JP3528448B2 - Single crystal pulling method and apparatus - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a Czochralski method (CZ method) for pulling a single crystal and, more particularly, to an improvement for safely manufacturing a heavy single crystal with high quality.

[0002]

2. Description of the Related Art Conventionally, as a method for pulling and forming a single crystal from a crucible containing a melt of a semiconductor material such as silicon, the present applicant has first proposed a pulling improvement technique such as Japanese Patent Application No. 7-256892. Proposed. In the method of pulling a single crystal by this technique, as shown in FIG. 6, a seed crystal 52 hung on a hanging tool 51 is brought into contact with a raw material melt 53, and a lifting tool elevating mechanism 54 pulls up the seed crystal 52. Thus, in the manufacturing method in which the single crystal part 55 is grown, the slider 57 that can be moved up and down by the slider moving mechanism part 56 is used.
A holding case 58 rotatable around a vertical axis is attached to the upper part, and a lifting tool elevating mechanism 54 is provided in the holding case 58 so that the lifting tool 51 can be pulled up by a wire 60. The holding case 58 has a lower end engaging portion 61a, a lifting tool 61 that can open and close,
61 is attached, and the single crystal part 55 is pulled up by both the hanging tool 51 and the lifting tool 61.

That is, at the beginning, the seed crystal 52, which is initially held at a fixed position of the slider 57 and is hung by the hanger 51, is used as the raw material melt 53.
When the lifting tool 51 is pulled up by the lifting tool elevating mechanism section 54 while rotating the holding case 58, the unevenness section 63 is formed under the seed crystal 52, following the neck section 62, and subsequently, a single piece. The crystal part 55 is molded. Then, when the uneven portion 63 rises to a predetermined position, the lifting tools 61, 6
1 operates and the engaging portions 61a, 61a at the lower end are uneven portions 63.
After that, the slider moving mechanism 56 is operated and the slider 57 starts to move up.

At this time, the sum of the ascending speed of the slider 57 and the ascending speed of the sling 51 relative to the slider 57 is controlled to be the same as the ascending speed of the sling 51 alone. As a result, the rising speed of the slider 57 gradually increases, and the rising speed of the hanging tool 51 gradually decreases accordingly. Finally, the lifting speed of the lifting tool 51 becomes zero and the lifting tool 61, 61 is switched to the lifting speed only. By adopting such a pulling method, even if the diameter of the single crystal portion 55 is increased and the weight thereof is increased, the neck portion 62 is not damaged and the pulling can be performed safely and reliably. It is a thing.

[0005]

However, in the technique as described above, when holding the uneven portion 63 by the lifting jigs 61, 61, since the contact is made so as to be sandwiched from the lateral direction, a force in the lateral direction is applied to the single crystal. However, there is a problem in that the single crystal part 55 is swayed and is likely to cause dislocation. Moreover, when switching from the suspending tool 51 to the suspending tools 61, 61 and pulling up, if the load applied to the suspending tool 51 is relaxed to zero, the upper wire is slackened and the neck portion 62 is likely to be damaged.

Further, in the case where the conventional general single crystal pulling mechanism is one device, if the pulling detection distance of one pulling mechanism is measured, the measured value becomes the position of the hanging tool 51 and the pulling length of the single crystal. However, when the number of pulling mechanisms is two as in the above-mentioned technique, it is necessary to detect the pulling lengths of the two and add them together. There is also a problem that it is difficult to measure the pulling length, and an error is likely to occur in the calculated value based on these detected values. Furthermore, even when switching from lifting of the lifting tool 51 to lifting of the lifting tools 61, 61, since the lifting speed of the lifting tool 51 is changed for diameter control, the time until switching to the lifting tools 61, 61, etc. There was also a problem that the condition of was not stable.

From the above, the suspenders 61, 61
When it is held by, it can be held quietly without applying a force in the lateral direction, and the pulling means moves from the lifting tool 51 to the lifting tools 61, 61.
There has been a demand for a means capable of accurately obtaining the pulling length of a single crystal without the wire above the hanging tool 51 slackening even after shifting to (4).

