JPH08159212A - Vibration absorbing device using piezoelectric element - Google Patents

Vibration absorbing device using piezoelectric element

Info

Publication number
JPH08159212A
JPH08159212A JP33020494A JP33020494A JPH08159212A JP H08159212 A JPH08159212 A JP H08159212A JP 33020494 A JP33020494 A JP 33020494A JP 33020494 A JP33020494 A JP 33020494A JP H08159212 A JPH08159212 A JP H08159212A
Authority
JP
Japan
Prior art keywords
piezoelectric element
resistor
vibration
absorbing device
vibration absorbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33020494A
Other languages
Japanese (ja)
Inventor
Toru Hayashi
徹 林
Kingo Itaya
謹悟 板谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Priority to JP33020494A priority Critical patent/JPH08159212A/en
Publication of JPH08159212A publication Critical patent/JPH08159212A/en
Pending legal-status Critical Current

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  • Vibration Prevention Devices (AREA)
  • Vibration Dampers (AREA)

Abstract

PURPOSE: To provide a vibration absorbing device which finally consumes vibration energy as heat energy after it is converted into electric energy by a piezoelectric element. CONSTITUTION: A piezoelectric element 3 is arranged between an apparatus main body 1 and a counter mass 2 or a base stand, and a CR resonance circuit in which the piezoelectric element 3 and a resistor 4 are connected in parallel to each other is constituted. A combustible resistor can be used as the resistor 4. Therefore, the resistor 4 being a heat generating source can be arranged outside a system, highly accurate measurement, operation or the like become possible without thermal influence.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、振動エネルギーを電気
エネルギーに変える圧電素子を使用した振動吸収装置に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration absorbing device using a piezoelectric element for converting vibration energy into electric energy.

【0002】[0002]

【従来の技術】外部から伝播する振動や衝撃等の影響か
ら精密測定装置,精密加工装置等の各種機器を保護する
ため、基台と機器との間にダンパーを介在させている。
この種のダンパーは、振動等の運動エネルギーを最終的
に熱エネルギーに変換し、熱エネルギーとして外部に放
出する。ダンパーは、エネルギー変換の過程に応じて、
内部損失を利用するゴム,合成樹脂等の弾性体を使用
するもの、オイル,ガス等の流体の摩擦損失を利用す
るもの、発電機構で振動エネルギーを電気エネルギー
に変換し、この電気エネルギーを熱として消費するもの
に分類される。
2. Description of the Related Art A damper is interposed between a base and a device in order to protect various devices such as a precision measuring device and a precision processing device from the influence of externally transmitted vibrations and shocks.
This type of damper finally converts kinetic energy such as vibration into heat energy and releases it as heat energy to the outside. The damper, depending on the process of energy conversion,
Rubber that uses internal loss, one that uses an elastic body such as synthetic resin, one that uses friction loss of fluid such as oil, gas, etc. Vibration energy is converted into electric energy by a power generation mechanism, and this electric energy is used as heat. It is classified as something to consume.

【0003】前掲した及びのダンパーは、最も広く
使用されているものであり、従来から種々のタイプが提
案されている。振動エネルギーを電気エネルギーに変換
するタイプに属するものとしては、磁場中で振動する
導体内部に生じる渦電流を導体内部で熱として消費する
渦電流ダンパーが、たとえば米国特許第4605194
号明細書で紹介されている。
The above-mentioned dampers (1) and (2) are the most widely used ones, and various types have been conventionally proposed. An eddy current damper, which consumes eddy current generated inside a conductor vibrating in a magnetic field as heat inside the conductor, belongs to the type that converts vibration energy into electric energy, for example, US Pat. No. 4,605,194.
It is introduced in the specification.

【0004】[0004]

