JPH0814317B2 - Vacuum device - Google Patents
Vacuum deviceInfo
- Publication number
- JPH0814317B2 JPH0814317B2 JP63006895A JP689588A JPH0814317B2 JP H0814317 B2 JPH0814317 B2 JP H0814317B2 JP 63006895 A JP63006895 A JP 63006895A JP 689588 A JP689588 A JP 689588A JP H0814317 B2 JPH0814317 B2 JP H0814317B2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- flange
- gas
- storage groove
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Gasket Seals (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は真空装置に係わり、特に真空容器の下端開口
部に設けられたフランジに形成されたＯリング収納溝の
改良に関する。Description: TECHNICAL FIELD The present invention relates to a vacuum device, and more particularly to improvement of an O-ring storage groove formed in a flange provided at a lower end opening of a vacuum container.
〔従来の技術〕 一般にＯリング収納溝には、第７図に示すように断面
が角形のＯリング収納溝と、第８図に示すように断面が
台形状のＯリング収納溝とがあり、このうち第８図に示
すＯリング収納溝１は鉛直下のフランジ面であってもＯ
リング２が脱落しないため、下方が開口した縦型の真空
容器などに使用されている。[Prior Art] Generally, the O-ring storage groove has an O-ring storage groove having a rectangular cross section as shown in FIG. 7 and an O-ring storage groove having a trapezoidal cross section as shown in FIG. Of these, the O-ring storage groove 1 shown in FIG.
Since the ring 2 does not fall off, it is used in a vertical vacuum container having an open bottom.
しかしながら、上記のようなＯリング収納溝はフラン
ジの開口部をシール板で塞いだ際、第９図に示すように
Ｏリング収納溝１とＯリング２との間隙部３にガスが残
留し、この残留ガスが真空側へ徐々にリークするため、
真空容器内を排気するのに時間がかかるという不具合が
あった。However, when the opening of the flange of the O-ring storage groove as described above is closed by the seal plate, gas remains in the gap 3 between the O-ring storage groove 1 and the O-ring 2 as shown in FIG. Since this residual gas gradually leaks to the vacuum side,
There is a problem that it takes time to exhaust the inside of the vacuum container.
本発明はこのような問題点を解決するためになされた
もので、その目的は減圧時に残留ガスが真空側へリーク
するようなことがなく、真空容器内を短時間で高真空に
到達させることができる真空装置を提供することにあ
る。The present invention has been made to solve such a problem, and an object thereof is to prevent a residual gas from leaking to the vacuum side during depressurization and to reach a high vacuum in a vacuum container in a short time. It is to provide a vacuum device capable of
上記目的を達成するために本発明は、真空容器と、こ
の真空容器の下端に設けられ断面が逆台形形状のＯリン
グ収納溝を下面に有するフランジと、前記Ｏリング収納
溝内に収容され断面が円形形状のＯリングと、このＯリ
ングを介して前記フランジの開口部を気密に閉塞するシ
ール板とを有する真空装置において、前記フランジの下
面に前記Ｏリング収納溝に残留したガスを前記真空容器
側へ排出するためのガス抜き穴を設けたことを特徴とす
る。In order to achieve the above object, the present invention provides a vacuum container, a flange provided at a lower end of the vacuum container and having an O-ring storage groove having an inverted trapezoidal cross section on the lower surface, and a cross section housed in the O-ring storage groove. In a vacuum device having a circular O-ring and a seal plate that hermetically closes the opening of the flange through the O-ring, the gas remaining in the O-ring storage groove is vacuumed on the lower surface of the flange. It is characterized in that a gas vent hole for discharging to the container side is provided.
本発明では、フランジの開口部をシール板で塞いだ際
にＯリングとＯリング収納溝との間隙部にガスが残留し
てもＯリング収納溝に設けられたガス抜き手段により残
留ガスを真空側に速やかに排気できるため、減圧時に残
留ガスが真空側へリークするようなことがなく、真空容
器内を短時間で高真空に到達させることができる。According to the present invention, even if gas remains in the gap between the O-ring and the O-ring housing groove when the opening of the flange is closed with the seal plate, the residual gas is vacuumed by the gas venting means provided in the O-ring housing groove. Since the gas can be quickly exhausted to the side, the residual gas does not leak to the vacuum side when the pressure is reduced, and the inside of the vacuum container can reach a high vacuum in a short time.
