JPH08107313A - Surface mount piezoelectric oscillator and its manufacture - Google Patents

Surface mount piezoelectric oscillator and its manufacture

Info

Publication number
JPH08107313A
JPH08107313A JP27035894A JP27035894A JPH08107313A JP H08107313 A JPH08107313 A JP H08107313A JP 27035894 A JP27035894 A JP 27035894A JP 27035894 A JP27035894 A JP 27035894A JP H08107313 A JPH08107313 A JP H08107313A
Authority
JP
Japan
Prior art keywords
base
cap
recess
piezoelectric oscillator
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27035894A
Other languages
Japanese (ja)
Other versions
JP3391118B2 (en
Inventor
Masatsugu Hirano
雅嗣 平野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daishinku Corp
Original Assignee
Daishinku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daishinku Corp filed Critical Daishinku Corp
Priority to JP27035894A priority Critical patent/JP3391118B2/en
Publication of JPH08107313A publication Critical patent/JPH08107313A/en
Application granted granted Critical
Publication of JP3391118B2 publication Critical patent/JP3391118B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE: To provide a surface mount piezoelectric oscillator and its manufacture method suitable for a low height and with less manufacture dispersion in which the electric characteristic of circuit components or the like is not deteriorated or the connecting state to the components is hardly deteriorated. CONSTITUTION: A required electrode wiring is made inside a substrate 2 on which a crystal vibration plate with exciting electrodes is mounted, and part of the wiring is exposed as an electrode pad. A recessed part 24 is provided on the bottom side of the substrate 2 and a recessed part 25 for mounting an IC chip whose depth is deeper than that of the part 24 is provided at the middle. The IC chip 4 is contained in the recessed part 25, connected to electrode pads 24a-24d of the substrate 2 through the bonding wire, a resin member is filled in the recessed part 25 and the IC chip or the like is embedded. Furthermore, the cap has an inverted recessed part to secure a vibration space and the outer circumferential size is smaller than the outer circumferential size of the substrate 2 and then a flange 20 is formed on the substrate 2.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は小型の表面実装型圧電発
振器に関し、特に低背化を考慮するとともに、製造時の
熱対策を考慮し、また製造バラツキの少ない表面実装型
圧電発振器およびこの表面実装型圧電発振器の製造方法
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a small surface mount type piezoelectric oscillator, and more particularly, considering a reduction in height, taking measures against heat at the time of manufacture, and a surface mount type piezoelectric oscillator with less manufacturing variation, and a surface mount type piezoelectric oscillator. The present invention relates to a method of manufacturing a mounted piezoelectric oscillator.

【0002】[0002]

【従来の技術】電子機器の小型化に伴い、水晶振動子等
の圧電振動子を用いた圧電発振器はその全高が低くかつ
プリント配線基板上に高密度に実装されることが要求さ
れ、しかもその実装は自動機によって行うことが要求さ
れている。この要求に応えるべく電子部品を薄型でリー
ドレス化したチップタイプとする動きが急となってい
た。図8に示すようなチップタイプの表面実装型水晶発
振器9は、金属製のキャンを用いたハーメチックシール
した水晶振動子等の電子部品に較べて、全高を始めとす
る体積を小さくすることができる。図8において、表面
実装型水晶発振器9は、水晶振動板搭載部9aとICチ
ップ収納部9bを有するセラミック製のパッケージ92
内に、励振電極形成されたATカットの水晶振動板91
と、ICチップ等の回路部品94を収納して構成され、
セラミック製のキャップ93をこれら水晶振動板等に被
覆し、ガラス等の封止材で気密封止を行っていた。IC
チップには、水晶振動板以外の電子部品(インバータ、
コンデンサ、帰還抵抗等)がIC化されており、最近に
おいては水晶振動板とICチップのみで圧電発振回路を
構成している場合が多い。このような場合、図8に示す
ようにICチップをパッケージに収納し、ボンディング
ワイヤーWでパッケージに形成された引出電極と電気的
に接続していた。
2. Description of the Related Art With the miniaturization of electronic equipment, a piezoelectric oscillator using a piezoelectric resonator such as a crystal resonator is required to have a low overall height and be mounted at a high density on a printed wiring board. The mounting is required to be done by an automatic machine. In order to respond to this demand, there has been a rapid movement to use a chip type in which electronic components are thin and leadless. The chip-type surface-mount type crystal oscillator 9 as shown in FIG. 8 can be made smaller in volume including the total height as compared with electronic parts such as a hermetically sealed crystal resonator using a metal can. . In FIG. 8, the surface mount crystal oscillator 9 is a ceramic package 92 having a crystal diaphragm mounting portion 9a and an IC chip storage portion 9b.
AT-cut quartz diaphragm 91 with excitation electrodes formed therein
And a circuit component 94 such as an IC chip is housed,
The ceramic cap 93 is covered with these crystal diaphragms, etc., and hermetically sealed with a sealing material such as glass. IC
Electronic components (inverter,
Capacitors, feedback resistors, etc.) are integrated into an IC, and recently, a piezoelectric oscillation circuit is often composed of only a crystal diaphragm and an IC chip. In such a case, the IC chip was housed in a package as shown in FIG. 8 and electrically connected to the extraction electrode formed on the package by a bonding wire W.

