JPH08167145A - Device for producing magnetic recording medium - Google Patents

Abstract

PURPOSE: To prevent the sticking of a magnetic material evaporated from a crucible to a magnetic material feeder and to make the feeder independent of the high temp. of the crucible by disposing the feeder so that it has a specified positional relation to the crucible. CONSTITUTION: A tape-shaped material 5 to be subjected to vapor deposition is allowed to run in a vacuum vessel 1 from a sending roll 6 to a taking up roll 7 through a cooling can 8. A magnetic metal 10 housed in a crucible 3 made of MgO is melted and evaporated by irradiation with electron beams from an electron gun 22 and the evaporated metal is stuck to the material 5 on the cooling can 8 to form a magnetic layer. In accordance with the consumption of the metal 10 in the crucible 3, a magnetic material feeder 13 feeds a pellet-shaped magnetic material of 10mm diameter and 12-20mm length into the crucible 3. The feeder 13 is disposed by the crucible 3 so that the magnetic material is transferred in a horizontal direction through a trough and is charged from the edge of the crucible 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing a vapor-deposited magnetic recording medium in which vapor of a magnetic material is vapor-deposited to form a magnetic layer, and more particularly to a magnetic material supplying apparatus provided in a crucible thereof. .

[0002]

2. Description of the Related Art As a conventional vapor deposition type magnetic recording medium manufacturing apparatus, a vacuum container, a traveling device for traveling a series of materials to be vapor-deposited in the vacuum container, and a device disposed below the material to be vapor deposited. Some include a crucible containing a magnetic material, and an electron beam generator for irradiating the magnetic material of the crucible with an electron beam. Then, the magnetic material of the crucible was irradiated with an electron beam, whereby the magnetic material was irradiated with the electron beam to be melted and evaporated, and the vapor was vapor-deposited on the material to be vapor-deposited.

As the magnetic material evaporates, the magnetic material in the crucible decreases. Therefore, if the magnetic material is not supplied, the vapor deposition is limited within a certain period of time and the length of the obtained original fabric is also limited.

The liquid level in the crucible changes as the magnetic material evaporates. Due to this change in the liquid surface, the incident angle of the magnetic material vapor on the material to be vapor-deposited changes. When the incident angle changes, the coercive force is affected, so that it becomes difficult to obtain a magnetic recording medium having constant characteristics.

Therefore, there has been proposed a magnetic material supply device adapted to supply the magnetic material as the magnetic material evaporates.

An example of a conventional magnetic material supply device is shown in FIG. This apparatus has a magnetic material supply source 31 for containing a pellet-shaped magnetic material, and a gutter-shaped slide path 34.
A magnetic material is accommodated in the crucible 30 in a molten state by being irradiated with the electron gun 36, and the magnetic material supply source 31 is located above the crucible 30. Also slipway 34
Is inclined downward, one end is connected to the supply source 31, and the other end is connected to the crucible wall portion 33 having the inclined surface 32. Then, the magnetic material 3 is supplied to the slide path 34 from the magnetic material supply source 31.
When the magnetic material 35 is supplied, the magnetic material 35 slides on the slide path 34 by gravity, passes through the inclined surface 32, and the crucible 3
It is supposed to be thrown into 0.

[0007]

In the above-mentioned conventional magnetic material supply device, since the magnetic material supply source and the slide passage are above the crucible, the vapor of the magnetic material evaporated from the crucible into the supply source and the slide passage. And the supply source and the slide path are exposed to the high heat of the molten magnetic material.

When the pellet-shaped magnetic material is charged into the molten magnetic material from above the crucible, the molten magnetic material may splash and adhere to the material to be vapor-deposited.

This adhered matter becomes a projection foreign matter, and if there is a projection foreign matter, the magnetic head rides on this during recording / reproduction and the distance between the magnetic head and the material to be vapor-deposited becomes too wide, and normal recording / reproduction cannot be performed. Will end up.

The present invention has been made in view of the above problems, and an object of the present invention is to supply a magnetic material as the magnetic material evaporates to enable continuous vapor deposition. In order to provide a novel magnetic recording medium manufacturing apparatus capable of forming an appropriate vapor deposition film on a material to be vapor-deposited by eliminating influences of vapor and heat on a magnetic material supply apparatus. is there.

