JPH0811047A - Wire saw device and work pulling out method - Google Patents

Wire saw device and work pulling out method

Info

Publication number
JPH0811047A
JPH0811047A JP14893794A JP14893794A JPH0811047A JP H0811047 A JPH0811047 A JP H0811047A JP 14893794 A JP14893794 A JP 14893794A JP 14893794 A JP14893794 A JP 14893794A JP H0811047 A JPH0811047 A JP H0811047A
Authority
JP
Japan
Prior art keywords
wire
work
saw device
regulating
restricting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14893794A
Other languages
Japanese (ja)
Other versions
JP3083232B2 (en
Inventor
Norimichi Masuko
典道 益子
Shuichi Komano
修一 駒野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippei Toyama Corp
Original Assignee
Nippei Toyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippei Toyama Corp filed Critical Nippei Toyama Corp
Priority to JP14893794A priority Critical patent/JP3083232B2/en
Publication of JPH0811047A publication Critical patent/JPH0811047A/en
Application granted granted Critical
Publication of JP3083232B2 publication Critical patent/JP3083232B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

Abstract

PURPOSE:To prevent a wire from being tangled in a cutting position of work when the work is pulled out and to prevent the work from following so as to improve workability and productivity. CONSTITUTION:A wire 8 is wound on plural working head rollers 5, 6, 7 at the predetermined pitch, and one end side of the wire 8 is wound on one wire reel 10, while the other end side of the wire 8 is wound on the other wire reel 11, the wire 8 is run at a high speed while the predetermined tension is applied to the wire 8, so that work W is cut in a wire saw device. After the work W is cut by means of the wire 8, the wire 8 is prevented from floating over the whole area of the line of the wire 8 in the vicinity of a wire entrance point of the work W. A pair of restricting members 49L, 49R matched with the vicinity of the wire 8 entrance point are provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ワイヤを高速走行さ
せ、このワイヤにワーク(被切断材)を押し当てて、こ
のワークを切断するワイヤソー装置および切断後のワー
クの引抜き方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw device for running a wire at a high speed and pressing a work (material to be cut) against the wire to cut the work, and a method of drawing the work after cutting. .

【0002】[0002]

【従来の技術】複数の溝ローラ(加工ヘッドローラ)に
ワイヤを所定のピッチで巻き付けてワイヤの一方の端末
側を一方のワイヤリールに、前記ワイヤの他方の端末側
を他方のワイヤリールにそれぞれ捲回し、前記ワイヤに
所定の張力を与えつつ高速走行させてワークの切断を行
うワイヤソー装置は、特開昭63−260757号、特
開平1−177958号公報に開示してあるように公知
である。
2. Description of the Related Art A wire is wound around a plurality of groove rollers (working head rollers) at a predetermined pitch so that one end of the wire is connected to one wire reel and the other end of the wire is connected to the other wire reel. A wire saw device that winds and cuts a work by running at high speed while applying a predetermined tension to the wire is known as disclosed in JP-A-63-260757 and JP-A-1-177958. .

【0003】この従来のワイヤソー装置においては、図
7に示すように複数の加工ヘッドローラ84、85、8
6にワイヤ81を所定のピッチで巻き付けて加工ヘッド
ローラ86の回転駆動によりワイヤ81は直線方向に走
行し、その走行運動の過程でワークWに複数の平行な切
り込みを形成していく。この切り込みが進行する過程
で、ワーク送りモータ(図示せず)の駆動によりワーク
フィードユニット82が少しずつ下降移動して走行状態
のワイヤ81に対してワークWを所定の力で押圧してワ
ークWの切断を行う。そして、上記のようにしてワーク
Wが切断されて、前記ワイヤ81がワークWの上方の固
着用のカーボン材83まで到達して切断を完了する。そ
の後、前記ワークフィードユニット82を矢印の方向に
上昇移動して前記ワークWをワイヤ81から引き抜く。
In this conventional wire saw device, as shown in FIG. 7, a plurality of processing head rollers 84, 85, 8 are provided.
The wire 81 is wound around 6 at a predetermined pitch, and the wire 81 travels in a straight line direction by the rotational driving of the processing head roller 86, and a plurality of parallel cuts are formed in the work W in the course of the traveling motion. During the progress of the cutting, the work feed motor (not shown) drives the work feed unit 82 to move downward little by little and press the work W against the wire 81 in the traveling state with a predetermined force. Disconnect. Then, the work W is cut as described above, the wire 81 reaches the fixing carbon material 83 above the work W, and the cutting is completed. Then, the work feed unit 82 is moved upward in the direction of the arrow to pull out the work W from the wire 81.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記従
来のワイヤソー装置においては、前記ワークWの引き抜
きの際に、前記ワイヤ81がワークWの切断箇所W1に
引っ掛かり、ワークWに随伴して持ち上がってしまうこ
とがあり、ワークWを円滑に引き抜くことができないば
かりか、ワイヤ飛びの原因にもなっていた。したがっ
て、引っ掛かりの点検や手直し、ワイヤ飛びの修正等の
作業が必要になり、作業性および生産性を低下させると
いう問題点があった。
However, in the above-described conventional wire saw device, when the work W is pulled out, the wire 81 is caught at the cutting portion W1 of the work W and is lifted up along with the work W. In some cases, the work W could not be smoothly pulled out, and it also caused a wire jump. Therefore, there is a problem in that work such as catching and checking, repairing, and wire jump correction are required, which lowers workability and productivity.

【0005】本発明は、上記の問題点を解消するもので
あり、その第1の目的とするところは、ワイヤの浮上り
規制手段を設けることにより、ワーク引き抜き時にワイ
ヤがワークの切断箇所に引っ掛かることなく、ワイヤの
随伴を防止できて作業性および生産性を向上させること
ができるワイヤソー装置を提供することにある。
The present invention solves the above-mentioned problems. A first object of the present invention is to provide a wire lifting control means so that the wire is caught at a cut portion of the work when the work is pulled out. It is an object of the present invention to provide a wire saw device that can prevent wire entrainment and can improve workability and productivity without any problem.

【0006】また、本発明の第2の目的とするところ
は、前記規制手段にスラリ供給手段を兼用させることに
より、別にスラリ供給装置を設ける必要がなく構造を簡
素化できるワイヤソー装置を提供することにある。
A second object of the present invention is to provide a wire saw device in which the regulating means is also used as a slurry supply means so that the structure can be simplified without the need to separately provide a slurry supply device. It is in.

【0007】また、本発明の第3の目的とするところ
は、ワーク引き抜き時にワイヤがワークの切断箇所に引
っ掛かることなく、ワイヤの随伴を防止できて作業性お
よび生産性を向上させることができるワーク引抜き方法
を提供することにある。
A third object of the present invention is to prevent the wire from being caught in the cutting portion of the work when the work is pulled out and prevent the wire from being entrained, thereby improving workability and productivity. It is to provide a withdrawal method.

