JPH08155935A - Production of ceramic sheet provided with slits and slit processing blade attaching block used therein - Google Patents

Abstract

PURPOSE: To apply slit processing to the area between narrow window parts with good dimensional accuracy by forming slits to a green sheet using a slit processing jig and subsequently forming the window parts by using a window part processing jig. CONSTITUTION: At first, a green sheet 67 is supplied to the upper surface of a first table 65. A plurality of blocks having an inverted recessed shape and having predetermined slit processing blades inserted therein are provided and a first mold 12 having four reference hole processing punches inserted therein are further mounted on the upper mold holder part 71 corresponding to a first table 65 to form slits and reference holes 11. Next, the green sheet 67 having the slits and the reference holes formed thereto is fed to a second table 67 and the positioning pins 20 of the second table 67 are inserted in the reference holes 11. Next, window parts are formed by the second mold 13 mounted on the upper holder part 71 corresponding to the second table 67. Therefore, slits with predetermined depth can be processed at predetermined positions with good dimensional accuracy.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming slits having a high dimensional accuracy between the windows of a ceramic sheet having a plurality of windows formed at narrow intervals. For example, the manufacture of a ceramic diaphragm structure. A method, particularly a method for advantageously producing a ceramic diaphragm structure characterized by the shape of a thin diaphragm portion, and a slitting jig used for the production.

[0002]

2. Description of the Related Art First, a ceramic diaphragm structure which is the background of the present invention will be described. Conventionally, a structure having a base body having at least one window portion as a support body and covering such a window portion with a flexible thin film material to form a diaphragm has been used as a component member of various sensors. In recent years, it has been receiving attention as a constituent member of a piezoelectric / electrostrictive actuator. For example,
When used as a sensor constituent member, the diaphragm displacement of such a diaphragm structure is configured to be detected by a suitable detecting means for the bending displacement received by the object to be measured. When used as a constituent member of a strain actuator, the diaphragm portion of such a diaphragm structure is piezoelectric /
It is deformed by the electrostrictive element and used so as to generate a pressure in the pressurizing chamber formed inside the structure.

Thus, such a diaphragm structure is manufactured by integrally assembling a base body as a support constituting the diaphragm structure and a membrane member providing the diaphragm. It is considered that such a diaphragm structure is composed of an integrally fired body of ceramics from the viewpoint of the reliability of the dynamic structure, heat resistance and corrosion resistance, and the like. 62-129360 (Japanese Patent Laid-Open No. 63-292032) and Japanese Patent Application No. 3-204845 (Japanese Patent Laid-Open No. 5-20545)
49270) etc., a pressure detector or a piezoelectric / piezoelectric / piezoelectric structure using a ceramic diaphragm structure obtained by integral firing.
The electrostrictive actuator was clarified.

By the way, the ceramic diaphragm structure obtained by such integral firing is generally
It is obtained by firing an integral laminate of a ceramic green base having a predetermined shape having a window and a thin ceramic green sheet covering the window. When a plurality of actuating parts are provided on the same substrate surface to form an element, as shown in FIG. 6, when only the actuating part (33) is actuated, the thin part bends downward. At that time, the thick portion is slightly deformed, and the thin portion is effectively bent.
However, when the adjacent actuating parts are simultaneously actuated, the thin portions (26) provided in the respective actuating portions are continuously formed via the thick portion (28), so that the pulling forces act on each other and the thin portion Bending becomes difficult. That is, the displacement is reduced as compared with the case where the element is operated alone, and the characteristics originally possessed by the element cannot be sufficiently exhibited. Therefore,
It has been clarified in Japanese Patent Application No. 5-163945 that the influence between the respective operating parts can be avoided by providing the thick part (28) with the slit (24) as shown in FIG.

5 to 8 are explanatory views of a diaphragm structure to which the manufacturing method of the present invention is applied. In FIG. 8, (5
3) is a plate-shaped first ceramic member in a green sheet state, (51) is a thin, flat plate-shaped second ceramic member in a green sheet state, and (55) is a green sheet. It is a plate-shaped third ceramic member in the state. The second ceramic member (51) is provided on the surface of the first ceramic member (53).
And the third ceramic member (5
5) are laminated. Then, the laminated ceramic members are fired and integrated to form a ceramic substrate (57).
Next, the second slits are processed so as to communicate with the respective first slits (59) on the outer surface of the ceramic substrate (57) so as to communicate with the first slits (59), and the target structure is obtained. To complete. FIG. 7 is a cross-sectional view of the completed structure taken along the line AA in FIG. The first slit (59) and the second slit form the final slit (24) as shown.

