JPH08119789A - Single crystal pull device - Google Patents

Abstract

PURPOSE: To provide a device capable of pulling up a single crystal in high accuracy and also of safely drawing a pulled single crystal at a position apart from the pull position. CONSTITUTION: In this single crystal pull device equipped with a pull chamber 8 in mobile fashion on a melting chamber 1 holding a crucible 3 inside and a pull means on the upper part of the pull chamber 8 so as to pull up a single crystal 19 via a wire 14 into the pull chamber 8, the pull means is placed on a mobile pull head-mounting table 10 and the pull chamber 8 is suspended from the table 10. Therefore, while the single crystal is being pulled up, the upper part of the pull chamber 8 runs afloat and the mechanical vibrations of the pull means are not transmitted to the pull chamber 8, thus enabling the single crystal 19 to be pulled up in high accuracy. Besides, as the single crystal 19 can be drawn out at a position apart from the pull, position, the drawing operation can be done safely.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a single crystal pulling apparatus for producing a single crystal such as a semiconductor.

[0002]

2. Description of the Related Art Conventionally, as a single crystal pulling apparatus of this type,
Japanese Utility Model Publication No. 4-44624 and Japanese Patent Laid-Open No. 4-26068.
The one described in Japanese Patent No. 6 is known. Fairness 4-4
According to Japanese Patent No. 4624, a pulling chamber for holding a single crystal pulled up from the melting crucible is provided above a main chamber in which the melting crucible is placed, and the pulling chamber is connected to the pulling chamber so as to be separable from the pulling chamber. And has an upper rotation mechanism part that is positioned and fixed at the pulling position by a centering fixed base that is provided independently of the pulling device. The seed crystal is attached to the lower end of the work wire, and the pulling wire is wound while the pulling wire is rotated by the upper rotating mechanism to pull up the single crystal grown around the seed crystal.

In Japanese Patent Laid-Open No. 4-260686, a single crystal is provided with a winding device for pulling the single crystal through a wire above a pull chamber connected to an upper part of a main chamber through an isolation valve. In the pulling device, a gate-shaped frame independent of the main chamber and the pull chamber is provided, and an upper winding device is attached to this frame, and the upper winding device and the pull chamber are connected by a flexible expansion joint. Has become.

[0004]

However, in the single crystal pulling apparatus of the former publication, since the upper rotating mechanism is fixed by the centering fixing base at the pulling position, the weight of the single crystal that has been pulled is supported. However, when the pulling chamber is swung, the pulling chamber and the upper rotating mechanism cannot be moved up and down because the pulling chamber and the upper rotating mechanism are mounted on the pulling chamber and follow each other. Therefore, when taking out the single crystal that has been pulled by the above apparatus, it is necessary to open the door of the pulling chamber at the pulling position to take out the single crystal, and the work of taking out the single crystal that is a heavy object is complicated and high. Since this is a manual work, there is a problem that the work is dangerous. Moreover, in the single crystal pulling device of the latter publication, since the winding device is fixed to the upper portion of the gate-shaped frame,
It is necessary to take out the single crystal that has been pulled at the pulling position. Therefore, similar to the device disclosed in the former publication, there are problems that the work of taking out is complicated and the work is dangerous.
The present invention has been made in order to improve such conventional problems, and the pull head and pull chamber can be accurately positioned at the single crystal pulling position, and after pulling the single crystal, the single crystal can be safely moved at a position apart from the pulling position. It is an object of the present invention to provide a single crystal pulling apparatus that can be taken out.

[0005]

SUMMARY OF THE INVENTION To achieve the above object, the present invention provides a melting chamber containing a crucible, which comprises:
In a single crystal pulling device in which a pull chamber is movably provided, and a pulling means for pulling a single crystal into the pull chamber via a wire is provided above the pull chamber, the pulling means is provided on a movable pull head mounting base. , The pull chamber is suspended on the pull head mount. Further, the pull chamber suspending means is configured to hold the upper part of the pull chamber in a floating state when pulling the single crystal, and the horizontal moving means for horizontally moving the pull head mount has a radius of the pull head and the pull chamber with respect to the melting chamber. Radial positioning means for positioning in the direction and rotational direction positioning means for positioning in the rotational direction are provided.

