JPH08162749A - Cream solder coater - Google Patents
Cream solder coaterInfo
- Publication number
- JPH08162749A JPH08162749A JP6301059A JP30105994A JPH08162749A JP H08162749 A JPH08162749 A JP H08162749A JP 6301059 A JP6301059 A JP 6301059A JP 30105994 A JP30105994 A JP 30105994A JP H08162749 A JPH08162749 A JP H08162749A
- Authority
- JP
- Japan
- Prior art keywords
- cream solder
- insulator
- circuit board
- printed circuit
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/303—Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3485—Applying solder paste, slurry or powder
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は電子機器等のチップ部品
をはんだ付け実装するクリームはんだの塗布装置に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cream solder applicator for soldering and mounting chip parts of electronic devices and the like.
【0002】[0002]
【従来の技術】以下従来のクリームはんだの塗布装置に
ついて説明する。2. Description of the Related Art A conventional cream solder coating apparatus will be described below.
【0003】従来のクリームはんだの塗布装置は、図1
1に示すようにプリント基板1のはんだ付けランド2上
にクリームはんだ3をスクリーン印刷法等で塗布する。
そして、その後角チップ抵抗4をプリント基板1に装着
した後、リフローはんだ付けを行って角チップ抵抗4の
はんだ付け電極5とプリント基板1のはんだ付けランド
2をはんだ付け接続していた(リフローはんだ付け後の
状態は図示せず)。この時、スクリーン上に設けられた
角チップ抵抗4を接着するための充填孔は、角チップ抵
抗4の電極5の間に設けられた絶縁物6に重ならないよ
うになっていた。その結果、クリームはんだ3の塗布形
状も電極5間の絶縁物6に重ならないようになってい
た。A conventional cream solder coating apparatus is shown in FIG.
As shown in FIG. 1, the cream solder 3 is applied onto the soldering land 2 of the printed board 1 by screen printing or the like.
Then, after mounting the corner chip resistor 4 on the printed circuit board 1, reflow soldering was performed to solder-connect the soldering electrode 5 of the corner chip resistor 4 and the soldering land 2 of the printed circuit board 1 (reflow soldering). The state after attachment is not shown). At this time, the filling hole for adhering the square chip resistor 4 provided on the screen was designed not to overlap the insulator 6 provided between the electrodes 5 of the square chip resistor 4. As a result, the applied shape of the cream solder 3 was also prevented from overlapping the insulator 6 between the electrodes 5.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、このよ
うな従来の構成では、チップ部品4の表面あるいは裏面
をランダムに実装するバルク実装では、角チップ抵抗
(電子部品の一例として用いた)4が表/裏向き任意の
方向で実装されることになる。このため、常に電極5面
より膨出した絶縁物6が上面になるとは限らず、図11
に示す通り、絶縁物6(角チップ抵抗の場合、ガラスコ
ート)が基板1面に対向して実装される場合も生ずる。
この場合、この絶縁物6と電極5との間に段差L1があ
り、その上、このはんだ付けランド2の間に別パターン
7が有ったりすると、そのパターン7上に絶縁物のレジ
スト8を塗布するため、角チップ抵抗4が基板1よりか
なり浮いた状態となる。すなわち、図12に示すように
角チップ抵抗4の絶縁物6を下にして基板1に装着され
ると、レジスト8の頂部8aを支点として角チップ抵抗
4がはんだ付けランド2a方向へ傾いて装着される。そ
うすると、浮いた側の電極5a(この場合は右側の電
極)が、クリームはんだ3aと当接しない。その結果、
図13に示すようにリフローはんだ工程の後、右側の電
極5aと、この電極5aに対応する右側のランド2bと
がクリームはんだ3aで機械的、電気的に接続されない
ことがあった。これを修正するため、わざわざ修正者が
はんだ付け修正しなければならないという問題があっ
た。However, in such a conventional structure, in the bulk mounting in which the front surface or the back surface of the chip component 4 is randomly mounted, the square chip resistor (used as an example of the electronic component) 4 is exposed. / Backward will be mounted in any direction. Therefore, the insulator 6 bulging from the surface of the electrode 5 is not always the upper surface, and the insulator 6 shown in FIG.
As shown in (3), the case where the insulator 6 (glass coat in the case of a square chip resistor) is mounted facing the surface of the substrate 1 also occurs.
