JPH08148250A - Thermal pressure connection machine - Google Patents

Thermal pressure connection machine

Info

Publication number
JPH08148250A
JPH08148250A JP28329094A JP28329094A JPH08148250A JP H08148250 A JPH08148250 A JP H08148250A JP 28329094 A JP28329094 A JP 28329094A JP 28329094 A JP28329094 A JP 28329094A JP H08148250 A JPH08148250 A JP H08148250A
Authority
JP
Japan
Prior art keywords
substrate
tape
axis
circuit board
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28329094A
Other languages
Japanese (ja)
Inventor
Nobukazu Koide
遵一 小出
Yosuke Kaneko
洋輔 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP28329094A priority Critical patent/JPH08148250A/en
Publication of JPH08148250A publication Critical patent/JPH08148250A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve the tape sticking position precision independently of unevenness of substrate setting by workers and of the precision of outer size of substrates by installing a rotary guide and a straight line guide for a table, a CCD camera, and a visual sensor. CONSTITUTION: When a pulse motor 8 movable in y-axis is driven, a table 6 moves in y-direction along a straight line guide 9. Also when a pulse motor 7 for rotary guide is driven, the table 6 rotates on a Θ rotary axis in the y-axis base 15. A rotary substrate 3 on the table 6 is conformed with an anisotropic conductive tape 1 by such movement in y-direction and on the Θ rotary axis. Meanwhile, a CCD camera 10 reads out a mark 4 for positioning marked in both ends of the substrate 3. As a result, it is sufficient that a worker sets the substrate 3 on the table 6 and the mark 4 comes in the visual field of the camera 10 and careful work needed in a conventional method becomes unnecessary and the workability is thus improved and the cost of the substrate 3 can be lowered.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、異方性導電テープを基
板等に貼り付ける熱圧着機に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermocompression bonding machine for sticking an anisotropic conductive tape on a substrate or the like.

【0002】[0002]

【従来の技術】従来のテープ貼り熱圧着機は、テーブル
上に回路基板をセットし、テーブルをテープ貼り位置ま
で前進させ、そこでテープが適当な張力を保って基板の
一辺に沿って引き出されて、回路基板上に置かれ、その
ままの位置で加熱加圧ヘッドが下降して、テープが回路
基板に熱圧着されるようになっており、テープの回路基
板に対する位置合わせ方法は、テーブルに設けられた基
板の外周ストッパ及びテーブルの前後移動による位置決
めだけであった。
2. Description of the Related Art A conventional tape-bonding thermocompression bonding machine sets a circuit board on a table and advances the table to a tape-bonding position where the tape is pulled out along one side of the board while maintaining an appropriate tension. The tape is placed on the circuit board and the heating / pressurizing head is lowered at that position to thermo-compress the tape to the circuit board. The method of aligning the tape with the circuit board is provided on the table. Moreover, the positioning was performed only by moving the outer peripheral stopper of the substrate and the table back and forth.

【0003】[0003]

【発明が解決しようとする課題】前記の従来の方法で
は、テーブル上に置かれた回路基板に貼り付けられるテ
ープの回路基板に対する位置精度は、回路基板をテーブ
ルにセットするときの位置のばらつき(作業者の作業方
法のばらつき)と回路基板の外周寸法精度が必然的に含
まれるために、作業者に基板をテーブルにセットすると
きに細心の注意が要求され、且つ基板の外周寸法精度が
向上しないとテープの貼付位置精度を向上させることが
出来なかった。本発明は、作業者の基板セットのばらつ
きや基板の外周寸法精度に関係なく、テープの貼付位置
精度を向上させる熱圧着機を提供するものである。
In the above conventional method, the positional accuracy of the tape attached to the circuit board placed on the table with respect to the circuit board depends on the variation in the position when the circuit board is set on the table ( Since the variation of the working method of the operator) and the accuracy of the outer peripheral dimension of the circuit board are inevitably included, the operator must be careful when setting the board on the table, and the outer peripheral dimension accuracy of the board is improved. Otherwise, the tape sticking position accuracy could not be improved. The present invention provides a thermocompression bonding machine that improves the tape sticking position accuracy irrespective of the operator's variation of the board set and the accuracy of the outer peripheral dimension of the board.

