JPH08125331A - Manufacture of printed circuit board - Google Patents

Manufacture of printed circuit board

Info

Publication number
JPH08125331A
JPH08125331A JP25348594A JP25348594A JPH08125331A JP H08125331 A JPH08125331 A JP H08125331A JP 25348594 A JP25348594 A JP 25348594A JP 25348594 A JP25348594 A JP 25348594A JP H08125331 A JPH08125331 A JP H08125331A
Authority
JP
Japan
Prior art keywords
conductive
synthetic resin
wiring board
printed wiring
bump group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25348594A
Other languages
Japanese (ja)
Other versions
JP3609126B2 (en
Inventor
Takahiro Mori
崇浩 森
Osamu Matsuda
理 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Kyocera Chemical Corp
Original Assignee
Toshiba Corp
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Chemical Corp filed Critical Toshiba Corp
Priority to JP25348594A priority Critical patent/JP3609126B2/en
Publication of JPH08125331A publication Critical patent/JPH08125331A/en
Application granted granted Critical
Publication of JP3609126B2 publication Critical patent/JP3609126B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

PURPOSE: To manufacture a printed circuit board which can package wirings of higher density by a simple process with high reliability by high yield. CONSTITUTION: The method for manufacturing a printed circuit board comprises the steps of extruding or dropping melted conductor on a predetermined region surface of a sheetlike or platelike support base material 3, then solidifying to form protruding conductive bump 5 group, sequentially superposing to laminate a synthetic resin sheet 6 and a conductive metal layer 3' on the surface formed with the bump 5 group, and pressurizing the laminate to pass the end of the bump 5 group in the thickness direction of the sheet 6 to connect it to the layer 3'.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は印刷配線板の製造方法に
係り、特に厚さ方向の接続配線部を有する印刷配線板の
簡易な製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed wiring board, and more particularly to a simple method for manufacturing a printed wiring board having connecting wiring portions in the thickness direction.

【0002】[0002]

【従来の技術】たとえば両面型印刷配線板もしくは多層
型印刷配線板においては、配線パターン間の電気的な接
続を、次のように行っている。すなわち、両面型印刷配
線板の場合は、両面銅箔張り積層板の所定位置に穴明け
加工(穿設加工)を施し、この穿設した穴の内壁面を含
め、全面に化学メッキ処理を施してから、電気メッキ処
理で厚付けし、穴の内壁面の金属層を厚くして信頼性を
高め、配線パターン層間の電気的な接続を行っている。
2. Description of the Related Art For example, in a double-sided printed wiring board or a multi-layered printed wiring board, wiring patterns are electrically connected as follows. That is, in the case of a double-sided printed wiring board, perforation processing (perforation processing) is performed at a predetermined position on the double-sided copper foil-clad laminate, and chemical plating treatment is applied to the entire surface including the inner wall surface of the perforated holes. After that, it is thickened by an electroplating process to increase the reliability by thickening the metal layer on the inner wall surface of the hole to establish electrical connection between the wiring pattern layers.

【0003】また、多層印刷配線板の場合は、積層板両
面に張られた銅箔を、それぞれパターニングした後、そ
のパターニング面上に絶縁シート(たとえばプリプレ
グ)を介して銅箔を積層・配置し、加熱加圧により一体
化した後、前述の両面型印刷配線板のときと同様に、穴
明け加工およびメッキ処理による配線パターン層間の電
気的な接続を行う一方、表面銅箔のパターニングを行っ
て、多層型印刷配線板を得ている。なお、より配線層の
多い多層型印刷配線板の場合は、中間に介挿させる両面
型印刷配線板数を増やす方式で製造できる。
Further, in the case of a multilayer printed wiring board, after patterning the copper foils stretched on both sides of the laminated board respectively, the copper foils are laminated and arranged on the patterned surface via an insulating sheet (for example, prepreg). After integrating by heating and pressurizing, as in the case of the above-mentioned double-sided printed wiring board, while making electrical connection between the wiring pattern layers by punching and plating, the surface copper foil is patterned. , A multilayer printed wiring board is obtained. In the case of a multilayer printed wiring board having more wiring layers, it can be manufactured by a method of increasing the number of double-sided printed wiring boards inserted in the middle.

【0004】前記印刷配線板の製造方法において、配線
パターン層間の電気的な接続を、メッキ方法によらず行
う方法として、両面銅箔張り基板の所定位置に穴明け
し、この穴内に導電性ペーストを印刷法などにより流し
込み、穴内に流し込んだ導電性ペーストの樹脂分を硬化
させて、配線層間を電気的に接続する方法も行われてい
る。
In the method of manufacturing a printed wiring board described above, as a method of electrically connecting the wiring pattern layers without depending on the plating method, a hole is made at a predetermined position of a double-sided copper foil-clad substrate, and a conductive paste is placed in the hole. There is also a method in which the resin layer of the conductive paste poured into the holes is cured by a printing method or the like to electrically connect the wiring layers.

【0005】[0005]

【発明が解決しようとする課題】上記で説明したよう
に、配線パターン層間の電気的な接続に、メッキ法を利
用する印刷配線板の製造方法においては、積層板に配線
層間の電気的な接続用の穴明け(穿穴)加工、穿設した
穴内壁面を含めたメッキ処理工程などを要し、印刷配線
板の製造工程が冗長であるとともに、工程管理も繁雑で
あるという欠点がある。一方、配線層間の電気的な接続
用の穴に、導電性ペーストを印刷などにより埋め込む方
法の場合も、前記メッキ法の場合と同様に穴明け工程を
必要とする。しかも、穿設した穴内に、均一(一様)に
導体性ペーストを流し込み埋め込むことが難しく、電気
的な接続の信頼性にも問題があった。いずれにしても、
前記穴明け工程などを要することは、印刷配線板のコス
トや歩留まりなどに反映し、低コスト化などへの要望に
対応し得ないという欠点がある。
As described above, in the method of manufacturing a printed wiring board which utilizes the plating method for the electrical connection between the wiring pattern layers, the electrical connection between the wiring layers is made in the laminated board. There is a drawback that the manufacturing process of the printed wiring board is redundant and the process control is complicated, since it requires drilling (drilling) processing, plating process including the inner wall surface of the hole. On the other hand, the method of embedding a conductive paste in the holes for electrical connection between the wiring layers by printing or the like also requires a drilling step as in the case of the plating method. Moreover, it is difficult to pour the conductive paste evenly (uniformly) into the bored holes and to embed it, and there is a problem in the reliability of electrical connection. In any case,
The need for the perforating step is reflected in the cost and yield of the printed wiring board, and there is a drawback that it is not possible to meet the demand for cost reduction.

