JPH078969Y2 - Thaw - Google Patents

Thaw

Info

Publication number
JPH078969Y2
JPH078969Y2 JP1988117360U JP11736088U JPH078969Y2 JP H078969 Y2 JPH078969 Y2 JP H078969Y2 JP 1988117360 U JP1988117360 U JP 1988117360U JP 11736088 U JP11736088 U JP 11736088U JP H078969 Y2 JPH078969 Y2 JP H078969Y2
Authority
JP
Japan
Prior art keywords
ice
water
ice piece
mixed water
piece mixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988117360U
Other languages
Japanese (ja)
Other versions
JPH0241018U (en
Inventor
正之 福島
貞男 冨家
靖 竹本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Obayashi Corp
Original Assignee
Obayashi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Obayashi Corp filed Critical Obayashi Corp
Priority to JP1988117360U priority Critical patent/JPH078969Y2/en
Publication of JPH0241018U publication Critical patent/JPH0241018U/ja
Application granted granted Critical
Publication of JPH078969Y2 publication Critical patent/JPH078969Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【考案の詳細な説明】 《産業上の利用分野》 本考案は、解氷装置に関するもので、例えば、氷水利用
の冷房システムにおいて氷蓄熱槽と冷房負荷を結ぶライ
ンの途中に設置されて使用される解氷装置に関するもの
である。
[Detailed Description of the Invention] << Industrial Application Field >> The present invention relates to an ice-melting device, and is used, for example, in a cooling system using ice water, which is installed in the middle of a line connecting an ice storage tank and a cooling load. It relates to an ice-melting device.

《従来の技術》 住宅、ビル等の冷房および除湿を行う冷房方式におい
て、近年、冷熱としての氷の潜熱を利用する方式が増大
している。
<< Prior Art >> In a cooling system for cooling and dehumidifying a house, a building, etc., in recent years, a system utilizing latent heat of ice as a cooling heat has been increasing.

この方式では、氷蓄熱槽内に氷塊や氷片として冷熱を蓄
積し、この冷熱を冷水あるいは氷片混合水として取出
し、これを冷房機や熱交換器等の冷房負荷に循環させて
いる。
In this system, cold heat is accumulated as ice blocks or ice pieces in the ice heat storage tank, the cold heat is taken out as cold water or ice piece mixed water, and the cold heat is circulated to a cooling load such as a cooler or a heat exchanger.

このうち、氷片を氷蓄熱槽内に蓄積し、氷片混合水を冷
房負荷に直接循環する方式が、氷の潜熱を冷房負荷で直
接利用できるため、冷房負荷の冷房利用温度差(冷房負
荷入口温度と出口温度の差)を大きくでき、この結果と
して配管やポンプ等を大幅に縮小できるという利点があ
る。
Of these, the method in which ice pieces are stored in the ice heat storage tank and the ice piece mixed water is directly circulated to the cooling load can directly use the latent heat of the ice in the cooling load. There is an advantage that the difference between the inlet temperature and the outlet temperature) can be increased, and as a result, the piping, pump, etc. can be significantly reduced.

この方式を第3図に示す。This method is shown in FIG.

同図において、氷蓄熱槽1内に蓄積された氷片は、ポン
プ2により氷蓄熱槽1内の冷水と共に取出され、この氷
片と冷水との混合体すなわち氷片混合水が冷房負荷3に
送られ、冷熱として利用される。この後、温度計4から
の信号で作動する流量調節弁5を介して氷蓄熱槽1へ返
送される。
In the figure, the ice pieces accumulated in the ice heat storage tank 1 are taken out together with the cold water in the ice heat storage tank 1 by the pump 2, and the mixture of the ice pieces and the cold water, that is, the ice piece mixed water is supplied to the cooling load 3. It is sent and used as cold heat. After that, it is returned to the ice heat storage tank 1 via the flow rate control valve 5 which operates by the signal from the thermometer 4.

そして、冷房負荷3の出口温度が所定温度(12〜15℃)
を越えると流量調節弁5が開き、氷蓄熱槽1に返送さ
れ、同時に氷片混合水が氷蓄熱槽1から冷房負荷3へ送
られる。
Then, the outlet temperature of the cooling load 3 is a predetermined temperature (12 to 15 ° C)
When the temperature exceeds, the flow rate control valve 5 is opened and returned to the ice heat storage tank 1, and at the same time, the ice piece mixed water is sent from the ice heat storage tank 1 to the cooling load 3.

