JPH0791152B6 - - Google Patents

Info

Publication number
JPH0791152B6
JPH0791152B6 JP1987216815A JP21681587A JPH0791152B6 JP H0791152 B6 JPH0791152 B6 JP H0791152B6 JP 1987216815 A JP1987216815 A JP 1987216815A JP 21681587 A JP21681587 A JP 21681587A JP H0791152 B6 JPH0791152 B6 JP H0791152B6
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1987216815A
Other languages
Japanese (ja)
Other versions
JPS6459729A (en
JPH0791152B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP62216815A priority Critical patent/JPH0791152B2/ja
Priority claimed from JP62216815A external-priority patent/JPH0791152B2/ja
Publication of JPS6459729A publication Critical patent/JPS6459729A/ja
Publication of JPH0791152B2 publication Critical patent/JPH0791152B2/ja
Application granted granted Critical
Publication of JPH0791152B6 publication Critical patent/JPH0791152B6/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP62216815A 1987-08-31 1987-08-31 超伝導体薄膜の製造方法 Expired - Fee Related JPH0791152B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62216815A JPH0791152B2 (ja) 1987-08-31 1987-08-31 超伝導体薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62216815A JPH0791152B2 (ja) 1987-08-31 1987-08-31 超伝導体薄膜の製造方法

Publications (3)

Publication Number Publication Date
JPS6459729A JPS6459729A (en) 1989-03-07
JPH0791152B2 JPH0791152B2 (ja) 1995-10-04
JPH0791152B6 true JPH0791152B6 (enrdf_load_html_response) 2004-10-13

Family

ID=16694323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62216815A Expired - Fee Related JPH0791152B2 (ja) 1987-08-31 1987-08-31 超伝導体薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPH0791152B2 (enrdf_load_html_response)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6677001B1 (en) * 1986-11-10 2004-01-13 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD method and apparatus
US4926791A (en) 1987-04-27 1990-05-22 Semiconductor Energy Laboratory Co., Ltd. Microwave plasma apparatus employing helmholtz coils and ioffe bars
DE68922734T2 (de) * 1988-03-16 1995-09-14 Toshiba Kawasaki Kk VERFAHREN ZUR HERSTELLUNG EINES DüNNSCHICHTOXYDSUPRALEITERS.
JP2527789B2 (ja) * 1988-05-31 1996-08-28 株式会社フジクラ 酸化物系超電導線材の製造方法
KR930011413B1 (ko) 1990-09-25 1993-12-06 가부시키가이샤 한도오따이 에네루기 겐큐쇼 펄스형 전자파를 사용한 플라즈마 cvd 법
WO1993002529A1 (en) * 1991-07-23 1993-02-04 British Telecommunications Public Limited Company Method and device for frame interpolation of a moving image
JP4637556B2 (ja) * 2004-12-01 2011-02-23 株式会社アルバック 成膜装置とこの成膜装置を含む複合型配線膜形成装置および薄膜製造方法

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