JP3216737B2 - Spray heating element for composite particles and its manufacturing method - Google Patents
Spray heating element for composite particles and its manufacturing methodInfo
- Publication number
- JP3216737B2 JP3216737B2 JP26275592A JP26275592A JP3216737B2 JP 3216737 B2 JP3216737 B2 JP 3216737B2 JP 26275592 A JP26275592 A JP 26275592A JP 26275592 A JP26275592 A JP 26275592A JP 3216737 B2 JP3216737 B2 JP 3216737B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- conductive
- insulating
- particles
- thermal spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
- Coating By Spraying Or Casting (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【0001】[0001]
【産業上の利用分野】本発明は、通電発熱させるための
溶射発熱体に係り、特に導電性物質又は絶縁体か半導体
物質をそれぞれの粒子にコーテングした複合粒子を溶射
加工した溶射発熱体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermal spraying heating element for generating electric current, and more particularly to a thermal spraying heating element formed by spraying composite particles obtained by coating a conductive material, an insulator or a semiconductor material on each particle.
【0002】[0002]
【従来の技術】従来の発熱体は、金属、カーボン、導電
性セラミックス及び前記導電性物質と絶縁物質の混合物
をその特性に応じて塗布、焼結、シース化、蒸着、溶射
等の加工技術により製造していた。しかしながら、例え
ば金属の溶射加工で発熱体を形成する場合抵抗率が通常
10-4オーダの為、所定の抵抗値を得るためには発熱体
の長さを(ジグ等を用いて)長くしたり、又その断面積
を小さくする必要があったが、その厚みには限度がある
ため、特に電力密度が小さいという問題があった。ま
た、金属の溶射材料は約1万円/kgと高価である。一
方、TiO2 等の導電性セラミックスは電気特性や耐久
性に問題があった。2. Description of the Related Art A conventional heating element is formed by applying, sintering, sheathing, vapor-depositing, or spraying a metal, carbon, conductive ceramic, or a mixture of the above-mentioned conductive substance and insulating substance according to its characteristics. Had been manufactured. However, for example, when a heating element is formed by thermal spraying of metal, the resistivity is usually on the order of 10 -4, and therefore, in order to obtain a predetermined resistance value, the length of the heating element is increased (using a jig or the like). In addition, it was necessary to reduce the cross-sectional area, but there was a problem that the power density was particularly small because the thickness was limited. Further, a metal spray material is expensive at about 10,000 yen / kg. On the other hand, conductive ceramics such as TiO 2 have problems in electric characteristics and durability.
【0003】このような技術を開示した文献として、特
開昭59−94394号公報、特公平2−56425号
公報がある。一方、特開昭64−8260号公報に金属
−セラミック複合皮膜の形成方法がある。これは主眼が
複合皮膜の製造法であり、又、無電解メッキを主体にし
ているため、かぎられた金属のみであり導電性セラミッ
クス等は不可能であり、また、化学的処理のため不純物
の影響が懸念される。又、電力印加による発熱体の特性
評価も欠点になっている。As documents that disclose such techniques, there are JP-A-59-94394 and JP-B-2-56425. On the other hand, JP-A-64-8260 discloses a method for forming a metal-ceramic composite film. This is mainly a method of manufacturing a composite film, and since it mainly uses electroless plating, it is only a limited metal and cannot be made of conductive ceramics. There is a concern about the impact. Further, the evaluation of the characteristics of the heating element by applying electric power is also a disadvantage.
【0004】[0004]
【発明が解決しようとする課題】上記の技術的な本質は
見掛け抵抗率を10-3〜100 に制御できる技術を確立
することである。この技術が達成されれば、所定の抵抗
値が抵抗率、長さ、及び断面積の3要素を任意に変えら
れるので容易に得られることになる。また、電気的に安
定であるためには導電性物質が連続していることが重要
であり、マクロ的にみてその割合が同程度であることが
均一加熱上必要となる。そこで、本発明は、上記した諸
要求を満足することのできる高付加価値の溶射発熱体と
その製造法を提供することを課題とするものである。[SUMMARY OF THE INVENTION] is to establish a technique for the technical essence apparent resistivity of the can be controlled to 10 -3 to 10 0. If this technique is achieved, a predetermined resistance value can be easily obtained because the three elements of resistivity, length, and cross-sectional area can be arbitrarily changed. In addition, it is important that the conductive material is continuous in order to be electrically stable, and it is necessary for uniform heating that the ratio be substantially the same in macroscopic view. Therefore, an object of the present invention is to provide a high value-added thermal spray heating element that can satisfy the above-mentioned various requirements and a method of manufacturing the same.
