KR101725139B1 - Electron microscope comprising multie-holder arranged sample-stage - Google Patents

Electron microscope comprising multie-holder arranged sample-stage Download PDF

Info

Publication number
KR101725139B1
KR101725139B1 KR1020150163450A KR20150163450A KR101725139B1 KR 101725139 B1 KR101725139 B1 KR 101725139B1 KR 1020150163450 A KR1020150163450 A KR 1020150163450A KR 20150163450 A KR20150163450 A KR 20150163450A KR 101725139 B1 KR101725139 B1 KR 101725139B1
Authority
KR
South Korea
Prior art keywords
sample
chamber
sample stage
vacuum
stage
Prior art date
Application number
KR1020150163450A
Other languages
Korean (ko)
Inventor
조복래
Original Assignee
한국표준과학연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국표준과학연구원 filed Critical 한국표준과학연구원
Priority to KR1020150163450A priority Critical patent/KR101725139B1/en
Application granted granted Critical
Publication of KR101725139B1 publication Critical patent/KR101725139B1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H01J37/165—Means associated with the vessel for preventing the generation of or for shielding unwanted radiation, e.g. X-rays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2005—Seal mechanisms
    • H01J2237/2006—Vacuum seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement

Abstract

The present invention relates to an electron microscope and a photo-electron fusion microscope including a sample chamber in which sample holders are continuously arranged and a movable sample stage is constituted as a part of a chamber wall, An electron beam column 10 having a vacuum exhaust pipe 30, which converges and emits an electron beam emitted from the electron beam irradiation unit 20; A sample chamber 100 including the electron beam column 10 as a whole or a part of an upper wall and having a hole formed at the center of the lower wall and having a vacuum exhaust pipe 31; A sample fixing part 210, which is opposed to the barrel through the opening 110 of the lower wall of the sample chamber 100, is continuously arranged, and an annular sealing member 210, which surrounds the opening of the lower surface of the lower wall of the sample chamber, A sample stage 200 in contact with the sample stage 120 via the sample stage 200, the sample stage 200 being horizontally moved in a state in which vacuum is maintained in the sample chamber, and sample arrangements successively arranged are exposed to the emerging electron beam; And a vacuum pump (40, 41) connected to the tube and the vacuum exhaust pipe of the sample chamber.

Description

ELECTRON MICROSCOPE COMPRISING MULTI-HOLDER ARRANGED SAMPLE-STAGE < RTI ID = 0.0 >

The present invention relates to an electron microscope having a sample stage capable of continuously observing, and more particularly, to an electron microscope having a sample stage in which sample holders are continuously arranged and a movable sample stage is constituted as a part of a chamber wall And a photo-electron fusion microscope.

Scanning Electron Microscopy (SEM) is a scanning electron microscope (SEM) that scans an electron beam focused on a specimen located in a sample chamber in which a vacuum is maintained. The scanning electron microscope (SEM) ) Is detected and the target sample is observed.

The electrons are so light that they bounce off when they hit gas molecules, so they can not actively move if there is air in the barrel. Therefore, the inside of the barrel of the electron microscope is maintained at a high vacuum level of about 10 -4 to 10 - 10 Torr.

The vacuum level of the sample chamber in which the electron beam emitted from the barrel is incident should be maintained at about 10 - 3 Torr. This is not only necessary for the electron to enter the sample surface well, but also for the high vacuum in the sample chamber. Because it can backflow. However, when the sample is put into the sample chamber from the outside or taken out of the sample chamber, the inside of the sample chamber becomes atmospheric pressure, so it is necessary to wait for a certain time until the sample chamber reaches the vacuum degree required for the electron microscope observation. As a method for reducing the waiting time, techniques such as an auxiliary sample room for preventing the sample room from being exposed to the atmospheric pressure are suggested.

U.S. Patent No. 8,530,856 discloses a technique for a fusion microscope that includes a sample chamber having a valve at a site connected to a barrel. However, the invention disclosed in the above patent can not maintain a vacuum when the sample enters and exits the sample chamber, and the size of the sample chamber increases to insert a light source or optical tube into the sample chamber, I still have problems.

More particularly, the present invention relates to a sample holder for holding a plurality of sample holders that can maintain an internal vacuum and shorten the observation time even when a sample goes into or out of a sample chamber of an electron microscope And an electron microscope and a photo-electron fusion microscope capable of rapid sample exchange and continuous observation by constituting a movable sample stage as a chamber wall of the sample chamber.

