JPH0817194B2 - Liquid crystal display probe device and liquid crystal display alignment method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Field of Industrial Application) The present invention relates to a liquid crystal display probe device and a liquid crystal display alignment method.

(Prior Art) A probe device is disclosed in JP-A-62-3901 and JP-A-62-3901.
No. 62-55977. These probe devices are devices developed for inspecting the electrical characteristics of individual device patterns formed on a semiconductor wafer.

In recent years, a large liquid crystal substrate (Liquid Crystal) for TV screens
Display: Hereinafter abbreviated as LCD. ) Has increased the demand for quick and reliable inspection of LCDs with a large number of circuits. This LCD circuit inspection is performed before injecting liquid crystal into the glass container. That is, the electrode formed 1
A pair of glass substrates are provided in parallel via a spacer to form a container, a circuit test is performed at the stage of the glass container, and liquid crystal is injected into the glass container after the test is completed.

In order to meet the needs of such large LCD circuit testing, we got a hint from the probe device for semiconductor wafers,
A probe device for LCD has been developed and put into practical use.

In such an LCD probe device, one LCD
Is placed on a rotatable main chuck provided on the upper surface of the support table, and the probe (prob
Make a contact with e), energize the circuit through the probe, and inspect for the presence of disconnection. The purpose of this LCD test is to shake off defective devices at an intermediate stage and to feed back the test results to the previous process to improve the yield and reliability of products.

Such an LCD test system is basically composed of two devices, an LCD probing machine (hereinafter referred to as an LCD probe device) and a tester. Both are connected by a measuring line, and the probe card probe is connected.
The electrodes of the LCD are brought into contact with each other, and the test complete signal and the fail signal are exchanged between the inspection unit and the tester in response to the test start command of the test control line.

By the way, in conducting the test, it is important that each of the probes is brought into accurate contact with each electrode of the LCD. Therefore, before testing, the LCD on the chuck
Must be accurately aligned with the probe of the probe card beforehand. In this case, in the semiconductor wafer probe device, since the metal electrode (bonding pad) is formed on each device pattern of the semiconductor wafer, the pad is irradiated with light and the light reflected by the pad is detected. However, in the LCD probe device, since the electrodes are made of a transparent material, the electrodes cannot be optically detected. For this reason, a target capable of reflecting light is marked on the LCD at a proper position, and the LCD is irradiated with light to detect the position of the LCD. That is, the two alignment marks are provided so as to be separated from each other by a predetermined distance L, and the positions of these marks are respectively detected. And
The LCD position is corrected so that the LCD electrode overlaps the probe based on the detected two mark positions. LCD like this
An alignment device is used for alignment between the probe and the probe.

As shown in FIG. 18, a conventional LCD probing machine alignment device has a main chuck (hereinafter abbreviated as a chuck) for holding an LCD (1) by suction (2).
And a stage (not shown) for moving the chuck (2) in the XY and θ directions, and the LCD (1) on the chuck (2).
It has a light source (3) for irradiating it with light and a sensor (5) for detecting the reflected light (4a) reflected by the LCD (1).

A case where the position of the LCD (1) is detected by a conventional alignment device and the LCD (1) is aligned based on the position will be described with reference to FIG.

The LCD (1) is placed on the chuck (2) so that the center of the LCD (1) is located at the center (6) of the sensor (5). Then, as shown in FIG. 19 (b), the chuck (2) is moved to the right, and the first alignment mark (7) of the LCD (1) is placed at the center (6) of the sensor (5). It is positioned, light is projected on the mark (7), and this reflected light sensor (5) detects it. Next, the chuck (2) is moved to the right, and the second alignment mark (8) of the LCD (1) is moved.
Is located at the center (6) of the sensor (5), light is projected on the mark (8), and this reflected light is detected by the sensor (5). When the current position of the LCD (1) is grasped from the detection position of the marks (7, 8), the LCD (1) is moved together with the chuck (2) by the XYθ stage, and the electrodes of the LCD (1) are used as probes on the XY plane. Correct the position so that they overlap. After the LCD (1) position is corrected, the probe card is moved in the Z direction to bring each probe into contact with each electrode of the LCD (1), and an electrical characteristic test is performed.

(Problem to be Solved by the Invention) However, in the conventional alignment device of the probe device, since the glass container of the LCD (1) is a transparent body, the irradiation light (4) is totally reflected on the surface of the glass container. However, as shown in FIG. 18, a part of the irradiation light (4) is LC
The light passes through the glass plate D (1), is reflected by the back surface (surface on the chuck side) of the glass plate, and the reflected light (4b) is detected by the sensor (5). Therefore, correct reflected light (4a) and incorrect reflected light (4b) are detected at the same time,
Since the position detection accuracy of the LCD (1) decreases, the LCD device cannot be accurately positioned with respect to the probe.

Further, in the conventional alignment apparatus, firstly,
The mark (7) is detected, and then the second mark (8) is detected, so that the position cannot be detected quickly. Furthermore, since the LCD (1) is moved together with the chuck (2) by the distance from the first mark (7) to the second mark (8), it is necessary to provide a space for moving the LCD (1) in the device. However, there is a drawback that the probe device becomes large.

