JPH08153492A - Dielectric barrier discharge lamp device - Google Patents

Abstract

PURPOSE: To decrease fluctuation of light output, so as to make the uniform irradiation, and also to decrease eximer laser radiation to an object other than an object to be processed, so as to effectively radiate the eximer laser only to the object to be processed. CONSTITUTION: In dielectric barrier discharge lamp devices 1a, 1b, 1c, 1d projecting beams on the same surface as a rectangular light take-out window 20, both ends 100, 101 of a conductive mesh electrode 110 exist outside the window 20. The shortest distance L1 , L2 between the ends 100, 101 of the electrode 110 projecting beams on the same surface as the window 20 and the positions 102, 103 very near to the ends 100, 101 of the sides of the window 20, intersecting shafts of the lamps 1a, 1b, 1c, 1d are set to 0.5 times or more of the outside diameters of the lamps 1a, 1b, 1c, 1d. The ends 111, 112, of the lamps 1a, 1b, 1c, 1d are covered by the window 20, as result, the uniform irradiated surface can be obtained without fluctuation of irradiation on the irradiated surface even if the radiant intensity is fluctuated on the parts 111, 112 in time, and even if the radiant intensity is varied.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is, for example, a type of ultraviolet light source device for photochemical reaction, which is a so-called dielectric barrier that forms excimer molecules by dielectric barrier discharge and utilizes light emitted from the excimer molecules. The present invention relates to improvement of a dielectric barrier discharge lamp device using a discharge lamp, for example, a dry cleaning device for a silicon wafer.

[0002]

2. Description of the Related Art As a technique related to the present invention, for example, there is JP-A-1-144560.
There, the discharge vessel is filled with a discharge gas that forms excimer molecules, and a dielectric barrier discharge (also known as ozonizer discharge or silent discharge. Revised new edition "Discharge Handbook" published by the Institute of Electrical Engineers of Japan, June 1st, 7th edition, 7th edition (See page 263)
A dielectric barrier discharge lamp that utilizes light emitted from the excimer molecule to form an excimer molecule by means of the discharge vessel is cylindrical and at least a portion of the discharge vessel is Described is a cylindrical dielectric barrier discharge lamp which also serves as a dielectric of a dielectric barrier discharge, the dielectric is light transmissive, and a conductive mesh electrode is provided on at least a part of the dielectric. . Further, it is described that a rare gas or a mixed gas of a rare gas and a halogen can be used as the discharge gas.

An outline of a general dielectric barrier discharge will be described below with reference to FIG. 7, which is a schematic view of a cylindrical dielectric barrier discharge lamp. The discharge vessel 1 having an outer diameter Z is made of glass, which is a dielectric, and has an inner tube 2 and an outer tube 3 arranged coaxially to form a hollow cylinder. On the outer surface of the outer tube 3, an outer electrode 4 for light-transmitting dielectric barrier discharge is provided.
Inner electrodes 5 for dielectric barrier discharge, which also function as light reflecting films formed by vapor deposition of aluminum, are provided on the outer surfaces of the respective. Further, a getter 7 is provided at one end of the discharge vessel 1.
There is a getter chamber 6 for storing the. A discharge space 8 is formed between the inner surface of the outer tube 3 facing the electrode 4 and the inner surface of the inner tube 2 facing the electrode 5. When the discharge space 8 is filled with a discharge gas that forms excimer molecules by dielectric barrier discharge and a voltage is applied to the electrodes 4 and 5 by the AC power supply 10, a dielectric barrier discharge is stably generated in the discharge space 8 and excimer light is emitted. Is released. The getter 7 has a function of removing the impure gas (for example, H ₂ O) in the discharge space 8 to stabilize the discharge.

In a normal arc discharge generated by an arc discharge lamp of medium or high pressure of several tens of torr or more, there is only one discharge plasma in the discharge space, and one small electrode bright spot is generated on the electrode surface. ing. That is,
Even if the area of the electrode is increased, the portion that substantially functions as the electrode is a very small portion, and there is only one discharge plasma. On the other hand, as described in the above discharge handbook, in the dielectric barrier discharge, the dielectric is inserted in the discharge path. Since this dielectric prevents the discharge plasma from converging in a single line, a very small discharge plasma with a very small plasma diameter and a very short discharge duration (hereinafter referred to as microplasma) is discharged. There will be many in the space evenly. Therefore, the cylindrical dielectric barrier discharge lamp has the characteristic that many microplasma of multiple lines are evenly present. Therefore, multiple cylindrical dielectric barrier discharge lamps can be connected in parallel and turned on by a single power supply. It becomes possible to do. This is not possible with conventional discharge lamps.

[0005]

The cylindrical dielectric barrier discharge lamp as described above is useful because it has various features that conventional glow discharge lamps and arc discharge lamps do not have. In particular, when the discharge vessel is formed into a substantially cylindrical shape and the internal electrode is provided inside the discharge vessel substantially coaxially with the discharge vessel, a commercially available glass tube, a ceramic tube or the like can be diverted and the structure Since it is also simple, it is easy to manufacture, and thus there is an advantage that a cylindrical dielectric barrier discharge lamp can be provided at low cost.

However, the present inventors have experimentally found that the conventional cylindrical dielectric barrier discharge lamp has the following drawbacks. The first drawback will be described below. In a cylindrical dielectric barrier discharge lamp, the discharge may become unstable at the ends, and as a result, the light output may become unstable. Furthermore, variations in light output due to individual lamps may also occur in the central part. It was found that the edge was remarkably large in comparison. As a result, in the vicinity of the edge, the irradiance fluctuates with time, or the irradiance varies greatly when the lamp is replaced, and it becomes impossible to obtain a uniform irradiation surface, and it With high accuracy,
The drawback is that it is difficult to process uniformly.