The present invention is an electron microscope including a sample stage in which a sample fixing part is continuously arranged, the electron microscope comprising: an electron beam barrel having a vacuum exhaust tube for converging and emitting an electron beam emitted from an electron source; A sample chamber including the electron beam barrel as a whole or a part of an upper wall, a hole formed at the center of the lower wall, and having a vacuum exhaust pipe; And a sample fixing part which is opposed to the barrel is continuously arranged through an opening of the lower chamber of the sample chamber and is brought into abutting contact with an annular sealing member surrounding the opening of the lower surface of the lower wall of the sample chamber for vacuum sealing, A sample stage in which a sample fixture continuously horizontally moved and continuously arranged in a maintained state is exposed to the emerging electron beam sequentially; And a vacuum pump connected to the tube and the vacuum exhaust pipe of the sample chamber, wherein the sample fixing part forms a sample groove in which a step is secured to prevent the sample stage from being caught by the annular sealing member during the horizontal movement, The material of the sample stage includes a radiation shielding member including X-rays, and the barrel is movable in parallel to the measurement position of the sample. The electron microscope includes a sample stage in which a sample holder is continuously arranged.

The vacuum chamber may further include a vacuum sub-chamber enclosing the outer wall of the sample chamber and including the outer wall as a part of the inner wall thereof and having a separate vacuum exhaust pipe, wherein the vacuum sub- There is provided an electron microscope comprising a sample stage in which a sample fixing portion is continuously arranged, the sample fixing portion being in contact with the sample stage through the annular sealing member and exposed to the emerging electron beam, the sample stage being surrounded by the annular sealing member .

The sample stage may be a conveyor belt type in which the sample fixing part is exposed to the outside, and the conveyor belt-type sample stage sequentially moves the sample fixing part into the sample chamber in accordance with the rotation of the conveyor wheel. There is provided an electron microscope including a sample stage in which fixing portions are continuously arranged.

The sample stage may be a ribbon type in which the metal plates formed by the predetermined number of the sample fixing portions are connected by a sealing material, the sealing material is a viton, a Teflon pad, or a magnetic fluid, And a sample stage in which a sample fixing section is continuously arranged, in which the sample fixing section sequentially moves into the sample chamber.

In the present invention, the sample stage may be a disk-shaped disk having the sample fixing portion formed at the rim portion thereof, and the sample fixing portion may be sequentially moved into the sample chamber as the sample stage is rotated, An electron microscope including a stage is provided.

The present invention also provides an electron microscope, wherein the vacuum evacuation portion of the vacuum sub-chamber is connected to the vacuum evacuation portion of the barrel, and the sample stage in which the sample securing portions are continuously arranged.

The present invention also provides an electron microscope, wherein the sample stage includes a sample stage in which sample fixation portions are successively arranged, through which light rays including visible light, infrared light, and ultraviolet light are transmitted.

The present invention also provides an electron microscope comprising the sample stage in which the sample fixture of claim 7 is continuously arranged; And an optical microscope section, wherein the optical microscope section comprises: an optical objective lens positioned at a lower portion of the sample stage to face the sample fixing section; An optical path splitting device for splitting the optical path from the sample fixing part to an optical path extending from the optical objective lens to the optical path; A light source for providing incident light to the light path branching device; A cathode ray luminescence detector for detecting a cathode luminescence at a position passing through the branching device on the optical path; And an optical image detector for detecting an optical image at a position passing through a semi-transparent mirror on the optical path, wherein the cathode ray luminescence is emitted from an electron beam incident on a sample positioned in the sample groove, And a sample stage in which a sample fixing part is continuously arranged, the incident light being provided from a light source, passing through the optical path through the optical path device and passing through the sample holder through which the light beam passes, And provides a photo-electron fusion microscope.

The present invention also provides a photo-electron fusion microscope in which the cathode ray luminescence detector and the optical image detector divide light into time or space and acquire the light through a beam splitter.