【0006】また、前記配線パターン層間の接続構成の
場合は、印刷配線板の表裏面に、配線パターン層間を接
続する導電体穴が設置されているため、その導電体穴の
領域に配線パターンを形成・配置し得ないし、さらに電
子部品を搭載することもできないことになる。このこと
は、配線パターン密度の向上が制約されるとともに、電
子部品の実装密度の向上も阻害されるという問題にな
る。つまり、従来の製造方法によって得られる印刷配線
板は、高密度配線や高密度実装による回路装置のコンパ
クト化、ひいては電子機器類の小形化などの要望に十分
応え得るものといえず、前記コスト面を含め、実用的に
より有効な印刷配線板の製造方法が望まれている。
Further, in the case of the connection structure between the wiring pattern layers, since the conductor holes for connecting the wiring pattern layers are provided on the front and back surfaces of the printed wiring board, the wiring pattern is formed in the region of the conductor holes. It cannot be formed / arranged, and electronic parts cannot be mounted. This poses a problem that the improvement of the wiring pattern density is restricted and the improvement of the mounting density of electronic components is also hindered. In other words, it cannot be said that the printed wiring board obtained by the conventional manufacturing method can sufficiently meet the demands for high-density wiring and compact circuit devices by high-density mounting, and further miniaturization of electronic devices. Including the above, a more practically effective method for producing a printed wiring board is desired.

【0007】本発明は上記事情に対処してなされたもの
で、簡易なプロセスで、より高密度の配線および実装が
可能で、信頼性の高い印刷配線板を歩留まりよく製造し
得る方法の提供を目的とする。
The present invention has been made in view of the above circumstances, and provides a method capable of manufacturing a highly reliable printed wiring board with a high yield, which enables wiring and mounting at a higher density by a simple process. To aim.

【0008】[0008]

【課題を解決するための手段】本発明に係る第1の印刷
配線板の製造方法は、シート状もしくは板状の支持基材
の所定領域面に、溶融させた導電性体を押出しもしくは
滴下した後固化させて、突起状の導電性バンプ群を形成
する工程と、前記突起状の導電性バンプ群を形成した面
に、合成樹脂系シートを重ね合わせ積層体化する工程
と、前記積層体を加圧して突起状の導電性バンプ群の先
端部を合成樹脂系シートの厚さ方向に貫通させる工程と
を具備して成ることを特徴とする。
According to a first method for producing a printed wiring board of the present invention, a molten conductive material is extruded or dropped onto a predetermined area surface of a sheet-shaped or plate-shaped supporting substrate. Post-solidifying to form a projecting conductive bump group, a step of stacking a synthetic resin sheet on the surface on which the projecting conductive bump group is formed to form a laminate, and the laminate. And a step of pressing the tip end portion of the conductive bump group having a protrusion shape to penetrate in the thickness direction of the synthetic resin sheet.

【0009】本発明に係る第2の印刷配線板の製造方法
は、シート状もしくは板状の支持基材の所定領域面に、
溶融させた導電性体を押出しもしくは滴下した後固化さ
せて、突起状の導電性バンプ群を形成する工程と、前記
突起状の導電性バンプ群を形成した面に、合成樹脂系シ
ートおよび導電性金属層を順次重ね合わせ積層体化する
工程と、前記積層体を加圧して突起状の導電性バンプ群
の先端部を合成樹脂系シートの厚さ方向に貫通させ、導
電性金属層に接続する工程とを具備して成ることを特徴
とする。
A second method for manufacturing a printed wiring board according to the present invention is characterized in that a predetermined area surface of a sheet-shaped or plate-shaped supporting substrate is
A step of forming a projecting conductive bump group by extruding or dropping the melted conductive material and then solidifying it, and a synthetic resin sheet and a conductive film on the surface on which the projecting conductive bump group is formed. A step of sequentially stacking metal layers to form a laminated body, and pressing the laminated body to penetrate the tip end of the projecting conductive bump group in the thickness direction of the synthetic resin sheet to connect to the conductive metal layer. And a process.

【0010】本発明に係る第3の印刷配線板の製造方法
は、シート状もしくは板状の支持基材の所定領域面に、
溶融させた導電性体を押出しもしくは滴下した後固化さ
せて、突起状の導電性バンプ群を形成する工程と、前記
突起状の導電性バンプ群を形成した面に、合成樹脂系シ
ートおよび導電性金属層を順次重ね合わせ積層体化する
工程と、前記積層体を加圧して突起状の導電性バンプ群
の先端部を合成樹脂系シートの厚さ方向に貫通させ、導
電性金属層に接続する工程と、前記導電性金属層を配線
パターニングする工程とを具備して成ることを特徴とす
る。
A third method for producing a printed wiring board according to the present invention is characterized in that a predetermined area surface of a sheet-shaped or plate-shaped supporting substrate is
A step of forming a projecting conductive bump group by extruding or dropping the melted conductive material and then solidifying it, and a synthetic resin sheet and a conductive film on the surface on which the projecting conductive bump group is formed. A step of sequentially stacking metal layers to form a laminated body, and pressing the laminated body to penetrate the tip end of the projecting conductive bump group in the thickness direction of the synthetic resin sheet to connect to the conductive metal layer. It is characterized by comprising a step and a step of wiring patterning the conductive metal layer.

【0011】すなわち、本発明は、絶縁体層を貫通する
接続配線部の形成手段に特徴がある。つまり、予め支持
基材面に接続配線部として、加熱などにより溶融もしく
は流動性を持たせた導電性体を、たとえばノズルを介し
ての押出し法、もしくは印刷法などによって突起状に被
着し、これを固化させて円錐状,円筒状,角柱状の導電
体を形成し、この突起状導電体先端部を、絶縁体層を貫
通させて接続配線部を形成する工程を採った点で特徴付
けられる。
That is, the present invention is characterized by means for forming a connection wiring portion penetrating the insulating layer. That is, as a connection wiring portion on the surface of the supporting base material, a conductive material that has been melted or fluidized by heating or the like is applied in a projection shape by, for example, an extrusion method through a nozzle or a printing method, Characterized by the step of solidifying this to form a conical, cylindrical, or prismatic conductor, and forming the connection wiring part by penetrating the insulator layer at the tip of this protruding conductor. To be

【0012】本発明において、導電性バンプ群を形成す
る支持基材としては、たとえば剥離性の良好な合成樹脂
シート類,もしくは導電性シート(箔)などが挙げら
れ、この支持基体は1枚のシートであってもよいし、配
線パターン化されたものでもよく、その形状はとくに限
定されないし、さらに導電性バンプ群は、一方の主面だ
けでなく、両主面にそれぞれ形成した形態のものを用い
てもよい。
In the present invention, examples of the supporting base material for forming the conductive bump group include synthetic resin sheets having good releasability, or a conductive sheet (foil), and the supporting base is one sheet. It may be a sheet or may be a wiring pattern, its shape is not particularly limited, and the conductive bump group is formed not only on one main surface but also on both main surfaces. May be used.