Further, Japanese Patent Application Laid-Open No. 58-210633 discloses a method in which a plurality of light emitting portions and light receiving elements are provided on both sides of the object, and the object is aligned based on the difference in light amount of the light receiving elements. .

However, with the above alignment method, a large LCD
(1) has a drawback that a great deal of processing time is required to perform data acquisition of all peripheral edge positions.

An object of the present invention is to provide a liquid crystal display probe device capable of surely aligning the LCD (1) with the probe.

Another object of the present invention is to provide a liquid crystal display probe device that is compact as a whole by downsizing the alignment device.

A further object of the present invention is to provide a liquid crystal display alignment method that shortens the data acquisition time during alignment and performs alignment in a short processing time.

[Structure of Invention]

(Means for Solving the Problems) A liquid crystal display probe device according to claim 1 of the present invention is an inspection unit for inspecting by contacting a probe with an electrode of a liquid crystal display body, and the liquid crystal display body faces the probe. The surface of the liquid crystal display held by the support and the surface of the liquid crystal display having a light reflectance lower than that of the surface of the liquid crystal display. A light projection means for projecting the reflected light, a reflected light detecting means for detecting the detected portion based on the light reflected from the liquid crystal display body, and a relative relationship between the liquid crystal display body and the probe based on the detection signal of the detected portion. Position recognition means for recognizing the position and obtaining a movement amount of the liquid crystal display body necessary to correct the mismatch between the electrode of the liquid crystal display body and the probe, and the support based on the movement amount calculated by the position recognition means. Move the platform Positioning means for moving the probe to align the liquid crystal display body with the probe so that the probe is aligned with the electrodes of the liquid crystal display body, and the reflected light detection means includes a plurality of image pickup means for picking up the detected portion. And a plurality of image forming means configured to individually form an image based on the image pickup signal of the image pickup means, and the position recognizing means is a liquid crystal display based on the image of each of the image forming means. It is characterized in that it is provided with a discriminating means for discriminating individually the discrepancy between the electrode and the probe.

According to a second aspect of the present invention, there is provided a method of aligning a liquid crystal display body, wherein the liquid crystal display body is placed on a support, and light is projected from a light projecting means onto the surface of the liquid crystal display body. After the light reflected from the position recognition mark of the display body is detected by the reflected light detection means, the position recognition means is used to detect at least the positional deviation amount between the position recognition mark and the mark of the imaging means of the reflected light detection means. It is characterized in that two points are obtained, and the support base is moved and corrected based on a command from the position recognizing means so that the respective positional deviation amounts become zero.

(Operation and Effect) According to the first and second aspects of the present invention, at least when the probe of the inspection unit is brought into contact with the electrode of the liquid crystal display mounted on the support base, at least Immediately before that, when light is projected from the light projection means to the surface of the liquid crystal display body, the light is hardly reflected from the surface of the supporting base, so that the image pickup means of the reflected light detection means uses, for example, a target mark based on the reflected light from the liquid crystal display body. The detected portion is reliably detected and imaged, the respective image forming means form an image based on the image pickup signal, and the image signal is transmitted to the position recognition means. In the position recognizing means, the discriminating means individually discriminates the inconsistency between the electrodes of the liquid crystal display and the probe based on the respective images from the respective image forming means, and recognizes the relative position between the liquid crystal display and the probe. The amount of movement of the liquid crystal display body required to correct the discrepancy between the electrode and the probe is calculated, and then the support base is moved by the alignment means based on the calculated movement amount, and the electrode of the liquid crystal display body on the support base is probed. Align to match.

Therefore, according to the present invention, the reflected light from the support can be almost eliminated, and only the reflected light from the surface of the liquid crystal display can be detected to surely align the electrode of the liquid crystal display with the probe. Further, since the liquid crystal display can be aligned with the probe by detecting the detected part substantially simultaneously by the plurality of image forming means, the alignment time can be shortened, and the amount of movement of the support table can be reduced to allow the alignment device to be used. By downsizing, the device itself can be made compact.

(First Embodiment) An embodiment of the present invention using the device and method for an LCD prober will be described below with reference to the drawings.

An LCD prober for testing the LCD is installed on the floor via a vibration isolator. An inspection unit having a probe is provided above the LCD prober, and the inspection unit is connected to a tester (not shown) via a measuring line (not shown).
Is electrically connected to

First, as shown in FIG. 1, the main part of the LCD prober (9) stores a loader part (11) for extracting and transporting the LCD (10) from the cassette, and various command information for operating the LCD prober (9). A keyboard (9a) for operation input,
An alignment device (12) for moving the LCD (10) in the XYθ directions, and an inspection unit (14) for inspecting by bringing the probe (13) into contact with the aligned electrodes of the LCD (10).
And a microscope (15) for observing the alignment state of the LCD (10) manually when needed.
It consists of.

The alignment device (12) is LC on the XY plane, that is, on the water surface.
It is provided so as to move from the D (1) receiving position to the center (14a) of the inspection unit (14). The alignment device (12) includes a main chuck (hereinafter abbreviated as a chuck) that holds the LCD (10) and XYθ that supports the chuck.
-Stage, XYθ-Means (not shown) for rotating the stage in the X direction, Y direction, and θ, and means for detecting the position of the LCD.

