JPH08188961A - Method for treating surface of carbon fiber and apparatus therefor - Google Patents

Abstract

PURPOSE: To provide an apparatus tar treating the surfaces or carbon fibers by a photooxidation method capable of carrying out the continuous treatment even of a large amount of a long carbon fiber bundle, extremely simply performing the surface treatment, forming the apparatus into a relatively small scale and preventing ozone from leaking out of a treating chamber without requiring the post-treatment such as washing with water. CONSTITUTION: This apparatus for treating the surfaces of carbon fibers is obtained by arranging the first gas replacement mechanism 2 capable of replacing the atmosphere with oxygen gas, a treating chamber 1 capable of irradiating the carbon fibers with ultraviolet rays in an ozone atmosphere and the second gas replacement mechanism 3 having the function equal to that of the first gas replacement mechanism 2 in the order and forming a passage capable of passing and running a carbon fiber bundle 5 therethrough in the apparatus. Furthermore, in the apparatus, the carbon fiber bundle 5 is dried with a drying mechanism 4, then introduced into the first gas replacement mechanism 2, exposed to the oxygen atmosphere, subsequently introduced into the treating chamber 1, irradiated with the ultraviolet rays in the ozone atmosphere, passed through the second gas replacement mechanism 3 and led out to the outside of the system. Since active oxygen leaked out of the treating chamber 1 to the respective gas replacement mechanisms 2 and 3 is recirculated to the treating chamber 1, the active oxygen can effectively be utilized without causing the leaking thereof.

Description

Detailed Description of the Invention

[0001]

The present invention relates to a surface treatment of carbon fiber,
In particular, the present invention relates to a method and apparatus for running a carbon fiber bundle and irradiating ultraviolet rays in an oxygen atmosphere to continuously perform surface oxidation treatment.

[0002]

2. Description of the Related Art Carbon fiber has excellent mechanical properties such as high specific strength and high specific elastic modulus and good heat resistance.
It is used as one of the reinforcing materials for composite materials, but its wettability is poorer than other reinforcing materials.Therefore, the surface modification of carbon fiber that enhances the affinity and adhesion with the matrix resin or matrix inorganic material is performed. Efforts have been made to improve the mechanical properties of composite materials by performing quality treatment.

Conventional methods for modifying the surface of carbon fibers include wet methods such as electrolytic oxidation and chemical solution oxidation, and dry methods such as air oxidation, plasma treatment, and ozone oxidation. The wet method requires post-treatment such as washing with water, while the dry method does not require post-treatment such as washing with water, which is advantageous in terms of cost and is expected to be a method for which continuous treatment or large-scale treatment is expected. ing.

As one of the dry methods, the ozone oxidation method is a method for treating carbon fibers by passing them through air containing ozone while heating the carbon fibers (see, for example, JP-A-4- JP-A-136266, JP-A-61
-113878, JP 61-119769, JP 61-119770). This ozone oxidation method allows introduction of oxygen-containing groups to the carbon fiber surface under atmospheric pressure, and simplifies the surface treatment device because it does not require a vacuum device which was essential for the surface treatment of carbon fiber by plasma treatment. Moreover, since it is not a wet treatment such as the conventional chemical solution oxidation method or electrolytic oxidation method, there is no need for post-treatment such as water washing and drying. Therefore, conventionally, damage due to contact with washing water that the fiber bundle receives in the post-treatment step The advantage is that there is no damage due to contact with the circulating air flow in the dryer.

Furthermore, in recent years, a photo-oxygenation method has been proposed in which ultraviolet rays are irradiated in an ozone atmosphere to treat the surface of carbon fibers. This method has an advantage that the surface treatment can be performed efficiently even when the ozone concentration is low, as compared with the method of ozone oxidation that does not irradiate ultraviolet rays. For example, in Japanese Patent Laid-Open No. 3-8866, a carbon fiber yarn is wound around a mold, placed in a reaction apparatus under an ozone atmosphere, and irradiated with ultraviolet rays to oxidize the surface of the carbon fiber. A modifying photooxygenation method is disclosed.

