JPH08159722A - Product dimension measuring instrument - Google Patents

Product dimension measuring instrument

Info

Publication number
JPH08159722A
JPH08159722A JP29765994A JP29765994A JPH08159722A JP H08159722 A JPH08159722 A JP H08159722A JP 29765994 A JP29765994 A JP 29765994A JP 29765994 A JP29765994 A JP 29765994A JP H08159722 A JPH08159722 A JP H08159722A
Authority
JP
Japan
Prior art keywords
product
inner diameter
line sensor
light source
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29765994A
Other languages
Japanese (ja)
Inventor
Koji Uchida
浩二 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nok Corp
Original Assignee
Nok Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nok Corp filed Critical Nok Corp
Priority to JP29765994A priority Critical patent/JPH08159722A/en
Publication of JPH08159722A publication Critical patent/JPH08159722A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To accurately measure product dimension by rotating a measurement object, applying light in a direction which is parallel with the rotary axis by partially screening light at the edge part of the object, and providing a line sensor on the opposite side of a light source along a rotary radius direction. CONSTITUTION: A product 24 is fitted to a rotary holding member and is rotated by a step motor 22 and a laser light source 26 is provided on the same side as the motor 22. A one-dimensional line sensor 30 is provided on the opposite side of the light source 26 while sandwiching the product 24 and laser beams 28b other than light screened by an inner-diameter part 24a of the product 24 are detected. The output of the sensor 30 is minimized or maximized at a position where a rotary center, the center of the product 24, and the longer direction of the sensor 30 are in one line. Therefore, the inner diameter of the product 24 can be calculated by adding the distance from the rotary center to the minimum value and the distance from the rotary center to the maximum value by a judgment circuit 32, thus accurately obtaining the inner diameter of the product 24 when the inner diameter is nearly round even if the product 24 is mounted while being set eccentrically.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、製品の外径や内径など
を高精度に測定することが可能であり、しかも安価な製
品寸法測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inexpensive product size measuring apparatus capable of measuring the outer diameter, inner diameter, etc. of a product with high accuracy.

【0002】[0002]

【従来の技術】図6は、従来例に係る製品寸法装置の概
略図であり、図7は、図6に示すVII−VII線に沿う平面
図である。図6,7に示すように、従来の寸法測定装置
2では、内径を測定しようとする対象の製品4の下方
に、レーザ光源6が配置される。レーザ光源6からは、
製品4の最大内径よりも大きい幅のレーザ光8aが照射
され、このレーザ光8aの一部は、製品の内縁部に当
り、遮光される。
2. Description of the Related Art FIG. 6 is a schematic view of a product size measuring apparatus according to a conventional example, and FIG. 7 is a plan view taken along line VII-VII shown in FIG. As shown in FIGS. 6 and 7, in the conventional dimension measuring device 2, the laser light source 6 is arranged below the product 4 whose inner diameter is to be measured. From the laser light source 6,
A laser beam 8a having a width larger than the maximum inner diameter of the product 4 is irradiated, and a part of the laser beam 8a hits the inner edge of the product and is shielded.

【0003】製品4に対して、レーザ光源6と反対側に
は、一次元ラインセンサ10が配置してある。ラインセ
ンサ10では、受光素子が線状に配置され、ライン方向
の光を一次元的に検出する。図7に示すように、製品4
は、図示省略してある移動手段によりラインセンサ10
の長手方向と略直角方向Aに移動し、ラインセンサ10
は、レーザ光源6から出射され製品の内縁部で一部遮光
されて入射するレーザ光8bの幅xを逐次測定する。そ
して、ラインセンサ10により測定した光の幅xの最大
を、製品4の第1仮内径とする。
A one-dimensional line sensor 10 is arranged on the opposite side of the product 4 from the laser light source 6. In the line sensor 10, the light receiving elements are linearly arranged and one-dimensionally detects light in the line direction. As shown in FIG. 7, product 4
Is a line sensor 10 by means of moving means (not shown).
Of the line sensor 10 by moving in a direction A substantially perpendicular to the longitudinal direction of the
Sequentially measures the width x of the laser beam 8b emitted from the laser light source 6 and partially shielded by the inner edge of the product and incident. Then, the maximum of the width x of the light measured by the line sensor 10 is set as the first temporary inner diameter of the product 4.