Next, the chuck (16) of the alignment device (12) will be briefly described with reference to FIGS. 2 and 3.

The chuck (16) has a cylindrical shape, and a plurality of concentric grooves (16a) are opened on the upper surface of the chuck. These grooves (16a) are connected to the suction side of a vacuum pump (not shown) so that the LCD (10) is vacuum-sucked on the upper surface of the chuck (16). This chuck (16)
It is made of a metallic material such as stainless steel, and its upper surface (that is, the mounting surface on which the LCD is mounted) is processed by electroless plating to have a low reflectance.

The thermoelectrolytic plating treatment of the chuck (16) is performed under the following conditions.

Aluminum blast # 100-
Honing with # 150, roughness [Rz10] ~ [13μ] (L25m
m) finish. As the chemical reducing agent for the plating treatment solution, any of hypophosphite, borohydride compound or hydrazine compound may be used. The surface to be treated is dipped in such a plating solution and treated for about [60] minutes at a temperature of [90 ° ± 2 °] without energization. As a result, a [nickel] metal layer having a thickness [20 μ] is formed on the surface to be processed.

Next, an outline of the LCD position detecting device will be described with reference to FIG.

The viewfinder of the CCD camera (17) is provided so as to face the upper surface of the chuck (16). CCD camera (1
A semi-transparent mirror (18) is disposed between the chuck (16) and the chuck (16), and side irradiation (20) from the light source (19) is reflected downward by the semi-transparent mirror (18) to allow chucking. (16) LCD (1
It is designed to irradiate 0) with light. Irradiation light (20) is L
The reflected light (20a) reflected by the CD (10) is detected by the CCD camera (17).

Next, the alignment apparatus of the first embodiment will be described with reference to FIG.

The main part of the alignment device (12) is composed of a CCD camera (17) as a detection part and a computer system (21) as a recognition control part. The CCD camera (17) has a first image pickup device (22) and a second image pickup device (23) which are symmetrically arranged with the center (17a) as an origin. These pair of image sensors (22,2
The image pickup surface of 3) faces the surface of the LCD (10). CCD
Center of camera (17) (17a) and center of inspection section (14a)
(See FIG. 1) are identical to each other. In this case, use a pre-alignment device (not shown) so that the center of the LCD (10) is positioned near the center (14a) of the inspection unit.
The CD (10) is previously placed on the chuck (16).

The image pickup device (22, 23) of the CCD camera (17) is a discrimination circuit (24, 2) of the computer system (21) as a recognition control unit.
5) are connected to the input side respectively. The discrimination circuit (24) compares the image signal input from the image pickup element (22) with a predetermined threshold level. Similarly, the discrimination circuit (25) compares the image signal input from the image sensor (23) with a predetermined threshold level.

The output side of the discrimination circuit (24, 25) is connected to the input side of the CPU (25). The CPU (25) has a RAM (26) and a ROM (2
7) equipped. The RAM (26) has an LCD (1
The reference position data of 0) is stored in the memory, and the stored data is called by the CPU (25). Further, various calculation information is stored in advance in the ROM (27), and the stored information is called by the CPU (25). The output side of the CPU (25) is the LC of the stage driving stepping motor (28) and chuck (16).
D Connected to each switch of vacuum suction device. The drive shaft of the stepping motor (28) is connected to the ball screw (29a). Ball screw (2
The ball nut (29b) screwed to the 9a) is attached to the chuck (1
6) It is fixed to the stage. In addition, the chuck (1
The drive shafts of another two stepping motors (not shown) are connected to the stage 6). These two
The stage of the chuck (16) is moved in three directions of XYθ by the table and the motor (28). A pair of square marks (30, 31) are formed on the adjacent corners of the LCD (1) as shown in FIG. The marks (30, 31) are obtained by baking an alloy on the outer surface of the LCD (1). The mark (30,31) is the LCD
It has a fixed positional relationship with the transparent electrode of (10), and the electrode position is indirectly detected based on these marks.

Next, the case of aligning the LCD (10) to be tested by the LCD prober (9) will be described.

The loader section (11) takes out one LCD (10) from the cassette, pre-aligns it, and then transfers it to the chuck (16) of the inspection section (14). LCD (1) chuck (1
Adsorb and fix on the upper surface of 6). XYθ-Move the stage,
The center (14a) is aligned with the center (17a) of the alignment device.

Next, alignment of the LCD (10) will be described with reference to FIGS. 7 to 9.

First, the first and second target marks (30, 31) of the LCD (10) are initialized. Initialized LCD (1
0) is placed on the alignment device (12)
Stop at the center (17a) position. The first target mark (30) is imaged by the first image sensor (22) at this stop position, and this image is displayed on the television screen. Similarly, the second image sensor (23) captures an image of the second target mark (31) of the LCD (10) and displays this image on the television screen. As shown in FIG. 9, the cross mark (33) provided on the lens of the first image sensor (22) and the first target mark (30) are initially aligned, and at the same time, the second image sensor (23).
The cross mark (34) provided on the lens (1) and the second target mark (31) are initially aligned. In this case, the center-to-center distance L of both cross marks (33, 34) is set to a constant distance. In this way, the reference position data in the initial setting is stored in the RAM (26).

