JPH08122411A - Test method for semiconductor device - Google Patents

Abstract

PURPOSE: To save manpower in test process by providing history information in addition to information stored in a memory thereby establishing a method for managing data applicable to a test schedule. CONSTITUTION: A master data base 12 is retrieved based on a lot number being inputted and a type lot thus determining measurable facility types entirely. History of a facility, for which the process is measured, is read in from a type master data 13 and registered 14 and the facility names, corresponding to all possible facility types, are determined from a facility machine data base 15. Subsequently, the number of measurements for the same package(PKG) of an objective facility and the number of types same as the number of facilities to be started, corresponding to all facilities in a facility schedule data group 18, are extracted and registered 17, 19, 20. The registered number of times 14-20 are then employed as keys for rearranging them in descending order and for ordering each item of four types of head facilities thus starting a facility having lowest sum of order number. This method provides a best schedule for accumulating the load automatically thus saving manpower.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device testing method. In recent years, semiconductor devices have tended to be of large variety and small volume, and users are demanding shorter delivery times. For this reason, we mainly deal with only improving the test equipment.However, even in this case, there is a large number of man-hours such as setting test data of the test equipment in the test process, which reduces the operating rate of the test equipment. It is desired to improve the test method corresponding to.

[0002]

2. Description of the Related Art In the conventional test method, there are many types of semiconductor device packages, and there are many manual processes such as setting test data of the test device, switching the product type, and supplying the semiconductor device to the test device. As a means for solving these problems, a test management system as shown in FIG. 4 has been introduced.

FIG. 4 is a block diagram of a conventional test apparatus. In FIG. 4 (A), 1 is a DUT, which is a semiconductor device or wafer, 2 is a test instrument, which is a tray (container) or carrier that holds the DUT, 3 is a tester, which is a prober (or handler), and 4 is a controller. , 5 is a line controller, 7 is an IC tester, and 8 is a tester emulator.

In the figure, a device under test 1 is stored in lots in a carrier device 2, a management number of the carrier device is input to a storage device of a host computer, and test recipe data (for each model number) corresponding to a semiconductor device is stored. It includes information on test conditions, equipment conditions, lot information, measurement boards, product types, etc.)
Is read from the storage device of the host computer that is registered in advance, the automatic load pile plan is executed from the test recipe data, and the best equipment in each process is automatically planned in process line units.

The line controller 5 provided for each line of the test process (line for wafer prober test, final test, visual inspection, etc.) reads the test recipe data registered in advance in the storage device. In addition, the transfer equipment is called into the test equipment (combination of controller 4, IC tester 7, prober or handler 3), and the test recipe data corresponding to the semiconductor device housed in the called transfer equipment is transferred to the line controller. Then, the test program is set by the tester emulator 8 according to the sent test recipe data, and the controller 4 executes the test condition setting, judgment, yield monitoring, and test data collection to create the test result data. are doing.

Here, the tester emulator 8 attached to the IC tester 7 is mainly used for editing the test program, setting the condition of the test program, tester control, etc., but responds quickly to changes in the test specifications. Used for.

FIG. 4 (B) is an interconnection diagram of the line controller 5, the controller 4, the IC tester 3, and the tester emulator 8. The symbols drawn along the lines connecting the respective parts indicate the interfaces.

[0008] The test planning method using such a conventional test management system determines whether or not measurement is possible from equipment information, and if measurement is possible, as described above, the number of operations is made uniform for each line of process. It was allocating lots.

[0009]

However, since the conventional test management system does not recognize the same type or the same package of the semiconductor device, the automation of test data setting, product type switching, etc. of the test device of the next lot is automated. Is not taken into account and these are done manually,
Manual work is not reduced.

Further, since the equipment scheduling (utilization plan) is also performed on a line-by-line basis, the current method has only a guidance role, and the equipment allocation cannot be automatically determined in real time.