【0003】[0003]

【発明が解決しようとする課題】上述のガラスを用いた
気密封止は、比較的気密性が高く、電極等に有害なガス
の発生が少ない等の利点を有している。しかしながらガ
ラス材は接合材として用いる温度が比較的高く、低融点
ガラスを用いたとしても400゜Cで1〜2時間程度の
処理温度、時間が必要であった。一方、ICチップはこ
のような環境での使用は想定していない場合が多く、高
温処理を行った場合、ICチップに電気的特性の変化が
生じることがあった。また、ICチップの例えばアルミ
ニウム電極と電気的に接続される金のボンディングワイ
ヤーの接続部分Cにおいて、高温の影響でアルミニウム
と金の合金層が形成されることがあり、このような合金
層が形成されると接続部分が機械的にもろくなることが
あり、接続の信頼性を低下させていた。また、樹脂によ
る封止、半田による封止においてもICチップの電極に
有害なガスが発生することがあった。さらに、ボンディ
ングワイヤーの撓み部分が、水晶発振器の高さ方向に延
びているために、水晶振動板の励振電極との接触を避け
る目的で水晶振動板とICチップ等との間隔をある程度
確保する必要があった。このような構成は低背化する際
の障害になっていた。
The above-mentioned hermetic sealing using glass has advantages such as relatively high hermeticity and less generation of harmful gas to electrodes and the like. However, the glass material has a relatively high temperature used as a bonding material, and even if a low-melting glass is used, a processing temperature and time of about 1 to 2 hours at 400 ° C. are required. On the other hand, the IC chip is often not expected to be used in such an environment, and when the high temperature treatment is performed, the electric property of the IC chip may change. Further, an alloy layer of aluminum and gold may be formed under the influence of high temperature at the connecting portion C of the gold bonding wire that is electrically connected to the aluminum electrode of the IC chip, and such an alloy layer is formed. If so, the connection portion may be mechanically fragile, which reduces the reliability of the connection. In addition, harmful gas may be generated in the electrodes of the IC chip even when sealing with resin or solder. Further, since the bending portion of the bonding wire extends in the height direction of the crystal oscillator, it is necessary to secure a certain distance between the crystal diaphragm and the IC chip or the like in order to avoid contact with the excitation electrode of the crystal diaphragm. was there. Such a configuration has been an obstacle in reducing the height.

【0004】このような問題点を解決するために、先に
同一出願人が図7に示すような表面実装型圧電発振器8
を提案した。すなわち、圧電振動板81をキャップ83
にて基台82の上部に気密封止し、IC等の他の回路部
品84は基台の下面に設けられた凹部に収納し、樹脂材
85の充填により埋設される構成の表面実装型圧電発振
器である。このような構成の表面実装型圧電発振器は、
圧電振動板の室とIC等の回路素子の室が空間的に分離
され、圧電振動板の気密封止と他の回路部品の搭載を別
個で行うことができる。よって、回路素子等の電気的特
性の悪化させず、あるいは素子との接続状態を悪化させ
にくくするとともに、低背化に適した表面実装型圧電発
振器を得ることができた。
In order to solve such a problem, the same applicant previously proposed the surface mount type piezoelectric oscillator 8 as shown in FIG.
Suggested. That is, the piezoelectric vibrating plate 81 is attached to the cap 83.
The surface mount piezoelectric device is hermetically sealed on the upper portion of the base 82, and other circuit components 84 such as ICs are housed in a recess provided on the lower surface of the base and embedded by filling with a resin material 85. It is an oscillator. The surface-mounted piezoelectric oscillator with such a configuration is
The chamber of the piezoelectric diaphragm and the chamber of the circuit element such as an IC are spatially separated, so that the piezoelectric diaphragm can be hermetically sealed and other circuit parts can be mounted separately. Therefore, it is possible to obtain a surface-mounted piezoelectric oscillator that does not deteriorate the electrical characteristics of the circuit element or the like or makes it difficult to deteriorate the connection state with the element and that is suitable for reducing the height.

【0005】このような表面実装型圧電発振器の製造に
おいて、基台の凹部に発振回路を構成する回路素子を収
納し、必要な電気的接続を行う工程で、通常、図6に示
すようにキャリアテープT上に凹部が上方に向くように
設置され、これら製造が進められる。しかしながら、基
台82とキャップ83を接合するガラス等の接合材Sの
量、粘性が異なる等の原因により、接合材の接合時の厚
みが異なることがある。このような場合、図6中の高低
差hで示すように基台裏面の回路部品の搭載部分の高さ
が異なることがあり、自動機等を用いた製造において、
ワイヤーボンディングの接続不良等の製造不良の原因と
なることがあった。
In the production of such a surface-mounted piezoelectric oscillator, a circuit element forming an oscillation circuit is housed in a recess of a base and a necessary electrical connection is made. Usually, as shown in FIG. The recesses are installed on the tape T so that the recesses face upward, and the production of these is advanced. However, the thickness of the bonding material at the time of bonding may differ due to the difference in the amount and viscosity of the bonding material S such as glass that bonds the base 82 and the cap 83. In such a case, the height of the circuit component mounting portion on the back surface of the base may be different as indicated by the height difference h in FIG. 6, and in manufacturing using an automatic machine or the like,
This sometimes caused manufacturing defects such as defective connection of wire bonding.

