JPH08174541A - Dresser and dressing method - Google Patents

Abstract

PURPOSE: To correct an edge within a short time without replacing a blade and performing dressing many times. CONSTITUTION: The half of the upper surface of a planar plate 11 is a slope 11 inclined with respect to the bottom surface 11c of the plate 11 and the other half thereof is a parallel surface 11b parallel to the bottom surface 11c. An electrodeposition layer 12 is provided on the slope 11a by the electrodeposition of polishing particles based on diamond particles. The difference 'h' between the lower end and upper end of the slope 11a is same to the width of the outer periphery to be cut off of a blade. A grindstone plate 13 is provided on the parallel surface 11b and composed of a planar GC grindstone plate. The upper surface of the grindstone plate 13 is higher than the upper end of the upper surface of the electrodeposition layer 12 and this difference in level 13a is set to height of a degree capable of imparting proper roundness to an edge and not cutting off the edge up to the side surface thereof. The blade is moved from the electrodeposition layer 12 toward the grindstone plate 13 to perform dressing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dresser and a dressing method for dressing a cutting edge of a blade, and more particularly to a dresser and a dressing method for dressing a blade used for cutting by a dicing machine.

[0002]

2. Description of the Related Art Generally, a dicing device is used as a device for cutting out thin pieces such as silicon wafers and crystal color filters. This dicing device is composed of a blade mounting portion for mounting a blade having a disc-shaped cutting blade and rotating the blade, and a workpiece fixing portion for fixing the workpiece. A thin piece can be cut out by moving the blade rotating at high speed while making a cut in the work.

The blade of such a dicing device is
The cutting edge wears as the number of cuts increases. as a result,
The sharpness deteriorates and the desired cut amount is not reached. Further, the blade may be damaged due to an increase in cutting resistance. In order to prevent these harmful effects, conventionally, dressing was performed before the sharpness of the blade deteriorates to recover the clogging of the cutting edge.

However, the wear of the blade occurs not only on the cutting edge but also on the side surface of the blade. FIG. 10 is a cross-sectional view showing a cutting state of the color filter by the worn blade. In the figure, the color filter 102 is fixed to a base material 104 by an adhesive layer 103. The blade 101 has a worn edge and rounded corners. When the depth of cut is 1.5 mm, the wear on the side surface extends to a position about 0.5 mm from the cutting edge. Then, cutting is performed by the blade 101.

As a result, the cut surface of the color filter 102 is cut with a groove having the same sectional shape as the worn blade 101. After cutting a groove deeply up to the base material, the adhesive portion is peeled off to obtain a piece of the color filter 102.

FIG. 11 is a side view of a color filter cut out by a worn blade. The length of one side of the color filter 102 required by the standard is “L”.
Is. However, the length of one side on the upper surface of the color filter 102 is “L”, but it spreads in a skirt shape as it approaches the lower surface. And, it extends by the length "d" in each cut surface. Therefore, the length of one side on the lower surface is “L + 2d”. That is, the color filter 102
Since it spreads like a skirt near the bottom surface of the, it is out of the standard.

Even if the spread in the vicinity of the lower surface is within the range of the error allowed by the standard, the skirt-shaped tip has an acute angle, so that chipping easily occurs. Further, if the tip has an acute angle, the case will be scraped if it comes into contact with the inner surface of the case when the case is taken in and out. Case waste leads to deterioration of the quality of the color filter.

As described above, since the wear of the blade causes various harmful effects, conventionally, when the blade is worn, dressing is sufficiently performed to correct the blade edge of the blade, or
Or it was replaced with a new blade. in this way,
The quality of the color filter can be maintained by taking measures such as dressing before the blade wears.

[0009]

However, when the worn edge is corrected by dressing, the amount of edge that can be scraped off by one dressing is about 5 μm. Therefore, it takes a very long time to correct the cutting edge by dressing. During this time, the dicing work must be suspended. This leads to a reduction in work efficiency and productivity, resulting in an increase in cost. On the other hand, in order to perform treshing in a short time, it is necessary to deepen the cut amount in one dressing. As a result, the side surface of the blade is scraped by the dresser, the shape of the cutting edge is not improved, or the blade is overloaded,
The blade itself will be destroyed.

