JPH08189883A - Sample-embedded body making device and method for it - Google Patents

Abstract

PURPOSE: To eliminate warp and inclination of a sample and fabricate a sample- embedded body favorable for observation effectively by using a lower die, which is provided with recesses to be filled with a resin for embedding sample, and an upper die where projections are furnished. CONSTITUTION: A lower die 1 is formed from silicone resin, etc., and at its top surface, recesses 2 in approx imately hexagonal shape are provided in line. On the bottom surface of an upper die 3 made of silicone resin, etc., rectangular projections 4 are formed which protrude into the recesses 2 when the two dies are fitted together. The thickness of the projection s 4 should be approx. half the depth of recesses 2, and the shape should be such one being only in contact with the band-shape region where a sample is placed on the surface of resin which fills the recesses 2, i.e., rectangular having a smaller width than that of the recesses 2. When the two dies 1, 3 are fitted together, therefore, surplus resin under the sample is extruded to the both sides of each projection 4, and the area where sample is placed, is flattened easily.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for producing a sample embedding body used for inspection with a transmission electron microscope, for example.

[0002]

BACKGROUND OF THE INVENTION There is a quality inspection in which a sample obtained by cutting a part of a magnetic tape or the like is embedded with a resin, and a cut surface of the embedded body is observed with a transmission electron microscope (hereinafter, TEM). The following points have been problems in producing this sample embedding medium. That is, since the magnetic film as a sample is usually curled, the sample embedded with the resin often remains in a warped state. Further, when the resin is filled in the concave portion of the mold to form the base layer portion on which the sample is placed, it is difficult to fill the resin so that the surface of the base layer portion is flat, and the resin is placed on the base layer. Samples are also often embedded in resin in a tilted state.

Since the embedded body having such a warp is not suitable for observation with a TEM, it is very difficult to produce an appropriate embedded body and it is very inefficient.

[0004]

DISCLOSURE OF THE INVENTION An object of the present invention is to provide a technique capable of efficiently producing a sample-embedded body suitable for observation without warping or inclination of the sample. The purpose of this invention is
A lower mold in which a concave portion filled with a resin for embedding the sample is formed, and an upper mold in which a convex portion having a flat end face at a position corresponding to the concave portion and having a height lower than the depth of the concave portion is formed. When the lower die and the upper die are combined, the convex portion acts to flatten the sample placed on the resin surface in the concave portion. And a sample embedding body producing apparatus.

Further, a step of filling a resin for embedding the sample to a predetermined height in the recess of the lower mold, a step of placing a sample on the filled resin surface, and before the filling resin is cured. A step of combining an upper mold having a convex portion having a flat end face with the lower mold to flatten the sample placed on a resin surface; and after removing the upper mold, the inside of the concave portion And a step of filling a resin for embedding the sample, the method for producing a sample embedding body.

That is, according to the present invention, after the sample is placed on the resin surface filled in the concave portion, the upper mold and the lower mold are once combined, and the sample is placed on the convex portion formed on the upper mold. Since the part to be flattened is to be flattened together with the sample,
Even if the sample is warped or the filled resin surface is inclined, the sample embedding body in which the sample is embedded in the resin in a flat state can be obtained regardless of this. Therefore, no defective products are generated, and the efficiency of the work for producing the sample embedding body can be improved.

Incidentally, it is preferable that the end surface of the convex portion is smaller than the concave portion so that the end surface of the convex portion abuts only on the sample portion. Therefore, when the upper die and the lower die are combined, excess resin is left on both sides of the convex portion. Since it is pushed out, the strip-shaped portion on which the sample is placed is smoothly flattened.

[0008]

1 to 7 show an embodiment of the present invention, in which FIG. 1 is a perspective view of an essential part of a sample embedded body manufacturing apparatus, and FIG.
Is a cross-sectional view showing a state where a resin is filled in the recess of the lower die, FIG. 3 is a cross-sectional view showing a state where a sample is placed on the resin surface, and FIG. 4 is a cross-sectional view showing a state in which the upper die is combined. 5 is a cross-sectional view taken along line XX of FIG. 4, FIG. 6 is a cross-sectional view showing a state where the lower mold is filled with resin up to the upper limit of the recess, and FIG. 7 is a perspective view of the sample embedding body taken out from the mold. is there.

In each figure, reference numeral 1 denotes a lower mold made of silicon resin or the like, and a substantially hexagonal concave portion 2 is formed side by side on the upper surface side thereof. 3 is an upper mold made of silicon resin or the like like the lower mold 1, and the bottom surface of the upper mold 3 is
A rectangular convex portion 4 that protrudes into the concave portion 2 when combined with the lower mold 1 is formed. The thickness of the convex portion 4 is set to about 1/2 of the depth of the concave portion 2.