【0013】ここで、前記導電性バンプは、たとえば
銀,金,銅,半田粉,パラジウム,カーボンなどの導電
性粉末、これらの合金粉末もしくは複合(混合)金属粉
末と、たとえばフッ素樹脂,ポリカーボネート樹脂,ポ
リスルホン樹脂,ポリフェニレンサルファイド樹脂,ポ
リエステル樹脂,フェノキシ樹脂,フェノール樹脂,エ
ポキシ樹脂,フェノキシ樹脂,メラミン樹脂,ポリイミ
ド樹脂などのバインダー成分とを混合して調製された導
電性組成物で形成される。
Here, the conductive bumps are made of, for example, conductive powder such as silver, gold, copper, solder powder, palladium, or carbon, an alloy powder or a composite (mixed) metal powder of these, and a fluororesin or a polycarbonate resin, for example. , A polysulfone resin, a polyphenylene sulfide resin, a polyester resin, a phenoxy resin, a phenol resin, an epoxy resin, a phenoxy resin, a melamine resin, and a polyimide resin.

【0014】本発明は、前記のごとく、導電性組成物に
よって導電性バンプ群を形成する手段によって特徴付け
られる。つまり、常温下では固体状、もしくは乾燥・硬
化反応によって固化する導電性組成物を出発素材とし、
溶融状態もしくは流動性を持たせた状態で、たとえば口
径 0.5mm程度のノズルを介しての射出・滴下、あるいは
スキージで押出すスクリーン印刷法などによって、たと
えば円錐状,角錐状,円筒状,角柱状の高さ50〜 800μ
m 程度の突起状導電性バンプを所定の支持基材面上に被
着形成する。その後、要すれば、たとえば電気ヒータ,
超音波加熱装置,CO2 レーザーなどを熱源として、加
熱,乾燥処理を施すことによって、たとえば先端の尖っ
た円錐状もしくは角錐状の導電性バンプを形成する。こ
こで形成する導電性バンプ群の高さは一般的に、 100〜
400μm 程度が望ましく、さらに導電性バンプ群の高さ
は一層の合成樹脂系シートを貫通し得る高さ、および複
数層の合成樹脂系シートを貫通し得る高さとが適宜混在
していてもよい。
As described above, the present invention is characterized by means for forming the conductive bump group with the conductive composition. That is, a conductive composition that is solid at room temperature or solidifies by a drying / curing reaction is used as a starting material,
For example, conical, pyramidal, cylindrical, or prismatic in the molten state or in the fluidized state, for example, by injection / dropping through a nozzle with a diameter of about 0.5 mm, or screen printing with a squeegee. Height 50 ~ 800μ
A projection-like conductive bump of about m 2 is formed on the surface of a predetermined supporting base material. Then, if necessary, for example, an electric heater,
By using an ultrasonic heating device, a CO 2 laser, or the like as a heat source for heating and drying, for example, a conical or pyramidal conductive bump having a sharp tip is formed. The height of the conductive bump group formed here is generally 100 to
About 400 μm is desirable, and the height of the conductive bump group may be a height capable of penetrating one layer of synthetic resin sheet and a height capable of penetrating a plurality of layers of synthetic resin sheet as appropriate.

【0015】本発明において、前記導電性バンプ群が貫
挿され、貫通型の配線接続部が形成される合成樹脂系シ
ートとしては、たとえば熱可塑性樹脂フイルム(シー
ト)が挙げられ、またその厚さは50〜 800μm 程度が好
ましい。ここで、熱可塑性樹脂シートとしては、たとえ
ばポリカーボネート樹脂,ポリスルホン樹脂,熱可塑性
ポリイミド樹脂,4フッ化ポリエチレン樹脂,6フッ化
ポリプロピレン樹脂,ポリエーテルエーテルケトン樹脂
などのシート類が挙げられる。また、硬化前状態に保持
される熱硬化性樹脂シートとしては、エポキシ樹脂,ビ
スマレイミドトリアジン樹脂,ポリイミド樹脂,フェノ
ール樹脂,ポリエステル樹脂,メラミン樹脂,あるいは
ブタジエンゴム,ブチルゴム,天然ゴム,ネオプレンゴ
ム,シリコーンゴムなどの生ゴムのシート類が挙げられ
る。これら合成樹脂は、単独でもよいが絶縁性無機物や
有機物系の充填物を含有してもよく、さらにガラスクロ
スやマット、有機合成繊維布やマット、あるいは紙など
の補強材と組み合わせて成るシートであってもよい。
In the present invention, examples of the synthetic resin sheet in which the conductive bump group is inserted and through-type wiring connection portions are formed include a thermoplastic resin film (sheet) and its thickness. Is preferably about 50 to 800 μm. Here, examples of the thermoplastic resin sheet include sheets of polycarbonate resin, polysulfone resin, thermoplastic polyimide resin, tetrafluoropolyethylene resin, hexafluoropolypropylene resin, polyetheretherketone resin, and the like. Further, as the thermosetting resin sheet which is kept in the pre-curing state, epoxy resin, bismaleimide triazine resin, polyimide resin, phenol resin, polyester resin, melamine resin, or butadiene rubber, butyl rubber, natural rubber, neoprene rubber, silicone Examples include raw rubber sheets such as rubber. These synthetic resins may be used alone or may contain an insulating inorganic or organic filler, and are a sheet formed by combining with a reinforcing material such as glass cloth or mat, organic synthetic fiber cloth or mat, or paper. It may be.

