JPH08176754A - Alloy for strain gauge, production thereof and strain gauge - Google Patents

Abstract

PURPOSE: To obtain a novel material having a high gauge rate and gauge charcteristics almost free from uneveness. CONSTITUTION: This alloy having a gauge rate of >=2 consists of, by weight, 1-35% Cr, 15-70% Co, 0.001-15%, in total, of <=10% W, <=10% Mo, <=10% Nb and <=10% Ta, 0.001-20%, in total, of <=10% Mn, <=10% Cu, <=10% Pt, <=10% Rh, <=10% Pd, <=10% Au, <=10% Ag, <=10% Lu, <=10% Ir, <=10% Os, <=10% Hf, <=10% V, <=10% Al, <=10% Si, <=10% Ti, <=10% rare earth element, <=5% Zr, <=5% Tc, <=5% Zn, <=5% Ge, <=5% Sn, <=5% Sb, <=3% Be, <=1% B and <=1% C as subsidiary components and the balance Fe with a small amt. of impurities. The objective strain gauge obtd. from this alloy has high sensitivity and high stability.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a strain gauge alloy, a method of manufacturing a wire rod and a foil material of the alloy, and a strain gauge. More specifically, the present invention relates to iron (Fe), chromium (Cr), cobalt (Co), tungsten (W), molybdenum (Mo),
With niobium (Nb) and tantalum (Ta) as the main components,
As auxiliary components, manganese (Mn), copper (Cu), platinum (Pt), rhodium (Rh), palladium (Pd), gold (Au), silver (Ag), ruthenium (Ru), iridium (Ir), osmium. (Os), hafnium (H
f), vanadium (V), aluminum (Al), silicon (Si), titanium (Ti), rare earth element, zirconium (Zr), technetium (Tc), zinc (Zn),
Germanium (Ge), tin (Sn), antimony (S
b), beryllium (Be), boron (B) and carbon (C), or a total of 0.001 of two or more.
The present invention relates to a strain gauge alloy consisting of 20% and a method for producing the same, and a strain gauge using this alloy, and an object thereof is a wire rod having a high gauge ratio of 2 or more and good workability and In providing foil materials, as well as thin films. Another object of the present invention is to provide a strain gauge composed of a wire material, a foil material and a thin film having a gauge ratio of 2 or more, which is produced by using the alloy.

[0002]

2. Description of the Related Art Strain gauges generally utilize the phenomenon that the electrical resistance of a gauge wire or gauge foil changes due to elastic strain, and conversely measure the amount of strain or stress by measuring the resistance change. It is also used as a strain and stress conversion device. For example, strain sensors in the production industry, weight measurement, accelerometers and various equipment quantity-electricity conversion equipment, earth pressure gauges in the civil engineering industry, pressure gauges and flexure measurement in the construction / energy related industries, aviation / space / railroads / ships. It is widely used not only for various stress / strain measurement in Japan, but also for commercial scales and various security devices for consumer use.

The conditions imposed on strain gauge materials are: Large gauge ratio and low temperature dependence 1. Large specific electrical resistance 3. Small temperature coefficient of resistance 4. 4. Small thermoelectromotive force for copper Good workability and good mechanical properties 6. It is summarized as cheap things.

In addition to the above-mentioned gauge characteristics, it is also important for the strain gauge element to have a small apparent strain and a small variation in characteristics between elements. The apparent strain referred to here means an output change other than the measurement as if the strain is generated even if the strain is not added due to the temperature change around the gauge. Normally, a bridge circuit is used to cancel the output so that an output corresponding to apparent distortion does not occur.

By the way, the strain gauge has a structure such as a thin metal wire (13 to 25 μm) or a metal foil (3 to 5 μm).
m) are arranged in a grid or rosette,
As a method of using the gauge, the gauge is attached to the object to be measured with an adhesive, and the strain generated in the object to be measured is indirectly measured from the change in resistance of the gauge. The sensitivity of the strain gauge depends on the gauge factor K, and the value of K (20 ° C.) is generally expressed by the following equation.

[0006]

[Equation 1] Where R is the total resistance of the gauge wire, σ is the Poisson's ratio of the gauge wire, ρ is the specific electrical resistance of the gauge wire, and l is the total length of the gauge wire. In this formula, σ is approximately 0.3 for general metals and alloys.
Therefore, the sum of the first term and the second term on the right side is about 1.6, which is a constant value. Therefore, in order to increase the gauge factor, (Δρ / ρ) · (Δl / l) in the third term on the right side of the above equation
It is an essential condition that ^-1 is large. That is, when the material is subjected to tensile deformation, the electronic structure in the lengthwise direction of the material changes significantly, and the amount of change in electric resistance Δρ / ρ increases. In addition, variation in gauge ratio between lots △ K
Is evaluated by the following formula.

[0007]

[Equation 2]

The material most often used at present as a material for strain gauge elements is Cu-Ni alloy.
This alloy, although the temperature coefficient of resistance C _f has a very small features, gage factor K and the electrical resistivity ρ is small, also because of the large TaidonetsuOkoshi power E _mf, for high sensitivity and high stability strain gauge It cannot be used as an alloy. Furthermore, the problem with this alloy is that the variation in gauge characteristics is several percent.
There was also a big problem with product compatibility.

In addition to this material, semiconductors such as carbon (C), silicon (Si) and germanium (Ge) are known as materials having a large gauge factor K. However, in the case of these semiconductors, K is very large at several 10 to 170, but the value not only shows positive and negative values, but also has large anisotropy of K and lacks stability, and has poor mechanical strength. However, it is only applied to special small pressure transducers due to its drawbacks.

On the other hand, the Fe--Cr-- previously discovered by the present inventor
In Co-based and Fe-Cr-Co (Mo, W, Nb, Ta) multi-component alloys and the like, K is 4 in the processed state and 10 or more by high temperature treatment, and 2 to 2 of the conventional practical alloy Cu-Ni.
Since it shows a very large value of 5 times, it seems that it can meet the demand for high-sensitivity gauges. (Japanese Patent Publication No. 45-13229,
Japanese Patent Laid-Open No. 61-15914, Japanese Patent Publication No. 13023
issue). However, the K of these alloys has a lot-to-lot variation of about 5 to 7%, which makes gauge compatibility somewhat difficult, and is not suitable for high stability gauges. The temperature coefficient of resistance is 400 × 10 ⁻⁶ / ° C. or higher, and the above Cu—Ni
The disadvantage is that it has a value 20 times as large as that of alloys, but apparent distortion can be offset by the gauge design and compensation by the bridge circuit.

