JPH08145794A - Spectroscope - Google Patents
SpectroscopeInfo
- Publication number
- JPH08145794A JPH08145794A JP28306694A JP28306694A JPH08145794A JP H08145794 A JPH08145794 A JP H08145794A JP 28306694 A JP28306694 A JP 28306694A JP 28306694 A JP28306694 A JP 28306694A JP H08145794 A JPH08145794 A JP H08145794A
- Authority
- JP
- Japan
- Prior art keywords
- container
- optical
- vessel
- spectroscope
- optical elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Spectrometry And Color Measurement (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、発光分光分析や光吸収
分光分析などのように、試料などの光源からの光を各波
長成分ごとのスペクトルに分光する分光器に係り、特に
は、光学素子をマウンティングするための構造に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spectroscope for splitting light from a light source such as a sample into spectra for each wavelength component, such as optical emission spectroscopy and optical absorption spectroscopy. The present invention relates to a structure for mounting a device.
【0002】[0002]
【従来の技術】一般に、この種の分光器は、回折格子や
プリズムなどの波長分散素子や、集光レンズ、スリット
などの各種の光学素子を組み合わて構成されている。2. Description of the Related Art Generally, this type of spectroscope is constructed by combining a wavelength dispersion element such as a diffraction grating and a prism, and various optical elements such as a condenser lens and a slit.
【0003】そして、従来のものでは、これらの各光学
素子が図3に示すようにして容器に装着されている。In the conventional device, each of these optical elements is mounted in a container as shown in FIG.
【0004】すなわち、図3に示す分光器は、発光分光
分析装置に使用されるものであって、箱型をした真空用
の容器aを備え、この容器aの底部に、回折格子やプリズ
ムなどの波長分散素子b、入口スリットc、出口スリット
dが固定され、また、容器aの外周壁には集光レンズeが
取り付けられている。That is, the spectroscope shown in FIG. 3 is used for an emission spectroscopic analysis apparatus, and is provided with a box-shaped vacuum container a, and a diffraction grating, a prism, etc. are provided at the bottom of the container a. Wavelength dispersion element b, entrance slit c, exit slit
d is fixed, and a condenser lens e is attached to the outer peripheral wall of the container a.
【0005】そして、試料gを発光して得られた光を集
光レンズeで集光した後、入口スリットcを通して波長分
散素子bで各波長成分のスペクトルに分光し、分光した
各スペクトル光を出口スリットdを通して図示しない光
電子増倍管などの光検出器で検出するようになってい
る。Then, after the light obtained by emitting the light from the sample g is condensed by the condenser lens e, it is separated into a spectrum of each wavelength component by the wavelength dispersion element b through the entrance slit c, and each spectrum light is dispersed. The light is detected by a photodetector such as a photomultiplier tube (not shown) through the exit slit d.
【0006】なお、図3では示していないが、各光学素
子b〜eの装着後は、この容器aの上部に蓋が取り付けら
れて、容器aの内部が気密保持される。Although not shown in FIG. 3, after mounting the optical elements b to e, a lid is attached to the upper part of the container a to keep the inside of the container a airtight.
【0007】[0007]
【発明が解決しようとする課題】ところで、分光器で
は、所要の分析精度を確保する上で、各光学素子b〜dの
光学的な配置関係が常に安定して維持されることが必要
で、光軸ずれ等の発生を極力無くす必要がある。By the way, in the spectroscope, in order to secure the required analysis accuracy, it is necessary that the optical arrangement of the optical elements b to d is always maintained stably. It is necessary to eliminate the occurrence of misalignment of the optical axis as much as possible.
【0008】しかしながら、従来のものでは、容器aの
底部に直接に光学素子b〜dを取り付けているので、大気
の温度変化によって容器aが熱歪をうけたり、また、真
空用の容器aでは、容器a内外の圧力差によって容器aが
歪んだ場合には、その影響が直接に光学素子b〜dの配置
関係を狂わせ、分析精度を低下させる要因となってい
る。However, in the conventional case, since the optical elements b to d are directly attached to the bottom portion of the container a, the container a is subject to thermal strain due to the temperature change of the atmosphere, and the container a for vacuum is not When the container a is distorted due to the pressure difference between the inside and the outside of the container a, the influence thereof directly changes the arrangement relationship of the optical elements b to d, which is a factor of lowering the analysis accuracy.