逆に出口温度が所定温度以下となると流量調節弁5を閉
とし、氷片混合水を冷房負荷3内にとどまらせ、そこに
おいて熱交換をするようになっている。
On the contrary, when the outlet temperature becomes equal to or lower than the predetermined temperature, the flow rate control valve 5 is closed to keep the ice piece mixed water in the cooling load 3 and perform heat exchange there.

《考案が解決しようとする課題》 しかし、上記した従来の氷片混合水を直接冷房負荷3に
循環させる方式では、氷片が冷房負荷3内の配管の内部
あるいは配管の接続部でつまり、冷却能力を低下させた
り、時には装置運転を停止させる事故を起こす等の問題
がある。
<Problems to be solved by the invention> However, in the above-mentioned conventional method of circulating the ice piece mixed water directly to the cooling load 3, the ice pieces are blocked inside the pipes in the cooling load 3 or at the connection portion of the pipes. There are problems such as a decrease in capacity and sometimes an accident that stops the operation of the equipment.

このような問題を未然に防ぐために、冷房負荷3内のコ
イル管径を大きくすることが考えられるが、この方策で
は前記した配管やポンプを大幅に縮小できるという氷片
混合水の直接循環方式の利点を没却する。
In order to prevent such a problem, it is conceivable to increase the diameter of the coil pipe in the cooling load 3. However, this measure can significantly reduce the size of the pipes and pumps described above, which is a direct circulation type of ice-flake mixed water. Forfeit the benefits.

そこで本考案は、氷片混合水の直接循環方式の利点を更
に有効に発揮し得る解氷装置を提案することを目的とし
てなされたものである。
Therefore, the present invention has been made for the purpose of proposing an ice thawing device that can more effectively exhibit the advantages of the direct circulation system of ice piece mixed water.

《課題を解決するための手段》 上記目的を達成するために本考案に係る解氷装置では、
筒状の解氷装置本体の前後端に氷片混合水流入管と冷水
流出管とをそれぞれ連結し、該氷片混合水流入管の先端
部を本体内に延長し拡径して該解氷装置本体内壁に接続
し、これにより該解氷装置本体内を水室と氷片混合水室
とに分割するとともに前記先端部に小孔を穿設してそれ
ら両室を連通可能とし、かつ該水室には冷房負荷の出口
とポンプを介して連通する水流入管を連結し、該氷片混
合水室内には氷片の流通をさえぎるように氷水分離フィ
ルタを配設した。
<< Means for Solving the Problems >> In order to achieve the above-mentioned object, the thaw apparatus according to the present invention comprises:
The ice piece mixed water inflow pipe and the cold water outflow pipe are respectively connected to the front and rear ends of the cylindrical ice melting device main body, and the tip of the ice piece mixed water inflow pipe is extended into the main body to expand the diameter of the main body. It is connected to an inner wall, which divides the inside of the body of the thaw apparatus into a water chamber and an ice piece mixing water chamber, and a small hole is bored in the tip portion to allow the two chambers to communicate with each other. A water inflow pipe communicating with the outlet of the cooling load via a pump was connected to this, and an ice water separation filter was arranged in the ice piece mixed water chamber so as to block the flow of ice pieces.

また、好ましくは、前記小孔に前記氷片混合水室側に突
出する筒状ノズルを設けることである。
Further, preferably, the small hole is provided with a cylindrical nozzle projecting to the ice piece mixed water chamber side.

《作用》 氷片混合水室には氷片混合水流入管から氷片混合水が導
入され、上記の水室には水流入管からポンプを介して水
が導入される。
<< Operation >> Ice piece mixed water is introduced into the ice piece mixed water chamber from the ice piece mixed water inflow pipe, and water is introduced into the water chamber from the water inflow pipe through a pump.

この水室内の水は上記氷片混合水流入管の先端部に形成
された小孔を通して上記の氷片混合室に入り、氷片の融
解に寄与する。
Water in the water chamber enters the ice piece mixing chamber through a small hole formed at the tip of the ice piece mixed water inflow pipe, and contributes to melting of the ice pieces.