【0016】さらに、本発明において、バンプ群を形設
した支持基体などの主面に、合成樹脂系シート主面を対
接させて積層配置して成る積層体をそのままもしくは加
熱して加圧するとき、合成樹脂系シートを載置する基台
(当て板)としては、寸法や変形の少ない金属板もしく
は耐熱性樹脂板、たとえばステンレス板,真鍮板、ポリ
イミド樹脂板(シート),ポリテトラフロロエチレン樹
脂板(シート)などが使用される。この積層体の加圧に
当たり、加熱して合成樹脂系シートの樹脂分が柔らかく
なった状態で加圧し、バンプ群を貫挿させると、より良
好なバンプ群の貫挿を達成し得る。
Further, according to the present invention, when a laminated body in which the principal surface of a synthetic resin sheet is placed in contact with the principal surface of a support base or the like on which the bump group is formed is placed directly or when heated and pressed. As a base (patch plate) on which a synthetic resin sheet is placed, a metal plate or a heat-resistant resin plate with little size or deformation, for example, a stainless plate, a brass plate, a polyimide resin plate (sheet), a polytetrafluoroethylene resin Plates (sheets) are used. When the laminated body is pressed, when the resin group of the synthetic resin sheet is heated to be softened, and the bump group is inserted, better insertion of the bump group can be achieved.

【0017】[0017]

【作用】本発明に係る印刷配線板の製造方法によれば、
配線パターン層間を電気的に接続する層間の配線接続部
は、いわゆる積層一体化する工程での加熱,加圧によ
り、層間絶縁層を成す合成樹脂系シートの可塑状態化な
どと、支持基材面の導電性バンプ群の圧入とによって、
確実に信頼性の高い配線パターン層間の電気的な接続が
達成される。つまり、導電性バンプ群を溶融などされた
導電性体の滴下・押出しなどで形成することにより、プ
ロセスを大幅に簡易化しながら、微細な配線パターン層
間を任意な位置(箇所)で、高精度にかつ信頼性の高い
電気的な接続を形成し得るので、配線密度の高い印刷配
線板を低コストで製造することが可能となる。また、前
記配線パターン層間の電気的な接続に当たり、接続穴の
形設も不要となるので、その分、高密度配線および高密
度実装の可能な印刷配線板が得られることになる。
According to the method of manufacturing a printed wiring board according to the present invention,
Wiring pattern The wiring connection between layers that electrically connects the layers is formed by the heating and pressurization in the so-called layer-integrating process to plasticize the synthetic resin sheet that forms the interlayer insulating layer, and the supporting substrate surface. By press-fitting the conductive bump group of
A reliable electrical connection between the wiring pattern layers is achieved. In other words, by forming the conductive bump group by dropping and extruding a conductive material that has been melted, etc., the process can be greatly simplified, and at the same time, highly precise, at any position (location) between fine wiring pattern layers. Since a highly reliable electrical connection can be formed, a printed wiring board having a high wiring density can be manufactured at low cost. In addition, since it is not necessary to form connection holes for electrical connection between the wiring pattern layers, a printed wiring board capable of high-density wiring and high-density mounting can be obtained accordingly.

【0018】[0018]

【実施例】以下図1 (a)〜 (c),図2 (a)〜 (c)および
図3 (a)〜 (b)をそれぞれ参照して本発明の実施例を説
明する。
Embodiments of the present invention will be described below with reference to FIGS. 1 (a) to 1 (c), 2 (a) to 3 (c) and 3 (a) to 3 (b), respectively.

【0019】実施例1 図1 (a)〜 (c)は、この実施例における印刷配線板の製
造方法の実施態様例を模式的に示したもので、先ず、平
均粒径 2μm の銀粉末70重量部およびポリサルホン樹脂
粉末30重量部から成る混合物を用意し、約 370℃に加熱
溶融させて、ほぼ一様な混合溶融体を得た。この溶融体
について脱泡を行った後、図1 (a)に図示したような加
熱装置付きシリンダ1内に収容し、約 330℃の溶融温度
に保持した。次いで、加熱装置付きの支持台2面に吸着
・載置した支持基材3,たとえば約 150℃に加熱保持さ
れた片面を粗化処理した厚さ35μm の銅箔面に、加熱装
置付きシリンダ1の底面を対接(密着的に)させた。そ
の後、加熱装置付きシリンダ1のシリンダー1aを操作
し、底壁面に予め形設しておいた口径 0.5mm程度の貫通
孔1bから、前記銅箔3面に導電性溶融体4を10kg/cm2
程度の圧力,速度 1mm/sec で銅箔3面から離して、底
部の直径が約0.55mm,高さが約0.50mmの突起状の導電性
バンプ(円錐状バンプ)を被着した。前記加熱装置付き
シリンダ1を銅箔3面から引き離してから約 5 sec 経
過した時点で、前記形成された突起状の導電性バンプは
固化して、図1 (b)に断面的に示すごとく、一方の主面
(ここでは粗化処理面)に、円錐状の導電性バンプ5群
が一体的に形成された。
Example 1 FIGS. 1 (a) to 1 (c) schematically show an example of an embodiment of a method for manufacturing a printed wiring board in this example. First, silver powder 70 having an average particle size of 2 μm is used. A mixture of 1 part by weight and 30 parts by weight of polysulfone resin powder was prepared and heated and melted at about 370 ° C. to obtain a substantially uniform mixed melt. After defoaming this melt, it was placed in a cylinder 1 with a heating device as shown in FIG. 1 (a) and kept at a melting temperature of about 330.degree. Next, the support base material 3 adsorbed and placed on the surface of the support base 2 with the heating device 3, for example, the surface of the copper foil having a thickness of 35 μm, which has been roughened on one side heated and held at about 150 ° C. The bottom surface of the was contacted (adhered). After that, by operating the cylinder 1a of the cylinder 1 with the heating device, the conductive melt 4 is applied to the surface of the copper foil 3 through the through hole 1b having a diameter of about 0.5 mm preformed on the bottom wall surface at 10 kg / cm 2
The conductive bumps (conical bumps) having a bottom diameter of about 0.55 mm and a height of about 0.50 mm were deposited by separating from the copper foil 3 surface at a pressure of about 1 mm / sec. Approximately 5 seconds after the cylinder 1 with the heating device is separated from the surface of the copper foil 3, the formed protruding conductive bumps are solidified, and as shown in a sectional view of FIG. 1 (b), A conical conductive bump group 5 was integrally formed on one main surface (here, a roughened surface).