【0004】次に、製品4を90度回転させた位置で、
移動手段に取り付け、上述と同様にして、レーザ光源6
から出射され製品の内縁部で一部遮光されて入射するレ
ーザ光8bの幅xを逐次測定する。そして、ラインセン
サ10により測定した光の幅xの最大を、製品4の第2
仮内径とする。
Next, at the position where the product 4 is rotated 90 degrees,
The laser light source 6 is attached to the moving means and is similar to the above.
The width x of the laser beam 8b which is emitted from the laser beam and is incident on the inner edge of the product while being partially shielded is sequentially measured. Then, the maximum of the light width x measured by the line sensor 10 is set to the second value of the product 4.
Use a temporary inner diameter.

【0005】次に、上述のようにして求めた製品4の第
1仮内径と第2仮内径との平均を求め、それを製品の測
定内径とする。
Next, the average of the first temporary inner diameter and the second temporary inner diameter of the product 4 obtained as described above is calculated and used as the measured inner diameter of the product.

【0006】[0006]

【発明が解決しようとする課題】ところが、図6,7に
示す測定装置2を用いた測定方法では、製品4を移動手
段にセットする際のズレにより、正確に製品寸法を測定
できないおそれがある。また、図6,7に示す測定装置
2では、製品4が小径の場合には問題ないが、製品径が
大きくなった場合には、レーザ光源6およびラインセン
サ10を共に大型化させる必要があり、装置が高価にな
り過ぎるなどの課題を有する。
However, in the measuring method using the measuring device 2 shown in FIGS. 6 and 7, there is a possibility that the product dimension cannot be accurately measured due to a deviation when the product 4 is set on the moving means. . Further, in the measuring device 2 shown in FIGS. 6 and 7, there is no problem when the product 4 has a small diameter, but when the product diameter becomes large, it is necessary to enlarge both the laser light source 6 and the line sensor 10. However, there is a problem that the device becomes too expensive.

【0007】本発明は、このような実状に鑑みてなさ
れ、製品の外径や内径などを高精度に測定することが可
能であり、しかも小型かつ安価な製品寸法測定装置を提
供することを目的とする。
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a product size measuring device which is capable of measuring the outer diameter, the inner diameter and the like of a product with high accuracy and is small in size and inexpensive. And

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、本発明に係る製品寸法測定装置は、寸法測定対象の
製品を回転させる回転手段と、前記製品の回転軸に略平
行方向から、製品の縁部で一部遮光されるように、光を
照射する光源と、前記製品の縁部で一部遮光された光を
受光するように、前記製品の回転中心から所定距離離れ
た位置で、回転半径方向に沿って、前記光源と反対側に
配置されたラインセンサとを有する。
In order to achieve the above object, a product size measuring apparatus according to the present invention comprises a rotating means for rotating a product of a size measuring object, and a direction substantially parallel to a rotation axis of the product, A light source that emits light so as to be partially shielded at the edge of the product, and a position that is apart from the center of rotation of the product by a predetermined distance so as to receive light that is partially shielded at the edge of the product. , A line sensor arranged on the opposite side of the light source along the radial direction of rotation.

【0009】前記光源としては、たとえばレーザ光源が
用いられる。レーザ光源から出射されるレーザ光の断面
は、たとえば楕円形などの細長い形状である。測定対象
となる製品としては、たとえばオイルシール部品やOリ
ングなどのリング状部材であり、測定される寸法は、た
とえば製品の内径または外径である。
As the light source, for example, a laser light source is used. The cross section of the laser light emitted from the laser light source has an elongated shape such as an ellipse. The product to be measured is, for example, an oil seal part or a ring-shaped member such as an O-ring, and the dimension to be measured is, for example, the inner diameter or the outer diameter of the product.

【0010】[0010]

【作用】本発明に係る製品寸法測定装置を用いて、製品
の内径または外径を測定するための方法を説明する。ま
ず、回転手段に、製品を取り付け、製品を回転させなが
ら、光源から製品の内径縁部または外径縁部に向けて光
を照射する。照射された光の一部は、製品の内径縁部ま
たは外径縁部で遮光されるが、その他の光は、ラインセ
ンサへ入射する。
A method for measuring the inner diameter or the outer diameter of a product using the product dimension measuring device according to the present invention will be described. First, the product is attached to the rotating means, and while rotating the product, light is emitted from the light source toward the inner diameter edge portion or the outer diameter edge portion of the product. A part of the irradiated light is blocked by the inner diameter edge portion or the outer diameter edge portion of the product, while the other light is incident on the line sensor.