[0006]

[Operation] With the above configuration, after pulling the single crystal, the pull chamber can be taken out at a position different from the pulling position. Further, during the pulling of the single crystal, the upper portion of the pull chamber is in a floating state and is in a state of being mechanically separated from the pulling means, so that vibrations generated by the pulling means are not transmitted to the pull chamber, The pulling center of the dissolution chamber and the pulling center of the pull head and the pull chamber can be accurately aligned with each other by the radial positioning means and the rotation direction positioning means.

[0007]

[Embodiment] A first embodiment of the present invention is shown in FIGS.
Will be described in detail with reference to the drawings. 1 is a front view of the single crystal pulling apparatus, FIG. 2 is a side view thereof, FIG. 3 is a plan view thereof, FIG. 4 is a cross-sectional view of a rotation direction positioning means, and FIG. 5 is a cross section taken along line XX of FIG. It is a figure. In these figures, 1 is a substrate 1a
The upper surface of one melting chamber installed above is opened, and the lid 2 can be capped with this opening. A crucible 3 for melting a crystalline material is housed in the melting chamber 1, and a column 4 is provided upright on the substrate 1a behind the melting chamber 1 as shown in FIG. A swivel shaft 6 for rotatably supporting the pull chamber parallel moving means 5 is erected on the upper side. The pull chamber parallel moving means 5 has a supporting cylinder 5a which is supported by a rotating shaft 6 so as to be pivotable and vertically slidable. The supporting cylinder 5a is a hydraulic cylinder or an air cylinder installed in the support column 4. The pull chamber up-and-down drive source 7 is used to move up and down along the swivel axis 6.

Further, the pull chamber parallel moving means 5 is
It has a pair of four-bar parallel links 5b and 5c which are parallel to each other, and one ends of these four-bar parallel links 5b and 5c are pivotally attached to the upper and lower outer peripheries of the support cylinder 5a via pins 5d. Together with four-section parallel links 5b, 5
The other end of c is pivotally attached to the vertical surface of the pull head mount 10 via pins 5e. As shown in FIG. 1, the pull head mount 10 has a plurality of hanging holes 10
a, the upper openings of the suspension holes 10a are tapered as shown in FIG. 6, and the suspension pins 11 are inserted into the suspension holes 10a from above. The upper end of the suspension pin 11 has a tapered portion 1 that matches the tapered portion 10b of the suspension hole 10a.
A head portion 11a having 1b is provided, and lower ends of the hanging pins 11 are connected to an upper end of a pull chamber 8 having a cylindrical shape so that the length of each pin can be adjusted. The pull chamber 8 is hung from the pull head mount 10 by 11.

On the pull head mount 10, a wire winding means 12 for winding a wire 14 for pulling the single crystal 19 and a rotation driving means 13 for rotating the wire winding means 12 about a pulling center O are provided. Is provided. The wire winding means 12 is an endless belt 12b driven by a rotary drive source 12a such as a motor with a speed reducer.
Having a winding drum 12c rotated through
The wire 14 is wound by the winding drum 12c, and the lower end of the wire 14 is provided with a seed chuck 14a for mounting a seed crystal. The rotation driving means 13 for rotating the wire winding means 12 has a rotation driving source 13c for rotating and driving the rotary substrate 13a on which the wire winding means 12 is mounted via the endless belt 13b, and the inside of the pull chamber 8 In order to maintain the airtightness of the pull chamber 8, the upper part of the pull chamber 8 and the rotation driving means 13 are connected via an expansion tube 8a such as a bellows, and the wire 14 is hung through the expansion tube 8a into the pull chamber 8. It has become so.