Further, the Fe-Cr-Al based alloy developed as a material having a small temperature coefficient of resistance has many problems such as not only being inferior in oxidation resistance but also being required to be manufactured by a considerably complicated processing method. [JP-A-5-21449
3]. As described above, the known material has advantages and disadvantages, and there is a demand from a related industry for a new material having a high gauge ratio and a gauge characteristic with less variation, which is the object of the present invention.

[0012]

[Problems to be Solved by the Invention] Strain gauges have been expanding their application fields with the advancement of microcomputers in recent years, toward ultra-precision, miniaturization and high performance. In addition to pressure transducers and load cells that require stability, there are increasing demands for robot tactile sensors and slip sensors. Materials having high sensitivity and good stability are urgently required for these strain gauges for various sensors.

By the way, as a material that can meet these demands, Fe--Cr--Co, which is inexpensive and has a large gauge factor, is used.
-(Mo, W, Nb, Ta) multi-component alloys are promising.
In order to use this alloy as a material for a highly sensitive and highly stable strain gauge, the following problems must be overcome. 1 Gauge ratio shall be 2 or more. 2 Keep lot-to-lot variation in gage rate below 2%. 3 Improve workability.

[0014]

The present invention has been made in view of the above-mentioned points, and the above-mentioned Fe-Cr-Co- (M
(o, W, Nb, Ta) A lot of experiments and researches have been conducted to improve the multi-component alloys. As a result, many novel findings have been obtained in the present invention. The details will be described below. The features of the present invention are as follows.

First invention Chromium 1 to 35%, cobalt 15 to 70% by weight
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Below, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less, one or two or more in total of 0.001 to 20% and the balance iron and a small amount of impurities. An alloy for strain gauges, characterized by having 2 or more.

Second invention By weight ratio, chromium is 1 to 35% and cobalt is 15 to 70%.
And a total of 0.001 of tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less.
-15%, manganese 10% or less as subcomponent, copper 10%
Hereinafter, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10
% Or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less, one or two or more in total of 0.001 to 20% and the balance iron and a small amount of impurities. An alloy for strain gauges, characterized by having 2 or more.

Third Invention Chromium 1 to 35% and cobalt 15 to 70% by weight
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Below, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, silconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5 %Less than,
Beryllium 3% or less, boron 1% or less, and carbon 1% or less 1 type or 2 or more types in total 0.001-20
% And the balance iron, and a small amount of impurities, and a strain gauge alloy having a gauge factor of 2 or more.

Fourth invention Chromium 1 to 35% and cobalt 15 to 70% by weight
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Below, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, an alloy composition of 0.001 to 20% in total of one or more of antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less and the balance iron and a small amount of impurities After melting the raw material in a non-oxidizing gas, reducing gas or vacuum, cast it in a suitable mold, hot-work the desired ingot into a desired round bar or plate, then cold-work it. A wire or a foil, or the wire or the foil is further heated at a temperature of 400 ° C. or more and 1200 ° C. or less in a non-oxidizing gas, a reducing gas or a vacuum for a suitable time and then cooled. To produce a strain gauge alloy having a gauge factor of 2 or more.

Fifth invention By weight ratio, chromium is 1 to 35% and cobalt is 15 to 70%.
And a total of 0.001 of tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less, or two or more.
-15%, manganese 10% or less as subcomponent, copper 10%
Hereinafter, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10
% Or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, an alloy composition of 0.001 to 20% in total of one or more of antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less and the balance iron and a small amount of impurities The raw material is melted in a non-oxidizing gas, a reducing gas or in vacuum and then cast in an appropriate mold, and the resulting ingot is hot worked into a desired round bar or plate, and then cold worked. A wire or foil material, or by heating the wire or foil material at a temperature of 400 ° C. or more and 1200 ° C. or less in a non-oxidizing gas, a reducing gas, or a vacuum for an appropriate time and then cooling. A method for producing a strain gauge alloy having a gauge factor of 2 or more.

Sixth invention By weight ratio, chromium is 1 to 35% and cobalt is 15 to 70%.
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Hereinafter, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5 %Less than,
Beryllium 3% or less, boron 1% or less, and carbon 1% or less 1 type or 2 or more types in total 0.001-20
%, The balance of iron, and the raw material of the alloy composition consisting of a small amount of impurities are melted in a non-oxidizing gas, a reducing gas or in a vacuum and then cast in an appropriate mold, and the obtained ingot is desired by hot working. No round bar or plate, and then cold-worked to form a wire or foil, or the wire or foil is further heated in a non-oxidizing gas, reducing gas or vacuum at 400 ° C or higher to 1200 ° C A method for producing a strain gauge alloy having a gauge factor of 2 or more, which comprises heating at the following temperature for an appropriate time and then cooling.

Seventh invention By weight ratio, chromium is 1 to 35% and cobalt is 15 to 70%.
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Below, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, an alloy composition of 0.001 to 20% in total of one or more of antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less and the balance iron and a small amount of impurities The raw material is melted in a non-oxidizing gas, a reducing gas or vacuum and then cast in an appropriate mold, and the obtained ingot is formed into a desired round bar or plate by hot working, and then cold worked. No wire or foil material, 400 ℃ or more 120 as it is or in non-oxidizing gas, reducing gas or vacuum
The wire or foil heated and cooled at a temperature of 0 ° C. or lower for an appropriate time is attached to an appropriate base surface to form an element. If necessary, the element and the element having a right angle component are in the same plane for temperature compensation. A strain gauge that is constructed by forming a gauge pattern.

