JPH08146197A - Reflecting mirror fixing method and reflecting mirror holder - Google Patents

Abstract

PURPOSE: To provide a reflecting mirror holder, by which a reflecting mirror can be held without damaging the image formation performance. CONSTITUTION: A reflecting mirror holder comprises a holding member 17a for storing a Wolter type reflecting mirror 16, and plate-like adapter members 20a, 20b which are made adhere to both end surfaces 16a, 16b of the Wolter type reflecting mirror 16 stored in the holding member 17 and fitted to the holding member 17a by plural fitting screws 22. An opening part of the same shape and size as those of a circular opening part of the reflecting mirror 16 which does not obstruct, but passes an X-ray which enters the inner surface of the reflecting mirror 16 to be reflected is formed on each of the adapter members 20a, 20b. The adapter members are made adhere to the end surfaces 16a, 16b of the reflecting mirror 16 in such a manner that the opening parts are aligned with the opening part of the reflecting mirror 16.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of fixing a cylindrical reflecting mirror that collects light rays by internal reflection and a holder thereof, and more particularly to an X-ray reflecting mirror used in a photoelectron spectrometer, an X-ray microscope and the like. And a holder for the same.

[0002]

2. Description of the Related Art X-rays are characterized by having a shorter wavelength than visible light and a higher penetrating power for a sample than electron beams. On the other hand, the element has a specific fluorescent X-ray or absorption edge, and by analyzing it, information at the atomic level regarding the sample can be obtained. Therefore, electronic engineering, material engineering,
As an analysis method in biotechnology, a photoelectron spectrometer or X
Ultra-high vacuum X-ray analyzers such as a line microscope have come to be used.

However, in the X-ray wavelength region, the refractive index of the substance is extremely close to 1, so that it is difficult to manufacture a refraction type lens or a direct-incidence reflecting mirror as in the visible light region. Therefore, at present, some optical systems for condensing X-rays are considered, and among them, one using an internal reflection rotating body reflecting mirror is drawing attention.

As a typical example of this rotating body reflecting mirror, Wolt
An er-type reflector is mentioned. This optical system has a configuration in which a cylindrical inner surface is composed of a rotating hyperboloid and a spheroid that share a single focal point, the inner surface of which is a total reflection surface of X-rays, and the inner surface collects X-rays. Has become.

There are many materials for the Wolter type reflecting mirror depending on the manufacturing method, but typical materials among them are Pyrex glass (SiO 2) and epoxy resin.

In general, the Wolter type reflecting mirror 16 is formed by laminating a member such as Pyrex glass on the surface of a mold for determining the shape of the reflecting mirror surface of the inner surface, and the thickness thereof is about 1 to 4 mm. To manufacture. For this reason, even in the case of reflecting mirrors having the same reflecting mirror surface shape and the same optical characteristics, there are many cases where the outer shape is different and the outer shape does not become a cylindrical shape having a constant size.

As a conventional method for fixing the Wolter type reflecting mirror having such a structure, there is a method as shown in FIG. 5, for example.

This fixing method is used for the Wolter type reflection mirror 16 used in the X-ray microscope apparatus, and the Wolter type reflection mirror 16 is formed in the reflection mirror holder 17 as shown in FIG. Insert it into the space where
It is a method of fixing the Wolter type reflection mirror 16 to the reflection mirror holder 17 by 8a, 18b, 18c and 18d.

In this conventional method, the cap screws 18a ...
The symbol ∘ passes through a screw hole provided on the side surface of the reflecting mirror holder 17 and projects into the space inside the reflecting mirror holder 17, and the tip of each screw is of the Wolter type reflecting mirror 16 inserted in the space. Wolter by touching part of the side
The mold reflector 16 is supported and fixed.

Further, by individually adjusting the amount of the pressing screws 18a ... Protruding inside the reflecting mirror holder 17, even for the Wolter type reflecting mirrors 16 having different outer shapes, it is always possible to It can be fixed at a position where the central axis of the reflecting mirror holder 17 and the central axis of the Wolter type reflecting mirror 16 are substantially aligned with each other.

