JPH08190981A - Heating element and electric heater, and their manufacture - Google Patents

Heating element and electric heater, and their manufacture

Info

Publication number
JPH08190981A
JPH08190981A JP41580890A JP41580890A JPH08190981A JP H08190981 A JPH08190981 A JP H08190981A JP 41580890 A JP41580890 A JP 41580890A JP 41580890 A JP41580890 A JP 41580890A JP H08190981 A JPH08190981 A JP H08190981A
Authority
JP
Japan
Prior art keywords
heating element
heat
substrate
powder
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP41580890A
Other languages
Japanese (ja)
Inventor
好夫 ▲たかしま▼
Yoshio Takashima
Keiichiro Nomoto
啓一郎 野本
Yasunori Yoshida
泰憲 吉田
Katsutoshi Rikihisa
勝利 力久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyushu Electric Power Co Inc
Nippon Tungsten Co Ltd
Original Assignee
Kyushu Electric Power Co Inc
Nippon Tungsten Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyushu Electric Power Co Inc, Nippon Tungsten Co Ltd filed Critical Kyushu Electric Power Co Inc
Priority to JP41580890A priority Critical patent/JPH08190981A/en
Publication of JPH08190981A publication Critical patent/JPH08190981A/en
Pending legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)

Abstract

PURPOSE: To obtain a heating element and an electric heater using the heating element which have a good thermal efficiency, and do not generate a burnout or a removal from a substrate, by forming an electric resisting heating element made by compounding a heat resisting ceramics, and a metal or an alloy for electric heating, on the surface of a heat resisting ceramic substrate in the film form by a flame coating. CONSTITUTION: A mixture powder of a heat resisting ceramics powder consisting of a ceramics such as an alumina or an aluminum nitride, and an electric insulating material such as a heat resisting glass; and a metal powder or an alloy powder for electric heating; is flame coated on the surface of the substrate of a heating element. As a result, a heating element can be formed on the surface of a heat resisting ceramics substrate easily, in a film form which is hardly removed. An electric heater made by providing an electrode at the end of a heating element has a good heating efficiency, generates no burnout and removal of the heating element, and generates the heating stably. In this case, it is favorable to include the heat resisting ceramics of 60 to 90vol.% in the heating element.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、プレートヒーター等に
使用される発熱体とそれを使用した電熱器およびその製
造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating element used in a plate heater or the like, an electric heater using the heating element, and a method for manufacturing the same.

【0002】[0002]

【従来の技術】従来からの面状ヒーターは、特開昭59
−130080号公報、特開昭61−277186号公
報や特開昭63−64280号公報に開示されているよ
うなものがある。これらは電気絶縁基板(以下、基板と
呼ぶ)の上にセラミックス発熱体や金属抵抗体を溶射
し、電気絶縁物被膜層(以下、被膜層と呼ぶ)を設けた
りしたものであった。
2. Description of the Related Art A conventional planar heater is disclosed in Japanese Laid-Open Patent Publication No. 59-59.
-130080, JP-A 61-277186 and JP-A 63-64280. These are ones in which a ceramic heating element or a metal resistor is sprayed on an electrically insulating substrate (hereinafter referred to as a substrate) to provide an electrically insulating coating layer (hereinafter referred to as a coating layer).

【0003】しかしながら、特開昭59−130080
号公報のTiO2のように酸化物半導体を抵抗体とした場
合、溶射膜の形成は容易であるが、抵抗体の温度抵抗係
数が負となり温度の制御がむずかしくなる。特開昭61
−277186号公報のように金属線を使用するとほう
ろうなどの被膜層が必要となり、発熱基板の熱容量が大
きくなりヒーターの応答性や熱効率が悪くなる。また特
開昭63−634280号公報のようにアルミニウムや
銅など一般の金属の溶射被膜を抵抗体とする場合、基板
と金属抵抗体の熱膨張係数の違いによる剥離の問題が起
こり、また金属抵抗体の電気抵抗率が小さいために、低
い電圧で大きな電流を通じるための専用の電源が必要と
なる。
However, Japanese Patent Laid-Open No. 59-130080.
When an oxide semiconductor is used as a resistor, such as TiO 2 in Japanese Patent Laid-Open Publication No. 2003-242242, the sprayed film can be formed easily, but the temperature resistance coefficient of the resistor becomes negative, making temperature control difficult. JP 61
When a metal wire is used as in Japanese Patent Publication No. 277186, a coating layer such as enamel is required, and the heat capacity of the heat generating substrate is increased, so that the responsiveness and heat efficiency of the heater are deteriorated. Further, when a thermal sprayed coating of a general metal such as aluminum or copper is used as the resistor as in Japanese Patent Laid-Open No. 63-634280, there is a problem of peeling due to the difference in the thermal expansion coefficient between the substrate and the metal resistor, and the metal resistance. Due to the low electrical resistivity of the body, it requires a dedicated power supply to carry large currents at low voltages.

