JPH08153467A - Exposure device and method for exposing fluorescent surface - Google Patents
Exposure device and method for exposing fluorescent surfaceInfo
- Publication number
- JPH08153467A JPH08153467A JP29626594A JP29626594A JPH08153467A JP H08153467 A JPH08153467 A JP H08153467A JP 29626594 A JP29626594 A JP 29626594A JP 29626594 A JP29626594 A JP 29626594A JP H08153467 A JPH08153467 A JP H08153467A
- Authority
- JP
- Japan
- Prior art keywords
- shadow mask
- panel
- area ratio
- light source
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はカラー陰極線管の蛍光面
形成に用いる露光装置および蛍光面露光方法に関し、特
にブラックマトリクス膜を有するカラー陰極線管のパネ
ルの中央部と周辺部の輝度比を改善した蛍光面形成に好
適する露光装置および蛍光面露光方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus and a phosphor screen exposure method used for forming a phosphor screen of a color cathode ray tube, and more particularly to improving a luminance ratio between a central portion and a peripheral portion of a panel of the color cathode ray tube having a black matrix film. The present invention relates to an exposure apparatus and a phosphor screen exposure method suitable for forming the phosphor screen.
【０００２】[0002]
【従来の技術】一般に、シャドウマスク型カラー陰極線
管では、パネルの内面に、その内側に配設されたシャド
ウマスクの開口部に対向して、吸光性物質層からなるブ
ラックマトリクス膜が形成され、このブラックマトリク
ス膜の開口部に赤、緑、青の各色に発光する微小なドッ
ト状またはストライプ状の蛍光層が形成されている。こ
のような蛍光体層は、一般に感光性物質を用いた精密写
真露光法によって形成されており、パネル内面に塗布さ
れたレジストをシャドウマスクを介して露光する工程で
は、カラー陰極線管用の露光装置が用いられる。2. Description of the Related Art Generally, in a shadow mask type color cathode ray tube, a black matrix film made of a light absorbing material layer is formed on an inner surface of a panel, facing an opening of a shadow mask arranged inside the panel. In the openings of the black matrix film, fine dot-shaped or stripe-shaped fluorescent layers that emit red, green, and blue colors are formed. Such a phosphor layer is generally formed by a precision photographic exposure method using a photosensitive material, and in the step of exposing the resist applied to the inner surface of the panel through a shadow mask, an exposure device for a color cathode ray tube is used. Used.
【０００３】このカラー陰極線管用露光装置は、図３に
示すように、パネル１とシャドウマスク２とを位置決め
して載置するテーブル３、テーブル３の下方に配置され
る光源４、テーブル３と光源４との間に配置される補正
レンズ５および調光フィルタ６とで構成され、パネル内
面全域に均一な大きさの開口部を有するドット状または
ストライプ状のブラックマトリクス膜が形成されてい
る。ところが、偏向量の大きな大形や短管長のカラー陰
極線管においては、電子ビームの収束度が偏向量により
多少異なるため、パネル１の中央部と周辺部とのブラッ
クマトリクス膜の開口部面積を等しくすると蛍光体の発
光輝度が不均一となるという問題があり、パネル１の中
央部と周辺部のブラックマトリクス膜の開口部面積比を
最適な値にコントロールする必要があった。一方、特開
昭６３−１３８６２８号公報に、中心部と周辺部との光
の透過率の異なる２枚の調光フィルタを設け、その調光
フィルタの間隔を調整して中央部と周辺部に到達する光
量を中心部から周辺部に行くにしたがって減少させ、パ
ネル周辺部のディスプレイ領域以外のブラックマトリク
ス膜の開口部面積を小さくしてパネル周辺部における色
ずれの発生を少なくし、偏向ヨークの調節を容易化した
カラー陰極線管の蛍光面形成に用いられる露光装置が開
示されている。This color cathode ray tube exposure apparatus, as shown in FIG. 3, has a table 3 on which a panel 1 and a shadow mask 2 are positioned and placed, a light source 4 arranged below the table 3, a table 3 and a light source. 4 and a dimming filter 6 disposed between the black matrix film 4 and the black matrix film 4. A dot-shaped or stripe-shaped black matrix film having openings of uniform size is formed on the entire inner surface of the panel. However, in a large or short color cathode ray tube having a large deflection amount, since the degree of convergence of the electron beam varies slightly depending on the deflection amount, the central area and the peripheral area of the panel 1 have the same opening area of the black matrix film. Then, there is a problem that the emission brightness of the phosphor becomes non-uniform, and it is necessary to control the opening area ratio of the black matrix film in the central portion and the peripheral portion of the panel 1 to an optimum value. On the other hand, in Japanese Patent Laid-Open No. 63-138628, two dimming filters having different light transmittances between the central portion and the peripheral portion are provided, and the distance between the dimming filters is adjusted to adjust the central portion and the peripheral portion. The amount of light reaching the central part is reduced from the central part to the peripheral part, and the opening area of the black matrix film other than the display area in the panel peripheral part is reduced to reduce the occurrence of color misregistration in the panel peripheral part. An exposure apparatus used for forming a fluorescent screen of a color cathode ray tube which facilitates adjustment is disclosed.