The reflecting mirror holder 17 to which the Wolter type reflecting mirror 16 is fixed in this way is the same as the Wolter type reflecting mirror 16 and X.
It is attached to an alignment stage 19 for more accurate alignment with the line optical axis, and is incorporated in the X-ray microscope apparatus.

[0012]

However, in the fixing method of the reflecting mirror as in the above-mentioned conventional example, the pressing screw 18 is used.
The a, 18b, 18c and 18d are in contact with the side surface of the Wolter type reflection mirror 16. Therefore, the pressing force of each screw may be concentrated on a part of the side surface of the Wolter type reflecting mirror 16 with which the tip of each screw is in contact, and the vicinity of the contact point may be deformed.

Further, in the X-ray microscope as in the above conventional example, the Wolter type reflecting mirror 16 is irradiated with X-rays.
Heats up. This generated heat causes the cap screws 18a ...
When it is transmitted to, the screws are thermally expanded, so that a part of the side surface of the Wolter type reflecting mirror 16 in contact with the tip end of each screw is further deformed.

The amount of deformation caused by the above causes becomes the aberration of the Wolter type reflecting mirror 16, and the Wolter type reflecting mirror 1
This is a cause that the original image forming performance for X-ray in 6 cannot be obtained.

According to the present invention, without impairing the imaging performance,
An object of the present invention is to provide a method of fixing a reflecting mirror to a holding member and a reflecting mirror holder to which the method is applied.

[0016]

The above object is to provide a reflecting mirror fixing method of fixing a cylindrical reflecting mirror having an inner surface having a reflecting mirror surface and having a light collecting action to a holding member to which the reflecting mirror is attached. An adapter member configured by forming an opening having a defined shape is provided with an entrance and a reflection of the reflecting mirror so that the opening does not substantially obstruct the optical path of a light ray incident on the reflecting mirror surface and reflected. By attaching to at least one of both ends of the reflecting mirror forming a mouth so as to be in contact with a larger area than a predetermined area, and attaching the adapter member fixed to the reflecting mirror to the holding member. This is achieved by a reflecting mirror fixing method, characterized in that the reflecting mirror is fixed to the holding member.

The above object is also formed in a reflecting mirror holder for holding a cylindrical reflecting mirror having an inner surface as a reflecting mirror surface and having a light converging action, by forming an opening of a predetermined shape. A portion is overlapped with an opening of one of the entrance and the reflection of the reflecting mirror, and has an adapter member fixed to an end of the reflecting mirror, and a holding member to which the adapter member is attached, The adapter member is fixed to the end of the reflecting mirror, and an opening formed by overlapping the opening of the adapter member and the opening of the reflecting mirror is incident on the reflecting mirror surface and reflected. This is achieved by a reflecting mirror holder characterized in that it forms a shape that does not substantially obstruct the optical path of a light beam, and is fixed so as to come into contact with the end portion of the reflecting mirror in an area wider than a predetermined area. .

[0018]

According to the present invention, the adapter member constituted by forming the opening portion of the predetermined shape has the opening portion which substantially obstructs the optical path of the light beam incident on and reflected by the reflecting mirror surface of the reflecting mirror. So that the reflection mirror does not exist, the reflection mirror is fixed to the holding member by fixing it to at least one of both ends of the reflection mirror forming the entrance and the reflection port, and by attaching the fixed adapter member to the holding member. .

According to the present invention, the reflecting mirror is fixed through the adapter member fixed to the end of the reflecting mirror so that a larger area than the predetermined area is in contact with the reflecting mirror. Here, as the predetermined area of contact, an area larger than the total area of contact areas at the tips of the plurality of holding screws used in the conventional fixing method is selected. As a result, the force that acts during fixing is distributed over the entire contact area that is larger than the contact area in the conventional fixing method, so the amount of deformation at the reflecting mirror can be reduced compared to the conventional fixing method. it can.

Further, since the end portion of the reflecting mirror is fixed, even if the adapter member and the holding member are thermally expanded, the amount of deformation in the radial direction of the reflecting mirror surface which particularly affects the aberration of the reflecting mirror is described above. It can be made smaller than the fixing method using the side surface of the reflecting mirror according to the conventional example.

