JPH078125B2 - Oscillating actuator - Google Patents

Oscillating actuator

Info

Publication number
JPH078125B2
JPH078125B2 JP35824292A JP35824292A JPH078125B2 JP H078125 B2 JPH078125 B2 JP H078125B2 JP 35824292 A JP35824292 A JP 35824292A JP 35824292 A JP35824292 A JP 35824292A JP H078125 B2 JPH078125 B2 JP H078125B2
Authority
JP
Japan
Prior art keywords
yoke
substrate
coil
fixed
fixed shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP35824292A
Other languages
Japanese (ja)
Other versions
JPH06197509A (en
Inventor
亮二 峯岸
俊哉 内田
照内 寺地
巌 杉崎
Original Assignee
コパル電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コパル電子株式会社 filed Critical コパル電子株式会社
Priority to JP35824292A priority Critical patent/JPH078125B2/en
Publication of JPH06197509A publication Critical patent/JPH06197509A/en
Publication of JPH078125B2 publication Critical patent/JPH078125B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は所定角度範囲内で回動
するトルク変動の少ない扁平状の揺動型アクチュエータ
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat oscillating actuator that rotates within a predetermined angle range and has little torque fluctuation.

【0002】[0002]

【従来の技術】従来、トルク変動の少ない揺動型アクチ
ュエータには図3、図4に示す可動線輪型アクチュエー
タや、図5、図6に示す可動磁石型アクチュエータがあ
った。以下それらの概要について説明する。
2. Description of the Related Art Heretofore, as swing-type actuators with small torque fluctuation, there have been a movable coil-wheel actuator shown in FIGS. 3 and 4, and a movable magnet-type actuator shown in FIGS. The outline of them will be described below.

【0003】第1に図3、図4を参照して、可動線輪型
アクチュエータについて説明する。バックヨーク22と
一体に形成した固定ヨーク23が軸受21を介して回動
軸20に軸支される。基板26は回動軸20に嵌挿固着
されており、回動軸20と共に、矢印方向へ回動自在で
ある。基板26の一側面にコイル24を配設し、このコ
イル24に対面するように、固定ヨーク23内側に永久
磁石25を固着する。符号27はリード線である。リー
ド線27に通電すると、図4に示す永久磁石25による
磁束φにより発生した磁界内で、コイル24との間に電
磁力が発生し、回動部であるコイル24、基板26等は
磁界内で回動する。これにより可動線輪型アクチュエー
タが作動する。
First, a movable coil actuator will be described with reference to FIGS. 3 and 4. A fixed yoke 23 formed integrally with the back yoke 22 is pivotally supported on the rotary shaft 20 via a bearing 21. The substrate 26 is fitted and fixed to the rotary shaft 20, and is rotatable in the arrow direction together with the rotary shaft 20. The coil 24 is disposed on one side surface of the substrate 26, and the permanent magnet 25 is fixed inside the fixed yoke 23 so as to face the coil 24. Reference numeral 27 is a lead wire. When the lead wire 27 is energized, an electromagnetic force is generated between the coil 24 and the coil 24 in the magnetic field generated by the magnetic flux φ generated by the permanent magnet 25 shown in FIG. Rotate with. This activates the movable wheel actuator.