Next, the stage on which the LCD (10) to be actually tested is mounted is transported to the position of the center (17a) of the alignment device (12). As shown in FIG. 8, the first target mark (30) of the LCD (10) is imaged by the first image sensor (22) while being conveyed, and the second target mark (31) is similarly imaged. 2 The image is picked up by the image pickup element (23).

Next, the positions of the first and second target marks (30, 31) of the initial setting LCD (10) and the test execution LCD (10)
The mutual relationship between the positions of the first and second target marks (30, 31) of and will be described.

The first and second target marks (3
For the position recognition of the first and second target marks (30, 31) of the test execution LCD (10) with respect to the position (0, 31), the output of the mark discrimination circuit (24, 25) is stored for each address. R
It can be executed by accessing AM (26).

The first and second target marks (30,3) on the RAM (26)
The first and second target marks (30, 31) are stored in the storage area 1).

Regarding the recognition of these target marks (30, 31),
This will be described with reference to FIG.

The matrix of the screen is composed of pixels in a matrix pattern. Starting from the pixels on the first row, the pixels on the last row are scanned to search for the pixels having the first and second target marks (30, 31). First and second
"1" in the nth row with the target mark (30,31)
After confirming and memorizing the number, do the same with "1".
Search for the line address where exists. In addition, after scanning from the first column to the last column, the n-th row "1" where the first and second target marks (30, 31) are present is confirmed, the column number is stored, and the same procedure is performed. The column address where "1" exists is searched.

In this way, the first image is obtained from the binarized image data.
And, the area where the second target mark (30, 31) is present can be recognized. That is, the corner of the first target mark (35) from the address where "1" exists in each matrix
The (point 0) and the corner (36) (point P) of the second target mark can be respectively recognized.

If the positions of the first and second cross marks (33, 34) and the corners (35, 36) of the first and second target marks are known, the positional deviation amounts in the XY direction and the θ direction are calculated respectively. You can ask.

Next, with reference to FIGS. 8 and 9, a method of calculating the correction amount necessary to correct the deviation in the θ direction will be described.

First, as a precondition, the length of the line segment OP connecting the corners (35, 36) is a set value stored in advance in the ROM (27). Further, the length L of the line segment ST connecting the cross marks (33, 34) is constant. If there is a deviation in the θ direction, the line segment OP and the line segment ST intersect with each other. Therefore,
The correction amount t in the θ direction can be calculated by the following equation (1).

t = tan ⁻¹ {(y ₁ −y ₂ ) / L} (1) Next, a method of obtaining the correction amount of the XY component will be described.

The coordinates of the center of rotation are (X ₀ , y ₀ ) and the cross mark position is (x
_C , y _C ), and the coordinates of (X ₁ , y ₁ ) after rotation are (x ₁ ′, y ₁ ′)
Then, the following expressions (2) and (3) are established.

θ = tan ⁻¹ [{(y ₁ −y ₀ ) / (x ₁ −x ₀ )} − t] ...
(2) In this case, θ represents the rotational deviation angle, and γ represents the distance from the center of rotation to the cross mark.

 Further, the following expressions (4) and (5) are established.

x ₁ ′ −x ₀ = γ sin θ (4) y ₁ ′ −y ₀ = γ cos θ (5) Therefore, the cross mark position (x _C , y _C ) and the coordinate (X ₁ ′,
The amount of misalignment X ₁ and Y ₁ between y ₁ ′) is as follows (6)
It is obtained by the equation and the equation (7).

X ₁ ＝ x ₁ ′ −x _C ＝ γsin θ ＋ x ₀ −x _C …… (6) Y ₁ ＝ y ₁ ′ −y _C ＝ γcos θ ＋ y ₀ −y _C …… (7) The amount of deviation X ₁ , Y ₁ Only by moving the stage in the XY directions, the glass container 2 is aligned with the probe, and then the probe is brought into contact with each of the electrodes of the glass container 2 to perform a circuit test.

According to the above-described embodiment, the marks at two locations on the LCD (10) can be detected almost at the same time, so that the time required for alignment with the probe can be greatly shortened.

Further, according to the above-mentioned embodiment, since the LCD (10) can be aligned with almost no movement from the fixed position, the space around the chuck (16) and the stage can be reduced, and the device as a whole can be made. It can be miniaturized.

Further, according to the above embodiment, the LCD (1
Since the upper surface of the chuck (16) on which the (0) is placed is processed to have a low reflectance, most of the light transmitted through the LCD (10) is absorbed by the chuck surface, and the target mark (30, 31) can be accurately measured. Can be detected. Therefore, the alignment accuracy between the electrode of the LCD (10) and the probe needle can be set within the range of [± 5] μm. In this case, the upper surface of the main chuck is coated with [nickel] by electroless plating, but the invention is not limited to this. Even if it is coated with [chrome] or [fluorine], the chuck upper surface can have a low reflectance. The target mark can be detected with high accuracy.

Further, in the above embodiment, the LCD (10) is aligned with the light source, for example, the fluorescent lamp always turned on.
It may be turned on after the (10) is placed on the chuck (16). In this case, the fluorescent lamp can be automatically turned on only when the probe is brought into contact with the electrodes of the LCD (10), so that the fluorescent lamp can be turned on more efficiently. In this automatic lighting system, for example, it is desirable to turn on the fluorescent lamp 3 seconds after the probe is brought into contact with the electrodes of the LCD (10).