[0006]

However, in the above-mentioned conventional photo-oxygenation method, the form around which the carbon fiber yarn is wound is disposed on the base in the reactor and treated, and when the treatment on one side is completed. However, since it is a batch type processing method in which the processing is once stopped, the mold is turned over and the other is processed, it is disadvantageous to continuously perform a large amount of processing, and it takes time and labor. Further, the carbon fiber photo-oxygenation method using the conventional mold has a drawback that the carbon fiber portion in contact with the mold is not photo-oxygenated and cannot be used, resulting in loss. It was

Further, in such a batch type carbon fiber surface treatment apparatus, it is necessary to enlarge the apparatus itself in order to process a large amount of carbon fibers. As a result, the cost of the equipment becomes high, and it is difficult to carry in and carry out the carbon fiber to the processing device, or to invert it during the processing, and it is also difficult to wind the surface-treated carbon fiber on a bobbin. Moreover, handling such as sizing treatment was difficult. Moreover, when the carbon fibers are long, there is a limit to the length of the carbon fiber yarn that can be treated.

In the conventional method using ozone oxidation, the carbon fibers are continuously processed by running the carbon fibers in the surface treatment chamber in the ozone atmosphere. No solution is proposed for leaking harmful active oxygen such as ozone or atomic oxygen from the passage.

In view of the above, the present invention enables continuous large-scale treatment of long carbon fiber bundles, has extremely easy handling in the carbon fiber surface treatment step, and requires a relatively small surface treatment apparatus. The present invention aims to provide a carbon fiber surface treatment method and an apparatus therefor which do not require post-treatment such as washing with water and can prevent ozone from leaking out from a treatment chamber where the surface treatment is performed.

[0010]

In order to solve the above-mentioned problems, the method for surface treatment of carbon fiber of the present invention is a carbon fiber bundle while running the carbon fiber bundle in a gas displacement mechanism under an oxygen gas atmosphere. The ambient air is replaced with oxygen gas, and then the carbon fiber bundle is irradiated with ultraviolet rays while the carbon fiber bundle is run in the processing chamber to which oxygen gas whose ozone concentration is adjusted is supplied. Surface treatment,
It is characterized in that the ozone concentration of the gas leaking from the processing chamber and the gas containing atomic oxygen is adjusted and the ozone gas is circulated again into the processing chamber.

The carbon fiber surface treatment apparatus of the present invention comprises:
A processing chamber having a function of irradiating a carbon fiber bundle with ultraviolet rays in an oxygen atmosphere, a first gas replacement which is a room directly connected to the upstream side of the processing chamber and has a function of replacing the atmosphere in the room with oxygen gas A mechanism and a second gas replacement mechanism that is directly connected to the downstream side of the processing chamber and has a function of replacing the atmosphere in the room with oxygen gas;
A passage is formed so that the carbon fiber bundle can pass through the processing chamber and each of the gas replacement mechanisms.

In the present invention, the term "oxygen" is used as a general term for oxygen gas, ozone and atomic oxygen. In the present invention, the term "ozone atmosphere" means an atmosphere containing ozone.

The carbon fiber can be subjected to photo-oxygenation treatment by irradiating with ultraviolet rays in an ozone atmosphere in the treatment chamber of the surface treatment apparatus for carbon fiber of the present invention. A heating mechanism may be provided in the processing chamber to carry out the photooxygenation reaction under suitable temperature conditions. The ozone atmosphere in the processing chamber is a gas in which a gas containing excess ozone and atomic oxygen leaking from the processing chamber is discharged, ozone is added to the discharged gas to adjust the ozone concentration, and the ozone concentration is adjusted. The ozone concentration is adjusted to a desired ozone concentration by an ozone gas circulation mechanism having a function of circulating the oxygen to the processing chamber.

The means for exhausting the gas containing excess ozone and atomic oxygen leaking from the processing chamber is provided with a front chamber and / or a rear chamber sandwiched between each of the gas replacement chambers and the processing chamber. It can be done by

A drying mechanism may be arranged immediately upstream of the first gas replacement mechanism in the carbon fiber surface treatment apparatus of the present invention.

A drying mechanism may be included in the first gas replacement mechanism in the carbon fiber surface treatment apparatus of the present invention.

By using oxygen gas as the replacement gas used in the first or second gas replacement mechanism of the carbon fiber surface treatment apparatus of the present invention, the photo-oxygenation treatment is efficiently performed in the treatment chamber in the ozone atmosphere. be able to.

[0018]

In the carbon fiber surface treatment apparatus of the present invention, the gas replacement mechanism is directly connected to the front and rear of the treatment chamber, so that the carbon fiber bundle introduced from the outside is subjected to the photo-oxygenation treatment. The atmosphere of the carbon fiber bundle can be made easy, and the surface of the carbon fiber bundle can be photo-oxygenated by a photo-oxygenation treatment device without leaking harmful gases such as ozone and atomic oxygen to the outside. Can be discharged to the outside.