【０００４】[0004]
【発明が解決しようとする課題】ところが、パネルの中
央部と周辺部のブラックマトリクス膜の開口部面積比は
ブラックマトリクス膜の塗布状態、シャドウマスクのマ
スクホール分布、光源となる水銀灯の発光状態等の要因
によりパネル毎に異なるため、上述したブラックマトリ
クス膜の開口部面積減少分布が一定の特開昭６３−１３
８６２８号公報の露光装置では対応できないという問題
があった。本発明の目的は、シャドウマスクの中央部と
周辺部の開口部面積を予め光センサにより測定し、その
面積比が一定になるように調光フィルタの位置を上下に
移動させ最適面積比に維持してブラックマトリクス膜を
形成できる露光装置及び蛍光面露光方法を提供すること
にある。However, the opening area ratio of the black matrix film in the central portion and the peripheral portion of the panel is such that the coating state of the black matrix film, the mask hole distribution of the shadow mask, the light emitting state of the mercury lamp as the light source, etc. The above-mentioned black matrix film has a constant opening area reduction distribution because it varies from panel to panel due to the above-mentioned factors.
There is a problem that the exposure apparatus disclosed in Japanese Patent No. 8628 cannot handle the problem. An object of the present invention is to measure the opening area of the central portion and the peripheral portion of the shadow mask by an optical sensor in advance, and move the position of the light control filter up and down so that the area ratio becomes constant and maintain the optimum area ratio. An object of the present invention is to provide an exposure apparatus and a phosphor screen exposure method capable of forming a black matrix film.
【０００５】[0005]
【課題を解決するための手段】本発明は、光源と、パネ
ルおよびシャドウマスクを位置決めして載置するテーブ
ルと、前記光源と前記パネルとの間に補正レンズと調光
フィルタを具備した露光装置において、前記シャドウマ
スクの中央部と周辺部の孔面積を測定する光センサと、
中央部と周辺部の孔面積比を基準値と比較して、前記調
光フィルタの位置を上下に移動させる自動制御機構とを
具備する露光装置を提供する。また、光源と、前記光源
とパネルとの間に補正レンズと調光フィルタおよびシャ
ドウマスクを介してパネル内面に塗布した感光剤を混入
した吸光性物質膜を露光してブラックマトリクス膜を形
成するカラー陰極線管の蛍光面形成方法において、予め
シャドウマスクの中央部と周辺部の孔面積を測定し、中
央部と周辺部の孔面積比により前記調光フィルタの位置
を上下に移動して孔面積比を一定にして露光する蛍光面
露光方法を提供する。SUMMARY OF THE INVENTION The present invention is an exposure apparatus comprising a light source, a table for positioning and mounting a panel and a shadow mask, and a correction lens and a dimming filter between the light source and the panel. In, an optical sensor for measuring the hole area of the central portion and the peripheral portion of the shadow mask,
An exposure apparatus provided with an automatic control mechanism for moving the position of the light control filter up and down by comparing the hole area ratio between the central portion and the peripheral portion with a reference value. A color forming a black matrix film by exposing a light source and a light absorbing substance film mixed with a photosensitizer applied to the inner surface of the panel through a correction lens, a light control filter and a shadow mask between the light source and the panel. In the method for forming the fluorescent screen of the cathode ray tube, the hole area of the central portion and the peripheral portion of the shadow mask is measured in advance, and the position of the light control filter is moved up and down according to the hole area ratio of the central portion and the peripheral portion to adjust the hole area ratio. There is provided a fluorescent screen exposure method for exposing with a constant value.