Although the above-mentioned cause is not always clear, it seems to be as follows. That is, at the end portion of the cylindrical dielectric barrier discharge lamp, the electric field strength remarkably changes depending on the axial position and the radial position, and as a result, the discharge becomes unstable and the light output fluctuates.
Also, at the end of the cylindrical dielectric barrier discharge lamp, the electric field strength changes significantly due to a slight difference in the shapes of the ends of the outer electrode 4 and the inner electrode 5, and as a result, the discharge state changes and the light output It is considered that variations occur.

The second drawback will be described below. It is well known that when the discharge gas is xenon, excimer light having a center at a wavelength of 172 nm, when krypton is at a wavelength of 146 nm, and when a gas mixture of argon and chlorine is at a wavelength of 175 nm, excimer light is emitted. . In addition to the excimer light from the excimer molecules of the rare gas and halogen, which is the main emission, we also obtain the vacuum ultraviolet light from the rare gas excimer when the discharge gas consisting of a mixed gas of a rare gas and a halogen is used. It was found to be released. For example, it was discovered that when a mixed gas of xenon and chlorine is used, in addition to the emitted light with a wavelength of 308 nm, which is the main emission, light with a wavelength of 172 nm due to xenon excimers is also emitted.
That is, a dielectric barrier discharge lamp using a discharge gas composed of a rare gas or a mixed gas of a rare gas and a halogen emits light in the vacuum ultraviolet region.

The above-mentioned light in the vacuum ultraviolet region decomposes organic substances directly or generates ozone from oxygen in the air, as compared with ultraviolet light emitted from a conventional low-pressure mercury lamp or the like, and the ozone is a metal. It has been experimentally revealed that the effect of corroding etc. is remarkably strong and therefore various parts are damaged or destroyed. Therefore, when performing the treatment by irradiating the object to be processed with excimer light using a light source device having a built-in dielectric barrier discharge lamp using a discharge gas composed of a rare gas or a mixed gas of a rare gas and halogen, It has been clarified that the above-mentioned inconvenience occurs when an object other than the target object to be processed is irradiated with light.

The present invention has been made in view of the above circumstances, and its object is to provide at least a light-transmissive discharge container having a substantially cylindrical outer shape, and at least an outer surface of the discharge container. Conductive reticulated electrode provided on part of the entire circumference,
A cylindrical shape composed of an inner electrode provided inside the conductive reticulated electrode substantially coaxially with the discharge vessel, and a discharge gas composed of a rare gas or a mixed gas of a rare gas and a halogen, filled in the discharge vessel. A dielectric barrier discharge lamp, and a lamp house having the cylindrical dielectric barrier discharge lamp, which has a light extraction window for extracting excimer light emitted from excimer molecules formed by the dielectric barrier discharge,
In a dielectric barrier discharge lamp device equipped with a power supply for performing a dielectric barrier discharge, there is little fluctuation in light output,
Provided is a highly reliable dielectric barrier discharge lamp device capable of obtaining uniform irradiance, less irradiating an object other than an object to be processed with excimer light, and efficiently irradiating only an object to be processed with excimer light. That is.

[0011]

In order to solve the above-mentioned problems, the invention of claim 1 of the present invention is directed to at least one of a light-transmissive discharge vessel having a substantially cylindrical outer shape and an outer surface of the discharge vessel. Part of the conductive mesh electrode, an inner electrode provided inside the conductive mesh electrode substantially coaxially with the discharge vessel, a rare gas filled in the discharge vessel, or a rare gas and a halogen. And a cylindrical dielectric barrier discharge lamp comprising a discharge gas composed of a mixed gas of, and a light extraction window for taking out excimer light emitted from excimer molecules formed by the dielectric barrier discharge. In a dielectric barrier discharge lamp device equipped with a lamp house for accommodating a barrier discharge lamp and a power supply for performing dielectric barrier discharge, the light extraction window is rectangular and is the same as the rectangular window. Both ends of the conductive reticulated electrode of each lamp projected onto the outside of the rectangular window, and the end of the conductive reticulated electrode projected onto the same plane as the rectangular window and the cylinder. Of the sides of the rectangular window intersecting the axis of the rectangular dielectric barrier discharge lamp with the sides (OP) and (QR) closest to the respective ends are the outer diameter Z of the cylindrical dielectric barrier discharge lamp. Of 0.5 times or more.

According to a second aspect of the present invention, a light-transmissive discharge vessel at least having a substantially cylindrical outer shape, and a conductive reticulated electrode provided on the entire circumference of at least a part of the outer surface of the discharge vessel, A cylindrical shape composed of an inner electrode provided inside the conductive reticulated electrode substantially coaxially with the discharge vessel, and a discharge gas composed of a rare gas or a mixed gas of a rare gas and a halogen, filled in the discharge vessel. A dielectric barrier discharge lamp, a lamp house having a cylindrical dielectric barrier discharge lamp having a light extraction window for extracting excimer light emitted from excimer molecules formed by the dielectric barrier discharge, and a dielectric barrier In a dielectric barrier discharge lamp device equipped with a power supply for discharging, the light extraction window is formed into a substantially circular shape, and the conductivity of each lamp is projected on the same plane as the substantially circular window. Both ends of the electrode are present outside the substantially circular window, and the ends of the conductive mesh electrode projected on the same plane as the substantially circular window, and the substantially circular window. The shortest distance from the intersection of the cylindrical dielectric barrier discharge lamp closest to the end is 0.5 times or more the outer diameter Z of the cylindrical dielectric barrier discharge lamp.