From the above, according to the present invention, the amount of deformation that occurs when the reflecting mirror is fixed can be reduced, so that the imaging performance of the reflecting mirror is deteriorated by the aberration due to the deformation. Is less.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A reflecting mirror holder according to a method of fixing a reflecting mirror to which the present invention is applied will be described below with reference to FIGS.

Prior to the description of this embodiment, an X-ray microscope in which the Wolter type reflecting mirror mounted on the reflecting mirror holder of this embodiment is used as a condenser optical system and an image forming optical system will be described.

In an X-ray microscope, as shown in FIG. 3, a condenser optical system 2 for condensing X-rays at a predetermined focal position, a sample holder 3 for holding a sample to be observed at the focal position, the sample An imaging optical system 4 for imaging the X-rays transmitted through and an imaging device 5 for imaging the formed X-ray image are arranged in series on the X-ray output optical axis of the X-ray generator 1. There is. Here, the optical path length of the X-ray optical system from the X-ray generator 1 to the imaging device 5 is about 2 m.

The entire X-ray optical system is housed in a vacuum chamber 7 that is evacuated by an exhaust system 6, and the interior of the vacuum chamber 7 is maintained at a predetermined degree of vacuum. Further, the X-ray image captured by the image capturing device 5 is displayed on the monitor display device 9 arranged outside the vacuum chamber 7.

The X-ray microscope further includes a disk-shaped X-ray shielding member 10 for shielding X-rays other than X-rays totally reflected by the reflecting mirror surfaces 12 and 13 of the Wolter type reflecting mirror used in the condenser optical system 2. And a disk-shaped X-ray shielding member 11 that shields X-rays other than X-rays totally reflected by the reflecting mirror surfaces 14 and 15 of the Wolter type reflecting mirror used in the imaging optical system 4.

In the X-ray microscope having the above-described structure, the sample capsule 8 loaded with the observation sample is set in the sample holder 3, and then the exhaust system 6 is operated to evacuate the vacuum chamber 7 to a vacuum degree. Is observed below 4.8 × 10 ^-2 Pa.

The soft X-ray beam emitted from the X-ray generator 1 is converged by the condenser optical system 2 and passes through the sample capsule 8 set on the sample holder 3. The passed soft X-rays are imaged on the imaging device 5 by the imaging optical system 4 and give an observation image to the monitor device 9 outside the vacuum chamber 7.

As described above, in the X-ray microscope using soft X-rays, 2 × 10 ^-3 μm ^-1 is applied to the soft X-rays under 1 atm.
In order to avoid absorption by the atmosphere, which has a degree of absorption,
Although it is necessary to keep the entire X-ray optical system at a high degree of vacuum according to its optical path length, since X-rays having a wavelength significantly shorter than visible light are used, higher resolution than conventional optical microscopes can be expected.

Further, in an X-ray microscope using soft X-rays,
It is possible to directly observe a biological sample through a permeable material, and by using the sample capsule 8 in which the biological sample is liquid-sealed together with the tissue culture solution, the physiological observation can be performed for a long time without damaging the biological sample. it can. Therefore, it is possible to eliminate the need for pretreatment such as drying of the sample or metal vapor deposition that damages the observation sample, as in the case of an electron microscope.

Next, one embodiment of the reflector holder to which the present invention is applied will be described in detail with reference to FIGS. The reflecting mirror holder 100 of this embodiment holds the Wolter type reflecting mirror 16 used in the condenser optical system 2 and the image forming optical system 4 of the X-ray microscope described above.

Here, FIG. 1A shows a state in which the reflecting mirror holder 100 of this embodiment is attached to the alignment stage 19, and FIG. 1B shows FIG. 1A viewed from the A direction. It is a side view. FIG. 2 is similar to FIG.
The principal part of (a) is expanded and shown.

The reflector holder 100 of this embodiment is shown in FIG.
As shown in FIG. 2, a holding member 17a provided with a cylindrical through hole having a size large enough to accommodate the Wolter type reflecting mirror 16, and a Wolter type housing accommodated in the holding member 17a. It has plate-shaped adapter members 20a, 20b which are adhered to both end faces 16a, 16b of the reflecting mirror 16 and are attached to the holding member 17a by a plurality of attaching screws 22 (four in this embodiment).

