JPH08106826A - Manufacture of superconductive wire - Google Patents

Abstract

PURPOSE: To reliably manufacture a superconductive wire in high speed under an oxidation atmosphere by setting an included angle to θin an intersection point between a straight line that links the center of a supply window and the center of the base body, and a line that links an electron emission filament and the center of a draw grid so as to satisfy 40 deg.<θ<=90 deg.. CONSTITUTION: An evaporation container 5 heats so as to evaporate a material consisting of a superconductive wire and is provided with a supply window 7 for supplying the evaporation substance to a base body 6 around an ionization part of a manufacture device for a conductive wire. An electron from this filament 3 is drawn from a draw grid 2 in an electron emission filament 3. Or an acceleration electrode 1 accelerates the evaporation substance which is ionized by the drawn electron. When the included angle of an intersection point between a straight line 8 that links the center of the supply window 7 and the center of the base body 6, and a line 9 that links the electron emission filament 3 and the center of the draw grid 2 is set to θ, the grid 2 and the filament 3 are so arranged as to satisfy 40 deg.<θ<=90 deg. and the superconductive wire is manufactured in high speed under an oxidation atmosphere.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting wire manufacturing apparatus used in various superconducting devices such as superconducting magnets, superconducting energy storage devices, and superconducting transformers.

[0002]

2. Description of the Related Art As a superconducting wire, a metal sheath wire in which a superconductor is inserted in a metal pipe, a superconductor attached to a core material, a superconductor laminated on a base body on a tape, etc. ,
There are various forms. In order to manufacture a metal sheath wire, a metal plate is processed into a metal pipe shape, a superconductor is supplied to the inside, and this is formed into a desired shape by rolling or plastic working using a die. For these, for example, JP-A-63-264820 discloses a method for continuously producing a superconducting wire and an outline of a production apparatus used for the method. Further, as a device for attaching a superconductor to a core material, for example, Japanese Patent Laid-Open No. 63-24182 is used.
In JP-A-6, a sputtering device, which is a thin film forming device, is used. It can be easily estimated that a thin film forming apparatus such as a sputtering apparatus or a laser vapor deposition method can be used also when laminating a superconductor on a tape-shaped substrate. It is known that a thin film having excellent characteristics can be obtained by a thin film forming method using an ion beam such as an ion beam sputtering method. However, in order to form an oxide thin film by this method, the oxidation resistance of the ionized part is a problem.

[0003]

However, when the plastic working apparatus disclosed in Japanese Patent Laid-Open No. 63-241826 is used, if an oxide superconductor having a high critical temperature is used as the superconductor. However, there is a drawback that the metal material that is the sheath material is limited. This is because in the oxide superconductor, when oxygen in the material is desorbed, the superconducting property is deteriorated and the superconductivity is lost in some cases.
Therefore, silver is used as the sheath material because it has high oxygen permeability and does not easily react with oxygen at high temperatures. Therefore, a superconducting wire cannot be manufactured at a temperature higher than the melting point of silver, and in reality, a superconductor that can be used is Bi2.
There is a problem that it is limited to superconductors having a 212 or 2223 structure. Further, as disclosed in Japanese Patent Laid-Open No. 63-241826, when a thin film forming apparatus is used, unlike the above case, there are few restrictions on materials, but a constituent metal such as an oxide superconductor is used. If there are many kinds of elements, there is a drawback that the formation rate of a thin film becomes slow in the case of a superconductor. At present, the thin film formation rate is usually 0.6-18 nm.
30 nm even with the laser deposition method, which has a high formation speed of about 10 / min.
In order to manufacture a superconducting wire for industrial use, it is required to form a thin film at a higher thin film forming speed, and an apparatus that operates stably even in an oxidizing atmosphere is required.

Therefore, it is an object of the present invention to manufacture a superconducting wire in which a superconductor is formed on a substrate such as a tape or a core material at a speed twice as fast as that of the conventional one and with high reliability even in an oxidizing atmosphere. It is to provide an excellent superconducting wire manufacturing apparatus.