[0008]

In order to solve the above-mentioned problems, the present invention provides , below a seed crystal suspended by a suspender,
A first neck portion, a convex portion, and a second neck portion are sequentially formed, and subsequently, a single crystal having a diameter-expanded portion and a straight body portion is grown, and at the same time, the second neck portion is pulled up by the suspending tool. The second lifting tool when the
Face the neck part in a non-contact proximity state, then move the single crystal and the lifting tool relative to each other in the vertical direction, and contact the protrusion so that it sits on top of the lifting tool, After holding, a part of the load applied to the hanger was transferred to the hanger, and subsequent lifting was performed by the hanger.

When the second neck portion is pulled up to the predetermined position in this manner, the periphery of the second neck portion is exposed in a non-contact state so as to be surrounded by a suspending tool, and then the upper portion of the second neck portion is covered. The convex portion located at is relatively lowered, and is contacted and held in the vertical direction so as to be placed on the hanging tool. Therefore, no force is applied to the single crystal from the lateral direction, and it becomes difficult for defects such as dislocation to occur. Further, at the time of this transition of pulling up, the slack of the wire is prevented by not transferring the entire load to the hanger and leaving a part of the load on the hanger.

Further, the convex portion and the second neck portion, so as to intentionally formed by controlling at least one of the melt temperature of the pulling speed or the crucible of the single crystal, the first neck portion and the convex portion The second neck portion is formed by automatically controlling at least one of the pulling rate of the single crystal and the melt temperature in the crucible so that the diameter of the second neck portion becomes a desired diameter.

Then, the convex portion continuing from the first neck portion is intentionally formed to have a size that can be placed on the suspension,
The second neck portion is intentionally formed to have a thickness that can withstand the weight of the pulled crystal and a diameter smaller than that of the convex portion. These can be formed by controlling both the pulling rate of the single crystal and the melt temperature in the crucible, or by controlling either one of them.

Further, by controlling the pulling rate V of the single crystal when switching pulling of the single crystal lifting jig from said hanging member so as to be constant, the rising speed of the lifting jig and Vb, for lifting jig When the relative ascending / descending speed of the lifting device is ± Va, the pulling speed V = Vb ± Va = Va and Vb are controlled while maintaining a constant relationship. In this way, even when the pulling means is switched, by maintaining a constant pulling rate, it is possible to grow a single crystal with stable quality under uniform conditions.

Further, to measure the load applied to the hanging member, the predetermined ratio with respect to the load before the measured value is switched to the lifting jig or the relative of the hanger at the time of reaching a predetermined load value The control for setting the ascending / descending speed Va to 0 is started, and the control for setting the ascending speed Vb of the lifting tool to V is started. At this time, the load to be left on the hanger is set to be a load sufficient to prevent problems due to the looseness of the wire, for example, about 50% of the load when the hanger is pulled up. Further, by eliminating the slack of the wire, the pulling length of the single crystal by the suspending tool can be accurately obtained.

Further, when relatively moving the single crystal and lifting jig in the vertical direction, gradually increasing the suspended jig while maintaining the single crystal pulling speed V at a constant zero value, the lifting jig to sling In addition , the descent rate of the hanger was set to be constant regardless of the pulling speed of the single crystal when the hanger was relatively lowered. In addition , the speed of the lifting tool and the speed of the lifting tool are automatically controlled to switch the pulling. By thus setting the relative lowering speed of the lifting device to be constant, conditions such as the switching transition time can be fixed, and the device can be smoothly placed on the lifting device without impact.

Further , the position of the suspending tool and the position of the suspending tool are detected, and the position of the single crystal and the pulling length are accurately calculated from these positions. At this time, since the wire has no slack, the position of the single crystal can be accurately obtained from the position of the lifting tool, and the pulling length can be accurately determined by adding the position of the lifting tool to this. . In addition , the fact that the convex part formed on the melt surface has moved to a predetermined height position is detected based on the detection of the position of the lifting device, and the switching operation of pulling the single crystal from this predetermined height position is automatically performed. I decided to do it. That is, if the suspending tool is made to stand by at a predetermined height position in advance, and the suspending tool is driven from the time when the convex portion passes this height position, the suspending tool is brought close to the periphery of the second neck portion. You can face it.