The invention according to claim 3 of the present invention is the cylindrical dielectric barrier discharge lamp according to any one of claims 1 and 2, wherein three or more of the cylindrical dielectric barrier discharge lamps are arranged in parallel. A group of two or more power supplies, and the cylindrical dielectric barrier discharge lamps farthest from each other in the group of cylindrical dielectric barrier discharge lamps are connected in parallel to one of the power supplies. It is configured to be connected to.

According to a fourth aspect of the present invention, in the second aspect of the present invention, a cylindrical dielectric barrier discharge lamp group is constituted by three or more cylindrical dielectric barrier discharge lamps having different lengths, and All of the cylindrical dielectric barrier discharge lamps are connected in parallel to one power source.

According to a fifth aspect of the present invention, in any one of the first or third aspect of the invention, at least the side of the rectangular light extraction window orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp. (OP) and one end of each of the conductive mesh electrodes projected on the same plane as the rectangular window, and of the rectangular light extraction window orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp. Between the side (QR) and each of the other ends of the conductive mesh electrode projected on the same plane as the rectangular window, at least the cylindrical dielectric barrier discharge lamp and the rectangular light extraction window. A light reflection plate is provided between them so as to intersect with the central axis of the cylindrical dielectric barrier discharge lamp or, optimally, extend in a direction orthogonal thereto.

According to a sixth aspect of the present invention, in any one of the second or fourth aspect of the invention, at least the periphery of the substantially circular window and one end of each of the conductive mesh electrodes are provided. Between the closest intersection and the end of the conductive mesh electrode projected on the same plane as the substantially circular window, and the vicinity of the substantially circular window and the other end of the conductive mesh electrode. Between the intersecting intersections, and at least between the cylindrical dielectric barrier discharge lamp and the substantially circular light extraction window, light that extends in a direction intersecting the central axis of the cylindrical dielectric barrier discharge lamp. This is a structure provided with a reflection plate.

[0017]

According to the first aspect of the present invention, a light-transmissive discharge vessel having at least a substantially cylindrical outer shape, and a conductive reticulated electrode provided on at least a part of the outer surface of the discharge vessel. A cylinder composed of an inner electrode provided inside the conductive reticulated electrode substantially coaxially with the discharge vessel, and a discharge gas composed of a rare gas or a mixed gas of a rare gas and a halogen, filled in the discharge vessel. -Shaped dielectric barrier discharge lamp,
A lamp house for housing the cylindrical dielectric barrier discharge lamp having a light extraction window for extracting excimer light emitted from excimer molecules formed by the dielectric barrier discharge, and a power supply for performing the dielectric barrier discharge are provided. In the provided dielectric barrier discharge lamp device, since the light extraction window has a rectangular shape, the rectangular object to be processed such as a glass plate for a liquid crystal display device is irradiated with excimer light to an object other than the object to be processed. It is possible to irradiate only the object to be processed with the excimer light without doing so.

As shown in the embodiment of FIGS. 1 and 2,
For each lamp 1a, 1b, 1c, 1d projected on the same plane as the rectangular light extraction window 20, both ends 100, 101 of the conductive mesh electrode 110 are present outside the rectangular light extraction window 20. And the rectangular light extraction window 20
End portions 100 and 101 of the conductive reticulated electrode 110 and the cylindrical dielectric barrier discharge lamp 1 projected on the same plane as
The shortest distances L ₁ and L ₂ to the positions 102 and 103 immediately adjacent to the ends 100 and 101 of the sides (OP) and (QR) of the rectangular window 20 intersecting the axes of a, 1b, 1c and 1d are Since the outer diameter Z of the cylindrical dielectric barrier discharge lamp is 0.5 times or more, the end portions 111, 112 of the cylindrical dielectric barrier discharge lamp are formed by the rectangular light extraction window 20.
Are shielded, and as a result, the radiation intensity fluctuates temporally at the ends 111 and 112 of the cylindrical dielectric barrier discharge lamp, and even if the radiation intensity fluctuates, there is little fluctuation in the irradiance on the irradiation surface, Moreover, it becomes possible to obtain a uniform irradiation surface.

For each lamp 1a, 1b, 1c, 1d, the side (O
If the shortest distances L ₁ and L ₂ to P) and (QR) are set to be 1.0 times or more the outer diameter Z of the cylindrical dielectric barrier discharge lamp, the light utilization rate will be slightly reduced, but the above-mentioned effect will be obtained. Becomes even more pronounced.

According to a second aspect of the present invention, a light-transmissive discharge vessel having a substantially cylindrical outer shape,
A conductive reticulated electrode provided on the entire circumference of at least a part of the outer surface of the discharge vessel, an inner electrode provided inside the conductive reticulated electrode substantially coaxially with the discharge vessel, and filled in the discharge vessel A cylindrical dielectric barrier discharge lamp made of a rare gas or a discharge gas made of a mixed gas of a rare gas and a halogen, and a light extraction window for taking out excimer light emitted from excimer molecules formed by the dielectric barrier discharge. In the dielectric barrier discharge lamp device including a lamp house that houses the cylindrical dielectric barrier discharge lamp, and a power supply for performing a dielectric barrier discharge, since the light extraction window has a substantially circular shape, A disk-shaped object to be processed such as a silicon wafer or an object to be processed mounted on a rotating sample holder is processed without irradiating an object other than the object to be processed with excimer light. It can be irradiated with the excimer light only to things.