【0004】すなわち、従来の面状ヒーターは抵抗体の
抵抗温度が負であったり、ヒーターの熱容量が大きかっ
たり、抵抗体が剥離しやすくかつ抵抗の大きな抵抗体が
作れなかったりして、実用上の問題点があった。
That is, in the conventional sheet heater, the resistance temperature of the resistor is negative, the heat capacity of the heater is large, the resistor is easily peeled off, and a resistor having a large resistance cannot be produced. There was a problem.

【0005】[0005]

【発明が解決しようとする課題】本発明は前記従来技術
の問題点に鑑み、熱効率がよく、断線や基板からの剥離
がない発熱体とそれを使用した電熱器およびその製造方
法を提供することを目的とするものである。
SUMMARY OF THE INVENTION In view of the above-mentioned problems of the prior art, the present invention provides a heating element which has good thermal efficiency and is free from disconnection and separation from the substrate, an electric heater using the heating element, and a method for manufacturing the same. The purpose is.

【0006】[0006]

【課題を解決するための手段】本発明者は、耐熱性セラ
ミックスと電熱用金属または合金とを複合化した電気抵
抗発熱体を得、これを溶射によって耐熱性セラミックス
基板の表面に膜状に形成することによって前記課題を解
決した。
Means for Solving the Problems The present inventors have obtained an electric resistance heating element in which a heat resistant ceramic and a metal or an alloy for electric heating are combined and formed into a film on the surface of the heat resistant ceramic substrate by thermal spraying. The above-mentioned problem was solved by doing.

【0007】発熱体の成分である電熱用金属または合金
は、抵抗温度係数が小さく、空気中の耐酸化性にすぐ
れ、体積電気抵抗率が金属としては大きく、その名のご
とく電熱用にすぐれている。ヒーター基板の材料と発熱
体の成分である耐熱性セラミックスとは同一の材料もし
くは組成的に類似の材料、または熱的に基板と反応する
耐熱性セラミックスである電気絶縁材料であることが好
ましく、基板と発熱体との熱膨張係数の差を小さくし密
着強度をより高めることができる。
The metal or alloy for electric heating, which is a component of the heating element, has a small temperature coefficient of resistance, excellent resistance to oxidation in air, and a large volume electric resistivity as a metal. As its name implies, it is excellent for electric heating. There is. It is preferable that the material of the heater substrate and the heat-resistant ceramic that is a component of the heating element are the same material or similar in composition, or an electrically insulating material that is a heat-resistant ceramic that thermally reacts with the substrate. It is possible to reduce the difference in the coefficient of thermal expansion between the heating element and the heating element and further improve the adhesion strength.

【0008】また発熱体の成分である耐熱性セラミック
スの含有量が、60体積%より少なくなると、基板との
十分な密着強度が得られず、基板と発熱体との熱膨張係
数の差に起因して剥離し易くなる。一方90体積%より
多くなると、通電しにくくなり、導電部の表面負荷密度
が大きくなって、通電しても局部的に発熱して断線して
しまう。このため発熱体の成分である耐熱性セラミック
スの含有量は60〜90体積%であることが好ましい。
When the content of the heat-resistant ceramics, which is a component of the heating element, is less than 60% by volume, sufficient adhesion strength with the substrate cannot be obtained, which is caused by the difference in thermal expansion coefficient between the substrate and the heating element. It becomes easy to peel off. On the other hand, when the content is more than 90% by volume, it becomes difficult to conduct electricity, the surface load density of the conductive portion becomes large, and even if electricity is applied, heat is locally generated and the wire is broken. Therefore, the content of the heat-resistant ceramics, which is a component of the heating element, is preferably 60 to 90% by volume.