The sample stage of the present invention can maintain the vacuum inside the vacuum sample chamber while continuously moving the sample holder when replacing the sample, thereby improving the efficiency of sample analysis. Further, it is also possible to fabricate a specimen holder, which is located in the hole portion of the lower surface of the vacuum specimen chamber, of a material transparent to light and to provide a cathode luminescence And a light reflection image can be obtained to provide a photo-electron fusion microscope.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a conceptual view showing an electron microscope including a sample chamber having an annular vacuum seal portion and a conveyor belt type sample stage according to an embodiment of the present invention. FIG.
2 is a conceptual diagram showing an electron microscope including a sample chamber with a double annular vacuum seal and a conveyor belt type sample stage, according to an embodiment of the present invention.
3 is a conceptual view showing an electron microscope including a sample chamber having a double annular vacuum seal and a ribbon type sample stage according to an embodiment of the present invention.
4 is a conceptual view showing an electron microscope including a sample chamber having a double annular vacuum seal and a disc-shaped sample stage, according to an embodiment of the present invention.
FIG. 5 is a conceptual view showing a photo-electron fusion microscope including a sample chamber having a double annular vacuum seal and a ribbon-type sample stage, according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to the description of the present invention, terms and words used in the present specification and claims to be described below should not be construed as limited to ordinary or dictionary terms. Therefore, the embodiments described in the present specification and the configurations shown in the drawings are merely the most preferred embodiments of the present invention and are not intended to represent all of the technical ideas of the present invention. Therefore, various equivalents It should be understood that water and variations may be present.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a conceptual view showing an electron microscope including a sample chamber having an annular vacuum seal portion and a conveyor belt type sample stage according to an embodiment of the present invention. FIG. The electron microscope including the sample stage in which the sample fixing portions are continuously arranged according to an embodiment of the present invention collects and emits the electron beam emitted from the electron source 20 and emits the electron beam to the electron beam tube 10 having the vacuum exhaust tube 30 ); A sample chamber 100 including the electron beam column 10 as a whole or a part of an upper wall and having a hole formed at the center of the lower wall and having a vacuum exhaust pipe 31; A sample fixing part 210, which is opposed to the barrel through the opening 110 of the lower wall of the sample chamber 100, is continuously arranged, and an annular sealing member 210, which surrounds the opening of the lower surface of the lower wall of the sample chamber, A sample stage 200 in contact with the sample stage 120 via the sample stage 200, the sample stage 200 being horizontally moved in a state in which vacuum is maintained in the sample chamber, and sample arrangements successively arranged are exposed to the emerging electron beam; And a vacuum pump (40, 41) connected to the tube and the vacuum exhaust pipe of the sample chamber. The vacuum pump according to an embodiment of the present invention may sequentially connect a turbo molecular pump (TMP) 40 for high vacuum exhaust and a diaphragm pump 41 for basic vacuum exhaust. The turbo molecular pump 40 for the high vacuum exhaust exhausts the barrel 10 and the diaphragm pump 41 for the basic vacuum evacuation exhausts the turbo molecular pump 40 and the sample chamber 100, do. In one embodiment of the present invention, the sealing member may be selected from but not limited to Viton for sealing, Teflon pad, magnetic fluid, and the like.

The sample fixing part 210 according to an embodiment of the present invention forms a sample groove (not shown) securing a step so that the sample stage 200 is not caught by the annular sealing member during the horizontal movement, , And the material of the sample stage includes a radiation shielding member including X-rays to shield X-rays or the like generated from acceleration (deceleration) movement of electrons reaching the surface of the sample. The sample stage 200 according to an embodiment of the present invention is a conveyor belt type in which the sample fixing unit 210 is exposed to the outside, and the conveyor belt type sample stage sequentially moves the conveyor belt- The sample fixing part moves into the sample chamber. In another embodiment of the present invention, the barrel 10 can be observed while moving in parallel with the sample stage 200. The movement of the barrel advances while maintaining a vacuum while the sample chamber moving in unison with the barrel is in contact with the sample stage and the annular sealing member. The sample moves into the scanning range of the electron beam due to the movement of the sample stage and moves to the observation site on the sample due to the movement of the barrel. The parallel movement refers to movement in the X and Y directions when the barrel of the electron microscope is the Z-direction.

2 is a conceptual diagram showing an electron microscope including a sample chamber with a double annular vacuum seal and a conveyor belt type sample stage, according to an embodiment of the present invention. The electron microscope including the sample stage in which the sample fixing portions are continuously arranged according to an embodiment of the present invention collects and emits the electron beam emitted from the electron source 20 and emits the electron beam to the electron beam tube 10 having the vacuum exhaust tube 30 ); A sample chamber 100 having an electron beam column 10 as a whole or a part of an upper wall and having a hole formed at the center of the lower wall and having a vacuum exhaust pipe 31, A vacuum sub-chamber 150 surrounding the outer wall of the vacuum chamber 150 and including the outer wall as a part of the inner wall thereof and having a separate vacuum exhaust pipe; A sample fixing part 210, which is opposed to the barrel through the opening 110 of the lower wall of the sample chamber 100, is continuously arranged, and an annular sealing member 210, which surrounds the opening of the lower surface of the lower wall of the sample chamber, (120) and an annular sealing member (130) which surrounds the annular sealing member and is in contact with a lower wall surface of the vacuum subassembly (150), and the sample fixing part exposed to the emerging electron beam is double A sample stage 200 in which a sample fixing unit continuously moving horizontally and continuously arranged in a state in which sample chamber vacuum is held so as to be surrounded by the annular sealing member is exposed to the emerging electron beam sequentially; And a vacuum pump (40, 41) connected to the tube and the vacuum exhaust pipe of the sample chamber.

