JPH08192309A - Inner layer circuit router for electronic part package - Google Patents

Abstract

PURPOSE: To detect an electric signal without any contact with a cutting rotary shaft so as to accomplish high speed rotation of the rotary shaft and so as to improve productivity by detecting a position of an inner layer copper foil by means of a ring sensor exciting high frequency micro current in a device routing an inner layer circuit in an electronic part package. CONSTITUTION: In a NC router machine, a cemented carbide or sintered diamond cutting edge 30 is fixed at the tip of a rotary shaft 20 via a chuck, and according to axial directional reciprocation of the rotary shaft 20, the spot facing is carried out by means of the rotating cutting edge 30. In this case, a ring sensor 10 detecting an electric signal without any contact is arranged in the upper part of the rotary shaft 20. The ring sensor 10 excites high frequency micro current and outputs an electric signal at instant when the cutting edge 30 is brought into contact with a face 50 to be cut so as to transmit it to a numerical computing device 40. By means of a program control of the numerical computing device 40, an axial directional position of the rotary shaft 20 is controlled, and high speed rotation of the rotary shaft 20 is accomplished.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus for an electronic component package containing an electronic component such as a semiconductor chip, and more particularly to an inner layer shaving apparatus.

[0002]

2. Description of the Related Art Usually, a multilayer package for electronic parts having a concave cavity is formed by pre-opening windows at desired places such as inner layer terminals and die pads, and then using an adhesive or a low flow prepreg. A manufacturing method is adopted in which layers are laminated and then a required circuit is formed on the surface layer. On the other hand, the inner layer shaving method is generally used for prepreg and inner layer,
After laminating the outer layer integrally, the required circuit of the inner layer is exposed by shaving, so the reliability of insulation between circuits is high,
Further, due to the excellent sealing property, the reliability of moisture absorption resistance and moisture permeability resistance is improved.

[0003]

However, in the above-mentioned inner layer shaving method, since the position of the inner layer copper foil in the height direction varies, the position of the inner layer copper foil having the circuit to be exposed is electrically changed. It is necessary to detect by the contact or non-contact method, but when using the electric contact detection method, it is necessary to avoid the electrically defective conductor of the lubricating member (air bearing, bearing, etc.) and conduct electricity to the cutting rotary shaft. However, it is extremely difficult to stably energize a high-speed rotating spindle such as a high-frequency spindle. It is possible to make electrical contact with a low-speed rotating spindle such as a belt, but the rotation speed is low and productivity is poor. Further, in the case of the electrical non-contact detection method, since the detection method is extremely special, high-speed detection cannot be performed, and the productivity is further deteriorated and the cost is increased as compared with the electrical contact detection method. In addition, both the electrical contact and non-contact methods measure one point and estimate and control the distance between the cutting blade and the inner layer copper foil surface to be cut. May cause over-cutting or under-cutting. In addition, it is possible to prevent overcutting or undercutting by cutting the copper foil to a certain extent by using an inner copper foil having a suitable thickness, but if the copper foil is thick, the etching factor is increased. Considering this, it becomes difficult to form a fine circuit. The present invention has been made in view of such problems,
The purpose is to detect electrical signals without contacting the cutting rotary shaft, enable high-speed rotation of the rotary shaft, improve productivity, and reduce costs. Also, measure multiple points on the inner layer copper foil surface to be machined beforehand, calculate the positional relationship of each measurement point in the depth direction to calculate a virtual surface, and control the cutting blade along this virtual surface. Therefore, it is intended to prevent excessive cutting and insufficient cutting due to waviness in the height direction of the inner layer copper foil in the inner layer cutting method.

[0004]

In order to achieve the above object, the inner layer shaving method of the present invention has the following constitution. That is, it is characterized in that the electric signal is detected in a non-contact manner with the cutting rotary shaft to rotate the rotary shaft at a high speed. Further, it is characterized in that a virtual surface is calculated by calculation based on a plurality of measurement points on the surface to be cut, and the cutting blade is controlled along the virtual surface.