【0006】本発明は上記問題点を解決するためになさ
れたもので、回路素子等の電気的特性の悪化させず、あ
るいは素子との接続状態を悪化させにくくするととも
に、低背化に適し、かつ製造バラツキの少ない表面実装
型圧電発振器およびこの表面実装型圧電発振器の製造方
法を提供することを目的とするものである。
The present invention has been made to solve the above-mentioned problems, and it is suitable for lowering the profile while not deteriorating the electrical characteristics of circuit elements or the like or making the connection state with elements less likely to deteriorate. Moreover, it is an object of the present invention to provide a surface-mounted piezoelectric oscillator with less manufacturing variation and a method for manufacturing the surface-mounted piezoelectric oscillator.

【0007】[0007]

【課題を解決するための手段】本発明による表面実装型
圧電発振器は、セラミックスからなり、必要な電極配線
を施すとともに少なくとも下面には厚み方向に凹部を形
成した基台と、この基台の上部に電気的機械的に接続さ
れる励振電極形成された圧電振動板と、前記基台上部の
圧電振動板を被覆し、接合材により気密的に封止される
キャップと、前記基台の凹部に収納され必要な電気的接
続がなされた発振回路を構成する回路素子と、前記凹部
に充填された絶縁性の樹脂材とからなる表面実装型圧電
発振器において、キャップの外周寸法より基台の外周寸
法を大きくすることにより、基台の外周部分にフランジ
部を設けたことを特徴とする。また、この基台外周上面
の複数箇所あるいは全周にわたって切り欠きを設けても
よい。
A surface mount type piezoelectric oscillator according to the present invention is made of ceramics, is provided with a necessary electrode wiring, and has a base having a recess in at least a lower surface in a thickness direction, and an upper portion of the base. A piezoelectric vibrating plate on which an excitation electrode is formed that is electrically and mechanically connected to the base plate, a cap that covers the piezoelectric vibrating plate above the base and is hermetically sealed by a bonding material, and a recess in the base. In a surface-mounted piezoelectric oscillator consisting of a circuit element that constitutes an oscillation circuit that is housed and required electrical connection, and an insulating resin material filled in the recess, in the peripheral dimension of the base rather than the outer dimension of the cap Is increased to provide a flange portion on the outer peripheral portion of the base. Further, notches may be provided at a plurality of positions on the upper surface of the outer circumference of the base or over the entire circumference.

【0008】また、このような表面実装型圧電発振器を
製造する方法は、セラミックスからなり、必要な電極配
線を施すとともに少なくとも下面には厚み方向に凹部を
形成した基台を用意し、この基台の上部に励振電極形成
された圧電振動板を電気的機械的に接続する工程と、前
記基台の上部に接合材により気密的にキャップを接合す
ることにより、圧電振動板等を気密的に封止する工程
と、前記キャップの外周形状に対応した複数の貫通孔を
有するキャリアテープに、基台の下面が上方に向くよう
前記キャップを貫通孔に設置し、前記フランジ部あるい
は切り欠きでこの基台を支持する工程と、その後前記基
台の下面の凹部に発振回路を構成する回路素子を収納
し、必要な電気的接続を行う工程と、前記回路素子を収
納した前記凹部に絶縁性の樹脂材を充填する工程とから
なることを特徴とする。
Further, the method of manufacturing such a surface mount type piezoelectric oscillator is prepared by providing a base which is made of ceramics and which is provided with necessary electrode wiring and at least a recess is formed in the lower surface in the thickness direction. The step of electrically and mechanically connecting the piezoelectric vibrating plate on which the excitation electrode is formed, and the cap is airtightly bonded to the upper part of the base by a bonding material to hermetically seal the piezoelectric vibrating plate and the like. In the step of stopping and the carrier tape having a plurality of through holes corresponding to the outer peripheral shape of the cap, the cap is installed in the through holes so that the lower surface of the base is directed upward, and the base portion is formed by the flange portion or notch. A step of supporting the table, a step of thereafter storing a circuit element forming an oscillation circuit in a recess on the lower surface of the base and making necessary electrical connections, and an insulating step in the recess storing the circuit element. Characterized by comprising a resin material and a step of filling.

【0009】[0009]

【作用】圧電振動板はキャップにて基台の上部に気密封
止され、IC等の他の回路部品は基台の下面に設けられ
た凹部に収納され、樹脂材の充填により埋設される構成
で、両者が配置される室が空間的に分離される。このよ
うな構成により、圧電振動板の気密封止と他の回路部品
の搭載を別個で行うことができるので、IC等の回路部
品を搭載する前に、例えば比較的高温を必要とするガラ
ス材を接合材として用いて圧電振動板の気密封止を行う
ことができる。IC等の回路部品の搭載は後で行うの
で、IC等の電気的特性の変化、接続部分の劣化の問題
がなくなる。また、気密封止された圧電振動板部分の電
気的特性を調べた後、IC等の回路部品を搭載すること
ができる。調べた電気的特性が所定の規格水準を満たし
ていないものについては、IC等の回路部品を搭載しな
いことにより、未然に不良品の発生を防ぐことができ
る。さらに、このような構成の表面実装型圧電発振器に
おいて、フランジ部を形成しているので、このフランジ
部をキャリアテープに形成された貫通孔の周囲に係止さ
せ、基台裏面の回路部品の搭載等を容易にするととも
に、キャリアテープでキャップを支持していないので、
キャップと基台との接合材の量、粘性が異なる等の原因
により、接合材の接合時の厚みが異なった場合でも、基
台裏面の回路部品の搭載部分の高さが異なることがな
い。
The piezoelectric vibrating plate is hermetically sealed on the upper part of the base with a cap, and other circuit components such as ICs are housed in the recesses provided on the lower surface of the base and are filled with a resin material. Thus, the chambers in which they are placed are spatially separated. With such a configuration, the piezoelectric vibration plate can be hermetically sealed and other circuit components can be separately mounted. Therefore, for example, a glass material that requires a relatively high temperature before the circuit components such as ICs are mounted. Can be used as a bonding material to hermetically seal the piezoelectric diaphragm. Since the circuit components such as the IC are mounted later, there is no problem of changes in the electrical characteristics of the IC or the like and deterioration of the connection portion. Moreover, after examining the electrical characteristics of the hermetically sealed piezoelectric vibrating plate portion, a circuit component such as an IC can be mounted. If the examined electrical characteristics do not satisfy the predetermined standard level, it is possible to prevent the occurrence of defective products by not mounting ICs or other circuit components. Further, in the surface mount piezoelectric oscillator having such a structure, since the flange portion is formed, the flange portion is locked around the through hole formed in the carrier tape to mount the circuit component on the back surface of the base. Etc., and because the cap is not supported by the carrier tape,
Even when the thickness of the bonding material when bonding is different due to the difference in the amount and viscosity of the bonding material between the cap and the base, the height of the circuit component mounting portion on the back surface of the base does not differ.