In this case, if there is a step L1 between the insulator 6 and the electrode 5, and if there is another pattern 7 between the soldering lands 2, an insulator resist 8 is formed on the pattern 7. Since the coating is applied, the square chip resistor 4 is in a state of being considerably floated above the substrate 1. That is, as shown in FIG. 12, when the square chip resistor 4 is mounted on the substrate 1 with the insulator 6 facing downward, the square chip resistor 4 is mounted with the top 8a of the resist 8 serving as a fulcrum in the direction of the soldering land 2a. To be done. Then, the electrode 5a on the floating side (the electrode on the right side in this case) does not come into contact with the cream solder 3a. as a result,
As shown in FIG. 13, after the reflow soldering process, the right electrode 5a and the right land 2b corresponding to the electrode 5a may not be mechanically and electrically connected by the cream solder 3a. In order to correct this, there was a problem that the corrector had to make a soldering correction.
【0005】本発明は、このような問題点を解決するも
ので、修正作業を不要としたクリームはんだの塗布装置
を提供することを目的としたものである。The present invention has been made to solve the above problems, and an object of the present invention is to provide a cream solder applicator which requires no correction work.
【0006】[0006]
【課題を解決するための手段】この目的を達成するため
に、本発明のクリームはんだの塗布装置に用いられるス
クリーンは、そのスクリーン上に設けられた電子部品を
装着するための対応するクリームはんだ充填孔は、電子
部品の電極と絶縁物に重なる位置に設けた構成としたも
のである。To achieve this object, a screen used in the cream solder applicator of the present invention has a corresponding cream solder filling for mounting electronic components provided on the screen. The hole is provided at a position overlapping the electrode of the electronic component and the insulator.
【0007】[0007]
【作用】この構成により、クリームはんだは電子部品の
絶縁物に重なる位置まで塗布されるので、膨出形状に設
けられた絶縁物にクリームはんだが当接し、このときに
クリームはんだの表面張力により引っ張られて、電子部
品がプリント基板のランドと確実にはんだ付けされる。
従って、修正作業が不要となる。With this configuration, the cream solder is applied to the position where it overlaps with the insulator of the electronic component, so that the cream solder contacts the insulator provided in the bulging shape, and at this time, it is pulled by the surface tension of the cream solder. The electronic component is securely soldered to the land of the printed circuit board.
Therefore, the correction work becomes unnecessary.
【0008】[0008]
【実施例】以下、本発明の一実施例について図面を参照
しながら説明する。An embodiment of the present invention will be described below with reference to the drawings.
【0009】図1は本発明の第一の実施例であり、クリ
ームはんだの塗布装置の要部断面図である。図1におい
て、プリント基板10のはんだ付けランド11上にクリ
ームはんだ12をスクリーン印刷法等で塗布する。その
後、角チップ抵抗4をプリント基板10に装着した後リ
フローはんだ付けを行って角チップ抵抗4のはんだ付け
電極5とプリント基板10のはんだ付けランド11とを
はんだ接続する。このとき、クリームはんだの塗布装置
に用いられるスクリーンのスクリーン上に設けられた角
チップ抵抗4を装着するための充填孔は、電極5と角チ
ップ抵抗4の電極5の間に膨出して設けられた絶縁物6
に重なる位置になるように設けている。よって、角チッ
プ抵抗4をプリント基板10に装着すると、クリームは
んだ12は電極5の間の絶縁物6に重なった状態とな
る。本実施例で、クリームはんだ12は、はんだ付けラ
ンド11の上面と、前記絶縁物6の下方まで塗布してい
る。FIG. 1 is a first embodiment of the present invention and is a cross-sectional view of an essential part of a cream solder coating apparatus. In FIG. 1, the cream solder 12 is applied on the soldering land 11 of the printed board 10 by a screen printing method or the like. Then, after mounting the square chip resistor 4 on the printed circuit board 10, reflow soldering is performed to solder-connect the soldering electrodes 5 of the square chip resistor 4 and the soldering lands 11 of the printed circuit board 10. At this time, the filling hole for mounting the square chip resistor 4 provided on the screen of the screen used in the cream solder coating apparatus is provided so as to bulge between the electrode 5 and the electrode 5 of the square chip resistor 4. Insulator 6
It is provided so as to overlap with the. Therefore, when the square chip resistor 4 is mounted on the printed circuit board 10, the cream solder 12 is in a state of overlapping with the insulator 6 between the electrodes 5. In this embodiment, the cream solder 12 is applied to the upper surface of the soldering land 11 and the lower part of the insulator 6.