【0008】[0008]

【課題を解決するための手段】上記の第1の目的を達成
するために、本発明に係わるワイヤソー装置は、複数の
加工ヘッドローラにワイヤを所定のピッチで巻き付け
て、このワイヤの一方の端末側を一方のワイヤリール
に、前記ワイヤの他方の端末側を他方のワイヤリールに
それぞれ捲回し、前記ワイヤに所定の張力を与えつつ高
速走行させてワークの切断を行うワイヤソー装置におい
て、前記ワイヤによるワークの切断後ワークの引き抜き
時に、ワークのワイヤ出入り点近傍位置においてワイヤ
列全域にわたってワイヤの浮上りを規制する規制手段を
備えたことを特徴とする。
In order to achieve the above-mentioned first object, a wire saw device according to the present invention winds a wire around a plurality of processing head rollers at a predetermined pitch, and one end of this wire is wound. One side of the wire reel, the other end side of the wire is wound around the other wire reel, respectively, in a wire saw device for traveling at high speed while applying a predetermined tension to the wire to cut the work, When the work is pulled out after the work is cut, a regulation means is provided for regulating the lifting of the wire over the entire wire row at a position near the wire entry / exit point of the work.

【0009】そして、前記規制手段は、前記ワークのワ
イヤ出入り点近傍位置に対応する一対の規制部材を有す
ることが好ましい。
It is preferable that the restricting means has a pair of restricting members corresponding to positions near the wire entry / exit points of the work.

【0010】また、上記の第2の目的を達成するため
に、本発明に係わるワイヤソー装置は、前記ワイヤによ
る前記ワークの切断後ワーク引き抜き時に、ワークに対
するワイヤの出入り点近傍位置においてワイヤ列全域に
わたってワイヤの浮上りを規制する規制手段を備え、こ
の規制手段は前記ワイヤによるワーク切断時にスラリ供
給位置に移動してワイヤに対しスラリを供給するスラリ
供給手段を有することを特徴とする。
Further, in order to achieve the above-mentioned second object, the wire saw device according to the present invention, when the work is pulled out after the work is cut by the wire, at the position near the wire entry / exit point with respect to the work over the entire wire row. It is characterized in that it comprises a regulating means for regulating the lifting of the wire, and the regulating means has a slurry supplying means which moves to a slurry supplying position when the work is cut by the wire and supplies the slurry to the wire.

【0011】また、前記規制手段は前記ワークに対する
ワイヤの出入り点近傍位置に対応される一対の規制部材
を有し、この規制部材にスラリ流入口を設けると共に、
前記規制部材の前記ワイヤとの対向側にスラリ流出口を
設け、さらに、前記規制部材の前記ワイヤとの対向側に
前記スラリ流出口と連通する開口を有するワイヤ接触部
材を設けることが好ましい。また、前記規制部材が前記
ワイヤの浮上りを規制する規制位置と退避位置とに移動
可能であることが好ましい。また、前記規制部材がワイ
ヤの走行方向に移動可能であることが好ましい。また、
前記規制手段は、ワーク外形に応じて前記規制部材がワ
ークの移動とともに常にワークのワイヤ出入り点近傍位
置にくるように移動させる駆動手段を有することが好ま
しい。
Further, the restricting means has a pair of restricting members corresponding to positions near the wire entry / exit points with respect to the work, and a slurry inlet is provided in the restricting members,
It is preferable that a slurry outlet is provided on the side of the regulating member facing the wire, and a wire contact member having an opening communicating with the slurry outlet is provided on the side of the regulating member facing the wire. Further, it is preferable that the restricting member is movable to a restricting position for restricting lifting of the wire and a retracted position. Further, it is preferable that the restriction member is movable in the traveling direction of the wire. Also,
It is preferable that the restricting means includes a driving means that moves the restricting member so as to always come to a position in the vicinity of the wire entry / exit point of the work as the work moves according to the outer shape of the work.

【0012】また、上記の第3の目的を達成するため
に、本発明に係わるワーク引抜き方法は、ワーク引き抜
き時、規制手段によりワークのワイヤ出入り点近傍位置
にてワイヤを押え込んでワイヤの浮上りを規制するよう
にしたことを特徴とする。
In order to achieve the above-mentioned third object, in the work drawing method according to the present invention, when the work is drawn, the wire is lifted by pressing the wire at a position near the wire entry / exit point of the work by the regulating means. The feature is that it regulates

【0013】そして、規制手段が一対の規制部材である
ことが好ましい。また、前記規制部材を、ワーク外形に
応じてワークの移動とともに常にワークのワイヤ出入り
点近傍位置にくるように移動させることが好ましい。
It is preferable that the restricting means is a pair of restricting members. Further, it is preferable that the regulation member is moved so as to always come to a position near the wire entry / exit point of the work as the work moves in accordance with the outer shape of the work.

【0014】[0014]

【作用】本発明に係わるワイヤソー装置にあっては、ワ
ーク引き抜き時、規制手段を構成する一対の規制部材に
よりワークのワイヤ出入り点近傍位置にてワイヤを押え
込んでワイヤの浮上りが規制されるため、前記ワイヤが
ワークの切断箇所に引っ掛かってワークに随伴して持ち
上がってしまうことがなく、スムーズにワークを引き抜
くことができて、引っ掛かりの点検や手直し、ワイヤ飛
びの修正等の作業が不要になり、作業性および生産性を
向上させることができる。
In the wire saw device according to the present invention, when the work is pulled out, the wire is restrained at the position near the wire entry / exit point of the work by the pair of restricting members constituting the restricting means so that the wire is prevented from rising. Therefore, the wire does not get caught at the cutting point of the work and is not lifted up with the work, and the work can be smoothly pulled out, and the work such as checking for hooks, repairing, and correcting wire jumps is unnecessary. Therefore, workability and productivity can be improved.

【0015】また、前記規制部材はワーク引き抜き時の
ワイヤの押えを行うのみならず、ワーク切断時にはスラ
リ供給手段として作用し、しかも、駆動手段によって規
制部材はワーク外形に応じてワークの移動とともに、常
にワークのワイヤ出入り点近傍位置に移動され、ワイヤ
押えおよびスラリ供給を適正な位置で効率よく行なうこ
とができる。
Further, the regulating member not only restrains the wire when pulling out the work, but also acts as a slurry supplying means when cutting the work, and the regulating member is moved by the driving means in accordance with the movement of the work, The work is always moved to a position near the wire entry / exit point, and wire holding and slurry supply can be efficiently performed at appropriate positions.

【0016】本発明に係わるワイヤ引抜き方法にあって
は、ワーク引き抜き時、規制手段を構成する一対の規制
部材によりワークのワイヤ出入り点近傍位置にてワイヤ
を押え込んでワイヤの浮上りが規制されるため、前記ワ
イヤがワークの切断箇所に引っ掛かってワークに随伴し
て持ち上がってしまうことがなく、スムーズにワークを
引き抜くことができて、引っ掛かりの点検や手直し、ワ
イヤ飛びの修正等の作業が不要になり、作業性および生
産性を向上させることができる。
In the wire drawing method according to the present invention, when the work is drawn out, the wire lifting is restricted by pressing the wire at a position near the wire entry / exit point of the work by the pair of restricting members constituting the restricting means. Therefore, the wire does not get caught at the cutting point of the work and is not lifted up with the work, and the work can be smoothly pulled out, and there is no need to perform work such as checking for hooking, repairing, and correcting wire jumps. Therefore, workability and productivity can be improved.