【0020】前記導電性バンプ5群を形成した銅箔3
と、合成樹脂系シート6、たとえば厚さ 100μm のポリ
エーテルイミド樹脂フィルム(商品名,スミライト FS-
1400,住友ベークライトKK)とを、前記導電性バンプ
5群を挟む形に積層体化した。その後、前記銅箔3およ
び合成樹脂シート6裏面に、それぞれポリイミド樹脂フ
ィルムを当て板として積層・配置し、樹脂圧として50 M
Paで加圧したまま取りだして、表裏のフィルムを剥離し
たところ、図1 (c)に断面的に示すごとく、前記導電性
のバンプ5群はほぼそのまま形で、合成樹脂系シート6
中に圧入して、先端部が貫通して配線接続部5′を構成
した形の印刷配線板用素板を得た。
Copper foil 3 on which the conductive bumps 5 are formed
And a synthetic resin sheet 6, for example, a 100 μm thick polyetherimide resin film (trade name, Sumilite FS-
1400, Sumitomo Bakelite KK) were laminated to sandwich the conductive bumps 5 group. Then, a polyimide resin film is laminated and arranged on the back surface of the copper foil 3 and the synthetic resin sheet 6 as a backing plate, respectively, and a resin pressure of 50 M is applied.
When the film on the front and back sides was peeled off while being pressed with Pa, the conductive bumps 5 were formed in substantially the same shape as shown in the sectional view of FIG. 1 (c).
It was press-fitted into it to obtain a base plate for a printed wiring board in which the tip portion penetrated to form the wiring connection portion 5 '.

【0021】この印刷配線板用素板の配線接続部5′露
出面に、銀ペーストの印刷・乾燥によってパターニング
を行う一方、銅箔3面についてパターニングを行って、
印刷配線板を製造した。次いで、この印刷配線板が備え
ている貫通型の配線接続部5′について、テスターで各
配線接続部5′を表裏面から導通テストしたところ、全
数が0.01Ω以下の抵抗であった。
On the exposed surface of the wiring connection portion 5'of this base plate for a printed wiring board, patterning is performed by printing and drying a silver paste, while patterning is performed on the copper foil 3 surface.
A printed wiring board was manufactured. Next, the penetration type wiring connecting portions 5'provided in this printed wiring board were subjected to a continuity test from the front and back sides of each wiring connecting portion 5'with a tester, and the total resistance was 0.01 Ω or less.

【0022】なお、上記において、導電性バンプ5を押
出し形成するとき、加熱装置付きシリンダー1に収容し
た溶融導電体4の温度を 330℃に設定した場合は、底部
の直径が約 0.6mm,高さが約0.35mmの突起状の導電性バ
ンプ(円錐状バンプ)が被着形成された。また、所要の
位置に直径0.35mmの穴を明けて成る金属板製のスクリー
ン版を介して、 330℃程度に保持した溶融導電性体4を
数回繰り返し印刷し、高さ約 300μm の円錐状の導電性
バンブ群を形成した場合も、同様な印刷配線板が得られ
た。
In the above, when the temperature of the molten conductor 4 housed in the heating device-equipped cylinder 1 is set to 330 ° C. when the conductive bumps 5 are formed by extrusion, the bottom diameter is about 0.6 mm, and A protruding conductive bump (conical bump) having a size of about 0.35 mm was deposited. In addition, the molten conductive material 4 held at about 330 ° C was repeatedly printed several times through a screen plate made of a metal plate having a hole of 0.35 mm in diameter at a required position, and a conical shape with a height of about 300 μm was printed. The same printed wiring board was obtained when the conductive bump group of was formed.

【0023】実施例2 図2 (a)〜 (c)は、この実施例の実施態様を模式的に示
したものであり、上記実施例1の場合において、突起状
の導電性バンプ(円錐状バンプ)を被着形成するとき、
一部を次ぎのように変更したものである。すなわち、加
熱装置付きの支持台2面に吸着・載置した支持基材3,
たとえば約 150℃に加熱保持された片面を粗化処理した
厚さ35μm の銅箔面に、導電性溶融体4を10kg/cm2
度の圧力,速度 1mm/sec で押出して、突起状の導電性
バンプ(円錐状バンプ)を被着形成するとき、まず、加
熱装置付きシリンダー1の底壁部の貫通孔1b開口部に導
電性溶融体4を膨出すさせてから、その膨出部を銅箔3
面に接触させて引き離し、底部の最大直径が約0.70mm,
高さが約0.70mmの突起状の導電性バンプ(円錐状バン
プ)群を被着形成した。
Example 2 FIGS. 2 (a) to 2 (c) schematically show an embodiment of this example. In the case of Example 1, the conductive bumps (conical shape) Bumps)
It is partly modified as follows. That is, the supporting base material 3, which is adsorbed and placed on the surface of the supporting base 2 with the heating device 3,
For example, the conductive melt 4 is extruded at a pressure of about 10 kg / cm 2 and a speed of 1 mm / sec onto a copper foil surface having a thickness of 35 μm, which has been roughened on one side and heated and held at about 150 ° C. When depositing a conductive bump (conical bump), first, the conductive melt 4 is swollen in the opening of the through hole 1b of the bottom wall of the cylinder 1 with a heating device, and then the swollen portion is made of copper. Foil 3
It comes in contact with the surface and pulls it apart, the maximum diameter of the bottom is about 0.70 mm,
A group of protruding conductive bumps (conical bumps) having a height of about 0.70 mm were deposited.

【0024】次いで、図2 (a)に断面的に示すごとく、
前記導電性バンプ5群を形成した銅箔3と、合成樹脂系
シート6、たとえば厚さ 100μm のポリエーテルイミド
樹脂フィルム(商品名,スミライト FS-1400,住友ベー
クライトKK)と、片面を粗化処理した厚さ35μm の銅
箔3′とを積層体化した。その後、前記銅箔3および銅
箔3′の裏面に、それぞれポリイミド樹脂フィルムを当
て板として積層・配置し、樹脂圧として50 MPaで加圧し
たまま取りだして、表裏のフィルムを剥離したところ、
図2 (b)に断面的に示すごとく、前記導電性のバンプ5
群がほぼそのまま形で、合成樹脂系シート6中に圧入し
て、先端部が貫通して配線接続部5′を構成した形の印
刷配線板用両面銅張り積層板を得た。
Next, as shown in a sectional view in FIG.
A copper foil 3 on which the conductive bumps 5 are formed, a synthetic resin sheet 6, for example, a 100 μm thick polyetherimide resin film (trade name, Sumilite FS-1400, Sumitomo Bakelite KK), and one surface is roughened. The copper foil 3'having a thickness of 35 .mu.m was laminated. After that, polyimide resin films were laminated and arranged as backing plates on the back surfaces of the copper foil 3 and the copper foil 3 ', respectively, and taken out with a resin pressure of 50 MPa, and the front and back films were peeled off.
As shown in a sectional view in FIG. 2B, the conductive bumps 5 are formed.
A double-sided copper-clad laminate for a printed wiring board was obtained, in which the group was formed as it was, and was press-fitted into the synthetic resin sheet 6 to form a wiring connection portion 5'through which the tip portion penetrates.

