JPH081029Y2 - 超純水製造装置 - Google Patents
超純水製造装置Info
- Publication number
- JPH081029Y2 JPH081029Y2 JP11778390U JP11778390U JPH081029Y2 JP H081029 Y2 JPH081029 Y2 JP H081029Y2 JP 11778390 U JP11778390 U JP 11778390U JP 11778390 U JP11778390 U JP 11778390U JP H081029 Y2 JPH081029 Y2 JP H081029Y2
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- heat transfer
- transfer tube
- mirror
- ultrapure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Heat Treatment Of Water, Waste Water Or Sewage (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11778390U JPH081029Y2 (ja) | 1990-09-05 | 1990-11-09 | 超純水製造装置 |
| ITTO910861A IT1250047B (it) | 1990-11-09 | 1991-11-08 | Apparecchiatura per la produzione di acqua ultra-pura |
| FI915289A FI102369B (fi) | 1990-11-09 | 1991-11-08 | Laitteisto ultrapuhtaan veden valmistamiseksi |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2-93829 | 1990-09-05 | ||
| JP9382990 | 1990-09-05 | ||
| JP11778390U JPH081029Y2 (ja) | 1990-09-05 | 1990-11-09 | 超純水製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0478982U JPH0478982U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-07-09 |
| JPH081029Y2 true JPH081029Y2 (ja) | 1996-01-17 |
Family
ID=31948778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11778390U Expired - Lifetime JPH081029Y2 (ja) | 1990-09-05 | 1990-11-09 | 超純水製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081029Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1990
- 1990-11-09 JP JP11778390U patent/JPH081029Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0478982U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-07-09 |
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