【0005】[0005]
【課題を解決するための手段】上記課題を解決するため
に、本発明では、絶縁体基材と、該基材表面に導電性セ
ラミックス又は導電性酸化物をコーテングした絶縁又は
半導体粒子からなる複合粒子を溶射して形成した溶射皮
膜とからなる溶射発熱体とするか、又は絶縁体基材と、
該基材表面に絶縁又は半導体物質をコーテングした導電
性粒子からなる複合粒子を溶射して形成した溶射皮膜と
からなる溶射発熱体としたものである。In order to solve the above problems SUMMARY OF THE INVENTION In the present invention, an insulator substrate, a conductive cell to the substrate surface
A thermal spray heating element consisting of a thermal spray coating formed by spraying composite particles consisting of insulating or semiconductor particles coated with Lamix or conductive oxide , or an insulator substrate,
A thermal spray heating element comprising a thermal spray coating formed by thermal spraying composite particles comprising conductive particles coated with an insulating or semiconductor substance on the surface of the substrate.
【0006】また、本発明では、絶縁体の基材表面に、
導電性セラミックス又は導電性酸化物をコーテングした
絶縁又は半導体粒子からなる複合粒子、又は、絶縁又は
半導体物質をコーテングした導電性粒子からなる複合粒
子を溶射して、通電発熱させる溶射皮膜を形成すること
を特徴とする複合粒子の溶射発熱体の製造法としたもの
である。上記のように、本発明では、セラミックスの粒
子表面に導電性のセラミックス又は酸化物をコーテング
した複合物質(粒子)を溶射加工して形成した溶射皮膜
に、電力印加することにより発熱体とする。Further, according to the present invention, the surface of the insulating base material is
Composite particles comprising an electrically conductive ceramic or conductive oxides from Kotengu the insulating or semiconductor particles, or by spraying the composite particles composed of conductive particles Kotengu the insulating or semiconductor material, forming a thermal spray coating to electric heating A method for producing a composite particle thermal spray heating element characterized in that: As described above, in the present invention, the thermal spray coating formed by ceramics of the conductive particle surfaces of the ceramic or oxide Kotengu composite material (particles) and thermal spraying, a heating element by power application .
【0007】上記において、コーテング膜はメッキ、メ
カニカルアロイング、スパッタ等で製造でき、膜厚は
0.1μm〜20μm程度に変えられるものである。導
電性物質としては、金属、合金類とB4 C、TiC、W
C、ZrC、TiB2 、Mo2B5 、TiN、AlN、
MoSi2 などの導電性セラミックやSnO、Pb
O2、ReO2 、V2 O3 などの導電性酸化物が使用で
きる。絶縁又は半導体粒子の粒径は10〜75μm程度
であり、絶縁物質(粒子)としてはAl2 O3 、TiO
2 、ZrO2 、CaO、Y2 O3 、Cr2 O3 、Mg
O、MnO等とそれぞれの混合物であり、半導体物質と
してはSn、Se、Te、SiC、GaN、ZnS、P
bSなどである。In the above, the coating film can be manufactured by plating, mechanical alloying, sputtering, or the like, and the film thickness can be changed to about 0.1 μm to 20 μm. As conductive materials, metals, alloys and B 4 C, TiC, W
C, ZrC, TiB 2 , Mo 2 B 5 , TiN, AlN,
Conductive ceramics such as MoSi 2 , SnO, Pb
Conductive oxides such as O 2 , ReO 2 and V 2 O 3 can be used. The particle size of the insulating or semiconductor particles is about 10 to 75 μm, and the insulating material (particles) is Al 2 O 3 , TiO 2
2 , ZrO 2 , CaO, Y 2 O 3 , Cr 2 O 3 , Mg
O, MnO, etc. and their respective mixtures, and the semiconductor material is Sn, Se, Te, SiC, GaN, ZnS, P
bS and the like.