【0004】つぎに、図5、図6を参照して、可動磁石
型アクチュエータについて説明する固定軸30には、軸
受31を介して、回動ヨーク34が回動自在に軸支され
る。バックヨーク33は、固定軸30へ嵌挿固着され、
前記バックヨーク33一側にコイル基板35を固着す
る。このコイル基板35の上面にはコイル36を装着
し、このコイル36と対面するように、回動ヨーク34
の内側面に永久磁石37を配設する。符号38はコイル
のリード線であり、32は固定軸押えである。リード線
38へ通電することにより、図6に図示のような永久磁
石37による磁束φにより発生した磁界内で、コイル3
6との間に電磁力が発生し、回動ヨーク34、永久磁石
37等からなる回動部が磁界内で、所定方向へ回動する
ことにより可動磁石型アクチュエータが作動する。
Next, referring to FIGS. 5 and 6, a rotary yoke 34 is rotatably supported by a fixed shaft 30 for explaining the movable magnet actuator via a bearing 31. The back yoke 33 is fitted and fixed to the fixed shaft 30,
The coil substrate 35 is fixed to one side of the back yoke 33. A coil 36 is mounted on the upper surface of the coil substrate 35, and the rotating yoke 34 is placed so as to face the coil 36.
A permanent magnet 37 is arranged on the inner surface of the. Reference numeral 38 is a coil lead wire, and 32 is a fixed shaft retainer. By energizing the lead wire 38, the coil 3 is generated in the magnetic field generated by the magnetic flux φ generated by the permanent magnet 37 as shown in FIG.
An electromagnetic force is generated between the movable magnet-type actuator and the movable magnet-type actuator 6 by rotating the rotating yoke 34, the permanent magnet 37, and the like in a predetermined direction within a magnetic field.

【0005】[0005]

【発明が解決しようとする課題】前記従来例のアクチュ
エータには以下説明するような問題点があった。第1に
図3、図4に示す可動線輪型の揺動アクチュエータで
は、高出力トルクを得ようとすると大型になり、可動
部、電磁力発生部が軸対称に配設してないので、姿勢に
より負荷が変動し、捩じれ力による軸受荷重の変化や損
失によって、出力トルクが変動する可能性があり、高出
力トルクを有する扁平形状の構成がとりにくく、又可動
部にコイルのリード線が取り付けてあるので、アクチュ
エータの寿命に悪影響を及ぼしたり、機械的損失を伴う
等の欠点があった。次に図5、図6に示す可動磁石型ア
クチュエータの場合には、永久磁石による空隙磁束が、
コイル導体と同時にバックヨークとも鎖交するので、バ
ックヨーク内の磁束移動による渦電流損やヒステリシス
損等の鉄損が発生して、これ等の損失を伴うと共に残留
磁気や磁路の微小なパーミアンスの変化によるコギング
トルクの発生となり、スムースな回動を損なうことにな
る。又トルクを大きくするため永久磁石を強力なものと
した場合には、軸受に高推力荷重がかかり、関係部材の
損失と損傷を伴う恐れがあり、組立作業時等にも作業性
が悪く、更に固定ヨークとバックヨークが別体として形
成してあるので、図5に示すように、外部への漏洩磁束
φlが大きい等の問題点があった。本発明はこれらの問
題点を解決するためになされたものである。
The above-mentioned conventional actuator has the following problems. First, in the movable coil-type swing actuator shown in FIGS. 3 and 4, when trying to obtain a high output torque, the size becomes large, and the movable portion and the electromagnetic force generating portion are not arranged in axial symmetry. The load may change depending on the posture, and the output torque may change due to the change or loss of the bearing load due to the torsional force.Therefore, it is difficult to have a flat shape with high output torque, and the coil lead wire is not attached to the movable part. Since it is attached, there are drawbacks such as adversely affecting the life of the actuator and causing mechanical loss. Next, in the case of the movable magnet type actuator shown in FIG. 5 and FIG.
Since it also interlinks with the back yoke at the same time as the coil conductor, iron loss such as eddy current loss and hysteresis loss occurs due to the movement of magnetic flux in the back yoke, and these losses are accompanied by residual magnetism and minute permeance of the magnetic path. Changes to cause cogging torque, which impairs smooth rotation. If the permanent magnet is made strong to increase the torque, a high thrust load is applied to the bearing, which may cause loss and damage to related members. Since the fixed yoke and the back yoke are formed as separate bodies, there is a problem that the leakage magnetic flux φl to the outside is large as shown in FIG. The present invention has been made to solve these problems.