The inside of the processing chamber is in an oxygen and / or ozone atmosphere, and by irradiating the carbon fiber bundle with ultraviolet rays in this processing chamber, oxygen is converted into ozone by the ultraviolet rays, and the ultraviolet rays are converted into ozone. Causes a reaction that produces atomic oxygen. This atomic oxygen becomes a strong oxidizing agent and oxidizes the carbon fiber surface. In addition, ultraviolet rays are C-C bonds, C-H bonds, C-O on the carbon fiber surface.
Dissociate the bond. The surface of the carbon fiber bundle can be modified to be hydrophilic by the irradiation of ultraviolet rays in such an oxygen and / or ozone atmosphere.

[0020]

【Example】

[Example 1] An example of a carbon fiber surface treatment apparatus of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic view showing the whole carbon fiber surface treatment apparatus of the present invention. The structure of the carbon fiber surface treatment apparatus of the present invention is a treatment chamber 1 for irradiating a carbon fiber bundle with an ultraviolet ray in an oxygen atmosphere, a room directly connected to the upstream side of the treatment chamber 1, and an atmosphere in the room. Gas replacement mechanism 2 for replacing oxygen with oxygen gas, and a second gas replacement mechanism 3 for directly replacing the atmosphere in the room directly downstream of the processing chamber 1 with oxygen gas , And a drying mechanism 4 arranged upstream of the first gas replacement mechanism 2 for drying the carbon fiber bundles 5. The drying mechanism 4, the first gas replacement mechanism 2, the processing chamber 1, and the second gas replacement mechanism 3, which constitute the surface treatment apparatus, have passages through which the carbon fiber bundles 5 can pass. It is provided.

In the carbon fiber surface treatment apparatus of FIG.
The carbon fiber bundle 5 that has traveled from the previous step is dried by the drying mechanism 4 and then introduced into the first gas replacement mechanism 2,
The carbon fiber bundle 5 is in an oxygen atmosphere. Next, the carbon fiber bundle 5 is introduced into the processing chamber 1 directly connected to the first gas replacement mechanism 2 and subjected to surface treatment by being irradiated with ultraviolet rays in an ozone atmosphere. The surface-treated carbon fiber bundle 5 is led out of the system through the second gas displacement mechanism 3 which is located downstream of the processing chamber 1 and directly connected to the processing chamber 1, and travels to the next step.

FIG. 2 shows a first example of the surface treatment apparatus of FIG.
FIG. 3 is a schematic view showing in detail the gas replacement mechanism 2 of FIG. The first gas replacement mechanism 2 has a gas replacement chamber 21 that can be in an oxygen gas atmosphere, and a front chamber 22 sandwiched between the gas replacement chamber 21 and the processing chamber 1, and the front chamber 22 is the processing chamber. It is directly connected to 1.

A slit port 23, which is an inlet for the carbon fiber bundle 5, is provided on one side wall of the gas replacement chamber 21, and the gas replacement chamber 21 and the front chamber 22 are provided at the other end of the gas replacement chamber 21.
Slit port 2 for passing carbon fiber bundle 5 apart from
A partition 25 having 4 is provided. Gas replacement chamber 21
A plurality of oxygen introducing ports 26 for introducing oxygen into the gas replacement chamber 21 are provided on the peripheral wall of the gas replacement chamber 21.
A plurality of perforated plates 27 for uniformly dispersing the oxygen gas introduced near the inner peripheral wall are arranged. Perforated plate 27
May be superposed on the upper and lower stages as shown in FIGS. 7 and 8. FIG. 7 is a view of the perforated plate 27 seen from above, and FIG. 8 is a cross-sectional view thereof. By arranging the openings 271 in the upper stage and the lower stage in a staggered manner, the oxygen gas is diffused and the efficiency of substitution with oxygen gas is improved. Can be increased.

In order to discharge the air contained in the carbon fiber bundle 5 or the air that has entered from the outside through the slit port 23 and each gas such as excess oxygen in the gas replacement chamber 21, the gas discharge port 28 is replaced with a gas replacement gas. It is provided at a position far from the oxygen inlet 26 on the peripheral wall of the chamber 21. A filter device 29 for removing dust components in the oxygen gas is arranged at the oxygen inlet 26.