Wolter type reflecting mirror 16 and adapter member 20
For adhesion with a and 20b, an adhesive that can withstand use in high vacuum, for example, an epoxy resin adhesive is used. In the present embodiment, the adapter member 20a, so that almost the entire end surface of the Wolter type reflecting mirror 16 contacts.
It shall be bonded to 20b. 21a and 21b in the figure
Indicates an adhesive layer, but its thickness is exaggerated in order to clearly show the existence of the adhesive layer.

The actual thickness of the adhesive layers 21a and 21b is determined by various conditions such as the type of adhesive used, the weight of the reflecting mirror, and the adhesive area. In addition, as long as the force for supporting the reflecting mirror is concentrated and the reflecting mirror is not deformed, the contact area during bonding is not the entire end face of the reflecting mirror, but a part of the end surface of the reflecting mirror. It may be configured to.

The holding member 17a is made of stainless steel (SUS).
It is made of a material such as aluminum) and aluminum that can be used in a high vacuum with little outgas and sufficient mechanical strength.

In the present embodiment, the holding member 17a has a box shape having a cylindrical through hole, but the present invention is not limited to this, and the reflecting mirror 16 to be held is adapted as an adapter. The shape of the holding member 17a is not limited as long as it can be held via the members 20a and 20b. For example, it may be configured by a plate-shaped member processed so as to have a U-shaped cross section, and through-holes through which the reflecting mirrors pass are provided at both side portions of the U-shape.

The adapter members 20a, 20b can be made of metal such as stainless steel, aluminum, copper, etc.
Copper is preferable in consideration of ease of processing and good heat conduction.

Next, the shape of the adapter member will be described.

Since the shapes of the adapter members 20a and 20b are basically the same, the adapter member 2 will be described below.
0a will be described as an example, and description of the adapter member 20b will be omitted.

The adapter member 20a forms an opening 20a 'having a predetermined shape for passing X-rays, and at the same time, the Wo
The lter type reflecting mirror 16 has a portion bonded to the end surface 16a and a portion attached to the holding member 17a, and has, for example, a front shape as shown in FIG. 1 (b).

That is, the adapter member 20a of this embodiment.
An opening 20 a ′ having the same shape and size as the circular opening of the Wolter type reflecting mirror 16 is formed in.

Further, the adapter member 20a is fixed to the end surface 16a of the Wolter type reflecting mirror 16 via the adhesive layer 21a so that the opening 20a 'thereof matches the opening of the Wolter type reflecting mirror 16. The ring-shaped portion 201 around the portion 20a ′ and the outside of the ring-shaped portion 201,
And a screw mounting portion 202 in which a hole for passing the mounting screw 22 is formed.

According to the configuration of the adapter member 20a as described above, the opening 20a 'of the adapter member 20a and the Wolter
The opening formed by combining with the opening of the reflection mirror 16 is of course the same as the opening of the Wolter reflection mirror 16 and is incident on the reflection surface of the inner surface of the Wolter reflection mirror 16. All reflected X-rays can pass unhindered.

The adapter member 20a is a plate-like member having a large surface area, and a part of the surface thereof is the holding member 1.
It is attached to the holding member 17a so as to come into contact with 7a. Therefore, the X-ray irradiation causes the Wolter type mirror 1
Even if heat is generated at 6, and the heat is transmitted through the adhesive layer 21a, the adapter member 20a can release the heat to the holding member 17a and radiate the heat from the surface, so that the heat can be effectively radiated. It is possible to suppress the thermal expansion of itself.

The adapter member 20a is manufactured, for example, by processing a copper plate into the shape described above by wet etching.

The reflecting mirror holder 100 of this embodiment has an alignment stage 19 for performing alignment of the Wolter type reflecting mirror 16 fixed to the reflecting mirror holder 100.
And mounted in the vacuum chamber 7 (see FIG. 3) of the X-ray microscope.

The alignment stage 19 determines the position of the Wolter type reflecting mirror 16 fixed to the reflecting mirror holder 100 by supporting the reflecting mirror holder 100 at a predetermined position, and fine adjustment necessary for the alignment at that position. Make adjustments.

