JPH08147602A - Magnetic head and magnetic reproducing apparatus - Google Patents

Abstract

PURPOSE: To obtain a magnetic head by which a high-speed reproducing operation on the order of MHz can be performed by using a magnetic probe. CONSTITUTION: A magnetic head is constituted of a conductor wire 2 which comprises electrodes 2a, 2b on both ends, of a soft magnetic probe 1 which is arranged so as to cover a part of the conductor wire between the electrodes, which comprises a sharp tip and which does not have a magnetic gap and of an insulating substrate 3 which holds the conductor wire and the soft magnetic probe. Since the soft magnetic probe having the sharp tip is constituted so as to surround the circumference of the conductor wire, the recording magnetization of a magnetic medium can be reproduced as a change in the impedance of the part of the probe.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head for recording / reproducing at high density and high speed, and a magnetic recording / reproducing apparatus for the same.

[0002]

2. Description of the Related Art In recent years, there has been an increasing demand for higher capacity by increasing the density of information storage devices. The higher the storage capacity of the storage device, the higher the access speed to the recorded information and the higher transfer speed of the information. Therefore, it is desirable that high-density recorded information can be reproduced as fast as possible.

Recently, MFM (Magnetic Force Micro) has been proposed as a method capable of recording at a dramatically higher density than conventional magnetic disk devices and magnetic tape devices.
A number of methods applying the oscopy: magnetic force microscope technique have been proposed (for example, Japanese Patent Laid-Open No. 5-342502).
And IEICE Transactions C-2, Vol. J75-C
-2, No. 11,600 (1992)).

The recording method in this recording / reproducing method is based on the same principle as the conventional perpendicular magnetic recording. Further, the distance between the medium and the magnetic probe at the time of recording is devised so as to be as close as possible, and for example, the distance is controlled so that the distance is kept close to several Å where the repulsive force between atoms works.

On the other hand, the reproducing method uses the same magnetic force detecting method as the MFM. The main method of detecting magnetic force in MFM is that when a cantilever having a magnetic probe attached to its tip is vibrated at its mechanical resonance frequency, the cantilever is caused by the gradient of the magnetic force acting between the magnetic probe and the recording medium. The fact that the resonance frequency of is shifted is used. Specifically, a method of detecting the shift amount of the resonance frequency itself by FM demodulation (Reference 1: J. Vac. Sci. T)
echno. B12 (3) 1591 (1994)),
A method for detecting amplitude fluctuations of frequencies near the resonance frequency by AM demodulation (Reference 2: J. Appl. Phys. 61 (1
0), 4723 (1987)).

[0006]

By the way, in any of the above methods, since the mechanical resonance frequency of the cantilever is used as the carrier frequency, the reproduction rate cannot exceed the resonance frequency. Therefore, in order to increase the reproduction rate, it is necessary to increase the spring constant or reduce the mass of the cantilever in order to increase the resonance frequency.

If the spring constant is increased, the amount of deformation of the cantilever due to the magnetic force is reduced and the sensitivity is lowered. Therefore, it is advantageous to form the cantilever in a minute size. For example, the length is 2 μm, the width is 0.5 μm, and the thickness is 0.1 μm.
When a silicon lever having the shape of is formed, the spring constant is 2.5 N / m and the resonance frequency is 33 MHz (Reference 2). However, since the area of this cantilever is very small, it is difficult to detect the amount of distortion of the cantilever by the optical interference method or the optical lever method, that is, to reproduce the signal.

As described above, it is difficult to realize a reproducing rate on the order of MHz by the magnetic force reproducing method using the mechanical resonance of the cantilever. Moreover, since the probe is vibrated during reproduction, the distance between the medium and the probe must be made larger than during recording, and the reproduction resolution is unavoidably lower than the recording resolution.

Further, since the method of controlling the distance between the medium and the probe differs between recording and reproduction, there is a drawback that the structure of the recording / reproducing apparatus becomes complicated.

The present invention solves these problems, and provides a magnetic head capable of high-speed reproduction on the order of MHz by using a magnetic probe, and a magnetic reproducing apparatus using the magnetic head. It is another object of the present invention to provide a magnetic recording / reproducing apparatus capable of stably controlling the distance between the magnetic probe and the medium during recording and reproduction by the same method.