【0017】[0017]

【実施例】以下、本発明の実施例を図面を参照して詳述
する。図1は本発明に係わるワイヤソー装置の一部省略
した概略的な斜視図、図2の(1)は同ワイヤソー装置
における規制手段としてのワイヤ浮上り規制装置の一部
省略した平面図、図2の(2)は(1)のA−A線に沿
う断面図、図3は図2の(1)のB−B線に沿う断面
図、図4の(1)は図2の(1)のC−C線に沿う前記
規制装置の規制部材の断面図、図4の(2)は図4の
(1)のD−D線に沿う横断面図である。
Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a schematic perspective view of the wire saw device according to the present invention with a part thereof omitted, and FIG. 2 (1) is a plan view with a part of the wire floating restricting device as a restricting means in the wire saw device omitted. (2) is a sectional view taken along the line AA of (1), FIG. 3 is a sectional view taken along the line BB of (1) of FIG. 2, and (1) of FIG. 4 is (1) of FIG. 4 is a cross-sectional view of the restriction member of the restriction device taken along line C-C, and FIG. 4B is a cross-sectional view taken along line D-D of FIG.

【0018】本発明に係るワイヤソー装置は、加工ヘッ
ド部1と、ワイヤ走行部2と、ワイヤ走行駆動部3と、
規制手段としてのワイヤ浮上り規制装置20とを備えて
いる。前記加工ヘッド部1は、機台(図示せず)に3個
の溝ローラである加工ヘッドローラ5、6、7を逆三角
形の各頂点に位置するように配置し、これら加工ヘッド
ローラ5、6、7に所定のピッチpで以てワイヤ8を巻
き付け、上方の加工ヘッドローラ5、6間のワイヤ部分
をワーク切断部9とした構成である。前記ワイヤ走行駆
動部3は第1の回転モータ13と第2の回転モータ14
と制動手段であるブレーキ機構(図示せず)とを有して
いる。
The wire saw device according to the present invention comprises a machining head portion 1, a wire traveling portion 2, a wire traveling driving portion 3,
The wire lifting restricting device 20 as a restricting means is provided. In the processing head unit 1, three groove rollers, namely, processing head rollers 5, 6, and 7 are arranged on a machine base (not shown) so as to be located at respective vertices of an inverted triangle. A wire 8 is wound around 6 and 7 at a predetermined pitch p, and a wire portion between the upper processing head rollers 5 and 6 serves as a work cutting portion 9. The wire traveling drive unit 3 includes a first rotary motor 13 and a second rotary motor 14
And a braking mechanism (not shown) which is a braking means.

【0019】前記ワイヤ走行部2は、第1、第2のワイ
ヤリール10、11を備えており、これらの第1のワイ
ヤリール10の回転軸は、前記ワイヤ走行駆動部3の第
1の回転モータ13の出力軸13aに、第2のワイヤリ
ール11の回転軸は第2の回転モータ14の出力軸14
aにそれぞれ連結している。そして、第1のワイヤリー
ル10には前記ワイヤ8の一方端側が捲回してあり、第
2のワイヤリール11には前記ワイヤ8の他方端側が捲
回している。
The wire traveling section 2 is provided with first and second wire reels 10 and 11, and the rotation axis of the first wire reel 10 is the first rotation of the wire traveling drive section 3. The rotation shaft of the second wire reel 11 is connected to the output shaft 13a of the motor 13 and the output shaft 14 of the second rotation motor 14 is rotated.
are respectively connected to a. The one end side of the wire 8 is wound around the first wire reel 10, and the other end side of the wire 8 is wound around the second wire reel 11.

【0020】第1、第2のワイヤリール10、11のワ
イヤ巻取り側、送り出し側には、図示しないトラバース
用モータの駆動により第1、第2のワイヤリール10、
11の軸線方向に往復動してワイヤ8を整列巻きするト
ラバース機構(図示せず)と、ダンサローラ機構(図示
せず)が配設してある。また、前記ワイヤ8はその途中
において図示しないガイドローラに案内されている。ま
た、前記加工ヘッド部1の駆動側の加工ヘッドローラ7
は駆動モータ15の出力軸15aに連結されている。
The first and second wire reels 10, 11 are driven by a traverse motor (not shown) on the wire winding side and the wire sending side of the first and second wire reels 10, 11, respectively.
A traverse mechanism (not shown) that reciprocates in the axial direction of 11 to wind the wires 8 in a line and a dancer roller mechanism (not shown) are provided. The wire 8 is guided by a guide roller (not shown) on the way. Further, the processing head roller 7 on the drive side of the processing head unit 1
Is connected to the output shaft 15a of the drive motor 15.

【0021】そして、前記ワーク切断部9の上方には図
示しないワーク送り用モータ(図示せず)により昇降す
るワーク支持体17が配置してあり、このワーク支持体
17のワーク取付け面には、保持部材であるカーボン材
16に接着したワークWが保持されている。このワーク
Wは、高硬度脆性材料、例えば半導体材料の被切断部材
であり、その形状は例えば円筒体である。
A work supporting body 17 which is moved up and down by a work feeding motor (not shown) is arranged above the work cutting section 9, and a work mounting surface of the work supporting body 17 is mounted on the work supporting surface. The work W bonded to the carbon material 16 that is a holding member is held. This work W is a member to be cut of a high hardness brittle material, for example, a semiconductor material, and its shape is, for example, a cylindrical body.

【0022】前記ワイヤ浮上り規制装置20は、図2乃
至図3に示すように本体21を備えており、この本体2
1は、その背部の図2(1)における左右にガイド部材
22を有していて、これらのガイド部材22を、前記機
台に立設したガイドレール23に図3における上下方向
に摺動可能に案内して後述する移動手段である昇降シリ
ンダ61に保持されている。図2(1)において前記本
体21は、その左右に支持部25、26を、中央部に中
央支持部27をそれぞれ有しており、この中央支持部2
7には軸受部材28を介して連結軸29が回転可能に設
けてあり、また、図3において、中央支持部27には上
下にガイドバー30、31を保持している。
The wire lifting restricting device 20 has a main body 21 as shown in FIGS.
1 has guide members 22 on its left and right sides in FIG. 2 (1), and these guide members 22 can be slid vertically in FIG. 3 on a guide rail 23 provided upright on the machine base. It is held by an elevating cylinder 61 which is a moving means described later. In FIG. 2 (1), the main body 21 has supporting portions 25 and 26 on the left and right sides thereof, and a central supporting portion 27 at the central portion thereof.
7, a connecting shaft 29 is rotatably provided via a bearing member 28, and in FIG. 3, a central support portion 27 holds guide bars 30 and 31 vertically.