【0010】また、請求項2項の発明によれば、この基
台外周上面の複数箇所あるいは全周にわたって切り欠き
を設けた構成であるので、この切り欠き部分をキャリア
テープに形成された貫通孔の周囲に係止させ、基台裏面
の回路部品の搭載等を容易にするとともに、この切り欠
き部分には基台とキャップを接合するガラス材の余分が
流れにくい。
Further, according to the invention of claim 2, since the notch is provided at a plurality of positions or the entire circumference of the outer peripheral upper surface of the base, the notch is formed in the through hole formed in the carrier tape. It is easy to mount the circuit parts on the back surface of the base, etc., and the excess glass material for joining the base and the cap does not easily flow into this notch.

【0011】また、請求項3項の発明によれば、基台の
上部に圧電振動板を電気的機械的に接続する工程、前記
基台の上部にガラス材にてキャップを接合することによ
り、圧電振動板等を気密的に封止する工程の後に、基台
の凹部に発振回路を構成する回路素子を収納し、必要な
電気的接続を行い、樹脂材にて埋設処理を行うので、高
温処理の必要なガラス材による気密封止時の熱の影響を
受けることがなくなる。また、前記キャップの外周形状
に対応した複数の貫通孔を有するキャリアテープに、基
台の下面が上方に向くよう前記キャップを貫通設置し、
前記フランジ部あるいは切り欠きでこの基台を支持する
ことにより、基台裏面の回路部品の搭載等を容易にする
とともに、キャリアテープでキャップを支持していない
ので、キャップと基台との接合材の量、粘性が異なる等
の原因により、接合材の接合時の厚みが異なった場合で
も、基台裏面の回路部品の搭載部分の高さが異なること
がない。
According to the invention of claim 3, the step of electrically and mechanically connecting the piezoelectric vibrating plate to the upper part of the base, and the cap being joined to the upper part of the base with a glass material, After the process of hermetically sealing the piezoelectric diaphragm, etc., the circuit elements that make up the oscillation circuit are stored in the recesses of the base, the necessary electrical connections are made, and the embedding process is performed with a resin material, so high temperature It is not affected by heat at the time of hermetically sealing the glass material that needs to be treated. Further, a carrier tape having a plurality of through holes corresponding to the outer peripheral shape of the cap, the cap is penetrated and installed so that the lower surface of the base is directed upward,
By supporting this base with the flange portion or notch, it becomes easy to mount circuit components on the back surface of the base, and since the cap is not supported by the carrier tape, the bonding material between the cap and the base The height of the circuit component mounting portion on the rear surface of the base does not differ even when the thickness of the joining material when joining is different due to factors such as the amount and viscosity of the joining material.

【0012】[0012]