【0010】図2は、角チップ抵抗4が傾いて装着され
た時の要部断面図である。角チップ抵抗4の浮いた側の
電極5aがクリームはんだ12aと当接しなくても、膨
出形状の絶縁物6に当接するため、リフローしてもクリ
ームはんだ12aの表面張力により角チップ抵抗4は、
はんだ付けランド11a側に引っ張られ電極5aとはん
だ付けされる。FIG. 2 is a cross-sectional view of an essential part when the square chip resistor 4 is mounted while being inclined. Even if the electrode 5a on the floating side of the square chip resistor 4 comes into contact with the bulging-shaped insulator 6 even if it does not come into contact with the cream solder 12a, the surface tension of the cream solder 12a causes the square chip resistor 4 to remain even after reflow. ,
It is pulled to the side of the soldering land 11a and soldered to the electrode 5a.
【0011】図3は、本発明によるリフロー後のはんだ
付け状態を示す要部断面図であり、良好なはんだ付け状
態を示す。FIG. 3 is a cross-sectional view of essential parts showing a soldering state after reflow according to the present invention, showing a good soldering state.
【0012】図4は、クリームはんだの塗布装置を用い
てクリームはんだを塗布したクリームはんだ12の塗布
形状を示す平面図であり、この形状は電極5と角チップ
抵抗4の絶縁物6に重なる位置形状となっていて、更に
は、対向する方向に向かって凸形状(角形)とすること
によって、角チップ抵抗4をクリームはんだ12上に装
着してもチップ抵抗4の側面側13にクリームはんだ1
2がはみ出さない。クリームはんだ12がはみ出さない
ことによって、図5に示すように隣接するチップ抵抗4
のクリームはんだ12どうしが接触しないため、リフロ
ー後、チップ抵抗4と他のチップ抵抗4a間のはんだシ
ョートが防止出来る。FIG. 4 is a plan view showing an application shape of the cream solder 12 applied with the cream solder by using the cream solder applying apparatus, and this shape is located at a position where it overlaps the electrode 5 and the insulator 6 of the square chip resistor 4. By making the shape and the convex shape (square shape) toward the opposite direction, even if the square chip resistor 4 is mounted on the cream solder 12, the cream solder 1 is formed on the side surface side 13 of the chip resistor 4.
2 does not stick out. As the cream solder 12 does not squeeze out, the adjacent chip resistors 4 as shown in FIG.
Since the cream solders 12 do not come into contact with each other, a solder short circuit between the chip resistor 4 and another chip resistor 4a can be prevented after reflow.
【0013】図6は、クリームはんだ12をプリント基
板10に塗布する本発明によるスクリーン装置の斜視図
である。スクリーン装置14にはプリント基板10にク
リームはんだ12を塗布するための充填孔15を設けた
メタルスクリーン16が張り付けられている。この充填
孔15は、電極5とチップ抵抗4の絶縁物6に重なる位
置に設けるとともに、対向する充填孔15に向かって凸
形状になっている。FIG. 6 is a perspective view of a screen device according to the present invention for applying the cream solder 12 to the printed circuit board 10. A metal screen 16 having a filling hole 15 for applying the cream solder 12 to the printed circuit board 10 is attached to the screen device 14. The filling hole 15 is provided at a position overlapping the electrode 5 and the insulator 6 of the chip resistor 4 and has a convex shape toward the facing filling hole 15.
【0014】図7は、クリームはんだ12をプリント基
板10に塗布するときのスクリーン装置14の断面図で
ある。メタルスクリーン16上にクリームはんだ12を
供給し、スキージ17を矢印A方向へ移動させることに
より、クリームはんだ12を凸形状の充填孔15に埋め
込み、プリント基板10に凸形状のクリームはんだ12
を塗布する。FIG. 7 is a sectional view of the screen device 14 when the cream solder 12 is applied to the printed circuit board 10. By supplying the cream solder 12 onto the metal screen 16 and moving the squeegee 17 in the direction of the arrow A, the cream solder 12 is embedded in the convex filling hole 15 and the convex cream solder 12 on the printed circuit board 10.
Apply.
