JPH08114654A - Semiconductor tester - Google Patents

Abstract

PURPOSE: To obtain a semiconductor tester of a circuit constitution taking in the input and output data of a device to be measured in real time to graphically display those data on the same screen at the same time and inspecting the data while comparing them in time series. CONSTITUTION: A delay circuit 4 adjusting the output data C12 from a waveform shaping device 1 to the phase of the output data B9 from a device 3 to be measured is provided and a multiplexer 5 being a changeover circuit selecting the output data B9 from the device 3 to be measured or the output data C12 from the waveform shaping device 1 is provided and a latch circuit 7 setting timing by a sampling strobe 6 to latch the same is provided and, further, a data memory 11 storing and holding data is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor tester capable of fetching input / output data of a device to be measured in real time, displaying it graphically on the same screen at the same time, and verifying it in comparison.

[0002]

2. Description of the Related Art In a semiconductor testing apparatus according to the prior art, when input / output data of a device to be measured (hereinafter referred to as DUT) is captured as data used for displaying as a graphic waveform, it can be captured at high speed in real time. There was no circuit configuration. Recently, one of the needs of the market for semiconductor test equipment is to measure the characteristics while checking the performance of the equipment itself.
There is a thing that I want to verify while visually displaying the output given to in real time and displaying it on the screen. That is, it is a request to verify whether or not the content of the output data from the waveform shaper of the device itself, that is, the content of the input data of the DUT is actually the desired value during the measurement. Moreover, so that it can be verified by comparing with the output data from the DUT,
There is a need to capture the input data to the DUT in real time and to display it graphically on the same screen at the right time.

However, the circuit configuration of the prior art does not have the function of satisfying the needs described above, and it is assumed that the pattern data from the waveform shaper 1 causes the driver 2 to drive the driver 2 as shown in FIG. The output data A8, which is the driver waveform, is switched from the passing point and controlled by switching with a relay circuit or the like, and the output data B9 from the DUT 3 is controlled.
It is being taken in with. That is, the driver waveform is I on the pin electronics card in the semiconductor test device.
Output data A8 in High / Lo mode
The pattern is converted into a pattern of w for the logical comparison circuit 10 which is a comparator, and is stored and held in the data memory 11 through the circuit for graphic display.

This prior art was not able to satisfy the above-mentioned market needs that have recently been demanded in the following points. That is, in the conventional circuit configuration, in order to compare with the output data B9 from the DUT 3, the patterning setting for the comparator and the setting for the I / O control are necessary, and the timing of the sampling strobe 6 is changed. It was necessary to make various settings such as settings each time graphic display was required. In addition, in this case, the output data A8 that has passed through the driver 2, that is, the same data as the input to the DUT 3 must be taken in, processed, and processed to be compared with the output data B9 of the DUT 3. That is, in this circuit configuration, a part of the original measurement function of the semiconductor test apparatus is used by devising it in software, so that there is a limit in supporting high speed.

Therefore, in order to meet the needs of this kind, there is a method in which a dedicated measuring instrument such as an oscilloscope is connected from the outside in addition to the semiconductor test apparatus. Although it is good for temporary verification like in,
It was necessary to change the set corresponding to changes in the measurement conditions, which was inconvenient and deficient in practice.

[0006]

The problem to be solved by the present invention is to set the output data from the waveform shaper given to the DUT when the characteristics of the DUT are measured by using the semiconductor test equipment. In order to verify whether it is as it is, as the output data of the waveform as it is without making any deformation at the point immediately after the output from the waveform shaper,
It is to realize the graphic display on the capture screen in real time. Then, the output data from the DUT are simultaneously graphically displayed on the same screen at the same timing so that the output data also has a predetermined time axis.
An object of the present invention is to obtain a semiconductor test device having a circuit configuration capable of verifying the input data to the T and the state of the output data from the DUT in time series in real time, at high speed and with high accuracy. did.

[0007]

In order to achieve the above object, in the present invention, a delay circuit is provided just before the output data C from the waveform shaper applied to the DUT is input to the driver and is input. Then, the output data B from the DUT is adjusted so as to match the timing, and input to a multiplexer provided as a switching circuit. Then, a latch circuit for latching the data whose timing is controlled by the sampling strobe is provided. Furthermore, by providing a data memory that stores and holds data, the waveform input to the DUT and the waveform output from the DUT are simultaneously displayed on the same screen in a graphical display, and the timing is adjusted. It has become possible to perform verification in a time series and in real time with high accuracy.