【0006】[0006]

【課題を解決するための手段】本発明は前記課題を解決
するためになされたもので、実施例の図面に附した符号
を用いて、以下説明する扁平揺動型アクチュエータを開
示するものである。固定軸(1)に回動自在に支承され
たバックヨーク(8)と回動ヨーク(3)とよりなるヨ
ークの空隙内に基板(4)を設け、前記基板(4)の円
周上のバックヨーク(8)側の適宜の位置に、複数のコ
イル(5)を配設し、前記コイル(5)が固定軸(1)
方向に対し直交する面内に位置するように基板(4)と
固定軸(1)とを固着し、前記コイル(5)を設けた基
板(4)に対面するように、回動ヨーク(3)内側面に
永久磁石(6)を配設した揺動型アクチュエータであ
り、基板(4)上のバックヨーク(8)側に永久磁石
(6)を又この永久磁石(6)を設けた基板(4)と対
面するように回動ヨーク(3)内側にコイル(5)を設
けることも可能であり、固定軸(1)の中心に形成した
空洞部(18)の一端外側に光源(16)を、他端外側
に回動ヨーク(3)に固着したミラー取付具(15)を
配設し、光源(16)よりの光(17)が前記ミラー取
付具(15)に設けたミラー(14)へ反射して、ミラ
ー取付具(15)の孔部(h)を通過して外部へ照射す
ることを可能とする光路を具えた揺動型アクチュエータ
を構成すると共に、基板(4)上又は回動ヨーク(3)
内側に設けたコイル(5)のリード線(13)を固定軸
の中心空洞部(18)より引き出してなる揺動型アクチ
ュエータである。
The present invention has been made to solve the above problems, and discloses a flat oscillating actuator described below by using the reference numerals attached to the drawings of the embodiments. . A substrate (4) is provided in a space of a yoke composed of a back yoke (8) rotatably supported on a fixed shaft (1) and a rotating yoke (3), and the substrate (4) is provided on the circumference of the substrate (4). A plurality of coils (5) are arranged at appropriate positions on the back yoke (8) side, and the coils (5) are fixed shafts (1).
The substrate (4) and the fixed shaft (1) are fixed so as to be located in a plane orthogonal to the direction, and the rotating yoke (3) is arranged so as to face the substrate (4) provided with the coil (5). ) A swing type actuator having a permanent magnet (6) disposed on its inner surface, wherein the permanent magnet (6) is provided on the back yoke (8) side of the substrate (4) and the permanent magnet (6) is provided on the substrate. It is also possible to provide the coil (5) inside the rotary yoke (3) so as to face (4), and the light source (16) is provided outside one end of the cavity (18) formed at the center of the fixed shaft (1). ) Is provided on the outer side of the other end with a mirror mount (15) fixed to the rotary yoke (3), and light (17) from the light source (16) is provided on the mirror mount (15). Light that is reflected to 14) and that can be emitted to the outside through the hole (h) of the mirror fixture (15). Together constituting the oscillating actuator comprising a substrate (4) on or turning yoke (3)
This is an oscillating actuator in which a lead wire (13) of a coil (5) provided inside is pulled out from a central cavity (18) of a fixed shaft.

【0007】[0007]

【作用】複数のコイル5に電流を流すと、各半径方向導
体部イ,ロの相対した永久磁石6による磁束φにより発
生した空隙磁界の中で複数のコイル5の電流との間に電
磁力が発生し、回動ヨーク3、バックヨーク8等からな
る回動部が所定方法へ回動する。又流入電流の方向を逆
にすれば、回動方向が逆転する。
When a current is applied to the plurality of coils 5, electromagnetic force is generated between the currents of the plurality of coils 5 in the air gap magnetic field generated by the magnetic flux φ generated by the permanent magnets 6 facing each other in the radial conductor portions a and b. Occurs, the rotating portion including the rotating yoke 3 and the back yoke 8 rotates in a predetermined manner. When the direction of the inflow current is reversed, the rotation direction is reversed.