The vacuum pump according to an embodiment of the present invention may sequentially connect a turbo molecular pump (TMP) 40 for high vacuum exhaust and a diaphragm pump 41 for basic vacuum exhaust. The turbo molecular pump 40 for the high vacuum exhaust exhausts the barrel 10 and the sample chamber 100 and the diaphragm pump 41 for the basic vacuum exhaust is connected to the turbo molecular pump 40, The vacuum assist chamber 150 is evacuated. In one embodiment of the present invention, the sealing member may be selected from but not limited to Viton for sealing, Teflon pad, magnetic fluid, and the like.

The sample fixing part 210 according to an embodiment of the present invention forms a sample groove (not shown) securing a step so that the sample stage 200 is not caught by the annular sealing member during the horizontal movement, , And the material of the sample stage includes a radiation shielding member including X-rays to shield X-rays or the like generated from acceleration (deceleration) movement of electrons reaching the surface of the sample. The sample stage 200 according to an embodiment of the present invention is a conveyor belt type in which the sample fixing unit 210 is exposed to the outside, and the conveyor belt type sample stage sequentially moves the conveyor belt- The sample fixing part moves into the sample chamber. In another embodiment of the present invention, the barrel 10 can be observed while moving in parallel with the sample stage 200. The movement of the barrel advances while maintaining a vacuum while the sample chamber moving in unison with the barrel is in contact with the sample stage and the annular sealing member. The sample moves into the scanning range of the electron beam due to the movement of the sample stage and moves to the observation site on the sample due to the movement of the barrel. The parallel movement refers to movement in the X and Y directions when the barrel of the electron microscope is the Z-direction.

3 is a conceptual view showing an electron microscope including a sample chamber having a double annular vacuum seal and a ribbon type sample stage according to an embodiment of the present invention. The electron microscope including the sample stage in which the sample fixing portions are continuously arranged according to an embodiment of the present invention collects and emits the electron beam emitted from the electron source 20 and emits the electron beam to the electron beam tube 10 having the vacuum exhaust tube 30 ); A sample chamber 100 having an electron beam column 10 as a whole or a part of an upper wall and having a hole formed at the center of the lower wall and having a vacuum exhaust pipe 31, A vacuum sub-chamber 150 surrounding the outer wall of the vacuum chamber 150 and including the outer wall as a part of the inner wall thereof and having a separate vacuum exhaust pipe; A sample fixing part 210, which is opposed to the barrel through the opening 110 of the lower wall of the sample chamber 100, is continuously arranged, and an annular sealing member 210, which surrounds the opening of the lower surface of the lower wall of the sample chamber, (120) and an annular sealing member (130) which surrounds the annular sealing member and is in contact with a lower wall surface of the vacuum subassembly (150), and the sample fixing part exposed to the emerging electron beam is double A sample stage 200 in which a sample fixing unit continuously moving horizontally and continuously arranged in a state in which sample chamber vacuum is held so as to be surrounded by the annular sealing member is exposed to the emerging electron beam sequentially; And a vacuum pump (40, 41) connected to the tube and the vacuum exhaust pipe of the sample chamber.

The vacuum pump according to an embodiment of the present invention may sequentially connect a turbo molecular pump (TMP) 40 for high vacuum exhaust and a diaphragm pump 41 for basic vacuum exhaust. The turbo molecular pump 40 for the high vacuum exhaust exhausts the barrel 10 and the sample chamber 100 and the diaphragm pump 41 for the basic vacuum exhaust is connected to the turbo molecular pump 40, The vacuum assist chamber 150 is evacuated. In one embodiment of the present invention, the sealing member may be selected from but not limited to Viton for sealing, Teflon pad, magnetic fluid, and the like.

The sample fixing part 210 according to an embodiment of the present invention forms a sample groove (not shown) securing a step so that the sample stage 200 is not caught by the annular sealing member during the horizontal movement, , And the material of the sample stage includes a radiation shielding member including X-rays to shield X-rays or the like generated from acceleration (deceleration) movement of electrons reaching the surface of the sample. The sample stage 300 is a ribbon type in which the metal plate 310 formed by the predetermined number of the sample fixing parts 210 is connected by the sealing material 320 and the sealing material 310, Is a biotone, a Teflon pad, or a magnetic fluid, and the sample fixing part sequentially moves into the sample chamber as the sample stage moves in a ribbon shape. In another embodiment of the present invention, the barrel 10 can be observed while moving in parallel with the sample stage 300. The movement of the barrel advances while maintaining a vacuum while the sample chamber moving in unison with the barrel is in contact with the sample stage and the annular sealing member. The sample moves into the scanning range of the electron beam due to the movement of the sample stage and moves to the observation site on the sample due to the movement of the barrel. The parallel movement refers to movement in the X and Y directions when the barrel of the electron microscope is the Z-direction.