[0011]

Therefore, in the present invention, a conductor wire having electrodes at both ends and a magnetic gap having a sharp tip disposed so as to cover a part of the conductor wire between the electrodes are provided. A magnetic head is composed of a soft magnetic probe that does not have it and an insulating substrate that holds the conductor wire and the soft magnetic probe.

Further, an oxide film is formed on the entire surface of the Si substrate, a first soft magnetic film pattern is deposited on a part of the oxide film, and a part of the first soft magnetic film pattern is covered. Moreover, a conductor line pattern whose both ends extend to the oxide film is formed by deposition on the first soft magnetic film pattern and the oxide film, and the conductor line pattern on the first soft magnetic film pattern is covered. As described above, the second soft magnetic film pattern having a sharp tip is formed, and then the Si substrate is dissolved and removed to manufacture the magnetic head.

Further, a magnetic medium that is minutely magnetized according to a recording signal, the magnetic head that is arranged close to the medium surface of the magnetic medium, and a position facing the magnetic head with the magnetic medium sandwiched therebetween are perpendicular to the medium surface. Bias magnetic field generating means for applying a DC bias magnetic field, carrier signal generating means for supplying a high-frequency current of a constant amplitude to both electrodes of the conductor wire of the magnetic head, and a recording signal by demodulating a reproduction signal generated between the both electrodes. A reproduction signal processing means for outputting reproduction signals of the same format constitutes a magnetic reproduction device.

Further, a magnetic medium having an easy axis in the vertical direction, the magnetic head arranged close to the medium surface of the magnetic medium, and a magnetic medium sandwiching the magnetic medium at the time of a recording operation, perpendicular to the medium surface. A recording signal magnetic field generating means for applying a recording signal magnetic field according to the recording signal, and a bias magnetic field generating means for applying a DC bias magnetic field perpendicular to the medium surface from a position facing the magnetic head with the magnetic medium sandwiched during the reproducing operation. , Carrier signal generating means for supplying a high-frequency current having a constant amplitude to both electrodes of the conductor wire of the magnetic head during a reproducing operation, and demodulating a reproduced signal generated between the both electrodes to output a reproduced signal of the same format as the recording signal. The reproduction signal processing means constitutes a magnetic recording / reproducing apparatus.

[0015]

In the magnetic head of the present invention, since the soft magnetic probe having a sharp tip surrounds the conductor wire, the recording magnetization of the magnetic medium is reproduced as the impedance change of the probe portion. You can

Since this magnetic head can be manufactured by using a thin film pattern process on a Si substrate, it can be mass-produced and can be supplied at a low cost.

The magnetic reproducing apparatus of the present invention utilizes that the high frequency impedance of the soft magnetic probe portion of the magnetic head is changed by the magnetic field from the minute magnetized area recorded on the recording medium. Specifically, by the carrier signal generating means, a high frequency carrier signal current is passed through the magnetic head,
A carrier signal voltage is generated across the electrodes of the magnetic head. Thereby, the reproduction signal processing means can detect the change in the high frequency impedance according to the recording magnetization as the change in the carrier signal voltage, and can demodulate the detected signal voltage to obtain the reproduction signal.

At this time, in this magnetic reproducing apparatus, since the DC bias magnetic field is applied to the soft magnetic probe by using the DC bias generating means, the amplitude of the carrier signal voltage varies with respect to the recording magnetization direction and its intensity. It is possible to use a region that changes linearly, and it is possible to obtain a reproduction signal of the same format as the recording signal by demodulating.

In this magnetic reproducing apparatus, since the recorded information on the magnetic medium can be reproduced without mechanically resonating the magnetic head, the reproduction rate is not limited by the mechanical resonance frequency as in the conventional case. In the case of this device, the reproduction rate is limited by the carrier signal frequency, but in principle, the reproduction rate can be increased up to the magnetic resonance frequency of the soft magnetic probe or lower, so it is sufficiently higher than the conventional device. The playback rate can be achieved.