As shown in the embodiment of FIGS. 3 and 4,
The light extraction window 20 has a substantially circular shape, and the substantially circular window 2
Each lamp 1a, 1b, 1c, 1d projected on the same plane as 0
With respect to both ends 100, 1 of the conductive reticulated electrode 110.
Reference numeral 01 denotes the conductive reticulated electrode 1 existing outside the substantially circular window 20 and projected on the same plane as the substantially circular window 20.
10, the ends 100 and 101, and the substantially circular window 20.
And said end 100 of said cylindrical dielectric barrier discharge lamp,
The shortest distance L to the intersections 102 and 103 that are closest to 101
_{Since 1} and L ₂ are configured to be 0.5 times or more of the outer diameter Z of the cylindrical dielectric barrier discharge lamp, the end portions 111 and 11 of the cylindrical dielectric barrier discharge lamp are formed by the substantially circular window 20.
2 is shielded, and as a result, even if the radiant intensity fluctuates temporally at the ends 111 and 112 of the cylindrical dielectric barrier discharge lamp, or even if the radiant intensity varies, there is little fluctuation in the irradiance on the irradiation surface. It is possible to obtain a uniform irradiation surface.

For each lamp 1a, 1b, 1c, 1d, the outer electrode ends 100, 101, the generally circular window 20 and the end 10 of the cylindrical dielectric barrier discharge lamp.
If the shortest distances L ₁ and L ₂ to the intersections 102 and 103 closest to 0 and 101 are set to 1.0 times or more of the outer diameter Z of the cylindrical dielectric barrier discharge lamp, the light utilization rate is slightly reduced. However, the effect described above becomes more remarkable.

According to a third aspect of the present invention, in the first or second aspect of the invention, three or more of the cylindrical dielectric barrier discharge lamps are arranged in parallel to each other to form a cylindrical dielectric barrier discharge. The cylindrical dielectric barrier discharge lamps forming the lamp group, the power sources being two or more, and the furthest away from each other in the cylindrical dielectric barrier discharge lamp group, that is, the rectangular window. Alternatively, since the two cylindrical dielectric barrier discharge lamps located at the end of the substantially circular window are connected in parallel to one of the power supplies, the end of the light extraction window on the irradiated surface is In general, the irradiance is low in many cases, but the light output of the cylindrical dielectric barrier discharge lamps at both ends can be varied by adjusting the output of the one power source. Advantage of either invention of 2 In addition to a cylindrical dielectric barrier discharge lamp device more uniform irradiance can be obtained is obtained.

According to a fourth aspect of the present invention, in the second aspect of the invention, a cylindrical dielectric barrier discharge lamp group is constituted by three or more cylindrical dielectric barrier discharge lamps having different lengths, Moreover, since all of the cylindrical dielectric barrier discharge lamps are connected in parallel to one power source, for example, the longest cylindrical dielectric barrier discharge lamp is provided in the diameter portion of the circular light extraction window. By arranging and arranging shorter cylindrical dielectric barrier discharge lamps on both sides thereof, in addition to the advantages of the invention of claim 2, irradiance equivalent to that of the invention of claim 2 is obtained with less electrical input, Further, a compact cylindrical dielectric barrier discharge lamp device can be obtained.

Before explaining the operation of the invention of claim 5 of the present invention, the unique light distribution of the cylindrical dielectric barrier discharge lamp discovered by the present inventors will be described. The inventors of the present invention have at least an outer shape of a light-transmissive discharge vessel having a substantially cylindrical shape, a conductive reticulated electrode provided on the entire circumference of at least a part of the outer surface of the discharge vessel, and an inner side of the conductive reticulated electrode. A cylindrical dielectric barrier discharge lamp consisting of an inner electrode provided substantially coaxially with the discharge vessel, a rare gas filled in the discharge vessel, or a discharge gas comprising a mixed gas of a rare gas and a halogen, A lamp house for housing the cylindrical dielectric barrier discharge lamp having a light extraction window for extracting excimer light emitted from excimer molecules formed by the dielectric barrier discharge, and a power supply for performing the dielectric barrier discharge are provided. In the provided dielectric barrier discharge lamp device, a detailed study was carried out on the light distribution of the above-mentioned lamp. As a result, there was a light distribution unique to a cylindrical dielectric barrier discharge lamp. Both were discovered. FIG. 8 is an explanatory view of the light distribution, in which the light distribution of a straight-tube fluorescent lamp or a halogen lamp is in a direction perpendicular to the tube axis of the lamp, that is, θ is π /
In contrast to the circular curve 81 whose diameter is the light output in the direction of 2, the light distribution of the dielectric barrier discharge lamp has a θ of 0.
And a distribution 82 in which the light output is larger than the circular distribution in the vicinity of π. That is, in the dielectric barrier discharge lamp, the proportion of light emitted in the direction close to the tube axis is higher than that in a fluorescent lamp. Therefore, in the dielectric barrier discharge lamp, the rate of escape of light from the tube end direction is larger than that in a fluorescent lamp or the like. This is a phenomenon peculiar to the cylindrical dielectric barrier discharge lamp.

According to a fifth aspect of the present invention, in any one of the first or third aspects of the present invention, at least the rectangular light extraction window that is orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp is provided. One end 1 of each of the conductive mesh electrodes projected on the same plane as the side (OP) and the rectangular window.
00 and the side (QR) of the rectangular light extraction window orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp and the other of the conductive mesh electrodes projected on the same plane as the rectangular window. Light reflection extending between the end portions 101 and at least between the cylindrical dielectric barrier discharge lamp and the rectangular light extraction window in a direction orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp. Since the plate is provided, in addition to the advantages of the invention of claim 1 or 3,
Since the light leakage from the tube end is reduced, the vacuum ultraviolet light is less irradiated to the extra portion, and the light escaping from the tube end direction is reflected toward the light extraction window 20 so that the vacuum ultraviolet light is emitted. The advantage is that the light extraction efficiency is increased.