Eighth invention Chromium 1 to 35%, cobalt 15 to 70% by weight
And a total of 0.001 of tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less.
-15%, manganese 10% or less as subcomponent, copper 10%
Hereinafter, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10
% Or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, an alloy composition of 0.001 to 20% in total of one or more of antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less and the balance iron and a small amount of impurities The raw material is melted in a non-oxidizing gas, a reducing gas or vacuum and then cast in an appropriate mold, and the obtained ingot is formed into a desired round bar or plate by hot working, and then cold worked. No wire or foil material, 400 ℃ or more 120 as it is or in non-oxidizing gas, reducing gas or vacuum
The wire or foil, which has been heated at a temperature of 0 ° C. or lower for an appropriate time and then cooled, is attached to an appropriate base surface to form an element. If necessary, as an element for temperature compensation, the element having a component orthogonal to the element is in the same plane. A strain gauge that is constructed by forming a gauge pattern.

Ninth invention By weight ratio, chromium is 1 to 35% and cobalt is 15 to 70%.
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Hereinafter, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5 %Less than,
Beryllium 3% or less, boron 1% or less, and carbon 1% or less 1 type or 2 or more types in total 0.001-20
%, The balance of iron and a raw material of an alloy composition consisting of a small amount of impurities are melted in a non-oxidizing gas, a reducing gas or in a vacuum and then cast in an appropriate mold, and the obtained ingot is hot-worked to obtain a desired product. No round bar or plate, then cold-worked to form wire or foil, either as it is or further heated in a non-oxidizing gas, reducing gas or vacuum at a temperature of 400 ° C to 1200 ° C for an appropriate time. The post-cooled wire material or foil material is attached to an appropriate base surface to form an element, and if necessary, as temperature compensation,
A strain gauge, characterized in that a gauge pattern is formed by constructing an element having a component orthogonal to the element in the same plane.

Tenth invention Chromium 1 to 35%, cobalt 15 to 70% by weight
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Below, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
An alloy consisting of 0.001 to 20% of a total of 1% or more of antimony 5% or less, beryllium 3% or less, boron 1% or less, and carbon 1% or less and the balance iron and a small amount of impurities, A thin film is formed on the desired substrate by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering, and then punched into the desired shape and processed by photoetching or trimming to form an element. As a compensation, a thin film strain gauge characterized in that a gauge pattern is formed by constructing an element having a component orthogonal to the element in the same plane and further forming an electrode.

Eleventh Invention Chromium 1-35% and cobalt 15-70% by weight
And a total of 0.001 of tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less.
-15%, manganese 10% or less as subcomponent, copper 10%
Hereinafter, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10
% Or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, an alloy consisting of 0.001 to 20% of a total of 1% or more of antimony 5% or less, beryllium 3% or less, boron 1% or less, and carbon 1% or less and the balance iron and a small amount of impurities is charged. By a method selected from deposition, vapor deposition, electroless plating or sputtering, a thin film is formed on the desired substrate, then punched into the desired shape, processed by photoetching or trimming to form an element, and if necessary, temperature compensation The thin film strain gauge is characterized in that a gauge pattern is formed by constructing an element having a component orthogonal to the element in the same plane as the above, and further an electrode is configured.

Twelfth invention By weight ratio, chromium is 1 to 35% and cobalt is 15 to 70%.
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Hereinafter, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5 %Less than,
Beryllium 3% or less, boron 1% or less, and carbon 1% or less 1 type or 2 or more types in total 0.001-20
% And the balance of iron and a small amount of impurities, a thin film is formed on a desired substrate by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering, and then punched into a desired shape, photoetching or trimming. Thin film strain characterized by forming a gauge pattern by constructing an element of a component orthogonal to the element in the same plane as temperature compensation if necessary to form an element by performing processing such as gauge.

Thirteenth invention By weight ratio, chromium is 1 to 35% and cobalt is 15 to 70%.
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Below, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
An alloy consisting of 0.001 to 20% of a total of 1% or more of antimony 5% or less, beryllium 3% or less, boron 1% or less, and carbon 1% or less and the balance iron and a small amount of impurities, A thin film is formed on the desired substrate by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering, and then punched into the desired shape and processed by photoetching or trimming to form an element. For compensation, an element having a component orthogonal to the element is constructed in the same plane to form a gauge pattern, and then an electrode is formed, which is then further heat-treated in a non-oxidizing gas, reducing gas or vacuum. A thin film strain gauge characterized by.

Fourteenth invention Chromium 1-35%, cobalt 15-70% by weight
And a total of 0.001 of tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less.
~ 15%, as a sub-component, manganese 10% or less, copper 10
% Or less, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 1
0% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
An alloy consisting of 0.001 to 20% of a total of 1% or more of antimony 5% or less, beryllium 3% or less, boron 1% or less, and carbon 1% or less and the balance iron and a small amount of impurities, A thin film is formed on the desired substrate by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering, and then punched into the desired shape and processed by photoetching or trimming to form an element. For compensation, an element having a component orthogonal to the element is constructed in the same plane to form a gauge pattern, and then an electrode is formed, which is then further heat-treated in a non-oxidizing gas, reducing gas or vacuum. A thin film strain cage characterized by.

Fifteenth invention Chromium 1 to 35% and cobalt 15 to 70% by weight
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Hereinafter, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5 %Less than,
Beryllium 3% or less, boron 1% or less, and carbon 1% or less 1 type or 2 or more types in total 0.001-20
% And the balance of iron and a small amount of impurities, a thin film is formed on a desired substrate by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering, and then punched into a desired shape, photoetching or trimming. Etc. are processed to form an element, and if necessary, temperature compensation is performed by constructing an element having a component orthogonal to the element in the same plane to form a gauge pattern, and further forming an electrode, which is then further non-oxidized. A thin film strain gauge characterized by being heat-treated in a neutral gas, a reducing gas or in a vacuum.

Sixteenth invention Chromium 1 to 35%, cobalt 15 to 70% by weight
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Below, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, one or more of antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less, 0.001 to 20% in total, and the balance iron and a small amount of impurities, and the gauge factor is A strain gauge comprising two or more strain gauge alloy wires, foils and thin films.