【発明が解決しようとする課題】通常、ダンパーは、装
置の設計段階当初から組込み箇所が考慮されているが、
装置の完成後に追加設置の必要に迫られることが多い。
従来のダンパーでは、装置自体の改造又は取外しが余儀
なくされ、簡単に追加設置することができない。また、
ガスの発生が懸念される真空系では使用できない場合が
ある。しかも、従来のダンパーでは、振動エネルギーを
最終的に熱エネルギーとして消費する場所が機器本体の
近傍であることから、発熱によって機器本体が悪影響を
受けやすい。熱影響は、特に高精度の測定や加工が要求
される機器に対しては、誤差要因となって現れる。本発
明は、このような問題を解消すべく案出されたものであ
り、発電機構として圧電素子を使用することにより、構
造が極めて簡単で、しかも機器本体に対する熱影響を防
止できる振動吸収装置を提供することを目的とする。
Normally, the damper is considered to be incorporated at the beginning of the design stage of the device.
After the device is completed, it is often necessary to install it additionally.
In the conventional damper, modification or removal of the device itself is unavoidable, and additional installation cannot be easily performed. Also,
It may not be used in a vacuum system where gas generation is a concern. Moreover, in the conventional damper, since the place where the vibration energy is finally consumed as heat energy is near the device body, the device body is easily affected by heat generation. The heat effect appears as an error factor, especially for equipment that requires highly accurate measurement and processing. The present invention has been devised to solve such a problem, and by using a piezoelectric element as a power generation mechanism, a vibration absorber having a very simple structure and capable of preventing thermal influence on the device body is provided. The purpose is to provide.

【0005】[0005]

【課題を解決するための手段】本発明の振動吸収装置
は、その目的を達成するため、機器本体と基台との間に
介装した圧電素子と、該圧電素子に並列接続された抵抗
器とを備え、前記圧電素子と前記抵抗器とでCR共振回
路が構成されていることを特徴とする。抵抗器として
は、固体抵抗器又は可変抵抗器の何れをも使用可能であ
る。また、回転軸や操作軸の周囲に圧電素子を設けるこ
とによって、軸のブレやビビリ等を防止することも可能
である。
In order to achieve the object, a vibration absorbing device of the present invention has a piezoelectric element interposed between a device body and a base and a resistor connected in parallel to the piezoelectric element. And a CR resonance circuit is configured by the piezoelectric element and the resistor. Either a solid-state resistor or a variable resistor can be used as the resistor. Further, by providing a piezoelectric element around the rotary shaft or the operating shaft, it is possible to prevent the shaft from shaking or chattering.

【0006】[0006]

【作用】本発明に従った振動吸収装置では、圧電素子で
振動エネルギーを電気エネルギーに変換し、圧電素子に
並列接続された抵抗器で熱エネルギーとして消費する。
圧電素子の容量と抵抗で構成されるCR共振回路で吸収
しようとする振動数が特定されるため、固有振動数等の
振動エネルギーが効率よく且つ選択的に除去される。発
熱部である抵抗器は、機器本体から離れた任意の位置に
設けることができる。そのため、有害な熱影響から機器
本体が保護される。また、抵抗器を可変抵抗器に代える
と、チューナブルダンパーとなり、振動系の微調整も可
能となる。本発明に従った振動吸収装置は、種々の態様
で振動発生源に、又は振動伝播を防止しようとする機器
に取り付けることができる。
In the vibration absorbing device according to the present invention, the piezoelectric element converts the vibration energy into electric energy, and the resistor connected in parallel to the piezoelectric element consumes it as heat energy.
Since the frequency to be absorbed by the CR resonance circuit composed of the capacitance and resistance of the piezoelectric element is specified, the vibration energy such as the natural frequency is efficiently and selectively removed. The resistor that is the heat generating portion can be provided at an arbitrary position apart from the main body of the device. Therefore, the device body is protected from harmful heat influence. Also, if the resistor is replaced with a variable resistor, it becomes a tunable damper, and fine adjustment of the vibration system becomes possible. The vibration absorber according to the invention can be attached in various ways to the vibration source or to the device in which it is intended to prevent vibration propagation.

【0007】図1は、振動吸収装置の基本的構成を示
す。防振が必要とされる機器本体1とカウンターマス2
との間に、図1(a)に示すように圧電素子3を介在さ
せる。圧電素子3は、図1(b)に示すように抵抗器4
と並列接続されており、CR共振回路を構成する。抵抗
器4は、そこで発生する熱が機器本体1に伝わらないよ
うに、機器本体1から離れた位置に設けることが好まし
い。逆に、熱による影響を無視できる場合、圧電素子と
抵抗器とを一体化し、より簡単な構造にすることも可能
である。機器本体1に伝播使用とする振動エネルギー
は、圧電素子3で電気エネルギーに変換され、機器本体
1から取り出されて系外の抵抗器4に送られる。或い
は、機器本体1で発生した振動が外部に伝播することを
防止する場合にも、同様な設備構成が採用される。
FIG. 1 shows the basic structure of a vibration absorber. Equipment body 1 and countermass 2 that require anti-vibration
1 and the piezoelectric element 3 is interposed therebetween. The piezoelectric element 3 has a resistor 4 as shown in FIG.
And a CR resonance circuit. The resistor 4 is preferably provided at a position away from the device body 1 so that the heat generated there is not transferred to the device body 1. On the contrary, when the influence of heat can be ignored, it is possible to integrate the piezoelectric element and the resistor into a simpler structure. The vibration energy propagated to the device body 1 is converted into electric energy by the piezoelectric element 3, extracted from the device body 1 and sent to the resistor 4 outside the system. Alternatively, the same equipment configuration is also used to prevent the vibration generated in the device body 1 from propagating to the outside.