【０００６】[0006]
【作用】上記構成によれば、調光フィルタは、通常、高
さを上げ光源から遠ざけると周辺部の光透過率が上昇
し、高さを下げ光源に近ずけると周辺部の光透過率が低
下するので、シャドウマスクの中央部と周辺部の孔面積
を光センサで測定し、その面積比が所定の基準値になる
ように調光フィルタの位置を自動制御機構により上下に
移動させ、面積比が基準値になった状態で感光剤を混入
した吸光性物質膜を露光してブラックマトリクス膜を形
成すると、シャドウマスクの孔面積や光源の発光状態に
ばらつきがあっても、開口部面積比が所定の値にコント
ロールされたブラックマトリクス膜が形成できる。した
がって、カラー陰極線管の中央部と周辺部の輝度を一定
にできる。また、調光フィルタも１枚で良いため、露光
装置も簡素化できるとともに、自動的に最適位置に設定
できるため露光作業が簡単になる。According to the above-mentioned structure, the light control filter normally increases the light transmittance of the peripheral portion when the height is increased and the distance from the light source is increased, and the light transmittance of the peripheral portion is decreased when the height is decreased and the light source is approached. Therefore, the hole area of the central portion and the peripheral portion of the shadow mask is measured by an optical sensor, and the position of the light control filter is moved up and down by an automatic control mechanism so that the area ratio becomes a predetermined reference value. When the black matrix film is formed by exposing the light absorbing substance film mixed with the photosensitizer while the area ratio becomes the reference value, even if the hole area of the shadow mask and the light emitting state of the light source vary, the opening area A black matrix film whose ratio is controlled to a predetermined value can be formed. Therefore, the brightness of the central portion and the peripheral portion of the color cathode ray tube can be made constant. Also, since only one light control filter is required, the exposure apparatus can be simplified and the exposure work can be simplified because the optimum position can be automatically set.
【０００７】[0007]
【実施例】以下、本発明の露光装置の実施例について、
図面を参照して説明する。従来例と同一部分には同一参
照符号を付し説明を省略する。本発明の一実施例の露光
装置は、図１に示すように、パネル１とシャドウマスク
２とを位置決めして載置するテーブル３、テーブル３の
下方に配置される光源４、テーブル３と光源４との間に
配置される補正レンズ５および調光フィルタ６と、シャ
ドウマスク２の中央部および周辺部の孔面積を測定する
光センサ７と、調光フィルタ６の位置を上下に移動させ
る移動機構８と、孔面積比を基準値と比較して移動機構
８に高さ変更信号を発信する画像処理部９とからなる自
動制御機構１０とで構成されている。EXAMPLES Examples of the exposure apparatus of the present invention will be described below.
This will be described with reference to the drawings. The same parts as those of the conventional example are designated by the same reference numerals and the description thereof will be omitted. As shown in FIG. 1, an exposure apparatus according to an embodiment of the present invention includes a table 3 for positioning and mounting a panel 1 and a shadow mask 2, a light source 4 arranged below the table 3, a table 3 and a light source. 4, a correction lens 5 and a light control filter 6, an optical sensor 7 for measuring the hole area of the central portion and the peripheral portion of the shadow mask 2, and a movement for moving the position of the light control filter 6 up and down. The automatic control mechanism 10 includes a mechanism 8 and an image processing unit 9 that compares the hole area ratio with a reference value and sends a height change signal to the moving mechanism 8.