【0023】図2(1)において、前記連結軸29の左
端部にはジョイント32を介して左のボールスクリュ軸
33の右端部が連結してあり、このボールスクリュ軸3
3の左端部は、左の支持部25に設けた回転駆動モータ
35の出力軸側に連結してある。また、前記連結軸29
の右端部にはジョイント36を介して右のボールスクリ
ュ軸37の左端部が連結してあり、このボールスクリュ
軸37の右端部は、右の支持部26に設けた軸受部材3
8に支承されている。左右のボールスクリュ軸33、3
7が互いに左右逆リードの送りねじ部33a、37aを
有している。また、図3において前記装置本体21の左
右の支持部25、26の間には前記上下のガイドバー3
0、31が取付けられ、これらのガイドバー30、31
は前記中央支持部27を貫通している。
In FIG. 2 (1), the left end of the connecting shaft 29 is connected to the right end of a left ball screw shaft 33 via a joint 32. The ball screw shaft 3
The left end portion of 3 is connected to the output shaft side of a rotary drive motor 35 provided on the left support portion 25. In addition, the connecting shaft 29
The right end portion of the right ball screw shaft 37 is connected to the right end portion of the ball screw shaft 37 via a joint 36. The right end portion of the ball screw shaft 37 is mounted on the right support portion 26.
It is supported by 8. Left and right ball screw shafts 33, 3
7 has feed screw portions 33a and 37a whose leads are opposite to each other. Further, in FIG. 3, the upper and lower guide bars 3 are provided between the left and right support portions 25 and 26 of the apparatus main body 21.
0, 31 are attached to these guide bars 30, 31
Penetrates the central support portion 27.

【0024】そして、図2(1)において前記ガイドバ
ー30、31の左部分には左の担持体41が、右部分に
は右の担持体42がそれぞれ左右方向に移動可能に設け
てある。すなわち、図3において左の担持体41にはナ
ット部材43とこのナット部材43を挟んだ上下に位置
させてガイドブッシュ44、45が設けてあり、これら
のガイドブッシュ44、45を前記ガイドバー30、3
1が嵌合しており、ナット部材43が左のボールスクリ
ュ軸33の送りねじ部33aに螺合している。また、右
の担持体42は左の担持体41と同構成であり、ガイド
ブッシュ47、48を前記ガイドバー30、31が嵌合
しており、ナット部材46が右のボールスクリュ軸37
の送りねじ部37aに螺合している。そして、左右のボ
ールスクリュ軸33、37と回転駆動モータ35とナッ
ト部材43、46とで駆動手段を構成している。
In FIG. 2A, a left carrier 41 is provided on the left part of the guide bars 30 and 31, and a right carrier 42 is provided on the right part thereof so as to be movable in the left-right direction. That is, in FIG. 3, a left carrier 41 is provided with a nut member 43 and guide bushes 44 and 45 vertically arranged with the nut member 43 interposed therebetween. These guide bushes 44 and 45 are provided on the guide bar 30. Three
1 is fitted, and the nut member 43 is screwed onto the feed screw portion 33a of the left ball screw shaft 33. The right carrier 42 has the same structure as the left carrier 41, the guide bushes 47 and 48 are fitted to the guide bars 30 and 31, and the nut member 46 is arranged on the right ball screw shaft 37.
Is screwed into the feed screw portion 37a. The left and right ball screw shafts 33 and 37, the rotary drive motor 35, and the nut members 43 and 46 constitute a drive means.

【0025】そして、図2(1)において、左の担持体
41には、左の規制部材49Lと、この左の規制部材4
9Lの揺動手段である揺動機構50Lが、右の担持体4
2には、右の規制部材49Rと、この右の規制部材49
Rの揺動手段である揺動操作機構50Rがそれぞれ設け
てある。
In FIG. 2A, the left carrier 41 is provided with a left regulating member 49L and the left regulating member 4
The swinging mechanism 50L, which is a swinging means of 9L, is used for the right carrier 4
2 includes a right regulation member 49R and a right regulation member 49R.
A rocking operation mechanism 50R, which is a rocking means for R, is provided.

【0026】左の揺動機構50Lはピニオン51を備え
ており、このピニオン51は、左の担持体41を左右に
貫通する回転軸47の左端部に固着してあり、左の担持
体41にはラック作動シリンダ52が設けてあり、この
ラック作動シリンダ52のピストンロッド52aにはラ
ック部材53が取り付けてあり、このラック部材53は
前記ピニオン51に噛み合っている。前記回転軸47の
右端部には規制部材把持部材54Lが固着してあり、こ
の規制部材把持部材54Lが左の規制部材49Lの基部
49aを把持している。
The left rocking mechanism 50L is provided with a pinion 51. The pinion 51 is fixed to the left end of a rotary shaft 47 that penetrates the left carrier 41 in the left and right directions. Is provided with a rack operating cylinder 52, and a rack member 53 is attached to a piston rod 52a of the rack operating cylinder 52, and the rack member 53 meshes with the pinion 51. A regulating member gripping member 54L is fixed to the right end of the rotary shaft 47, and the regulating member gripping member 54L grips the base 49a of the left regulating member 49L.

【0027】この左の規制部材49Lは、図4に示すよ
うにワーク切断部9のワイヤ列全域にわたって延びた二
重円筒体であって、内、外側円筒体55、56を有しス
ラリ供給手段を形成している。この規制部材49Lに
は、内側円筒体55の基部49aには側方に開放された
スラリ流入口57が設けてあり、ここに図2(2)で示
すように回転軸47内部を通ってその先端にスラリ供給
管路73が接続される。内側円筒体55の上部には、こ
の内側円筒体55の軸線方向に沿うスリット状の開口部
58が形成してあり、外側円筒体56の下部には、この
外側円筒体56の軸線方向に沿うスリット状のスラリ流
出口59が形成してある。また、前記外側円筒体56の
下部には、前記流出口59に連通する開口48aを形成
するように流出口59を挟んだ左右位置にワイヤ接触部
材48が着脱可能に設けてある。これはワイヤ接触部材
48がワイヤ8によって磨耗或いは削られても、前記外
側円筒体56には損傷がなく、したがって、ワイヤ接触
部材48のみを取り替えるだけで規制部材49L、49
Rの耐久性を向上させるようにしている。
The left regulating member 49L is a double cylinder extending over the entire wire row of the work cutting section 9 as shown in FIG. 4, and has inner and outer cylinders 55 and 56, and slurry supply means. Is formed. The regulating member 49L is provided with a slurry inlet 57 which is open to the side at the base 49a of the inner cylindrical body 55, and passes through the inside of the rotary shaft 47 as shown in FIG. A slurry supply conduit 73 is connected to the tip. A slit-shaped opening 58 is formed in the upper part of the inner cylinder 55 along the axial direction of the inner cylinder 55, and in the lower part of the outer cylinder 56 along the axial direction of the outer cylinder 56. A slit-shaped slurry outlet 59 is formed. Further, a wire contact member 48 is detachably provided at a lower portion of the outer cylindrical body 56 at left and right positions sandwiching the outflow port 59 so as to form an opening 48a communicating with the outflow port 59. This is because even if the wire contact member 48 is abraded or scraped by the wire 8, the outer cylindrical body 56 is not damaged, so that only the wire contact member 48 is replaced, and the restricting members 49L and 49L.
The durability of R is improved.