【0015】図8は、第二の実施例によるピン転写方式
のクリームはんだの塗布装置の断面図である。図8にお
いて、プレート18には第一の実施例と同じくクリーム
はんだ12を充填するための絶縁物方向への凸形状の充
填孔19を設け、この充填孔19と同じ形状で、この充
填孔19に嵌合するピン20を有している。そして、こ
の充填孔19にはクリームはんだ12が埋め込まれてい
る。FIG. 8 is a sectional view of a pin transfer type cream solder applicator according to the second embodiment. In FIG. 8, the plate 18 is provided with a convex filling hole 19 toward the insulator for filling the cream solder 12 as in the first embodiment. The filling hole 19 has the same shape as the filling hole 19. It has a pin 20 that fits in. The cream solder 12 is embedded in the filling hole 19.
【0016】図9は、クリームはんだ12をプリント基
板10に塗布するときのピン転写方式の断面図である。
充填孔19に埋め込まれたはんだ12は、ピン20をプ
レート18の充填孔19に嵌合させ、次にこのピン20
を挿入することによりピン20の先端には絶縁物方向へ
凸形状をしたクリームはんだ12が付着する。このはん
だ12をプリント基板10に押しつけることによって第
一の実施例のようにクリームはんだ12がプリント基板
10に塗布される。FIG. 9 is a cross-sectional view of the pin transfer method when the cream solder 12 is applied to the printed circuit board 10.
The solder 12 embedded in the filling hole 19 causes the pin 20 to fit into the filling hole 19 of the plate 18 and then the pin 20.
By inserting the, the cream solder 12 having a convex shape toward the insulator is attached to the tip of the pin 20. By pressing this solder 12 against the printed circuit board 10, the cream solder 12 is applied to the printed circuit board 10 as in the first embodiment.
【0017】本発明では、角チップ抵抗4を代表で説明
したが、他の電子部品、例えば図10に示す円筒形のチ
ップ部品21等の面実装部品に適用されることも可能で
ある。In the present invention, the square chip resistor 4 has been described as a representative, but the present invention can be applied to other electronic parts, for example, surface mount parts such as the cylindrical chip part 21 shown in FIG.
【0018】図10は、円筒形のチップ部品21をプリ
ント基板10に装着した状態の断面図である。円筒形チ
ップ部品21は、電極22と膨出した電極間の絶縁物2
3で構成され、クリームはんだ12は電極22と絶縁物
23に重なるように塗布されている。FIG. 10 is a sectional view showing a state where the cylindrical chip component 21 is mounted on the printed circuit board 10. The cylindrical chip component 21 includes an insulator 2 between the electrode 22 and the swollen electrode.
3, the cream solder 12 is applied so as to overlap the electrode 22 and the insulator 23.
【0019】[0019]
【発明の効果】以上のように本発明によれば、スクリー
ン上に設けられた電子部品を装着するためのクリームは
んだの充填孔は、電子部品の電極と絶縁物に重なるよう
に設けてあるので、リフロー時にクリームはんだの表面
張力により引っ張られて電子部品がプリント基板のラン
ドと確実にはんだ付けされる。従って、修正作業が不要
となる。As described above, according to the present invention, the cream solder filling hole for mounting the electronic component provided on the screen is provided so as to overlap the electrode and the insulator of the electronic component. During the reflow process, the surface tension of the cream solder pulls the electronic components to securely solder them to the lands of the printed circuit board. Therefore, the correction work becomes unnecessary.
【図1】本発明の一実施例によるクリームはんだの塗布
装置で、クリームはんだを塗布したプリント基板の要部
断面図FIG. 1 is a cross-sectional view of a main part of a printed circuit board coated with cream solder in a cream solder coating apparatus according to an embodiment of the present invention.
【図2】同、角チップ抵抗が傾いてプリント基板に装着
された状態を示す要部断面図FIG. 2 is a sectional view of relevant parts showing a state where the rectangular chip resistor is tilted and mounted on a printed circuit board.
【図3】同、リフロー後のはんだ付け状態を示す要部断
面図FIG. 3 is a sectional view of a main part showing a soldering state after reflow.
【図4】同、平面図FIG. 4 is a plan view of the same.
【図5】同、角チップ抵抗が複数装着された場合の平面
図FIG. 5 is a plan view of the case where a plurality of square chip resistors are mounted.
【図6】本発明の第一の実施例による、クリームはんだ
の塗布装置の斜視図FIG. 6 is a perspective view of a cream solder applicator according to a first embodiment of the present invention.
【図7】同、断面図FIG. 7 is a sectional view of the same.
【図8】本発明の第2の実施例によるピン転写によるク
リームはんだの塗布装置の断面図FIG. 8 is a sectional view of an apparatus for applying cream solder by pin transfer according to a second embodiment of the present invention.