【0004】[0004]

【課題を解決するための手段】本発明は、回路基板を載
置して固定するテーブルと、水平面内で回転可能で且つ
任意の角度で停止出来るテーブルの回転案内と、テーブ
ルを前後方向に移動して任意の位置で停止できる直線案
内と、回路基板に取り付けられた位置合わせ用のマーク
を読み取るCCDカメラと、該CCDカメラで捉えられ
たマークの画像を認識して、マークの位置を所定の位置
に移動させる視覚センサを装備した、異方性導電膜を回
路基板に貼り付ける熱圧着機に関する。本発明におい
て、回路基板としてはガラス基板、ボード基板等が用い
られる。
According to the present invention, a table on which a circuit board is placed and fixed, a rotation guide for the table which can rotate in a horizontal plane and can be stopped at an arbitrary angle, and the table can be moved in the front-back direction. Then, the linear guide that can be stopped at any position, the CCD camera that reads the alignment mark attached to the circuit board, and the image of the mark captured by the CCD camera are recognized to set the mark position to a predetermined position. The present invention relates to a thermocompression bonding machine for attaching an anisotropic conductive film to a circuit board, which is equipped with a visual sensor for moving it to a position. In the present invention, a glass substrate, a board substrate or the like is used as the circuit board.

【0005】本発明では、回路基板を載置固定したテー
ブルのY軸(前後方向)の移動をパルスモータを用いて
制御し、任意の位置で停止出来るようにした(直線案
内)。また、Y軸のベースの上にθ軸(水平面内の回転
方向)の回転を別のパルスモータを用いて制御し、任意
の角度で停止出来るようにした(回転案内)。更に、テ
ーブルに載置された回路基板の位置を認識するため、回
路基板の両端に取り付けた位置合わせ用マークを映し出
すCCDカメラ及び該カメラの画像を認識し、認識した
位置合わせマークをあらかじめ決められたテープ貼り位
置に合わせるように、テーブルにY移動量とθ移動量と
を制御指令する視覚センサを装備した。CCDカメラ
は、基板両端のマークを読み取るため2台設置してもよ
く、また、1台のカメラをX方向(左右方向)に自動移
動させて左右のマークを順次認識させてもよい。
In the present invention, the movement of the Y-axis (front-back direction) of the table on which the circuit board is mounted and fixed is controlled by using a pulse motor so that the table can be stopped at an arbitrary position (linear guide). Further, the rotation of the θ axis (the rotation direction in the horizontal plane) is controlled on the base of the Y axis by using another pulse motor so that the rotation can be stopped at an arbitrary angle (rotation guide). Further, in order to recognize the position of the circuit board placed on the table, the CCD camera that projects the alignment marks attached to both ends of the circuit board and the image of the camera are recognized, and the recognized alignment mark is predetermined. The table is equipped with a visual sensor for controlling the Y movement amount and the θ movement amount so as to match the tape attachment position. Two CCD cameras may be installed to read the marks on both ends of the substrate, or one camera may be automatically moved in the X direction (horizontal direction) to sequentially recognize the left and right marks.

【0006】[0006]

【作用】θ軸回転は、基板の左右の位置合わせマークに
より決められる基板の傾き(水平面内でのテープ位置と
の回転ずれ)を、テープと平行な位置になるように回転
移動させる(θ補正)。Y軸移動は、θ補正した後のマ
ークのY座標を基準位置(テープと位置合わせマークと
が合致する位置)になるように移動させる(Y補正)。
このθ補正及びY補正の量は、視覚センサがマークを画
像認識して移動量を指令し、θ軸及びY軸のパルスモー
タを駆動して制御する。θ補正及びY補正の後のマーク
の位置はX方向(左右)に外れているが、傾き及び前後
位置はテープ位置に合うようになる。しかる後に、基準
位置(カメラ位置)からテープ位置(テープ貼付位置)
へY軸移動が行なわれ、テープを引き出して貼付を行
う。
[Function] The θ-axis rotation is such that the inclination of the substrate (rotational deviation from the tape position in the horizontal plane) determined by the alignment marks on the left and right sides of the substrate is rotationally moved to a position parallel to the tape (θ correction ). In the Y-axis movement, the Y coordinate of the mark after θ correction is moved to the reference position (the position where the tape and the alignment mark match) (Y correction).
The amounts of the θ correction and the Y correction are controlled by driving the pulse motors of the θ axis and the Y axis by instructing the movement amount by the image recognition of the mark by the visual sensor. The positions of the marks after the θ correction and the Y correction are deviated in the X direction (left and right), but the inclination and the front and rear positions are aligned with the tape position. Then, from the reference position (camera position) to the tape position (tape attachment position)
The Y-axis is moved to and the tape is pulled out and attached.