【0028】また、右の揺動機構50Rは左の揺動機構
50Lと同構成であり、右の規制部材49Rは左の規制
部材49Lと同構成であり、右の揺動機構50Rの回転
軸51の左端部には規制部材把持部材54Rが固着して
あり、この規制部材把持部材54Rが右の規制部材49
Rの基部49aを把持している。
The right rocking mechanism 50R has the same structure as the left rocking mechanism 50L, the right restricting member 49R has the same structure as the left restricting member 49L, and the rotating shaft of the right rocking mechanism 50R is the same. A regulation member gripping member 54R is fixed to the left end portion of 51, and the regulation member gripping member 54R is located on the right regulation member 49.
It holds the R base 49a.

【0029】また、前記ガイドレール23の上部には天
井フレーム60が横架してあり、この天井フレーム60
には昇降用シリンダ61が取り付けてあり、この昇降用
シリンダ61のピストンロッド62が前記装置本体21
の中央支持部27の上面部に連結してある。
Further, a ceiling frame 60 is horizontally installed above the guide rail 23.
An elevating cylinder 61 is attached to the elevating cylinder 61, and a piston rod 62 of the elevating cylinder 61 is attached to the apparatus main body 21.
Is connected to the upper surface portion of the central support portion 27.

【0030】前記ワイヤ浮上り規制装置20の左右の規
制部材49L、49Rは、前記加工ヘッド部1の上方で
且つワーク支持体17の左、右方に位置するように配置
されている。また、前記加工ヘッド1の下方にはスラリ
(切削用液)を受ける受液タンク63が配設してある。
そして、この受液タンク63から左右の規制部材49
L、49Rまでの間には、スラリの供給回路64が配し
てある。
The left and right restricting members 49L, 49R of the wire floating restricting device 20 are arranged above the machining head 1 and to the left and right of the work support 17. A liquid receiving tank 63 for receiving a slurry (cutting liquid) is arranged below the processing head 1.
Then, from the liquid receiving tank 63 to the left and right regulating members 49
A slurry supply circuit 64 is arranged between L and 49R.

【0031】この供給回路64は、スラリ供給ポンプ6
6と、3位置電磁切換弁67と、スラリタンク70とを
備えている。そして、スラリ供給ポンプ66の吐出側は
管路72を通り3位置電磁切換弁67を介して管路73
または74に選択的に接続される。そして、この管路7
3、74はそれぞれ規制部材49L、49Rの流入口5
7に接続してある。また、前記受液タンク63は管路7
5を介してタンク70に接続してある。
The supply circuit 64 includes a slurry supply pump 6
A 6-position, 3-position electromagnetic switching valve 67, and a slurry tank 70 are provided. The discharge side of the slurry supply pump 66 passes through the pipe line 72 and the pipe line 73 through the three-position electromagnetic switching valve 67.
Alternatively, it is selectively connected to 74. And this conduit 7
3 and 74 are inlets 5 of the regulating members 49L and 49R, respectively.
It is connected to 7. Further, the liquid receiving tank 63 is connected to the pipe 7
It is connected to the tank 70 via 5.

【0032】次に、上記のように構成されたワイヤソー
装置の作動を説明する。ワーク切断時、まず第1、第2
の回転モータ13、14及び駆動モータ15が駆動され
る。この第1の回転モータ13の回転駆動により第1の
ワイヤリール10がワイヤ8を繰出し、第2の回転モー
タ14の回転駆動により第2のワイヤリール11がワイ
ヤ8を巻き取る。また、前記駆動モータ15の回転駆動
により、これの出力軸15aに固着された加工ヘッドロ
ーラ7が実線矢印の方向に回転する。したがって、加工
ヘッドローラ5と6に巻回されたワイヤ切断部9を形成
する前記ワイヤ8は実線矢印の左方向に走行する。
Next, the operation of the wire saw device configured as described above will be described. When cutting a work, first, second
The rotary motors 13 and 14 and the drive motor 15 are driven. The first wire reel 10 feeds the wire 8 by the rotation drive of the first rotation motor 13, and the second wire reel 11 winds the wire 8 by the rotation drive of the second rotation motor 14. Further, due to the rotational drive of the drive motor 15, the processing head roller 7 fixed to the output shaft 15a of the drive motor 15 rotates in the direction of the solid line arrow. Therefore, the wire 8 forming the wire cutting portion 9 wound around the processing head rollers 5 and 6 runs in the left direction of the solid arrow.

【0033】第1、第2の回転モータ13、14の回転
方向は、一定の時間T1で正回転し、それに続く時間T
2で反転して逆転方向に回転し、これを繰り返してい
く。
The rotation directions of the first and second rotary motors 13 and 14 are positively rotated at a constant time T1 and the subsequent time T.
It reverses at 2, rotates in the reverse direction, and repeats this.

【0034】このようにして、前記ワイヤ8は直線方向
に往復走行し、その往復運動の過程でワークWに複数の
平行な切り込みを形成していく。この切り込みが進行す
る過程で、前記ワーク送りモータの駆動によりワーク支
持体17が少しずつ下降して走行状態のワイヤ8に対し
てワークWを所定の力で押圧する。
In this way, the wire 8 reciprocates in the linear direction, and in the course of the reciprocating motion, a plurality of parallel cuts are formed in the work W. During the progress of the cutting, the work supporting motor 17 is driven to gradually lower the work supporting body 17 to press the work W against the wire 8 in the traveling state with a predetermined force.

【0035】前記ワイヤ浮上り規制装置20において
は、非作用時には左右の規制部材49L、49Rは図3
の仮想線ハに示すように直立の状態で待機している。そ
して、切断時は左、右の担持体41、42の揺動機構5
0L、50Rのラック作動シリンダ52が伸長作動して
ラック部材53でピニオン51を回転し、回転軸47を
介して左右の規制部材49L、49Rを回動して図3の
仮想線イに示すように水平状態にして、左右の規制部材
49L、49Rを、前記ワイヤ8のワーク切削部分の上
方すなわちスラリ供給位置に位置させる。また、このと
き一対の規制部材49L、49Rは図5の(1)に示す
ように前記駆動手段によりワークのワイヤ出入り点近傍
位置の上方にに対応するように移動される。
In the wire floating restricting device 20, the left and right restricting members 49L and 49R are set to the positions shown in FIG.
Standing upright as indicated by the virtual line c. Then, at the time of cutting, the swinging mechanism 5 for the left and right carriers 41, 42
The rack operating cylinders 52 of 0L and 50R are extended to rotate the pinion 51 by the rack member 53, and the left and right restricting members 49L and 49R are rotated through the rotation shaft 47, as shown by a virtual line a in FIG. In the horizontal state, the left and right regulating members 49L and 49R are positioned above the work cutting portion of the wire 8, that is, at the slurry supply position. At this time, the pair of regulating members 49L and 49R are moved by the driving means so as to correspond to above the position near the wire entry / exit point of the work, as shown in (1) of FIG.