Frequent replacement of the blade with a new one causes an increase in cost. Further, when replacing the blade, it is necessary to correct the error when the blade is attached. That is, the blade has a hole at the center, and the hole is fitted into the blade mounting shaft to be mounted on the mounting shaft. At this time, the hole diameter of the blade is set to be slightly larger than the outer diameter of the shaft. Due to the difference between the two diameters, the roundness after the blade is attached deteriorates. In order to correct this roundness, a long dressing operation is required, which causes a problem of reducing productivity.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a dresser and a dressing method capable of correcting the cutting edge in a short time without removing the blade.

[0012]

In the present invention, in order to solve the above problems, diamond is mainly used in a dresser of a dicing machine for cutting by rotating and moving a blade having a disk-shaped cutting blade. A dresser characterized in that a grinding surface coated with abrasive grains as a component is provided on the upper surface, and the grinding surface is inclined upward with respect to the advancing direction of the blade, and has a grinding portion for scraping off a worn cutting edge. Will be provided.

Further, it is provided at the latter stage of the dresser, that is, at the rear of the grinding portion on the moving path of the blade,
There is provided a dresser having a grindstone portion having a grindstone on the upper surface for performing a dressing of the cutting edge.

Further, in a dressing method of a blade used for a dicing apparatus for cutting and having a disc-shaped cutting edge, abrasive grains for grinding the blade are formed and the lower end portion of the ground surface is inclined. To the height, the height of the cutting edge of the blade is matched, by moving the blade in the direction from the lower end of the grinding surface to the upper end while rotating, the worn part of the cutting edge is scraped off, the blade, There is provided a dressing method characterized in that the blade edge is dressed by moving on a grindstone with a constant cutting amount while rotating.

[0015]

In the dresser, when the blade is rotated and moved from the lower end to the upper end of the ground surface whose surface is inclined, only the amount of difference in height between the lower end and the upper end causes the blade to move. Sharpen the blade edge of. Further, the grindstone portion revises the blade edge of the blade when the blade is moved on the grindstone with a constant cut amount while rotating the blade.
As a result, blade grinding and dressing can be performed in a row.

In the dressing method, after the height of the cutting edge of the blade is made to match the height of the lower end of the grinding surface, the blade is moved while rotating from the lower end of the grinding surface toward the upper end. As a result, the cutting edge of the blade is scraped off by the amount of the difference in height between the lower end and the upper end. Further, the blade is re-aligned by moving the blade over a grindstone for re-dressing the blade with a constant cutting amount.

As a result, the cutting edge can be corrected in a short time without performing dressing several tens to several hundreds of times or replacing with a new blade.

[0018]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a first embodiment of a dresser according to the present invention. The dresser 10 includes a flat plate 11 having a size that can be installed on a work table of a dicing device, an electrodeposition layer 12 and a grindstone plate 13 provided thereon.

As for the upper surface of the plane plate 11, the left half surface is the bottom surface 1.
The inclined surface 11a is inclined with respect to 1c, and the right half surface is a parallel surface 11b parallel to the bottom surface 11c. The electrodeposition layer 12 is provided on the slope 11a. The electrodeposition layer 12 is formed by electrodepositing abrasive grains containing diamond particles as a main component. The portion where the electrodeposition layer 12 is provided is a cutting portion for scraping off the blade. The difference "h" between the lower end and the upper end of the inclined surface 11a is the same as the width of the outer circumference to be shaved off.

On the other hand, the grindstone plate 13 is provided on the upper surface of the parallel surface 11b.
Is provided. The grindstone plate 13 is a flat GC grindstone plate. The portion where the whetstone plate 13 is provided is a whetstone portion for dressing the blade. The height of the upper surface of the grindstone plate 13 is one step higher than the upper end of the upper surface of the electrodeposition layer 12. The height of the step 13a is set so that the cutting edge can be appropriately rounded and the side surface is not scraped off.