Further, in the magnetic recording / reproducing apparatus of the present invention, since it is not necessary to excite the magnetic head during reproduction, the distance between the medium and the probe can be made equal during recording and during reproduction. The reproduction resolution does not become lower than the recording resolution. Further, the same method for controlling the distance can be used at the time of recording and reproducing, so that the structure of the magnetic recording / reproducing apparatus is simplified.

Further, in this magnetic recording / reproducing apparatus, the auxiliary magnetic pole excitation type perpendicular recording is performed, so that the magnetic head can be shared during recording and reproducing, and the recording signal magnetic field generating means during recording and reproducing. The bias magnetic field generating means can also share the auxiliary magnetic pole portion. Therefore, the configuration is simplified as compared with the conventional one.

[0022]

【Example】

(First Embodiment) In the first embodiment, the basic structure of the magnetic head of the present invention and the reproducing principle thereof will be described. This magnetic head has a length of about 0.5 m, as shown in the perspective view of FIG.
m, width about 0.2 mm, thickness about 5 μm SiO ₂ substrate 3
And a soft magnetic probe 1 made of a substantially conical NiFe alloy formed thereon and a conductor wire 2 made of an Au thin film, and the wide portions 2a and 2b at the ends of the conductor wire 2 constitute extraction electrodes. are doing.

The conical soft magnetic probe 1 has a bottom diameter of about 2 μm and a height of about 3 μm, and the tip portion 10 of the soft magnetic probe 1 has a sharp shape with a radius of about 250 Å. There is.

FIG. 2 is a partially enlarged view of the xx 'cross section shown in FIG. The conductor wire 2 penetrates the soft magnetic probe 1.

From FIGS. 1 and 2, it is considered that the soft magnetic probe 1 and the conductor wire 2 are equivalent to a state in which the coil is wound around the toroidal core once. Therefore, the impedance of the soft magnetic probe 1 is proportional to the product of the magnetic permeability μ and the frequency ω. When the external magnetic field Hex is applied to the soft magnetic probe 1, the impedance is lowered according to the magnetic field strength.

The reproducing principle of the magnetic head of this embodiment is that the impedance change of the soft magnetic probe 1 portion due to the external magnetic field can be detected as a voltage change generated between the electrode terminals 2a and 2b. However, when the soft magnetic probe 1 is magnetically saturated by an external magnetic field, impedance change does not occur. Therefore, the magnetic head of the present embodiment is the soft magnetic probe 1
The largest magnetic field from the magnetic medium to be reproduced (saturation magnetization of the medium) when the tip 10 of the disk is almost in contact with the magnetic medium.
Below, the size of the soft magnetic probe 1 is determined so that the soft magnetic probe 1 is not saturated.

Here, 1c is an electrode 2a, 2b of the conductor wire 2.
When a high frequency voltage is applied between them and a high frequency current flows perpendicularly to the paper surface, the depth (skin depth δ) where the magnetic flux passes through the surface of the soft magnetic probe 1 due to eddy current loss is shown.
That is, it can be seen that the soft magnetic probe 1 responds to the external magnetic field in the range of the skin depth δ from the tip 10. Since the magnetic field from the magnetic medium on which information is recorded decreases in inverse proportion to the square of the distance r from the magnetic medium, if δ is too large, the change in the magnetic field strength hardly appears as a change in impedance. Since δ decreases in inverse proportion to the square root of the frequency ω,
In the present embodiment, the carrier signal frequency ω at which the impedance change of the soft magnetic probe 1 due to the smallest magnetization to be reproduced can be detected in the state where the tip 10 of the soft magnetic probe 1 is substantially in contact with the magnetic medium is experimentally determined. I asked. As a result, the carry signal frequency ω was 150 MHz.

(Second Embodiment) In the second embodiment, a magnetic reproducing apparatus and a magnetic recording / reproducing apparatus using the magnetic head of the first embodiment will be described.