Further , as a pulling device, a first neck portion, a convex portion, and a second neck portion are sequentially formed below a seed crystal suspended by a suspender, and subsequently, a diameter expanding portion and a straight portion are directly formed. A single crystal having a body part is grown, and at the time when the second neck part is pulled up to a predetermined position while being pulled up by a lifting tool, a suspension that can face the periphery of the second neck part in a non-contact proximity state. A tool is provided, and the single crystal and the lifting tool can be relatively moved up and down by their respective lifting mechanisms.
Also, a convex portion is placed on the upper part of the suspending tool so that it can be held. With such a device, the suspending tool is brought into contact with the periphery of the second neck portion at a predetermined time point in a non-contact state, and the single crystal and the suspending tool are relatively moved up and down so that the convex portion is located above the suspending tool. It can be held in contact by placing it on top of it.

Further, under the sling seed crystals are suspended by a sequentially first neck portion, the convex portion, the second neck portion is formed, the enlarged diameter portion subsequent to this, the straight body portion While growing a single crystal, a part of the single crystal is held by a lifting tool while being pulled by the lifting tool, and a pulling device for the single crystal, in which pulling thereafter is switched to the lifting tool, a semiconductor material A crucible for containing the melt, a slider arranged above the crucible and movable up and down by a slider moving mechanism, a holding case provided on the slider and rotatable around a vertical axis, A rotation mechanism section that rotates a holding case, a lifting tool elevating mechanism section that is provided on the holding case side and that drives the lifting tool up and down, a load measuring unit that measures a load applied to the hanging tool, and the holding case. A lifting tool that is provided on the side and that can freely approach the periphery of the second neck portion in a non-contact state, a lifting tool drive mechanism section that drives the approaching or releasing of the lifting tool, and the slider moving mechanism section, A control device is provided which is connected to each of the rotation mechanism part, the lifting device lifting mechanism part, the load measuring means, and the lifting device driving mechanism part, and which controls these synchronously. The control device controls the pulling of the single crystal by the lifting device. The pulling speed V of the single crystal can be controlled to be constant when switching from the to the hanging tool.

Further, it provided each of the position detector for detecting the position of the hanging member and lifting jig. Then, the position detector detects the position of the lifting device and the position of the lifting device, and calculates the pulling length based on these positions.

Further , the lifting speed Vb of the lifting tool is controlled by the diameter control device. And, such control of the lifting speed Vb of the lifting tool is, of course, a transition at the time when the lifting tool starts to lift.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the accompanying drawings. Here, FIG. 1 is an overall structural example view of a single crystal pulling apparatus, FIG. 2 is a partial vertical cross-sectional view showing a detailed structure around a suspending tool and a suspending tool, and FIG. 3 is an enlarged view showing an example of a convex shape and the like. 4 is an operation diagram showing a pulling transition state.

The single crystal pulling apparatus of the present invention is a single crystal pulling apparatus such as the so-called Czochralski method (CZ method) for growing a silicon crystal which is a semiconductor material. The apparatus is suitable for manufacturing without dislocation, and first, the outline of the basic configuration of the pulling apparatus will be described with reference to FIGS. 1 and 2.

The pulling device includes a lower chamber 1 for accommodating a crucible (not shown), a fixing plate 2 fixed to the upper part of the lower chamber 1, and a slider attached to the upper part of the fixing plate 2 via a bellows chamber 3. 4, the slider 4 is vertically movable by a slider moving mechanism portion 5, and a holding case 7 rotatably supported by a tubular holder 6 is provided on the slider 4. There is.

As shown in FIG. 2, the holding case 7 includes a lower first holding case 7a and an upper second holding case 7b, which are integrally connected to each other, and the lower first holding case 7a. Is provided with a rotation mechanism portion 8 for rotating the holding case 7 about a vertical axis, and
Inside the holding case 7a, a pair of suspending tools 9, 9 are provided, and upper ends of the suspending tools 9, 9 are connected to hydraulic cylinder units 10, 10 as a suspending tool drive mechanism section. Also, they are pivotally supported by a pin 11 intersecting at the intermediate portion.