以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図ないし第４図は本発明の第１実施例を示すもの
で、図中11は図示しない真空容器の下端に設けられたフ
ランジである。このフランジ11の下面であるフランジ面
12には断面が逆台形状のＯリング収納溝13が設けられて
いる。上記Ｏリング収納溝13内には弾性材からなるＯリ
ング14が保持されており、Ｏリング収納溝13の底面と側
癖に接触している。1 to 4 show a first embodiment of the present invention, in which 11 is a flange provided at the lower end of a vacuum container (not shown). Flange surface that is the lower surface of this flange 11
An O-ring storage groove 13 having an inverted trapezoidal cross section is provided at 12. An O-ring 14 made of an elastic material is held in the O-ring storage groove 13 and is in contact with the bottom surface of the O-ring storage groove 13 and the lateral pattern.
また、上記Ｏリング収納溝13上にはＯリング収納溝13
の幅より径の大きい複数のガス抜き穴15…がガス抜き手
段として複数箇所に設けられている。これらのガス抜き
穴15…はＯリング収納溝13とＯリング14との間隙部16に
通じており、この間隙部16に残留したガスをガス抜き穴
15より真空側に排気できるようになっている。In addition, the O-ring storage groove 13 is provided on the O-ring storage groove 13.
A plurality of gas vent holes 15 having a diameter larger than the width of the gas vent holes are provided at a plurality of locations as gas venting means. These gas vent holes 15 ... Lead to a gap 16 between the O-ring housing groove 13 and the O ring 14, and the gas remaining in the gap 16 is vented.
It can be exhausted to the vacuum side from 15.
上記のような構成において、フランジ11の開口部17を
図示しないシール板で塞ぐと、Ｏリング14は第４図に示
すようにＯリング収納溝13内に押し潰される。このと
き、Ｏリング収納溝13とＯリング14との間隙部16にはガ
スが残留するが、本実施例では間隙部16に残留したガス
をガス抜き穴15より真空側へ排気できるため、減圧時に
残留ガスが真空側へリークするようなことがなく、真空
容器内を短時間で高真空に到達させることができる。In the above structure, when the opening 17 of the flange 11 is closed with a seal plate (not shown), the O-ring 14 is crushed into the O-ring housing groove 13 as shown in FIG. At this time, the gas remains in the gap 16 between the O-ring housing groove 13 and the O-ring 14, but in this embodiment, the gas remaining in the gap 16 can be exhausted to the vacuum side from the gas vent hole 15, so that the pressure is reduced. Sometimes the residual gas does not leak to the vacuum side, and it is possible to reach a high vacuum in the vacuum container in a short time.
第５図および第６図は本発明の第２実施例を示すもの
で、この実施例ではガス抜き手段として溝状のガス抜き
穴18がＯリング収納溝13上の複数箇所に設けられてい
る。上記ガス抜き穴18はフランジ11の半径方向に沿って
設けられ、断面が円弧状をなしている。5 and 6 show a second embodiment of the present invention. In this embodiment, groove-like gas vent holes 18 are provided at a plurality of positions on the O-ring accommodating groove 13 as gas venting means. . The gas vent hole 18 is provided along the radial direction of the flange 11 and has a circular cross section.
このような形状のガス抜き穴18をＯリング収納溝13上
の複数箇所に設けることにより、前記第１実施例と同様
に残留ガスをガス抜き穴18より真空側に排気できるた
め、真空容器内を短時間で高真空に到達させることがで
きる。By providing the gas vent holes 18 having such a shape at a plurality of positions on the O-ring storage groove 13, the residual gas can be exhausted to the vacuum side from the gas vent holes 18 as in the first embodiment. Can reach a high vacuum in a short time.