【実施例】次に、本発明について表面実装型の水晶発振
器を例にとり、図面を参照して説明する。 第1の実施例 図1は本発明による第1の実施例を示す表面実装型水晶
発振器の内部断面図であり、図2は図1の構成の表面実
装型水晶発振器をキャリアテープに搭載する状態を示す
斜視図であり、図3は図2のキャリアテープ搭載状態を
示す断面図である。圧電板である水晶振動板1はATカ
ット水晶板を矩形状に形成してなり、厚みすべり振動を
行わしめるようその表裏面の中央部分に励振電極(図示
せず)が形成されている。これら励振電極からは、水晶
振動板1の長手方向一方端に引出電極(図示せず)が導
出されている。水晶振動板1をその上部に搭載する基台
2はセラミックスを積層形成してなり、その内部に必要
な電極配線が施され、その一部が後述する電極パッドと
して露出している。この基台の上部には水晶振動板1を
搭載する電極パッド21,22が形成され、電極パッド
21,22を通じて、水晶振動板1に電気信号が入力さ
れる。また、この基台の側面には一部切り欠かれた電極
導出部2a,2b,2c,2dが設けられ、ここに外部
導出電極が引き出されている。基台の底面には板厚方向
への凹部24が設けられ、電極パッド24a,24b,
24c,24dが形成された凹部24と、この凹部24
の中央部分にさらに深いICチップ搭載用の凹部25が
設けられている。ICチップ4はこの凹部25に収納さ
れ、ICチップ4の電極パッドと前記電極パッド24
a,24b,24c,24dとをボンディングワイヤー
Wで接続された後、樹脂材5がこれら凹部に充填され、
ICチップ等が埋設処理される。なお、キャップはセラ
ミックスからなり、振動空間を確保する逆凹部31を有
する構成となっており、その外周寸法は基台の外周寸法
より小さく設定されおり、これにより基台の外周部分に
はフランジ部20が形成されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings, taking a surface mount type crystal oscillator as an example. First Embodiment FIG. 1 is an internal sectional view of a surface mount type crystal oscillator showing a first embodiment according to the present invention, and FIG. 2 is a state in which the surface mount type crystal oscillator having the configuration of FIG. 1 is mounted on a carrier tape. FIG. 3 is a perspective view showing the state of FIG. 3, and FIG. 3 is a sectional view showing a state where the carrier tape of FIG. 2 is mounted. The quartz crystal vibrating plate 1 which is a piezoelectric plate is formed by forming an AT-cut quartz crystal plate in a rectangular shape, and excitation electrodes (not shown) are formed in the central portions of the front and back surfaces thereof so as to perform thickness shear vibration. From these excitation electrodes, a lead electrode (not shown) is led out to one end in the longitudinal direction of the crystal diaphragm 1. The base 2 on which the crystal diaphragm 1 is mounted is formed by laminating ceramics, and necessary electrode wiring is provided inside the base 2, and a part of it is exposed as an electrode pad described later. Electrode pads 21 and 22 for mounting the crystal diaphragm 1 are formed on the upper part of the base, and electric signals are input to the crystal diaphragm 1 through the electrode pads 21 and 22. Further, electrode lead-out portions 2a, 2b, 2c, 2d, which are partially cut away, are provided on the side surface of the base, and external lead-out electrodes are led out there. A recess 24 in the plate thickness direction is provided on the bottom surface of the base so that the electrode pads 24a, 24b,
A concave portion 24 in which 24c and 24d are formed, and the concave portion 24
A deeper recess 25 for mounting an IC chip is provided in the central portion of. The IC chip 4 is housed in the recess 25, and the electrode pad of the IC chip 4 and the electrode pad 24 are
After connecting a, 24b, 24c, and 24d with the bonding wire W, the resin material 5 is filled in these recesses,
The IC chip or the like is embedded. The cap is made of ceramics and has a reverse recess 31 for ensuring a vibration space. The outer peripheral dimension of the cap is set to be smaller than the outer peripheral dimension of the base, so that the outer peripheral portion of the base has a flange portion. 20 are formed.

【0013】この表面実装型水晶発振器を製造するに
は、励振電極が形成された水晶振動板1を基台に設けら
れた前記電極パッド21,22に搭載し、導電接合(導
電性接合材の図示は省略している)を行った後、基台上
部の外周近傍に低融点ガラスGを配置し、この低融点ガ
ラスG上にキャップ3をその端部が位置するように設置
し、窒素ガス雰囲気中で400゜Cで約2時間加熱し溶
融接合を行う。これにより水晶振動板は基台上部にキャ
ップ3にて気密的に封止される。基台下面の凹部25に
ICチップ等の回路素子を搭載するには、基台をその下
面が上方に向くように裏返してキャリアテープTに搭載
する。キャリアテープTには前記キャップの外周形状に
対応した複数の貫通孔T1,T2が形成されており、こ
のキャリアテープTに、基台の下面が上方に向くよう前
記キャップを貫通設置し、前記フランジ部20でこの基
台を支持する。そして、基台下面の凹部25にICチッ
プを設置し、ICチップの電極パッドと前記電極パッド
24a,24b,24c,24dとをボンディングワイ
ヤーWで電気的に接続する。その後、エポキシ樹脂から
なる絶縁性の樹脂材5をこれら凹部24,25に充填
し、ICチップ等を埋設する。
In order to manufacture this surface mount type crystal oscillator, the crystal vibrating plate 1 on which the excitation electrodes are formed is mounted on the electrode pads 21 and 22 provided on the base, and conductive bonding (using a conductive bonding material) is performed. (Not shown), a low-melting glass G is arranged near the outer periphery of the upper part of the base, and the cap 3 is placed on the low-melting glass G so that its end portion is positioned, and nitrogen gas is added. Melt bonding is performed by heating at 400 ° C. for about 2 hours in the atmosphere. As a result, the crystal diaphragm is hermetically sealed by the cap 3 on the upper part of the base. To mount a circuit element such as an IC chip in the recess 25 on the lower surface of the base, the base is turned over so that the lower surface faces upward and mounted on the carrier tape T. The carrier tape T is formed with a plurality of through holes T1 and T2 corresponding to the outer peripheral shape of the cap. The cap is penetrated through the carrier tape T so that the lower surface of the base faces upward, and the flange is formed. The part 20 supports this base. Then, an IC chip is placed in the recess 25 on the lower surface of the base, and the electrode pads of the IC chip and the electrode pads 24a, 24b, 24c, 24d are electrically connected by the bonding wires W. Then, the insulating resin material 5 made of epoxy resin is filled in the recesses 24 and 25 to embed an IC chip or the like.