【0007】[0007]

【実施例】次に、本発明の実施例を説明する。図1は本
発明の実施例になる熱圧着機のテーブル部の平面図、図
2は図1の側面図である。図において、1は異方性導電
テープであり、テープ引出しグリップ12によりテープ
リール2から引き出され、テープ保持グリップ13で保
持され、回路基板3に加熱加圧ヘッド11により熱圧着
された後テープ切断カッタ14で切断される。テープ1
は毎回同じ位置に引き出される。回路基板3はテーブル
6上に設けられた外周ストッパ5に沿って手作業でセッ
トされ、真空吸着によりテーブル6に固定される。Y軸
移動のパルスモータ8を駆動すると、テーブル6は直線
案内9に沿ってY方向に移動する。また、回転案内のパ
ルスモータ7を駆動すると、テーブル6はY軸ベース1
5の上でθ回転軸を中心にして回転する。このように、
Y及びθの移動によりテーブル6上の回路基板3をテー
プ1に合わせる。一方、CCDカメラ10は回路基板3
の両端に付けた位置合わせ用マーク4を読み取る。これ
により、従来のように基板の外周をテープに合わせるの
ではなく、マークをテープに合わせることが出来る。
Next, embodiments of the present invention will be described. 1 is a plan view of a table portion of a thermocompression bonding machine according to an embodiment of the present invention, and FIG. 2 is a side view of FIG. In the figure, reference numeral 1 is an anisotropic conductive tape, which is pulled out from a tape reel 2 by a tape pull-out grip 12, held by a tape holding grip 13, and thermocompression-bonded to a circuit board 3 by a heating / pressurizing head 11 and then cuts the tape. It is cut by the cutter 14. Tape 1
Is pulled out to the same position every time. The circuit board 3 is manually set along the outer peripheral stopper 5 provided on the table 6 and fixed to the table 6 by vacuum suction. When the Y-axis moving pulse motor 8 is driven, the table 6 moves in the Y direction along the linear guide 9. When the rotation guide pulse motor 7 is driven, the table 6 is moved to the Y-axis base 1
Rotate on the rotation axis of 5 above θ. in this way,
By moving Y and θ, the circuit board 3 on the table 6 is aligned with the tape 1. On the other hand, the CCD camera 10 has a circuit board 3
Read the alignment marks 4 attached to both ends of. As a result, the mark can be aligned with the tape instead of aligning the outer periphery of the substrate with the tape as in the conventional case.

【0008】日立化成工業(株)製の仮圧着機AC−S
I300を基準に実施した例を説明する。θ軸回転には
日本精工(株)製のメガトルクモータEM型を使用し
た。Y軸移動はオリエンタル製パルスモータEM569
NA及びドライバーUDX−5114を使用した。視覚
センサは(株)日立製作所製HV/R−3を、CCDカ
メラは東京電子工業製CS3130Lを2台使用した。
CCDカメラはガラス基板の回路基板の上方に設置し、
同軸落射照明により基板のマークを左右同時に観察出来
る。基板サイズが変わる場合はカメラ間隔を調整して対
応する。9インチモニタ上での倍率は40倍である。左
右マークを画像認識してθ補正及びY補正を行い、マー
クを基準位置に合わせた後、基準位置からテープ貼付位
置まで一定の距離をY方向に移動させて貼付を行う。
Temporary crimping machine AC-S manufactured by Hitachi Chemical Co., Ltd.
An example implemented based on I300 will be described. A Megatorque motor EM type manufactured by NSK Ltd. was used for the θ-axis rotation. Y-axis movement is Oriental pulse motor EM569
NA and driver UDX-5114 were used. HV / R-3 manufactured by Hitachi, Ltd. was used as a visual sensor, and two CS3130L manufactured by Tokyo Denshi Kogyo were used as CCD cameras.
The CCD camera is installed above the glass circuit board,
The coaxial epi-illumination allows you to observe the marks on the board simultaneously on the left and right. If the board size changes, adjust the camera interval to handle it. The magnification on a 9-inch monitor is 40 times. After the left and right marks are image-recognized and θ correction and Y correction are performed, the marks are aligned with the reference position, and then a certain distance is moved from the reference position to the tape attachment position in the Y direction to attach the marks.