【0008】[0008]
【作用】例えば、金属が1μmコーテングされた30μ
mの複合粒子を用いた溶射加工で、膜厚を100μmに
したとすれば、30μmの粒子が1/2に縮少して積層
し1個15μmのラメラとなり、6個半径方向に並ぶと
仮定すれば、コーテング層のみをとれば同様に全体の膜
厚は6μmとなる。これは金属のみの場合に比して約1
7倍の抵抗値が得られることになる。また、コーテング
層は三次元で連続しているため、電気的に安定であり、
マクロ的に導電性物質の割合が同程度となり均一加熱さ
れる。また、コーテング膜厚を変えることにより見掛け
抵抗率も変化する。[Effect] For example, 30 μm coated with 1 μm metal
If the film thickness is reduced to 100 μm by thermal spraying using composite particles of m, it is assumed that 30 μm particles are shrunk by 積 層 and stacked to form one 15 μm lamella, and six of them are arranged in the radial direction. For example, if only the coating layer is used, the overall film thickness is similarly 6 μm. This is about 1 compared to the case of metal only.
A seven-fold resistance value is obtained. In addition, since the coating layer is continuous in three dimensions, it is electrically stable,
Macroscopically, the ratio of the conductive material is substantially the same, and the material is uniformly heated. Also, by changing the coating film thickness, the apparent resistivity also changes.
【0009】一方、金属の溶射材料は約1万円/kgと
高価であるが、安価なセラミックを核に用いている為、
金属の割合が小さく安価となる。従って、複雑な溶射加
工をせずとも、この複合粒子の溶射加工により家庭の電
源で使える任意の形状のヒータが簡単に得られる。On the other hand, a metal spray material is expensive at about 10,000 yen / kg, but since an inexpensive ceramic is used as a core,
The ratio of metal is small and inexpensive. Therefore, a heater having an arbitrary shape that can be used with a home power supply can be easily obtained by performing the thermal spraying of the composite particles without performing a complicated thermal spraying.
【0010】[0010]
【実施例】以下、本発明を実施例により具体的に説明す
るが、本発明はこれに限定されるものではない。 実施例1 平均粒径27.5μmのAl2 O3 +2.3TiO2 か
らなる粒子に、導電性物質として平均粒径1.3μmの
Ni粉を10:3wt%の割合でメカニカルアロイング
法を用いてコーテングした。Ni膜厚が約2μmの複合
粒子が得られた。この複合粒子をプラズマ溶射法で、す
でにAl2 O3 で絶縁処理を施こした25A SUS3
04、長さ10cmの外表面に、膜厚80μmの溶射発
熱体を形成した。EXAMPLES Hereinafter, the present invention will be described specifically with reference to examples, but the present invention is not limited to these examples. Example 1 Ni 2 particles having an average particle diameter of 1.3 μm were used as a conductive substance at a ratio of 10: 3 wt% to particles composed of Al 2 O 3 +2.3 TiO 2 having an average particle diameter of 27.5 μm by a mechanical alloying method. I did the coating. Composite particles having a Ni film thickness of about 2 μm were obtained. 25A SUS3 which has already been subjected to insulation treatment with Al 2 O 3 by plasma spraying of these composite particles.
04, a sprayed heating element having a thickness of 80 μm was formed on the outer surface having a length of 10 cm.
【0011】図1にこの複合粒子の溶射発熱体を用いた
抵抗率測定の加熱装置を示す。図1において、溶射発熱
体1が本体(SUS304)2の上に形成されており、
溶射発熱体1の両端に電極3を取り付け、アンメータ5
を介してスライダック(100V、10A)4に接続さ
れている。溶射発熱体1の中央には熱電対6を設置し温
度が測定されている。FIG. 1 shows a heating apparatus for resistivity measurement using a composite particle-sprayed heating element. In FIG. 1, a thermal spray heating element 1 is formed on a main body (SUS304) 2,
Electrodes 3 are attached to both ends of the thermal spray heating element 1 and an ammeter 5
Is connected to the SLIDAC (100V, 10A) 4 via the. A thermocouple 6 is installed at the center of the thermal spray heating element 1 to measure the temperature.