【0014】第2の実施例 図4は本発明による第2の実施例を示す斜視図であり、
図5は図4の表面実装型圧電発振器の製造時に用いるキ
ャリアテープの一部斜視図である。第1の実施例と同じ
構成部分は、一部説明は省略するとともに、同番号を用
いて説明する。基台6のフランジ部60には細長い切り
欠き61,62,63,64(64については図示せ
ず)が4辺に設けられている。キャリアテープTには複
数の貫通孔T3,T4が形成されており、これら各貫通
孔には前記基台の切り欠き61,62,63,64に対
応した支え部71,72,73,74が突出している。
基台下面の凹部65にICチップ等の回路素子を搭載す
るには、基台下面が上方に向くように裏返して、前記切
り欠き61,62,63,64を前記キャリアテープT
の支え部71,72,73,74に係止させキャリアテ
ープに固定する。そして、基台下面の凹部65にICチ
ップを設置し、ICチップの電極パッドと前記電極パッ
ドとをボンディングワイヤーで電気的に接続する。な
お、2e・・・2eは圧電振動板の電極あるいはICチ
ップ等の電極を外部に導出する外部導出電極である。
Second Embodiment FIG. 4 is a perspective view showing a second embodiment of the present invention.
FIG. 5 is a partial perspective view of a carrier tape used in manufacturing the surface-mounted piezoelectric oscillator of FIG. The description of the same components as those of the first embodiment will be partially omitted and the same numbers will be used for the description. The flange portion 60 of the base 6 is provided with elongated notches 61, 62, 63, 64 (64 is not shown) on four sides. A plurality of through holes T3, T4 are formed in the carrier tape T, and supporting portions 71, 72, 73, 74 corresponding to the notches 61, 62, 63, 64 of the base are formed in these through holes, respectively. It is protruding.
To mount a circuit element such as an IC chip in the concave portion 65 on the lower surface of the base, turn over the lower surface of the base so that the notches 61, 62, 63, 64 are formed on the carrier tape T.
The support parts 71, 72, 73, 74 are fixed to the carrier tape. Then, an IC chip is placed in the recess 65 on the lower surface of the base, and the electrode pads of the IC chip and the electrode pads are electrically connected by a bonding wire. 2e ... 2e are external lead-out electrodes that lead out electrodes of the piezoelectric vibrating plate or electrodes such as IC chips to the outside.

【0015】この実施例によれば、この基台外周上面の
複数箇所に切り欠きを設けた構成であるので、この切り
欠き部分をキャリアテープに形成された貫通孔の周囲に
係止させ、基台裏面の回路部品の搭載等を容易にすると
ともに、この切り欠き部分には基台とキャップを接合す
るガラス材の余分が流れにくい。よって、キャリアテー
プに支持される基台部分に接合材の余分が付着すること
がなく、安定した製造を行うことができる。なお、この
切り欠きは上述のように基台外周上面の複数箇所設けた
構成でもよく、また全周にわたって設けた構成でもよ
い。
According to this embodiment, since the notches are provided at a plurality of positions on the upper surface of the outer periphery of the base, the notches are locked around the through holes formed in the carrier tape to form the base. In addition to facilitating the mounting of circuit components on the back surface of the base, it is difficult for excess glass material for joining the base and the cap to flow into the notch. Therefore, the excess of the bonding material does not adhere to the base portion supported by the carrier tape, and stable manufacturing can be performed. The notch may be provided at a plurality of positions on the upper surface of the outer periphery of the base as described above, or may be provided over the entire circumference.

【0016】本発明は、上記実施例に限定されるもので
はなく、他の複雑な回路構成による発振器(例えば温度
補償型の水晶発振器)の場合等にも適用することができ
る。また、使用する樹脂材もエポキシ系樹脂のみなら
ず、シリコン系、ウレタン系樹脂を用いてもよい。さら
に、基台のフランジ部に基台とキャップを接合する接合
材の流出を防止する溝を設ける等の工夫を行ってもよ
い。
The present invention is not limited to the above embodiment, but can be applied to the case of an oscillator having another complicated circuit configuration (for example, a temperature compensation type crystal oscillator). Further, the resin material used may be not only an epoxy resin but also a silicone resin or a urethane resin. Further, it is possible to make a device such as providing a groove on the flange portion of the base to prevent the joining material for joining the base and the cap from flowing out.

【0017】[0017]