【0011】ラインセンサでは、製品の回転と共に、ラ
インセンサへ入射される光と遮光部分との境界を測定す
る。製品の測定部分が真円であり、製品の中心と回転手
段の回転中心がずれていると仮定すれば、ラインセンサ
へ入射される光と遮光部分との境界の位置は、製品の回
転と共に周期的に変化する。
The line sensor measures the boundary between the light incident on the line sensor and the light-shielding portion as the product rotates. Assuming that the measurement part of the product is a perfect circle and the center of rotation of the product and the center of rotation of the rotation means are deviated, the position of the boundary between the light incident on the line sensor and the light-shielding part will be the same as the rotation of the product. Change.

【0012】製品の回転中心から前記境界までの距離の
最大値と最小値とを求め、これらを足し算すれば、製品
の内径または外径を算出することができる。また、別の
方法として、製品の回転位置が、0度、90度、180
度、270度の4点の各位置で、製品の回転中心から、
ラインセンサで検出した前記境界の位置までの距離をそ
れぞれ求め、これらを全て足し算して、2で割ることに
より、製品の内径または外径を算出することができる。
この方法では、かりに製品の測定部分が真円でなく、楕
円形に近いとしても、平均の内径または外径を求めるこ
とができる。
The inner diameter or outer diameter of the product can be calculated by obtaining the maximum value and the minimum value of the distance from the rotation center of the product to the boundary and adding them. Also, as another method, the rotational position of the product is 0 °, 90 °, 180 °.
From the center of rotation of the product,
The inner diameter or the outer diameter of the product can be calculated by obtaining the distances to the positions of the boundaries detected by the line sensor, adding them all, and dividing by two.
With this method, even if the measured portion of the product is not a perfect circle but is close to an ellipse, the average inner diameter or outer diameter can be obtained.

【0013】[0013]

【実施例】以下、本発明に係る製品寸法測定装置を、図
面に示す実施例に基づき、詳細に説明する。図1(A)
は本発明の一実施例に係る製品寸法測定装置の概略構成
図、図1(B)は図1(A)に示すレーザ光の断面図、
図2(A)は図1に示す測定装置で測定される対象とな
る製品の平面図、図2(B)は図2(A)のB−B線に
沿う断面図、図3は回転する製品とラインセンサとの関
係を示す平面図、図4は製品の回転位置を横軸とするラ
インセンサの出力結果を示すグラフ、図5(A)〜
(D)は製品の回転位置とラインセンサの出力結果との
関係を示す概略図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The product dimension measuring apparatus according to the present invention will be described in detail below with reference to the embodiments shown in the drawings. FIG. 1 (A)
1 is a schematic configuration diagram of a product size measuring apparatus according to an embodiment of the present invention, FIG. 1B is a sectional view of the laser beam shown in FIG.
2A is a plan view of a product to be measured by the measuring device shown in FIG. 1, FIG. 2B is a sectional view taken along line BB of FIG. 2A, and FIG. FIG. 5A is a plan view showing the relationship between the product and the line sensor, FIG. 4 is a graph showing the output result of the line sensor with the rotational position of the product as the horizontal axis.
(D) is a schematic diagram showing the relationship between the rotational position of the product and the output result of the line sensor.

【0014】図1(A)に示すように、本実施例に係る
製品寸法測定装置20は、オイルシール部材あるいはO
リングなどのリング状の製品24の内径を測定するため
の装置である。リング状の製品24の全体形状を図2に
示す。図2に示す製品24は、図1において省略してあ
る回転保持部材に装着され、回転手段としてのステップ
モータ22により回転されるようになっている。
As shown in FIG. 1 (A), the product dimension measuring apparatus 20 according to this embodiment has an oil seal member or an O
This is a device for measuring the inner diameter of a ring-shaped product 24 such as a ring. The overall shape of the ring-shaped product 24 is shown in FIG. The product 24 shown in FIG. 2 is mounted on a rotation holding member which is omitted in FIG. 1, and is rotated by a step motor 22 as a rotating means.