【0008】抵抗器4では、供給された電気エネルギー
に応じた抵抗発熱が生じ、結果的に振動エネルギーが熱
エネルギーとして消費される。そのため、機器本体1が
振動から保護され、高精度が要求される測定や操作等が
振動に起因する外乱なく行われる。或いは、機器本体1
で発生した振動の外部への伝播が防止され、周辺機器へ
の悪影響がなくなる。既存の設備に振動吸収装置を後か
ら組み込む方式としては、たとえば図2に示すように、
すでに設置している機器本体1の周辺にカウンターマス
2を設け、機器本体1とカウンターマス2との間に圧電
素子3を配置する。
In the resistor 4, resistance heating is generated according to the supplied electric energy, and as a result, vibration energy is consumed as heat energy. Therefore, the device body 1 is protected from vibration, and measurements and operations that require high accuracy can be performed without disturbance caused by vibration. Alternatively, the device body 1
The vibration generated in step 2 is prevented from propagating to the outside, and the adverse effects on peripheral devices are eliminated. As a method of incorporating the vibration absorbing device into the existing equipment later, for example, as shown in FIG.
The counter mass 2 is provided around the already installed device body 1, and the piezoelectric element 3 is arranged between the device body 1 and the counter mass 2.

【0009】装置の設置段階当初から振動吸収装置を組
み込む場合、図3に示すように、機器本体1の質量を利
用して圧電素子3を配置することも可能である。この場
合、基台5と機器本体1との間に圧電素子3及び緩衝材
6を配置し、圧電素子3及び緩衝材6で機器本体1の質
量を受ける。本発明に従った振動吸収装置は、回転軸,
操作軸等のブレやビビリを防止することにも有効であ
る。たとえば、図4に示すように、軸7の周囲を取り囲
むように圧電素子3を配置し、軸7と同心円状にカウン
ターマス2を配置する。圧電素子3に発生する電気エネ
ルギーは、振動伝播方向に沿って変動する。そのため、
大きな振動が加わるほど、その方向にある圧電素子が吸
収する振動エネルギーが軸7のブレやビビリを相殺する
ように増加する。
When the vibration absorbing device is incorporated from the beginning of the installation stage of the device, the piezoelectric element 3 can be arranged by utilizing the mass of the device body 1 as shown in FIG. In this case, the piezoelectric element 3 and the cushioning material 6 are arranged between the base 5 and the equipment body 1, and the piezoelectric element 3 and the cushioning material 6 receive the mass of the equipment body 1. The vibration absorber according to the invention comprises a rotary shaft,
It is also effective in preventing blurring and chattering of the operation axis. For example, as shown in FIG. 4, the piezoelectric element 3 is arranged so as to surround the shaft 7, and the counter mass 2 is arranged concentrically with the shaft 7. The electric energy generated in the piezoelectric element 3 fluctuates along the vibration propagation direction. for that reason,
As the larger vibration is applied, the vibration energy absorbed by the piezoelectric element in that direction increases so as to cancel the shake and chatter of the shaft 7.

【0010】[0010]

【実施例】探針装置に本発明を適用した実施例を説明す
る。本実施例の探針装置は、図5に示すようにL型の基
台10にスキャナーベース11を介してチューブ型ピエ
ゾスキャナー12を搭載している。ピエゾスキャナー1
2の先端に取り付けられた探針13は、基台10の起立
部14に固定されている試料15に探針13が指向す
る。スキャナーベース10は、衝撃力によって微小移動
できるように、後端側に圧電素子16及びカウンターマ
ス17を備えている。圧電素子16及びカウンターマス
17は、スキャナーベースが静止している状態ではダン
パーの一部として作用する。
EXAMPLE An example in which the present invention is applied to a probe device will be described. As shown in FIG. 5, the probe device of the present embodiment has a tube type piezo scanner 12 mounted on an L-shaped base 10 via a scanner base 11. Piezo scanner 1
The probe 13 attached to the tip of the probe 2 is directed to the sample 15 fixed to the upright portion 14 of the base 10. The scanner base 10 includes a piezoelectric element 16 and a counter mass 17 on the rear end side so that the scanner base 10 can be slightly moved by an impact force. The piezoelectric element 16 and the counter mass 17 act as a part of the damper when the scanner base is stationary.