【0009】そして発熱体の成分である耐熱性セラミッ
クスとしては、アルミナや窒化アルミニウム等のセラミ
ックスや耐熱ガラス等の電気絶縁材料が適している。さ
らに、ほん発明の発熱体の基板上への形成の方法は種々
あるが、耐熱性セラミックス粉末と電熱用金属または合
金粉末からなる混合粉末を溶射することで、容易に耐熱
性セラミックス基板の表面に、発熱体を剥離しにくい膜
状に形成することができる。そしてこの様にして形成し
た発熱体の端部に電極を設けた電熱器は、前記のように
被0層を必要としないので熱効率が良く、発熱体の断線
や基板からの剥離がなく、経時的にも安定した発熱をす
る。
Ceramics such as alumina and aluminum nitride, and electrically insulating materials such as heat-resistant glass are suitable as the heat-resistant ceramics as a component of the heating element. Furthermore, although there are various methods for forming the heating element of the invention on the substrate, the surface of the heat-resistant ceramic substrate can be easily coated on the surface of the heat-resistant ceramic substrate by spraying a mixed powder of the heat-resistant ceramic powder and the metal or alloy powder for electric heating. It is possible to form the heating element in a film shape that is difficult to peel off. The electric heater having electrodes formed at the end portions of the heating element thus formed does not require the layer to be covered as described above, so that the heating efficiency is high and there is no disconnection of the heating element or peeling from the substrate. Also produces stable heat.

【0010】溶射の場合、溶射の火炎により基板が加熱
されると溶射膜の剥離を生じやすく、基板が過熱しない
ように基板の冷却をおこないながら溶射するのが一般的
である。しかしながら、耐熱性セラミックス基板に耐熱
性酸化粉末と電熱用金属または合金の粉末からなる混合
粉末を溶射するときは、基板を加熱することで、より強
い溶射膜を形成することができる。すなわち、基板を加
熱することで溶射皮膜の冷却速度が遅くなり、溶射され
た高温の耐熱性セラミックスや電熱用金属の酸化皮膜と
基板との間で相互拡散による結合がおこるものと考えら
れる。基板加熱の効果は300℃から現れ、一方、基板
の変形や電熱用金属または合金の過剰な酸化が進むので
800℃以下が望ましい。しかしながら、基板の加熱を
行うと、溶射終了後の冷却時に溶射膜の剥離が生じやす
いので、溶射膜と基板の熱膨張率をなるべく合わせる必
要がある。
In the case of thermal spraying, when the substrate is heated by the flame of thermal spraying, the thermal sprayed film is likely to be peeled off, and the thermal spraying is generally performed while cooling the substrate so that the substrate does not overheat. However, when spraying a mixed powder of a heat-resistant oxide powder and a powder of a metal or an alloy for electric heating onto a heat-resistant ceramic substrate, by heating the substrate, a stronger sprayed film can be formed. That is, it is considered that by heating the substrate, the cooling rate of the sprayed coating becomes slower, and a bond due to mutual diffusion occurs between the sprayed high temperature heat-resistant ceramics or the oxide film of the metal for electric heating and the substrate. The effect of heating the substrate appears from 300 ° C., on the other hand, the temperature is preferably 800 ° C. or lower because deformation of the substrate and excessive oxidation of the metal or alloy for electric heating proceed. However, if the substrate is heated, the thermal spray film is likely to be peeled off at the time of cooling after completion of thermal spraying, so it is necessary to match the thermal expansion coefficients of the thermal spray film and the substrate as much as possible.

【0011】尚、本発明の発熱体の組成を基板に近くな
るにつれ耐熱性セラミックスの成分が多くなるように、
成分的に傾斜させれば基板と溶射膜の熱膨張率差により
生じる応力を小さくすることができ、より経時的に安定
した発熱をする電熱器となる発熱体と基板の組合せが得
られる。
It should be noted that, as the composition of the heating element of the present invention becomes closer to the substrate, the component of the heat resistant ceramics increases,
If the components are tilted, the stress caused by the difference in the coefficient of thermal expansion between the substrate and the sprayed film can be reduced, and a combination of a heating element and a substrate can be obtained that serves as an electric heater that generates more stable heat over time.

【0012】[0012]

【実施例】以下実施例により本発明を詳細に説明する。
ここでとり上げるものは、本発明を代表するものであり
これらに限定されるものではない。たとえば、溶射の方
法は減圧プラズマ溶射、爆発溶射、火炎溶射等でも可能
である。
The present invention will be described in detail with reference to the following examples.
What is taken up here is representative of the present invention and is not limited thereto. For example, the thermal spraying method may be low pressure plasma spraying, explosive spraying, flame spraying, or the like.