The upper second holding case 7b is provided with a lifting tool lifting mechanism section 12 and a load measuring means 13 for measuring a load applied to the lifting tool. A hanger 15 attached to the lower end of 14
Is hung up and down freely. A seed crystal 16 is held on the suspending tool 15, and when the seed crystal 16 is brought into contact with the raw material melt to grow a single crystal, the crystal is made dislocation-free as shown in FIG. First neck part 1
After forming 7, the convex portion 18 and the second neck portion 20 are formed, and then the single crystal portion 21 including the expanded diameter portion 21a and the straight body portion 21b shown in FIG. 2 is formed.

The bellows chamber 3 is constructed such that a metal plate material such as stainless steel or titanium is folded in a bellows shape and can be expanded and contracted up and down. The bellows chamber 3 is communicated with the lower chamber 1 to shut off the inside from the outside air. There is. Incidentally, the bellows chamber 3 expands and contracts when the crystal is pulled up, but the expansion and contraction characteristics are also utilized when the finally manufactured single crystal is taken out.

The slider moving mechanism portion 5 is provided with a ball screw 23 rotatable by a lifting drive motor 22 and a guide shaft 24 standing on the fixed plate 2. The ball screw 23 is a nut portion 4a of the slider 4. The guide shaft 24 is slidably inserted into the guide hole of the slider 4 while being screwed into. The rotation of the ball screw 23 allows the slider 4 to move up and down. Further, a slider position detector 25 is attached near the lifting drive motor 22 so that the position of the slider 4 can be detected by the number of rotations of the motor 22, for example.

The rotating mechanism portion 8 is for rotating the holding case 7 about a vertical axis, and is integrally provided on the outer periphery of the intermediate portion of the lower first holding case 7a as shown in FIG. A large diameter pulley 26, a motor 27 fixed to the upper part of one end of the slider 4, a small diameter pulley 28 attached to the output shaft of the motor 27, the large diameter pulley 26 and a small diameter pulley 28. An endless belt 29 wound between them is provided so that the holding case 7 is rotated by driving the motor 27.

A hydraulic cylinder unit 10, 1 as a lifting tool drive mechanism portion pivotally attached to the upper ends of the lifting tools 9, 9.
0 is a pair of left and right hollow boss portions 30 of the first holding case 7a.
It is fixed to the slider 4, and intersects at the intermediate portion as described above, and is pivotally supported on the slider 4 side by the pin 11, and holder portions 9a, 9a are formed at the lower end portion. The holder portions 9a, 9a are provided on the hydraulic cylinder unit 10,
It is opened and closed by the operation of 10, and for example, the inner side is curved in a semi-circular shape, and when it is moved to the closed side, for example, both ends contact each other to form a ring shape with a hole in the center. ing. The diameter of this ring is larger than the diameter of the second neck portion 20 and smaller than the diameter of the convex portion 18. By the way, in the center of the first holding case 7a, a guide tube 31 into which the wire 14 is inserted is arranged in the vertical direction so as to prevent interference between the wire 14 and the suspenders 9, 9, and the like. .

The lifting device lifting mechanism section 12 has a second upper portion.
A pulley 33 that is rotated by the drive of a motor 32 attached to the bottom plate in the holding case 7b, a lever 35 that is cantilevered on a column 34 that is erected on the bottom plate, and a lever 35 that is pivotally attached to an intermediate portion of the lever 35. The guide pulley 36 supported is provided,
The wire 14 is connected to a pulley 33 via a guide pulley 36.
It is wound around. Then, by driving the motor 32, the suspending tool 15 can be moved up and down via the wire 14. A wire position detector 37 is provided in the vicinity of the guide pulley 36, and the position of the suspender 15 is detected by the rotation of the guide pulley 36, for example.

The load measuring means 13 includes the lever 35.
It has a pivot 35a at the tip and a load cell 38 supporting the pivot 35a, so that a load of a predetermined ratio to the crystal weight applied to the guide pulley 36 can be measured.