【0015】本実施例では、ステップモータ22と同じ
側に、レーザ光源26が配置してある。本実施例のレー
ザ光源26は、製品24の内径部分24aの内径よりも
大きい幅のレーザ光を出射する必要はなく、製品24の
内径部分24aの一部を照射する程度の幅のレーザ光2
8aを出射すれば十分である。レーザ光28aの一例を
図1(B)に示す。レーザ光28aは、製品24の回転
半径方向に細長い形状であれば、特に限定されず、たと
えば図1(B)に示すように、楕円形状であっても良
い。
In this embodiment, a laser light source 26 is arranged on the same side as the step motor 22. The laser light source 26 of the present embodiment does not need to emit a laser beam having a width larger than the inner diameter of the inner diameter portion 24a of the product 24, and has a width enough to irradiate a part of the inner diameter portion 24a of the product 24.
It is sufficient to emit 8a. An example of the laser light 28a is shown in FIG. The laser beam 28a is not particularly limited as long as it has a shape elongated in the rotation radius direction of the product 24, and may have an elliptical shape as shown in FIG. 1B, for example.

【0016】製品24を挟んで、レーザ光源26の反対
側には、一次元ラインセンサ30が配置してある。この
ラインセンサ30は、CCDなどのような受光素子が線
状に配置されたものであり、製品24の回転中心から所
定距離離れた位置で、かつレーザ光源26と相対する位
置に、図3に示すように、回転半径方向に沿って配置し
てある。ラインセンサ30には、図1に示すように、判
定回路32が接続してある。判定回路32では、ライン
センサ30の出力から製品の寸法を算出する。
A one-dimensional line sensor 30 is arranged on the opposite side of the laser light source 26 with the product 24 in between. The line sensor 30 includes light receiving elements such as CCDs arranged linearly, and is located at a position separated from the center of rotation of the product 24 by a predetermined distance and at a position facing the laser light source 26. As shown, they are arranged along the radial direction of rotation. A determination circuit 32 is connected to the line sensor 30 as shown in FIG. The determination circuit 32 calculates the product size from the output of the line sensor 30.

【0017】ラインセンサ30では、図1に示すよう
に、レーザ光源26から出射されて製品24の内径部分
24aで遮光された光以外のレーザ光28bを検出す
る。ステップモータ22(1ステップが、たとえば0.
72度)により製品24を回転させつつ、ラインセンサ
30により製品24の内径部分24aの撮像を行った結
果を図4に示す。本実施例では、ラインセンサ30の長
さは約3.3mmである。
As shown in FIG. 1, the line sensor 30 detects laser light 28b other than the light emitted from the laser light source 26 and shielded by the inner diameter portion 24a of the product 24. Step motor 22 (1 step is, for example, 0.
FIG. 4 shows the result of imaging the inner diameter portion 24a of the product 24 by the line sensor 30 while rotating the product 24 at (72 degrees). In this embodiment, the length of the line sensor 30 is about 3.3 mm.

【0018】図4中、曲線αが、横軸を製品の回転角度
位置とした場合に、ラインセンサ30へ入射したレーザ
光と遮光部分との境界の軌跡である。図4に示すよう
に、境界の軌跡αは、製品の回転角度位置に従い、36
0度を1周期として変動する。360度を1周期として
変動するのは、製品が、回転保持部材に対して、偏心し
て取り付けられるためと考えられる。
In FIG. 4, a curve α is the locus of the boundary between the laser beam incident on the line sensor 30 and the light-shielding portion when the horizontal axis is the rotation angle position of the product. As shown in FIG. 4, the trajectory α of the boundary is 36
It changes with 0 degree as one cycle. It is thought that the reason why the product changes with 360 degrees as one cycle is that the product is eccentrically attached to the rotation holding member.