According to a sixth aspect of the present invention, in any one of the second or fourth aspect of the invention, at least the periphery of the substantially circular window 20 and the cylindrical dielectric barrier discharge lamp are provided. Intersection 1 closest to the end 100 of the outer electrode
02 and the end portion 100 of the conductive mesh electrode projected on the same plane as the circular window, and around the substantially circular window 20 and the end portion 1 of the outer electrode of the cylindrical dielectric barrier discharge lamp.
01 between the intersections 103 closest to each other and at least between the cylindrical dielectric barrier discharge lamp and the substantially circular light extraction window in a direction intersecting the central axis of the cylindrical dielectric barrier discharge lamp. Since the light reflecting plate is provided so as to extend, in addition to the advantages of the invention of either claim 2 or claim 4, the leakage of light from the tube end portion is reduced, so that a vacuum is applied to an extra portion. The irradiation of ultraviolet light is reduced, and further, the light escaping from the tube end direction is reflected toward the light extraction window 20, so that there is an advantage that the extraction efficiency of vacuum ultraviolet light is increased.

[0028]

1 is a schematic view of a dielectric barrier discharge lamp device according to a first embodiment of the present invention. FIG. 1 shows a cylindrical dielectric barrier discharge lamp 1a, 1b, 1c, 1d.
2 is an explanatory view of a cross section viewed from the tube axis direction, and FIG. 2 is an explanatory view viewed from the light extraction window 20 side. The cylindrical dielectric barrier discharge lamps 1a, 1b, 1c and 1d in this embodiment are shown in FIG.
The discharge vessel 1 has a total length of about 300 m.
m made of synthetic quartz glass, the inner tube 2 having an outer diameter of 16 mm and a wall thickness of 1 mm, the outer tube 3 having an outer diameter of about 26.5 mm and a wall thickness of 1 mm
Are coaxially arranged to form a hollow cylinder. The outer tube 3 also serves as a dielectric barrier for a dielectric barrier discharge and a light extraction window member, and an outer electrode 4 made of a metal net that transmits light is provided on the outer surface thereof. The length of the metal mesh in the tube axis direction is 250 mm. Further, on the outer surface of the inner tube 2, there is provided an inner electrode 5 for dielectric barrier discharge which also functions as a light reflecting film formed by vapor deposition of aluminum. A getter housing chamber 6 is provided at one end of the discharge vessel 1 by extending a tube wall of the discharge vessel 1. A barium getter 7 made of barium alloy was housed in the getter housing chamber 6, and the barium getter 7 was heated by high frequency to form a barium thin film in the getter housing chamber. The discharge space 8 was filled with 30 kPa of xenon gas as a discharge gas.

The above-mentioned cylindrical dielectric barrier discharge lamp 1
A, 1b, 1c and 1d were housed in the lamp house 21. Cooling block 22 that doubles as a lamp and a light reflector
An airtight lamp house 21 is formed by the rectangular light extraction window 20 made of synthetic quartz glass having an opening of 220 mm × 220 mm and the side plate 23. The cylindrical dielectric barrier discharge lamps 1a, 1b, 1
The space 26 between c and 1d and the rectangular light extraction window 20 is
It is filled with nitrogen gas injected from the inert gas inlet 24. 25 is a gas discharge port. In this case, in the cylindrical dielectric barrier discharge lamps 1a, 1b, 1c, 1d, the distance L ₁ between the end 100 of the outer electrode made of a metal net and the side OP of the rectangular light extraction window 20 and the end 101 and the rectangular shape. The distances L ₂ between the sides QR of the shape window 20 are all equal to 15 m
m. Around the rectangular light extraction window 20, the size of the opening is 230 mm × 230 mm, and the height is 10 m.
A light reflecting plate 27 made of a hollow prismatic aluminum plate of m was provided.

The cylindrical dielectric barrier discharge lamps 1a and 1b were connected in parallel to the power source 10a, and the cylindrical dielectric barrier discharge lamps 1c and 1d were connected in parallel to the power source 10b.
Here, the outputs of the power supplies 10a and 10b have a frequency of about 1
When the voltage applied to the lamp, which was expressed as a voltage between 3 kHz, the maximum value, and the minimum value, was set to about 12 kV, the dielectric barrier discharge lamps 1a, 1b, 1c, and 1d turned on at about 50 W, respectively, and the xenon excimer molecule Wavelength 1 emitted from
From wavelength 160nm having a maximum value at 72nm to wavelength 18
Vacuum UV radiation in the 0 nm range was emitted. In this case, the cylindrical dielectric barrier discharge lamps 1a, 1b, 1c, 1d
Since the space 26 between the light extraction window 20 and the light extraction window 20 is filled with nitrogen gas, the vacuum ultraviolet rays are not absorbed in the space 26. Therefore, the total of the vacuum ultraviolet rays emitted from the cylindrical dielectric barrier discharge lamps 1a, 1b, 1c, 1d is emitted from the rectangular light extraction window 20, and accordingly, the rectangular light extraction window 20 is The vacuum ultraviolet light source has a substantially rectangular shape.

A 220 mm × 220 mm glass was placed in the air at a distance of about 3 mm from the light extraction window 20 of the above-mentioned dielectric barrier discharge lamp device and irradiated with vacuum ultraviolet rays by the dielectric barrier discharge lamp device. There is little fluctuation in the irradiance near the tube end of the lamp, and therefore a uniform irradiance can be obtained, and as a result, substances other than glass, which is the object to be treated, are exposed to the vacuum ultraviolet light on the glass in a small amount. The organic contaminants could be uniformly removed by oxidation.