Next, another LCD position detecting method will be described with reference to FIG.

In this modification, the edge (10
The position of a) is detected and the position of the LCD (10) is determined based on this.
Coarse adjustment in the direction. Next, the position of the target mark (30, 31) of the LCD (10) is detected, and the position of the LCD (10) is corrected based on the relative position of this mark (30, 31) and the edge (10a).

According to the above modification, the error M between the edge (10a) of the LCD (10) and the target mark (30, 31) is ± 50 μm.
I was able to fit within the range of.

By the way, normal LCD (10), for example LCD for LCD TV
Alternatively, in the case of a digital watch LCD, its alignment accuracy could be kept within ± 5 μm, and the alignment time could be shortened to about 10 to 15 seconds.

(Second Embodiment) An LCD prober pre-alignment apparatus of another embodiment will be described with reference to FIG. The description of the above-described embodiment and the portions common to this embodiment will be omitted. The main parts of the pre-alignment device (37) are the reflection type sensor (38), sub chuck θ rotation drive unit (39), CP.
It consists of U (40) and positioning part (42). Sensors (38)
Is an LCD mounted on the sub chuck (41) of the prober.
It is provided so as to face (10). Sensors (38)
Has a light emitting portion that projects light onto the LCD (10) and a light receiving element that receives light emitted from the LCD (10) and performs photoelectric conversion.

The sensor (38) is connected to the input side of the CPU (40) and converts the detected light into a digital signal and inputs it into the CPU (40). The output side of the CPU (40) is connected to the sub chuck θ rotation drive section (39) and the positioning section (42), respectively.

The drive shaft of the sub-chuck θ rotation drive unit (39) is connected to the base of the sub-chuck (41) so that the sub-chuck (41) can rotate about the shaft by θ.

The positioning section (42) is a sub-chuck Z-axis drive section (42
a), a tweezer drive unit (2b) and a Y-axis drive unit (42c). The output side of the drive section (42b) is connected to the sub chuck (3
It is connected to the base of 9) and the sub chuck (41) is Z
It is designed to move up and down. The output side of the drive unit (42b) is connected to the traveling wheels (4
It is connected to the shaft of 4), and the stage plate (45) moves along the X axis.

The sub chuck (41) and the take-out plate (43) are placed on the stage plate (45). This stage (45)
It is connected to the output side of the drive section (42c) of the positioning section (42) so that the entire stage plate (45) moves in the Y-axis direction.

Next, the structure of the sensor (38) will be described with reference to FIGS. 12 to 16.

First, as shown in FIG. 12, the LCDs (10) are conveyed one by one to the home position (46) of the loader section (11). A sensor (38) is fixed to the member so as to face the surface of the LCD (10). Further, the LCD (10) at the home position (46) is conveyed to the chuck (16) of the inspection section (14) by the arm (47). The LCD (10) after the inspection is returned to the cassette (11b) by the arm (47).

The sensor (38) includes a light emitting section (38b) and a light receiving element (3
8c) is provided, and the position is detected by reflecting light on the LCD (10).

For example, if the distance from the center of the LCD (10) to the edge of the outer edge is L ₂ and the distance from the center of the LCD (10) to the position of the sensor (38) is L ₁ as shown in FIG. , L ₁ > L ₂ is provided with a sensor (38). Therefore, LCD (1
When (0) is rotated rightward and leftward, the peripheral edge portion of the LCD (10) causes the light emitting portion (38b) of the reflective sensor (38).
The amount of light emitted from the edge part is reflected by the edge part and is incident on the light receiving element (38c), and the reflection type sensor (38a) can detect each rotation value with respect to the edge part.

As shown in FIG. 12 (c), the reflective sensor (38a) is separated from the home position (46) by L ₁
It is configured so as to be provided in one place on the shaft. Install this reflective sensor (38a) from the home position (46) to L
It is also possible to have a configuration in which _one distance is provided and each is provided symmetrically on the Y axis.

In this case, when the two sensors (38) are provided in series, the time required for rotation is shortened as compared with the sensor system having one location.

That is, the LCD transported to the home position (46)
(10) is placed on the take-out plate (45). The θ rotation drive section (39) is provided so as to be raised by the Z-axis drive section (42a). When the drive unit (39) rises, the sub chuck (41) can lift the LCD (10) from the takeout plate (43).

As shown in FIG. 13, a shaft (49) having a top surface for sucking and fixing the LCD (10) is axially mounted on a bearing (50), and a bearing housing is provided so as to surround the bearing (50). There is. The bearing (50) is erected and fixed on a horizontal plate base (51).

A pulley (52) for a timing belt is provided on the shaft (49) of the sub chuck (41). This pulley (52)
The timing belt (53) is stretched around the pulse motor (54) shaft.

Therefore, the sub chuck (41) is rotated to a predetermined rotation position based on the drive signal of the CPU (40).

The CPU (40) calculates the displacement amount of the LCD (10) from the rotation angle value in the left-right direction of the LCD (10), for example, as shown in FIG. 16, it is inclined at α ° at the home position (46). LCD (1
Rotate (0) to the right and attach the above LCD (10) to the reflective sensor (38).
A point intersecting with the edge portion A on the periphery of is obtained. From this point, the angle θ ₁ ° is calculated.