【0025】その後、前記印刷配線板用両面銅張り積層
板の両銅箔3,3′面に、通常のエッチングレジストイ
ンク(商品名,PSR-4000 H,太陽インキKK)をスクリ
ーン印刷し、導体パターン部3a,3a′をマスクしてか
ら、塩化第2銅をエッチング液としてエッチング処理
後、レジストマスク剥離して、図2 (c)に断面的に示す
ような両面印刷配線板7を得た。こうして製造した両面
型印刷配線板について、通常実施されている電気チェッ
クを行ったところ、全ての接続に不良ないし信頼性など
の問題が認められなかった。また、前記両面導電パター
ン間の接続の信頼性を評価するため、ホットオイルテス
トで( 260℃のオイル中に10秒浸漬,20℃のオイル中に
20秒浸漬のサイクルを 1サイクルとして)、 500回行っ
ても不良発生は認められず、従来の銅メッキ法による場
合に比較して、導電(配線)パターン層間の接続信頼性
が格段にすぐれていた。
After that, a normal etching resist ink (trade name, PSR-4000 H, Taiyo Ink KK) was screen-printed on both copper foils 3, 3'of the double-sided copper-clad laminate for printed wiring board to obtain a conductor. After masking the pattern portions 3a and 3a ', after performing an etching treatment with cupric chloride as an etching solution, the resist mask was peeled off to obtain a double-sided printed wiring board 7 as shown in cross section in FIG. 2 (c). . When the thus-produced double-sided printed wiring board was subjected to an electrical check that is usually carried out, no problems such as defects or reliability were found in all connections. In addition, in order to evaluate the reliability of the connection between the double-sided conductive patterns, a hot oil test was conducted (immersion in oil at 260 ° C for 10 seconds, in oil at 20 ° C.
No occurrence of defects was observed even after 500 cycles of 20 seconds immersion cycle (1 cycle), and the connection reliability between conductive (wiring) pattern layers was remarkably superior to that of the conventional copper plating method. It was

【0026】実施例3 図3 (a), (b)は、この実施例の実施態様を模式的に示
したものである。すなわち、上記実施例2で製造した導
電性バンプ5群を形成した銅箔3、および両面型印刷配
線板7を組み合わせ、多層型の印刷配線板を製造する例
である。
Example 3 FIGS. 3 (a) and 3 (b) schematically show an embodiment of this example. That is, this is an example of manufacturing a multilayer printed wiring board by combining the copper foil 3 having the conductive bumps 5 formed in the second embodiment and the double-sided printed wiring board 7.

【0027】先ず、図3 (a)に断面的に示すごとく、両
面型印刷配線板7の両面側に、合成樹脂系シート6、た
とえば厚さ 100μm のポリエーテルイミド樹脂フィルム
を介して、粗化処理面側に導電性バンプ5群を被着形成
した厚さ35μm の銅箔3を積層体化した。その後、前記
両面の銅箔3裏面に、それぞれポリイミド樹脂フィルム
を当て板として積層・配置し、樹脂圧として50 MPaで加
圧したまま取りだして、表裏のフィルムを剥離したとこ
ろ、図3 (b)に断面的に示すように、前記導電性のバン
プ5群がほぼそのまま形で、合成樹脂系シート6中に圧
入して、先端部が貫通して、両面型印刷配線板7に電気
的に接続した配線接続部5′を構成した形の多層印刷配
線板用両面銅張り積層板8を得た。
First, as shown in a sectional view in FIG. 3 (a), roughening is performed on both sides of the double-sided printed wiring board 7 with a synthetic resin sheet 6, for example, a polyetherimide resin film having a thickness of 100 μm. A 35 μm-thick copper foil 3 having a conductive bump 5 group deposited on the treated surface was laminated. Then, polyimide resin films were laminated and arranged as backing plates on the back surfaces of the copper foils 3 on both sides, and the films were taken out with the resin pressure being applied at 50 MPa, and the front and back films were peeled off, as shown in FIG. 3 (b). As shown in a sectional view in FIG. 3, the conductive bumps 5 are formed in substantially the same shape, and are press-fitted into the synthetic resin sheet 6 so that the tip portions thereof penetrate to electrically connect to the double-sided printed wiring board 7. A double-sided copper-clad laminate 8 for a multilayer printed wiring board having a configuration in which the wiring connection portion 5'is configured is obtained.

【0028】その後、前記多層印刷配線板用両面銅張り
積層板の両銅箔3面に、通常のエッチングレジストイン
クをスクリーン印刷し、導体パターン部をマスクしてか
ら、塩化第2銅をエッチング液としてエッチング処理
後、レジストマスク剥離して、多層型印刷配線板を得
た。こうして製造した多層型印刷配線板について、通常
実施されている電気チェックを行ったところ、全ての接
続に不良ないし信頼性などの問題が認められなかった。
Then, ordinary etching resist ink is screen-printed on both surfaces of the copper foil 3 of the double-sided copper-clad laminate for a multilayer printed wiring board to mask the conductor pattern portion, and then cupric chloride is used as an etching solution. After the etching treatment, the resist mask was peeled off to obtain a multilayer printed wiring board. When the thus-produced multilayer printed wiring board was subjected to an electrical check which is usually carried out, no problems such as defects or reliability were found in all the connections.

【0029】なお、本発明は上記実施例に限定されるも
のでなく、発明の趣旨を逸脱しない範囲でいろいろの変
形を採り得る。たとえば、上記では導電性バンプをへき
ん粒径 2μm の銀粉末70重量部とポリサルホン樹脂粉末
30重量部との混合系で形成したが、この組成比は、たと
えば銀粉末40〜90重量部とポリサルホン樹脂粉末60〜10
重量部の範囲で選ぶことができ、ポリサルホン樹脂の代
わりにポリスチレン樹脂粉末などを用いることも可能で
ある。さらに、合成樹脂系シートとして、たとえばガラ
ス・エポキジ樹脂系のプリプレグなども使用し得る。
The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the invention. For example, in the above, 70 parts by weight of the conductive bumps and silver powder with a fen particle size of 2 μm and polysulfone resin powder are used.
Although it was formed in a mixed system with 30 parts by weight, the composition ratio is, for example, 40 to 90 parts by weight of silver powder and 60 to 10 parts of polysulfone resin powder.
It can be selected within the range of parts by weight, and polystyrene resin powder or the like can be used instead of the polysulfone resin. Further, as the synthetic resin sheet, for example, a glass / epoxy resin prepreg may be used.