As a method of forming the electrodeposition layer 12 on the flat plate 11, it is possible to first form an electrodeposition dresser and then attach this electrodeposition dresser to the flat plate 11. FIG. 2 is a diagram showing a manufacturing process of the electrodeposition dresser. [S1] A carbon steel material of S45C (JIS standard) is processed to provide a base material. [S2] Ni (nickel) other than the surface on which the electrodeposition layer is to be formed
Apply plating. The process for forming the electrodeposition layer is as follows. [S3] A diamond powder is provided on the surface of the base material on which the electrodeposition layer is to be formed. [S4] The base material is put into an electrolytic solution, and Ni is coated by electrolytic plating.

FIG. 3 is a detailed view of the surface of the electrodeposition layer.
FIG. 3A is a diagram showing a base material provided with a diamond powder (a state after performing step 3 shown in FIG. 2). S4
A diamond powder 12b is provided on the base material 12a made of 5C.

(B) is a view showing the base material 12a after coating with Ni (the state after step 4 shown in FIG. 2). Diamond powder 12 on the base material 12a
The coated Ni12c has penetrated into the gap b. With this Ni12c, diamond powder 12
b is fixed. In this way, the electrodeposition dresser is produced.

FIG. 4 is a diagram showing a dicing apparatus for carrying out the present invention. The dicing device mainly includes a blade mounting portion 20 and a work fixing portion 30. A flange 23 is provided at the tip of the mounting shaft 21 of the blade mounting portion 20. The blade 24 is fixed to the flange 23 by the mounting nut 22. The blade 24 is made of SDC500 (manufactured by Asahi Diamond, "SDC" indicates an abrasive, and "500" indicates a grain size), and has a diameter of 56 mm and a thickness of 0.2 mm.
On the other hand, the work fixing part 30 is provided with a work table 31 having an indexing mechanism with a vacuum chuck.

By relatively moving the positions of the work table 31 and the blade 24, the work can be cut and the blade can be dressed. FIG. 5 is a view showing a dicing apparatus equipped with the dresser of the present invention. In the dicing device, the blade 24 is fixed to the flange 23 by the mounting nut 22. Blade 24
Is made of SDC500 (made by Asahi Diamond) and has a diameter of 56 mm and a thickness of 0.2 mm.

The work table 31 has an indexing mechanism with a vacuum chuck, and the dresser 10 is fixed by the vacuum chuck. Dresser 1
On the flat plate 11 of 0, an electrodeposition layer (SD500, manufactured by Noritake Co., Ltd.) 12 having diamond particles attached to the slope (length 70 mm) is provided, and the height difference of the slope is 0.5 mm.

A grindstone plate (G
C500, manufactured by Noritake Company Limited) 13. The step difference between the electrodeposition layer 12 and the grindstone plate 13 is 0.
It is 5 mm.

Next, a dressing method using the dicing apparatus having the dresser thus attached will be described. First, the blade is arranged in front of the dresser on the side of the electrodeposition layer 12 (on the left side in FIG. 5), and the blade is rotated. The rotation speed at this time is 25,000 to 30,000 rpm.

The lowest position (lower end) on the surface of the electrodeposition layer 12
Move the blade edge to the same height as 0.5mm / s
It moves in the direction of the dresser (from left to right in FIG. 5) at the speed of. At this time, in order to remove the cutting chips and suppress an increase in cutting heat, cooling water is discharged. As a result, the blade 24 moves on the electrodeposition layer 12 while scraping off the cutting edge.

When reaching the highest position (upper end) of the electrodeposition layer 12, the outer peripheral portion of the blade 24 is scraped off by the height difference (0.5 mm) of the electrodeposition layer 12. As a result, the wear portion (including the side surface wear) of the blade is scraped off.

The blade 24 continuously moves on the grindstone plate 13 at the same speed. Since the grindstone plate 13 is provided at a position higher by 0.5 mm than the upper end portion of the electrodeposition layer 12, the blade 24 moves while cutting the grindstone plate 13. As a result, the cutting edge of the blade 24 is smoothly adjusted.

In this way, the blade tip of the blade is attached to the electrodeposition layer 12
After it has been sufficiently scraped off with, the dressing is performed with the grindstone plate 13, so that the blade edge can be corrected by one dressing.

Here, the upper end of the electrodeposition layer 12 and the grindstone plate 13
If the step on the surface is too large, the side surface of the blade will be scraped. Further, in order to cut glass or the like, the sharpness is better when the edge of the blade is not sharp. The optimum step difference that satisfies these two points is about 0.5 mm.