【0019】次に、図1に示す測定装置20を用い、図
5に基づき、製品24の内径を算出する方法について説
明する。図5に示すように、製品24の中心40が回転
中心42に対して偏心して取り付けられたと仮定し、製
品24を矢印B方向に回転させつつ、ラインセンサ30
でレーザ光を検出した結果、ラインセンサ30の出力が
最小(min)に成るのは、図5(B)の位置関係であ
り、最大(max)と成るのは、図5(D)の位置関係
である。ラインセンサ30の出力が最小または最大にな
る位置とは、回転中心42、製品の中心40およびライ
ンセンサ30の長手方向が一直線になる位置である。し
たがって、回転中心42から最小値までの距離R
min と、回転中心42から最大値までの距離Rmax
を、図1に示す判定回路32で足し算すれば、製品24
の内径を求めることができる。
Next, a method for calculating the inner diameter of the product 24 using the measuring device 20 shown in FIG. 1 will be described with reference to FIG. As shown in FIG. 5, assuming that the center 40 of the product 24 is eccentrically attached to the rotation center 42, the line sensor 30 is rotated while rotating the product 24 in the arrow B direction.
As a result of detecting the laser light in the above, the output of the line sensor 30 becomes the minimum (min) according to the positional relationship of FIG. 5B, and the maximum output (max) is the position of FIG. 5D. It is a relationship. The position where the output of the line sensor 30 is minimum or maximum is a position where the rotation center 42, the product center 40, and the longitudinal direction of the line sensor 30 are aligned. Therefore, the distance R from the center of rotation 42 to the minimum value
If the min and the distance R max from the rotation center 42 to the maximum value are added by the determination circuit 32 shown in FIG.
The inner diameter of can be calculated.

【0020】上述した実施例では、製品24が回転保持
部材に対して偏心して取り付けられたとしても、製品2
4の内径部分がほぼ真円の場合には、正確に製品24の
内径を求めることができる。製品の内径部分が、真円で
なく、楕円などに近い場合には、次のような方法を採用
することにより、製品の内径の平均値を正確に求めるこ
とができる。
In the above-described embodiment, even if the product 24 is eccentrically attached to the rotation holding member, the product 2
When the inner diameter portion of 4 is substantially a perfect circle, the inner diameter of the product 24 can be accurately determined. When the inner diameter portion of the product is not a perfect circle but is close to an ellipse, the average value of the inner diameter of the product can be accurately obtained by adopting the following method.

【0021】この方法では、図5(A)〜(D)の各点
(回転位置が、0度、90度、180度、270度)で
のラインセンサ30による出力値(回転中心42からの
距離に対応する)を取り込み、図1に示す判定回路32
にて、これらの出力値を全て足し算し、この値を2で割
る。すると、直交する回転位置での直径の平均値が求め
られる。この値は、製品24の内径の平均値として妥当
な値である。
In this method, the output value (from the rotation center 42) by the line sensor 30 at each point (rotational position is 0 °, 90 °, 180 °, 270 °) in FIGS. 5A to 5D. Determination circuit 32 shown in FIG.
Then, all of these output values are added and this value is divided by 2. Then, the average value of the diameters at the orthogonal rotation positions is obtained. This value is a reasonable value as the average value of the inner diameter of the product 24.

【0022】本実施例では、製品24の内径に相当する
幅のレーザ光を照射する必要がなく、しかもその幅に相
当するラインセンサを準備する必要もなく、装置が大型
化することもない。しかも、本実施例では、製品24の
中心40と回転中心42とがずれている場合でも、きわ
めて正確に製品24の内径を測定することができる。
In this embodiment, it is not necessary to irradiate a laser beam having a width corresponding to the inner diameter of the product 24, it is not necessary to prepare a line sensor corresponding to the width, and the apparatus is not enlarged. Moreover, in the present embodiment, even if the center 40 and the rotation center 42 of the product 24 are deviated, the inner diameter of the product 24 can be measured extremely accurately.

【0023】なお、本発明は、上述した実施例に限定さ
れるものではなく、本発明の範囲内で種々に改変するこ
とができる。たとえば、上記実施例では、光源としてレ
ーザ光源26を用いたが、本発明では、その他の種類の
光を出射する光源を用いても良い。
The present invention is not limited to the above-mentioned embodiments, but can be variously modified within the scope of the present invention. For example, although the laser light source 26 is used as the light source in the above-described embodiment, a light source that emits other types of light may be used in the present invention.