In the prior art for making slits in ceramics as described above, a method of making slits in a ceramic green sheet with a mold and the ceramic sheet after firing using first, second and fourth harmonics, etc. It is conceivable to use a method of slitting with a laser such as YAG, excimer, carbon dioxide gas, dicing, slicing, or ultrasonic machining.

[0007]

The above-mentioned prior art has the following drawbacks. In the method of forming a slit with a die, the slitting blade is inserted into a rectangular mounting hole provided on the plate of the die. Therefore, the positional accuracy of the slit processing blade is determined by the positional accuracy of the mounting hole and the mutual accuracy of the mounting hole and the slit processing blade. With respect to the accuracy of the integration, when the thickness of the slitting blade as the object of the present invention is 200 μm or less, the squareness of the corner of the mounting hole becomes a problem. For example, in the case of a blade having a width of 130 μm as shown in FIG. 4, even if the corner of the mounting hole is machined at 50 μmR and a chamfered slit processing blade is fitted, the curvature of the corner with respect to the width of the mounting hole is large and the straight line portion is only 30 μm Since it only touches, accurate mating cannot be performed. Even if a corner is processed using a wire-cut electric discharge machine capable of high-accuracy processing, it is not easy to set the angle to 50 μmR or less.

In the method of forming a slit with a laser such as YAG, it is necessary to repeatedly scan the same portion in order to obtain a required slit depth. Further, in the case of a multi-cavity substrate, since position variations due to shrinkage during firing occur, a plurality of windows are formed at narrow intervals, and in order to form slits between the windows with good positional accuracy, each location should be provided. Alignment is required. Therefore, expensive equipment is used and the productivity is low. Similar to the above, machining such as dicing requires alignment at each position in order to form slits with high positional accuracy, resulting in low productivity.

Therefore, the inventors of the present invention manufacture a ceramic sheet having high productivity, low cost, a plurality of window portions formed at narrow intervals, and slits having good dimensional accuracy provided between the window portions. Researched the method. The process initially examined is
First, a window was formed on a solid green sheet, and then a slit was formed. However, it was extremely difficult to slit the narrow window portions with high dimensional accuracy.

[0010]

In the method of manufacturing a ceramic sheet according to the present invention, in which a plurality of windows are formed at a narrow interval and slits with good dimensional accuracy are provided between the windows, a slit processing is performed on a green sheet. A first step of forming a slit using a jig for forming a window and a second step of forming a window using a jig for processing a window are provided, and a second step is performed after the first step. It is something to do.

In a preferred embodiment of the above-described manufacturing method according to the present invention, there is a progressive die for each of the processing jigs in the first step and the second step.

Here, the progressive die is a combination of a first die used in the first step and a second die used in the second step, as shown in FIG. Attached to two holders, a slit is formed in the green sheet on the first table corresponding to the first mold, and then the green sheet is attached to the second table corresponding to the second mold. It is one that is conveyed upward and forms a window.

In the slitting blade mounting block of the present invention, the lower surface of the rectangular parallelepiped is formed with the first groove having a cross-sectionally concave shape in the longitudinal direction, and the width of the first groove is the slitting blade. It has the same dimension as the length, the side walls of the first groove are formed in parallel to each other, and on the lower surface of the surface on which the first groove is formed, with respect to the longitudinal direction of the first groove, A plurality of second grooves having a width having the same dimension as the thickness of the slitting blade are provided at a predetermined interval in the perpendicular direction,
The side walls of the second groove are formed parallel to each other, and the second groove penetrates to the first groove.

[0014]

In the method of manufacturing a ceramic sheet in which a plurality of windows are formed at narrow intervals, and slits with good dimensional accuracy are provided between the windows, slits are formed in the green sheet, and then the windows are formed. By adopting this process order, it is possible to easily provide the slits with good dimensional accuracy between the narrow window portions. This is because when the slit is formed on the solid green sheet, the green sheet itself does not shift with respect to the pressure of the slit processing blade. In addition,
If you try to form a slit after forming a window on a solid green sheet, the shape of the green sheet is composed of multiple windows at narrow intervals, and because of its low rigidity, against the pressure of the slitting blade, The green sheet itself is displaced, and it is difficult to obtain a predetermined slit position, slit depth, and other dimensions. Further, labor saving can be achieved by using the progressive die. As shown in FIG. 2, the machining blade mounting block of the present invention can cut the first groove and the second groove into which the blade is inserted from the open end. Therefore, even if a normal machine is used, the first groove can be cut. And the dimensional accuracy of the second groove can be obtained with normal machine accuracy and can be easily machined, and the squareness of the corners of the rectangular mounting hole affects the accuracy of insertion. , The positions (X, Y) of the slitting blades are determined on the side surfaces of the first groove and the second groove, which have a high angle right angle accuracy, respectively, and the accuracy of slitting between the groove and the slitting blade and the slitting processing. The dimensional accuracy between the blades can also be improved.