[0005]

The above objects can be achieved by the present invention described below. That is, the present invention provides a superconducting wire manufacturing apparatus for forming a substance on a substrate by evaporating a substance containing a constituent metal element of various materials constituting a superconducting wire to ionize and accelerate at least one of the constituent metal elements, An electron extraction grid provided in the ionization section has a slit that allows passage of electrons emitted from an electron emission filament, and a straight line passing through the center of the filament and the center point of the slit and an evaporation material supply window. The superconducting wire manufacturing apparatus is characterized in that the included angle θ at the intersection of the center of the core and the line connecting the center of the substrate to which the vaporized substance is attached satisfies the following relationship. 40 ° <θ ≦ 90 °

[0006]

According to the present invention, the superconducting wire manufacturing apparatus using the superconducting wire manufacturing apparatus in which the arrangement and structure of the various parts of the portion for ionizing the metal elements constituting the various materials for forming the superconducting wire have a specific relationship , For example, an oxide superconducting material, a buffer layer provided between a core material and a superconductor, at least one kind of a metal element constituting a material such as a protective layer is ionized and accelerated to form a thin film of various materials. By continuously forming it on the substrate, it is possible to manufacture a superconducting wire without limiting the materials used and without deteriorating the characteristics of each material.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Next, the present invention will be described in detail with reference to preferred embodiments of the present invention. FIG. 1 shows the configuration principle around the ionization part, which is a characteristic part of the manufacturing apparatus used in the method for manufacturing a superconducting wire of the present invention. Reference numeral 5 is an evaporation container for heating and evaporating the material forming the superconducting wire, and is provided with a supply window 7 for supplying the evaporation substance to the substrate 6. Reference numeral 3 is an electron emission filament, 2 is an extraction grid for extracting electrons from 3, and 1 is an accelerating electrode for accelerating an evaporated substance ionized by the electrons extracted from 2. In the superconducting wire manufacturing apparatus used in the present invention, the arrangement of various parts in the portion for ionizing the metal element constituting the material for forming the superconducting wire is first set in the center of the supply window 7 and the substrate 6.
The angle between the straight line 8 connecting the centers of the two and the line 9 connecting the electron emitting filament 3 and the center of the extraction grid 2 is θ, and 2 and 3 are arranged so that θ satisfies the following equation. To do. 40 ° <θ ≦ 90 ° (1) Further, it is also a preferred embodiment to arrange the enclosure 4 around the electron emission filament 3. In this case, the size of the slit provided in the electron extraction grid 2 is D ₂ ,
The size of the slits provided in the enclosure 4 is D ₁ (here, the slits are rectangular and the heights thereof are D ₁ and D _2, and the widths thereof are W ₁ and W ₂ , respectively). At this time, the sizes of the slits 2 and 3 are set so as to satisfy the following relationship. 0 <D ₁ ≦ 3.00 D ₂ , W ₁ ≦ W ₂ (2) The shape of the slit is not limited to the above rectangular shape, and may be elliptical or circular. In this case, in the case of an elliptical shape, the major axis is W ₁ and W ₂ , the minor axis is D ₁ and D ₂ , and in the case of a circular shape, the diameter is D ₁ and D ₂ .

When a manufacturing apparatus having an ionization section having such a structure is used, a part of the evaporated substance is ionized by electrons from 3, and the energy of this ion is utilized to form a dense and excellent characteristic on the substrate 6. Can be formed into a thin film. Further, since the evaporation container 5 is provided with the supply window 7, the evaporation material reaches the substrate 6 in a high density state, and the thin film formation speed can be increased. Further, when a negative voltage is applied to the enclosure 4, the electrons from the electron emission filament 3 can be efficiently extracted by the electron extraction grid 2, so that the ionization rate of the evaporated substance can be controlled to the optimum value for each substance. I can.

That is, by satisfying the above condition (1), the electron emission filament 3 is less likely to deteriorate the electron emission efficiency and the stability of the electron emission due to the deposition of the vaporized substance, so that the electron emission filament 3 can be maintained for a long time. A stable thin film can be formed. Further, by adding the condition (2), stable film formation becomes more reliable. On the other hand, when the components of the apparatus are arranged and configured under the conditions other than (1) and (2), the vaporized substance easily adheres to the electron emission filament 3, and the filament material reacts with the vaporized substance, and As a result of the deposition of an insulating substance on the surface, the conditions for forming the thin film change during manufacturing, various characteristics of the thin film formed on the substrate change, and the resulting superconducting wire has poor characteristics. is there.