In the sample embedding body manufacturing apparatus provided with the lower mold 1 and the upper mold 3, the upper mold 3 is as shown by an arrow in FIG.
It is configured to be rotatable. And the convex portion 4
Is a shape that abuts only the band-shaped region on which the sample is placed on the resin surface filled in the recess 2, that is, the recess 2
Has a hexagonal shape, but has a rectangular shape with a width smaller than the width of the recess 2. Therefore, when the lower mold 1 and the upper mold 3 are combined, the excess resin below the sample is removed by the convex portion 4
It is extruded to both sides of the so that the portion on which the sample is placed can be easily flattened.

Reference numeral 5 is a sample, and in this embodiment, a magnetic tape cut into a wedge shape having a length of several mm and a maximum width of about 1 mm is used. 6 is an epoxy resin that embeds the sample 5, and F is a sample embedding body that embeds the sample 5 with the epoxy resin 6. Next, a method for producing a sample embedding body of the present invention will be described with reference to FIGS.

First, as shown in FIG. 2, the epoxy resin 6 is filled in the recess 2 of the lower mold 1 to a height of about ½ of the upper limit. Subsequently, two pieces of the sample 5 are placed on the surface of the epoxy resin 6. At this point, the sample 5 is usually
As shown in FIG. 3, the surface of the epoxy resin 6 is warped in an arc shape, and the surface of the epoxy resin 6 in the portion where the sample 5 is placed is not flat but is somewhat undulated.

Before the filled epoxy resin 6 is cured,
For example, at the time of semi-curing, the upper mold 3 is combined with the lower mold 1 as shown in FIG. At this time, the excess epoxy resin 6 is extruded from both sides of the convex portion 4 as shown in FIG. After maintaining this state for 3 hours at a temperature of 60 ° C., the upper mold 3 is removed and the recess 2 is filled with the epoxy resin 5. Then, it was cured at a temperature of 60 ° C. for 12 hours and taken out from the lower mold 1. The sample embedded body F thus obtained is shown in FIG.

The sample embedding body F is a sample which is embedded in the resin in a completely flat state, has no problems such as warpage and inclination of the sample, and is very preferable as an observation sample by TEM. It was As described above, according to the technique for producing a sample embedding medium of the present invention, it is possible to efficiently produce a sample embedding medium suitable for observation with a TEM, and the work for producing an embedding medium is greatly simplified. To be done.

[0015]

[Effect] According to the present invention, a sample embedding body suitable for observation without warpage or inclination of a sample can be efficiently produced.

[Brief description of drawings]

FIG. 1 is a perspective view of a main part of a sample embedded body manufacturing apparatus.

FIG. 2 is a cross-sectional view showing a state where a resin is filled in the recess of the lower mold.

FIG. 3 is a cross-sectional view showing a state in which a sample is placed on a resin surface.

FIG. 4 is a cross-sectional view showing a state in which upper molds are combined.

5 is a cross-sectional view taken along line XX of FIG.

FIG. 6 is a cross-sectional view showing a state in which resin is filled up to the upper limit of the recess of the lower mold.

FIG. 7 is a perspective view of a sample embedding body taken out of a mold.

[Explanation of symbols]

 1 lower mold 2 concave part 3 upper mold 4 convex part 5 sample 6 epoxy resin F sample embedding body

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Internal reference number FI Technical indication location H01J 37/20 F (72) Inventor Junko Ishikawa 2606 Kaohu stock company Kakai-cho, Haga-gun, Tochigi Company Information Science Laboratory

Claims (3)

[Claims] 1. A lower mold having a concave portion filled with a resin for embedding a sample, and a convex portion having a flat end face at a position corresponding to the concave portion and having a height lower than the depth of the concave portion. And the upper die is combined with the lower die, and when the lower die and the upper die are combined, the convex portion acts to flatten the sample placed on the resin surface in the concave portion. An apparatus for producing a sample embedding body, which is configured. 2. The sample package according to claim 1, wherein the size of the end surface of the convex portion is smaller than the shape of the concave portion, and the shape is such that the sample arranged in the concave portion can be covered. Embedded body manufacturing equipment. 3. A step of filling a resin for embedding a sample to a predetermined height in the recess of the lower mold, a step of placing a sample on the filled resin surface, and before the filling resin is cured. A step of combining an upper mold having a convex portion having a flat end face with the lower mold to flatten the sample placed on a resin surface; and after removing the upper mold, the inside of the concave portion And a step of filling a resin for embedding the sample, the method for producing a sample embedding body.