In order to solve the above-mentioned drawbacks, the present invention establishes a data management method applied to a test plan out of the test information inside the computer system which manages the test process, and aims at labor saving and automation of the test process. The purpose is to

[0012]

[Means for Solving the Problems] 1) A test recipe including information such as test conditions for each model in a line controller connected to a host computer and provided for each test process line. Data and history information of each test facility are read from the host computer, the DUT is called into the test facility, and the test recipe data and the history information corresponding to the called DUT are stored in a controller attached to each test facility. A method of testing a semiconductor device which sends out and controls the test equipment according to the test recipe data and history information corresponding to the DUT by the controller, or 2) the history information is the number of measurements of each test device or the same package All or part of the number of measurements or the number of measurements of the same model or the number of work in process 1) The semiconductor device test method described in 1 above, or 3) The semiconductor device test method described in 1 above, in which the order of using the test equipment is determined based on the history information, or 4) The order of use of the test equipment is This is achieved by the semiconductor device testing method according to the above item 1, in which the same package is measured in the descending order of the number of measurements, or the same type is in the descending order of the measurements.

[0013]

In the present invention, the storage device (host computer)
By adding the historical information (number of times of equipment measurement, number of times of semiconductor device type classification, number of measurements by package (PKG), etc.) to the conventional information (equipment status, lot information, etc.) Improved the automatic load pile plan,
The equipment can be assigned in real time.
Therefore, man-hours are reduced and automation can be achieved.

In the present invention, the following history data shown in the test plan data of FIG. 1 is added to the storage device. (1) Model name master data: The history of which equipment was used to measure the process of the model to be measured is managed. (2) Measurement equipment history work file: A file arranged in descending order of the number of measurements of the relevant equipment from the model master data. (3) Equipment data: Manages history information of each equipment. (4) PKG measurement frequency work file: This file is arranged in descending order of the PKG measurement frequency of the equipment from the equipment data. (5) Work file of the same model number: This file is a file in which the same model number is extracted from the equipment data in the in-process lot and arranged in descending order of model number. (6) Work in progress work file: This is a file in which the number of work in progress of the target equipment is extracted from the equipment data and arranged in ascending order of the number of work in progress.

By adding the above-mentioned history information, for example, if the same model is continuously measured, the setup time of the test apparatus can be shortened and the operating rate of the test apparatus is improved. Also,
Conventionally, we had a plan to use equipment for each process line,
Scheduling on a facility-by-equipment basis on the basis of the above-mentioned history information makes it possible to clarify the in-process status of equipment and reduce the man-hours for scheduling.

[0016]

EXAMPLES Examples will be described below with reference to FIGS. 1 and 2. FIG. 1 is a data configuration diagram of the test planning method, the frame is a history information according to the present invention, and FIG. 2 is a flowchart of the test method, which will be described in this order. (1) First, enter the lot number (EDP NO) and model number on the keyboard (KB) 11 and from the lot, enter the model number master database.
(DB) [Process Information] 12 is searched to find all measurable equipment types.

The history of the equipment whose process is measured is read from the model name master data 13 and registered in the measurement equipment history work file 14. (2) Obtain all equipment names that correspond to all available equipment types from the equipment database 15. Also, the number of times the same PKG of the target equipment was measured is extracted from the equipment data 16 and registered in the PKG measurement number work file 17. (3) The number of work in process of the target equipment is extracted from the equipment plan data 16 corresponding to all the equipment of the equipment plan data group 18, and registered in the work in progress work file 19. (4) The same model number is extracted from the facility plan data 16 corresponding to all the facilities of the facility plan data group 18, and registered in the same model number work file 20. (5) Using the number of times the equipment is measured in the measurement equipment history work file 14 as a key, sort in descending order of the number of times. (6) PKG measurement count Use the PKG measurement count of the work file 17 as a key to sort in descending order. (7) Number of work in progress Using the number of work in process work file 19 as a key, sort the work in ascending order. (8) Sort with the same type number of the same type number work file 20 as the key, in descending order. (9) In the items (5) to (8) above, determine the rank of each of the four types of equipment that was the first, and set the equipment with the smallest total number of ranks. In this case, if you want to give priority to each item, multiply by a coefficient. (10) When the same model is installed in the installed equipment, the model data is preferentially sorted. This enables continuous measurement and shortens equipment setup time.