The evaporation material supplied from the supply window 7 to the substrate 6 spreads to some extent before reaching the substrate as shown in FIG. Therefore, in order to uniformly ionize the vaporized substance, the relationship between the electron extraction grid 2 and the spread of the vaporized substance is important. Accordingly the present invention preferably constitutes a divergence angle theta ₁ and divergence angle theta ₂ of the electron extraction grid 2 of evaporated material so as to satisfy the following relationship. 0 <θ ₂ ≦ 1.5 θ ₁ (3) That is, within the range of this condition, the electron emission filament 3
Since the electrons emitted from the substrate irradiate the vaporized substance almost uniformly, the ionized vaporized substance is also uniformly distributed on the substrate 6. On the other hand, when the conditions other than (3) are adopted, there are problems that the ion distribution of the evaporated substance becomes non-uniform and the ionization efficiency decreases. Incidentally, in general, 0 <θ ₂ ≦ 1.5θ may be set theta ₁ and theta ₂ so as to satisfy _one of the relations. For example, in the case of forming a thin film of magnesium oxide theta ₂ = (1.05-1.
50) θ ₁ and θ ₂ = (1.00 to 1.40) θ ₁ when forming a thin film of a Y—Ba—Cu—O superconductor, and θ ₂ when forming a polyethylene thin film. ₂ =
For example, the value may be set to (0.5 to 1.5) θ ₁ , and θ ₁ and θ ₂ may be appropriately set depending on the forming material so that the most preferable state is obtained.

The present invention uses an apparatus having an ionization section having a specific structure as described above, and forms various materials for continuously forming a superconducting wire on a substrate. For example,
When manufacturing a superconducting wire in which an oxide layer, an oxide superconducting layer, and an insulating layer are sequentially formed on the outer periphery of the metal wire, as shown in FIG. A device 16 for forming an object, a device 17 for forming an oxide superconducting layer,
A device 18 for forming an insulating layer is provided in the spaces 13, 14 and 1 respectively.
5, the superconducting wire 19 is wound by the winding roller 11. If the material that makes up the superconducting wire changes,
The number of devices 16, 17 and 18 may be changed depending on the type of the material. At this time, the ionization section as shown in FIGS. 1 and 2 may be used for all of 16, 17, and 18, or any one of them may be omitted if necessary.

Further, for example, the superconductor Y-Ba-Cu-O
When using a material containing multiple metal elements such as
Each element may be ionized and accelerated by an independent device. The means for evaporating each material is not limited, and any means such as heating with an electric heater, heating using an electron gun, a laser, or high frequency heating may be used. The substance to be evaporated may be a solid substance or an organometallic substance, and there is no limitation, and it may be selected by a means for evaporating.

The evaporation material supply window 7 may have any shape, but it may be appropriately determined according to the size of the metal wire 6. For example, a plurality of small holes may be arranged, one hole may be formed, or a nozzle may be formed so that the evaporated substance does not spread greatly. In addition, due to the structure of the superconducting wire,
It goes without saying that the configuration of can be changed appropriately.

[0014]

EXAMPLES The present invention will be described in more detail with reference to specific examples. Regarding the structure and forming material of the superconducting wire, silver wire, magnesium oxide, Y-Ba-Cu-O can be used.
The case where the superconductor and the polyethylene resin are sequentially formed will be described as an example, but it goes without saying that the structure of the present invention and the material used are not limited to this. or,
When forming various oxide films, oxygen gas is used as an oxidant, but the present invention is not limited to this, and other than oxygen gas, for example, ozone, active oxygen, nitric oxide gas, etc. are used. You may.

Example 1 FIG. 3 shows a structural principle of the apparatus used in this example. The apparatus comprises a supply roller 10 for supplying a silver wire 6 as a base, a winding roller 11 for winding a superconducting wire 19, and apparatuses 16, 17, and 18 for forming various materials on the base. The peripheral portions of the bases 16, 17 and 18 have the cross-sectional structure as shown in FIG. That is, the ionization unit 20
Are provided at four places so that the respective materials can be uniformly attached to the silver wire 6, and the silver wire can be heated to a required temperature by the heater 21. The evaporation material is supplied to the devices 16, 17 and 18 by a heating means (not shown),
It is sent out from the supply window 7 to the spaces 13, 14 and 15.