Seventeenth invention By weight ratio, chromium is 1 to 35% and cobalt is 15 to 70%.
And a total of 0.001 of tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less.
-15%, manganese 10% or less as subcomponent, copper 10%
Hereinafter, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10
% Or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5
% Or less, zinc 5% or less, germanium 5% or less, tin 5%
Below, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less, one or two or more in total of 0.001 to 20% and the balance iron and a small amount of impurities. A strain gauge comprising a wire material, a foil material and a thin film of a strain gauge alloy having 2 or more.

Eighteenth invention Chromium 1-35%, cobalt 15-70% by weight
And a total of 0.001 to 15% of 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum, or a total of 0.001 to 15%, and 10% or less of manganese, 10% or less of copper as a subcomponent, and platinum. 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%.
Hereinafter, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5 %Less than,
Beryllium 3% or less, boron 1% or less, and charcoal 1% or less 1 type or 2 or more types in total 0.001-20
%, The balance iron and a small amount of impurities, and a strain gauge consisting of a wire material, a foil material and a thin film of a strain gauge alloy having a gauge ratio of 2 or more.

[0033]

The conventional Fe-Cr-Co- (W, Mo, Nb,
Since the Ta) multi-component alloy has a very hard property, it has been necessary to produce a material having a desired shape by repeating the steps of processing and softening treatment. That is, since the Vickers hardness Hv is a high value of 500 or more in the processed state, the workability is very poor. On the contrary, in the high temperature treatment of 800 to 1000 ° C., Hv is lowered to about 400 or less for all alloys, the alloy material is softened, and the difference ΔHv between these low values and the worked state becomes about 200 or more. Also becomes. Therefore, work hardening is considered to be extremely remarkable. It is expected that this work-softening motion becomes more remarkable as the content of W, Mo, Nb, or Ta increases. Since it is generally said that the workability of the material is preferably Hv of 400 or less, cold working of the above alloy is quite difficult.

It is said that the main cause of work hardening of these alloys is the work-induced martensite phase α '. When heat-treated at high temperature, γ, which is rich in workability due to α ′ → γ transformation
Be in phase. Therefore, in order to change the balance between the γ phase and the α'phase, it is effective to add a subcomponent.

According to the present invention, the above-mentioned Fe-Cr-Co- (W,
Mo, Nb, Ta) multi-component alloy, as a subcomponent, manganese, copper, platinum, rhodium, palladium, gold, silver, ruthenium, iridium, osmium, hafnium, vanadium, aluminum, silicon, titanium, rare earth elements,
Zirconium, technetium, zinc, germanium,
Tin, antimony, beryllium, boron, and carbon are added to a total of 0.
Many experiments have revealed that the workability can be improved by containing 001 to 20%.

That is, in order to produce the alloy of the present invention, chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10% or less in weight ratio. 0.001 to 15% in total of one kind or two or more kinds, 10% or less of manganese as a subcomponent, 10% or less of copper, 10% or less of platinum, 10% or less of rhodium, 10% or less of palladium, 10% or less of gold, and silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10%
Hereinafter, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5
% Or less, beryllium 3% or less, boron 1% or less and carbon 1% or less, one or two or more in total 0.00
Each raw material of 1 to 20% and the balance iron is heated to a temperature equal to or lower than the melting point in a vacuum to sufficiently exhaust the contained gas, and then preferably dissolved in a non-oxidizing gas, a reducing gas or in a vacuum. Further, the composition is homogenized by sufficiently stirring the molten alloy. It is then cast into a mold of suitable shape and size to obtain a healthy ingot.

If necessary, this ingot is heated at a high temperature for an appropriate period of time and homogenized, or immediately formed into a round bar or plate by hot working such as forging or hot rolling, and then if necessary. While performing softening annealing at a temperature of 400 ° C. or higher, this is subjected to cold working using a swaging machine, a wire drawing machine, a cold rolling machine, or the like to obtain a desired shape, for example, a fine wire having a wire diameter of 0.1 mm or less and 0. 1 mm
The following wire material such as ribbon, foil material or target material having a thickness of 0.1 mm or less is obtained. Further, a thin film is formed from this target material by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering. Further, if necessary, these wires, foils and thin films are heated at a temperature of 1200 ° C. or less in a non-oxidizing gas, a reducing gas or a vacuum, preferably for 1 minute or more and 10 hours or less, and then cooled at an appropriate rate. Thus, a wire material, a foil material, and a thin film of a strain gauge alloy having a gauge factor of 2 or more can be obtained.

FIG. 1, FIG. 2 and FIG. 3 show the relationship between the gauge ratio of the alloy of the present invention produced by the above method and the amount of addition of the accessory component. That is, FIG. 1 shows that Fe-15% Cr-27.
% Co-2% W-2% Mo-2% Nb-2% Ta system alloy with respect to the added amount of each element of Mn, Cu, Pt, Rh, Pd, Au, Ag, Ru and Ir, FIG. Is also Fe
-15% Cr-27% Co-2% W-2% Mo-2% N
b-2% Ta-based alloy with Os, Hf, V, Al, Si, T
The relationship between the addition amount of each element of i, Y and La and FIG. 3 are the same as in Fe-15% Cr-27% Co-2% W-.
2% Mo-2% Nb-2% Ta alloy with Ce, Zr, T
The relationship between the added amount of each element of c, Zn, Ge, Sn, Sb, Be, B and C and the gauge factor is shown. As can be seen from these figures, the addition of the above elements generally has a large effect of increasing the gauge factor.

As a result of measuring the gauge characteristics of the alloy fine wire of the present invention (wire diameter 0.06 mm, processing rate 75%) manufactured by the above method, the values shown in Tables 1 and 2 were obtained.