On the other hand, at the opening of the lid body 2, the gate valve 1
5 is provided so that the gate valve 15 and the pull chamber 8 can be detachably connected to each other. By opening and closing the gate valve 15, the dissolution chamber 1 and the pull chamber 8 can be communicated with each other or can be shut off. Has become. Further, the pull chamber parallel moving means 5 is provided with a radial direction positioning means 20 for positioning so that the pulling center of the single crystal 19 and the pulling center of the crucible 3 coincide with each other, and a rotational direction positioning means 21. The radius positioning means 20 is formed of, for example, a turnbuckle 20a, and is interposed between the base end of the upper 4-node link 5b and the tip of the lower 4-node parallel link 5c. By rotating, the melting chamber 1
The pull head and pull chamber 8 can be moved and adjusted in the radial direction.

The rotation direction positioning means 21 is
A fine adjustment ring 21a is provided between the upper end of the column 4 and the lower part of the support cylinder 5a, and as shown in FIGS. 4 and 5, a fine adjustment ring 21a is rotatably provided under the support cylinder 5a. The support cylinder 5a has a pair of elongated holes 21b at positions facing each other with the center interposed.
A member 21f formed with is attached to these long holes 2
By loosening the fixing bolt 21c inserted through 1b, it is possible to adjust the rotation with respect to the support cylinder 5a, and a plurality of positioning pins 21d having a tapered upper end are planted on the upper surface of the column 4. The pull head and the pull chamber 8 can be positioned in the rotational direction by fitting the positioning pin 21d into the pin hole 21e formed at the lower end of the fine adjustment ring 21a.

Next, the operation of the single crystal pulling apparatus configured as described above will be described. When pulling up the single crystal 19, first, the crystalline material to be melted is put into the crucible 3. At this time, the lid 2 is swung about the swivel shaft 2a with the gate valve 15 connected to the upper part thereof. Retreat to the retreat position B of. Further, the pull chamber 8 is swung about the swivel axis 6,
The pull chamber 8 is evacuated to the evacuated position A indicated by the phantom line in FIG. 3, and the pull chamber 8 is suspended from the pull head mount 10 via the suspension pins 11 (see (b) of FIG. 6). When the material is completely stored, the lid 2 at the retracted position B is swung to set it on the melting chamber 1, and then the pull chamber 8 at the retracted position A is swung to connect with the gate valve 15. As a result, the pull chamber 8 is set on the melting chamber 1 via the gate valve 15, and at this time, the head 11a of the hanging pin 11 is moved upward by h from the pull head mount 10 as shown in FIG. Since it is in a floating state, vibrations generated by the wire winding means 12 and the rotation driving means 13 during pulling up are not transmitted to the pull chamber 8 side.

Next, the gate valve 15 is opened to bring the melting chamber 1 and the pull chamber 8 into a vacuum state, and the crucible 3
When the material inside is melted by heating means (not shown), the seed crystal suspended in the pull chamber 8 by the wire 14 is immersed in the melt in the crucible 3, and the seed crystal is rotated by the rotation driving means 13. Meanwhile, the wire 14 is wound by the wire winding means 12. As a result, the single crystal 19 grows around the seed crystal. When the pulled single crystal 19 reaches a predetermined length, the gate valve 15 is first closed to shut off the gap between the melting chamber 1 and the pull chamber 8 to keep the vacuum state in the melting chamber 1 in this state. The pull chamber parallel moving means 5 is lifted by the vertical drive source 7 to disconnect the pull chamber 8 from the gate valve 15, and then the pull chamber 8 is swung in the direction of single crystal extraction position A shown in FIG. As a result, the single crystal 19 can be safely taken out at a position apart from the pulling position.

On the other hand, when pulling the single crystal 19, it is necessary to match the pulling center and the center of the crucible 3, but this can be easily and accurately performed by the radial positioning means 20 and the rotation direction positioning means 21. That is, when the pulling center of the single crystal 19 is displaced in the radial direction of the crucible 3 with respect to the pulling center of the crucible 3, the turnbuckle 20a of the radial positioning means 20 is rotated to move the pull head mount 10 horizontally. It is moved and adjusted so that the center of the crucible 3 and the pulling center of the single crystal 19 coincide with each other.