【0030】[0030]

【発明の効果】上記説明から分かるように、本発明に係
る印刷配線板の製造方法よれば、配線パターン層間を接
続する導電性バンプ群を形設する工程、合成樹脂系シー
トを積層的に配置して熱プレスする工程、外層パターニ
ングする工程のごとく、製造工程数を、従来の製造方法
に比べ格段に少なく低減しながら、両面型印刷配線板な
いし多層型印刷配線板を容易に製造することが可能とな
る。特に工程の繰り返しが多い多層型印刷配線板の製造
においては、大幅な工程数の低減となり、生産性ないし
量産性の向上に効果がある。そして、従来の多層型印刷
配線板などの製造工程で、必要不可欠であった穴明け工
程、メッキ工程が不要になることに伴い、製造工程で発
生する不良が大幅に抑えられ、歩留まりが向上するばか
りでなく、信頼性の高い印刷配線板が得られることにな
る。また、製造される印刷配線板は、層間接続用の穴が
表面に存在しないので、配線密度の格段な向上を図り得
るし、電子部品の実装用エリアも、穴の位置に関係なく
設定し得ることになり、実装密度も格段に向上し、ひい
ては実装電子部品間の距離を短縮できるので、回路の性
能向上をも図り得る。つまり、本発明は、印刷配線板の
低コス化に寄与するだけでなく、実装回路装置のコンパ
クト化や、高性能化などにも大きく寄与するものといえ
る。
As can be seen from the above description, according to the method for manufacturing a printed wiring board of the present invention, the step of forming the conductive bump group for connecting the wiring pattern layers and the synthetic resin sheet are laminated. In this way, it is possible to easily manufacture a double-sided printed wiring board or a multi-layered printed wiring board while reducing the number of manufacturing steps, such as the step of hot pressing and the step of patterning the outer layer, as compared with the conventional manufacturing method. It will be possible. Particularly in the production of a multilayer printed wiring board in which many steps are repeated, the number of steps is significantly reduced, which is effective in improving productivity or mass productivity. Further, in the manufacturing process of the conventional multilayer printed wiring board and the like, since the drilling process and the plating process, which are indispensable, are no longer necessary, the defects occurring in the manufacturing process are significantly suppressed, and the yield is improved. Not only that, a highly reliable printed wiring board can be obtained. Further, since the printed wiring board manufactured does not have holes for interlayer connection on the surface, the wiring density can be significantly improved, and the mounting area for electronic components can be set regardless of the positions of the holes. As a result, the packaging density can be remarkably improved, and the distance between the mounted electronic components can be shortened, so that the circuit performance can be improved. That is, it can be said that the present invention not only contributes to the reduction of the cost of the printed wiring board, but also contributes to the downsizing of the mounted circuit device and the high performance thereof.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施態様例を模式的に示すもので、
(a)は導電性バンプ群を支持基体面に形成するときの状
態を示す断面図、 (b)は導電性バンプを支持基材面に被
着形成した状態を示す断面図、 (c)は支持基材面の導電
性バンプ先端を積層配置した合成樹脂系シート層を貫通
一体化させた状態を示す断面図。
FIG. 1 schematically shows an embodiment of the present invention,
(a) is a cross-sectional view showing a state in which a conductive bump group is formed on a supporting substrate surface, (b) is a cross-sectional view showing a state in which conductive bumps are adhered and formed on a supporting substrate surface, (c) is FIG. 4 is a cross-sectional view showing a state in which synthetic resin sheet layers in which tips of conductive bumps on the surface of a supporting base material are laminated and arranged are integrated.

【図2】本発明の他の実施態様例を模式的に示すもの
で、 (a)は導電性バンプを被着形成した支持基材面に合
成樹脂系シートおよび銅箔を積層配置する状態を示す断
面図、 (b)は導電性バンプ先端部が合成樹脂系シート層
を貫通し銅箔に電気的に接続一体化させた状態を示す断
面図型、 (c)は両面をパターニングした状態を示す断面
図。
FIG. 2 schematically shows another embodiment of the present invention, in which (a) shows a state in which a synthetic resin sheet and a copper foil are laminated and arranged on the surface of a supporting substrate on which conductive bumps are formed. A sectional view showing the state, (b) is a sectional view showing a state in which the tip of the conductive bump penetrates the synthetic resin sheet layer and is electrically connected and integrated with the copper foil, and (c) shows a state in which both surfaces are patterned. Sectional drawing to show.

【図3】本発明のさらに他の実施態様例を模式的に示す
もので、 (a)は両面型印刷配線板の両面に合成樹脂系シ
ートを介して導電性バンプを被着形成した銅箔を積層配
置する状態を示す断面図、 (b)は導電性バンプ先端部が
合成樹脂系シート層を貫通し銅箔に電気的に接続一体化
させた状態を示す断面図。
FIG. 3 schematically shows still another embodiment of the present invention, in which (a) is a copper foil having conductive bumps formed on both sides of a double-sided printed wiring board via synthetic resin sheets. FIG. 3B is a cross-sectional view showing a state of stacking and arranging, and FIG. 6B is a cross-sectional view showing a state where the tip end portion of the conductive bump penetrates the synthetic resin sheet layer and is electrically connected and integrated with the copper foil.

【符号の説明】[Explanation of symbols]

1……加熱装置付きシリンダー 1a……シリン部
1b……貫通孔(押出し口) 2……支持台
3,3′……支持基材(銅箔など) 3a,3a′…
…配線パターン 4……溶融させた導電性体
5……導電性バンプ 5′……配線接続部 6
……合成樹脂系シート 7……両面型配線板
8……多層印刷配線板用両面銅張り積層板
1 …… Cylinder with heating device 1a …… Silin part
1b …… Through hole (extrusion port) 2 …… Support base
3, 3 '... Supporting substrate (copper foil, etc.) 3a, 3a' ...
… Wiring pattern 4… Melted conductive material
5 ... Conductive bump 5 '... Wiring connection part 6
…… Synthetic resin sheet 7 …… Double-sided wiring board
8: Double-sided copper-clad laminate for multilayer printed wiring boards