[0015]

EXAMPLES Next, a method of manufacturing a ceramic sheet according to the present invention, in which a plurality of windows are formed at a narrow interval and slits with high dimensional accuracy are provided between the windows, will be described based on examples. In this embodiment, the present invention is applied to the first slit (5
It is applied to the processing of 9). A description will be given based on FIGS. 1 to 3. First, a green sheet is supplied onto the first table (65). The size of the green sheet is 4
It was set to 0 mm × 45 mm × 0.3 mmt. The slit processing blade (10) has a thickness of 130 μm, and the slit processing blade (10) is provided with 12 reverse recessed blocks (1) in which 31 pieces are inserted at a pitch of 600 μm. The first mold with four processing punches inserted,
The upper mold holder part (71) corresponding to the first table (65) was mounted. The slits formed in the green sheet have a slit width of 30 μm and a depth of 90 as shown in FIG.
μm. The diameter of the reference hole was 3 mm, and one was formed at each of the four corners of the green sheet. Next, the green sheet (73) processed with slits and reference holes is conveyed to the second table (67), and the positioning pins (20) of the second table (67) are inserted into the reference holes. Next, 450 μm × by the second die attached to the upper die holder part (71) corresponding to the second table (67).
120 windows of 7,000 μm were formed. Therefore,
As shown in FIGS. 1 and 3, the slit is formed in the center between the windows having a width of 150 μm.

[0016]

As is apparent from the above description, in the method of manufacturing a ceramic sheet having slits according to the present invention, after slitting, the window is punched to obtain a predetermined depth at a predetermined position. Size slits can be processed with high dimensional accuracy, and a large number of rows of slits can be processed on the green sheet at the same time to greatly improve productivity. A laser processing machine is no longer required, which enables a significant cost reduction. The slitting blade mounting block of the present invention facilitates positioning of the machining blades by providing individual reference planes in the XY directions, and the reference planes can be obtained by ordinary machining, and slit machining This is extremely useful because it can be manufactured at a low cost with good accuracy in the integration of the blade and the groove and dimensional accuracy between the slitting blades.

[Brief description of drawings]

FIG. 1 is a schematic side view of a progressive die and a simplified view of a green sheet processing state.

FIG. 2 is a perspective view of a block of a slitting blade.

FIG. 3 is a schematic partial cross-sectional view of a slit and a window-processed green sheet according to an embodiment of the present invention.

FIG. 4 is a schematic view of a slit processing blade mounting hole end portion in the case of a conventional die.

FIG. 5 is an element used in an example of the manufacturing method of the present invention.

FIG. 6 is an explanatory view of a conventional element in which a slit is not formed.

FIG. 7 is a partial sectional view taken along the line AA of the device of FIG.

FIG. 8 is an explanatory diagram showing the structure of a ceramic substrate.

[Explanation of symbols]

1 Block of reverse concave shape 2 1st groove 3 2nd groove 10 Slit processing blade 11 Reference hole 12 1st metal mold 13 2nd metal mold 14 Window punching punch 16 Punch for forward position determination 18 Slit processing blade Block 20 Positioning pin 22 Element 24 Slit 26 Thin portion 28 Thick portion 32, 33 Working portion 51 First ceramic member 53 Second ceramic member 55 Third ceramic member 57 Ceramic substrate 59 First slit 63 Window 65th Table 1 of 1 67 Second table 71 Upper die holder 73 Green sheet with slits and reference holes 77 Green sheet with windows

Claims (3)

[Claims] 1. A method of manufacturing a ceramic sheet having a plurality of windows formed at narrow intervals and having slits between the windows, wherein slits are formed on a green sheet by using a slitting jig. The first step and the second step of forming the window using the jig for processing the window are provided.
The method for producing a ceramic sheet having slits, which comprises performing the second step after the step. 2. The method for producing a ceramic sheet provided with slits according to claim 1, wherein the processing jigs in each of the first step and the second step are progressive die. 3. A rectangular parallelepiped has a lower surface on which a first groove having a cross-section of an inverted concave shape is formed in the longitudinal direction, and the width of the first groove is the same as the slitting blade length. The side walls of the first groove are formed in parallel to each other, and on the upper surface of the surface on which the first groove is formed, in the direction perpendicular to the longitudinal direction of the first groove, A plurality of second grooves having a width having the same dimension as the thickness are provided at predetermined intervals, the side walls of the second grooves are formed in parallel with each other, and the second grooves penetrate to the first groove. A blade mounting block for slit processing, characterized in that