【0008】[0008]

【実施例】以下本発明の実施例を添付図を参照して説明
する。図1は本発明の実施例を示す断面図で図2をB−
B´の線に沿って見た断面図、、図2は図1のA−A´
の線に沿って見た断面図である。固定軸ベース2に取り
付けた固定軸1の外周に設けた軸受7を介して、バック
ヨーク8と回動ヨーク3とよりなる断面ほぼコ字状のヨ
ーク部を回動自在に固定軸1に軸支する。前記ヨーク部
の空隙内には、基板固定ねじ10により固定軸1へ連結
固着した基板4を収容する。締結ねじ12は後述するミ
ラー取付具15の回動ヨーク3への取付を兼ねている。
基板4の上面バックヨーク8の側にコイル5を配設し、
更に回動ヨーク3の基板4とコイル5とに対面する回動
ヨーク3の内側面に永久磁石6を取り付ける。符号13
はコイル5のリード線で、固定軸ベース2の中心空洞部
18より外部へ引き出される。符号9は固定軸押えであ
る。前記基板4に配設したコイル5は基板4の円周上に
適宜配設固着した複数のコイルであり、固定軸1方向に
対して直交する平面内に位置するように、固定軸に連結
した基板4に固着する。複数のコイル5の半径方向導体
部イ、ロのそれぞれに対して回動ヨーク3に配設した複
数極の永久磁石6の異極が相対し、これらの複数のコイ
ル5は、発生する電磁力が同一方向になるように接続さ
れた状態でバックヨーク8、回動ヨーク3で形成したヨ
ーク部の空隙内に位置する。この様にして複数極の永久
磁石6を内部に固着した回動ヨーク3とコイル5を配設
したバックヨーク8とは嵌着一体化してあり、軸受7を
介して回動自在に、固定軸1に軸支されるものである。
前記構成においては、固定軸1と直交する同一平面内に
複数のコイル5と複数極の永久磁石6によりなる複数の
電磁力発生部を持っているので、中心軸扁平形状で高ト
ルクを発生可能とすることができる。複数の永久磁石6
を固着した回動ヨーク3とバックヨーク8とを結合する
ために、前記両部材3,6をバックヨーク固定ねじ11
で締結して一体化と所定寸法の空隙を保持可能としてい
るので永久磁石6のバックヨーク8に対する吸引力は直
接軸受7に及ぶことがなく、漏洩磁束が外部に漏洩する
ことを防止している。本発明に係る揺動アクチュエータ
は、永久磁石6による磁束φは、導磁性体よりなる回動
ヨーク3、バックヨーク8が一体化された図示のような
磁路を通るので、磁束φと回動ヨーク3、バックヨーク
8の相対速度は零であるから、渦電流損、ヒステリシス
損等の鉄損の発生がなく、パーミアンスの変化も発生し
ないので、コギングトルクもなく、電流に比例した電磁
力により円滑に回動する。既に説明したように、実施例
では複数極の永久磁石6や複数のコイル5の平面隙間を
利用して、バックヨーク固定ねじ11を用いて回動ヨー
ク3とバックヨーク8を締結して一体化している。又同
様に締結ねじ12を用いてヨーク部と共に回動するミラ
ー取付具15等を固定する。尚本実施例では、基板4の
円周上のバックヨーク8側とコイル5群を、又前記コイ
ル5群を設けた基板4に対面するように回動ヨーク3側
に永久磁石6を配設しているが、前記コイル5、永久磁
石6の位置を交替して基板4上のバックヨーク8側に永
久磁石6を、又この永久磁石6を設けた基板4と対面す
るように回動ヨーク3内側にコイル5を設けることも可
能である。又固定軸1の中心に形成した空洞部18の一
端外側に光源16を、他端外側に回動ヨーク3にねじ止
め12したミラー取付具15を装着し、反射ミラー14
をミラー取付具15に設け、光源よりの光17が揺動す
る前記ミラー14に反射して、ミラー取付具15の孔部
hより外部へ照射する構成とすることもできる。
Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG.
FIG. 2 is a sectional view taken along the line B ′ in FIG.
It is sectional drawing seen along the line. Through a bearing 7 provided on the outer periphery of the fixed shaft 1 attached to the fixed shaft base 2, a yoke portion having a substantially U-shaped cross section composed of a back yoke 8 and a rotating yoke 3 is rotatably attached to the fixed shaft 1. Support. The board 4 fixedly connected to the fixed shaft 1 by the board fixing screw 10 is housed in the space of the yoke portion. The fastening screw 12 also serves to attach the mirror attachment 15 to be described later to the rotating yoke 3.
The coil 5 is arranged on the upper back yoke 8 side of the substrate 4,
Further, a permanent magnet 6 is attached to the inner surface of the rotating yoke 3 facing the substrate 4 and the coil 5 of the rotating yoke 3. Code 13
Is a lead wire of the coil 5 and is drawn out from the central hollow portion 18 of the fixed shaft base 2. Reference numeral 9 is a fixed shaft retainer. The coils 5 arranged on the substrate 4 are a plurality of coils appropriately arranged and fixed on the circumference of the substrate 4, and are connected to the fixed shaft so as to be located in a plane orthogonal to the fixed axis 1 direction. It adheres to the substrate 4. The different poles of the permanent magnets 6 having a plurality of poles arranged in the rotating yoke 3 face the radial conductor portions a and b of the plurality of coils 5, respectively, and the plurality of coils 5 generate an electromagnetic force. Are connected to each other in the same direction, and are located in the gap of the yoke portion formed by the back yoke 8 and the rotating yoke 3. In this way, the rotary yoke 3 having the permanent magnets 6 having a plurality of poles fixed therein and the back yoke 8 having the coil 5 are fitted and integrated, and are rotatably mounted on the fixed shaft via the bearing 7. It is pivotally supported by 1.