この氷片の融解により得られた冷水は、氷片混合水室に
氷片と混合して導入されている冷水、あるいは水室から
小孔を通して氷片混合水室に流入した水とともに、氷水
分離用フィルタを介して冷水流出管に至り、装置外に取
出されて冷熱利用系へ送られる。
The cold water obtained by thawing the ice pieces is separated into ice water together with the cold water mixed with the ice pieces and introduced into the ice piece mixing water chamber or the water flowing from the water chamber into the ice piece mixing water chamber through the small holes. It reaches the cold water outflow pipe through the filter for water and is taken out of the device and sent to the cold heat utilization system.

また、氷水分離用フィルタは、氷片混合水室の未融解の
氷片が冷水流出口から装置外へ流出するのを防いでい
る。
Further, the ice water separation filter prevents unmelted ice pieces in the ice piece mixture water chamber from flowing out of the device through the cold water outlet.

一方、上記多数の小孔に筒状のノズルを設けた場合に
は、水室の水は氷片混合水室に噴出して氷片に衝突する
ので、氷片の融解はより効率よく進み、かつ、冷水流出
管からの冷水の流出をもスムーズにする作用が得られ
る。
On the other hand, when a cylindrical nozzle is provided in the large number of small holes, the water in the water chamber spouts into the ice piece mixing water chamber and collides with the ice pieces, so melting of the ice pieces proceeds more efficiently, At the same time, the action of smoothing outflow of cold water from the cold water outflow pipe can be obtained.

《実施例》 第1図(A)とそのA−A′線断面矢視図である第1図
(B)は本考案に係る解氷装置の好適な実施例を示して
いる。
<< Embodiment >> FIG. 1 (A) and its sectional view taken along the line AA 'in FIG. 1 (B) show a preferred embodiment of the thaw apparatus according to the present invention.

同図に示すように、円筒状の解氷装置本体10の一方の平
側面10aに氷片混合水流入管11が、他方の平側面10bに冷
水流出管12が夫々設けられ、この冷水流出管12近傍の円
筒体内部に氷水分離用フィルタ13が設けられている。
As shown in the figure, an ice piece mixed water inflow pipe 11 is provided on one flat side surface 10a of the cylindrical defroster main body 10, and a cold water outflow pipe 12 is provided on the other flat side surface 10b. An ice water separation filter 13 is provided inside the cylindrical body in the vicinity.

また、氷片混合水流入管11の先端部11aは徐々に拡径し
たフレア状に形成されており、その端部は解氷装置本体
10の内壁10cに接合されている。さらに、そのフレア状
先端部11aには多数の小孔14が穿設されている。
Further, the tip portion 11a of the ice piece mixed water inflow pipe 11 is formed in a flare shape in which the diameter is gradually expanded, and the end portion thereof is the main body of the thaw device.
It is joined to the inner wall 10c of 10. Further, a large number of small holes 14 are formed in the flared tip portion 11a.

そして上記先端部11aにて解氷装置本体10内部が氷片混
合水室αと水室βとに分割されている。
Then, the inside of the thaw device main body 10 is divided into an ice piece mixture water chamber α and a water chamber β at the tip portion 11a.

さらにまた、この水室βの側壁には水流入管16が設けら
れている。
Furthermore, a water inflow pipe 16 is provided on the side wall of the water chamber β.

さらに本実施例では、上記の氷片混合水流入管11の先端
部分11aに形成された多数の小孔14には、若干氷片混合
水室α側へ突出された筒状ノズルが配設されている。そ
してこの筒状ノズルは、小孔14に小さい円筒体を溶接そ
の他の手段で取付けられたものであってもよく、あるい
は先端部11aをプレス加工等することにより一体的に形
成するようにしてもよい。
Further, in the present embodiment, a large number of small holes 14 formed in the tip portion 11a of the ice piece mixed water inflow pipe 11 are provided with cylindrical nozzles slightly projected to the ice piece mixed water chamber α side. There is. The tubular nozzle may be a small cylinder attached to the small hole 14 by welding or other means, or may be integrally formed by pressing the tip 11a. Good.