【0012】この溶射発熱体1に取り付けた電極3にス
ライダック4で50V電圧を印加したところ、電流値が
10A流れたことによりこの発熱体の抵抗は常法で5Ω
であった。このことより抵抗率を計算すると0.04Ω
・cmであり、Ni粉のみに対して約100倍の見掛け
抵抗率の増加を得た。When a voltage of 50 V was applied to the electrode 3 attached to the thermal spray heating element 1 by means of a sliderac 4, a current value of 10 A flowed.
Met. From this, the resistivity is calculated to be 0.04Ω
Cm, and the apparent resistivity increased about 100 times compared to the Ni powder alone.
【0013】次に上記溶射発熱体にスライダックで5W
(5.0V、1.0A)20W(10.0V、2.0
A)の昇温加熱実験を実施した。その結果を図2に示
す。30分で電力密度0.05W/cm2 で45℃、
0.2W/cm2 で75℃であった。なお室温28.1
℃であった。なお、温度は溶射発熱体表面に取りつけた
熱電対6で測定した。Next, 5 W of the above-mentioned thermal spraying heating element is
(5.0V, 1.0A) 20W (10.0V, 2.0A
The heating-heating experiment of A) was performed. The result is shown in FIG. 45 ° C. at a power density of 0.05 W / cm 2 in 30 minutes,
75 ° C. at 0.2 W / cm 2 . Room temperature 28.1
° C. The temperature was measured with a thermocouple 6 attached to the surface of the thermal spray heating element.
【0014】[0014]
【発明の効果】本発明によれば次のような効果を奏する
ことができる。 (1)本発明は導電性物質をコーテングした複合粒子を
溶射加工したことにより、この皮膜の見掛け抵抗率が任
意に制御できた。従って、家庭電源で容易にヒータが得
られ、利用範囲が拡大した。 (2)この皮膜は三次元的に導電性物質で連続されてい
るため電気的に安定であり、マクロ的に均一加熱され
る。 (3)この複合粒子は核に安価な絶縁粒子を用いたこと
により安価となった。 (4)見掛け抵抗率が増加したため高抵抗となった。よ
ってヒータのコンパクト化が可能となった。According to the present invention, the following effects can be obtained. (1) In the present invention, the apparent resistivity of this film could be arbitrarily controlled by spray-coating composite particles coated with a conductive substance. Therefore, a heater can be easily obtained with a home power supply, and the range of use has been expanded. (2) Since this film is three-dimensionally continuous with a conductive material, it is electrically stable and is uniformly heated macroscopically. (3) The composite particles became inexpensive by using inexpensive insulating particles as nuclei. (4) The resistance increased due to an increase in apparent resistivity. Therefore, the heater can be made compact.
【図1】本発明の溶射発熱体を用いた加熱実験装置の概
略説明図。FIG. 1 is a schematic explanatory view of a heating experimental apparatus using a thermal spraying heating element of the present invention.
【図2】溶射発熱体の表面温度を示すグラフ。FIG. 2 is a graph showing the surface temperature of a thermal spray heating element.
1:溶射発熱体、2:本体(SUS304)、3:電
極、4:スライダック、5:アンメータ、6:熱電対1: Thermal spray heating element, 2: Main body (SUS304), 3: Electrode, 4: Slidac, 5: Ammeter, 6: Thermocouple
───────────────────────────────────────────────────── フロントページの続き (72)発明者 村田 好和 東京都大田区羽田旭町11番1号 株式会 社荏原製作所内 (56)参考文献 特開 昭64−8260(JP,A) (58)調査した分野(Int.Cl.7,DB名) C23C 4/04 H05B 3/12,3/16,3/20 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Yoshikazu Murata Inventor 11-1 Haneda Asahimachi, Ota-ku, Tokyo Ebara Corporation (56) References JP-A-64-8260 (JP, A) (58 ) Surveyed field (Int.Cl. 7 , DB name) C23C 4/04 H05B 3 / 12,3 / 16,3 / 20
Claims (3)
ミックス又は導電性酸化物をコーテングした絶縁又は半
導体粒子からなる複合粒子を溶射して形成した溶射皮膜
とからなる溶射発熱体。1. A an insulator substrate, a conductive canceller to the substrate surface
A thermal spray heating element comprising a thermal spray coating formed by thermal spraying composite particles comprising insulating or semiconductor particles coated with a mixed or conductive oxide .