【0009】このため、従来は、温度変化や圧力変化に
対して容器aの歪みが小さくなるように、熱膨張係数が
小さい材料を選定したり、また、肉厚を大きく設定して
使用しているが、このような対策では、容器aとしての
使用材料が制限されるだけでなく、重量が大きくなる等
の問題がある。Therefore, conventionally, a material having a small thermal expansion coefficient is selected so that the strain of the container a becomes small with respect to a temperature change or a pressure change, or the wall thickness is set to be large. However, such measures not only limit the materials used for the container a but also increase the weight.
【0010】本発明は、上記のような問題点を解決する
ためになされたもので、光学素子を収納する容器が温度
や圧力差によって歪んだ場合でも、容器内部に装着され
る光学素子の光学的な配置関係に直接に影響を及ぼさな
いようにして、容器の材料の選択の自由度が大きく、全
体が軽量化できる分光器を提供することを課題とする。The present invention has been made in order to solve the above-mentioned problems, and the optical elements of the optical element mounted inside the container are distorted even when the container for accommodating the optical element is distorted due to temperature or pressure difference. It is an object of the present invention to provide a spectroscope that has a large degree of freedom in selecting a material for a container and that can reduce the overall weight without directly affecting the physical arrangement relationship.
【0011】[0011]
【課題を解決するための手段】本発明は、上述した課題
を解決するために、次の構成を採る。The present invention adopts the following constitution in order to solve the above-mentioned problems.
【0012】すなわち、本発明の分光器は、光分散素子
やスリット等の各種の光学素子が装着される光学ベンチ
と、この光学ベンチが収納される容器とからなり、光学
ベンチは、光学素子が取り付けられる素子取付部と、容
器に固定される容器固定部とを有し、前記素子取付部が
容器固定部に対して片持はりの構造となるように形成さ
れている。That is, the spectroscope of the present invention comprises an optical bench on which various optical elements such as a light dispersion element and a slit are mounted, and a container in which the optical bench is housed. It has an element mounting portion to be mounted and a container fixing portion fixed to the container, and the element mounting portion is formed to have a cantilever structure with respect to the container fixing portion.
【0013】[0013]
【作用】上記構成において、光学ベンチを構成する容器
固定部が容器に固定され、素子装着部は、容器固定部に
対して片持はりの構造で形成されているから、素子取付
部の容器固定部と反対側の端部は自由端となる。In the above structure, since the container fixing portion constituting the optical bench is fixed to the container and the element mounting portion is formed in a cantilever structure with respect to the container fixing portion, the element mounting portion is fixed to the container. The end opposite to the part is a free end.
【0014】このため、大気の温度変化によって容器が
熱歪をうけたり、また、真空用の容器では、その内外の
圧力差によって容器が歪んでも、光学ベンチの素子取付
部は、容器の歪の影響を受けない。Therefore, even if the container is subjected to thermal strain due to the temperature change of the atmosphere, or if the container for vacuum is distorted due to the pressure difference between the inside and the outside, the element mounting portion of the optical bench will not Not affected.
【0015】したがって、素子取付部に取り付けられた
各光学素子は、その光学的な配置関係が常に安定して維
持される。Therefore, the optical arrangement of the optical elements attached to the element attaching portion is always maintained stable.
【0016】[0016]
【実施例】図1は、本発明の実施例に係る分光器の分解
斜視図である。1 is an exploded perspective view of a spectroscope according to an embodiment of the present invention.
【0017】この実施例の分光器1は、発光分光分析装
置に使用されるものであって、光学素子の装着用の光学
ベンチ2、およびこの光学ベンチ2の収納と真空保持と
を兼用する容器4の二つの部材からなる。The spectroscope 1 of this embodiment is used in an emission spectroscopic analysis apparatus, and includes an optical bench 2 for mounting optical elements, and a container that serves as both a housing for the optical bench 2 and a vacuum holding. It consists of two members.