第2図は、以上のように構成した本考案に係る解氷装置
を冷水利用の冷房システムに使用する場合の一例を示し
ている。
FIG. 2 shows an example in which the deicer according to the present invention configured as described above is used in a cooling system using cold water.

第2図の冷房システムにより、以上の構成に係る解氷装
置の作用を説明する。
The operation of the ice-melting device having the above configuration will be described with reference to the cooling system shown in FIG.

解氷装置本体10には、予め氷蓄熱槽1から所定量の氷片
混合水がポンプ2で送られてきている。
A predetermined amount of ice piece mixed water has been sent from the ice heat storage tank 1 to the ice-melting apparatus main body 10 in advance by the pump 2.

この氷片混合水は、氷片混合水流入管11から解氷装置本
体10内の氷片混合水室α内に流入する。
The ice piece mixed water flows from the ice piece mixed water inflow pipe 11 into the ice piece mixed water chamber α in the main body 10 of the ice melting device.

この氷片混合水室αの冷水のみが氷水分離用フィルタ13
を通過し、冷水流出管12から流出して、冷房負荷3へ送
られる。
Only the cold water in the ice piece mixed water chamber α is the ice water separating filter 13
Through the cold water outflow pipe 12 and sent to the cooling load 3.

冷水流出管12の出口において、冷水の温度が温度計6で
測定され、所定温度(例えば、2℃)以下の時は、ポン
プ7を作動させ、冷房負荷3の出口水をポンプ7にて吸
引し、水流入管16を介して解氷装置本体10の水室βに導
入する。そしてその導入された水は、氷片混合水流入管
11の先端部に形成された小孔14を介して氷片混合水室α
に流入される。このとき、冷房負荷3の出口水は、冷房
負荷3での熱交換により昇温されており、水部βから上
記多数の小孔14に形成されている筒状ノズルを通って氷
片混合水室αに噴出し、氷片に突出して衝突エネルギと
上記昇温による顕熱とで氷片を効果的に融解する。
At the outlet of the cold water outflow pipe 12, when the temperature of the cold water is measured by the thermometer 6 and is below a predetermined temperature (for example, 2 ° C.), the pump 7 is operated and the outlet water of the cooling load 3 is sucked by the pump 7. Then, the water is introduced into the water chamber β of the defroster main body 10 through the water inflow pipe 16. And the introduced water is the ice piece mixed water inflow pipe.
The ice piece mixed water chamber α is passed through a small hole 14 formed at the tip of 11
Is flowed into. At this time, the outlet water of the cooling load 3 has been heated by heat exchange in the cooling load 3, and passes through the tubular nozzles formed in the large number of small holes 14 from the water portion β to mix the ice pieces. The ice pieces are jetted into the chamber α and projected onto the ice pieces to effectively melt the ice pieces by the collision energy and the sensible heat due to the temperature rise.

一方、冷水流出管12の出口における冷水の温度が上記の
所定温度を上回る時は、解氷装置本体10内の氷片が不足
しているときであるから、ポンプ7が停止し、冷房負荷
3の昇温した出口水が、解氷装置本体10へ導入するのを
阻止する。
On the other hand, when the temperature of the chilled water at the outlet of the chilled water outflow pipe 12 exceeds the above-mentioned predetermined temperature, it means that the ice pieces in the body of the defroster 10 are insufficient, so the pump 7 is stopped and the cooling load 3 It prevents the heated outlet water from being introduced into the main body 10 of the defroster.

このとき、解氷装置本体10内の水は水流入管16とポンプ
7との間に設けられた逆止弁9により、水流入管16から
ポンプ7側へ逆流するのが阻止されている。
At this time, the check valve 9 provided between the water inflow pipe 16 and the pump 7 prevents the water in the defroster body 10 from flowing back from the water inflow pipe 16 to the pump 7 side.

また、冷房負荷3からの出口水を流量調節弁5、オリフ
ィス8のいずれを介して氷蓄熱槽1へ戻すかは、この出
口水の温度により決定される。
Further, whether the outlet water from the cooling load 3 is returned to the ice heat storage tank 1 via the flow rate control valve 5 or the orifice 8 is determined by the temperature of the outlet water.