4 is a conceptual view showing an electron microscope including a sample chamber having a double annular vacuum seal and a disc-shaped sample stage, according to an embodiment of the present invention. The electron microscope including the sample stage in which the sample fixing portions are continuously arranged according to an embodiment of the present invention collects and emits the electron beam emitted from the electron source 20 and emits the electron beam to the electron beam tube 10 having the vacuum exhaust tube 30 ); A sample chamber 100 having an electron beam column 10 as a whole or a part of an upper wall and having a hole formed at the center of the lower wall and having a vacuum exhaust pipe 31, A vacuum sub-chamber 150 surrounding the outer wall of the vacuum chamber 150 and including the outer wall as a part of the inner wall thereof and having a separate vacuum exhaust pipe; A sample fixing part 210, which is opposed to the barrel through the opening 110 of the lower wall of the sample chamber 100, is continuously arranged, and an annular sealing member 210, which surrounds the opening of the lower surface of the lower wall of the sample chamber, (120) and an annular sealing member (130) which surrounds the annular sealing member and is in contact with a lower wall surface of the vacuum subassembly (150), and the sample fixing part exposed to the emerging electron beam is double A sample stage 200 in which a sample fixing unit continuously moving horizontally and continuously arranged in a state in which sample chamber vacuum is held so as to be surrounded by the annular sealing member is exposed to the emerging electron beam sequentially; And a vacuum pump (40, 41) connected to the tube and the vacuum exhaust pipe of the sample chamber.

The vacuum pump according to an embodiment of the present invention may sequentially connect a turbo molecular pump (TMP) 40 for high vacuum exhaust and a diaphragm pump 41 for basic vacuum exhaust. The turbo molecular pump 40 for the high vacuum exhaust exhausts the barrel 10 and the sample chamber 100 and the diaphragm pump 41 for the basic vacuum exhaust is connected to the turbo molecular pump 40, The vacuum assist chamber 150 is evacuated. In one embodiment of the present invention, the sealing member may be selected from but not limited to Viton for sealing, Teflon pad, magnetic fluid, and the like.

The sample fixing part 210 according to an embodiment of the present invention forms a sample groove (not shown) securing a step so that the sample stage 200 is not caught by the annular sealing member during the horizontal movement, , And the material of the sample stage includes a radiation shielding member including X-rays to shield X-rays or the like generated from acceleration (deceleration) movement of electrons reaching the surface of the sample. In one embodiment of the present invention, the sample stage 300 is a disk type 400 in which the sample fixing part 210 is formed at the rim of the sample stage 300, . In another embodiment of the present invention, the barrel 10 can be observed while moving in parallel with the disk-shaped sample stage 400. The movement of the barrel advances while maintaining a vacuum while the sample chamber moving in unison with the barrel is in contact with the sample stage and the annular sealing member. The sample moves into the scanning range of the electron beam due to the movement of the sample stage and moves to the observation site on the sample due to the movement of the barrel. The parallel movement refers to movement in the X and Y directions when the barrel of the electron microscope is the Z-direction.

FIG. 5 is a conceptual view showing a photo-electron fusion microscope including a sample chamber having a double annular vacuum seal and a ribbon-type sample stage, according to an embodiment of the present invention. The electron microscope including the sample stage in which the sample fixing portions are continuously arranged according to an embodiment of the present invention collects and emits the electron beam emitted from the electron source 20 and emits the electron beam to the electron beam tube 10 having the vacuum exhaust tube 30 ); A sample chamber 100 having an electron beam column 10 as a whole or a part of an upper wall and having a hole formed at the center of the lower wall and having a vacuum exhaust pipe 31, A vacuum sub-chamber 150 surrounding the outer wall of the vacuum chamber 150 and including the outer wall as a part of the inner wall thereof and having a separate vacuum exhaust pipe; A sample fixing part 210, which is opposed to the barrel through the opening 110 of the lower wall of the sample chamber 100, is continuously arranged, and an annular sealing member 210, which surrounds the opening of the lower surface of the lower wall of the sample chamber, (120) and an annular sealing member (130) which surrounds the annular sealing member and is in contact with a lower wall surface of the vacuum subassembly (150), and the sample fixing part exposed to the emerging electron beam is double A sample stage 200 in which a sample fixing unit continuously moving horizontally and continuously arranged in a state in which sample chamber vacuum is held so as to be surrounded by the annular sealing member is exposed to the emerging electron beam sequentially; A vacuum pump (40, 41) connected to a vacuum exhaust pipe of the barrel and the sample chamber; And an optical microscope part 500.