In the above configuration, since a plurality of electromagnetic force generating parts including a plurality of coils 5 and permanent magnets 6 having a plurality of poles are provided in the same plane orthogonal to the fixed shaft 1, it is possible to generate high torque with a flat central axis. Can be Multiple permanent magnets 6
In order to connect the rotary yoke 3 and the back yoke 8 to each other, the two members 3, 6 are fixed to the back yoke fixing screw 11
Since the permanent magnets 6 can be fastened together to maintain an air gap of a predetermined size, the attraction force of the permanent magnet 6 to the back yoke 8 does not directly reach the bearing 7, and the leakage magnetic flux is prevented from leaking to the outside. . In the swing actuator according to the present invention, since the magnetic flux φ generated by the permanent magnet 6 passes through the magnetic path as shown in the figure in which the rotating yoke 3 and the back yoke 8 made of a magnetic conductive material are integrated, the magnetic flux φ rotates with the magnetic flux φ. Since the relative speed of the yoke 3 and the back yoke 8 is zero, iron loss such as eddy current loss and hysteresis loss does not occur, and permeance does not change, so there is no cogging torque and electromagnetic force proportional to the current It rotates smoothly. As described above, in the embodiment, the flat yokes of the permanent magnets 6 having a plurality of poles and the plane gaps of the coils 5 are utilized to fasten and integrate the rotating yoke 3 and the back yoke 8 with the back yoke fixing screw 11. ing. Similarly, the fastening screw 12 is used to fix the mirror attachment 15 or the like that rotates together with the yoke. In this embodiment, the back yoke 8 side and the coil 5 group on the circumference of the substrate 4 are arranged, and the permanent magnet 6 is arranged on the rotating yoke 3 side so as to face the substrate 4 on which the coil 5 group is provided. However, the positions of the coil 5 and the permanent magnet 6 are exchanged, and the permanent magnet 6 is provided on the back yoke 8 side on the substrate 4, and the turning yoke is arranged so as to face the substrate 4 on which the permanent magnet 6 is provided. It is also possible to provide the coil 5 inside 3. Further, a light source 16 is attached to the outside of one end of a cavity 18 formed in the center of the fixed shaft 1, and a mirror attachment 15 screwed to the rotating yoke 3 is attached to the outside of the other end thereof.
May be provided in the mirror attachment 15 so that the light 17 from the light source is reflected by the oscillating mirror 14 and is emitted to the outside through the hole h of the mirror attachment 15.