FIG. 6 is a sectional view of the cutting edge of the blade before and after dressing. (A) is a cross-sectional view of a cutting edge of a new blade. From this figure, it can be seen that the angle of the cutting edge 51a of the blade 51 is an acute angle. FIG. 6B is a sectional view of the blade edge of the worn blade 52. From this figure, it can be seen that the wear of the blade edge 52a of the blade 52 extends to the side surface. (C) is a cross-sectional view of the blade edge of the blade 53 after dressing. From this figure, it can be seen that after dressing, the blade edge 53a of the blade 53 is appropriately rounded for cutting glass.

That is, by performing dressing using the dresser of the present invention, the blade can be made to have an optimum cutting edge. Furthermore, the degree of the effect will be specifically described by taking as an example the case of dressing a worn blade by cutting the color filter.

FIG. 7 is a diagram showing a step of cutting the color filter. [S11] A large (350 mm × 320 mm) glass substrate is washed. [S12] A light shielding film is formed by sputtering. [S13] Development etching is performed. [S14] Three colors (red, green, blue) are colored (resist, exposure, etching) with color inks. [S15] A protective film is formed. [S16] The large plate is divided into four. [S17] The divided substrates are bonded to the base material. [S18] Perform dicing. [S19] Individual color filters are separated from the base material. [S20] The color filter is washed. [S21] The quality of the color filter is inspected. [S22] A color filter suitable for the inspection content is shipped.

FIG. 8 shows the dicing process (step 1 in FIG. 7).
It is a figure which shows the detail of 8). FIG. 9A is a diagram showing a cutting state of the substrate of the color filter. A base material 40 is fixed to the work fixing portion 30 by a vacuum chuck. A color filter substrate 41 is bonded to the upper surface of the base material 40.

By moving the blade 24 attached to the blade attaching portion 20 on the substrate 41,
First, the substrate 41 is cut in the X-axis direction. (B) is a diagram showing the substrate after being cut in the X-axis direction. Between the color filters 41a to be cut out printed on the substrate 41, X
Axial cut.

After cutting in the X-axis direction, the work table 31 is set to 9
Rotate 0 °. Then, the substrate 41 is cut in the X-axis direction. (C) is a diagram showing the substrate after being cut in the Y-axis direction.
The color filters 41a to be cut out, which are printed in the substrate 41, are cut in the X-axis and Y-axis directions. As a result, each color filter is separated.

By repeating such dicing, the cutting edge of the blade 24 is worn. Abnormality of the cutting edge is confirmed when about 50 substrates are cut. Here, when cutting the substrate, a minimum cutting amount is required, so when the diameter of the flange is 49 mm, the usable blade has a diameter of 52 mm or more. That is, when the outer circumference of the blade is cut by 0.5 mm per dressing, the dressing can be performed 4 times with a new blade having a diameter of 56 mm. Therefore, including new products, one blade can cut 50 substrates.
It can be done twice. That is, it is possible to cut about 250 substrates.

As described above, the dressing of the blade can be performed in a short time by the dresser of the present invention and the dressing method using the dresser. Therefore, the size of the cut work such as the color filter can be maintained with high accuracy. As a result, the occurrence of dimensional defects is reduced, the yield is improved, and chipping due to the skirt-shaped acute-angled portion is prevented.

Further, since the worn blade can be dressed and used again and again, the replacement time of the blade is greatly extended, and the number of works which can be cut by one blade is increased. If this is used in an automatic dicing machine,
It enables continuous operation for a long time, which improves productivity. In addition, the manufacturing cost is reduced by reducing the number of required blades.

In the above description, the dresser in which the cutting portion and the grindstone portion are integrally provided has been described, but the cutting portion and the grindstone portion do not necessarily have to be integral. FIG. 9 is a diagram showing a second embodiment of the dresser of the present invention. This dresser is separated into a grinding section 60 for scraping off the cutting edge and a grindstone section 70 for redressing the cutting edge.