なお、本発明は上述した第１及び第２実施例に限定さ
れるものではなく、本発明の要旨を逸脱しない範囲で種
々の設計的変更が可能である。The present invention is not limited to the above-described first and second embodiments, and various design changes can be made without departing from the gist of the present invention.
以上説明したように本発明によれば、真空ポンプを駆
動して真空容器内を真空排気すると、Ｏリング収納溝内
に残留したガスがガス抜き穴を通って真空容器側に吸引
され、真空容器内のガスと共に外部に排出されるので、
真空容器内を短時間で真空状態にすることができる。As described above, according to the present invention, when the vacuum pump is driven to evacuate the inside of the vacuum container, the gas remaining in the O-ring storage groove is sucked toward the vacuum container through the gas vent hole, Because it is exhausted to the outside with the gas inside,
The inside of the vacuum container can be vacuumed in a short time.
第１図は本発明の第１実施例を示すＯリング収納溝の平
面図、第２図はその部分詳細図、第３図は第２図に示す
III−III線の矢視断面図、第４図は同実施例の作用を示
す図、第５図は本発明の第２実施例を示すＯリング収納
溝の部分平面図、第６図は第５図に示すVI−VI線の矢視
断面図、第７図ないし第９図は従来例を示す図である。 11……フランジ、12……フランジ面、13……Ｏリング収
納溝、14……Ｏリング、15……ガス抜き穴、16……間隙
部、18……ガス抜き穴。FIG. 1 is a plan view of an O-ring storage groove showing the first embodiment of the present invention, FIG. 2 is a partial detailed view thereof, and FIG. 3 is shown in FIG.
A sectional view taken along the line III-III, FIG. 4 is a view showing the operation of the same embodiment, FIG. 5 is a partial plan view of an O-ring storage groove showing a second embodiment of the present invention, and FIG. FIG. 5 is a sectional view taken along line VI-VI shown in FIG. 5, and FIGS. 7 to 9 are views showing a conventional example. 11 …… Flange, 12 …… Flange surface, 13 …… O-ring storage groove, 14 …… O-ring, 15 …… Gas vent, 16 …… Gap, 18 …… Gas vent.
Claims (1)
れ断面が逆台形形状のＯリング収納溝を下面に有するフ
ランジと、前記Ｏリング収納溝内に収容され断面が円形
形状のＯリングと、このＯリングを介して前記フランジ
の開口部を気密に閉塞するシール板とを有する真空装置
において、前記フランジの下面に前記Ｏリング収納溝に
残留したガスを前記真空容器側へ排出するためのガス抜
き穴を設けたことを特徴とする真空装置。1. A vacuum container, a flange having a lower surface of the vacuum container and an O-ring housing groove having an inverted trapezoidal cross section, and an O-ring having a circular cross section housed in the O ring housing groove. And a seal plate that hermetically closes the opening of the flange through the O-ring, in order to discharge the gas remaining in the O-ring storage groove on the lower surface of the flange to the vacuum container side. A vacuum device characterized by having a gas vent hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63006895A JPH0814317B2 (en) | 1988-01-18 | 1988-01-18 | Vacuum device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63006895A JPH0814317B2 (en) | 1988-01-18 | 1988-01-18 | Vacuum device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01182670A JPH01182670A (en) | 1989-07-20 |
| JPH0814317B2 true JPH0814317B2 (en) | 1996-02-14 |
Family
ID=11650958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63006895A Expired - Lifetime JPH0814317B2 (en) | 1988-01-18 | 1988-01-18 | Vacuum device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0814317B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4449292B2 (en) * | 2002-10-30 | 2010-04-14 | パナソニック株式会社 | Shut-off valve |
| JP2006038051A (en) * | 2004-07-26 | 2006-02-09 | Daikin Ind Ltd | Elastic seal member |
| JP2011080607A (en) * | 2011-01-26 | 2011-04-21 | Daikin Industries Ltd | Elastic seal member |
| JP7368263B2 (en) * | 2020-02-14 | 2023-10-24 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing equipment and substrate processing method |
-
1988
- 1988-01-18 JP JP63006895A patent/JPH0814317B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01182670A (en) | 1989-07-20 |
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