[0011]

A magnetic recording medium manufacturing apparatus according to the present invention comprises a vacuum container, a traveling device for traveling a series of materials to be vapor-deposited disposed in the vacuum container, and a device below the material to be vapor-deposited. In a magnetic recording medium manufacturing apparatus including a crucible arranged to accommodate a magnetic material, and an electron beam generator for irradiating the magnetic material of the crucible with an electron beam, the crucible supplies the magnetic material to the crucible. A magnetic material supplying device, the magnetic material supplying device is arranged laterally of the crucible and at substantially the same position as the crucible, and is capable of moving the magnetic material in a horizontal direction, and a driving force for driving the moving means. And a connecting means for connecting the outlet of the moving means and the edge of the crucible.

The moving means comprises a groove-shaped gutter member extending in the horizontal direction, a screw rod member extending in parallel with the gutter member, and a push rod member screwed to the screw rod portion. Is preferred.

The crucible in this manufacturing apparatus includes a magnetic material supply device. The magnetic material supply device is provided to replenish the crucible with the magnetic material in response to the magnetic material in the crucible that decreases as the magnetic material evaporates.

This magnetic material supply device comprises a moving means, a power source for driving the moving means, and a connecting means.

The moving means is arranged laterally of the crucible and at substantially the same position as the crucible, and can move the magnetic material in the horizontal direction. As a result, the moving means is arranged laterally side by side in the crucible at substantially the same position as the crucible, so that the magnetic material vapor adheres to the magnetic material supply device,
The problem that the magnetic material supply device is exposed to high heat is solved.

The connecting means connects the outlet of the moving means and the edge of the crucible. As a result, the magnetic material can be supplied to the edge of the crucible from the discharge port of the moving means, and further can be gently supplied from the edge of the crucible into the melting tank of the crucible. Avoided.

Alternatively, for example, an endless annular belt or bucket, a screw rotating in a gutter, or a chain circulating in a gutter can be used as the moving means.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram of an apparatus for manufacturing a magnetic recording medium according to the present invention. The present apparatus includes a vacuum container 1, a traveling device 2, a crucible 3, and an electron beam generator 4. A discharge port 39 of the vacuum container 1 is connected to a vacuum pump (not shown), and a traveling device 2 for moving a series of materials to be vapor-deposited, that is, a synthetic resin tape 5, is arranged in the vacuum container. The traveling device 2 includes a feed roll 6
It consists of a take-up roll 7 and a cooling can 8.

The crucible 3 is arranged below the cooling can 8. The crucible 3 is made of MgO and is 140
It is designed to withstand high temperatures of 0 ° C to 1500 ° C. Further, the crucible 3 houses the magnetic metal 10 therein.

The crucible 3 also has a magnetic material supply device 13 for supplying a magnetic metal to the crucible. As shown in FIG. 2, the magnetic material supply device 13 includes a moving means 1
4, a power source for driving the moving means 14, that is, a motor 15, and a connecting means 16.

The moving means 14 is a pellet-shaped magnetic metal 1
0 is moved in the horizontal direction, and this moving means 14 includes a groove-shaped gutter member 17, a screw rod member 19 with a screw 18 cut, and a push rod member 20 screwed to the screw rod member. It consists of

The gutter member 17 is arranged laterally of the crucible 3 and slightly above the crucible 3 and extends horizontally. This gutter member 17 is provided with a groove 21,
The magnetic metal 10 is arranged in the groove 21 without a gap. The magnetic metal 10 can be arranged in the groove 21 by removing the lid 23 with the knob 22. One end of the groove 21 is open and constitutes a discharge port 24.

The screw rod member 19 is arranged below the gutter member 17 and extends parallel to the gutter member 17. The screw rod member 19 is rotatably supported at both ends by support members 25 fixed to the gutter member 17.

The push rod member 20 includes a leg portion 20a and an arm portion 20b orthogonal to the leg portion 20a. The leg portion 20a includes a screw that is screwed into the screw 18 of the screw rod member, and penetrates a slot (not shown) formed in the bottom portion of the gutter member 17. The tip of the arm 20b is in contact with the magnetic metal 10,
When the push rod member 20 moves, the arm portion 20b pushes a series of magnetic metals 10 so that the magnetic metal 10 moves horizontally along the groove 21 of the gutter member.

One end of the screw rod member 19 is connected to an output shaft 27 of the motor 15 via a universal joint 26. As a result, the screw rod member 19 is rotationally driven by the motor 15. The motor 15 is arranged outside the vacuum container 1.

The communication means 16 has two openings 28 and 29.
And a hollow member 9 having an inclined surface 11 which is in contact with these and is inclined downward. The opening 29 is connected to the outlet 24 of the gutter member 17, and the opening 28 is opened at the edge of the crucible 3.

A shielding plate 12 is disposed below the cooling can 8 and close to the cooling can, and the shielding plate 12 is provided so as to regulate the vapor deposition area of the magnetic metal vapor on the tape 5.