【０００８】そして、この実施例の露光装置を使用した
露光方法は以下に説明するように実施される。すなわ
ち、テーブル３の所定位置にシャドウマスク２を搭載
し、光源４を発光させ、光センサ７でシャドウマスク２
の中心部および周辺部の一定範囲の受光量を測定する。
そして、その測定データは画像処理部９に送られ、孔面
積が求められ、中心部と周辺部の孔面積比が基準値と比
較される。そして、その孔面積比が基準値より大きいと
きは調光フィルタ６の位置を下げる信号を、孔面積比が
基準値より小さいときは調光フィルタ６の位置を上げる
信号が画像処理部９から移動機構８に発信される。その
信号に基づき移動機構８は調光フィルタを上下に移動さ
せる。このようにして、調光フィルタは最適位置に設定
される。ついで、光吸収物質膜をパネル内面に塗布した
パネル１をテーブル３に搭載して露光して、画面全域に
所定の面積比の開口部を有するドット状またはストライ
プ状のブラックマトリクス膜が形成される。以上、１個
の光センサを用いてシャドウマスクの中央部と周辺部の
孔面積を測定した例について説明したが、図２に示すよ
うに、複数の光センサ７，７・・を所定位置に取付けた
面状の光センサ１１を用いれば、さらに、調整時間を短
縮し、測定位置のばらつきによる誤差を排除できる。The exposure method using the exposure apparatus of this embodiment is carried out as described below. That is, the shadow mask 2 is mounted at a predetermined position on the table 3, the light source 4 is made to emit light, and the shadow mask 2 is set by the optical sensor 7.
Measure the amount of received light in a certain range in the central and peripheral parts of the.
Then, the measurement data is sent to the image processing unit 9, the hole area is obtained, and the hole area ratio between the central portion and the peripheral portion is compared with the reference value. Then, when the hole area ratio is larger than the reference value, a signal for lowering the position of the light control filter 6 is moved from the image processing unit 9 and when the hole area ratio is lower than the reference value, a signal for raising the position of the light control filter 6 is moved. It is transmitted to the mechanism 8. Based on the signal, the moving mechanism 8 moves the light control filter up and down. In this way, the light control filter is set at the optimum position. Then, the panel 1 having the light absorbing substance film applied to the inner surface of the panel is mounted on the table 3 and exposed to form a dot-shaped or stripe-shaped black matrix film having openings having a predetermined area ratio over the entire screen. . The example in which the hole area of the central portion and the peripheral portion of the shadow mask is measured using one optical sensor has been described above. However, as shown in FIG. 2, a plurality of optical sensors 7, 7 ... If the attached planar optical sensor 11 is used, the adjustment time can be further shortened and the error due to the variation of the measurement position can be eliminated.
【０００９】[0009]
【発明の効果】本発明によれば、シャドウマスクの中央
部と周辺部の孔面積を光センサで測定し、その面積比が
所定の基準値になるように調光フィルタの位置を自動制
御機構により上下に移動させ、面積比が基準値になった
状態で感光剤を混入した光吸収膜を露光してブラックマ
トリクス膜を形成すると、シャドウマスクの孔面積や光
源の発光状態にばらつきがあっても、開口部面積比が所
定の値にコントロールされたブラックマトリクス膜が形
成できる。したがって、カラー陰極線管の中央部と周辺
部の輝度を一定にできる。また、調光フィルタも１枚で
良いため、露光装置も簡素化できるとともに、自動的に
最適位置に設定できるため露光作業が簡単になる。According to the present invention, the hole area of the central portion and the peripheral portion of the shadow mask is measured by the optical sensor, and the position of the light control filter is automatically controlled so that the area ratio becomes a predetermined reference value. When the black matrix film is formed by exposing the light absorption film mixed with the photosensitizer in the state where the area ratio becomes the reference value, the hole area of the shadow mask and the light emitting state of the light source vary. Also, it is possible to form a black matrix film in which the opening area ratio is controlled to a predetermined value. Therefore, the brightness of the central portion and the peripheral portion of the color cathode ray tube can be made constant. Also, since only one light control filter is required, the exposure apparatus can be simplified and the exposure work can be simplified because the optimum position can be automatically set.
【図１】 本発明の一実施例の露光装置の構成図FIG. 1 is a configuration diagram of an exposure apparatus according to an embodiment of the present invention.
【図２】 本発明の他の実施例の露光装置の光センサの
斜視図FIG. 2 is a perspective view of an optical sensor of an exposure apparatus according to another embodiment of the present invention.