【0024】また、レーザ光源26とラインセンサ30
とは、製品24を挟んで、反対側に位置する。これらが
反対側に位置すれば、これらの位置関係は問わず、図1
に示す位置関係とは逆に、レーザ光源26がラインセン
サ30の上に位置するように構成することもできる。
The laser light source 26 and the line sensor 30 are also provided.
Is located on the opposite side of the product 24. As long as they are located on the opposite side, the positional relationship between them does not matter.
The laser light source 26 may be located above the line sensor 30, contrary to the positional relationship shown in FIG.

【0025】また、上述した実施例では、製品24の内
径を求めたが、レーザ光源26およびラインセンサ30
の設置位置を変えるのみで、製品24の外径も上述した
実施例と同様にして求めることができる。
Further, in the above-mentioned embodiment, the inner diameter of the product 24 is obtained, but the laser light source 26 and the line sensor 30 are used.
The outer diameter of the product 24 can be obtained in the same manner as in the above-described embodiment by only changing the installation position of the product.

【0026】[0026]

【発明の効果】以上説明してきたように、本発明によれ
ば、製品の内径または外径に相当する幅のレーザ光を照
射する必要がなく、しかもその幅に相当するラインセン
サを準備する必要もない。したがって、本発明では、装
置が大型化することがなく、装置が安価になる。しか
も、本発明では、製品が回転手段に対して偏心して取り
付けられたとしても、きわめて正確に製品の内径または
外径などの寸法を測定することができる。
As described above, according to the present invention, it is not necessary to irradiate the laser beam having the width corresponding to the inner diameter or the outer diameter of the product, and it is necessary to prepare the line sensor corresponding to the width. Nor. Therefore, in the present invention, the device does not become large and the device becomes inexpensive. Moreover, in the present invention, even if the product is eccentrically attached to the rotating means, it is possible to measure the dimensions such as the inner diameter or the outer diameter of the product very accurately.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1(A)は本発明の一実施例に係る製品寸法
測定装置の概略構成図、図1(B)は図1(A)に示す
レーザ光の断面図である。
1A is a schematic configuration diagram of a product size measuring apparatus according to an embodiment of the present invention, and FIG. 1B is a cross-sectional view of the laser beam shown in FIG. 1A.

【図2】図2(A)は図1に示す測定装置で測定される
対象となる製品の平面図、図2(B)は図2(A)のB
−B線に沿う断面図である。
2 (A) is a plan view of a product to be measured by the measuring device shown in FIG. 1, and FIG. 2 (B) is B of FIG. 2 (A).
It is sectional drawing which follows the -B line.

【図3】図3は回転する製品とラインセンサとの関係を
示す平面図である。
FIG. 3 is a plan view showing a relationship between a rotating product and a line sensor.

【図4】図4は製品の回転位置を横軸とするラインセン
サの出力結果を示すグラフである。
FIG. 4 is a graph showing an output result of a line sensor with the rotational position of a product as the horizontal axis.

【図5】図5(A)〜(D)は製品の回転位置とライン
センサの出力結果との関係を示す概略図である。
5A to 5D are schematic diagrams showing the relationship between the rotational position of the product and the output result of the line sensor.

【図6】図6は従来技術に係る製品寸法測定装置の正面
図である。
FIG. 6 is a front view of a product dimension measuring device according to a conventional technique.

【図7】図7は図6に示すVII−VII線に沿う平面図であ
る。
7 is a plan view taken along line VII-VII shown in FIG.

【符号の説明】[Explanation of symbols]

20… 製品寸法測定装置 22… ステップモータ 24… 製品 24a… 内径部分 26… レーザ光源 28a,28b… レーザ光 30… ラインセンサ 32… 判定手段 40… 製品の中心 42… 回転中心 20 ... Product dimension measuring device 22 ... Step motor 24 ... Product 24a ... Inner diameter part 26 ... Laser light source 28a, 28b ... Laser light 30 ... Line sensor 32 ... Judgment means 40 ... Product center 42 ... Rotation center