In the apparatus of the present invention thus constructed, when the electron beam is directed toward the magnetic metal 10 by the electron gun 22, the magnetic metal 10 is irradiated with the electron beam to melt and continue to evaporate. The tape 5 delivered from the feed roll 6 and entering the evaporation region rotates in the circumferential direction on the cooling can while receiving the vapor deposition of the magnetic metal vapor, during which a magnetic film is formed on the tape and is wound up. It is wound by the roll 7.

With the evaporation of the magnetic metal, the pellet-shaped magnetic metal 10 is supplied by the magnetic material supply device 13. When the motor 15 rotates, this rotation is transmitted to the screw rod member 19 via the universal joint 26, and the screw rod member 19 rotates. When the screw rod member 19 rotates, the push rod member 20 screwed to the screw rod member 19 moves leftward in the drawing. Push rod member 20
When the robot moves, its arm 20b moves to the rightmost magnetic metal 1
0 is pressed, whereby a series of magnetic metals 10 arranged in the groove 21 of the gutter member without a gap moves horizontally along the groove 21. With this movement, the leftmost magnetic metal 10
Is pushed out, enters the hollow member 9 through the discharge port 24 of the gutter member, rolls down the inclined surface 11, and then the opening 28
It comes out further and is gently fed into the crucible from the edge of the crucible 3.

The magnetic material supply device provided in this manufacturing apparatus is
As a magnetic material, for example, diameter 10 mm, length 12-20 m
m of pelletized magnetic material can be used. Not limited to this, for example, a rod-shaped magnetic material can also be used.

[0032]

Since the apparatus of the present invention is configured as described above, the vapor of the magnetic material that evaporates from the crucible adheres to the magnetic material supply device, and the magnetic material supply device uses the molten magnetic material. Exposure to high heat is avoided.

Further, according to the apparatus of the present invention, it is possible to realize an apparatus for manufacturing a magnetic recording medium in which a molten liquid of the magnetic material is less repelled when the magnetic material is supplied, and as a result, a good quality magnetic recording medium can be obtained. Is.

According to the apparatus of the present invention, the magnetic material can be supplied into the crucible at any time as the magnetic material evaporates.
Therefore, continuous vapor deposition for a long time becomes possible, and as a result, vapor deposition efficiency can be greatly improved.

Further, since the liquid surface in the crucible can always be kept at a constant height in this apparatus, it is possible to obtain a magnetic recording medium having constant characteristics.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an apparatus for manufacturing a magnetic recording medium according to the present invention.

FIG. 2 is a side view of a magnetic material supply device provided in the present manufacturing apparatus.

FIG. 3 is a schematic view of a conventional magnetic material supply device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum container 2 Traveling device 3 Crucible 4 Electron beam generating device 5 Tape (material to be deposited) 8 Cooling can 10 Magnetic metal 13 Magnetic material supply device 14 Moving means 15 Motor 16 Connecting means 17 Gutter member 19 Screw rod member 20 Push rod member 21 Groove 24 Discharge Port 28 Opening 29 Opening

Front page continuation (72) Inventor Hirohide Mizutani 2606 Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Corporation Information Science Research Institute (72) Inventor Katsumi Sasaki 2606, Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Corporation Information Science Laboratory (72) Inventor Yuzo Matsuo 2606, Akabane, Kaiga-cho, Haga-gun, Tochigi Prefecture Kao Corporation Information Science Laboratory (72) Inventor Shigemi Wakabayashi 2606, Akabane, Kaiga-cho, Haga-gun, Tochigi Prefecture Kao Corporation Information Science Laboratory

Claims (2)

[Claims] 1. A vacuum container, a traveling device for traveling a series of materials to be vapor-deposited arranged in the vacuum container, a crucible arranged below the material to be vapor-deposited for containing a magnetic material, and a magnetism of the crucible. In a magnetic recording medium manufacturing apparatus including an electron beam generator for irradiating a material with an electron beam, the crucible comprises a magnetic material supply device for supplying a magnetic material to the crucible, and the magnetic material supply device comprises: A moving means which is arranged laterally of the crucible and at substantially the same position as the crucible and which can move the magnetic material in the horizontal direction; a power source for driving the moving means; an outlet of the moving means; and an edge of the crucible. An apparatus for manufacturing a magnetic recording medium, which comprises a communication means for making contact. 2. The moving means includes a groove-shaped gutter member extending in the horizontal direction, and a screw rod member extending in parallel with the gutter member.
2. The magnetic recording medium manufacturing apparatus according to claim 1, further comprising a push rod member screwed into the screw rod portion.