When the pulling center of the single crystal 19 is deviated from the pulling center of the crucible 3 in the rotation direction of the pull chamber 8, first, the pull chamber vertical drive source 7 raises the support cylinder 5a of the pull chamber parallel moving means 5. Then, the positioning pin 21d is pulled out, and then the fixing bolt 2 in this state.
1c is loosened and the fine adjustment ring 21a is finely rotated in the direction in which there is no deviation. And if the misalignment can be corrected, the fixing bolt 2
By tightening 1c to fix the fine adjustment ring 21a, the pin hole 21d is then inserted into the positioning pin 21d, whereby the pull chamber 8 can be positioned in the rotational direction. When the pull chamber 8 is rotated and the center of the lower surface of the pull chamber 8 is displaced from the gate valve 15 when connected to the gate valve 15, the lock nut 11c of the suspension pin 11 is loosened to reduce the length of the suspension pin 11. Adjustment is made to correct the misalignment, and the lock nut 11c is tightened and fixed. The above is an embodiment in which the turning radius of the pull chamber 8 is fixed, but the pulling device of the turning radius variable type can also be implemented.

Next, the second embodiment will be described with reference to FIGS. 7, 8 and 9.
Will be described in detail. The same parts as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted. One end of a drive link 9a of the parallel movement drive means 9 is pivotally attached by a pin 9b to an intermediate portion of one of the four-section parallel links 5b and 5c of the pull chamber parallel movement means 5. The parallel movement drive means 9 has a guide member 9c protruding upward from the outer peripheral portion of the upper portion of the support cylinder 5a, and an elevating shaft 9d is slidably supported in the guide member 9c. There is. The elevating shaft 9d can be moved up and down by a parallel drive source 9e such as a hydraulic cylinder or an air cylinder attached to the outer periphery of the lower portion of the support cylinder 5a, and the other end of the drive link 9a is attached to the upper end of the elevating shaft 9d. It is pivotally attached and the lifting shaft 9d
The pull chamber 8 can be moved in the horizontal direction in the vertical state with the vertical movement.

As shown in FIG. 7, the radial direction positioning means 20 is a flange 20a which moves up and down along a rotation 6 by a vertical drive source 7 which is rotatable with respect to the support cylinder 5a provided below the support cylinder 5a. The adjusting bolt 20b is provided on the lower end of the adjusting bolt 20b, and the upper end of the adjusting bolt 20b is attached to the lower 4-section parallel link 5c
The pull head and pull chamber 8 can be moved and adjusted in the radial direction by contacting the base end of the above from below and rotating the adjusting bolt 20b.

Next, the operation when the turning radius of the pull chamber 8 is changed by the parallel movement driving means 9 will be described. When pulling of the single crystal 19 is completed in the same manner as in the above embodiment, the gate valve 15 is first closed. The melting chamber 1 and the pull chamber 8 are shut off by keeping the vacuum state in the melting chamber 1 maintained, and in this state, the pull chamber vertical drive source 7 raises the pull chamber parallel moving means 5 to move the pull chamber 8 from the gate valve 15. After separating, the elevating shaft 9d is raised by the parallel movement source 9e to separate the base end portion of the four-section parallel link 5c from the adjusting bolt 20b, and then, as shown in FIG.
While rotating the pull chamber 8 in the single crystal extraction position A direction shown in (1), the elevating shaft 9d is lowered by the parallel movement source 9e. As a result, the drive link 9a pivotally attached to the upper end of the lifting shaft 9d is also lowered, so that the four-section parallel link 5b,
5c is rotated in the horizontal direction, and the pull chamber 8 is moved to the single crystal extracting position C shown in FIG. 3 while maintaining the vertical state as shown in FIG. The pulling-up single crystal 19 is taken out at this position C. At this time, the pull chamber 8 is at a position (phantom line in FIG. 9) lower than the pulling position (solid line position in FIG. 9). ,
Preparatory work for cleaning and lifting after taking out can be performed easily and efficiently.