【0013】[0013]

【実施例1】耐熱性セラミックスとニッケルクロム合金
とからなる表1に示す成分の溶射用粉末を作製した。
Example 1 A thermal spraying powder composed of heat-resistant ceramics and a nickel chromium alloy and having the components shown in Table 1 was prepared.

【0014】[0014]

【表1】 [Table 1]

【0015】この粉末を結晶化ガラスの基板1(100
mm×25mm×3mm)に図1の斜線部に示すように、大気
中でプラズマ溶射して被膜2を形成した。プラズマ溶射
時には、基板の余熱を500℃で行った。この被膜の剥
離状態および厚み、電気抵抗の測定結果を表2に示す。
なお図1中数値の単位はmmである。
This powder was added to a crystallized glass substrate 1 (100
mm × 25 mm × 3 mm), as shown by the hatched portion in FIG. 1, plasma coating was performed in the atmosphere to form the coating 2. During plasma spraying, residual heat of the substrate was applied at 500 ° C. Table 2 shows the peeled state and thickness of this coating, and the measurement results of the electrical resistance.
The unit of numerical values in FIG. 1 is mm.

【0016】[0016]

【表2】 [Table 2]

【0017】これらの試片のうち、剥離しなかったもの
に電流を通じ発熱試験を行った。電流はそれぞれの抵抗
値に応じて60wになるように設定した。
An exothermic test was conducted by passing an electric current through the test pieces that did not peel off. The current was set to 60w according to each resistance value.

【0018】この通電試験後の剥離状態、被膜の到達温
度の結果を第2表に示す。表2の結果のように、ニッケ
ルクロム合金と耐熱性セラミックスの混合物、特に耐熱
性セラミックスを60〜90体積%含有する混合物を用
いることで結晶化ガラスの表面に被膜を形成することが
でき、しかもその被膜は表3に示すように通電により発
熱させることができた。
Table 2 shows the results of the peeled state and the temperature reached by the coating film after the current-carrying test. As shown in the results in Table 2, by using a mixture of nickel-chromium alloy and heat-resistant ceramics, particularly a mixture containing 60-90% by volume of heat-resistant ceramics, a film can be formed on the surface of crystallized glass, and As shown in Table 3, the coating was able to generate heat by energization.

【0019】[0019]

【表3】 [Table 3]

【0020】[0020]

【実施例2】耐熱性セラミックスとニッケルクロム合金
とからなる表4に示す成分の溶射用粉末を作製した。
Example 2 A thermal spraying powder having the components shown in Table 4 consisting of heat resistant ceramics and a nickel chromium alloy was prepared.

【0021】[0021]

【表4】 [Table 4]

【0022】この粉末を結晶化ガラスの基板(100mm
×25mm×3mm)に実施例1同様に、大気中でプラズマ
溶射した。プラズマ溶射時には、基板の予熱を500℃
で行った。この被膜の剥離状態および厚み、電気抵抗の
測定結果を表5に示す。
This powder was applied to a crystallized glass substrate (100 mm
(× 25 mm × 3 mm) was plasma sprayed in the atmosphere in the same manner as in Example 1. Preheat the substrate to 500 ° C during plasma spraying
I went in. Table 5 shows the peeled state and thickness of this coating, and the measurement results of the electrical resistance.

【0023】これらの試片に電流を通じ発熱試験を行っ
た。電流はそれぞれの抵抗値に応じて60wになるよう
に設定した。この通電試験後の剥離状態、被膜の到達温
度の結果を表3に併せて示す。表5の結果のように、ニ
ッケルクロム合金と耐熱性セラミックスの混合物を混合
比を変えながら溶射することにより、結晶化ガラスの表
面に被膜を形成することができた。その被膜は表3に示
すように通電により発熱させることができ、しかもその
被膜は通電の断線による温度変化に対し、著しく断線し
にくくなった。
A heat generation test was conducted by passing an electric current through these test pieces. The current was set to 60w according to each resistance value. Table 3 also shows the results of the peeled state and the temperature reached by the coating film after the current-carrying test. As shown in the results of Table 5, by spraying the mixture of the nickel-chromium alloy and the heat-resistant ceramics while changing the mixing ratio, it was possible to form the coating film on the surface of the crystallized glass. As shown in Table 3, the coating film was able to generate heat by energization, and the coating film was much less likely to be broken due to temperature change due to breaking of energization.