【図9】同、断面図FIG. 9 is a sectional view of the same.
【図10】本発明の第3の実施例による、円筒型のチッ
プ部品を装着した場合のクリームはんだの塗布装置で、
クリームはんだを塗布したプリント基板の要部断面図FIG. 10 is a cream solder applicator when a cylindrical chip part is mounted according to a third embodiment of the present invention;
Sectional view of the main part of a printed circuit board coated with cream solder
【図11】従来のクリームはんだの塗布装置で、クリー
ムはんだを塗布したプリント基板の要部断面図FIG. 11 is a cross-sectional view of a main part of a printed circuit board to which cream solder has been applied by a conventional cream solder application device.
【図12】同、角チップ抵抗が傾いてプリント基板に装
着された状態を示す要部断面図FIG. 12 is a sectional view of relevant parts showing a state where the square chip resistors are tilted and mounted on a printed circuit board.
【図13】同、リフロー後のはんだ付け状態を示す要部
断面図FIG. 13 is a sectional view of relevant parts showing the soldering state after reflow
4 チップ抵抗 5 電極 6 絶縁物 10 プリント基板 12 クリームはんだ 14 スクリーン装置 16 メタルスクリーン 4 Chip Resistor 5 Electrode 6 Insulator 10 Printed Circuit Board 12 Cream Solder 14 Screen Device 16 Metal Screen
───────────────────────────────────────────────────── フロントページの続き (72)発明者 真保 俊治 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shunji Maho 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (4)
間にこの電極面より膨出形状に絶縁物が設けられた電子
部品をプリント基板に装着するためのクリームはんだの
塗布装置であって、この塗布装置に用いられるスクリー
ン上に設けられた前記電子部品を装着するための対向す
るクリームはんだの充填孔は、前記電極と前記絶縁物に
重なる位置に設けたクリームはんだの塗布装置。1. A cream solder applicator for mounting an electronic component, which has electrodes on both ends thereof and an insulating material bulging from the electrode surface between the electrodes, on a printed circuit board. The cream solder coating device is provided on a screen used in the coating device, the filling holes of the cream solder facing each other for mounting the electronic component being provided at positions overlapping the electrodes and the insulator.
填孔に向かって凸形状である請求項1記載のクリームは
んだの塗布装置。2. The cream solder coating apparatus according to claim 1, wherein the cream solder filling holes are convex toward the facing filling holes.
間にこの電極面より膨出形状に絶縁物が設けられた電子
部品をプリント基板に装着するためのクリームはんだの
塗布装置であって、この塗布装置はピンとこのピンに嵌
合するプレート上に設けられた充填孔とからなり、前記
ピンあるいは前記充填孔の形状は前記電極と前記絶縁物
に重なる位置に設けたクリームはんだの塗布装置。3. A cream solder applicator for mounting an electronic component, which has electrodes at both ends thereof and is provided with an insulating material in a bulge shape from the electrode surface between the electrodes, on a printed circuit board. The coating device comprises a pin and a filling hole provided on a plate fitted to the pin, and the shape of the pin or the filling hole is a cream solder coating device provided at a position overlapping the electrode and the insulator.
填孔に向かって凸形状である請求項3記載のクリームは
んだの塗布装置。4. The cream solder applicator according to claim 3, wherein the pin and the filling hole are convex toward the facing filling hole.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30105994A JP3204005B2 (en) | 1994-12-05 | 1994-12-05 | Cream solder coating equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30105994A JP3204005B2 (en) | 1994-12-05 | 1994-12-05 | Cream solder coating equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08162749A true JPH08162749A (en) | 1996-06-21 |
JP3204005B2 JP3204005B2 (en) | 2001-09-04 |
Family
ID=17892376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30105994A Expired - Fee Related JP3204005B2 (en) | 1994-12-05 | 1994-12-05 | Cream solder coating equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3204005B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104438010A (en) * | 2014-11-27 | 2015-03-25 | 北京时代民芯科技有限公司 | Device used for vacuum coating technology of non-airtightness flip-chip device |
-
1994
- 1994-12-05 JP JP30105994A patent/JP3204005B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104438010A (en) * | 2014-11-27 | 2015-03-25 | 北京时代民芯科技有限公司 | Device used for vacuum coating technology of non-airtightness flip-chip device |
Also Published As
Publication number | Publication date |
---|---|
JP3204005B2 (en) | 2001-09-04 |
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