The front chamber 22 is provided in order to discharge excess ozone and atomic oxygen leaking from the processing chamber 1 to the outside of the system through the slit port 30 which is also an inlet of the carbon fiber bundle 5 into the processing chamber 1. There is. A gas exhaust pipe 31 for exhausting ozone and atomic oxygen is provided on the peripheral wall of the front chamber 22, and a gas for adjusting the concentration of ozone in the exhausted gas is provided downstream of the gas exhaust pipe 31. A concentration adjusting mechanism 32 is provided, and is configured to filter the oxygen gas whose ozone concentration has been adjusted and send it into the processing chamber 1.

As described above, the first gas replacement mechanism 2 in the carbon fiber surface treatment apparatus of the present invention includes the gas replacement chamber 21.
Since it is divided into a front chamber 22 and an anterior chamber 22, by introducing oxygen gas from the oxygen introducing port 26 in the gas replacement chamber 21, the air is entrained in the external air and the carbon fiber bundles 5 entering through the slit port 23. The generated air and excess oxygen gas can be discharged from the gas discharge port 28 to replace the atmosphere around the carbon fiber bundle 5 with oxygen gas. Also,
In the front chamber 22, the gas pressure is set to be lower than that in the gas replacement chamber 21, so that the active oxygen such as ozone and atomic oxygen leaking from the processing chamber 1 into the front chamber 22 is removed from the gas replacement chamber 2.
It is possible to discharge the gas through the gas discharge pipe 31, adjust the concentration of ozone and recirculate it to the processing chamber 1 without leaking it to the chamber 1, and reuse it effectively for the surface treatment of the carbon fiber.

FIG. 3 is a schematic diagram showing in detail the processing chamber 1 in the surface processing apparatus of FIG. In the processing chamber 1, a plurality of ultraviolet lamps 11 are arranged above and below in order to irradiate the passing carbon fiber bundle 5 with ultraviolet rays. A plurality of ozone supply ports 13 are provided on the upper and lower peripheral walls in the processing chamber 1 so as to supply oxygen gas whose dust component is filtered by a filter device 12 and whose ozone concentration is adjusted, so that they are located between the respective ultraviolet lamps 11. ing. It should be noted that the ozone supply ports 13 in FIG. 3 are arranged above and below the processing chamber 1, and the oxygen gas whose ozone concentration has been adjusted is supplied from above and below the processing chamber 1. The processing chamber 1 may be configured so as to flow in the opposite direction (countercurrent) to the traveling direction.

FIG. 9 is a cross-sectional view of the inside of the processing chamber 1 as seen from the advancing direction of the carbon fiber bundles 5 in the processing chamber 1. As shown in FIG. 9, the inside of the processing chamber 1 is heated to a temperature suitable for the photooxygenation reaction. For adjustment, a heater 36 may be arranged in the processing chamber 1 as a heating mechanism. In FIG. 9, the ultraviolet lamp 11 or the heater 36 is arranged in a planar shape, but the ultraviolet lamp 11 or the heater 36 may be arranged in a spiral shape.

In FIG. 3, the ozone-containing oxygen gas of which the ozone concentration is adjusted passes through the ozone supply pipe 15, the filter device 12 for removing dust components in the middle thereof, and the ozone supply port 13 through the processing chamber 1. Is supplied to. As described above, the ozone concentration adjusting means adjusts the ozone concentration generated by the ozone generator 14 with respect to the gas containing excess ozone and atomic oxygen leaking from the processing chamber 1 to the front chamber 22. The mechanism 32 adjusts the mixture so that the ozone concentration is appropriate. In this processing chamber 1, by irradiation with ultraviolet rays in an ozone atmosphere, a photooxygenation reaction proceeds on the surface of the carbon fiber bundle 5 to modify the surface.

A second gas replacement mechanism 3 (that is, a second gas replacement mechanism 3 having substantially the same function as the first gas replacement mechanism 2 is provided downstream of the processing chamber 1 in the carbon fiber surface treatment apparatus of the present invention. The gas replacement mechanism 3, as shown in FIG.
A rear chamber 33 equivalent to 2 is directly connected to the processing chamber 1 having a slit port 34 which is a lead-out port of the carbon fiber bundle 5, and further to this rear chamber 33, a gas replacement equivalent to the gas replacement chamber 21. The chamber 35 is a direct connection).
In the second gas replacement mechanism 3, the active oxygen around the carbon fiber bundle 5 is replaced with oxygen gas.