A schematic view of a dielectric barrier discharge lamp device according to a second embodiment of the present invention is shown in FIGS. 3 and 4. FIG.
Is a cylindrical dielectric barrier discharge lamp 1a, 1b, 1c, 1
FIG. 4 is an explanatory view of a cross section viewed from the tube axis direction of d, and FIG. 4 is an explanatory view viewed from the light extraction window 20 side. The configuration of the cylindrical dielectric barrier discharge lamp device in this embodiment is such that the light extraction window 20 is circular, and the inner diameter is the diameter of the circular light extraction window 20 instead of the hollow prismatic light reflection plate 27. It is the same as the first embodiment except that the light reflecting plate 31 having the same hollow cylindrical shape is provided. Also in this case, since the space 26 between the cylindrical dielectric barrier discharge lamps 1a, 1b, 1c, 1d and the light extraction window 20 is filled with nitrogen gas, the vacuum ultraviolet rays are not absorbed in the space 26. Therefore, from the light extraction window 20, the cylindrical dielectric barrier discharge lamp 1
The total amount of the vacuum ultraviolet rays emitted from a, 1b, 1c, and 1d is emitted, so that the light extraction window 20 becomes a substantially disk-shaped vacuum ultraviolet ray light source.

8 mounted on a material holder having a diameter of 220 mm
An inch silicon wafer having a diameter of about 200 mm is placed in air at a distance of about 3 mm from the light extraction window 20 of the above-mentioned cylindrical dielectric barrier discharge lamp device, and the cylindrical dielectric barrier discharge lamp device is vacuumed. When irradiated with ultraviolet rays, there is little fluctuation in irradiance near the tube end of the lamp, so uniform irradiance is obtained,
As a result, it was possible to uniformly oxidize and remove the organic contaminants on the silicon wafer in a state where the material other than the silicon wafer, which is the object to be processed, was not irradiated with the vacuum ultraviolet light.

A third embodiment of the present invention is shown in FIG. The configuration of the cylindrical dielectric barrier discharge lamp device in this embodiment is the same as the cylindrical dielectric barrier discharge lamps 1a, 1b, 1
c is 3 and the diameter of the circular light extraction window 20 is 1
Second, except that it is 60 mm and there is no light reflector
The configuration is the same as that of the embodiment. Further, the structure of the cylindrical dielectric barrier discharge lamp is similar to that of the coaxial cylindrical cylindrical dielectric barrier discharge lamp of Example 1, but the cylindrical dielectric barrier discharge lamp 1b has a total length of 250 mm and a metal mesh electrode. Length 200 mm, cylindrical dielectric barrier discharge lamp 1
The total length of a and 1c is 210 mm, the length of the metal mesh electrode is 20
It is 0 mm. In addition, the ends 100 and 101 of the conductive mesh electrode projected on the same plane as the circular light extraction window, and the intersections 102 and 103 of the circular window 20 and the cylindrical dielectric barrier discharge lamp. The shortest distance is 15mm to 30mm
Configured between. The central cylindrical dielectric barrier discharge lamp 1b is connected to the power source 10a, and the cylindrical dielectric barrier discharge lamps 1a and 1c on both ends are connected in parallel to the power source 10b.

In this embodiment, the length of the cylindrical dielectric barrier discharge lamps 1a and 1c at both ends is made equal to that of the light extraction window 20 with which the cylindrical dielectric barrier discharge lamps 1a and 1c are in contact. Since the length is shortened according to the length, sufficient irradiance can be obtained with a small electric input, and the device can be downsized. Further, since the cylindrical dielectric barrier discharge lamps 1a and 1c at both ends are connected in parallel to one power source 10b, the irradiance at the center of the light extraction window 20 and the left and right radiation can be adjusted by adjusting the output of the power source 10b. It is possible to adjust the proportion of the illuminance, thus obtaining a disc light source with uniform irradiance. The cylindrical dielectric barrier discharge lamp 1b and the cylindrical dielectric barrier discharge lamp 1
The a and 1c are the same in all other structures except for the total length. Therefore, even if the number of types of lamps increases, there is an advantage that manufacturing is not complicated.

In the fourth embodiment of the present invention, as shown in FIG. 6, in the third embodiment, a hollow cylindrical light reflecting plate 31 is used.
Is provided. Since the upper end portion of the light reflection plate 31 is almost in contact with the cooling block 22, the effective area of the cooling block 22 becomes large, and the advantage that the utilization rate of light becomes larger occurs.

The fifth embodiment of the present invention is the same as the fourth embodiment except that the power supply 10b is removed, and a total of three cylindrical dielectric barrier discharge lamps 1a, 1b, 1c are connected in parallel to the power supply 10a. It is a configuration. Since there is only one power supply,
The advantage is that the device is smaller. It should be noted that it is completely unthinkable with conventional discharge lamps to discharge discharge lamps, especially discharge lamps of different lengths in parallel, using a single power supply, and it was possible for the first time with a cylindrical dielectric barrier discharge lamp. It is a thing. That is, paragraph number (000
For the same reason as described in 4), the cylindrical dielectric barrier discharge lamp device enables for the first time a small flat plate vacuum ultraviolet light source.

[0038]

As described above, according to the present invention,
The following effects can be obtained. According to the first aspect of the present invention, a light-transmissive discharge vessel having at least a substantially cylindrical outer shape, a conductive reticulated electrode provided on the entire circumference of at least a part of the outer surface of the discharge vessel, and the conductive material Cylindrical Dielectric Consisting of an Inner Electrode Provided Inside the Discharge Vessel Inside the Organic Reticulated Electrode, and a Discharge Gas Filled in the Discharge Vessel or a Discharge Gas Composed of a Rare Gas and Halogen A barrier discharge lamp, a lamp house containing the cylindrical dielectric barrier discharge lamp having a light extraction window for extracting excimer light emitted from excimer molecules formed by the dielectric barrier discharge, and a dielectric barrier discharge. In a dielectric barrier discharge lamp device equipped with a power supply for carrying out the operation, the light extraction window is formed in a rectangular shape, and further, as shown in the embodiments of FIGS. And windows 20 and both end portions 100, 101 of the conductive mesh electrode 110 of each of the lamp projected on the same plane is present outside the 該矩 shape light exit window 20, and, 該矩 shape light outlet window 20
The end portions 100, 101 of the conductive mesh electrode 110 projected on the same plane as the end portions 100, 101 of the sides of the rectangular window intersecting the axis of the cylindrical dielectric barrier discharge lamp.
The shortest distance L to the sides (OP) and (QR) closest to 101
_{Since 1} and L ₂ are configured to be 0.5 times or more of the outer diameter Z of the cylindrical dielectric barrier discharge lamp, it is possible to obtain a uniform irradiated surface with less fluctuation of irradiance. Further, it is possible to irradiate only the object to be processed with the rectangular object to be processed such as a glass plate for a liquid crystal display device without irradiating objects other than the object to be processed with the excimer light.