【0024】[0024]

【表4】[Table 4]

【0025】[0025]

【表5】 [Table 5]

【0026】[0026]

【実施例3】耐熱性セラミックスと鉄クロムアルミニウ
ム合金とからなる表6に示す成分の溶射用粉末を作製し
た。
Example 3 A thermal spraying powder having the components shown in Table 6 made of heat resistant ceramics and iron-chromium-aluminum alloy was prepared.

【0027】[0027]

【表6】 [Table 6]

【0028】この粉末をコージェライトの基板(100
mm×25mm×3mm)に実施例1同様に、大気中でプラズマ
溶射して被膜を形成した。プラズマ溶射時には、基板の
予熱を500℃で行った。この被膜の剥離状態および厚
み、電気抵抗の測定結果を表7に示す。
This powder was applied to a cordierite substrate (100
(mm × 25 mm × 3 mm) was plasma sprayed in the atmosphere in the same manner as in Example 1 to form a coating. During plasma spraying, the substrate was preheated at 500 ° C. Table 7 shows the peeled state and thickness of this coating, and the measurement results of the electrical resistance.

【0029】[0029]

【表7】 [Table 7]

【0030】これらの試片のうち、剥離しなかったもの
に電流を通じ発熱試験を行った。電流はそれぞれの抵抗
値に応じて30wになるように設定した。この通電試験
後の剥離状態、被膜の到達温度の結果を表8に示す。表
7の結果のように、鉄クロムアルミ合金と耐熱性セラミ
ックス混合物、特にを30〜75%含有する混合物を用
いることでコージュライトの表面に被膜を形成すること
ができ、しかもその被膜は表8に示すように通電により
発熱させることができた。
An exothermic test was conducted by passing an electric current through the test pieces that did not peel off. The current was set to 30w according to each resistance value. Table 8 shows the results of the peeled state and the temperature reached by the coating film after the current application test. As can be seen from the results in Table 7, a coating can be formed on the surface of cordierite by using a mixture containing an iron-chromium-aluminum alloy and a heat-resistant ceramics, especially a mixture containing 30 to 75% of that, and the coating is formed in Table 8. It was possible to generate heat by energizing as shown in FIG.

【0031】[0031]

【表8】 [Table 8]

【0032】[0032]

【発明の効果】以上述べて来た如く請求項1ないし請求
項2記載の発熱体は、発熱体を覆う被覆層がないので熱
効率が良く、これを用いた請求項3記載の発熱器は基板
と発熱体の熱膨張係数の差が大きくないので断線や基板
からの剥離がなく安定した発熱をし、耐酸化性が向上し
寿命が従来のものより大幅に延びる。
As described above, the heating element according to claims 1 and 2 has good thermal efficiency because it does not have a coating layer that covers the heating element, and the heating element according to claim 3 using this substrate is a substrate. Since the difference in the coefficient of thermal expansion between the heating element and the heating element is not large, stable heat generation is achieved without disconnection or peeling from the substrate, oxidation resistance is improved, and the life is greatly extended compared to conventional ones.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例を説明するための図。FIG. 1 is a diagram for explaining an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1.基板 2.被膜 1. Substrate 2. Film