Further, when the same type is not set in the installed equipment, the priority order is rearranged in units of the same type. Next, the system configuration of the present invention will be described with reference to FIG.

In FIG. 3, the semiconductor device to be tested 1 is stored in lots in the transport device 2, and the management number and history information of this transport device are input to the storage device of the host computer to obtain test recipe data corresponding to the semiconductor device. (The test conditions for each model, equipment conditions, lot information, measurement board, product type, etc. are included) and history information is read from the pre-registered storage device of the host computer, and the test recipe data and history are read. The automatic load pile plan is executed from the information, and the best equipment in each process is automatically planned.

Test recipe data and history information registered in advance in the storage device are read into the line controller 5. In addition, the transport equipment is called into the test equipment (controller 4, test device 3 [handler (IC tester), etc.), and the test recipe data and history information corresponding to the semiconductor device housed in the called transport equipment are written in the above-mentioned information. The controller 4 executes device selection, test program setting, test condition setting, judgment, yield monitoring, test data collection, etc. according to the sent test recipe data and history information. ， Create test record data.

If the system of the present invention is provided with a centralized monitoring control function for each process line, centralized monitoring and centralized control can be performed for each process line.

[0022]

According to the present invention, (1) by improving the storage device of the host computer, the equipment conditions of the embodiment (equipment type, equipment limited machine, board, product type information, settable temperature, equipment online / offline) (State, etc.) and lot information (procedure classification, lot classification, planned shipping date, etc.), as well as history information (equipment measurement count, same model number, PKG measurement number, etc.), the best automatic A load pile plan can be obtained, the number of man-hours required by the conventional method can be reduced, and automation and labor saving can be achieved. (2) By changing the equipment sequence planning method for each process line based on the conventional lot information to the equipment order planning method for each equipment, the lot work status of the equipment is clarified and the man-hours for man-hours for equipment scheduling are clarified. Reduce. (3) Centralized monitoring is possible for each line.

[Brief description of drawings]

FIG. 1 is a data configuration diagram of a test planning method of the present invention.

FIG. 2 Flow chart of test method

FIG. 3 is a configuration diagram of a test system of the present invention.

FIG. 4 is a block diagram of a conventional test system

[Explanation of symbols]

1 DUT 2 Tray (container) for storing DUT with test equipment
Or carrier 3 Test equipment (handler and IC test equipment, burn-in equipment, visual inspection equipment, packaging equipment, etc.) 4 Controller 5 Line controller 11 Keyboard 12 Model number master database 13 Model number master data 14 Measurement facility history work file 15 Facility device database 16 Equipment data 17 PKG measurement count work file 18 Equipment planning data group 19 Work in progress work file 20 Isomorphic work file

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Claims (4)

[Claims] 1. A line controller connected to a host computer and provided for each test process line, wherein test recipe data including information such as test conditions for each model and history information of each test facility are sent from the host computer. Read and call the device under test to the test equipment and send the test recipe data and the history information corresponding to the called device under test to the controller attached to each test equipment, and the controller responds to the device under test. A method for testing a semiconductor device, characterized in that the test equipment is controlled according to the test recipe data and the history information. 2. The history information includes all or a part of the number of measurements of each test device, the number of measurements of the same package, the number of measurements of the same model, or the number of work-in-progress. Semiconductor device testing method. 3. The method of testing a semiconductor device according to claim 1, wherein the use order of the test equipment is determined based on the history information. 4. The use order of the test equipment is an order in which the number of measurements of the same package is large, an order in which the number of measurements of the same type is large, or a number of in-process is small. Semiconductor device testing method.