【0011】基台10と設置基盤18との間に、本発明
に従った振動吸収装置が配置される。すなわち、基台1
0の質量を受けるように、基台10の下方に緩衝材19
及び圧電素子20を配置する。圧電素子20は、適宜の
抵抗器4(図1b参照)と並列接続されてCR共振回路
を構成する。外部から基台10に伝播しようとする振動
は、基台10と設置基盤18との間にある圧電素子20
で電気エネルギーに変換されて系外に取り出され、熱エ
ネルギーとして消費される。そのため、基台10に振動
が伝播することがなくなり、試料15を高精度で探針す
ることが可能になった。
A vibration absorbing device according to the present invention is arranged between the base 10 and the installation base 18. That is, the base 1
A cushioning material 19 is provided below the base 10 to receive a mass of 0.
And the piezoelectric element 20 is arranged. The piezoelectric element 20 is connected in parallel with an appropriate resistor 4 (see FIG. 1b) to form a CR resonance circuit. Vibrations that are about to propagate from the outside to the base 10 are piezoelectric elements 20 between the base 10 and the installation base 18.
Are converted into electric energy by the outside and taken out of the system, and consumed as heat energy. Therefore, the vibration does not propagate to the base 10 and the sample 15 can be probed with high accuracy.

【0012】[0012]

【発明の効果】以上に説明したように、本発明の振動吸
収装置は、圧電装置によって振動エネルギーを電気エネ
ルギーに変え、最終的に熱エネルギーとして消費してい
る。この振動吸収装置は、構造が極めて簡単であり、既
存の装置に対しても容易に組み込むことができ、装置全
体の振動特性を改善する。また、発熱源である抵抗器を
系外に配置できるため、機器本体が熱影響から保護さ
れ、高精度の測定や操作が可能になる。しかも、設置条
件が厳しくなく、真空中や水中でも容易に設置できる利
点を持っている。
As described above, in the vibration absorbing device of the present invention, the vibration energy is converted into electric energy by the piezoelectric device and finally consumed as heat energy. This vibration absorbing device has an extremely simple structure and can be easily incorporated into an existing device to improve the vibration characteristics of the entire device. In addition, since the resistor, which is a heat source, can be placed outside the system, the device body is protected from the influence of heat, enabling highly accurate measurement and operation. Moreover, the installation conditions are not strict, and it has the advantage that it can be easily installed in a vacuum or in water.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明に従った振動吸収装置の基本構成を示
し、機器本体とカウンターマストの間に設けた圧電素子
(a)、及び圧電素子と抵抗器で構成したCR共振回路
(b)
FIG. 1 shows a basic configuration of a vibration absorbing device according to the present invention, in which a piezoelectric element (a) provided between a device body and a counter mast, and a CR resonance circuit (b) including a piezoelectric element and a resistor.

【図2】 既存の設備に追加した振動吸収装置[Fig. 2] Vibration absorber added to existing equipment

【図3】 機器本体の質量を受ける振動吸収装置FIG. 3 Vibration absorber that receives the mass of the device body

【図4】 軸のブレやビビリを防止する振動吸収装置[Fig. 4] Vibration absorber for preventing shaft shake and chatter

【図5】 探針装置に組み込んだ振動吸収装置FIG. 5: Vibration absorber incorporated in the probe device

【符号の説明】[Explanation of symbols]

1:機器本体 2:カウンターマス 3:圧電素子
4:抵抗器 5:基台 6:緩衝材 7:軸 10:基台 11:スキャナーベース 12:ピエ
ゾスキャナー 13:探針 14:起立部 1
5:試料 16:圧電素子 17:カウンターマス
18:設置基盤 19:緩衝材 20:圧電素
1: Device body 2: Counter mass 3: Piezoelectric element 4: Resistor 5: Base 6: Buffer material 7: Shaft 10: Base 11: Scanner base 12: Piezo scanner 13: Probe 14: Standing part 1
5: Sample 16: Piezoelectric element 17: Countermass 18: Installation base 19: Buffer material 20: Piezoelectric element

