown by broken lines are the slit laser lights which are slit longitudinally when the object to be inspected 2 moves up and down in parallel. In the direction
It will be shifted. However, since the slit laser beam does not deviate in the lateral direction, the intersection position of the slit laser light (the intersection position indicates the center point of the X-ray) does not move on the inspection object 2. From this principle, the center position of the X-ray field of view can be discriminated by using two slit laser beams orthogonal to each other.

Further, when the inspection object 2 moves up and down in parallel, a change in the X-ray visual field range caused by a visual field angle connecting the X-ray focal point and the image pickup section, that is, the spread is represented by solid lines a1 and a.
As shown by 2, b1 and b2, the irradiation slit laser light of the slit laser projector 5 can be given a divergence angle by an optical method such as a lens or a vibrating mirror in advance so as to cope with a change in the X-ray visual field range.

By these, the X-ray visual field position and the visual field range of the inspection object 2 under inspection can be determined without being affected by the parallel vertical movement of the inspection object 2.

Further, since there is no physical dead zone due to the mirror, the X-ray source and the object to be inspected can be brought into close contact with or brought close to each other. Therefore, the geometrical magnification can be increased. Further, the X-rays are not attenuated by the mirror.

Although the above-mentioned embodiment is the case of the X-ray inspection apparatus, it is needless to say that it is effective also in the inspection apparatus using the ordinary TV camera. For example, it is possible to confirm whether the center of the object to be inspected captured by the television camera is correctly located at the center of the screen without looking at the image on the monitor.

Further, in this embodiment, the laser light source is used as the means for obtaining the slit light, but it is not always necessary to use a laser, and for example, an ordinary spot light beam is rotated by a rotating mirror,
Scanning may be performed by a vibrating mirror or the like.

[0023]

As described above, according to the present invention, the slit light beam is
Irrespective of parallel vertical movement of the object to be inspected, the same line is continuously irradiated in any case. As a result, the center position and range of the visual field can be correctly displayed in any case when the test object is moved up and down in parallel.

[Brief description of drawings]

FIG. 1 is an overall configuration diagram of the present invention.

FIG. 2 is a configuration diagram of a conventional technique.

FIG. 3 is a side view of a conventional technology configuration.

[Explanation of symbols]

1 X-ray source, 2 inspection object, 3 imaging unit, 4 point laser projector, 5 slit laser projector, 6 mirror

Claims (3)

[Claims] 1. A field-of-view position indicating device for an inspection device, wherein two slit light projectors are arranged on an object to be inspected so that each slit light intersects at 90 °. 2. The visual field position pointing device according to claim 1, wherein a slit light projector having a spread angle of slit light equal to the viewing angle is used. 3. The field-of-view position display device for an inspection apparatus, wherein the slit light projector according to claim 1 is a laser beam projector.