The alignment stage 19 is, for example,
It is configured by combining an XYZ axis stage that enables parallel movement in the X, Y, and Z axis directions and a triaxial rotation stage that enables triaxial rotation or tilting.

In this embodiment, the Wolter type reflection mirror 16 is supported and fixed on the entire surfaces of both ends by the adapter members 20a and 20b attached to the holding member 17a via the adhesive layers 21a and 21b. Therefore, the Wolter type reflecting mirror 16
In this embodiment, the force required for supporting and fixing the above is dispersed over a very wide adhesive surface as compared with the conventional example as shown in FIG. Therefore, the deformation of the reflecting mirror surface of the rotating curved body of the Wolter type reflecting mirror 16 hardly occurs.

Therefore, according to the fixing method of this embodiment,
It is possible to fix the Wolter type reflecting mirror 16 without deteriorating the imaging performance of the Wolter type reflecting mirror 16 for X-ray due to the aberration due to the deformation.

Further, according to the present embodiment, since the adapter member is fixed to the end face forming the entrance or the reflection port which is the end of the reflecting mirror surface of the Wolter type reflecting mirror 16, the Wolter type reflecting device having a different outer shape is formed. Also in the reflecting mirror 16, if the shape of the reflecting mirror surface corresponding to the optical characteristic is the same, the same adapter member can be commonly used.

Further, according to the present embodiment, the Wolter type reflecting mirror 16 having the same shape of the reflecting mirror surface on the inner surface thereof has the adapter member 20a provided with the Wo even if the outer shape is different.
By bonding the end surface of the lter type reflecting mirror 16 to a predetermined position and further attaching the adapter member 20a bonded to the end surface to a predetermined position on the holding member 17a, it is possible to always and easily and in a certain positional relationship. The Wolter type reflecting mirror 16 can be fixed to the reflecting mirror holder 100 so that Here, the fixed positional relationship is, for example, a positional relationship in which the central axis of the reflecting mirror holder 100 and the central axis of the Wolter type reflecting mirror 16 coincide with each other.

In this embodiment, the adapter members 20a, 20a
Although b is fixed to the holding member 17a with the mounting screw 22, in the present invention, the mounting method is not limited as long as the adapter members 20a and 20b can be reliably fixed to the holding member 17a. The adapter members 20a and 20b may be fixed to the holding member 17a by adhesion.

Further, in this embodiment, the Wolter type reflecting mirror 16 is used.
Although the adapter members 20a and 20b are fixed to both end faces of the present invention, the present invention is not limited to this, and only one end face may be bonded to the adapter member.

Next, another embodiment of the reflector holder to which the present invention is applied will be described with reference to FIG.

The reflector holder 100 of this embodiment is shown in FIG.
The adapter member of the reflecting mirror holder of the above embodiment is provided with a light-shielding portion for blocking light rays that are not totally reflected by the reflecting mirror surface of the Wolter type reflecting mirror 16 and that pass near the central axis of the Wolter type reflecting mirror 16.

In this embodiment, it is assumed that the X-ray travels from the adapter member 20a to the adapter member 20b in FIG. In the description below and in FIG.
The same components as those in the embodiment of FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted.

The reflector holder 100 of this embodiment is shown in FIG.
1, a holding member 17a for housing the Wolter type reflecting mirror 16 which is the same component as that of the embodiment of FIG.
Both ends 16a and 16b of the Wolter type reflecting mirror 16 are adhered, and a plurality of mounting screws 22 (in this embodiment, 4
It has plate-shaped adapter members 20a and 20b attached to the holding member 17a.

The adapter members 20a and 20b have the same shape as that of the embodiment of FIG.
It is adhered to both end surfaces 16a and 16b of the Wolter type reflecting mirror 16.

In this embodiment, the adapter member 20a is further added.
Of the circular shading plate 23 having a diameter smaller than that of the opening 20a ′ of the same, and at the position where the center of the shading plate 23 and the center of the opening 20a ′ of the adapter member 20a coincide with each other, And a connecting beam 24.

The light shielding plate 23 and the connecting beam 24 are made of, for example, the same member as the adapter member in the embodiment of FIG. 1, and are manufactured integrally with the adapter member 20a, for example.