[0005]

According to the present invention, since an electric signal is detected in a non-contact manner with a cutting rotary shaft, it is not necessary to consider an electrically defective conductor such as a lubricating member, and a contact for electrical conduction is required. Therefore, by rotating the rotary shaft at a high speed, it is possible to improve productivity and reduce cost. In addition, by calculating a virtual surface based on multiple measurement points and controlling the cutting blade along this virtual surface, it is possible to prevent over-cutting and under-cutting in the inner layer cutting process, and improve the yield. It becomes possible to do.

[0006]

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 shows the overall configuration of an inner layer shaving apparatus suitable for the present invention. This device is composed of a generally known NC router machine, and in the figure, only the structure of the main part relevant to the present invention is shown. In the figure, reference numeral 20 is a rotary shaft, and a cutting blade 30 of cemented carbide or sintered diamond or the like is fixed to the tip of the rotary shaft via a chuck. The rotary shaft 20 is reciprocated in the axial direction, that is, the Z-axis direction, and the rotary cutting blade performs sag processing. A ring sensor 10 that detects an electric signal in a non-contact manner is installed above the rotating shaft 20. The ring sensor 10 excites a high-frequency minute current, and an electric signal is output at the moment when the cutting blade 30 contacts the surface to be cut 50 by using the device itself as a conductor, and the signal is transmitted to the numerical calculation device 40. In the numerical operation device 40, program control is performed by the propagated electric signal,
Controls the Z-axis direction of the rotation axis. The surface to be cut 50 needs to have conductivity. FIG. 2 shows a plurality of measurement points viewed from the top surface direction of the surface to be cut 50. In the figure, 9 measurement points are used for convenience. Measurement point P1, measurement point P
2 and the measurement point P3 connect the triangular surface 130. The triangular surface 130 has an inclination corresponding to the height of each measurement point (FIG. 3). Similarly, if the triangular surfaces are connected one after another, the cut surface 50 can be a virtual surface in which eight triangular surfaces are continuous (FIG. 4). By controlling the cutting blade along this virtual surface, it is possible to perform highly accurate counterboring on the substance of the surface to be cut 50. It is desirable to increase the number of measurement points because the accuracy is further improved. Further, it is more effective to use a highly accurate and high speed measuring device and a high speed numerical operation device.

[0007]

According to the present invention, since an electric signal is detected in a non-contact manner with a cutting rotary shaft, it is not necessary to consider an electrically defective conductor such as a lubricating member and a contact for electrical conduction. Therefore, by rotating the rotary shaft at a high speed by using a normal high-speed high-frequency spindle or the like, productivity can be improved and cost can be reduced. Further, since the virtual surface is calculated by calculation based on a plurality of measurement points, this virtual surface represents the substance of the inner layer copper foil surface with high accuracy, and the cutting blade is controlled along this virtual surface, It is possible to prevent excessive cutting and insufficient cutting due to waviness in the height direction of the inner layer copper foil in the inner layer shaving method.
As a result, the yield can be improved and the cost can be reduced.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a main part of an inner layer shaving device.

FIG. 2 is a diagram of a plurality of measurement points on a surface to be cut.

FIG. 3 is a diagram of a triangular surface connecting measurement points.

FIG. 4 is a diagram of a virtual surface in which triangular surfaces are continuous.

[Explanation of symbols]

 10 ring sensor 20 rotary shaft 30 cutting blade 40 numerical operation device 50 surface to be cut 60 workpiece 70 measuring point P1 80 measuring point P2 90 measuring point P3 100 height of measuring point P1 110 height of measuring point P2 120 of measuring point P3 Height 130 Triangular surface connecting measurement points

Claims (2)

[Claims] 1. A device for shaving an inner layer circuit of a multi-layer electronic component package having a concave cavity portion, by detecting the position of the inner layer copper foil by using a ring sensor that excites a high-frequency minute current. An inner layer circuit shaving device which is capable of rotating an axis of rotation at a high speed by detecting an electric signal without contacting the axis of rotation. 2. A plurality of height positions on the inner copper foil surface to be carved are measured in advance, and a virtual surface connecting the measured points is calculated,
The inner layer circuit shaving device according to claim 1, wherein the cutting blade is controlled along the virtual surface.