Next, it is rotated counterclockwise and similarly, a point intersecting with the edge portion B of the peripheral edge of the LCD (10) is obtained. From this point, the angle θ ₂ ° is calculated.

The above angle is calculated as (θ ₁ ° + θ ₂ °), and the point C intersecting with this half-angle straight line and the center (x ₀ , y of the sub chuck (41)
It is configured to issue a drive command signal so that the positioning means is driven so that the straight line connecting ( ₀ ) and ( ₀ ) becomes the Y-axis line.

Similarly, in order to obtain the center of the LCD (10) aligned in one direction, as shown in FIG. 16 (d), the LCD (10) is moved in the Y-axis direction, and D (x ₃ , y ₃ ) Find the position, then rotate this LCD (10) 90 degrees to E (x ₁ , y ₁ ), F
(X _4, y ₄₎ and obtaining the _{G (x 2, y 2)} . Each distance
Find l ₁ , l ₂ , l ₃ and l ₄ .

Is at the center of the LCD (10).

When the center position is obtained, the drive units (42b, 42c) are arranged so that the center position of the LCD (10) overlaps the center position of the sub chuck.
A drive command is issued from the CPU (40).

In this case, the LCD (10) may be rotationally driven simultaneously with the X-axis and Y-axis driving. This further shortens the alignment time.

As shown in the figure, the sub-chuck (41) of the θ rotation drive section (39) is fixed to the plate base (51) via the bare rig housing. The LCD (10) on the take-out plate (48) is fixed to the top surface (41a) of the sub chuck (41).

A solenoid (56) is provided so as to move up and down in parallel with the base plate (55) of the Z-axis drive section (42a). Further, a guide member (57) is provided in the vicinity of the solenoid (56) in parallel with the solenoid (56) so as to prevent the solenoid (56) from rotating when it moves up and down.

When the sub chuck (41) is raised, the take-out plate (48)
The LCD (10) is transferred to and received from the top surface (41a) of the sub chuck (41) so that the sub chuck (41) can be rotated.

When the sub chuck (41) is lowered, the LCD (1
0) is transferred to the take-out plate (48), and this take-out plate (48)
Are moved in the X-axis direction.

Further, the top surface (41a) of the sub chuck (41) is L-shaped.
Adsorption (not shown) for adsorbing and fixing the CD (10) is provided, and adsorption is controlled by an ON / OFF operation based on a command from the CPU (40).

Here, the solenoid (56) acts so that the guide member (57) when moving the plate base (55) up and down is the solenoid (56).
And is provided parallel to the piston (58).

A tweezers drive part (42b) is provided on the base plate (55) so as to be horizontally slidable in the X-axis direction. Similarly, the drive section (39) described above is fixedly supported at the end of the base plate (55). At the tip of the piston (58) of the drive part (39), a plate base (51) is attached to the base plate (5).
It is provided so as to hang parallel to 5) and the plate base (55) moves up and down in parallel with the vertical movement of the piston (58).

Further, a θ rotation drive unit (39) is vertically fixed and supported on an end of the plate base (51), and the sub chuck (41) is rotated by a pulse motor (54).

Therefore, the sub chuck (41) is configured so that the LCD (10) can be rotatably rotated by raising the LCD (10) by the drive section (42a).

As shown in FIG. 14, the tweezer drive section (42b)
Is configured to be movable in the X-axis direction. The tweezers drive section (42b) includes a take-out plate (48) and a guide member (5
9), timing belt (60) and pulse motor (61)
It consists of

The take-out plate (48) is provided so as to slide horizontally in the guide member (59).

For example, W60mm × L250mm × t with LCD (10) adsorbed and fixed
W15mm at the lower rear end of the take-out plate (48) of 2.6mm aluminum plate
× L30mm × H30mm Aluminum block member (62) is fixedly supported.

This aluminum block member (62) has a guide member (5
Two holes are drilled in the horizontal direction so as to slide on 9). The guide member (54) is inserted into the bored hole, and both ends of the guide member (59) are provided with the support member (63).
Are erected and supported by the base plate (55) of the tweezers drive section (42b).

And, a hollow part (64) is provided in a region where the sub-chuck (41) moves up and down, in the tip part (55) of the take-out plate (48),
The sub chuck (41) is structured so as not to interfere with the elevation.

Furthermore, the LCD of the tip (48a) of the take-out plate (48)
(10) A suction hole for sucking the LCD (10) is provided at the delivery position, and this suction hole is connected to an external vacuum solenoid (not shown) to turn on and off based on the command from the CPU (40).
F is provided so that it is possible.

Further, a projecting portion is provided at the rear end of the takeout plate (48), and the timing belt is fixedly supported on the projecting portion.
The timing belt is provided so as to be dependently moved as it moves in the linear direction. The timing belt is arranged so as to be stretched around the pulley and is provided in parallel with the guide member (57).

A pulse motor (61) is interlocked with the pulley, and the pulse motor ((61) is driven based on a command from the CPU (40).
To rotate the timing belt.