【0009】[0009]

【発明の効果】本発明の揺動型アクチュエータは、固定
軸1に直交する平面内に複数のコイル5を適宜配設、固
着したコイル基板4と複数の永久磁石6を固着した回動
ヨーク3とバックヨーク8からなる回動部を軸受7を介
して固定軸1に回動自在に軸支させた構成であるので、
中心軸で扁平形状にすることができ、複数のコイル5と
複数の永久磁石6を用いることによりトルクの増大を計
ることができる。永久磁石(6)による磁束φは、導磁
性体よりなる内部に空隙を持った閉磁路を形成してお
り、鉄損がなく、磁束の外部漏洩がなく且つ回動の際に
も、パーミアンスの変動がないのでコギングトルクの発
生の恐れもない。複数のコイル(5)に流れる電流と空
隙磁束による電磁力のみが回動トルクとなり、微小な電
流変化にも円滑なトルク変化で対応し、精密な制御を可
能にするものである。回動トルクを増加させるため、強
力な永久磁石(6)を使用しても、複数極の永久磁石
(6)とバックヨーク(8)は嵌着締結して一体化して
いるので、軸受(7)には吸引力による無理な荷重はか
からないから、耐久寿命、並びに円滑回動に役立つ。又
コイル(5)に給電するためのリード線(13)は空洞
(18)内へ引き出されているから、複数のコイル5と
同様回動しないので、機械的損失がなく、寿命の耐久性
に役立つ。複数のコイル5、複数極の永久磁石6を配設
した隙間にバックヨーク固定ねじ11、締結ねじ12を
設けることにより、空間を有効に利用できる。固定軸ベ
ース2を設け固定軸1と嵌合配設し、内部に空隙部18
を設けることにより、リード線13を通過するために使
用したりレーザー光等の光伝送の光路として利用するこ
とができる。固定軸1に対して、関係部材が対称に構成
されているので、姿勢により偏荷重の発生することがな
く、無理な応力の発生する恐れはない等の特徴を具えて
いる。
According to the oscillating actuator of the present invention, a plurality of coils 5 are appropriately arranged in a plane orthogonal to the fixed shaft 1, and a rotating yoke 3 having a plurality of coil substrates 4 and a plurality of permanent magnets 6 fixed thereto is fixed. Since the rotating portion including the back yoke 8 and the back yoke 8 is rotatably supported by the fixed shaft 1 via the bearing 7,
The central axis can be made flat, and the torque can be increased by using the plurality of coils 5 and the plurality of permanent magnets 6. The magnetic flux φ generated by the permanent magnet (6) forms a closed magnetic circuit having an air gap inside which is made of a magnetic conductive material, has no iron loss, has no external leakage of magnetic flux, and has a permeance even when rotating. Since there is no fluctuation, there is no fear of generation of cogging torque. Only the electromagnetic force due to the current flowing in the plurality of coils (5) and the magnetic flux of the air gap serves as the turning torque, and even a slight change in the current can be dealt with by the smooth change in torque, enabling precise control. Even if a strong permanent magnet (6) is used to increase the turning torque, the permanent magnet (6) having a plurality of poles and the back yoke (8) are fitted and fastened together to form a single unit. ) Does not apply an unreasonable load due to the suction force, which is useful for durable life and smooth rotation. Further, since the lead wire (13) for supplying power to the coil (5) is drawn out into the cavity (18), it does not rotate like the plurality of coils 5, so that there is no mechanical loss and durability of life is improved. Be useful. By providing the back yoke fixing screw 11 and the fastening screw 12 in the gap where the plurality of coils 5 and the permanent magnets 6 having a plurality of poles are arranged, the space can be effectively used. The fixed shaft base 2 is provided, and the fixed shaft 1 is fitted and arranged.
By providing, it can be used for passing through the lead wire 13 or can be used as an optical path for optical transmission of laser light or the like. Since the related members are configured symmetrically with respect to the fixed shaft 1, there are features such that an eccentric load does not occur depending on the posture, and there is no fear of undue stress.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の揺動型アクチュエータの実施例の図2
のB−B´の線に沿った断面図。
FIG. 1 is a diagram of an embodiment of an oscillating actuator of the present invention.
A sectional view taken along the line BB ′ of FIG.