[0040]

[Table 1]

[0041]

[Table 2]

Next, in the present invention, the alloy composition,
The reason for limiting the numerical values such as the heat treatment in the manufacturing process will be described below. The composition of the alloy of the present invention is chromium 1-35.
%, Cobalt 15-70% and tungsten 10% or less,
Molybdenum 10% or less, niobium 10% or less and tantalum 10% or less 1 type or 2 or more types in total 0.001
-15%, manganese 10% or less as subcomponent, copper 10%
Platinum 10% or less, Rhodium 10% or less, Palladium 10% or less, Gold 10% or less, Silver 10% or less, Ruthenium 10% or less, Iridium 10% or less, Osmium 10
% Or less, hafnium 10% or less, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium. 5% or less, tin 5% or less, antimony 5% or less,
Beryllium 3% or less, boron 1% or less, and carbon 1% or less 1 type or 2 or more types in total 0.001-20
% And the balance iron, and the reason for limiting to each range,
This is because a high gage factor of 2 or more is obtained, variation in gage factor is extremely small, gage characteristics are improved, and workability is also improved, but these effects cannot be expected outside these ranges. The rare earth element is made of Sc, Y and a lanthanum element, but the effects are the same. Furthermore, under heat treatment conditions, 400 ° C or higher 12
Limit the temperature to 00 ° C or less, preferably 1 minute or more and 10
The reason for limiting the heating to time is that cold working is easy under the above processing conditions, and the gauge ratio is 2 or more.
Apparent strain of strain gauge is 100με / ε ・ ℃
^{This is because -1} or less is preferable.

[0043]

EXAMPLES Examples of the present invention will be described below. Example 1 Alloy No. 60 (Composition: Fe-15% Cr-12
7% Co-2% W-2% Mo-2% Nb-2% Ta-5
% Mn-5% Ru) Alloy Wire / Foil Material Production and Evaluation As raw materials, electrolytic iron with 99.97% purity, 99.4%
Pure thermite chromium, 99.59% pure electrolytic cobalt, 99.9% pure tungsten, molybdenum, niobium, tantalum, 99.94% pure electrolytic manganese and 99.99% pure ruthenium were used. In order to make a sample, first, a total weight of 100 g of raw material is put into an alumina crucible and gradually heated in a vacuum using a high frequency induction melting furnace,
The gas in the raw material is exhausted while maintaining a constant temperature for a while just below the melting point. Then, the temperature is further raised to bring the whole into a molten state. In this operation, the melt is agitated to form a homogeneous molten alloy. Next, an ingot was cast into an iron mold having an inner diameter of 10 mm and a height of 120 mm to form an ingot. In this way, 10 identical ingots were manufactured. These ingots were forged at 1150 ° C to make a round bar with an outer diameter of 5 mm, and after repeating intermediate annealing at 1000 ° C several times, an ultrafine wire with a diameter of 0.02 mm was made by swaging and cold drawing. It was The processing rate in this case was 95%. Next, the obtained ultrafine wire is heated in vacuum at various temperatures of 400 to 1200 ° C. for 10 minutes to 5 hours, and then cooled in the furnace to room temperature (average 100 ° C./hour). Table 3 shows the characteristic values when various heat treatments were performed.

[0044]

[Table 3]

Separately from the above ultrafine wire, an ingot manufactured by the same method is subjected to rolling and heat treatment steps to have a thickness of 3 μm.
And a foil material having a width of 100 mm is obtained. Here, the conditions such as the pressing rate of rolling and the heat treatment were almost the same as those of the ultrafine wire. FIG. 4 shows the measurement results of the gauge factor K in the processed state of the ultrafine wire manufactured from lot 10 of alloy No. 60. From this figure, the average value of K (marked in the figure), the maximum value, the minimum value, and the variation ΔK of K are obtained. The K of the present invention is 4.10 ± 0.02 within a lot and 4.10 ± 0.02 between lots, and their variation ΔK.
Is very small at 0.5%. That is, it was found that the ΔK of the alloy of the present invention was about 1/10 of that of the comparative material, and was significantly improved. The gauge characteristics of the foil material were almost the same as the ΔK of the wire material.

Example 2 Alloy No. 7 (Composition: Fe-15
% Cr-35% Co-5% W-5% Hf-5% Rh) Strain gauge made of wire and foil material and evaluated. The alloy raw material was made of hafnium and rhodium with a purity of 99.99%. The process conditions were the same as in Example 1. The obtained ultrafine wire and the foil material may be used as they are, or may be further heat-treated at a temperature of 400 ° C. or more and 1200 ° C. or less in a vacuum for 1 hour to give a thickness of 5 μm.
After adhering to the resin of No. 3, it was processed into a grid-shaped gauge pattern, and a strain gauge made of wire and foil was prototyped. The evaluation results of the wire strain gauge and the foil strain gauge are shown in FIGS. 5 and 6, respectively. The gauge factor K reaches its maximum at about 850 ° C. with respect to the heating temperature. The gauge factor K has a maximum value at about 850 ° C., and the specific electrical resistance ρ and the thermoelectromotive force with respect to copper E _mf do not change significantly with the heating temperature, but the resistance temperature coefficient TCR is small. That is, it was clarified that a highly sensitive and highly stable strain gauge can be provided by using the alloy of the present invention.

Example 3 Alloy No. 82 (composition: Fe-1
4% Cr-35% Co-3% W-2% Mo-2% Nb-
3% Ta-5% Pt-3% V) Manufacture and Evaluation of Thin Film Strain Gauge The purity of the raw material used was 99.99% as in Example 1.
Pure platinum and vanadium were used. First, 800 g of a raw material having a predetermined composition was put into a high-purity alumina crucible and a high-frequency melting furnace was used to produce 10 ⁻⁵ T.
After degassing at high temperature in a vacuum of orr, it is melted in a high-purity argon gas, and after removing slag, casting is performed to obtain an ingot. This ingot is forged at 1150 ° C. to be processed into a disk shape having a diameter of 105 mm and a thickness of 3 mm. Then by a lathe,
A disc having a diameter of 105 mm and a thickness of 2 mm is produced by precision processing. Finally, the copper electrode is bonded to form a sputtering target. From these targets, using a sputtering device, the thickness of 1 is obtained under the following sputtering conditions.
A thin film of μm is prepared.