As shown in FIG. 15, the Y-axis drive section (42c) is arranged in parallel with the cassette (11c) on the mounting section (64) of the cassette (11b).
A moving body (6) to be described later is arranged along the column direction (Y-axis direction) of b).
5) is movably installed.

Also, returning to FIG. 14, description will be made. First, the loader section (11)
The two rails (66a, b) laid on the bottom of the
It is fixed and supported parallel to each other along 4). A timing belt (67) is stretched around a pulley (68) on the side surface of the rails (66a, b).

A pulse motor (69) is linked to one part of the pulley (68), and the pulse motor (69) is movably arranged based on a command from the CPU (40).

As shown in FIG. 14, the moving body (65) is fixedly supported by the timing belt (67). When the pulse motor (69) is rotated, the timing belt (67) is moved along the mounting portion (64) in the Y-axis direction.

The cylindrical shaft (69) is attached to the upper part of the moving body (65) so that the shaft is vertical.

The top surface (69a) of the cylindrical shaft (69) is provided horizontally, and the base plate (55) is fixedly supported on the top surface (69a) so as to be horizontally stacked.

Here, the columnar shaft (69) has a structure in which it moves in a vertical movement direction of one axis. This vertical movement mechanism moves up and down when the LCD (10) is taken out from the cassette (11b).

All the above-mentioned mechanical members are driven according to the drive command signal of the CPU (40), so that the LCD (10) can be moved to any position.

Next, the operation of the second embodiment will be described with reference to FIG.

Based on the information input from the keyboard (9a), the Y-axis drive section (42c) of the loader section (11) operates,
The LCD (10) is taken out from the cassette (11b) and conveyed to the home position position (46). In this case, the removed LC
After the D (10) is conveyed to the home position position (46), it is fixed by suction to the top surface (41a) of the sub chuck (41) (step 70).

Next, the LCD (10) is driven by the pulse motor of the sub-chuck θ rotation drive unit (39) according to a prestored program.
The sub-chuck (41), which is fixed by suction, is rotated counterclockwise.

As shown in FIG. 16, the position A where the peripheral edge of the LCD (10) intersects the reflective sensor (38) is stored. Similarly, the LCD (10) is rotated to the right according to a prestored program. Then, as shown in FIG. 16 (c), the position B where the peripheral edge of the LCD (10) intersects the sensor (38) is stored. In this way, the angle between two edge points is obtained by rotating left and right (step
71).

Since the signal stored in the LCD (10) is a digital signal, it is defined as "H" when it is not reflected and "K" when it senses the reflection, so that the edge position of one side of the LCD (10) is determined. It is programmed to detect and rotate in reverse.

Next, the CPU (40) calculates the angle matching based on the information from the points A and B.

As shown in FIG. 16 (a), the calculation method of this rotation angle value is that θ ₁ + θ ₂ is the total angle, and the deviation angle α ° from the half angle of this total angle is derived. The sub chuck (41) is rotated by α ° in response to a command from the CPU (40) to correct the rotation deviation of the LCD (10) (step 72).

In this way, it is possible to align the circumferential line end direction of the LCD (10) in a fixed direction. In this state, next, in order to obtain the center (X ₁ , Y ₁ ) of the LCD (10), first,
As shown in FIG. 16 (d), a pulse motor (not shown) of the Y-axis drive unit (42c) according to a program stored in advance.
Rotate and move as shown by the arrow, LCD (10)
The entire sub-chuck (41) holding and adsorbing is moved in the Y-axis direction, and the reflective sensor (38) crosses one of the four sides of the LCD (10) orthogonally to the edge, and D
Detect the (x ₃ , y ₃ ) point.

 Then, the sub chuck (41) is rotated 90 °.

Similarly, E (x ₁ , y ₁ ), F (x ₄ , y ₄ ), and G (x ₂ ,
The position of y ₂ ) is detected. In this way, LCD (10) 4
Data acquisition of points is performed (step 73).

The 90 ° rotation here is automatically performed a 1/4 rotation by a pre-stored program. In this way, the distance from the home position (38) to point D in the figure and
Find the distance to E, F, G points. Based on the home position position (38) stored in advance, the center position (X ₀ ,
The amount of deviation between Y ₀ ) and the position (x ₀ , y ₀ ) of the sub chuck (41) is calculated.

It is confirmed whether or not the deviation amount is within a predetermined range (step 74).

If the deviation amount exceeds the predetermined range, the center position of the LCD (10) is corrected again (step 75).

If the amount of deviation is within the predetermined range, the LCD (10) is rotated left and right again to obtain the angle between the two edge points (step 76).

Next, rotate the sub-chuck (41) by α ° to turn the LCD
The rotational deviation in (10) is corrected (step 77).

Finally, as shown in FIG. 16 (e), the home position (46) is moved so that the position (x ₀ , y ₀ ) of the home position (46) and the center (X ₀ , Y ₀ ) of the LCD (10) coincide with each other. LCD up to step 77 (10)
Ends the pre-alignment of. Then, the pre-aligned LCD (10) is transferred to and from the chuck (16) by the rotating arm (47). Then, the probe needle is brought into contact with the electrode of the LCD (10) to perform a predetermined circuit test.

According to the second embodiment, the time required for LCD pre-alignment can be greatly shortened.

 Furthermore, the sensor life is greatly extended.

The effects of the LCD probing machine according to the present invention will be further described.