【発明の効果】本発明によれば、圧電振動板はキャップ
にて基台の上部に気密封止され、IC等の他の回路部品
は基台の下面に設けられた凹部に収納され、樹脂材の充
填により埋設される構成で、両者が配置される室が空間
的に分離される。このような構成により、圧電振動板の
気密封止と他の回路部品の搭載を別個で行うことができ
るので、IC等の回路部品を搭載する前に、例えば比較
的高温を必要とするガラス材を接合材として用いて圧電
振動板の気密封止を行うことができる。IC等の回路部
品の搭載は後で行うので、IC等の電気的特性の変化、
接続部分の劣化の問題がなくなる。また、気密封止され
た圧電振動板部分の電気的特性を調べた後、IC等の回
路部品を搭載することができる。調べた電気的特性が所
定の規格水準を満たしていないものについては、IC等
の回路部品を搭載しないことにより、未然に不良品の発
生を防ぐことができる。さらに、このような構成の表面
実装型圧電発振器において、フランジ部を形成している
ので、このフランジ部をキャリアテープに形成された貫
通孔の周囲に係止させ、基台裏面の回路部品の搭載等を
容易にするとともに、キャリアテープでキャップを支持
していないので、キャップと基台との接合材の量、粘性
が異なる等の原因により、接合材の接合時の厚みが異な
った場合でも、基台裏面の回路部品の搭載部分の高さが
異なることがない。よって、製造バラツキが少なく、信
頼性の高い表面実装型圧電発振器を得ることができる。
According to the present invention, the piezoelectric vibrating plate is hermetically sealed on the upper portion of the base by the cap, and other circuit components such as ICs are housed in the recesses provided on the lower surface of the base, and the resin The chambers in which they are arranged are spatially separated by the structure in which they are buried by filling the material. With such a configuration, the piezoelectric vibration plate can be hermetically sealed and other circuit components can be separately mounted. Therefore, for example, a glass material that requires a relatively high temperature before the circuit components such as ICs are mounted. Can be used as a bonding material to hermetically seal the piezoelectric diaphragm. Since the mounting of circuit components such as IC will be performed later, changes in the electrical characteristics of IC,
The problem of deterioration of the connection part disappears. Further, after examining the electrical characteristics of the hermetically sealed piezoelectric vibrating plate portion, a circuit component such as an IC can be mounted. If the examined electrical characteristics do not satisfy the predetermined standard level, it is possible to prevent the occurrence of defective products by not mounting ICs or other circuit components. Further, in the surface mount piezoelectric oscillator having such a structure, since the flange portion is formed, the flange portion is locked around the through hole formed in the carrier tape to mount the circuit component on the back surface of the base. Etc., and because the cap is not supported by the carrier tape, even if the thickness of the bonding material when bonding is different due to the difference in the amount and viscosity of the bonding material between the cap and the base, The height of the circuit component mounting portion on the back surface of the base does not differ. Therefore, it is possible to obtain a highly reliable surface mount piezoelectric oscillator with less manufacturing variation.

【0018】また、請求項2項の発明によれば、この基
台外周上面の複数箇所あるいは全周にわたって切り欠き
を設けた構成であるので、この切り欠き部分をキャリア
テープに形成された貫通孔の周囲に係止させ、基台裏面
の回路部品の搭載等を容易にする。よって、製造バラツ
キが少なく、信頼性の高い表面実装型圧電発振器を得る
ことができる。また、この切り欠き部分には基台とキャ
ップを接合するガラス材の余分が流れにくく、キャリア
テープに支持される基台部分に接合材の余分が付着する
ことがなく、安定した製造を行うことができる。
Further, according to the invention of claim 2, since the notch is provided at a plurality of positions or the entire circumference of the upper surface of the outer periphery of the base, the notch portion is a through hole formed in the carrier tape. It makes it easy to mount the circuit parts on the back of the base, etc. Therefore, it is possible to obtain a highly reliable surface mount piezoelectric oscillator with less manufacturing variation. In addition, excess glass material that joins the base and the cap does not easily flow into this cutout portion, and excess adhesive does not adhere to the base portion supported by the carrier tape, ensuring stable manufacturing. You can

【0019】また、請求項3項の発明によれば、基台の
上部に圧電振動板を電気的機械的に接続する工程、前記
基台の上部にガラス材にてキャップを接合することによ
り、圧電振動板等を気密的に封止する工程の後に、基台
の凹部に発振回路を構成する回路素子を収納し、必要な
電気的接続を行い、樹脂材にて埋設処理を行うので、高
温処理の必要なガラス材による気密封止時の熱の影響を
受けることがなくなる。また、前記キャップの外周形状
に対応した複数の貫通孔を有するキャリアテープに、基
台の下面が上方に向くよう前記キャップを貫通設置し、
前記フランジ部あるいは切り欠きでこの基台を支持する
ことにより、基台裏面の回路部品の搭載等を容易にする
とともに、キャリアテープでキャップを支持していない
ので、キャップと基台との接合材の量、粘性が異なる等
の原因により、接合材の接合時の厚みが異なった場合で
も、基台裏面の回路部品の搭載部分の高さが異なること
がない。よって、製造バラツキが少なく、信頼性の高い
表面実装型圧電発振器の製造方法を得ることができる。
According to the third aspect of the invention, the step of electrically and mechanically connecting the piezoelectric vibrating plate to the upper part of the base, and the cap being joined to the upper part of the base with a glass material, After the process of hermetically sealing the piezoelectric diaphragm, etc., the circuit elements that make up the oscillation circuit are stored in the recesses of the base, the necessary electrical connections are made, and the embedding process is performed with a resin material, so high temperature It is not affected by heat at the time of hermetically sealing the glass material that needs to be treated. Further, a carrier tape having a plurality of through holes corresponding to the outer peripheral shape of the cap, the cap is penetrated and installed so that the lower surface of the base is directed upward,
By supporting this base with the flange portion or notch, it becomes easy to mount circuit components on the back surface of the base, and since the cap is not supported by the carrier tape, the bonding material between the cap and the base The height of the circuit component mounting portion on the rear surface of the base does not differ even when the thickness of the joining material when joining is different due to factors such as the amount and viscosity of the joining material. Therefore, it is possible to obtain a highly reliable method of manufacturing a surface-mounted piezoelectric oscillator with less manufacturing variation.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による表面実装型圧電発振器の第1の実
施例を示す内部断面図。
FIG. 1 is an internal sectional view showing a first embodiment of a surface mount piezoelectric oscillator according to the present invention.

【図2】図1の構成の表面実装型水晶発振器をキャリア
テープに搭載する状態を示す斜視図。
FIG. 2 is a perspective view showing a state in which the surface mount crystal oscillator having the configuration of FIG. 1 is mounted on a carrier tape.

【図3】図2のキャリアテープ搭載状態を示す断面図で
ある。
FIG. 3 is a cross-sectional view showing a state where the carrier tape of FIG. 2 is mounted.