The vacuum pump according to an embodiment of the present invention may sequentially connect a turbo molecular pump (TMP) 40 for high vacuum exhaust and a diaphragm pump 41 for basic vacuum exhaust. The turbo molecular pump 40 for the high vacuum exhaust exhausts the barrel 10 and the sample chamber 100 and the diaphragm pump 41 for the basic vacuum exhaust is connected to the turbo molecular pump 40, The vacuum assist chamber 150 is evacuated. In one embodiment of the present invention, the sealing member may be selected from but not limited to Viton for sealing, Teflon pad, magnetic fluid, and the like.

The optical microscope unit 500 according to an embodiment of the present invention includes an optical objective lens 510 positioned at a lower portion of the sample stage to face the sample fixing unit; An optical path dividing device (520) for splitting the optical path from the sample fixing part to an optical path extending from the optical objective lens to the optical path; A light source 530 for providing incident light to the light path branching device; A cathode ray luminescence detector (540) for detecting cathode luminescence at a position passing through the branching device on the optical path; And an optical image detector 550 for detecting an optical image at a position passing through a translucent mirror on the optical path. In an embodiment of the present invention, the cathode ray luminescence detector 540 and the optical image detector 550 divide the light into time or space and acquire it through a beam splitter 560. [ In one embodiment of the present invention, the spatial division is achieved by disposing the luminescence detector and the optical image detector such that a line connecting the luminescence detector and the optical image detector for obtaining the reflected image is perpendicular to the optical path It is implemented by rotating the mirror that changes the direction of the optical path by 90 degrees. The time division is implemented by alternately displaying the luminescence detector and the light incidence portion of the optical image detector on the optical path.

In one embodiment of the present invention, the cathode luminescence is emitted from an electron beam incident on a sample located in the sample groove, and the optical image is generated by the incident light, which is provided by the light source, And passes through the sample holder through which the light beam passes and is reflected from the sample placed in the sample groove.

The sample fixing part 210 according to an embodiment of the present invention forms a sample groove (not shown) securing a step so that the sample stage 200 is not caught by the annular sealing member during the horizontal movement, , And the material of the sample stage includes a radiation shielding member including X-rays to shield X-rays or the like generated from acceleration (deceleration) movement of electrons reaching the surface of the sample. The sample stage 300 is a ribbon type in which the metal plate 310 formed by the predetermined number of the sample fixing parts 210 is connected by the sealing material 320 and the sealing material 310, Is a biotone, a Teflon pad, or a magnetic fluid, and the sample fixing part sequentially moves into the sample chamber as the sample stage moves in a ribbon shape. In another embodiment of the present invention, the barrel 10 can be observed while moving in parallel with the sample stage 300. The movement of the barrel advances while maintaining a vacuum while the sample chamber moving in unison with the barrel is in contact with the sample stage and the annular sealing member. The sample moves into the scanning range of the electron beam due to the movement of the sample stage and moves to the observation site on the sample due to the movement of the barrel. The parallel movement refers to movement in the X and Y directions when the barrel of the electron microscope is the Z-direction.

While the present invention has been described in connection with what is presently considered to be the preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, .

All technical terms used in the present invention are used in the sense that they are generally understood by those of ordinary skill in the relevant field of the present invention unless otherwise defined. The contents of all publications referred to herein are incorporated herein by reference.

10. Telescope 20. Electronic circle
30, 31, 32. Vacuum exhaust pipe 40. Turbo molecular pump
41. Diaphragm pump 100. Sample chamber
110. An opening of the sample chamber lower wall 120. An annular sealing member
130. Outer ring-type sealing member 150. Vacuum assistant chamber
200. Conveyor belt type sample stage 210. Sample fixing unit
250. Conveyor wheel 300. Ribbon sample stage
310. Metal plate 320. Material for sealing
400. Disc-shaped sample stage 500. Optical microscope part
510. Optical objective 520. Light path branching device
530. Light source 540. Cathode luminaires detector
550. Optical image detector 560. Beam splitter

Claims (9)