───────────────────────────────────────────────────── フロントページの続き (72)発明者 吉田 泰憲 福岡市南区塩原2丁目1番47号 九州電力 株式会社内 (72)発明者 力久 勝利 福岡市南区塩原2丁目1番47号 九州電力 株式会社 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yasunori Yoshida 2- 1-47 Shiobara, Minami-ku, Fukuoka City Kyushu Electric Power Co., Inc. Electric Power Co., Ltd.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】耐熱性セラミックスと電熱用金属または合
金の複合物からなることを特徴とする発熱体。
1. A heating element comprising a composite of heat resistant ceramics and a metal or alloy for electric heating.
【請求項2】耐熱性セラミックスを60〜90体積%含
有することを特徴とする請求項1記載の発熱体。
2. The heating element according to claim 1, which contains 60 to 90% by volume of heat resistant ceramics.
【請求項3】耐熱性セラミックスと電熱用金属または合
金の複合物からなる発熱体を、耐熱性セラミックス基板
の表面に膜状に形成し、該発熱体の端部に電極を配設し
たことを特徴とする電熱器。
3. A heating element made of a composite of a heat-resistant ceramic and a metal or alloy for electric heating is formed in a film shape on the surface of a heat-resistant ceramic substrate, and electrodes are arranged at the end of the heating element. Characteristic electric heater.
【請求項4】耐熱性セラミックス粉末と電熱用金属また
は合金の粉末からなる混合粉末を溶射して、耐熱性セラ
ミックス基板の表面に発熱体を膜状に形成した後、該発
熱体の端部に電極を配設することを特徴とする電熱器の
製造方法。
4. A heat-generating ceramic film is formed on the surface of a heat-resistant ceramic substrate by spraying a mixed powder of the heat-resistant ceramic powder and a powder of a metal or alloy for electric heating, and then the heat-generating ceramic is formed on the end of the heat-generating body. A method for manufacturing an electric heater, characterized in that electrodes are provided.
【請求項5】耐熱性セラミックス粉末と電熱用金属また
は合金の粉末からなる混合粉末を溶射して、耐熱性セラ
ミックス基板の表面に発熱体を膜状に形成するときに、
耐熱性セラミックス基板を、300℃以上800℃以下
に加熱することを特徴とする請求項4記載の電熱器の製
造方法。
5. When a heat-generating ceramics powder and a powder mixture of an electric heating metal or an alloy powder are sprayed to form a heating element in the form of a film on the surface of the heat-resistant ceramics substrate,
The method for manufacturing an electric heater according to claim 4, wherein the heat-resistant ceramic substrate is heated to 300 ° C. or higher and 800 ° C. or lower.
【請求項6】溶射のたびに耐熱性セラミックス粉末と電
熱用金属または合金の粉末の混合比を変えて、耐熱性セ
ラミックス粉末と電熱用金属または合金の粉末からなる
混合粉末を繰返し溶射して、電熱用金属または合金の混
合比が基板から離れるにつれて段階的に増すような発熱
体とすることを特徴とする請求項4記載の電熱器の製造
方法。
6. A mixed powder comprising the heat-resistant ceramic powder and the metal or alloy powder for electric heating is repeatedly sprayed by changing the mixing ratio of the heat-resistant ceramic powder and the metal or alloy powder for electric heating every spraying. 5. The method for manufacturing an electric heater according to claim 4, wherein the heating element is such that the mixing ratio of the metal or alloy for electric heating increases stepwise as it goes away from the substrate.
JP41580890A 1990-12-27 1990-12-27 Heating element and electric heater, and their manufacture Pending JPH08190981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP41580890A JPH08190981A (en) 1990-12-27 1990-12-27 Heating element and electric heater, and their manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP41580890A JPH08190981A (en) 1990-12-27 1990-12-27 Heating element and electric heater, and their manufacture

Publications (1)

Publication Number Publication Date
JPH08190981A true JPH08190981A (en) 1996-07-23

Family

ID=18524091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP41580890A Pending JPH08190981A (en) 1990-12-27 1990-12-27 Heating element and electric heater, and their manufacture

Country Status (1)

Country Link
JP (1) JPH08190981A (en)

Similar Documents

Publication Publication Date Title
EP0855764B1 (en) Ceramic member-electric power supply connector coupling structure
CN102165841A (en) Ceramic heater
JPH07282961A (en) Heater
JPH08190981A (en) Heating element and electric heater, and their manufacture
JPH08315964A (en) Heating element, electric heater, and its manufacture
JPH0870036A (en) Electrostatic chuck
JP4122723B2 (en) Object holder
JP2001358207A (en) Silicon wafer support member
JPH09172057A (en) Electrostatic chuck
JP3681824B2 (en) Ceramic bonded body and ceramic bonding method
JPH06295779A (en) Ceramic heater
JPH0969555A (en) Electrostatic chuck
JPH02191303A (en) Manufacture of positive-characteristic thermistor
JPH0722159A (en) Panel heater with ptc
JP2003188248A (en) Wafer-supporting member
JP2002299015A (en) Ceramic heater
JP2003327419A (en) Discharge body for generating ozone
JP2001319760A (en) Heater substrate
JP4199604B2 (en) Aluminum nitride ceramic heater
JPH0521136A (en) Ceramic heater
JP3216737B2 (en) Spray heating element for composite particles and its manufacturing method
JP2002184605A (en) Electrical resistor
JP2002289330A (en) Heater
JPH10189225A (en) Ceramic heater
JPH02250231A (en) High temp erature operating element