導体物質をコーテングした導電性粒子からなる複合粒子
を溶射して形成した溶射皮膜とからなる溶射発熱体。2. A thermal spray heating element comprising: an insulating substrate; and a thermal spray coating formed by thermal spraying composite particles comprising conductive particles coated with an insulating or semiconductor material on the surface of the insulating substrate.
ス又は導電性酸化物をコーテングした絶縁又は半導体粒
子からなる複合粒子、又は、絶縁又は半導体物質をコー
テングした導電性粒子からなる複合粒子を溶射して、通
電発熱させる溶射皮膜を形成することを特徴とする複合
粒子の溶射発熱体の製造法。3. A conductive ceramic is provided on a surface of an insulating base material.
Composite particles comprising a scan or conductive oxides from Kotengu the insulating or semiconductor particles, or, characterized in that by thermal spraying the composite particles composed of conductive particles Kotengu the insulating or semiconductor material to form a thermal spray coating to electric heating A method for producing a composite particle thermal spray heating element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26275592A JP3216737B2 (en) | 1992-09-07 | 1992-09-07 | Spray heating element for composite particles and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26275592A JP3216737B2 (en) | 1992-09-07 | 1992-09-07 | Spray heating element for composite particles and its manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06116701A JPH06116701A (en) | 1994-04-26 |
JP3216737B2 true JP3216737B2 (en) | 2001-10-09 |
Family
ID=17380143
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26275592A Expired - Fee Related JP3216737B2 (en) | 1992-09-07 | 1992-09-07 | Spray heating element for composite particles and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3216737B2 (en) |
-
1992
- 1992-09-07 JP JP26275592A patent/JP3216737B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH06116701A (en) | 1994-04-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4808490A (en) | Plasma sprayed film resistor heater | |
EP0221531A3 (en) | High heat conductive insulated substrate and method of manufacturing the same | |
JP3216737B2 (en) | Spray heating element for composite particles and its manufacturing method | |
EP0806488A1 (en) | Aluminum-chromium alloy, method for its production and its applications | |
JP3033852B2 (en) | Resistor and resistor paste composition for aluminum nitride heater | |
JPS62132788A (en) | Graphite electrode with protective coating and manufacture | |
JPS62141578A (en) | Electrostatic discharging and charging method | |
JP3032839B2 (en) | Planar heating element | |
JPH01117287A (en) | Far infrared radiation heating body and manufacture thereof | |
JPS61134776A (en) | Heat roll of copying machine | |
WO2002043439A1 (en) | A method of producing electrically resistive heating elements having self-regulating properties | |
JPS6057662B2 (en) | heating element | |
JPH05217663A (en) | Heat emitting body of ceramic material and manufacture of the same | |
JP3333441B2 (en) | Method of forming semiconductor barium titanate film and application to heater mirror comprising PTC thin film layer and manufacturing method | |
JPH09139278A (en) | Resistor paste for heater | |
JPH08315964A (en) | Heating element, electric heater, and its manufacture | |
JPH0247592Y2 (en) | ||
JP3367995B2 (en) | Multilayer ceramic heater | |
JPH09180865A (en) | Heater resistance material | |
JP2000195649A (en) | Inorganic insulated heater and its manufacture | |
JPH0613165A (en) | Heater with positive temperature coefficient of resistance | |
JPH02138891U (en) | ||
JPS59118878A (en) | Electrode for ignition plug | |
JPH044390Y2 (en) | ||
JPH0945466A (en) | Self temperature adjusting heating resistor material, conductive powder used therein, and self temperature adjusting heater using heating resistor material |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080803 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090803 Year of fee payment: 8 |
|
LAPS | Cancellation because of no payment of annual fees |