すなわち、冷房負荷3の出口水の温度を温度計4で測定
し、所定温度(例えば、15℃)以下の時は流量調節弁5
を閉じ、オリフィス8を介して少量づつ氷蓄熱槽1へ戻
す。
That is, the temperature of the outlet water of the cooling load 3 is measured by the thermometer 4, and when the temperature is below a predetermined temperature (for example, 15 ° C.), the flow rate control valve 5
Is closed and returned to the ice heat storage tank 1 little by little through the orifice 8.

このオリフィス8を通過する量の出口水が冷房負荷3か
ら流出するため、温度計4は冷房負荷3の水温上昇をい
ち早くキャッチする。なお、この流出量と同量の冷水が
解氷装置10の氷片混合水室αから冷水流出管12を通して
冷房負荷3へ送られる。
Since the amount of outlet water that passes through the orifice 8 flows out from the cooling load 3, the thermometer 4 quickly catches the rise in water temperature of the cooling load 3. In addition, the same amount of cold water as this outflow amount is sent from the ice piece mixing water chamber α of the ice-melting device 10 to the cooling load 3 through the cold water outflow pipe 12.

同時に、この冷水量に見合う量の氷片混合水が氷蓄熱槽
1からポンプ2により氷片混合水流入管11を通して解氷
装置本体10の氷片混合水室αに導入される。
At the same time, the ice piece mixed water in an amount commensurate with this amount of cold water is introduced from the ice heat storage tank 1 by the pump 2 into the ice piece mixed water chamber α of the ice-melting device main body 10 through the ice piece mixed water inflow pipe 11.

また、冷房負荷3の出口水の温度が上記の所定温度以上
のときは流量調節弁5を全開とし、大量の冷房負荷3の
出口水をこの流量調節弁5を介して氷蓄熱槽1へ戻す。
When the temperature of the outlet water of the cooling load 3 is equal to or higher than the predetermined temperature, the flow rate control valve 5 is fully opened, and a large amount of the outlet water of the cooling load 3 is returned to the ice heat storage tank 1 via the flow rate control valve 5. .

この流量調節弁5を通る大量の水が冷房負荷3から流出
し、この流出量と同量の大量の冷水が解氷装置本体10の
氷片混合水室αから冷水流出管12を通して冷房負荷3に
導入される。
A large amount of water that flows through the flow rate control valve 5 flows out from the cooling load 3, and a large amount of cold water of the same amount as this outflow amount flows from the ice piece mixture water chamber α of the deicing device body 10 through the cooling water outflow pipe 12 to the cooling load 3 Will be introduced to.

同時に、この大量の冷水量に見合う量の氷片混合水が氷
蓄熱槽1からポンプ2により氷片混合水流入管11を介し
て解氷装置10の氷片混合水室αに導入されるのである。
このようにすることにより、効率的に冷房を行うように
なる。
At the same time, the ice piece mixed water in an amount commensurate with this large amount of cold water is introduced from the ice heat storage tank 1 by the pump 2 into the ice piece mixed water chamber α of the ice melting device 10 via the ice piece mixed water inflow pipe 11. .
By doing so, cooling can be efficiently performed.

《考案の効果》 以上詳述した本考案に係る解氷装置によれば、氷片を効
率よく連続的に融解し、低温冷水のみを連続して取出す
ことができる。
<< Advantages of the Invention >> According to the defroster according to the present invention described in detail above, the ice pieces can be efficiently and continuously melted, and only the low temperature cold water can be continuously taken out.

従って、本考案に係る解氷装置を氷水利用の冷房システ
ムに使用することにより、次のような効果を奏すること
ができる。
Therefore, the following effects can be obtained by using the defroster according to the present invention in a cooling system using ice water.

(1)氷片は解氷装置本体内に止どまり、冷房負荷へは
冷水のみが送られるため、冷房負荷のコイルの内部や接
続部での氷片のつまりが生ぜず、冷却能力の低下や、装
置運転の停止といった事態は発生しない。
(1) Since the ice pieces remain inside the defroster and only the cold water is sent to the cooling load, the ice pieces are not clogged inside the cooling load coil or at the connection part, and the cooling capacity is reduced. The situation such as the stop of the operation of the equipment does not occur.

(2)上記(1)により従来の冷房負荷をそのまま利用
することができる。
(2) By the above (1), the conventional cooling load can be used as it is.