FIG. 1 shows the structure of the ionization section 20. The acceleration electrode 1 can apply a voltage (Va) of up to +10 kV, and the silver wire 6 is at ground potential. Further, tungsten is used for both the electron emission filament 3 and the extraction grid 2, and a current (Ii) of up to 500 mA can be applied to 3 and a voltage (Vg) up to +2 kV can be applied to 2. A voltage (Vr) of up to -3 kV can be applied to the enclosure 4. When forming the magnesium oxide and the Y—Ba—Cu—O superconductor, oxygen gas was introduced through the supply window 7 together with the evaporation material. still,
A stainless steel tube (not shown) was used to introduce oxygen. The supply window 7 is a square of 1 mm × 200 mm, and the long side and the longitudinal direction of the silver wire are parallel. Further, θ in FIG. 1 is 75 °, and the slits of the extraction grid 2 and the enclosure 4 are quadrangles with long sides of 210 mm, and have a relationship of D ₁ = 2.0D ₂ (D ₁ = 10 mm). The distance between the acceleration electrode 1 and the silver wire 6 is 100.
mm.

A superconducting wire was prepared under the following conditions using the above apparatus. The vacuum degree of the spaces 13, 14 and 15 is 2 × 10 ⁻⁶ Torr, and magnesium oxide and Y—Ba—Cu— evaporated in the electron guns in 16 and 17 are used.
O superconductor has a composition of Y: Ba: Cu = 1: 2: 3 and is 5
It is supplied up to × 10 ^-5 Torr and further oxygen gas is supplied to 50
It was introduced at a rate of ml / sec and supplied through the supply window 7.
In the case of magnesium oxide, Va = 2.0 kV, Ii
= 150 mA, Vg = 0.5 kV, Vr = 1.0 kV
In the case of a superconductor, Va = 0.5 kV and Ii = 3
The evaporated substance was ionized and accelerated at 0 mA, Vg = 0.5 kV, and Vr = 0.0 kV.

Polyethylene is heated by an electric heater, Va = 1.5 kV, Ii = 100 mA, Vg = 1.
It was set to 0 kV and Vr = 0.4 kV. The silver wire 6 was heated to 350 ° C. when forming magnesium oxide and 600 ° C. when forming a superconductor. At the time of forming polyethylene, nitrogen gas was blown while the silver wire moved from the spaces 14 to 15 (not shown in FIG. 3) and cooled to 60 ° C. or lower before forming the polyethylene film. Created under such conditions,
Moreover, the winding roller 11 was able to wind the superconducting wire at a speed of 2 m / min. When polyethylene was removed from the obtained superconducting wire and the temperature dependence of the electric resistance was measured by the DC 4-terminal method, it was as shown in FIG. The critical temperature is 90K,
The critical current was about 2 × 10 ⁵ A / cm ² at 77K. With the apparatus of the present invention, a superconducting wire having a length of about 1000 m could be manufactured.

On the other hand, in FIG. 1, the extraction grid 2 is formed from a wall having slits into a grid-like metal wire,
When the superconducting wire was manufactured without using the enclosure 4, the electron emitting filament 3 was broken, and the critical temperature and the critical current density of the obtained superconducting wire changed greatly with time. For example, under the above manufacturing conditions, when a superconducting wire of 200 m is manufactured with all Vr being 0.0 kV,
Although the critical temperature at both ends of the superconducting wire manufactured by the present invention did not change to 90K, the electron-emission filament 3 often breaks when the device used in the present invention is not used, and when it does not break. However, the critical temperature, which was 90K at the start of winding, became 63K at the final end, and the superconducting properties changed significantly. This is considered to be because, in the method of the present invention, when the superconducting wire is manufactured, the extraction grid 2 and the enclosure 4 prevent the evaporation substance from adhering to the electron emission filament 3.