【0036】そして、ポンプ66が作動されて、タンク
70内のスラリが管路72を介して3位置電磁切換弁6
7を経て管路74または73に選択的に切換えられて左
右の規制部材49Rまたは49Lのスラリ流入口57に
流入する。そして、このスラリは内側円筒体55内から
スリット状の開口部58を経て内側円筒体55と外側円
筒体56との間に噴出し、この外側円筒体56のスリッ
ト状の流出口59から流出して、前記ワイヤ8のワーク
切削部分にスラリを供給する。
Then, the pump 66 is operated, and the slurry in the tank 70 is transferred through the pipe line 72 to the three-position electromagnetic switching valve 6
After passing through 7, it is selectively switched to the pipeline 74 or 73 and flows into the slurry inlet 57 of the left and right regulating members 49R or 49L. Then, this slurry is ejected from inside the inner cylindrical body 55 through the slit-shaped opening 58 between the inner cylindrical body 55 and the outer cylindrical body 56, and flows out from the slit-shaped outlet 59 of the outer cylindrical body 56. The slurry is supplied to the work cutting portion of the wire 8.

【0037】また、第1、第2の回転モータ13、14
の回転方向は一定の時間T1で正回転し、それに続く時
間T2で反転して逆転方向に回転しこの往復動を繰返し
ながら前記ワイヤ8は一方向に除々に巻き取られてい
く。3位置電磁切換弁67はワイヤ8の走行方向に合わ
せてワイヤ8のワークWに対する上流側の規制部材にス
ラリを供給するように切換えられる。そして、このスラ
リは規制部材49Rまたは49Lの内側円筒体55内か
らスリット状の開口部58を経て内側円筒体55と外側
円筒体56との間に噴出し、この外側円筒体56のスリ
ット状の流出口59から流出して、前記ワイヤ8のワー
ク切削部分にスラリを供給する。このときスラリの供給
は、ワイヤ8がワークに切込む側の規制部材から供給す
ればよい。ワーク切込み移動とともに一対の規制部材4
9L、49Rはワーク外形に従って常にワークWに対し
ワイヤ8の出入り点近傍位置に対応するように移動され
る。よって、効率よくスラリの供給が行われる。
Further, the first and second rotary motors 13 and 14
The direction of rotation of the wire 8 is forwardly rotated at a constant time T1, then reversed at time T2 and rotated in the reverse direction, and the wire 8 is gradually wound in one direction while repeating this reciprocating motion. The three-position electromagnetic switching valve 67 is switched so as to supply the slurry to the regulating member on the upstream side of the wire 8 with respect to the workpiece W in accordance with the traveling direction of the wire 8. Then, this slurry is ejected from inside the inner cylindrical body 55 of the regulating member 49R or 49L through the slit-shaped opening 58 between the inner cylindrical body 55 and the outer cylindrical body 56, and the outer cylindrical body 56 is slit-shaped. The slurry flows out from the outflow port 59 and is supplied to the work cutting portion of the wire 8. At this time, the slurry may be supplied from the regulating member on the side where the wire 8 cuts into the work. Along with the work cutting movement, a pair of regulating members 4
9L and 49R are always moved with respect to the work W so as to correspond to the position near the entry / exit point of the wire 8 with respect to the work W. Therefore, the slurry is efficiently supplied.

【0038】上記のようにしてワークWが切断されて、
図5の(2)に示すようにワイヤ8がワークWを完全に
切断し上方の固着用のカーボン材16まで切込むと、こ
の状態で、3位置電磁切換弁67が切り換わり、スラリ
の供給が完全に停止にされる。
The work W is cut as described above,
As shown in (2) of FIG. 5, when the wire 8 completely cuts the work W and cuts up to the upper fixing carbon material 16, the three-position electromagnetic switching valve 67 switches in this state, and the slurry is supplied. Is completely stopped.

【0039】次に、ワークWの引き抜きに入る。前記昇
降用シリンダ61が伸長作動して、左右の規制部材49
L、49Rが水平状態のまま下降して規制位置ロまで下
降する。この規制位置ロで、規制部材49L、49Rの
ワイヤ接触部材48が前記ワイヤ8のワーク切断部9の
ワークWを挟んだ左右位置においてワークWに対しワイ
ヤ出入り点近傍位置に接触または非接触状態で対応され
る。この状態で前記ワーク送りモータが逆駆動されて前
記ワーク支持体17が上昇を始め、前記ワークWの引き
抜きを開始する。この場合、ワイヤ8が持ち上がろうと
すると、規制部材49L、49Rのワイヤ接触部材48
にワイヤ8が接触または押さえられて、ワイヤ8がワー
クWの移動に随伴することが防止される。よってワイヤ
8がワークWの切断箇所に引っ掛かるようなことなく、
ワークWが引き抜かれる。
Next, the work W is extracted. The elevating cylinder 61 is extended to operate the left and right regulating members 49.
L and 49R descend in the horizontal state to the restricting position B. At this restriction position B, the wire contact members 48 of the restriction members 49L and 49R are in contact or non-contact with the work W at positions near the wire entry / exit points at the left and right positions of the work cutting portion 9 of the wire 8 sandwiching the work W. Corresponding. In this state, the work feed motor is reversely driven, the work support 17 starts to move upward, and the work W is pulled out. In this case, when the wire 8 tries to be lifted, the wire contact member 48 of the restriction members 49L and 49R.
The wire 8 is prevented from coming into contact with or being pressed by the wire 8, and the wire 8 is prevented from accompanying the movement of the work W. Therefore, the wire 8 does not get caught in the cut portion of the work W,
The work W is pulled out.

【0040】また、前記ワークWは、その断面が例えば
円形であるために、このワークWが上方に引き抜かれる
ことにより、左右の規制部材49L、49Rの水平方向
の位置を変えなければ、これらの規制部材49L、49
RにワークWが干渉する場合が生じるし、また、規制部
材49L、49Rがワイヤ8をワークWの出入り点の近
傍位置で押さえておくことが引き抜き上好ましい。
Further, since the work W has a circular cross section, for example, if the work W is pulled upward and the horizontal positions of the left and right restricting members 49L and 49R are not changed, these work W will not be changed. Regulation member 49L, 49
There is a case where the work W interferes with R, and it is preferable for pulling out that the restriction members 49L and 49R hold the wire 8 at a position near the entry / exit point of the work W.