【0009】[0009]

【発明の効果】テーブルにθ軸回転を付与することによ
り、基板の位置合わせマークを基準に基板の傾きをテー
プと平行にすることが出来る。また、Y軸補正を行なう
ことにより、平行になった基板の位置をテープに合わせ
ることが出来る。これにより、作業者が基板をテーブル
にセットするときは、カメラの視野内にマークが入れば
よいので、従来のように注意深く作業する必要は無くな
った。また、基板の外周寸法精度も重要ではなくなった
ため、作業性が向上し、且つ基板のコストも安価に出来
る。
By applying the θ-axis rotation to the table, the inclination of the substrate can be made parallel to the tape with reference to the alignment mark of the substrate. In addition, by performing Y-axis correction, it is possible to align the positions of the parallel substrates with the tape. As a result, when the operator sets the substrate on the table, it is only necessary to put a mark in the field of view of the camera, so that it is not necessary to perform careful work as in the conventional case. Further, since the outer peripheral dimension accuracy of the substrate is not important, workability is improved and the cost of the substrate can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す熱圧着機のテーブル部
の平面図である。
FIG. 1 is a plan view of a table portion of a thermocompression bonding machine showing an embodiment of the present invention.

【図2】図1の側面図である。FIG. 2 is a side view of FIG.

【符号の説明】[Explanation of symbols]

1…異方性導電テープ、2…テープリール、3…回路基
板、4…位置合わせ用マーク、5…外周ストッパ、6…
テーブル、7…パルスモータ、8…パルスモータ、9…
直線案内、10…CCDカメラ、11…加熱加圧ヘッ
ド、12…テープ引き出しグリップ、13…テープ保持
グリップ、14…テープ切断カッタ、15…Y軸ベース
1 ... Anisotropic conductive tape, 2 ... Tape reel, 3 ... Circuit board, 4 ... Alignment mark, 5 ... Perimeter stopper, 6 ...
Table, 7 ... Pulse motor, 8 ... Pulse motor, 9 ...
Linear guide, 10 ... CCD camera, 11 ... Heating / pressing head, 12 ... Tape pull-out grip, 13 ... Tape holding grip, 14 ... Tape cutting cutter, 15 ... Y-axis base

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 回路基板を載置して固定するテーブル
と、水平面内で回転可能で且つ任意の角度で停止出来る
テーブルの回転案内と、テーブルを前後方向に移動し、
任意の位置で停止できる直線案内と、回路基板に取り付
けられた位置合わせ用のマークを読み取るCCDカメラ
と、該CCDカメラで捉えられたマークの画像を認識し
て、マークの位置を所定の位置に移動させる視覚センサ
を装備した、異方性導電膜を回路基板に貼り付ける熱圧
着機。
1. A table on which a circuit board is placed and fixed, a rotation guide for the table that is rotatable in a horizontal plane and can be stopped at an arbitrary angle, and the table is moved in the front-rear direction.
The linear guide that can be stopped at any position, the CCD camera that reads the alignment mark attached to the circuit board, and the image of the mark captured by the CCD camera are recognized to set the mark position to a predetermined position. A thermocompression bonding machine equipped with a moving visual sensor to attach an anisotropic conductive film to a circuit board.
JP28329094A 1994-11-17 1994-11-17 Thermal pressure connection machine Pending JPH08148250A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28329094A JPH08148250A (en) 1994-11-17 1994-11-17 Thermal pressure connection machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28329094A JPH08148250A (en) 1994-11-17 1994-11-17 Thermal pressure connection machine

Publications (1)

Publication Number Publication Date
JPH08148250A true JPH08148250A (en) 1996-06-07

Family

ID=17663538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28329094A Pending JPH08148250A (en) 1994-11-17 1994-11-17 Thermal pressure connection machine

Country Status (1)

Country Link
JP (1) JPH08148250A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104003130A (en) * 2014-06-12 2014-08-27 苏州乔岳软件有限公司 Conveyer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104003130A (en) * 2014-06-12 2014-08-27 苏州乔岳软件有限公司 Conveyer

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