Example 2 A superconducting wire was prepared by using the same device as used in Example 1 except that the enclosure 4 was removed, and using the same material. However, for magnesium oxide, Va =
At 3.0 kV, Ii = 150 mA, Vg = 1.0 kV,
The superconductor has Va = 0.5 kV, Ii = 30 mA, Vg =
The vaporized substances were ionized and accelerated at 0.5 kV, respectively. As described above, by changing the production conditions, it was possible to manufacture a superconducting wire having excellent characteristics similar to those of the superconducting wire of Example 1 even with the apparatus of this example in which the enclosure 4 was removed. In the case of this embodiment, the length at which a superconducting wire with uniform characteristics can be obtained is about 800 m or less.

Example 3 In the apparatus used in Example 1, the supply window 7 for forming a Y-Ba-Cu-O superconductor with magnesium oxide.
Is set to 2 mm × 200 mm, and an oxygen inlet (0.5 mm × 198 mm) is placed on the line 8 that is 7 mm away from the supply window to introduce the evaporated substance and oxygen together from the supply window. The same apparatus as in Example 1 was used. When a superconducting wire is manufactured using the apparatus under the same manufacturing conditions as in Example 1, a superconducting wire having excellent superconducting properties can be manufactured at a speed of 5 m / min, as in Example 1. It was In addition, in FIG. 3, one device for evaporating each material is provided.
I used them one by one, but depending on the materials that make up the superconducting wire,
The number of devices can be changed depending on the film thickness of each material.

Embodiment 4 FIG. 5 shows a conceptual diagram of the construction of the manufacturing apparatus of this embodiment. The number of devices for forming each material forming the superconducting wire on the outer circumference of the silver wire 6 as the core material is two for magnesium oxide, and the superconductor Y
The number of —Ba—Cu—O was 4, and the number of polyethylene was 3. FIG. 4 shows a cross-sectional structure diagram around the silver wire 6 of 16, 17, and 18. This is because the arrangement of the heater 21 is different between FIG. 5 and FIG. 4, but only one part of the heater is shown in FIG. Further, although the ionization parts 20 are arranged at four places in FIG. 4, in the present invention, since each material may be formed with a uniform thickness with respect to the silver wire 6, for example, in the case of 16, the ionization parts 20 are formed. Are arranged at two positions, and the ionization parts are arranged at 90 ° with respect to the winding direction of the silver wire 6 on the first and second units.
You may arrange | position in the shifted position.

FIG. 2 shows the structural principle of the ionization section.
Although it is difficult to determine the spread angle θ ₁ of the vaporized substance strictly, in the present embodiment, a flat plate is placed at the position of the silver wire 6, the vaporized substance is vapor-deposited on the flat plate, and θ ₁ is calculated from the area of the adhered portion. Was calculated. By this method, it is considered that the angle θ ₁ can be determined with an accuracy of about ± 30%. Further, although the evaporation material supply window 7 has a rectangular shape, in general, θ ₁ is often almost the same in both the long side direction and the short side direction, so an average value may be adopted. However, when the divergence angle is different by about 10 ° or more, it is better to change the divergence angle θ ₂ of the extraction grid depending on the direction. Generally, 0 <θ ₂ ≦ 1.5
Although θ ₁ and θ ₂ may be set so as to satisfy the relationship of θ ₁ , in the present invention, in the case of forming magnesium oxide, θ ₂ = 1.16 θ ₁ , Y-Ba-Cu-O superconductivity. In the case of a body, θ ₂ = 1.02θ ₁ , and in the case of forming polyethylene, θ ₂ = 1.20θ ₁ .

The acceleration electrode 1 can apply a voltage (Va) of up to +8 kV, and the silver wire 6 is at ground potential. Further, both the electron emission filament 3 and the extraction grid 2 use tungsten, and 3 has a maximum of 5
A current (Ii) of up to 00 mA and a voltage (Vg) of up to +5 kV can be applied to 2. A voltage (Vr) of up to −2 kV can be applied to the enclosure 4. When forming the magnesium oxide and Y-Ba-Cu-O superconductor, oxygen gas was introduced through the feed window together with the vaporized material.
A stainless steel tube (not shown) was used to introduce oxygen. The supply window 7 is a quadrangle of 1 mm × 150 mm, and the long side is parallel to the longitudinal direction of the silver wire. Also, drawer grid 2 and enclosure 4
The slit has a long side of 160 mm, and the short side has a length of
The extraction grid was 7 mm and the enclosure was 12 mm. The distance between the accelerating electrode 1 and the silver wire 6 (the length of the plane formed by the accelerating electrode and the perpendicular drawn from the silver wire) is 110 mm.