Then, the slider moving mechanism 5 as described above is used.
Lifting drive motor 22 and motor 2 of rotation mechanism section 8
7, the motor 32 of the lifting / lowering mechanism 12 and the load cell 38 of the load measuring means 13, and the hydraulic cylinder unit 10 as the lifting / lowering mechanism driving mechanism, the controller 40.
Are connected, and these can be controlled synchronously. The slider position detector 25 near the lifting drive motor 22 and the wire position detector 37 near the guide pulley 36 of the lifting / lowering mechanism 12 are also connected to the control device 40 to control each detection signal. It can be fed into the device 40.

Next, a method for pulling a single crystal by the pulling apparatus as described above will be described. First, the seed crystal 16 held by the hanger 15 is brought into contact with the surface of the raw material melt of the crucible, the motor 27 of the rotation mechanism 8 is operated to gently rotate the holding case 7, and the hanger lifting mechanism 12 is moved. Pulls the wire 14 at a predetermined speed. And seed crystal 1
By controlling at least one of the pulling rate of No. 6 and the melt temperature in the crucible, a first neck portion 17, a convex portion 18, and a second neck portion 20 as shown in FIG. 3 are formed below the seed crystal 16. . At this time, the diameter of the convex portion 18 is made larger than the ring diameter of the holder portions 9a, 9a when the suspenders 9, 9 are closed, and the diameter of the second neck portion 20 is the ring of the holder portions 9a, 9a. In the embodiment, the diameter of the first neck portion 17 is about φ4, the maximum diameter of the convex portion 18 is about φ25, and the diameter of the second neck portion 20 is about φ7.

Next, the pulling speed, the melt temperature, etc. are adjusted to grow the single crystal portion 21 having the expanded diameter portion 21a and the straight body portion 21b, and the motor 32 of the lifting / lowering mechanism 12 is operated to suspend. The tool 15 is pulled up at a predetermined pulling speed V. Then, when the suspension 15 is pulled up to a predetermined position calculated from the time when the convex portion 18 is formed, the control device 4
0 activates the hydraulic cylinder units 10 and 10,
The suspending tools 9, 9 swing around the pin 11 and move to the holder portion 9
A and 9a are closed. At this time, as shown in FIG. 4 (A), the holder portions 9a, 9a are arranged so as to approach the periphery of the second neck portion 20 in a non-contact state.

Next, when the holder portions 9a, 9a are closed, switching of the pulling means is started, the lifting drive motor 22 of the slider moving mechanism portion 5 starts operating, and the lifting tool 9 is gradually raised. With the start, the lifting device 15 gradually starts decelerating. The state of speed change after the start of shifting the pulling means is as shown in the upper graph of FIG. 5, and the point A in FIG. Here, FIG. 5 is a graph showing an example of changes in the pulling speed of the lifting device 15 and the lifting devices 9 and 9 (upper diagram), and a transition state of the load (lower diagram). ), The unit of the vertical axis in the upper diagram is mm / min, and the unit of the vertical axis in the lower diagram is kg.

In this embodiment, the relative moving speed Va of the lifting device 15 with respect to the lifting device 9 is the initial pulling speed V = 1.
It gradually decreases from 0 (mm / min), decreases to zero speed at point B, and then starts to descend, and at point C the descending speed Va = -3.0.
It is kept constant at (mm / min). Further, the rising speed Vb of the lifting device 9 also gradually increases from zero, and then Vb = 4.0 at the point C.
(mm / min) is kept constant, and the ratio of the two speeds during this period is defined as the relative movement speed of the speed Vb of the lifting tool 9 and the lifting tool 15 is ± Va (+ is up, − is down). Value V (V
= Vb ± Va) is controlled to be constant. Then, this speed V becomes the absolute pulling speed of the single crystal, and is kept at the same speed as the pulling speed before switching the pulling means. Of course, this relationship of Vb ± Va = V = constant is also applied after the point C until the switching operation is completed.
Further, the positional relationship between the suspending tool 15 and the suspending tool 9 during the switching transition is as shown in FIG. 4 (B). At this time, the rate of change in speed between points A to C in FIG. 5 (time required for change) is V
= Can be set arbitrarily as long as a certain value is satisfied.