As shown in FIG. 3, this apparatus rotates a rotating disk 34, a disk-shaped magnetic medium 32 having an easy axis in the vertical direction, a rotating shaft 34 which holds the disk-shaped magnetic medium 32 and rotates. The spindle motor 33, the magnetic head 310 of the first embodiment having the soft magnetic probe 1, and the electrodes 2a and 2b of the magnetic head 310 have a high-frequency current Ic of carrier signal frequency fc.
A carrier signal generating circuit 30 for flowing a signal, a reproduction signal processing circuit 31 for performing a predetermined process on a reproduction signal having a carrier signal frequency fc generated between the electrodes 2a and 2b of the magnetic head 310, and outputting the reproduced signal from a terminal 35; Auxiliary magnetic pole 36 installed at a position facing the soft magnetic probe 1 of the magnetic head 310 with 32 interposed therebetween, a DC power supply circuit 39 for supplying a predetermined DC exciting current to the auxiliary magnetic pole 36 during reproduction, and a terminal 302 A recording signal processing circuit 38 for supplying an alternating excitation current of a predetermined level to the auxiliary magnetic pole 36 in accordance with a recording signal input from
37b, and a changeover switch 37 for connecting 37a and 37c during the reproducing operation.

The disk-shaped magnetic medium 32 is, for example, a glass disk having a very smooth surface and a permalloy film having a film thickness of 0.5 μm as a backing layer and a film thickness of 0.3 μm as a recording layer.
and a CoCr film of m.
It has a diameter of 25 mm and is rotated by a spindle motor 33 at a rotation speed of 2400 rpm.

The soft magnetic probe 1 of the magnetic head 310 is
The height direction is made to coincide with the vertical direction of the disk-shaped medium 32, and the disk-shaped medium 32 is arranged close to the disk with a radius of 10 mm.

The carrier signal generation circuit 30 comprises an oscillation circuit and a constant current drive circuit. Carrier signal frequency fc
Is 150 MHz as described in the first embodiment. The reproduction signal processing circuit 31 has the same configuration as that of a well-known AM demodulation circuit, and includes the electrodes 2a of the magnetic head 310,
2b, the carrier signal frequency fc, which is connected in parallel with the carrier signal generation circuit 30 and is generated between the electrodes 2a and 2b.
The reproduced signal is subjected to a predetermined process to be converted into a reproduced signal corresponding to the recording signal and output.

As the auxiliary magnetic pole 36, a magnetic ferrite having a columnar structure with a multiplicity of coils is used. The recording signal processing circuit 38 is composed of a generally well-known recording amplifier, and outputs an AC exciting current of a predetermined level according to a recording signal input from the terminal 302 during recording.

Next, the actual recording / reproducing operation will be described with reference to FIGS. 4 and 5. First, recording / reproducing to / from the disk-shaped magnetic medium 32 by the magnetic head 310 is performed while the magnetic medium 32 is rotating. At this time, the distance between the medium 32 and the probe 1 or the control of the distance is an important factor that influences the recording / reproducing resolution. The shorter the distance, the better the recording / reproducing resolution. Here, the spring constant k and the resonance frequency fr of the magnetic head 310 are k = 2.5 N / m and fr = 16.n, depending on the dimensions and materials described in the first embodiment.
It is about 5 kHz. When the magnetic head 310 has such a small spring constant and a resonance frequency sufficiently higher than the rotation cycle, it is possible to perform distance control using atomic force.

Therefore, in this embodiment, the distance between the probe 1 and the medium 32 is set to the number Å at which the repulsive force between the atoms acts, and this interatomic force is measured as the amount of deflection of the magnetic head 310 by the light lever method or the like. The magnetic head 310 is moved vertically by a piezo element or the like so that the amount of bending becomes constant.

The recording operation of the present embodiment is based on the well-known auxiliary magnetic pole excitation type perpendicular recording method, and is based on the IEICE Transactions C-2, Vol. J75-C-
2, No. This is the same as the recording method using the soft magnetic probe and the auxiliary magnetic pole disclosed in 11,600 (1992). That is, a recording signal is input from the input terminal 302 to the recording signal processing circuit 38, where it is amplified to a current of a predetermined level, and then input to the coil of the auxiliary magnetic pole 36 via the changeover switch 37 to excite the auxiliary magnetic pole 36. To do. By the excitation of the auxiliary magnetic pole 36, a part of the magnetic medium 32 near the tip of the soft magnetic probe 1 is magnetized and the recorded information remains on the medium.