According to the LCD probing machine of the present invention,
Since two alignment marks are detected simultaneously at the same time,
LCD can be quickly aligned. For this reason,
Various test programs can be dealt with quickly. Further, since the LCD is aligned almost at a fixed position, the space around the chuck is smaller than that of the conventional device, and the device can be downsized.

Further, since the LCD mounting surface of the chuck has a low reflectance, the light transmitted through the LCD is substantially not reflected from the mounting surface. Therefore, the alignment mark can be detected with high accuracy, and the LCD can be accurately aligned with the probe.

In addition, when the edges of the LCD are detected and aligned, the time required to obtain the edge position detection data can be significantly reduced, and thus a large LCD can be quickly aligned.

[Brief description of drawings]

FIG. 1 is an overall explanatory view for explaining an embodiment in which the device of the present invention is used for an LCD prober, FIG. 2 is a sectional explanatory view for explaining a main chuck of the LCD prober of FIG. 1, and FIG. FIG. 4 is a plan view showing the LCD mounted on the main chuck of the LCD prober of FIG. 1 as seen from above, and FIG. 4 is an explanatory view for explaining a state where the LCD of the LCD prober of FIG. Is a block diagram for explaining the alignment device of FIG. 1, and FIGS. 6, 7, and 8 are explanatory diagrams for explaining the principle of detecting the alignment mark of the alignment device of FIG. FIG. 9 is a schematic explanatory view showing the positional relationship between the cross mark of the CCD camera and the alignment mark of the LCD in the alignment of FIG. 1, and FIG. 10 is an explanation of the LCD for explaining the other alignment method of FIG. Figure, No. 11
FIG. 12 is an explanatory view of a positioning device for explaining another embodiment in which the device of the present invention is used for an LCD prober, FIG. 12 is a layout explanatory view of the positioning device in the LCD prober of FIG. 11,
FIG. 13 is an explanatory view for explaining the tweezers structure of the LCD prober of FIG. 11, FIG. 14 is an explanatory view of a transfer section for explaining the transfer structure for transferring the tweezers of FIG. 11, and FIG. FIG. 11 is an explanatory view of the inclination using the transport unit, FIG. 16 is an explanatory view for explaining the detection principle of the alignment device of FIG. 11,
FIG. 17 is an explanatory view of a flow chart for explaining the operation of the alignment device in FIG. FIG. 18 and FIG. 19 are explanatory diagrams for explaining the alignment device used in the conventional LCD prober. 9 …… LCD prober, 9a …… keyboard, 10 …… LCD 11 …… loader section, 12 …… alignment device 13 …… probe needle, 14 …… inspection section 14a …… inspection section center

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical display location G09G 3/36 H01L 21/66 S 7514-4M (72) Inventor Wataru Mochizuki Nishi-Shinjuku, Shinjuku-ku, Tokyo 1-26 Tokyo Electron Co., Ltd. (72) Inventor Toshio Miyazawa 1-226 Nishishinjuku, Shinjuku-ku, Tokyo Tokyo Electron Co., Ltd. (72) Hiroshi Suzuki 1-chome, Nishishinjuku, Shinjuku-ku, Tokyo No. 26-2 Tokyo Electron Co., Ltd. (72) Inventor Tetsuji Watanabe 1-226 Nishi-Shinjuku, Shinjuku-ku, Tokyo Tokyo Electron Co., Ltd. (56) Reference JP-A-60-213040 (JP, A) Open 64-2096 (JP, A) Actual open 59-129187 (JP, U)

Claims (2)

[Claims] 1. An inspection unit for inspecting by bringing a probe into contact with an electrode of a liquid crystal display, and holding the liquid crystal display so as to face the probe and having a light reflectance higher than that of the surface of the liquid crystal display. On the basis of the light reflected from the liquid crystal display body, a low-surface-treated support base, light projection means for projecting light onto at least the surface of the liquid crystal display body held on the support base when inspecting the same. Reflected light detection means for detecting the detected part, and recognizes the relative position of the liquid crystal display and the probe based on the detection signal of the detected part, and corrects the mismatch between the electrode of the liquid crystal display and the probe. Position recognizing means for obtaining the necessary amount of movement of the liquid crystal display body, and the support base is moved based on the movement amount calculated by the position recognizing means so that the probe is aligned with the electrodes of the liquid crystal display body. Aligning means with respect to the probe, the reflected light detecting means, a plurality of image pickup means for picking up an image of the detected portion, and so as to individually form an image based on the image pickup signal of the image pickup means. A plurality of image forming means configured, and the position recognizing means is provided with a judging means for individually judging a mismatch between the electrode of the liquid crystal display and the probe based on the image of each of the image forming means. Characteristic liquid crystal display probe device. 2. A liquid crystal display is placed on a support base, light is projected from the light projection means onto the surface of the liquid crystal display, and light reflected from the position recognition mark of the liquid crystal display is detected as reflected light. After the detection by the means, the position recognizing means is used to obtain the amount of positional deviation between the position recognizing mark and the mark of the imaging means of the reflected light detecting means for at least two points so that the respective positional deviation amounts become zero. A method for aligning a liquid crystal display body, further comprising: moving and correcting the support base based on a command from the position recognition means.