【0018】光学ベンチ2は、熱膨張係数の小さい鉄鋳
物などでできた一体成型品であって、略台形板状をした
素子取付部2aと、この素子取付部2aに直交配置された
縦長平板状の容器固定部2bとを有し、素子取付部2aが
容器固定部2bに対して片持はりの構造となるように形
成されている。すなわち、この素子取付部2aは、その
左右の対向辺において、長辺側(図1の右側の辺)が容器
固定部2b側に連接し、短辺側(図1の左側の辺)が自由
端となっている。The optical bench 2 is an integrally molded product made of iron casting or the like having a small thermal expansion coefficient, and has a substantially trapezoidal plate-shaped element mounting portion 2a and a vertically long flat plate arranged orthogonal to the element mounting portion 2a. The container mounting portion 2b is shaped like a cantilever with respect to the container fixing portion 2b. That is, in the element mounting portion 2a, on the left and right opposing sides, the long side (the right side in FIG. 1) is connected to the container fixing portion 2b side, and the short side (the left side in FIG. 1) is free. It is the end.
【0019】そして、上記の素子取付部2aには、その
中央に光学ベンチ2の軽量化のための穴2cが形成さ
れ、また、その穴2cの回りには、光分散素子6、入口
スリット8、出口スリット10等の光学素子が取り付け
られる一方、容器固定部2bには、その外縁部分にボル
ト等の取付孔2dが形成され、さらに、上部に集光レン
ズ12の保持具14が取り付けられている。A hole 2c for reducing the weight of the optical bench 2 is formed in the center of the element mounting portion 2a, and the light dispersion element 6 and the entrance slit 8 are provided around the hole 2c. While the optical elements such as the outlet slit 10 are attached, the container fixing portion 2b is provided with a mounting hole 2d such as a bolt in the outer edge portion thereof, and further, the holder 14 of the condenser lens 12 is attached to the upper portion thereof. There is.
【0020】一方、容器4は、比較的薄肉のステンレス
鋼などでできた一体成型品であって、その内外の圧力差
によって変形しない程度の強度をもつように設定されて
おり、一端が開口する箱型形状の容器本体部4aと、こ
の容器本体部4aの開口端側において外方に張り出した
フランジ部4bとを有し、フランジ部4bには、ボルト等
の取付孔4cが形成されている。On the other hand, the container 4 is an integrally molded product made of relatively thin stainless steel or the like, and is set so as not to be deformed due to a pressure difference between the inside and outside thereof, and one end thereof is opened. It has a box-shaped container body 4a and a flange portion 4b protruding outward on the open end side of the container body 4a, and the flange portion 4b is provided with a mounting hole 4c such as a bolt. .
【0021】そして、容器本体部4aの内部に光学ベン
チ2の素子取付部2aが収納配置され、また、フランジ
部4bには容器取付部2bの外縁部分が接合されて各取付
孔2d,4cに挿通された図示しないボルト等で両者2,
4が固定される。The element mounting portion 2a of the optical bench 2 is housed and arranged inside the container body 4a, and the flange portion 4b is joined to the outer edge portion of the container mounting portion 2b so that the mounting holes 2d and 4c are formed. Use a bolt (not shown) that has been
4 is fixed.
【0022】上記構成において、光学ベンチ2を構成す
る容器固定部2bは容器4のフランジ部4bに一体的に固
定されているが、素子取付部2aは、容器固定部2bに対
して片持はりの構造となっているから、素子取付部2b
の容器固定部2bと反対側の端部は自由端となる。In the above structure, the container fixing part 2b constituting the optical bench 2 is integrally fixed to the flange part 4b of the container 4, but the element mounting part 2a is cantilevered with respect to the container fixing part 2b. Because of the structure, the element mounting part 2b
The end opposite to the container fixing portion 2b is a free end.
【0023】このため、大気の温度変化によって容器4
が熱歪をうけたり、また、容器4内が真空引きされるた
めに、その内外の圧力差によって容器4が歪んでも、光
学ベンチ2の素子取付部2aは、容器4の歪の影響をほ
とんど受けない。Therefore, the container 4 is affected by the temperature change of the atmosphere.
Is subject to thermal strain, and even if the container 4 is distorted due to the pressure difference between the inside and the outside because the container 4 is evacuated, the element mounting portion 2a of the optical bench 2 is almost free from the influence of the distortion of the container 4. I do not receive it.
【0024】したがって、素子取付部2aに取り付けら
れた各光学素子6〜10は、その光学的な配置関係が常
に安定して維持される。Therefore, the optical arrangements of the optical elements 6 to 10 attached to the element attaching portion 2a are always maintained stable.