Preliminary exhaust 1 × 10 ⁻⁷ Torr High frequency power 100 W Argon gas pressure 3 × 10 ⁻² Substrate SiO ₂ substrate Distance between electrodes 60 mm Deposition rate 50 Å / min Film thickness 1 μm Then masking is performed to form a gauge pattern by etching. Attach the electrodes as shown in FIG.
Make a gauge for the device. FIG. 7B shows the variation in K of each element obtained in FIG. 7A, which was 4.1 ± 0.05 in the film formation state, which was very good.

Of the above-mentioned gauges, the element having a small variation in gauge ratio is heated in Ar at each temperature for 30 minutes to prepare a sample. FIG. 8 shows the relationship between the gauge characteristics of these elements and the heating temperature. The obtained gauge characteristics are very similar to the evaluation results of the wire / foil material and the strain gauge using them.

[0050]

As shown by the above experimental results, the alloy of the present invention has the characteristics that the gauge characteristics and workability are further improved as compared with the conventional materials, and the variations in the characteristics are reduced.
Further, the strain gauge comprising the alloy wire for strain gauge, wire material and foil material of the present invention has a gauge ratio of 2 or less.
It has the effect of exhibiting the above high sensitivity and high stability. Therefore, the strain gauge made of the alloy of the present invention includes a load cell, a strain sensor, a weighing scale, an accelerometer, a pressure gauge,
Suitable for various stress / strain gauges and various security devices.

[Brief description of drawings]

FIG. 1 shows Fe-15% Cr-27% Co-2%.
W-2% Mo-2% Nb-2% Ta based alloy with Mn, C
u, Pt, Rh, Pd, Au, Ag, Ru or Ir
FIG. 6 is a characteristic diagram showing the relationship between the gauge factor K and the addition amount of each element in the case of adding.

FIG. 2 shows Fe-15% Cr-27% Co-2%.
W, 2% Mo, 2% Nb, 2% Ta based alloy with Os, H
It is a characteristic view which shows the relationship between the gage factor K and the addition amount of each element when f, V, Al, Si, Ti, Y or La is added.

FIG. 3 shows Fe-15% Cr-27% Co-2%.
W-2% Mo-2% Nb-2% Ta based alloy with Ce, Z
It is a characteristic view which shows the relationship between the gauge ratio K and the addition amount of each element when adding r, Tc, Zn, Ge, Sn, Sb, Be, B or C.

FIG. 4 is a graph of 10 lots of alloy No. 60,
It is a characteristic view which shows the gauge factor K of the ultrafine wire in a processing state.

FIG. 5 is a characteristic diagram showing a relationship between various characteristics of a strain gauge made of an alloy No. 7 wire rod and a heating temperature T.

FIG. 6 is a characteristic diagram showing a relationship between various characteristics of a strain gauge made of an alloy No. 7 foil material and a heating temperature T.

FIG. 7 is a characteristic diagram showing (A) a gauge pattern of a strain gauge made of a thin film of alloy No. 82 and (B) a gauge factor K of each thin film element.

FIG. 8 is a characteristic diagram showing a relationship between various characteristics of a strain gauge made of a thin film of alloy No. 82 and heating temperature T.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical display location G01B 7/16 G01L 1/22 Z

Claims (18)