A superconducting wire was prepared under the following conditions using the above apparatus. The vacuum degree of the spaces 13, 14 and 15 is 2 × 10 ^-6 Torr, and magnesium oxide and Y-Ba-C evaporated in 16 and 17 by an electron gun are used.
The u—O superconductor was supplied to a composition of Y: Ba: Cu = 1: 2: 3 up to 4 × 10 ⁻⁴ Torr, and oxygen gas was introduced into the spaces 13 and 14 at a rate of 50 ml / sec. .
In the case of magnesium oxide, Va = 2.0 kV, Ii
= 100 mA, Vg = 1.0 kV, Vr = 1.0 kV
In the case of a superconductor, Va = 0.5 kV and Ii = 3
The evaporated substance was ionized and accelerated at 0 mA, Vg = 0.5 kV, and Vr = 0.0 kV, respectively. Also, polyethylene is
Heated by electric heater, Va = 1.5kV, Ii = 50
mA, Vg = 1.0 kV, and Vr = 0.3 kV. The silver wire was heated to 350 ° C. when forming magnesium oxide and 600 ° C. when forming a superconductor. At the time of forming polyethylene, nitrogen gas was blown from 12 while the silver wire moved to the spaces 14 to 15 and cooled to 60 ° C. or lower before forming the polyethylene film.

Under the above conditions, the winding roller 11
It was possible to wind the superconducting wire at a speed of 8 m / min. When polyethylene was removed from this superconducting wire and the temperature dependence of the electrical resistance was measured by the DC 4-terminal method, the critical temperature was 90K and the critical current was 4 × 10 ⁵ A at 77K.
/ Cm ² . Also, according to this embodiment, 100
A superconducting wire with a length of about 0 m could be manufactured. In contrast,
In FIG. 2, when the extraction grid is a vertical grid-like metal wire from a wall having slits, and when a superconducting wire is manufactured without using an enclosure, the electron-emission filament is broken, and the critical temperature of the superconducting wire The critical current density changed greatly with time. For example, under the above manufacturing conditions, when a superconducting wire of 1000 m was manufactured with all Vr set to 0.0 kV, the critical temperature at both ends of the superconducting wire obtained in this example did not change to 90K. In the case where the manufacturing apparatus having the specific configuration used in the present invention is not used, the critical temperature is 90K at the start of winding even if the electron emission filament is broken or is not broken.
However, at the final end, the superconducting property was significantly changed to 67K. This is because in the present invention, the electron emission filament 3 is prevented from adhering the vaporized substance due to the specific relationship between θ ₁ and θ ₂ and the presence of the enclosure 4, and the ionization and acceleration conditions are stable in the formation of each material. It is thought that this is because it is controlled.

Example 5 In this example, a superconducting wire was prepared by using the apparatus having the structure shown in FIG. 5 and the structure around the ionization part shown in FIG. The electron extraction grid 2 is composed of a grid in which metal rods are vertically arranged at 3 mm intervals. Further, 22 is a stainless steel deposition preventive plate. The superconducting wire produced in this manner had superconducting wires with excellent characteristics as in Example 4.

Example 6 In this example, the device enclosure 4 used in Example 5 was used.
A superconducting wire was prepared in the same manner as in Example 5 by using the device from which was removed. However, in the case of magnesium oxide,
Va = 3.0kV, Ii = 100mA, Vg = 1.0k
V, in the case of a superconductor, Va = 0.3 kV, Ii =
Evaporated substances were ionized and accelerated at 20 mA and Vg = 0.5 kV, respectively. Thus, by changing the preparation conditions, the superconducting wire having the same characteristics as the superconducting wire of Example 5 could be manufactured by the apparatus of the present invention. In this embodiment, the length at which a superconducting wire with uniform characteristics can be obtained is 600 m.
It was below the level. On the other hand, without using a deposition prevention plate,
In addition, when the spread angle of the grid is zero, the electron emission filament 3 is broken, and the characteristics of the manufactured superconducting wire change greatly, so that if the length is 5 m or more, a superconducting wire with uniform characteristics is obtained. It could not be manufactured.