【図4】第2の実施例を示す斜視図。FIG. 4 is a perspective view showing a second embodiment.

【図5】図4の構成の表面実装型水晶発振器をキャリア
テープに搭載する状態を示す斜視図。
5 is a perspective view showing a state in which the surface mount crystal oscillator having the configuration of FIG. 4 is mounted on a carrier tape.

【図6】従来例を示す図。FIG. 6 is a diagram showing a conventional example.

【図7】従来例を示す図。FIG. 7 is a diagram showing a conventional example.

【図8】従来例を示す図。FIG. 8 is a diagram showing a conventional example.

【符号の説明】[Explanation of symbols]

1,81 圧電振動板(水晶振動板) 2,9 基台 24,25,71,72,73 凹部 3,91 キャップ 4,82 ICチップ 5 樹脂材 1,81 Piezoelectric vibration plate (quartz vibration plate) 2,9 Base 24,25,71,72,73 Recessed portion 3,91 Cap 4,82 IC chip 5 Resin material

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 セラミックスからなり、必要な電極配線
を施すとともに少なくとも下面には厚み方向に凹部を形
成した基台と、この基台の上部に電気的機械的に接続さ
れる励振電極形成された圧電振動板と、前記基台上部の
圧電振動板を被覆し、接合材により気密的に封止される
キャップと、前記基台の凹部に収納され必要な電気的接
続がなされた発振回路を構成する回路素子と、前記凹部
に充填された絶縁性の樹脂材とからなる表面実装型圧電
発振器において、キャップの外周寸法より基台の外周寸
法を大きくすることにより、基台の外周部分にフランジ
部を設けたことを特徴とする表面実装型圧電発振器。
1. A base, which is made of ceramics, is provided with necessary electrode wiring, and at least a lower surface is provided with a recess in the thickness direction, and an excitation electrode electrically and mechanically connected is formed on the base. A piezoelectric vibrating plate, a cap that covers the piezoelectric vibrating plate above the base and is hermetically sealed by a bonding material, and an oscillation circuit that is housed in the recess of the base and is electrically connected as necessary In the surface mount type piezoelectric oscillator consisting of the circuit element and the insulating resin material filled in the recess, by making the outer peripheral dimension of the base larger than the outer peripheral dimension of the cap, the flange portion is formed on the outer peripheral portion of the base. A surface-mounted piezoelectric oscillator, comprising:
【請求項2】 基台外周上面の複数箇所あるいは全周に
わたって切り欠きが設けられたことを特徴とする表面実
装型圧電発振器。
2. A surface mount type piezoelectric oscillator, wherein notches are provided at a plurality of positions or the entire circumference of the upper surface of the outer periphery of the base.
【請求項3】 請求項1,2に記載された表面実装型圧
電発振器を製造する方法であって、セラミックスからな
り、必要な電極配線を施すとともに少なくとも下面には
厚み方向に凹部を形成した基台を用意し、この基台の上
部に励振電極形成された圧電振動板を電気的機械的に接
続する工程と、前記基台の上部に接合材により気密的に
キャップを接合することにより、圧電振動板等を気密的
に封止する工程と、前記キャップの外周形状に対応した
複数の貫通孔を有するキャリアテープに、基台の下面が
上方に向くよう前記キャップを貫通孔に設置し、前記フ
ランジ部あるいは切り欠きでこの基台を支持する工程
と、その後前記基台の下面の凹部に発振回路を構成する
回路素子を収納し、必要な電気的接続を行う工程と、前
記回路素子を収納した前記凹部に絶縁性の樹脂材を充填
する工程とからなる表面実装型圧電発振器の製造方法。
3. A method for manufacturing the surface-mounted piezoelectric oscillator according to claim 1, wherein the substrate is made of ceramics, is provided with necessary electrode wiring, and has a recess formed in at least the lower surface in the thickness direction. A step of preparing a pedestal and electrically and mechanically connecting a piezoelectric vibrating plate on which an excitation electrode is formed on the base, and a cap is airtightly joined to the top of the pedestal by a bonding material A step of hermetically sealing a diaphragm or the like, and a carrier tape having a plurality of through holes corresponding to the outer peripheral shape of the cap, the cap is installed in the through holes so that the lower surface of the base is directed upward, A step of supporting this base with a flange portion or a notch, a step of storing circuit elements that constitute an oscillation circuit in a recess on the bottom surface of the base and making necessary electrical connections, and a step of storing the circuit elements. did A method of manufacturing a surface-mounted piezoelectric oscillator, comprising the step of filling the recess with an insulating resin material.
JP27035894A 1994-10-06 1994-10-06 Manufacturing method of surface mount type piezoelectric oscillator Expired - Fee Related JP3391118B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27035894A JP3391118B2 (en) 1994-10-06 1994-10-06 Manufacturing method of surface mount type piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27035894A JP3391118B2 (en) 1994-10-06 1994-10-06 Manufacturing method of surface mount type piezoelectric oscillator

Publications (2)

Publication Number Publication Date
JPH08107313A true JPH08107313A (en) 1996-04-23
JP3391118B2 JP3391118B2 (en) 2003-03-31

Family

ID=17485164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27035894A Expired - Fee Related JP3391118B2 (en) 1994-10-06 1994-10-06 Manufacturing method of surface mount type piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JP3391118B2 (en)

Also Published As

Publication number Publication date
JP3391118B2 (en) 2003-03-31

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