An electron microscope comprising a sample stage in which a sample fixing part is continuously arranged,
The electron microscope includes an electron beam tube barrel having a vacuum exhaust tube for collecting and emitting an electron beam emitted from an electron source;
A sample chamber including the electron beam barrel as a whole or a part of an upper wall, a hole formed at the center of the lower wall, and having a vacuum exhaust pipe;
And a sample fixing part which is opposed to the barrel is continuously arranged through an opening of the lower chamber of the sample chamber and is brought into abutting contact with an annular sealing member surrounding the opening of the lower surface of the lower wall of the sample chamber for vacuum sealing, A sample stage for horizontally moving the sample holder in a state where the sample holder is continuously held and the sample holders successively arranged are exposed to the emitting electron beam sequentially; And
A vacuum pump connected to the barrel and the vacuum exhaust pipe of the sample chamber; And
And a vacuum sub-chamber enclosing the outer wall of the sample chamber and including the outer wall as a part of the inner wall thereof and having a separate vacuum exhaust pipe,
The sample fixing part forms a sample groove in which a step is secured so that the sample stage is not caught by the annular sealing member during the horizontal movement,
Wherein the material of the sample chamber and the sample stage includes a radiation shielding member including X-rays,
Wherein the barrel is movable in parallel to a measurement position of the sample,
The vacuum assistant chamber is in contact with the sample stage with the outer annular sealing member surrounding the annular sealing member interposed therebetween,
Wherein the sample fixing portion exposed to the emerging electron beam is surrounded by the annular sealing member,
An electron microscope comprising a sample stage in which a sample holder is continuously arranged.
delete The method according to claim 1,
Wherein the sample stage is of a conveyor belt type in which the sample fixing portion is exposed to the outside,
Wherein the conveyor belt-shaped sample stage sequentially moves the sample fixing part into the sample chamber in accordance with the rotation of the conveyor wheel,
An electron microscope comprising a sample stage in which a sample holder is continuously arranged.
The method according to claim 1,
Wherein the sample stage is of a ribbon type in which a metal plate formed by a predetermined number of sample fixing parts is sealed with a sealing material,
The sealing material may be a Viton, a Teflon pad or a magnetic fluid,
Wherein the sample fixing unit is sequentially moved into the sample chamber as the sample stage, which is a ribbon type,
An electron microscope comprising a sample stage in which a sample holder is continuously arranged.
The method according to claim 1,
Wherein the sample stage is of a disk type having the sample fixing portion formed at the rim thereof,
Wherein the sample holder is sequentially moved into the sample chamber as the disk is rotated,
An electron microscope comprising a sample stage in which a sample holder is continuously arranged.
The method according to claim 1,
Wherein the vacuum evacuation portion of the vacuum sub-chamber is connected to the vacuum evacuation portion of the barrel,
An electron microscope comprising a sample stage in which a sample holder is continuously arranged.
The method according to claim 1,
The sample stage is a sample stage in which a light beam, including visible light, infrared light, and ultraviolet light,
An electron microscope comprising a sample stage in which a sample holder is continuously arranged.
An electron microscope comprising a sample stage in which the sample fixture of claim 7 is continuously arranged; And
In a photo-electron fusion microscope including an optical microscope portion,
The optical microscope section,
An optical objective lens positioned at a lower portion of the sample stage to face the sample holder;
An optical path splitting device for splitting the optical path from the sample fixing part to an optical path extending from the optical objective lens to the optical path;
A light source for providing incident light to the light path branching device;
A cathode ray luminescence detector for detecting a cathode luminescence at a position passing through the branching device on the optical path; And
And an optical image detector for detecting an optical image at a position passing through a semi-transparent mirror on the optical path,
The cathode ray luminescence is emitted from the electron beam incident on the sample located in the sample groove,
Wherein the optical image is an image reflected by a sample positioned in a sample groove passing through a sample holder through which the incident light from the light source passes through the optical path through the optical path,
A photo-electron fusion microscope comprising a sample stage in which a sample holder is continuously arranged. 9. The method of claim 8,
Wherein the cathode ray luminescence detector and the optical image detector are configured to divide the light into time or space and acquire the light through a beam splitter,
A photo-electron fusion microscope comprising a sample stage in which a sample holder is continuously arranged.
KR1020150163450A 2015-11-20 2015-11-20 Electron microscope comprising multie-holder arranged sample-stage KR101725139B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150163450A KR101725139B1 (en) 2015-11-20 2015-11-20 Electron microscope comprising multie-holder arranged sample-stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150163450A KR101725139B1 (en) 2015-11-20 2015-11-20 Electron microscope comprising multie-holder arranged sample-stage

Publications (1)

Publication Number Publication Date
KR101725139B1 true KR101725139B1 (en) 2017-04-10

Family

ID=58581085

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150163450A KR101725139B1 (en) 2015-11-20 2015-11-20 Electron microscope comprising multie-holder arranged sample-stage

Country Status (1)