As the suspending tool 15 descends relative to the suspending tool 9, the convex portion 18 of the suspending tool 15 becomes the holder portions 9a, 9a.
Contact so that it will be placed on the top of the (point D). At this time, the contact speed between the lifting device 15 and the lifting device 9 is the descending speed of the lifting device-Va.
At this speed, the convex portion 18 comes into contact with the holder portions 9a, 9a, but since the contact direction is the vertical direction,
A lateral force is not applied to the single crystal portion 21, and a defect such as dislocation generation is unlikely to occur.

Even after the contact, the load of the suspender 15 is transferred to the holder portions 9a, 9a, so that the same movement condition as before is continued. Then, as shown in the lower graph of FIG. 5, the load applied to the hanger 15 (the load detected by the load cell 38 (kg)) starts to decrease, and a part of the load is reduced to the holder portion 9
It comes to shift to the a, 9a side. And the hanging device 15
When the load applied to 50% of the load (E)
Point), the load ratio of the lifting device 15 and the lifting device 9 becomes 5: 5, and the rising speed Vb of the lifting device 9 from this point E to the single crystal pulling speed V = 1.0 (mm / min). The control to reduce is started,
The control for returning the descending speed −Va of the hanging device 15 to zero is started. As for the speed ratio during this time, the condition that V = constant is maintained, and the ratio of the speed changes of Va and Vb between points E and F can be arbitrarily set as long as V = constant is satisfied. .

After the point F at which the switching transition is completed, the pulling of the single crystal is carried out by the suspenders 9, 9 as shown in FIG. 4 (C), and the load applied to the suspender is E. The load at the point is maintained. For this reason,
There is no inconvenience that the wire 14 on the hanger 15 side is loosened and the first neck portion 17 is damaged as in the conventional case.

By the way, as a result of confirming the switching transition as described above by an experiment, between the points D and E in FIG. 5, the convex portion 18 is placed on the holder portions 9a, 9a until the load ratio becomes 5: 5. It has been clarified that the relationship of Vb ± Va = V = constant may not be established strictly when Vb and Va are kept constant during the period. Therefore, in such a case, it is necessary to correct the rising speed Vb of the lifting device 9 so as to keep the pulling speed V constant. When such a correction is made, the corrected Vb is corrected. An example of the line is shown by the broken line in the upper graph of FIG.

When it is necessary to change the pulling speed V in order to keep the diameter of the crystal constant by the signal from the crystal diameter control device during the above-mentioned pulling means switching transition, the lifting tool 9 side is moved. This is dealt with by changing the rising speed Vb. Therefore, the relative moving speed ± Va of the lifting device 15 is always kept constant, and the conditions such as the time from the start point A of the movement of the pulling means to the point D of holding the crystal by the lifting device can be made constant, and the holder part The convex portion 18 can be placed smoothly on the 9a and 9a without impact.

Further, the position of the suspending tool 15 is detected by the wire position detector 37, the position of the suspending tool 9 is detected by the slider position detector 25, and the pulling length of the single crystal is determined from these detected values. I'm trying to ask, but wire 14
Since there is no slack, each position can be accurately detected, so the pulling length can be accurately obtained.

The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, has substantially the same configuration as the technical idea described in the scope of the claims of the present invention, and has any similar effect to the present invention. It is included in the technical scope of the invention.

For example, in the above embodiment, when the load is transferred to the suspending tool, the wire is prevented from loosening by leaving half of the load applied to the suspending tool until then, but the present invention is not limited to this. Instead, the load to be left on the hanger can be set arbitrarily as long as the wire does not loosen and troubles such as damage to the neck portion can be avoided.