On the other hand, the reproducing operation is performed as follows. This magnetic reproducing method utilizes that the high frequency impedance at the carrier frequency fc of the soft magnetic probe 1 changes due to the external magnetic field, and the high frequency current Ic at the frequency fc generated by the carrier signal generating circuit 30 is applied to the magnetic head 310. Electrode 2
The voltage change based on the impedance change between the electrodes 2a and 2b is detected by the reproduction signal processing circuit 31.

Here, the magnetic head 31 at the frequency fc
The total impedance (Z
t) is the impedance (Ztip) of the soft magnetic probe 1 and other resistance components (for example, DC resistance of the conductor wire 2).
The value is the sum of and.

FIG. 4 shows the dependency of the ratio of the change amount of Ztip to Zt on the external magnetic field Hex. As can be seen from FIG. 4, this impedance change ratio depends on the magnitude of the external magnetic field, but not on the direction of the magnetic field.

Therefore, the original recorded information cannot be obtained when the reproduced signal is demodulated as it is. Therefore, in this embodiment, the magnetic field Hsig from the magnetic medium 32 is reproduced at the time of reproduction.
It was decided to apply the DC bias magnetic field Hb so as to generate a linear impedance change ΔZtip. This DC bias magnetic field is applied by flowing a DC bias current from the dc power supply 39 to the auxiliary magnetic pole 36 in FIG.

As a result, the impedance change ratio is shown in FIG.
Since the magnetic head 310 has a linear response to the signal magnetic field Hsig from the magnetic medium 32, the reproduced signal from the magnetic head 310 is AM-modulated with the carrier signal frequency fc as a carrier. You can see it becomes a wave. Therefore, the reproduction signal generated between the electrodes 2a and 2b of the magnetic head 310 is AM-demodulated by the reproduction signal processing circuit 31, and a reproduction signal equal to the recording signal is output from the output terminal 35.

5A and 5B, a reproduced signal waveform of 50 MHz input to the reproduced signal processing circuit 31 and an AM demodulation of the reproduced signal waveform of the reproduced signal processing circuit 31 by the reproduced signal processing circuit 31 are shown in FIGS.
The signal waveform of 0 MHz is shown. In this embodiment, 5
The reproduced signal waveform up to 0 MHz had a sufficient SN ratio, and high-density recording / reproduction up to a bit length of 500 Å was possible at a reproduction rate of 100 Mbps.

As described above in the first and second embodiments, since the magnetic head of the present invention is composed of the soft magnetic probe, the conductor wire and the electrode arranged so as to penetrate the soft magnetic probe, It is possible to detect a high frequency impedance change of MHz order of the soft magnetic probe caused by the presence of an external magnetic field. Further, in the magnetic recording / reproducing apparatus, since a DC bias magnetic field is applied so that the impedance change with respect to the external magnetic field has a linear response, by AM demodulating the reproduced signal of the magnetic head, the carrier signal frequency up to the carrier frequency fc can be obtained. It is possible to reproduce at a high reproduction rate.

The mechanical resonance frequency of this magnetic head may be up to about 10 times the rotation period in order to keep the distance between the probe and the medium constant, and has no relation to the reproduction rate.

In the second embodiment, the atomic force is used as the method of controlling the distance between the soft magnetic probe 1 of the magnetic head 310 and the disk-shaped magnetic medium 32, but the same effect can be obtained. Other methods may be used. An example thereof will be described in a fourth embodiment described later.

(Third Embodiment) In a third embodiment, a method of manufacturing the magnetic head of the present invention will be described.

6A to 6E show the magnetic heads in the manufacturing process arranged in the order of the manufacturing process. Explaining in the order of steps, the Si substrate 61 having a thickness of 300 μm is formed in the steam.
By heating to 00 degrees, a silicon oxide film (SiO ₂ film) having a thickness of about 5 μm is formed on the surface of the Si substrate 61 (FIG. 6).
(A)).