The light-shielding plate 23 is necessary to shield X-rays incident on the Wolter type reflecting mirror 16 from X-rays near the central axis of the Wolter type reflecting mirror 16 which are not reflected by the reflecting mirror surface of the Wolter type reflecting mirror 16. It has a large diameter. That is,
The ring-shaped opening formed between the shield plate 23 and the opening 20a of the adapter member 20a allows only the X-rays which are incident and reflected on the reflecting mirror surface to pass therethrough.

One of the connecting beams 24 is the adapter member 2
The shield plate 23 is arranged at the center position of the opening 20a 'by connecting the shield plate 23 to the shield plate 23 and the shield plate 23 on the other side. Therefore, the connecting beam 24 is located on the optical path of the X-ray that enters the reflecting mirror surface of the Wolter type reflecting mirror 16, and blocks the X-ray.

In this embodiment, X which is incident on the reflecting mirror surface.
Three thin connecting beams 24 are used in order to sufficiently reduce the influence of the connecting beams 24 on the lines. Each connecting beam 24
The shape is configured such that the area irradiated with X-rays is as small as possible within a range in which the mechanical strength capable of supporting the shield plate 23 can be secured.

According to this embodiment, the light shielding plate 23 is connected to the connecting beam 2.
Since it is constructed integrally with the adapter member 20a via the optical axis 4, it is possible to reduce the number of parts required when assembling the above-mentioned optical systems 2 and 4 (see FIG. 3) of the X-ray microscope.

Furthermore, according to this embodiment, the Wolter type reflecting mirror 16 and the shield plate 23 can be attached at the same time, so that the optical system can be efficiently assembled.

In this embodiment, the case where the shield plate 23 is provided on the adapter member 20a has been described, but the present invention is not limited to this, and for example, when the X-ray traveling direction is opposite. In addition, a similar shielding plate 23 may be provided on the adapter member 20b.

Further, in the present embodiment, the case where the number of the connecting beams 24 is three is shown, but mechanical strength can be ensured, and X which is incident on the reflecting mirror surface of the Wolter type reflecting mirror 16. The number may be appropriately increased or decreased as long as the influence on the line can be reduced.

In the embodiment shown in FIGS. 1 and 4, the X-ray
Although the Wolter type reflecting mirror has been described as an example, the fixing by the reflecting mirror holder of the present invention is not limited to this. The reflecting mirror may be, for example, an internal mirror using a spheroidal surface or a parabolic surface. Also,
The wavelength range of the light rays reflected by the reflecting mirror is not limited to X-rays,
For example, it may be ultraviolet light or visible light.

In the embodiment shown in FIGS. 1 and 4, X
Although the reflecting mirror holder suitable for use in the line microscope has been described, the device in which the reflecting mirror holder of the present invention can be used is not limited to this. For example, X-rays are focused on a substance, and secondary electrons or fluorescent X-rays emitted from the substance are detected to analyze the substance, such as a microbeam analyzer, which collects X-rays. It can be incorporated into almost any device that uses a reflector as the performing optical element.

[0072]

According to the present invention, a method of fixing the reflecting mirror to a holding member that holds the reflecting mirror without impairing the imaging performance, and a method of holding the reflecting mirror without impairing the imaging performance. It is possible to provide a reflecting mirror holder capable of performing the above.

[0073]

[Brief description of drawings]

FIG. 1A is a partial cross-sectional view showing the configuration of an embodiment of a reflector holder of the present invention. FIG. 1B: a side view of the reflecting mirror holder of FIG.

FIG. 2 is an enlarged cross-sectional view showing a main part of the reflector holder of FIG.

FIG. 3 is an explanatory diagram showing a schematic configuration of an X-ray microscope.

FIG. 4A is a partial cross-sectional view showing the configuration of an embodiment of a reflector holder of the present invention. FIG. 4B: A side view of the reflecting mirror holder of FIG.

FIG. 5 is a cross-sectional view showing a configuration example of a reflecting mirror holder using a conventional Wolter type reflecting mirror fixing method.