[0044]

INDUSTRIAL APPLICABILITY As described above, the present invention forms the second neck portion continuing to the convex portion during the lifting by the lifting tool, and the lifting tool is lifted when the second neck section is lifted to a predetermined position. To the periphery of the second neck portion in a non-contact proximity state, and then the single crystal and the suspending tool are moved relative to each other in the up-down direction to bring the convex portion into contact with the suspending tool so as to be placed on the suspending tool. After holding the convex part with, the load applied to the hanger was transferred to the hanger, and the subsequent pulling was done with the hanger, so no force was applied to the single crystal from the lateral direction, causing dislocation, etc. It is possible to make it difficult for the trouble of. Then, it is possible to prevent the wire from slackening by leaving a part of the load on the hanger without transferring the entire load to the hanger, and avoid problems such as damage to the neck portion. Further, at the same time, the position of the suspending tool and the position of the suspending tool can be accurately detected, so that the pulling length of the single crystal can be accurately obtained. Furthermore, since the relative movement speed of the lifting device with respect to the lifting device is constant in the pulling means switching process, the switching process can be performed under certain conditions, and the single crystal can be smoothly placed on the lifting device. It has the effect of being able to do so.

[Brief description of drawings]

FIG. 1 is a diagram illustrating an overall configuration example of a single crystal pulling apparatus.

FIG. 2 is a partial vertical cross-sectional view showing a detailed structure around a suspender and a suspender.

FIG. 3 is an enlarged view of a convex shape and the like.

4A and 4B are operation diagrams showing a pulling transition state, in which FIG. 4A is a state diagram at the start of pulling means switching, FIG. 4B is a state diagram during pulling means switching, and FIG. It is a figure.

FIG. 5 is a graph showing changes in speeds of the suspending tool and the suspending tool, and a load transfer state.

FIG. 6 is an explanatory view of a conventional pulling device.

[Explanation of symbols]

1 ... Lower chamber, 2 ... Fixing plate, 3
… Bellows chamber, 4… Slider, 4
a ... nut part, 5 ... slider moving mechanism part, 6 ... holding tool, 7 ... holding case, 7a ... first holding case, 7b
… Second holding case, 8… Rotation mechanism part,
9 ... Lifting tool, 9a ... Holder part,
10 ... Hydraulic cylinder unit, 11 ... Pin,
Reference numeral 12 ... Lifting tool lifting mechanism section, 13 ... Load measuring means, 14 ... Wire, 15 ... Lifting tool, 16 ... Seed crystal, 17 ... First
Neck portion, 18 ... Convex portion, 20 ... Second neck portion, 21 ... Single crystal portion, 21a ... Expanded diameter portion, 21b ... Straight body portion, 22 ... Lifting drive motor, 23 ... Ball screw, 24
... Guide shaft, 25 ... Slider position detector, 26 ... Pulley, 27
... motor, 28 ... pulley, 29
… Belt, 30… Hollow boss, 31
… Guide tube, 32… Motor,
33 ... Pulley, 34 ... Post,
35 ... lever, 35a ... pivot,
36 ... Guide pulley, 37 ... Wire position detector,
38 ... Load cell, 40 ... Control device,
51 ... Hanging tool, 52 ... Seed crystal,
53 ... Raw material melt, 54 ... Lifting tool lifting mechanism section, 55 ... Single crystal section, 56 ... Slider moving mechanism section, 57 ... Slider, 58 ... Holding case, 60 ... Wire, 61 ... Lifting tool,
61a ... Engagement part, 62 ... Neck part, 63 ... Uneven part.

─────────────────────────────────────────────────── ─── Continuation of front page (72) Eiichi Iino Eiichi Iino 2-13-1, Isobe, Gunma Prefecture Shin-Etsu Semiconductor Co., Ltd., Semiconductor Isobe Laboratory (56) Reference JP-A-62-288191 (JP, A) JP-A-5-270975 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) C30B 15/00 C30B 15/20

Claims (12)