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 シート状もしくは板状の支持基材の所定
領域面に、溶融させた導電性体を押出しもしくは滴下し
た後固化させて、突起状の導電性バンプ群を形成する工
程と、 前記突起状の導電性バンプ群を形成した面に、合成樹脂
系シートを重ね合わせ積層体化する工程と、 前記積層体を加圧して突起状の導電性バンプ群の先端部
を合成樹脂系シートの厚さ方向に貫通させる工程とを具
備して成ることを特徴とする印刷配線板の製造方法。
1. A step of forming a projecting conductive bump group by extruding or dropping a melted conductive material on a predetermined area surface of a sheet-shaped or plate-shaped support base material and then solidifying the conductive material, A step of stacking a synthetic resin sheet on the surface on which the projecting conductive bump group is formed to form a laminated body, and pressing the laminated body to attach the tip of the projecting conductive bump group to the synthetic resin sheet. And a step of penetrating in the thickness direction.
【請求項2】 シート状もしくは板状の支持基材の所定
領域面に、溶融させた導電性体を押出しもしくは滴下し
た後固化させて、突起状の導電性バンプ群を形成する工
程と、 前記突起状の導電性バンプ群を形成した面に、合成樹脂
系シートおよび導電性金属層を順次重ね合わせ積層体化
する工程と、 前記積層体を加圧して突起状の導電性バンプ群の先端部
を合成樹脂系シートの厚さ方向に貫通させ、導電性金属
層に接続する工程とを具備して成ることを特徴とする印
刷配線板の製造方法。
2. A step of forming a projecting conductive bump group by extruding or dropping a melted conductive material on a predetermined region surface of a sheet-shaped or plate-shaped supporting base material and then solidifying the conductive material, A step of sequentially stacking a synthetic resin sheet and a conductive metal layer on the surface on which the protruding conductive bump group is formed to form a laminated body, and pressing the laminated body to provide a tip portion of the protruding conductive bump group. A step of penetrating in the thickness direction of the synthetic resin sheet and connecting the sheet to the conductive metal layer.
【請求項3】 シート状もしくは板状の支持基材の所定
領域面に、溶融させた導電性体を押出しもしくは滴下し
た後固化させて、突起状の導電性バンプ群を形成する工
程と、 前記突起状の導電性バンプ群を形成した面に、合成樹脂
系シートおよび導電性金属層を順次重ね合わせ積層体化
する工程と、 前記積層体を加圧して突起状の導電性バンプ群の先端部
を合成樹脂系シートの厚さ方向に貫通させ、導電性金属
層に接続する工程と、 前記導電性金属層を配線パターニングする工程とを具備
して成ることを特徴とする印刷配線板の製造方法。
3. A step of forming a projecting conductive bump group by extruding or dropping a melted conductive material on a predetermined area surface of a sheet-shaped or plate-shaped support base material and then solidifying the conductive material, A step of sequentially stacking a synthetic resin sheet and a conductive metal layer on the surface on which the protruding conductive bump group is formed to form a laminated body, and pressing the laminated body to provide a tip portion of the protruding conductive bump group. A method of manufacturing a printed wiring board, comprising: a step of penetrating in the thickness direction of the synthetic resin sheet and connecting to the conductive metal layer; and a step of patterning the wiring of the conductive metal layer. .
JP25348594A 1994-10-19 1994-10-19 Printed wiring board and method for producing printed wiring board manufacturing member Expired - Fee Related JP3609126B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25348594A JP3609126B2 (en) 1994-10-19 1994-10-19 Printed wiring board and method for producing printed wiring board manufacturing member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25348594A JP3609126B2 (en) 1994-10-19 1994-10-19 Printed wiring board and method for producing printed wiring board manufacturing member

Publications (2)

Publication Number Publication Date
JPH08125331A true JPH08125331A (en) 1996-05-17
JP3609126B2 JP3609126B2 (en) 2005-01-12

Family

ID=17252043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25348594A Expired - Fee Related JP3609126B2 (en) 1994-10-19 1994-10-19 Printed wiring board and method for producing printed wiring board manufacturing member

Country Status (1)

Country Link
JP (1) JP3609126B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1051136A (en) * 1996-05-28 1998-02-20 Mitsui Petrochem Ind Ltd Manufacture of printed-wiring board
JP2002076621A (en) * 2000-08-31 2002-03-15 Elna Co Ltd Multilayer circuit board and its manufacturing method
WO2004059729A1 (en) * 2002-12-24 2004-07-15 Tdk Corporation Electronic part manufacturing method and electronic part
JP2005236231A (en) * 2004-02-23 2005-09-02 Clover Denshi Kogyo Kk Laminated wiring board
JP2007012961A (en) * 2005-07-01 2007-01-18 Ngk Spark Plug Co Ltd Wiring board
JP2010228104A (en) * 2009-03-25 2010-10-14 Denso Corp Filling device of conductive material and filling method using the same
JP2012028462A (en) * 2010-07-21 2012-02-09 Fujikura Ltd Wiring board manufacturing method
JP2012028461A (en) * 2010-07-21 2012-02-09 Fujikura Ltd Wiring board and method for manufacturing the same

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1051136A (en) * 1996-05-28 1998-02-20 Mitsui Petrochem Ind Ltd Manufacture of printed-wiring board
JP2002076621A (en) * 2000-08-31 2002-03-15 Elna Co Ltd Multilayer circuit board and its manufacturing method
KR100699377B1 (en) * 2002-12-24 2007-03-28 티디케이가부시기가이샤 Electronic part manufacturing method
JP2004207320A (en) * 2002-12-24 2004-07-22 Tdk Corp Electronic part and method for manufacturing the same
WO2004059729A1 (en) * 2002-12-24 2004-07-15 Tdk Corporation Electronic part manufacturing method and electronic part
US7237331B2 (en) 2002-12-24 2007-07-03 Tdk Corporation Electronic part manufacturing method and electronic part
CN100414689C (en) * 2002-12-24 2008-08-27 Tdk株式会社 Electronic part manufacturing method and electronic part
JP2005236231A (en) * 2004-02-23 2005-09-02 Clover Denshi Kogyo Kk Laminated wiring board
JP4497952B2 (en) * 2004-02-23 2010-07-07 クローバー電子工業株式会社 Multilayer wiring board
JP2007012961A (en) * 2005-07-01 2007-01-18 Ngk Spark Plug Co Ltd Wiring board
JP2010228104A (en) * 2009-03-25 2010-10-14 Denso Corp Filling device of conductive material and filling method using the same
JP2012028462A (en) * 2010-07-21 2012-02-09 Fujikura Ltd Wiring board manufacturing method
JP2012028461A (en) * 2010-07-21 2012-02-09 Fujikura Ltd Wiring board and method for manufacturing the same

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