Next, a NiFe film having a thickness of 2 μm is deposited on the entire surface of the SiO ₂ film 62 by a sputtering method or a vapor deposition method, and a diameter of about 3 μm is formed by using a photolithography technique.
The NiFe film 63 having a substantially cylindrical shape is patterned. The patterning can be performed by ion beam etching (IBE) using Ar gas or the like (FIG. 6B).

Then, similarly to the NiFe film, SiO ₂
An Au thin film having a thickness of 0.5 μm is formed on the entire surface of the film 62 by vapor deposition, and then patterned into a conductor line 64 shape by IBE (FIG. 6C). Here, in order to further reduce the resistance of the conductor line 64, the film thickness of the other conductor lines 64 is made thicker to a total of 4 μm except on the NiFe film 63. The method for thickening the film is the above-described repetition, and the Au film having a film thickness of 3.5 μm is vapor-deposited and IBE is performed (FIG. 6C).

Next, a soft magnetic probe 65 having a sharp tip
Was formed using the following lift-off method. First, using a positive resist of Hoechst AZ4000 series which can be patterned with a relatively thick film, a resist pattern having a film thickness of 4 μm was formed on the NiFe film 63 so that a hole having a diameter of 3 μm was formed. However, the holes were developed by performing heat treatment after exposure so that the cross section of the holes had an inverted trapezoidal shape. A NiFe film was sufficiently formed on the entire surface of the resist pattern having the inverted trapezoidal cross section by the sputtering method until the hole was closed.
After that, the resist pattern is dipped in a resist stripping solution and stripped off. As a result, as shown in FIG.
Thus, the soft magnetic probe 65 composed of the e film was obtained. When observing the tip of the soft magnetic probe 65 with an SEM, the radius of the tip is about 250.
It was Å (Fig. 6 (d)).

Finally, the Si substrate 61 was dissolved and removed in the KOH solution to obtain the magnetic head 310 (FIG. 6).
(E)).

Although the method for obtaining one magnetic head has been described in the present embodiment, the same magnetic head can be mass-produced by implementing this manufacturing method on a Si wafer substrate.

As described above, this magnetic head is
Since it is possible to manufacture the Si wafer substrate, which is often used in SI manufacture, by the above-described thin film process, it is possible to mass-produce a highly accurate magnetic head at a low cost.

(Fourth Embodiment) In the fourth embodiment, a holding means of the magnetic head in the magnetic recording / reproducing apparatus different from that of the second embodiment will be described.

In this magnetic recording / reproducing apparatus, as shown in FIG. 7, the magnetic head 71 is fixed to an auxiliary substrate 72 having the same material shape as that of a conventional HDD slider (excluding the conventional electromagnetic conversion element). . The magnetic head 71 may be fixed to the so-called ABS surface of the auxiliary substrate 72 as shown in FIG. 7A or may be fixed to the surface between the ABS surfaces as shown in FIG. 7B. good. Auxiliary board 72 with magnetic head 71 fixed
Like a conventional HDD slider, is supported by a leaf spring 73 made of a stainless material, and the spring force of the leaf spring 73 presses the magnetic head 71 of the auxiliary substrate 72 perpendicularly to the medium 32 direction.

In this device, in both cases of FIGS. 7A and 7B, the pressure exerted on the ABS surface of the slider 72 by the air flow generated by the rotation of the disk 32 and the spring force of the leaf spring 73 are The balance keeps the distance between the probe and the medium 32 constant.

Therefore, in this apparatus, a magnetic recording / reproducing apparatus can be realized with a very simple structure without using the optical lever method as described in the second embodiment.

[0058]

As is clear from the above description of the embodiments, the magnetic head of the present invention is not limited to the mechanical resonance frequency of the reproducing rate, and therefore recording / reproducing can be performed at a high reproducing rate of MHz order. . Further, since the magnetic recording / reproducing apparatus of the present invention has a structure in which the control of the distance between the probe of the magnetic head and the medium, the auxiliary magnetic pole, etc. are shared during recording and reproduction, a high density can be achieved by a simple structure. In addition, high-speed recording / reproduction can be realized. Furthermore, the magnetic head of the present invention is
Since it can be collectively formed by a thin film process similar to the I manufacturing process, it can be mass-produced at low cost.