Country Link
KR (1) KR101725139B1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101857046B1 (en) 2016-09-01 2018-05-14 한국표준과학연구원 Mirror of Correlative Light and Electron Microscope with Quadrangular Pyramid Shaped Hole
KR101955846B1 (en) 2018-01-12 2019-03-08 한국표준과학연구원 Clean eletronmicroscope holder for flow environment
KR102029869B1 (en) * 2018-06-19 2019-10-08 한국표준과학연구원 Detachable Sample Chamber for Electron Microscope and Electron Microscope Comprising The Same
KR20220088029A (en) * 2020-12-18 2022-06-27 참엔지니어링(주) Apparatus for Maintaining local vacuum of specimen treating apparatus
WO2022145865A1 (en) * 2021-01-04 2022-07-07 재단법인 아산사회복지재단 Suction stabilizer for objective lens, and medical microscope and medical endoscope comprising same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07282762A (en) * 1994-04-11 1995-10-27 Nissin High Voltage Co Ltd Electron beam irradiating device
KR20140047724A (en) * 2011-01-31 2014-04-22 가부시키가이샤 히다치 하이테크놀로지즈 Charged particle beam apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07282762A (en) * 1994-04-11 1995-10-27 Nissin High Voltage Co Ltd Electron beam irradiating device
KR20140047724A (en) * 2011-01-31 2014-04-22 가부시키가이샤 히다치 하이테크놀로지즈 Charged particle beam apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Carl Zeiss, "High Resolution Imaging of Biological Samples Using Scanning Electron Microscopes and The ATLAS by Carl Zeiss", pp.1-13 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101857046B1 (en) 2016-09-01 2018-05-14 한국표준과학연구원 Mirror of Correlative Light and Electron Microscope with Quadrangular Pyramid Shaped Hole
KR101955846B1 (en) 2018-01-12 2019-03-08 한국표준과학연구원 Clean eletronmicroscope holder for flow environment
KR102029869B1 (en) * 2018-06-19 2019-10-08 한국표준과학연구원 Detachable Sample Chamber for Electron Microscope and Electron Microscope Comprising The Same
KR20220088029A (en) * 2020-12-18 2022-06-27 참엔지니어링(주) Apparatus for Maintaining local vacuum of specimen treating apparatus
KR102563233B1 (en) * 2020-12-18 2023-08-03 참엔지니어링(주) Apparatus for Maintaining local vacuum of specimen treating apparatus
WO2022145865A1 (en) * 2021-01-04 2022-07-07 재단법인 아산사회복지재단 Suction stabilizer for objective lens, and medical microscope and medical endoscope comprising same

Similar Documents

Publication Publication Date Title
KR101725139B1 (en) Electron microscope comprising multie-holder arranged sample-stage
JP5825799B2 (en) Laser processing system, object table, and laser processing method
JP5534646B2 (en) Apparatus for observing a sample with a microscope using a particle beam and light
US7718979B2 (en) Particle-optical apparatus for simultaneous observing a sample with particles and photons
KR101725137B1 (en) Sample chamber for electron microscope and the electron microscope including the same
EP1724809A1 (en) Particle-optical apparatus for the irradiation of a sample
US9812288B2 (en) Sample holder with light emitting and transferring elements for a charged particle beam apparatus
WO2018068506A1 (en) Charged particle beam system, opto-electro simultaneous detection system and method
US8513604B2 (en) Detection device and particle beam device having a detection device
US9874524B2 (en) In-situ spatially resolved plasma monitoring by using optical emission spectroscopy
JP5947928B2 (en) Adaptive cathodoluminescence detection system and microscope employing such a system
EP0275306A1 (en) Multipurpose gaseous detector device for electron microscopes.
JP2005106815A (en) Optical alignment of x-ray microanalyzer
JP2013534692A5 (en)
EP3570311B1 (en) Cathodoluminescence optical hub
KR20240042175A (en) Arrayed column detector
KR102029869B1 (en) Detachable Sample Chamber for Electron Microscope and Electron Microscope Comprising The Same
JPWO2020189329A1 (en) Holder and charged particle beam device
KR101983029B1 (en) Detachable Sample Chamber having Scanning Transmission Electron Microscope (STEM) Function for Electron Microscope and Electron Microscope Comprising The Same
CN112461260B (en) Testing device and testing method for MSO optical system
TWI794505B (en) Neutral atom imaging system and method
US9991091B1 (en) Optical column for focused ion beam workstation
JPH05234556A (en) Electron microscope
JP2003344598A (en) Vacuum system for x-ray microscope
JPH10223394A (en) X-ray generator

Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
GRNT Written decision to grant