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 寸法測定対象の製品(24)を回転させ
る回転手段(22)と、 前記製品(24)の回転軸に略平行方向から、製品(2
4)の縁部で一部遮光されるように、光を照射する光源
(26)と、 前記製品(24)の縁部で一部遮光された光を受光する
ように、前記製品(24)の回転中心から所定距離離れ
た位置で、回転半径方向に沿って、前記光源(26)と
反対側に配置されたラインセンサ(30)とを有する製
品寸法測定装置。
1. A rotating means (22) for rotating a product (24) to be dimension-measured, and a product (2) in a direction substantially parallel to a rotation axis of the product (24).
4) a light source (26) for irradiating light so as to be partially shielded at the edge portion, and the product (24) for receiving light partially shielded at the edge portion of the product (24) A product size measuring device having a line sensor (30) arranged on the opposite side of the light source (26) along a radial direction of rotation at a position separated from the center of rotation of the product.
JP29765994A 1994-11-30 1994-11-30 Product dimension measuring instrument Pending JPH08159722A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29765994A JPH08159722A (en) 1994-11-30 1994-11-30 Product dimension measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29765994A JPH08159722A (en) 1994-11-30 1994-11-30 Product dimension measuring instrument

Publications (1)

Publication Number Publication Date
JPH08159722A true JPH08159722A (en) 1996-06-21

Family

ID=17849466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29765994A Pending JPH08159722A (en) 1994-11-30 1994-11-30 Product dimension measuring instrument

Country Status (1)

Country Link
JP (1) JPH08159722A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008171532A (en) * 2007-01-15 2008-07-24 Hoya Corp Inner diameter measuring device of disk-shaped substrate, inner diameter measuring method, manufacturing method of disk-shaped substrate and manufacturing method of magnetic disk
JP2010025671A (en) * 2008-07-17 2010-02-04 Eagle Ind Co Ltd Fluid film thickness measuring apparatus
JP2012154740A (en) * 2011-01-25 2012-08-16 Asahi Glass Co Ltd Center deviation measuring device and method therefor
CN107401984A (en) * 2017-08-10 2017-11-28 王勇华 Portable Circularhole diameter laser measuring apparatus
JP2019032260A (en) * 2017-08-09 2019-02-28 株式会社ディスコ Position adjustment method of licensor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008171532A (en) * 2007-01-15 2008-07-24 Hoya Corp Inner diameter measuring device of disk-shaped substrate, inner diameter measuring method, manufacturing method of disk-shaped substrate and manufacturing method of magnetic disk
JP2010025671A (en) * 2008-07-17 2010-02-04 Eagle Ind Co Ltd Fluid film thickness measuring apparatus
JP2012154740A (en) * 2011-01-25 2012-08-16 Asahi Glass Co Ltd Center deviation measuring device and method therefor
JP2019032260A (en) * 2017-08-09 2019-02-28 株式会社ディスコ Position adjustment method of licensor
CN107401984A (en) * 2017-08-10 2017-11-28 王勇华 Portable Circularhole diameter laser measuring apparatus

Similar Documents

Publication Publication Date Title
JP4237877B2 (en) System and method for normalizing and calibrating a sensor array
KR20010030477A (en) Rotary angle sensor for a rotary member
US3936638A (en) Radiology
KR20030094301A (en) An improved displacement and torque sensor
JP2002286507A (en) Optical encoder device
JPH08159722A (en) Product dimension measuring instrument
JPS6212848B2 (en)
US9874463B2 (en) Optical encoder for preventing crosstalk
JP4710347B2 (en) Analysis device and analysis disk used for the same
US7076021B2 (en) Apparatus for measurement of the thickness of thin layers
US5936729A (en) Photo detector assembly for measuring particle sizes
JP6842084B2 (en) Portable 3-axis stress measuring device
JPH05215532A (en) Encoder
JPS6180018A (en) Color detecting apparatus
KR0131526B1 (en) Optical measuring device and its measuring method
JP2006112964A (en) Optical sensor device
JPH0565020B2 (en)
JPH0410967B2 (en)
JPH1114320A (en) Dimension measuring device
JP2950226B2 (en) Height measuring device
JP2988594B2 (en) Wafer center detection device
JP2952284B2 (en) X-ray optical system evaluation method
JPH0531555Y2 (en)
JPH01313739A (en) Method and device for inspecting peripheral surface of cylindrical body
JP2662524B2 (en) Method and apparatus for determining orientation of sample in X-ray analysis