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 装置本体とカウンターマス又は基台との
間に介装した圧電素子と、該圧電素子に並列接続された
抵抗器とを備え、前記圧電素子と前記抵抗器とでCR共
振回路が構成されている振動吸収装置。
1. A CR resonance circuit comprising a piezoelectric element interposed between an apparatus body and a counter mass or a base, and a resistor connected in parallel to the piezoelectric element, wherein the piezoelectric element and the resistor are CR resonance circuits. The vibration absorbing device that is configured.
【請求項2】 請求項1記載の抵抗器が可変抵抗器であ
る振動吸収装置。
2. A vibration absorbing device, wherein the resistor according to claim 1 is a variable resistor.
【請求項3】 回転軸,操作軸等の軸体の周囲に設けら
れた圧電素子と、前記軸体と同心円状に配置されたカウ
ンターマスと、前記該圧電素子に並列接続された抵抗器
とを備え、前記圧電素子と前記抵抗器とでCR共振回路
が構成されている振動吸収装置。
3. A piezoelectric element provided around a shaft body such as a rotary shaft and an operating shaft, a counter mass concentrically arranged with the shaft body, and a resistor connected in parallel to the piezoelectric element. A vibration absorbing device comprising: a CR resonance circuit including the piezoelectric element and the resistor.
【請求項4】 請求項3記載の抵抗器が可変抵抗器であ
る振動吸収装置。
4. A vibration absorbing device, wherein the resistor according to claim 3 is a variable resistor.
JP33020494A 1994-12-06 1994-12-06 Vibration absorbing device using piezoelectric element Pending JPH08159212A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33020494A JPH08159212A (en) 1994-12-06 1994-12-06 Vibration absorbing device using piezoelectric element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33020494A JPH08159212A (en) 1994-12-06 1994-12-06 Vibration absorbing device using piezoelectric element

Publications (1)

Publication Number Publication Date
JPH08159212A true JPH08159212A (en) 1996-06-21

Family

ID=18230010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33020494A Pending JPH08159212A (en) 1994-12-06 1994-12-06 Vibration absorbing device using piezoelectric element

Country Status (1)

Country Link
JP (1) JPH08159212A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0926387A3 (en) * 1997-12-26 2001-04-18 United Technologies Corporation Method and apparatus for damping vibration in turbomachine components
KR20050046134A (en) * 2003-11-13 2005-05-18 현대자동차주식회사 Apparatus reducing shock of shift lever device in manual transmission
DE102005023072B3 (en) * 2005-04-29 2006-09-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Wolf tones reducing device for stringed bowed instrument, has multi-functional material that causes transformation of mechanical vibrational energy into electrical energy in case of vibrational stimulation by wolf tone at instrument
JP2011169382A (en) * 2010-02-17 2011-09-01 Mitsubishi Heavy Ind Ltd Vibration reducing device and vibration reducing method
JP2012180926A (en) * 2011-02-28 2012-09-20 Institute Of National Colleges Of Technology Japan Impact reducing device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0926387A3 (en) * 1997-12-26 2001-04-18 United Technologies Corporation Method and apparatus for damping vibration in turbomachine components
US6299410B1 (en) 1997-12-26 2001-10-09 United Technologies Corporation Method and apparatus for damping vibration in turbomachine components
KR20050046134A (en) * 2003-11-13 2005-05-18 현대자동차주식회사 Apparatus reducing shock of shift lever device in manual transmission
DE102005023072B3 (en) * 2005-04-29 2006-09-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Wolf tones reducing device for stringed bowed instrument, has multi-functional material that causes transformation of mechanical vibrational energy into electrical energy in case of vibrational stimulation by wolf tone at instrument
JP2011169382A (en) * 2010-02-17 2011-09-01 Mitsubishi Heavy Ind Ltd Vibration reducing device and vibration reducing method
US9387925B2 (en) 2010-02-17 2016-07-12 Mitsubishi Heavy Industries, Ltd. Vibration reduction device and vibration reduction method
JP2012180926A (en) * 2011-02-28 2012-09-20 Institute Of National Colleges Of Technology Japan Impact reducing device

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