[0029]

As described above, according to the present invention, a superconducting wire produced by forming a superconductor on a substrate such as a tape or a core material is manufactured at a speed twice as fast as a conventional one and in an oxidizing atmosphere. Above all, it can be manufactured with high reliability.

[Brief description of drawings]

FIG. 1 is a structural principle diagram of an ionization section of an apparatus used in the present invention.

FIG. 2 is a structural principle diagram of an ionization section of an apparatus used in the present invention.

FIG. 3 is a structural principle diagram of a manufacturing apparatus used in the present invention.

FIG. 4 is a structural principle diagram around a substrate set in a manufacturing apparatus used in the present invention.

FIG. 5 is a structural principle diagram of a manufacturing apparatus used in the present invention.

FIG. 6 is a structural principle diagram of an ionization section of an apparatus used in the present invention.

FIG. 7 is a diagram showing temperature dependence of electric resistance of the superconducting wire manufactured by the present invention.

[Explanation of symbols]

 1: Acceleration electrode 2: Extraction grid 3: Electron emission filament 4: Enclosure 5: Evaporator 6: Base 7: Supply window 8: A line connecting the center of the supply window and the center of the base 9: The center of the slit and the center of the filament Connecting line 10, 11: Roller 12: Gas supply pipe 13, 14, 15: Space 16, 17 and 18: Thin film manufacturing apparatus 19: Superconducting wire 20: Ionization part 21: Heater 22: Anti-stick plate

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location H01B 12/06 ZAA

Claims (4)

[Claims] 1. At least one of the constituent metal elements is obtained by evaporating a substance containing a constituent metal element of various materials forming the superconducting wire.
In a superconducting wire manufacturing apparatus for ionizing and accelerating seeds to form on a substrate, an electron extraction grid provided in an ionization section has a slit that allows passage of electrons emitted from an electron emission filament, In addition, the included angle θ at the intersection of the straight line passing through the center of the filament and the center of the slit and the line connecting the center of the evaporation material supply window and the center of the substrate to which the evaporation material is attached satisfies the following relationship: An apparatus for manufacturing superconducting wires, which is characterized in that 40 ° <θ ≦ 90 ° 2. A has enclosure is provided for preventing adhesion of evaporated substance around the electron emission filament, and a slit is provided in the electronic flight side of physicians該囲, in the case of the slit (rectangular, Width W ₁ , height D ₁ , long axis W _{1 in} the case of an ellipse, short axis D ₁ , diameter D _{1 in} the case of a circle and slits of the electron extraction grid (width W ₂ in the case of a square type), The height D ₂ , the major axis W ₂ and the minor axis D ₂ in the case of an ellipse, and the diameter D _{2 in} the case of a circle satisfy the following relationship, and a negative voltage is applied to the enclosure. The superconducting wire manufacturing apparatus according to claim 1, which is capable of manufacturing. 0 <D ₁ ≦ 3.00 D ₂ , W ₁ ≦ W ₂ 3. At least one of the constituent metal elements is obtained by evaporating a substance containing a constituent metal element of various materials forming the superconducting wire.
In an apparatus for manufacturing a superconducting wire that ionizes and accelerates seeds to form on a substrate, an electron extraction grid provided in the ionization section has a spread angle θ that satisfies the following relationship with respect to the spread angle θ _{1 of the} vaporized substance. A superconducting wire manufacturing device characterized by being inclined at ₂ . 0 <θ ₂ ≦ 1.5 θ ₁ 4. A deposition preventive plate is provided between the electron extraction grid and the evaporation material supply window to prevent the evaporation material from adhering to the grid and / or the electron emission filament.
The superconducting wire manufacturing apparatus according to claim 3, wherein an enclosure for preventing deposition of an evaporated substance may be provided around the electron emission filament, and a negative voltage can be applied to the enclosure.