(3)冷房負荷へは、低温かつ一定温度の冷水(例えば
0〜2℃の冷水)を安定して供給できる。
(3) Cold water having a low temperature and a constant temperature (for example, cold water at 0 to 2 ° C.) can be stably supplied to the cooling load.

(4)上記(1)と(3)により、冷房負荷のコイル管
径を従来のものより小さくでき、この結果、冷房負荷全
体を小型化できる。
(4) Due to the above (1) and (3), the coil tube diameter of the cooling load can be made smaller than that of the conventional one, and as a result, the entire cooling load can be downsized.

(5)上記(1)と(3)により、冷房負荷に体する信
頼性が増大する。
(5) Due to the above (1) and (3), the reliability of the cooling load is increased.

【図面の簡単な説明】[Brief description of drawings]

第1図は本考案に係る解氷装置の一実施例を示す図、第
2図は第1図に示す本考案に係る解氷装置を氷水利用の
冷房システムに使用する場合の一例を示す系統図、第3
図は従来の冷房方式を示す系統図である。 10……解氷装置本体、11……氷片混合水流入管 12……冷水流出管、13……氷水分離用フィルタ 14……小孔、16……水流入管 α……氷片混合水室、β……水室
FIG. 1 is a diagram showing an embodiment of an ice thawing device according to the present invention, and FIG. 2 is a system showing an example of using the ice thawing device according to the present invention shown in FIG. 1 in a cooling system using ice water. Figure, third
The figure is a system diagram showing a conventional cooling system. 10 …… Defroster main body, 11 …… Ice piece mixed water inflow pipe 12 …… Cold water outflow pipe, 13 …… Ice water separation filter 14 …… Small hole, 16 …… Water inflow pipe α …… Ice piece mixed water chamber, β: Water chamber

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】筒状の解氷装置本体の前後端に氷片混合水
流入管と冷水流出管とをそれぞれ連結し、該氷片混合水
流入管の先端部を本体内に延長し拡径して該解氷装置本
体内壁に接続し、これにより該解氷装置本体内を水室と
氷片混合水室とに分割するとともに前記先端部に小孔を
穿設してそれら両室を連通可能とし、かつ該水室には冷
房負荷の出口とポンプを介して連通する水流入管を連結
し、該氷片混合水室内には氷片の流通をさえぎるように
氷水分離フィルタを配設してなることを特徴とする解氷
装置。
1. An ice piece mixed water inflow pipe and a cold water outflow pipe are respectively connected to front and rear ends of a cylindrical thaw apparatus main body, and a tip end portion of the ice piece mixed water inflow pipe is extended and expanded in the main body. It is connected to the inner wall of the body of the thaw device, thereby dividing the inside of the thaw device body into a water chamber and an ice piece mixed water chamber, and a small hole is bored at the tip to enable the two chambers to communicate with each other. Further, a water inflow pipe communicating with the outlet of the cooling load via a pump is connected to the water chamber, and an ice water separation filter is arranged in the ice piece mixed water chamber so as to block the flow of the ice pieces. Defroster characterized by.
【請求項2】前記小孔に前記氷片混合水室側に突出する
筒状ノズルを設けてなることを特徴とする請求項1記載
の解氷装置。
2. The thaw apparatus according to claim 1, wherein the small hole is provided with a cylindrical nozzle protruding toward the ice piece mixed water chamber side.
JP1988117360U 1988-09-08 1988-09-08 Thaw Expired - Lifetime JPH078969Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988117360U JPH078969Y2 (en) 1988-09-08 1988-09-08 Thaw

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988117360U JPH078969Y2 (en) 1988-09-08 1988-09-08 Thaw

Publications (2)

Publication Number Publication Date
JPH0241018U JPH0241018U (en) 1990-03-20
JPH078969Y2 true JPH078969Y2 (en) 1995-03-06

Family

ID=31360753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988117360U Expired - Lifetime JPH078969Y2 (en) 1988-09-08 1988-09-08 Thaw

Country Status (1)

Country Link
JP (1) JPH078969Y2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2558751B2 (en) * 1987-11-02 1996-11-27 富士通株式会社 Electron beam drawing method

Also Published As

Publication number Publication date
JPH0241018U (en) 1990-03-20

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