[Claims] 1. A weight ratio of one or more of chromium 1-35%, cobalt 15-70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10% or less. 0.001-15%,
As secondary components, manganese 10% or less, copper 10% or less, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10 % Or less, hafnium 10% or less, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium. 5%
Below, tin 5% or less, antimony 5% or less, beryllium 3
% Or less, 1% or less of boron and 1% or less of carbon, a total of 0.001 to 20% of one or more kinds and the balance iron and a small amount of impurities, and have a gauge factor of 2 or more. Strain gauge alloy. 2. By weight ratio, one or more of chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less, or 0.001 to 15% in total of two or more kinds, and 10% manganese as an accessory component
Below, copper 10% or less, platinum 10% or less, rhodium 10%
Below, palladium 10% or less, gold 10% or less, silver 10%
Below, ruthenium 10% or less, iridium 10% or less,
Osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5%.
Below, tin 5% or less, antimony 5% or less, beryllium 3
% Or less, 1% or less of boron and 1% or less of carbon, a total of 0.001 to 20% of one or more kinds and the balance iron and a small amount of impurities, and have a gauge factor of 2 or more. Strain gauge alloy. 3. A weight ratio of one or more of chromium 1-35%, cobalt 15-70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10% or less. 0.001-15%,
As secondary components, manganese 10% or less, copper 10% or less, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10 % Or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin. 5% or less, 5% or less of antimony, 3% or less of beryllium, 1% or less of boron, and 1% or less of carbon, and 0.001 to 20% in total, and the balance iron and a small amount of impurities, A strain gauge alloy having a gauge factor of 2 or more. 4. A total of one or more of chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10% or less by weight ratio. 0.001-15%,
As secondary components, manganese 10% or less, copper 10% or less, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10 % Or less, hafnium 10% or less, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium. 5%
Below, tin 5% or less, antimony 5% or less, beryllium 3
% Or less, 1% or less of boron and 1% or less of carbon, a total of 0.001 to 20% of one kind or two or more kinds, and a raw material having an alloy composition consisting of the balance iron and a small amount of impurities are reduced with a non-oxidizing gas and reduction. After melting in a suitable gas or vacuum, cast in a suitable mold, the obtained ingot is formed into a desired round bar or plate by hot working, and then cold working is performed to form a wire or foil, or Alternatively, the wire material or the foil material is further heated at a temperature of 400 ° C. or more and 1200 ° C. or less in a non-oxidizing gas, a reducing gas or a vacuum for an appropriate time and then cooled, and has a gauge factor of 2
A method for producing a strain gauge alloy having the above. 5. By weight ratio, one or more of chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less, or 0.001 to 15% in total of two or more kinds, and 10% manganese as an accessory component
Below, copper 10% or less, platinum 10% or less, rhodium 10%
Below, palladium 10% or less, gold 10% or less, silver 10%
Below, ruthenium 10% or less, iridium 10% or less,
Osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5%.
Below, tin 5% or less, antimony 5% or less, beryllium 3
% Or less, 1% or less of boron and 1% or less of carbon, a total of 0.001 to 20% of one kind or two or more kinds, and a raw material having an alloy composition consisting of the balance iron and a small amount of impurities are reduced with a non-oxidizing gas and reduction. After melting in a suitable gas or vacuum, cast in a suitable mold, the obtained ingot is formed into a desired round bar or plate by hot working, and then cold working is performed to form a wire or foil, or Alternatively, the wire material or the foil material is further heated at a temperature of 400 ° C. or more and 1200 ° C. or less in a non-oxidizing gas, a reducing gas or a vacuum for an appropriate time and then cooled, and has a gauge factor of 2
A method for producing a strain gauge alloy having the above. 6. A weight ratio of 1 to 2 or more of chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10% or less. 0.001-15%,
As secondary components, manganese 10% or less, copper 10% or less, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10 % Or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin. 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less, and carbon 1% or less, a total of 0.001 to 20% of one or more, and the balance iron and a small amount of impurities. The raw material of the composition is melted in a non-oxidizing gas, a reducing gas or a vacuum, and then cast in an appropriate mold,
The obtained ingot is hot-worked to form a desired round bar or plate, and then cold-worked to form a wire or foil, or the wire or foil is further non-oxidizing gas, reducing A method for producing a strain gauge alloy having a gauge factor of 2 or more, which comprises heating at a temperature of 400 ° C. or more and 12000 ° C. or less in a gas or vacuum for an appropriate time and then cooling. 7. A total of one or more of 1 to 35% by weight of chromium, 1 to 35% of chromium, 15 to 70% of cobalt and 10% or less of tungsten, 10% or less of molybdenum, 10% or less of niobium and 10% or less of tantalum. 0.001-15%,
As secondary components, manganese 10% or less, copper 10% or less, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10 % Or less, hafnium 10% or less, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium. 5%
Below, tin 5% or less, antimony 5% or less, beryllium 3
% Or less, 1% or less of boron and 1% or less of carbon, a total of 0.001 to 20% of one kind or two or more kinds, and a raw material having an alloy composition consisting of the balance iron and a small amount of impurities are reduced with a non-oxidizing gas and reduction. After melting in a neutral gas or vacuum and casting in an appropriate mold, the ingot obtained is hot-worked to form the desired round bar or plate, and then cold-worked to form the wire or foil, or as is. Alternatively, 400 in a non-oxidizing gas, reducing gas or vacuum
The wire or foil material heated and cooled at a temperature of ℃ to 1200 ℃ for a suitable time is attached to a suitable base surface to form an element, and if necessary, the element and the element having a quadrature component are the same as temperature compensation. A strain gauge characterized by being constructed in-plane to form a gauge pattern. 8. By weight ratio, one or more of chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less, or 0.001 to 15% in total of two or more kinds, and 10% manganese as an accessory component
Below, copper 10% or less, platinum 10% or less, rhodium 10%
Below, palladium 10% or less, gold 10% or less, silver 10%
Below, ruthenium 10% or less, iridium 10% or less,
Osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5%.
Below, tin 5% or less, antimony 5% or less, beryllium 3
% Or less, 1% or less of boron and 1% or less of carbon, a total of 0.001 to 20% of one kind or two or more kinds, and a raw material having an alloy composition consisting of the balance iron and a small amount of impurities are reduced with a non-oxidizing gas and reduction. After melting in a neutral gas or vacuum and casting in an appropriate mold, the ingot obtained is hot-worked to form the desired round bar or plate, and then cold-worked to form the wire or foil, or as is. Alternatively, 400 in a non-oxidizing gas, reducing gas or vacuum
The wire or foil, which has been heated at a temperature of ℃ or more and 1200 ℃ or less for a suitable time and then cooled, is attached to a suitable base surface to form an element. If necessary, the element and the element of the orthogonal component are the same as temperature compensation. A strain gauge characterized by being constructed in-plane to form a gauge pattern. 9. By weight ratio, one or more of chromium 1-35%, cobalt 15-70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10% or less, or a total of two or more thereof. 0.001-15%,
As secondary components, manganese 10% or less, copper 10% or less, platinum 10% or less, rhodium 10% or less, palladium 10% or less, gold 10% or less, silver 10% or less, ruthenium 10% or less, iridium 10% or less, osmium 10 % Or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin. 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less, and carbon 1% or less, a total of 0.001 to 20% of one or more, and the balance iron and a small amount of impurities. The raw material of the composition is melted in a non-oxidizing gas, a reducing gas or in a vacuum and then cast in an appropriate mold, and the obtained ingot is The desired round bar or plate is formed by hot working, and then cold working is performed to form a wire or foil, either as it is or further in a non-oxidizing gas, reducing gas, or vacuum at a temperature of 400 ° C to 1200 ° C. Then, the wire or foil that has been heated and cooled for an appropriate time is attached to an appropriate base surface to form an element, and if necessary, as a temperature compensation, an element having a component orthogonal to the element is constructed in the same plane. A strain gauge that is characterized by forming a gauge pattern. 10. By weight, chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10%.