【0041】したがって、前記の回転駆動モータ35を
駆動して、左右のボールスクリュ軸33、37を回転し
て左右の担持体41、42を左右に移動させて左右の規
制部材49L、49Rを互いに接離する方向に同時に移
動する。左右の規制部材49L、49Rの移動は、図6
(1)、(2)、(3)、(4)に示すように前記ワー
クWの引き抜き(上昇)に同期し、このワークWの左右
の周面にそれぞれ一定の距離をおいて沿うよう制御され
る。
Therefore, the rotary drive motor 35 is driven to rotate the left and right ball screw shafts 33 and 37 to move the left and right support members 41 and 42 to the left and right, so that the left and right regulating members 49L and 49R are mutually moved. Moves in the direction of contact and separation at the same time. The movement of the left and right regulating members 49L and 49R is as shown in FIG.
As shown in (1), (2), (3) and (4), control is performed in synchronization with the pulling out (raising) of the work W, and along the left and right peripheral surfaces of the work W with a certain distance. To be done.

【0042】上記の実施例によれば、前記ワイヤ8によ
る前記ワークWの切断後に、このワークWの引き抜き側
で前記ワイヤ8の前記ワークWへの出入り点近傍付近で
左右の規制部材49L、49Rにて、ワイヤ8の浮上り
を押えることにより、前記ワイヤ8がワークWに随伴し
て持ち上がるようなことなく、このワークWをスムーズ
に引き抜くことができて、引っ掛かりの点検や手直し等
の作業が不要になり、ワイヤ飛びも防止され、作業性及
び生産性を向上させることができる。
According to the above-described embodiment, after the work W is cut by the wire 8, the left and right regulating members 49L, 49R near the point where the wire 8 enters and exits the work W on the pulling side of the work W. By pressing the floating of the wire 8, the wire W can be smoothly pulled out without the wire 8 being lifted along with the work W, and work such as catching and reworking can be performed. It becomes unnecessary, wire jump is prevented, and workability and productivity can be improved.

【0043】なお、前記実施例では、規制部材49L、
49Rはスラリ供給手段を含ませるために円筒状に形成
したが、スラリ供給手段を兼用させない場合には角片状
或いは板状のものを用いることもできる。
In the above embodiment, the regulating member 49L,
49R is formed in a cylindrical shape so as to include the slurry supply means, but if it is not used also as the slurry supply means, a rectangular piece or a plate shape can be used.

【0044】[0044]

【発明の効果】以上説明したように、本発明にあって
は、ワーク引き抜き時、規制手段を構成する一対の規制
部材によりワークのワイヤ出入り点近傍位置にてワイヤ
を押え込んでワイヤの浮上りが規制されるため、前記ワ
イヤがワークの切断箇所に引っ掛かってワークに随伴し
て持ち上がってしまうことがなく、スムーズにワークを
引き抜くことができて、引っ掛かりの点検や手直し、ワ
イヤ飛びの修正等の作業が不要になり、作業性および生
産性を向上させることができる。
As described above, according to the present invention, when the work is pulled out, the wire is lifted by pressing the wire at a position near the wire entry / exit point of the work by the pair of restricting members constituting the restricting means. Since the wire is regulated, the wire will not be caught at the cutting point of the work and will not be lifted up with the work, and the work can be pulled out smoothly, and the work such as catching and reworking, wire jump correction, etc. Work becomes unnecessary, and workability and productivity can be improved.

【0045】また、前記規制部材はワーク引き抜き時の
ワイヤの押えを行うのみならず、ワーク切断時にはスラ
リ供給手段として作用し、別にスラリ供給装置を設ける
必要がなく構造が簡単になり、しかも、駆動手段によっ
て規制部材はワーク外形に応じてワークの移動ととも
に、常にワークのワイヤの出入り点近傍位置に移動さ
れ、ワイヤ押えおよびスラリ供給を適正な位置で効率よ
く行なうことができる。
Further, the regulating member not only holds down the wire when pulling out the work, but also acts as a slurry supplying means when cutting the work, and it is not necessary to provide a separate slurry supplying device, which simplifies the structure and further drives the drive. By the means, the regulating member is always moved to a position near the wire entry / exit point of the work in accordance with the movement of the work, so that the wire pressing and the slurry supply can be efficiently performed at an appropriate position.

【0046】また、本発明に係わるワーク引抜き方法に
あっては、ワーク引き抜き時、規制手段を構成する一対
の規制部材によりワークのワイヤ出入り点近傍位置にて
ワイヤを押え込んでワイヤの浮上りを規制することによ
り、ワーク引き抜き時にワイヤの浮上りが規制されるた
め、前記ワイヤがワークの切断箇所に引っ掛かってワー
クに随伴して持ち上がってしまうことがなく、スムーズ
にワークを引き抜くことができて、引っ掛かりの点検や
手直し、ワイヤ飛びの修正等の作業が不要になり、作業
性および生産性を向上させることができる。
Further, in the work drawing method according to the present invention, when the work is drawn, the wire is pushed up at a position near the wire entry / exit point of the work by the pair of restricting members constituting the restricting means to lift the wire. By regulating, since the lifting of the wire is regulated at the time of pulling out the work, the wire does not catch on the cutting point of the work and is not lifted up with the work, and the work can be smoothly pulled out. There is no need to perform work such as checking for hooks, repairing them, and correcting wire jumps, thus improving workability and productivity.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係わるワイヤソー装置の一部省略した
概略的な斜視図である。
FIG. 1 is a schematic perspective view of a wire saw device according to the present invention with a part thereof omitted.

【図2】(1)は同ワイヤソー装置におけるワイヤ浮上
り規制装置の一部省略した平面図である。(2)は
(1)のA−A線に沿う断面図である。
FIG. 2 (1) is a plan view in which a part of the wire floating restricting device in the wire saw device is omitted. (2) is a sectional view taken along the line AA of (1).

【図3】図2のB−B線に沿う断面図である。3 is a cross-sectional view taken along the line BB of FIG.

【図4】(1)は図2の(1)のC−C線に沿うワイヤ
浮上り規制装置の規制部材の断面図である。(2)は図
4の(1)のD−D線に沿う断面図である。
4 (1) is a cross-sectional view of a restricting member of the wire floating restricting device taken along line CC of FIG. 2 (1). (2) is a cross-sectional view taken along the line D-D in (1) of FIG. 4.

【図5】(1)はワークの切断前の状態の説明図であ
る。(2)はワークの切断後の状態の説明図である。
FIG. 5 (1) is an explanatory view of a state before cutting the work. (2) is an explanatory view of a state after cutting the work.

【図6】(1)、(2)、(3)、(4)はワークの引
き抜きと規制部材との関係の説明図である。
6 (1), (2), (3), and (4) are explanatory views of the relationship between the drawing of the work and the regulating member.

【図7】従来のワイヤソー装置におけるワークの切断後
のワーク引き抜き状態の説明図である。
FIG. 7 is an explanatory diagram of a work drawing state after cutting the work in the conventional wire saw device.