[Brief description of drawings]

FIG. 1 is a perspective view of a magnetic head according to a first embodiment of the invention.

FIG. 2 is a sectional view of a soft magnetic probe of the magnetic head,

FIG. 3 is a schematic diagram showing a configuration of a magnetic recording / reproducing apparatus according to a second embodiment of the present invention,

FIG. 4 is a diagram showing a change in impedance of the magnetic head with respect to an external magnetic field;

FIG. 5 is a waveform diagram of a reproduction signal (a) of the magnetic head of the magnetic recording / reproducing apparatus and an output signal (b) of the reproduction signal processing circuit;

FIG. 6 is a schematic view showing a method of manufacturing a magnetic head according to a third embodiment of the invention,

FIG. 7 is a diagram showing a magnetic head fixing structure according to a fourth embodiment of the present invention.

[Explanation of symbols]

1,65 Soft magnetic probe 1c Surface depth where magnetic flux passes 2,64 Conductor wires 2a, 2b Both ends of conductor wire 3,62 Insulation substrate (SiO ₂ ) 30 Carrier signal generation circuit 302 Recording signal input terminal 31 Reproduction signal processing Circuits 310, 71 Magnetic head 32 Disc-shaped magnetic medium 33 Spindle motor 34 Rotation axis 35 Playback signal output terminal 36 Auxiliary magnetic pole 37 Changeover switch 38 Recording signal magnetic field generation circuit 39 DC bias magnetic field generation power supply circuit 61 Si substrate 63 NiFe film 72 HDD Slider 73 spring plate

Claims (4)

[Claims] 1. A conductor wire having electrodes at both ends, and a soft magnetic probe having a sharp tip and having no magnetic gap, arranged so as to cover a part of the conductor wire between the electrodes, A magnetic head comprising a conductor wire and an insulating substrate holding the soft magnetic probe. 2. An oxide film is formed on the entire surface of a Si substrate, a first soft magnetic film pattern is deposited on a part of the oxide film, and a part of the first soft magnetic film pattern is formed. A conductor line pattern that covers and extends at both ends thereof onto the oxide film is formed by depositing on the first soft magnetic film pattern and the oxide film.
Forming a second soft magnetic film pattern having a sharp tip on the first soft magnetic film pattern so as to cover the conductor wire pattern thereon, and then removing the Si substrate by dissolution. The method of manufacturing a magnetic head according to claim 1, wherein: 3. A magnetic medium that is minutely magnetized according to a recording signal, and is arranged close to the medium surface of the magnetic medium.
And a bias magnetic field generating means for applying a DC bias magnetic field perpendicularly to the medium surface from a position facing the magnetic head with the magnetic medium sandwiched between the magnetic head and a fixed end electrode of a conductor wire of the magnetic head. A magnetic recording medium, comprising: carrier signal generating means for supplying a high-frequency current of amplitude; and reproduction signal processing means for demodulating a reproduction signal generated between the both electrodes to output a reproduction signal of the same format as the recording signal. Playback device. 4. A magnetic medium having an easy axis in the vertical direction,
The magnetic head according to claim 1, which is arranged close to a medium surface of the magnetic medium, and recording according to a recording signal from a position facing the magnetic head with the magnetic medium interposed therebetween in a direction perpendicular to the medium surface during recording operation. Recording signal magnetic field generating means for applying a signal magnetic field, bias magnetic field generating means for applying a DC bias magnetic field perpendicular to the medium surface from a position facing the magnetic head with the magnetic medium sandwiched during the reproducing operation, and a reproducing magnetic field generating means during the reproducing operation. Carrier signal generating means for supplying a high-frequency current of constant amplitude to both electrodes of the conductor wire of the magnetic head, and a reproduction signal for demodulating a reproduction signal generated between the both electrodes and outputting a reproduction signal of the same format as the recording signal. A magnetic recording / reproducing apparatus comprising: a processing unit.