0.001 to 15 in total of one or more of the following
%, Manganese 10% or less as a sub-component, copper 10% or less,
Platinum 10% or less, Rhodium 10% or less, Palladium 10
% Or less, gold 10% or less, silver 10% or less, ruthenium 10
% Or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 1
0% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and Desirable by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering of an alloy consisting of 0.001 to 20% in total of 1 or 2 or more of carbon 1% or less and the balance iron and a small amount of impurities. After forming a thin film on the substrate of, and then punching it into the desired shape, performing processing such as photoetching or trimming to form an element, if necessary, for temperature compensation, construct an element of a component orthogonal to this element in the same plane. The thin film strain gauge is characterized in that a gauge pattern is formed on the electrode and electrodes are further configured. 11. A weight ratio of one of chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less, or 0.001 to 15% in total of two or more kinds, and manganese 10 as a subcomponent
% Or less, copper 10% or less, platinum 10% or less, rhodium 10
% Or less, palladium 10% or less, gold 10% or less, silver 10
% Or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10
% Or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon. 1% or less, 0.001 to 20% in total of 1 or 2 or more, and an alloy composed of the balance iron and a small amount of impurities, electrodeposition, vapor deposition,
A thin film is formed on a desired substrate by a method selected from electroless plating or sputtering, and then punched into a desired shape and subjected to processing such as photoetching or trimming to form an element. A thin film strain gauge characterized in that elements of right-angled components are constructed in the same plane to form a gauge pattern, and electrodes are further configured. 12. By weight ratio, chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10%.
0.001 to 15 in total of one or more of the following
%, Manganese 10% or less as a sub-component, copper 10% or less,
Platinum 10% or less, Rhodium 10% or less, Palladium 10
% Or less, gold 10% or less, silver 10% or less, ruthenium 10
% Or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10
% Or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less 1 A thin film is formed on a desired substrate by a method selected from electrodeposition, vapor deposition, electroless plating, or sputtering of an alloy of 0.001 to 20% in total of two or more kinds and the balance iron and a small amount of impurities. After that, it is punched into a desired shape, subjected to processing such as photo etching or trimming to form an element, and if necessary, as a temperature compensation, an element having a component orthogonal to the element is constructed in the same plane to form a gauge pattern, Furthermore, a thin film strain gauge characterized by comprising electrodes. 13. By weight, chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10%.
0.001 to 15 in total of one or more of the following
%, Manganese 10% or less as a sub-component, copper 10% or less,
Platinum 10% or less, Rhodium 10% or less, Palladium 10
% Or less, gold 10% or less, silver 10% or less, ruthenium 10
% Or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 1
0% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and Desirable by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering of an alloy consisting of 0.001 to 20% in total of 1 or 2 or more of carbon 1% or less and the balance iron and a small amount of impurities. After forming a thin film on the substrate of, and then punching it into the desired shape, performing processing such as photoetching or trimming to form an element, if necessary, for temperature compensation, construct an element of a component orthogonal to this element in the same plane. After forming a gauge pattern with the electrode and further configuring an electrode, this is further subjected to heat treatment in a non-oxidizing gas, a reducing gas or a vacuum. Thin-film strain gauge that. 14. A weight ratio of one or more of chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less, or 0.001 to 15% in total of two or more kinds, and manganese 10 as a subcomponent
% Or less, copper 10% or less, platinum 10% or less, rhodium 10
% Or less, palladium 10% or less, gold 10% or less, silver 10
% Or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10
% Or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon. 1% or less of 1% or less of 0.001 to 20% in total and an alloy composed of the balance iron and a small amount of impurities are selected by a method selected from electrodeposition, vapor deposition, electroless plating or sputtering. After forming a thin film on the substrate, punching it into a desired shape, performing photo-etching or trimming etc. to make an element, and if necessary, for temperature compensation, construct an element of a component orthogonal to the element in the same plane. The method is characterized in that after forming a gauge pattern and further forming an electrode, this is further heat-treated in a non-oxidizing gas, a reducing gas or a vacuum. Thin-film strain gauge. 15. By weight ratio, chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10%.
0.001 to 15 in total of one or more of the following
%, Manganese 10% or less as a sub-component, copper 10% or less,
Platinum 10% or less, Rhodium 10% or less, Palladium 10
% Or less, gold 10% or less, silver 10% or less, ruthenium 10
% Or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10
% Or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less 1 A thin film is formed on a desired substrate by a method selected from electrodeposition, vapor deposition, electroless plating, or sputtering of an alloy of 0.001 to 20% in total of two or more kinds and the balance iron and a small amount of impurities. After that, it is punched into a desired shape, subjected to processing such as photo etching or trimming to form an element, and if necessary, as a temperature compensation, an element having a component orthogonal to the element is constructed in the same plane to form a gauge pattern, Further, after forming the electrode, the thin film strain gauge is characterized by being further heat-treated in a non-oxidizing gas, a reducing gas or in a vacuum. 16. By weight ratio, chromium 1-35%, cobalt 15-70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10%.
0.001 to 15 in total of one or more of the following
%, Manganese 10% or less as a sub-component, copper 10% or less,
Platinum 10% or less, Rhodium 10% or less, Palladium 10
% Or less, gold 10% or less, silver 10% or less, ruthenium 10
% Or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, aluminum 10% or less, silicon 10% or less, titanium 1
0% or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and Consists of a wire rod, a foil and a thin film of a strain gauge alloy having a total of 0.001 to 20% of one or two or more carbons of 1% or less and the balance iron and a small amount of impurities, and having a gauge factor of 2 or more. Strain gauge. 17. A weight ratio of one or more of chromium 1 to 35%, cobalt 15 to 70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less, tantalum 10% or less and aluminum 10% or less, or 0.001 to 15% in total of two or more kinds, and manganese 10 as a subcomponent
% Or less, copper 10% or less, platinum 10% or less, rhodium 10
% Or less, palladium 10% or less, gold 10% or less, silver 10
% Or less, ruthenium 10% or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10
% Or less, rare earth element 10% or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon. 1% or less of 1% or less, 0.001 to 20% in total, the balance of iron and a small amount of impurities, and a strain gauge alloy wire having a gauge factor of 2 or more, a foil material, and a thin film. Strain gauge. 18. By weight ratio, chromium 1-35%, cobalt 15-70% and tungsten 10% or less, molybdenum 10% or less, niobium 10% or less and tantalum 10%.
0.001 to 15 in total of one or more of the following
%, Manganese 10% or less as a sub-component, copper 10% or less,
Platinum 10% or less, Rhodium 10% or less, Palladium 10
% Or less, gold 10% or less, silver 10% or less, ruthenium 10
% Or less, iridium 10% or less, osmium 10% or less, hafnium 10% or less, vanadium 10% or less, silicon 10% or less, titanium 10% or less, rare earth element 10
% Or less, zirconium 5% or less, technetium 5% or less, zinc 5% or less, germanium 5% or less, tin 5% or less, antimony 5% or less, beryllium 3% or less, boron 1% or less and carbon 1% or less 1 A strain gauge comprising a wire material, a foil material and a thin film of a strain gauge base metal having a total of 0.001 to 20% of two or more kinds and the balance iron and a small amount of impurities and having a gauge ratio of 2 or more.