In the grinding section 60, the upper surface of the plane plate 61 is an inclined surface 61a inclined with respect to the bottom surface 61b, and the electrodeposition layer 62 is formed.
Is provided on the slope 61a. On the other hand, the grindstone 70
Then, the upper surface of the plane plate 71 is a parallel surface 7 parallel to the bottom surface 71b.
It is 1a. The grindstone plate 72 is provided on the upper surface of the parallel surface 71a. The height of the upper surface of the grindstone plate 72 is one step higher than the uppermost portion of the upper surface of the electrodeposition layer 62.

In this way, by separately providing the electrodeposition layer 62 and the grindstone plate 72, depending on the type of blade,
It is possible to freely change the type of the electrodeposition layer 62 and the type of the grindstone plate 72.

For example, a silicon wafer, glass or the like can be considered as the material of the substrate. As a matter of course, if the material is changed, the electrodeposition layer and the grindstone plate that are optimal for dressing the blade also change. If the electrodeposition layer and the grindstone plate are separated, a dresser that is compatible with the blade can be selected each time.

Further, if the electrodeposition layer and the grindstone plate are separated, even if it is necessary to change the amount of scraping in the electrodeposition layer,
It can be easily changed by changing the height difference of the electrodeposition layer. Similarly, it is easy to change the amount of the step between the upper end of the electrodeposition layer and the grindstone plate.

[0048]

As described above, in the present invention, the dresser having the electrodeposition layer whose upper surface is a slope and the grindstone plate is provided. Then, when performing the dressing, the blade to be dressed, from the lower end of the electrodeposition layer to the upper end, and in order to move the grindstone plate, without removing the blade from the dicing device, the blade edge of the blade Can be corrected with one dressing. As a result, it is possible to improve productivity in dicing and reduce costs.

[Brief description of drawings]

FIG. 1 is a diagram showing a first embodiment of a dresser according to the present invention.

FIG. 2 is a diagram showing a manufacturing process of an electrodeposition dresser.

FIG. 3 is a detailed view of the surface of the electrodeposition layer. (A) is a figure which shows the base material which provided the diamond powder, (B)
FIG. 4 is a diagram showing a base material after coating with Ni.

FIG. 4 is a diagram showing a dicing apparatus for carrying out the present invention.

FIG. 5 is a view showing a dicing apparatus equipped with a dresser of the present invention.

FIG. 6 is a cross-sectional view of the cutting edge of a blade before and after dressing. (A) is a sectional view of a blade tip of a new blade, (B) is a sectional view of a blade tip of a worn blade, and (C) is a sectional view of a blade tip after dressing.

FIG. 7 is a diagram showing a step of cutting a color filter.

FIG. 8 is a diagram showing details of a dicing process. (A)
Is a diagram showing a cutting state of the substrate of the color filter,
(B) is a diagram showing the substrate after being cut in the X-axis direction,
(C) is a diagram showing the substrate after being cut in the Y-axis direction.

FIG. 9 is a diagram showing a second embodiment of the dresser according to the present invention.

FIG. 10 is a cross-sectional view showing a cutting state of a color filter by a worn blade.

FIG. 11 is a side view of a color filter cut out by a worn blade.

[Explanation of symbols]

 10 Dresser 11 Flat Plate 12 Electroplated Layer 13 Grindstone Plate

Claims (3)

[Claims] 1. In a dresser of a dicing device for cutting by rotating and moving a blade having a disk-shaped cutting edge, a grinding surface on which abrasive grains for grinding the blade are formed is provided on an upper surface, A dresser having a grinding surface whose surface is inclined upward with respect to the traveling direction of the blade for scraping off a worn edge. 2. The dresser according to claim 1, further comprising a grindstone portion which is provided on the moving path of the blade behind the grinding portion and has a grindstone on the upper surface for performing the dressing of the cutting edge. . 3. A dressing method for a blade having a disk-shaped cutting edge, which is used in a dicing device for cutting, and in which a lower end portion of a ground surface on which an abrasive grain for grinding the blade is formed and whose surface is inclined is formed. Height, the height of the cutting edge of the blade is matched, by moving the blade from the lower end of the grinding surface to the upper end direction while rotating, scraping off the wear part of the cutting edge, the blade, While rotating, with a constant cut amount,
A dressing method characterized in that the edge of the blade is adjusted by moving it on the grindstone.