According to a second aspect of the present invention, a light-transmissive discharge vessel having at least a substantially cylindrical outer shape,
A conductive reticulated electrode provided on the entire circumference of at least a part of the outer surface of the discharge vessel, an inner electrode provided inside the conductive reticulated electrode substantially coaxially with the discharge vessel, and filled in the discharge vessel A cylindrical dielectric barrier discharge lamp made of a rare gas or a discharge gas made of a mixed gas of a rare gas and a halogen, and a light extraction window for taking out excimer light emitted from excimer molecules formed by the dielectric barrier discharge. In a dielectric barrier discharge lamp device including a lamp house that houses the cylindrical dielectric barrier discharge lamp, and a power supply for performing a dielectric barrier discharge, the light extraction window is formed into a substantially circular shape, and As shown in the embodiment of FIGS. 3 and 4, the light extraction window is formed into a substantially circular shape, and both of the conductive reticulated electrodes 110 of each lamp are projected on the same plane as the substantially circular window. Parts 100 and 101 are present on the outside of 該概 substantially circular window 20, and the end portion of the conductive mesh electrode projected on the same plane and 該概 substantially circular windows 100 and 101
And the intersection 102, 1 closest to the end 100, 101 of the substantially circular window and the cylindrical dielectric barrier discharge lamp.
Since the shortest distances L ₁ and ₂ to 03 are not less than 0.5 times the outer diameter Z of the cylindrical dielectric barrier discharge lamp, fluctuations in irradiance on the surface to be irradiated are small and uniform irradiation is possible. It is possible to obtain a circular dielectric barrier discharge lamp device having an irradiation surface. Therefore, since a commercially available material can be used without using a special material for the discharge container, there is an advantage that a cylindrical dielectric barrier discharge lamp device can be obtained at low cost.

According to a third aspect of the present invention, in the first or second aspect of the invention, three or more cylindrical dielectric barrier discharge lamps are arranged in parallel to form a cylindrical dielectric barrier discharge lamp group. The cylindrical dielectric barrier discharge lamps that are configured and have two or more power sources, and that are the most distant from each other in the cylindrical dielectric barrier discharge lamp group, that is, the rectangular window or the approximate circle. Since the two cylindrical dielectric barrier discharge lamps located at the ends of the window are connected in parallel to one of the power supplies, the cylinders at both ends can be adjusted by simply adjusting the output of the one power supply. Since the light output of the cylindrical dielectric barrier discharge lamp can be varied, a cylindrical dielectric barrier discharge lamp device which can obtain more uniform irradiance can be obtained in addition to the effect of the invention of claim 1 and the invention of claim 2. To be

According to a fourth aspect of the present invention, a cylindrical dielectric barrier discharge lamp group is constituted by three or more cylindrical dielectric barrier discharge lamps having different lengths, and one power source is provided. Since all the cylindrical dielectric barrier discharge lamps are connected in parallel with each other, the irradiance equivalent to that of the invention of claim 2 can be obtained with less electric input in addition to the effect of the invention of claim 2. As a result, a more compact dielectric barrier discharge lamp device can be obtained.

According to a fifth aspect of the present invention, in any one of the first or third aspect of the invention, at least the rectangular light extraction window that is orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp is provided. The conductive mesh electrode 110 of each lamp projected on the same plane as the side (OP) and the rectangular window.
Between the ends 100 of the lamp and the side (QR) of the rectangular light extraction window 20 orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp and the conductivity of each lamp projected on the same plane as the rectangular window. Between the end portions 101 of the reticulated mesh electrode 110,
Since at least the cylindrical dielectric barrier discharge lamp and the rectangular light extraction window 20 are provided with a light reflecting plate extending in a direction orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp. In addition to the action and effect of the invention of claim 1 or claim 3, it has an effect of increasing the extraction efficiency of vacuum ultraviolet light.

According to a sixth aspect of the present invention, in any one of the second or the fourth aspect of the invention, at least the periphery of the substantially circular window 20 and each of the cylindrical dielectric barrier discharge lamps are provided. Between the intersection 102 immediately adjacent to one end 100 of the outer electrode and the end 100 of the conductive reticulated electrode 110 projected on the same plane as the circular window 20, and the periphery of the substantially circular window 20. Between the intersection 103 closest to the other end 101 of the outer electrode 110 of the cylindrical dielectric barrier discharge lamp, at least between the cylindrical dielectric barrier discharge lamp and the substantially circular light extraction window, Since the light reflecting plate is provided so as to extend in a direction intersecting with the central axis of the cylindrical dielectric barrier discharge lamp, in addition to the function and effect of the invention according to claim 2 or 4, a vacuum is provided. Ultraviolet light It has the effect that the efficiency is increased Eject and.

[Brief description of drawings]

FIG. 1 is an explanatory view of an embodiment of a dielectric barrier discharge lamp device of the present invention.