【符号の説明】[Explanation of symbols]

8 ワイヤ 20 ワイヤ浮上り規制装置 49L、49R 規制部材 W ワーク 5、6、7 加工ヘッドローラ 10、11 ワイヤリール 55、56 スラリ供給手段を構成する内、外側円筒体 57、59 スラリ供給手段を構成するスラリ流入口と
スラリ流出口 48 ワイヤ接触部材 48a 開口 33、37 駆動手段を構成するボールスクリュ軸 35 駆動手段を構成する回転駆動モータ 43、46 駆動手段を構成するナット部材
8 wire 20 wire lifting regulation device 49L, 49R regulation member W work 5, 6, 7 processing head roller 10, 11 wire reel 55, 56 forming inner part of slurry supplying means 57, 59 forming outer part of slurry supplying means Slurry inlet and outlet 48 wire contact member 48a openings 33, 37 ball screw shaft 35 constituting drive means rotary drive motors 43, 46 constituting drive means nut member constituting drive means

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】 複数の加工ヘッドローラにワイヤを所定
のピッチで巻き付けて、このワイヤの一方の端末側を一
方のワイヤリールに、前記ワイヤの他方の端末側を他方
のワイヤリールにそれぞれ捲回し、前記ワイヤに所定の
張力を与えつつ高速走行させてワークの切断を行うワイ
ヤソー装置において、前記ワイヤによるワークの切断後
ワークの引き抜き時に、ワークのワイヤ出入り点近傍位
置においてワイヤ列全域にわたってワイヤの浮上りを規
制する規制手段を備えたことを特徴とするワイヤソー装
置。
1. A wire is wound around a plurality of processing head rollers at a predetermined pitch, and one end side of the wire is wound around one wire reel, and the other end side of the wire is wound around the other wire reel. In a wire saw device that cuts a work by traveling at high speed while applying a predetermined tension to the wire, when the work is pulled out after cutting the work by the wire, the wire floats over the entire wire row at a position near the wire entry / exit point of the work. A wire saw device, which is provided with a regulation means for regulating the movement.
【請求項2】 前記規制手段は、前記ワークに対するワ
イヤの出入り点近傍位置に対応される一対の規制部材を
有する請求項1記載のワイヤソー装置。
2. The wire saw device according to claim 1, wherein the restricting means includes a pair of restricting members corresponding to positions near a wire entry / exit point with respect to the work.
【請求項3】 複数の加工ヘッドローラにワイヤを所定
のピッチで巻き付けて、このワイヤの一方の端末側を一
方のワイヤリールに、前記ワイヤの他方の端末側を他方
のワイヤリールにそれぞれ捲回し、前記ワイヤに所定の
張力を与えつつ高速走行させてワークの切断を行うワイ
ヤソー装置において、前記ワイヤによるワークの切断後
ワーク引き抜き時に、ワークのワイヤ出入り点近傍位置
においてワイヤ列全域にわたってワイヤの浮上りを規制
する規制手段を備え、この規制手段は前記ワイヤによる
ワーク切断時にスラリ供給位置に移動してワイヤに対し
スラリを供給するスラリ供給手段を有することを特徴と
するワイヤソー装置。
3. A wire is wound around a plurality of processing head rollers at a predetermined pitch, and one end side of the wire is wound around one wire reel, and the other end side of the wire is wound around the other wire reel. In a wire saw device that cuts a work by traveling at high speed while applying a predetermined tension to the wire, when the work is pulled out after cutting the work by the wire, the wire floats over the entire wire row at a position near the wire entry / exit point of the work. The wire saw device is characterized in that the wire saw device has a regulating means for regulating the wire, and the regulating means has a slurry supplying means which moves to a slurry supplying position when the work is cut by the wire and supplies the slurry to the wire.
【請求項4】 前記規制手段は前記ワークに対するワイ
ヤの出入り点近傍位置に対応される一対の規制部材を有
し、この規制部材にスラリ流入口を設けると共に、前記
規制部材の前記ワイヤとの対向側にスラリ流出口を設
け、さらに、前記規制部材の前記ワイヤとの対向側に前
記スラリ流出口と連通する開口を有するワイヤ接触部材
を設けた請求項3記載のワイヤソー装置。
4. The regulating means has a pair of regulating members corresponding to positions near the entry / exit point of the wire with respect to the work, and a slurry inlet is provided in the regulating member, and the regulating member opposes the wire. 4. The wire saw device according to claim 3, wherein a slurry outlet is provided on a side, and a wire contact member having an opening communicating with the slurry outlet is provided on a side of the regulating member facing the wire.
【請求項5】 前記規制部材が前記ワイヤの浮上りを規
制する規制位置と退避位置とに移動可能である請求項2
または請求項4記載のワイヤソー装置。
5. The restricting member is movable to a restricting position for restricting lifting of the wire and a retracted position.
Alternatively, the wire saw device according to claim 4.
【請求項6】 前記規制部材がワイヤの走行方向に移動
可能である請求項2または請求項4または請求項5記載
のワイヤソー装置。
6. The wire saw device according to claim 2, 4, or 5, wherein the restricting member is movable in a wire traveling direction.
【請求項7】 前記規制手段は、ワーク外形に応じて前
記規制部材がワークの移動とともに常にワークのワイヤ
出入り点近傍位置にくるように移動させる駆動手段を有
する請求項2または請求項4または請求項5または請求
項6記載のワイヤソー装置。
7. The regulating means has a driving means for moving the regulating member so as to always come to a position near the wire entry / exit point of the workpiece as the workpiece moves in accordance with the outer shape of the workpiece. The wire saw device according to claim 5 or 6.
【請求項8】 ワーク引き抜き時、規制手段によりワー
クのワイヤ出入り点近傍位置にてワイヤを押え込んでワ
イヤの浮上りを規制するようにしたことを特徴とするワ
ーク引抜き方法。
8. A method of pulling out a work, wherein when pulling out the work, the wire is restrained by a restraining means at a position near the wire entry / exit point of the work to restrain the wire from rising.
【請求項9】 規制手段が一対の規制部材である請求項
8記載のワーク引抜き方法。
9. The work extracting method according to claim 8, wherein the regulating means is a pair of regulating members.
【請求項10】 前記規制部材を、ワーク外形に応じて
ワークの移動とともに常にワークのワイヤ出入り点近傍
位置にくるように移動させるようにした請求項9記載の
ワーク引抜き方法。
10. The work extracting method according to claim 9, wherein the restricting member is moved so as to always come to a position near the wire entry / exit point of the work as the work moves according to the outer shape of the work.
JP14893794A 1994-06-30 1994-06-30 Wire saw device and work extraction method Expired - Fee Related JP3083232B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14893794A JP3083232B2 (en) 1994-06-30 1994-06-30 Wire saw device and work extraction method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14893794A JP3083232B2 (en) 1994-06-30 1994-06-30 Wire saw device and work extraction method

Publications (2)

Publication Number Publication Date
JPH0811047A true JPH0811047A (en) 1996-01-16
JP3083232B2 JP3083232B2 (en) 2000-09-04

Family

ID=15464000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14893794A Expired - Fee Related JP3083232B2 (en) 1994-06-30 1994-06-30 Wire saw device and work extraction method

Country Status (1)

Country Link
JP (1) JP3083232B2 (en)

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