The rear chamber 3 in the second gas replacement mechanism 3
By setting the gas pressure inside 3 to be lower than the gas pressure inside the gas replacement chamber 35, the active oxygen such as ozone and atomic oxygen leaked from the processing chamber 1 into the rear chamber 33 can be removed from the gas replacement chamber 35.
Without letting it leak to the gas exhaust pipe 37,
It is possible to adjust the concentration of ozone and recirculate it to the processing chamber 1 so that it can be effectively used again for the surface treatment of carbon fibers.

FIG. 4 is a schematic view showing in detail the drying mechanism 4 in the surface treatment apparatus of FIG. Appropriate means can be used as the drying means adopted in the drying mechanism 4. In FIG. 4, an electric heater 41 is shown, but other drying means such as hot air circulation drying, far infrared ray drying, etc. are also adopted. Good.

Although FIG. 1 shows an overall view of the carbon fiber surface treatment apparatus in which the drying mechanism 4 is arranged upstream of the first gas displacement mechanism 2, the drying mechanism 4 is replaced by the first gas displacement mechanism 2. It may be arranged in the first gas replacement mechanism 2 without being arranged upstream. FIG. 5 and FIG. 6 are cross-sectional views of the first gas replacement mechanism 2 as seen from the traveling direction of the carbon fiber bundles 5, showing an example in which the drying mechanism 4 is arranged in the first gas replacement mechanism 2. Has been done. FIG. 5 shows an example in which the heater 41 is arranged at a position close to the side wall in the first gas replacement mechanism 2. FIG. 6 shows a heater 41 having a spiral shape.

In the present invention, the carbon fiber bundles 5 are dried in advance before the photo-oxygenation treatment is applied to the carbon fiber bundles 5, so that ozone and atomic oxygen such as ozone and atomic oxygen are irradiated by the ultraviolet irradiation in the treatment chamber 1 in the ozone atmosphere. It is possible to remove water that hinders the generation reaction of active oxygen.

Example 2 A single fiber diameter of 7 μm and a fiber bundle diameter of 5 to 6 (12 k) mm were put into a carbon fiber surface treatment apparatus having a treatment chamber 1 having an effective length of about 7 m shown in FIG. The carbon fiber bundle was run at a running speed of about 280 m / hr and dried at a drying temperature of 120 ° C. in the drying mechanism 4, then the ozone concentration was adjusted to about 180 ppm, and the room temperature was set to about 17 ppm.
Processing was performed with a 120 W UV output lamp in the processing chamber 1 at 0 ° C.

The mechanical properties and physical properties of the surface-treated carbon fiber bundle of Example 2 are shown in Table 1 below. The mechanical properties of the carbon fiber bundles not surface-treated are also shown as a comparative example.

[0038]

[Table 1] Table 1 shows that the surface treatment of the carbon fiber of the present invention improves the mechanical properties and improves the wettability of the surface of the carbon fiber.

[0039]

INDUSTRIAL APPLICABILITY The method and apparatus for surface treatment of carbon fibers by the photo-oxygenation method of the present invention allows long carbon fiber bundles to pass through the surface treatment apparatus, and thus long carbon fibers can be run. A large amount of continuous processing is possible even in a bundle. Moreover, in the present invention, since the gas replacement chamber and the front chamber are directly connected to the processing chamber, in the gas replacement chamber, the atmosphere around the carbon fiber bundle can be an oxygen gas atmosphere in which air is excluded. In addition, the atmosphere of the photo-oxygenation treatment in the processing chamber can be an ozone atmosphere, which facilitates the application of the photo-oxygenation method in the processing chamber, and the ozone and atomic oxygen leaking from the processing chamber can be removed from the processing chamber. The active oxygen can be effectively used without leaking by recirculating the active oxygen.

The carbon fiber surface treatment method and apparatus using the photo-oxygenation method of the present invention are extremely easy to handle in the carbon fiber surface treatment step, and the surface treatment apparatus can be made relatively small. Is.

In the present invention, the carbon fiber bundles are dried in advance before the photooxygenation treatment is applied to the carbon fiber bundles, so that the moisture that inhibits the reaction of generating active oxygen by ultraviolet irradiation in an ozone atmosphere in the processing chamber is removed. Since it can be removed, active oxygen generation effective for surface treatment is activated in the treatment chamber, and the surface treatment of carbon fiber can be performed efficiently.

[Brief description of drawings]

FIG. 1 is a schematic view showing an entire carbon fiber surface treatment apparatus of the present invention.

2 is a schematic diagram showing in detail a first gas replacement mechanism in the surface treatment apparatus of FIG.