[0008]

With the large scale and high speed of the DUT, the measurement program pattern data becomes large and complicated, while the semiconductor tester is required to have high cost performance capable of high speed and short time measurement processing. Moreover, in most cases, the measurement program pattern data is created at the same time as the design using the CAD of the DUT. Therefore, 0,
It has been extremely difficult to visually judge the long and complicated data represented by 1 and verify what output data is given to the DUT. In the prior art, it has been done by devising software, but in order to cope with a large-scale and high-speed DUT, it takes a huge amount of time and a circuit scale, and moreover, a sufficient processing speed cannot be reached. It was only possible with the converted graphic display.

Therefore, it was not possible to verify the result of the characteristic measurement by comparing the input data with the output from the DUT while simultaneously displaying in real time a graphic on the same screen, but according to the circuit configuration of the present invention. For example, workstations with improved high-speed graphic display functions as hardware can be used, and cost issues can be resolved.

[0010]

1 is a block diagram showing the concept of an embodiment of the present invention. FIG. 2 shows an example of a graphic display on the screen according to the embodiment of the present invention. As shown in FIG. 1, (1) a delay circuit 4 for adjusting the phase and timing of the output data C12 from the waveform shaper 1 and the output data B9 from the device under test 3 is provided. Next, the multiplexer 5 which is a switching circuit for selecting the output data B9 from the device under test 3 or the output data C12 from the waveform shaper 1 is provided. And the sampling strobe 6
Provide a latch circuit 7 that sets and latches timing with
A semiconductor test device having a circuit configuration provided with a data memory 11 for storing and holding the data is provided.

(2) FIG. 2 shows a state in which a graphic display is simultaneously performed on the same screen in real time on the same time axis. Each time the strobe of the sampling strobe 6 is searched, each data is held and displayed graphically on the screen. The output data C12 is input data given to the device under measurement 3. Output data B
Reference numeral 9 is data output from the device under measurement 3. In this way, it became possible to verify the measurement results at high speed and with high accuracy while displaying the graphic on the same screen.

(3) In the circuit configuration of the present invention, since the multiplexer 5 which is the switching circuit is provided, the output mode for graphic display can be arbitrarily switched. In this way, the program pattern data designed by CAD is displayed in real time in real time to show what it is, and whether it is the output as designed, that is, the input to the device under test 3. It has become possible to confirm and verify.

[0013]

Since the present invention is configured as described above, it has the following effects. (1) Since the circuit configuration according to the present invention is adopted, the output data is captured in real time at a point immediately after the output from the waveform shaper, and the output data from the DUT is simultaneously displayed on the same screen in accordance with a predetermined time axis. By displaying, it becomes possible to compare the state of the input data to the DUT with the state of the output data from the DUT, and perform time series real-time, high-speed, and high-precision verification. (2) On the screen in real time, what is going on with a long and complicated measurement program pattern designed by CAD, and what is the output as designed, that is, whether it is an input to the device under measurement. It became possible to confirm and verify by the graphic display of.

[Brief description of drawings]

FIG. 1 is a block diagram showing the concept of an embodiment of the present invention.

FIG. 2 shows an example of a graphic display on a screen according to an embodiment of the present invention.

FIG. 3 shows a circuit configuration in a conventional semiconductor test apparatus.

[Explanation of symbols]

 1 Waveform Shaper 2 Driver 3 Device Under Test 4 Delay Circuit 5 Multiplexer 6 Sampling Strobe 7 Latch Circuit 8 Output Data A 9 Output Data B 10 Logical Comparison Circuit 11 Data Memory 12 Output Data C

Claims (1)

[Claims] 1. Output data C from a waveform shaper (1)
A delay circuit (4) for adjusting the phase between (12) and the output data B (9) from the device under test (3) is provided, and the output data B (9) or the waveform from the device under test (3) or A multiplexer (5) that is a switching circuit that selects the output data C (12) from the shaper (1) is provided, and a latch circuit (7) that sets and latches the timing by the sampling strobe (6) is provided to store the data. A semiconductor test apparatus comprising a data memory (11) for holding and holding the above configuration.