【0025】なお、上記の実施例では、光学ベンチ2の
素子取付部2aの一側面に各光学素子6〜10を取り付
た、いわゆる縦置構造としているが、この縦置構造で
は、素子取付部2aの自重による歪の影響が低減される
ので都合が良い。In the above embodiment, the optical bench 6 has a so-called vertical structure in which the optical elements 6 to 10 are attached to one side surface of the element mounting portion 2a. This is convenient because the influence of distortion due to the weight of the portion 2a is reduced.
【0026】しかし、図2に示すように、光学ベンチ2
の素子取付部2a上面に各光学素子6〜10を取り付
た、いわゆる横置構造とすることも可能である。この横
置構造では、素子取付部2aの自重による歪の影響を無
くすために、素子取付部2bの自由端側から容器固定部
2b側になるほど肉厚が大きくなる形状とするのが好ま
しい。However, as shown in FIG.
It is also possible to adopt a so-called horizontal structure in which the optical elements 6 to 10 are attached to the upper surface of the element mounting portion 2a. In this horizontal structure, in order to eliminate the influence of strain due to the weight of the element mounting portion 2a, it is preferable that the element mounting portion 2b has a shape in which the thickness increases from the free end side to the container fixing portion 2b side.
【0027】また、この実施例では、容器4は、光学ベ
ンチ2の収納と真空保持とを兼用するものとしたが、大
気解放形の容器であっても本発明は適用可能である。さ
らに、本例では、発光分光分析装置に使用した分光器に
ついて説明したが、これに限定されるものではなく、光
吸収分光分析などに使用する分光器であってもよく、さ
らに、試料などの光源からの光を各波長成分ごとのスペ
クトルに分光する分光器であれば、本発明を広く適用す
ることが可能である。In this embodiment, the container 4 serves both to house the optical bench 2 and to hold the vacuum, but the present invention can be applied to a container open to the atmosphere. Furthermore, in this example, the spectroscope used for the emission spectroscopic analysis device has been described, but the spectroscope used is not limited to this, and may be a spectroscope used for optical absorption spectroscopic analysis and the like. The present invention can be widely applied to any spectroscope that disperses light from a light source into a spectrum for each wavelength component.
【0028】[0028]
【発明の効果】本発明によれば、次の効果を奏する。According to the present invention, the following effects can be obtained.
【0029】(1) 光学素子を収納する容器が温度や圧
力差によって歪んだ場合でも、容器内部に装着される光
学素子の光学的な配置関係に直接に影響を及ぼさない。(1) Even if the container containing the optical element is distorted due to temperature or pressure difference, it does not directly affect the optical arrangement of the optical element mounted inside the container.
【0030】このため、各光学素子は、その光学的な配
置関係が常に安定して維持されることになる。Therefore, the optical arrangement of each optical element is always maintained stably.
【0031】(2) 光学素子が装着される光学ベンチと
これを収納する容器とは別体で構成されるため、容器の
材料の選択の自由度が大きくなり、また、容器の肉厚も
極端に大きく設定する必要がないので、分光器全体を軽
量化できる。(2) Since the optical bench on which the optical element is mounted and the container for housing the optical bench are constructed separately, the degree of freedom in selecting the material of the container is increased, and the thickness of the container is extremely large. Since it is not necessary to set it to a large value, the weight of the entire spectroscope can be reduced.
【図1】本発明の実施例に係る分光器の分解斜視図であ
る。FIG. 1 is an exploded perspective view of a spectroscope according to an embodiment of the present invention.
【図2】本発明の分光器の変形例を示す分解斜視図であ
る。FIG. 2 is an exploded perspective view showing a modified example of the spectroscope of the present invention.
【図3】従来の分光器の斜視図である。FIG. 3 is a perspective view of a conventional spectroscope.
1…分光器、2…光学ベンチ、2a…素子取付部、2b…
容器固定部、4…容器、4a…容器本体部、4b…フラン
ジ部、6〜10…光学素子。1 ... Spectrometer, 2 ... Optical bench, 2a ... Element mounting part, 2b ...
Container fixing part, 4 ... Container, 4a ... Container body part, 4b ... Flange part, 6-10 ... Optical element.