FIG. 2 is an explanatory view of an embodiment of a dielectric barrier discharge lamp device of the present invention.

FIG. 3 is an explanatory view of another embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 4 is an explanatory view of another embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 5 is an explanatory view of another embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 6 is an explanatory view of another embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 7 is an explanatory diagram of a cylindrical dielectric barrier discharge lamp.

FIG. 8 is an explanatory diagram of a light distribution of a cylindrical dielectric barrier discharge lamp.

[Explanation of symbols]

 1 Discharge container 1a, 1b, 1c, 1d Dielectric barrier discharge lamp 2 Inner tube 3 Outer tube 4 Mesh electrode 5 Inner electrode 6 Getter housing chamber 7 Getter 20 Light extraction window 21 Lamp house 22 Cooling block 27, 31 Light reflection plate 100 One end of the metal net electrode 101 The other end of the metal net electrode 102 One intersection of the lamp and the window 103 The other intersection of the lamp and the window 110 The metal net electrode 111 One end of the lamp 112 The other end of the lamp End of

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Ryushi Igarashi 1194 Sado, Bessho-cho, Himeji-shi, Hyogo Ushio Electric Co., Ltd.

Claims (6)

[Claims] 1. A light-transmissive discharge vessel having a substantially cylindrical outer shape, a conductive reticulated electrode provided on the entire circumference of at least a part of the outer surface of the discharge vessel, and a conductive reticulated electrode inside the conductive reticulated electrode. A cylindrical dielectric barrier discharge lamp comprising an inner electrode provided substantially coaxially with the discharge vessel, a rare gas filled in the discharge vessel or a discharge gas comprising a mixed gas of a rare gas and a halogen, and the dielectric A lamp house for housing the cylindrical dielectric barrier discharge lamp having a light extraction window for extracting excimer light emitted from excimer molecules formed by body barrier discharge, and a power supply for performing dielectric barrier discharge In the dielectric barrier discharge lamp device, the light extraction window is rectangular and both ends of the conductive mesh electrode of each lamp projected on the same plane as the rectangular window are outside the rectangular window. Also, the sides of the conductive mesh electrode projected on the same plane as the rectangular window and the sides of the sides of the rectangular window intersecting the axis of the cylindrical dielectric barrier discharge lamp, which are closest to the respective ends. A dielectric barrier discharge lamp device characterized in that the shortest distance from (OP) and (QR) is 0.5 times or more the outer diameter Z of the cylindrical dielectric barrier discharge lamp. 2. A light-transmissive discharge vessel having a substantially cylindrical outer shape, a conductive mesh electrode provided on the entire circumference of at least a part of the outer surface of the discharge vessel, and a conductive mesh electrode inside the conductive mesh electrode. A cylindrical dielectric barrier discharge lamp consisting of an inner electrode provided substantially coaxially with the discharge vessel, a rare gas filled in the discharge vessel, or a discharge gas comprising a mixed gas of a rare gas and a halogen, and the dielectric A lamp house for housing the cylindrical dielectric barrier discharge lamp having a light extraction window for extracting excimer light emitted from excimer molecules formed by body barrier discharge, and a power supply for performing dielectric barrier discharge In the dielectric barrier discharge lamp device, the light extraction window is formed into a substantially circular shape, and both ends of the conductive mesh electrode of each lamp projected on the same plane as the substantially circular window have the substantially circular window. It was present on the side, and, with the end portion of the conductive mesh electrode projected on the same plane and 該概 substantially circular windows,
The shortest distance between the substantially circular window and the intersection closest to the end of the cylindrical dielectric barrier discharge lamp is set to 0.5 times or more the outer diameter Z of the cylindrical dielectric barrier discharge lamp. A dielectric barrier discharge lamp device characterized by: 3. A cylindrical dielectric barrier discharge lamp group is formed by arranging three or more of the cylindrical dielectric barrier discharge lamps in parallel, and the power source is two or more, and the cylindrical dielectric 3. The dielectric according to claim 1 or 2, wherein the cylindrical dielectric barrier discharge lamps farthest apart from each other in the body barrier discharge lamp group are connected in parallel to one of the power sources. Body barrier discharge lamp device. 4. A cylindrical dielectric barrier discharge lamp group is formed by three or more cylindrical dielectric barrier discharge lamps having different lengths, and all the cylindrical dielectric barriers are connected to one power source. The dielectric barrier discharge lamp device according to claim 2, wherein the discharge lamps are connected in parallel. 5. A side (OP) of the rectangular light extraction window orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp and one of the conductive mesh electrodes projected on the same plane as the rectangular window. Between the ends of the rectangular dielectric barrier discharge lamp and the side (QR) of the rectangular light extraction window orthogonal to the central axis of the cylindrical dielectric barrier discharge lamp and the other side of the conductive mesh electrode projected on the same plane as the rectangular window. Light that extends between the ends and extends at least between the cylindrical dielectric barrier discharge lamp and the rectangular light extraction window in a direction intersecting the central axis of the cylindrical dielectric barrier discharge lamp. The dielectric barrier discharge lamp device according to claim 1 or 3, wherein a reflector is provided. 6. A periphery of the substantially circular window, an intersection immediately adjacent to one end of each of the conductive mesh electrodes, and each of the conductive mesh electrodes projected on the same plane as the circular window. Between the ends of the substantially circular window and between the periphery of the substantially circular window and the point of intersection immediately adjacent to each of the other ends of the conductive reticulated electrodes, and at least the cylindrical dielectric barrier discharge lamp and the substantially circular shape. 5. A structure in which a light reflection plate extending in a direction intersecting with the central axis of the cylindrical dielectric barrier discharge lamp is provided between the light extraction windows having a circular shape, according to claim 2 or 4. A dielectric barrier discharge lamp device as described.