The operation of the rotational direction positioning means 21 provided in the second embodiment is the same as that of the first embodiment, and the description thereof will be omitted.

[0020]

As described above in detail, according to the present invention, when the pulling of the single crystal is completed, the pull chamber is moved to the single crystal taking-out position while the pull chamber is hung on the pull head mount, and the single crystal is taken out at the single crystal taking-out position. Since the crystal is taken out, a heavy single crystal can be taken out easily and safely as compared with the conventional one in which the single crystal is taken out at the pulling position. Further, since the upper part of the pull chamber is floated from the pull head mount when pulling the single crystal, vibrations generated by the wire winding means and the rotation driving means during pulling are not transmitted to the pull chamber. This makes it possible to pull up a single crystal with high accuracy without being affected by vibration, etc., and assembly errors and deformation of the pull chamber when the pull chambers are stacked on the melting chamber may be caused by the wire winding means and the rotation driving means. It does not affect the support. Further, since the radial positioning means and the rotation direction positioning means can easily and accurately adjust the deviation between the center of the crucible and the pulling center, the single crystal can be pulled with the crucible center and the pulling center always aligned. It is possible to obtain a single crystal with stable quality.

[Brief description of drawings]

FIG. 1 is a front view of a single crystal pulling apparatus according to a first embodiment of the present invention.

FIG. 2 is a side view of the single crystal pulling apparatus according to the first embodiment of the present invention.

FIG. 3 is a plan view of a single crystal pulling apparatus according to the first embodiment of the present invention.

FIG. 4 is a cross-sectional view of rotation direction positioning means provided in the single crystal pulling apparatus according to the first embodiment of the present invention.

5 is a cross-sectional view taken along line XX of FIG.

6 (a) and 6 (b) are explanatory views of the operation of the pull chamber suspending means of the single crystal pulling apparatus according to the first embodiment of the present invention.

FIG. 7 is an explanatory view showing another embodiment of the radial direction positioning means provided in the single crystal pulling apparatus according to the first embodiment of the present invention.

FIG. 8 is a side view of the single crystal pulling apparatus according to the second embodiment of the present invention.

FIG. 9 is an operation explanatory view of the single crystal pulling apparatus according to the second embodiment of the present invention.

[Explanation of symbols]

1 ... Melting chamber, 3 ... Crucible, 8 ... Pull chamber, 1
0 ... Pull head mount, 14 ... Wire, 19 ... Single crystal, 20 ... Radial positioning means, 21 ... Rotation direction positioning means.

Claims (6)

[Claims] 1. A pulling chamber (8) is movably provided on a melting chamber (1) in which a crucible (3) is housed, and a pulling unit (12) for pulling a single crystal (19) into the pull chamber (8) via a wire (14) above the pull chamber (8). In the apparatus for pulling a single crystal, the pulling means is provided on a movable pull head mount 10, and the pull chamber 8 is provided.
A single crystal pulling apparatus, characterized in that the above is suspended on the pull head mount 10. 2. The single crystal pulling apparatus according to claim 1, wherein when pulling the single crystal, the pull chamber 8 is suspended on a pull head mount 10 by suspending means for holding the upper portion of the pull chamber 8 in a floating state. Single crystal pulling device. 3. The single crystal pulling apparatus according to claim 1, wherein the pull head mounting base 10 is provided with positioning means for the pull chamber 8 when the pull chamber 8 is moved. 4. A rotation direction positioning means 2 for positioning the dissolution chamber 1, the pull head, and the pull chamber 8 in the rotation direction with respect to the moving means for moving the pull head mount 10.
1 and radial positioning means 2 for performing radial positioning
The single crystal pulling apparatus according to claim 1, wherein 0 is provided. 5. The single crystal pulling apparatus according to claim 1 or 2, wherein the moving means for moving the pull head mount 10 in the horizontal direction is a turning system. 6. The single crystal pulling apparatus according to claim 1, wherein the moving means for turning the pull head mount 10 is provided with a turning radius varying means.