[Explanation of symbols]

1 ... X-ray generator, 2 ... Condenser optical system (Wo
lter type reflection mirror), 3 ... sample holder, 4 ... imaging optical system (Wolter type reflection mirror), 5 ... imaging device, 6 ...
・ Exhaust system, 7 ... Vacuum chamber, 8 ... Sample capsule, 9
... Monitor display device, 10, 11 ... Light-shielding plate, 1
2, 13, 14, 15 ... X-ray reflecting mirror surface, 16 ...
Wolter type reflecting mirror, 16a, 16b ... End face of Wolter type reflecting mirror, 17 ... Conventional Wolter type reflecting mirror holder, 1
7a ... Holding member, 18a, 18b, 18c, 18d ...
..Holding screws, 19 ... Alignment stage, 2
0a, 20b ... Adapter member, 20a '... Opening of adapter member, 21a, 21b ... Adhesive layer (adhesive), 22 ... Mounting screw, 23 ... Shading plate, 2
4 ... Connecting beam for fixing the shading plate, 100 ... Wolter type mirror holder according to the present invention.

Claims (9)

[Claims] 1. A reflecting mirror fixing method for fixing a cylindrical reflecting mirror having an inner surface having a reflecting mirror surface and having a light-collecting action to a holding member to which the reflecting mirror is attached, wherein an opening having a predetermined shape is formed. The adapter member configured as described above is used to form an entrance and a reflection port of the reflection mirror so that the opening does not substantially interfere with the optical path of the light ray that is incident on the reflection mirror surface and reflected. By attaching the adapter member, which is fixed to at least one of both ends so as to come into contact with a larger area than a predetermined area, and is fixed to the reflecting mirror, to the holding member, the reflecting mirror is fixed to the holding member. A method for fixing a reflecting mirror, characterized in that 2. The end portion of the reflecting mirror to which the adapter member is fixed according to claim 1,
A method for fixing a reflecting mirror, which is an end face of the reflecting mirror. 3. The adapter according to claim 2, wherein the adapter member and the end surface of the reflecting mirror are fixed to each other with an adhesive so that almost the entire end surface is in contact with the adapter member. Reflector fixing method. 4. A reflecting mirror holder for holding a cylindrical reflecting mirror having an inner surface as a reflecting mirror surface and having a light-collecting action, the opening having a predetermined shape is formed, and the opening is provided with the reflecting portion. Overlapping on either one of the entrance of the mirror and the reflecting opening, an adapter member fixed to the end of the reflecting mirror, and a holding member to which the adapter member is attached, the adapter member, An opening formed by overlapping the opening of the adapter member and the opening of the reflecting mirror at the end of the reflecting mirror does not substantially obstruct the optical path of the light beam that is incident on and reflected by the reflecting mirror surface. A reflecting mirror holder, characterized in that the reflecting mirror holder has a shape and is fixed so as to come into contact with the end portion of the reflecting mirror in an area larger than a predetermined area. 5. The end portion of the reflecting mirror to which the adapter member is fixed according to claim 4,
A reflector holder, which is an end face of the reflector. 6. The device according to claim 5, wherein the two adapter members are provided, and the two adapter members are fixed to the two end faces of the reflecting mirror and are attached to the holding member, respectively. And a reflector holder. 7. The two adapter members according to claim 6, wherein each of the two adapter members is fixed to the end surface of the reflecting mirror with an adhesive so that almost the entire end surface of the reflecting mirror contacts the adapter member. A reflector holder characterized by that. 8. The structure according to claim 7, wherein each of the two adapter members is a plate-like member forming an opening having the same shape as the opening of the end surface of the reflecting mirror to which the adapter is fixed. The reflector holder is fixed to the end surface of the reflector so that both openings of the plate-shaped member and the reflector coincide and overlap with each other. 9. The plate-shaped member according to claim 8, wherein the opening of the reflecting mirror is circular, and one of the two adapter members forms the same circular opening as the circular opening of the reflecting mirror. Members,
A light-shielding disc portion having a diameter smaller than the diameter of the opening, the light-shielding disc portion being inside the opening of the plate-shaped member, the plate-shaped member, so that their centers coincide A reflector holder characterized by being connected to.