Claims (1)
子が装着される光学ベンチと、この光学ベンチが収納さ
れる容器とからなり、 前記光学ベンチは、光学素子が取り付けられる素子取付
部と、容器に固定される容器固定部とを有し、前記素子
取付部が容器固定部に対して片持はりの構造となるよう
に形成されていることを特徴とする分光器。1. An optical bench including various optical elements such as a light dispersion element and a slit, and a container accommodating the optical bench, wherein the optical bench includes an element mounting portion to which the optical element is mounted. A spectroscope having a container fixing part fixed to the container, wherein the element mounting part is formed to have a cantilever structure with respect to the container fixing part.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28306694A JPH08145794A (en) | 1994-11-17 | 1994-11-17 | Spectroscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28306694A JPH08145794A (en) | 1994-11-17 | 1994-11-17 | Spectroscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08145794A true JPH08145794A (en) | 1996-06-07 |
Family
ID=17660768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28306694A Pending JPH08145794A (en) | 1994-11-17 | 1994-11-17 | Spectroscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08145794A (en) |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0826335A1 (en) * | 1996-08-30 | 1998-03-04 | ESC Medical Systems Ltd. | Spectral monitoring apparatus |
WO2008149939A1 (en) | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | Spectroscope |
WO2009139327A1 (en) | 2008-05-15 | 2009-11-19 | 浜松ホトニクス株式会社 | Method for manufacturing spectrometer |
WO2009139326A1 (en) | 2008-05-15 | 2009-11-19 | 浜松ホトニクス株式会社 | Spectrometer |
DE102009021441A1 (en) | 2008-05-15 | 2009-12-17 | Hamamatsu Photonics K.K., Hamamatsu | spectrometer |
US8013993B2 (en) | 2008-05-15 | 2011-09-06 | Hamamatsu Photonics K.K. | Spectroscopy module |
US8018591B2 (en) | 2008-05-15 | 2011-09-13 | Hamamatsu Photonics K.K. | Spectroscopy module |
US8027034B2 (en) | 2008-05-15 | 2011-09-27 | Hamamatsu Photonics K.K. | Method for manufacturing spectroscopy module, and spectroscopy module |
US8035814B2 (en) | 2008-05-15 | 2011-10-11 | Hamamatsu Photonics K.K. | Spectroscopy module |
US8045157B2 (en) | 2007-06-08 | 2011-10-25 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8045158B2 (en) | 2008-03-04 | 2011-10-25 | Hamamatsu Photonics K.K. | Spectrometer |
US8045155B2 (en) | 2007-06-08 | 2011-10-25 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8049887B2 (en) | 2007-06-08 | 2011-11-01 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8068224B2 (en) | 2007-06-08 | 2011-11-29 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8068223B2 (en) | 2007-06-08 | 2011-11-29 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8139214B2 (en) | 2008-05-15 | 2012-03-20 | Hamamatsu Photonics K.K. | Spectroscopy module, and method for manufacturing the same |
US8368885B2 (en) | 2007-06-08 | 2013-02-05 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8604412B2 (en) | 2008-05-15 | 2013-12-10 | Hamamatsu Photonics K.K. | Spectral module and method for manufacturing spectral module |
US8804118B2 (en) | 2008-05-15 | 2014-08-12 | Hamamatsu Photonics K.K. | Spectral module |
JP2022513676A (en) * | 2018-11-29 | 2022-02-09 | ライカ マイクロシステムズ インコーポレイテッド | Small Diffraction Limited Near Infrared (NIR) Spectrometer and Related Detectors |
-
1994
- 1994-11-17 JP JP28306694A patent/JPH08145794A/en active Pending
Cited By (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0826335A1 (en) * | 1996-08-30 | 1998-03-04 | ESC Medical Systems Ltd. | Spectral monitoring apparatus |
US8477305B2 (en) | 2007-06-08 | 2013-07-02 | Hamamatsu Photonics K.K. | Spectroscope |
US8368885B2 (en) | 2007-06-08 | 2013-02-05 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8045155B2 (en) | 2007-06-08 | 2011-10-25 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8477306B2 (en) | 2007-06-08 | 2013-07-02 | Hamamatsu Photonics K.K. | Spectroscope |
WO2008149939A1 (en) | 2007-06-08 | 2008-12-11 | Hamamatsu Photonics K.K. | Spectroscope |
US8411269B2 (en) | 2007-06-08 | 2013-04-02 | Hamamatsu Photonics K.K. | Spectroscopic module |
US8031336B2 (en) | 2007-06-08 | 2011-10-04 | Hamamatsu Photonics K.K. | Spectroscope |
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