【図３】 従来の露光装置の構成図FIG. 3 is a block diagram of a conventional exposure apparatus
１ パネル ２ シャドウマスク ３ テーブル ４ 光源 ５ 補正レンズ ６ 調光フィルタ ７，１１ 光センサ ８ 移動機構 ９ 画像処理部 １０ 自動制御機構 1 Panel 2 Shadow Mask 3 Table 4 Light Source 5 Correction Lens 6 Light Control Filter 7, 11 Optical Sensor 8 Moving Mechanism 9 Image Processing Section 10 Automatic Control Mechanism
Claims (2)
置決めして載置するテーブルと、前記光源と前記パネル
との間に補正レンズと調光フィルタを具備した露光装置
において、前記シャドウマスクの中央部と周辺部の孔面
積を測定する光センサと、中央部と周辺部の孔面積比を
基準値と比較して、前記調光フィルタの位置を上下に移
動させる自動制御機構を具備することを特徴とする露光
装置。1. An exposure apparatus comprising a light source, a table for positioning and mounting a panel and a shadow mask, and a correction lens and a dimming filter between the light source and the panel, in a central portion of the shadow mask. And an optical sensor for measuring the hole area of the peripheral portion, and an automatic control mechanism for moving the position of the light control filter up and down by comparing the hole area ratio of the central portion and the peripheral portion with a reference value. Exposure equipment.
ンズと調光フィルタおよびシャドウマスクを介してパネ
ル内面に塗布した感光剤を混入した吸光性物質膜を露光
してブラックマトリクス膜を形成するカラー陰極線管の
蛍光面形成方法において、予めシャドウマスクの中央部
と周辺部の孔面積を測定し、中央部と周辺部の孔面積比
により前記調光フィルタの位置を上下に移動して孔面積
比を一定にして露光することを特徴とした蛍光面露光方
法。2. A black matrix film is formed by exposing a light source and a light absorbing substance film mixed with a photosensitizer applied to the inner surface of the panel through a correction lens, a light control filter and a shadow mask between the light source and the panel. In the method for forming the phosphor screen of the color cathode ray tube to be formed, the hole area of the central portion and the peripheral portion of the shadow mask is measured in advance, and the position of the light control filter is moved up and down according to the hole area ratio of the central portion and the peripheral portion. A fluorescent screen exposure method, characterized in that exposure is carried out with a constant hole area ratio.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06296265A JP3119099B2 (en) | 1994-11-30 | 1994-11-30 | Exposure apparatus and phosphor screen exposure method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06296265A JP3119099B2 (en) | 1994-11-30 | 1994-11-30 | Exposure apparatus and phosphor screen exposure method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08153467A true JPH08153467A (en) | 1996-06-11 |
| JP3119099B2 JP3119099B2 (en) | 2000-12-18 |
Family
ID=17831338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06296265A Expired - Fee Related JP3119099B2 (en) | 1994-11-30 | 1994-11-30 | Exposure apparatus and phosphor screen exposure method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3119099B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7242137B2 (en) | 2004-09-30 | 2007-07-10 | Matsushita Toshiba Picture Display Co., Ltd. | Cathode ray tube with cone having non-circular cross-section |
| US7265484B2 (en) | 2004-08-05 | 2007-09-04 | Matsushita Toshiba Picture Display Co., Ltd. | Color picture tube with curved shadow mask |
| ES2384835A1 (en) * | 2009-03-18 | 2012-07-13 | Universidad De Murcia | Procedure for the recording of images in optical tomography of fluorescence and application system. (Machine-translation by Google Translate, not legally binding) |
-
1994
- 1994-11-30 JP JP06296265A patent/JP3119099B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7265484B2 (en) | 2004-08-05 | 2007-09-04 | Matsushita Toshiba Picture Display Co., Ltd. | Color picture tube with curved shadow mask |
| US7242137B2 (en) | 2004-09-30 | 2007-07-10 | Matsushita Toshiba Picture Display Co., Ltd. | Cathode ray tube with cone having non-circular cross-section |
| ES2384835A1 (en) * | 2009-03-18 | 2012-07-13 | Universidad De Murcia | Procedure for the recording of images in optical tomography of fluorescence and application system. (Machine-translation by Google Translate, not legally binding) |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3119099B2 (en) | 2000-12-18 |
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