(57) [Claims] 1. A first neck portion, a convex portion, and a second neck portion are sequentially formed below a seed crystal suspended by a suspender, and subsequently, a diameter expanding portion and a straight body portion are provided. While growing a single crystal, a part of the single crystal is held by a lifting tool during the pulling by the lifting tool, which is a method of pulling the single crystal so that the subsequent lifting is switched to the lifting tool. When the second neck portion is pulled up to a predetermined position by the suspending tool, the suspending tool faces the periphery of the second neck portion in a non-contact proximity state, and then the single crystal and the suspending tool are vertically moved. Relative movement to, hold the convex portion with the lifting tool by contacting the convex portion so as to be placed on the upper part of the lifting tool, then transfer a part of the load applied to the lifting tool to the lifting tool, and Lifting is done with a lifting tool, and the position of the lifting tool and the position of the lifting tool are detected. Pulling method of the single crystal, characterized in that the positions so as to leave calculate the position and pulling a length of the single crystal. 2. The single crystal pulling method according to claim 1, wherein the convex portion and the second neck portion are intentionally controlled by controlling at least one of a pulling speed of the single crystal and a melt temperature in the crucible. A method for pulling a single crystal, characterized in that the single crystal is formed by. 3. The method for pulling a single crystal according to claim 1, wherein the first neck portion, the convex portion, and the second neck portion have a desired diameter so that the single crystal A single crystal pulling method, which is formed by automatically controlling at least one of a pulling rate and a melt temperature in a crucible. 4. The method for pulling a single crystal according to claim 1, wherein the pulling speed V of the single crystal when the pulling of the single crystal is switched from the suspending tool to the suspending tool. Is controlled so that the lifting speed of the lifting tool is Vb, and the relative lifting / lowering speed of the lifting tool with respect to the lifting tool is ± Va, the pulling speed V = Vb ± Va = Va, Vb while maintaining a constant relationship
A method for pulling a single crystal, characterized in that: 5. The method for pulling a single crystal according to claim 4, wherein a load applied to the suspending tool is measured, and the measured value has a predetermined ratio or a predetermined value with respect to a load before switching to the suspending tool. When the load value is reached, the control for setting the relative lifting / lowering speed Va of the lifting device to 0 is started, and the control for setting the lifting speed Vb of the lifting device to V is started. Crystal pulling method. 6. The method for pulling a single crystal according to claim 1, wherein the single crystal pulling speed V is set when the single crystal and the lifting tool are relatively moved in the vertical direction.
The method for pulling a single crystal is characterized in that the lifting tool is gradually raised from a zero value while keeping the value constant, and the lifting tool is lowered relative to the lifting tool. 7. The method for pulling a single crystal according to claim 6, wherein when the lifting tool is relatively lowered, the descent rate of the lifting tool is made constant regardless of the single crystal pulling rate. And pulling method of single crystal. 8. The single crystal pulling method according to claim 6 or 7, wherein the pulling tool is switched by automatically controlling the speed of the lifting tool and the lifting tool. Crystal pulling method. 9. The method for pulling a single crystal according to claim 1, wherein the protrusions formed on the melt surface have moved to a predetermined height position. The single crystal pulling method is characterized in that the single crystal pulling operation is automatically performed from this predetermined height position. 10. A first neck portion, a convex portion, and a second neck portion are sequentially formed below a seed crystal suspended by a suspender, and subsequently, a diameter expanding portion and a straight body portion are provided. Along with growing a single crystal, a part of the single crystal is held by a lifting tool during the lifting by the lifting tool, and a pulling device for the single crystal that switches the subsequent lifting to the lifting tool, A crucible for containing a melt of a semiconductor material, a slider arranged above the crucible and movable up and down by a slider moving mechanism, and a holding case provided on the slider and rotatable around a vertical axis. A rotation mechanism section for rotating the holding case, a lifting tool lifting mechanism section provided on the holding case side for driving the lifting tool to move up and down, a load measuring means for measuring a load applied to the hanging tool, Holding case side And a slinging tool which is provided in the vicinity of the second neck portion and can freely approach the second neck portion in a non-contact state; A mechanism unit, a lifting device lifting mechanism unit, a load measuring means, and a lifting device driving mechanism unit are provided with a control device that performs synchronous control of these, and the control device pulls a single crystal from the lifting device. An apparatus for pulling a single crystal, wherein a pulling speed V of the single crystal can be controlled to be constant when switching to a lifting tool. 11. The single crystal pulling apparatus according to claim 10, wherein the apparatus is provided with respective position detectors for detecting the position of the suspending tool and the position of the suspending tool. Crystal pulling device. 12. The single crystal pulling apparatus according to claim 10 or 11, wherein the lifting speed Vb of the lifting tool is increased.
Is a single crystal pulling device, which is controlled by a diameter control device.