FIG. 3 is a schematic view showing in detail a processing chamber in the surface processing apparatus of FIG.

FIG. 4 is a schematic view showing in detail a drying mechanism in the surface treatment apparatus of FIG.

FIG. 5 is a cross-sectional view of the first or second gas replacement mechanism as seen from the direction of travel of the carbon fiber bundles, in which the heater as a drying mechanism is located near the side wall in the first or second gas replacement mechanism. An example of arrangement is shown.

FIG. 6 is a cross-sectional view of the first or second gas replacement mechanism as viewed from the direction of travel of the carbon fiber bundle, in which a spiral heater as a drying mechanism is close to the side wall in the first or second gas replacement mechanism. An example in which they are arranged at the specified positions is shown.

FIG. 7 is a view of a perforated plate which is stacked in two stages, an upper stage and a lower stage, as viewed from above.

FIG. 8 is a cross-sectional view of two perforated plates which are stacked on the upper stage and the lower stage.

FIG. 9 is a side view of the inside of the processing chamber as seen from the traveling direction of the carbon fiber bundle.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Processing chamber 2 1st gas displacement mechanism 3 2nd gas displacement mechanism 4 Drying mechanism 5 Carbon fiber bundle 11 Ultraviolet lamp 12,29 Filtration device 13 Ozone supply port 14 Ozone generator 15 Ozone supply pipe 21,35 Gas displacement chamber 22 Front chamber 23, 24, 30, 34 Slit port 25 Partition wall 26 Oxygen inlet port 27 Perforated plate 271 Opening 28 Gas exhaust port 31, 37 Gas exhaust pipe 32 Gas concentration adjusting mechanism 33 Rear chamber 36, 41 Heater

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Claims (9)

[Claims] 1. (1) The air around the carbon fiber bundle is replaced with oxygen gas while the carbon fiber bundle is running in a gas replacement mechanism under an oxygen gas atmosphere, and (2) the ozone concentration is then adjusted. The carbon fiber bundle is irradiated with ultraviolet rays while the carbon fiber bundle is traveling in a treatment chamber to which oxygen gas is supplied, so that the carbon fiber is surface-treated, and (3) ozone and atomic oxygen leaking from the treatment chamber are removed. A method for surface treatment of carbon fiber, which comprises adjusting the ozone concentration of the contained gas and circulating it again in the treatment chamber. 2. The surface treatment method for a carbon fiber according to claim 1, wherein the carbon fiber bundle is dried before the step of irradiating the carbon fiber bundle with the ultraviolet rays. 3. A processing chamber having a function of irradiating a carbon fiber bundle with ultraviolet rays in an oxygen atmosphere, and a room directly connected to the upstream side of the processing chamber, having a function of replacing the atmosphere in the room with oxygen gas. A first gas replacement mechanism and a second gas replacement mechanism that is directly connected to the downstream side of the processing chamber and has a function of replacing the atmosphere in the room with oxygen gas; A surface treatment apparatus for carbon fibers, characterized in that a passage through which a carbon fiber bundle penetrates through the gas displacement mechanism is formed. 4. The carbon fiber surface treatment apparatus according to claim 3, wherein the treatment chamber is in an ozone atmosphere. 5. The carbon fiber surface treatment apparatus according to claim 3, wherein the treatment chamber has a heating mechanism. 6. A drying mechanism is arranged immediately upstream of the first gas displacement mechanism.
4. The carbon fiber surface treatment device according to 4 or 5. 7. The carbon fiber surface treatment apparatus according to claim 3, wherein a drying mechanism is included in the first gas replacement mechanism. 8. Each of the gas replacement mechanisms includes a gas replacement chamber capable of having an oxygen gas atmosphere inside, and a front chamber and / or a rear chamber sandwiched between the gas replacement chamber and the processing chamber. 8. The front chamber and / or the rear chamber has a function of discharging excess ozone and atomic oxygen leaking from the processing chamber, according to claim 3, 4, 5, 6, or 7. Carbon fiber surface treatment equipment. 9. The processing chamber discharges a gas containing excess ozone and atomic oxygen leaking from the processing chamber, adds ozone to the discharged gas to adjust the ozone concentration, and then adjusts the ozone concentration. The carbon fiber according to claim 3, 4, 5, 6, 7 or 8, wherein the ozone gas circulation mechanism that can circulate the generated gas into the processing chamber is adjusted to a desired ozone concentration atmosphere. Surface treatment equipment.