【図2】図1のA−A´の線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line AA ′ of FIG.

【図3】従来例の可動線輪型揺動アクチュエータの図4
のE−E´の線に沿った断面図。
FIG. 3 is a view of a movable wheel type swing actuator of a conventional example.
A sectional view taken along the line EE ′ of FIG.

【図4】図3のC−C´の線に沿った断面図。4 is a cross-sectional view taken along the line CC ′ of FIG.

【図5】従来例の可動磁石型揺動アクチュエータの図6
のF−F´の線に沿った断面図。
FIG. 5 is a view of a movable magnet type swing actuator of a conventional example.
FIG. 6 is a sectional view taken along line FF ′ of FIG.

【図6】図5のD−D´の線に沿った断面図。6 is a cross-sectional view taken along the line DD ′ of FIG.

【符号の説明】[Explanation of symbols]

1 固定軸 2 固定軸ベース 3 回動ヨーク 4 基板 5 コイル 6 永久磁石 7 軸受 8 バックヨーク 9 固定軸押え 10 基板固定ねじ 11 バックヨーク固定ねじ 12 締結ねじ 13 リード線 14 ミラー 15 ミラー取付具 16 光源 17 光 18 空洞 h 孔 1 Fixed Axis 2 Fixed Axis Base 3 Rotating Yoke 4 Substrate 5 Coil 6 Permanent Magnet 7 Bearing 8 Back Yoke 9 Fixed Axis Presser 10 Substrate Fixing Screw 11 Back Yoke Fixing Screw 12 Fastening Screw 13 Lead Wire 14 Mirror 15 Mirror Fixture 16 Light Source 17 light 18 cavity h hole

───────────────────────────────────────────────────── フロントページの続き (72)発明者 杉崎 巌 埼玉県入間市新久下新田110−1 コパル 電子株式会社 入間事業所内 (56)参考文献 実開 昭62−29772(JP,U) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Iwao Sugisaki 110-1 Shinkushita Nitta, Iruma City, Saitama Prefecture Copal Electronics Co., Ltd. Inside the Iruma Plant (56) References: 62-29772 (JP, U)

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 固定軸に回動自在に支承されたバックヨ
ークと回動ヨークとよりなるヨークの空隙内に基板を設
け、前記基板の円周上のバックヨーク側の適宜の位置
に、複数のコイルを配設し、前記コイルが固定軸方向に
対し直交する面内に位置するように基板と固定軸とを固
着し、前記コイルを設けた基板に対面するように、回動
ヨーク内側面に永久磁石を配設した揺動型アクチュエー
タ。
1. A substrate is provided in a gap of a yoke composed of a back yoke rotatably supported by a fixed shaft and a rotating yoke, and a plurality of substrates are provided at appropriate positions on the back yoke side on the circumference of the substrate. Inner side surface of the rotating yoke so that the substrate and the fixed shaft are fixed so that the coil is located in a plane orthogonal to the fixed axis direction, and the coil is faced to the substrate provided with the coil. An oscillating actuator that has a permanent magnet on its inside.
【請求項2】 請求項1において、基板上のバックヨー
ク側に永久磁石を又この永久磁石を設けた基板と対面す
るように回動ヨーク内側にコイルを設けた揺動型アクチ
ュエータ。
2. The swing actuator according to claim 1, wherein a permanent magnet is provided on the back yoke side of the substrate, and a coil is provided inside the rotary yoke so as to face the substrate provided with the permanent magnet.
【請求項3】 請求項1において、固定軸の中心に形成
した空洞部の一端外側に光源を、他端外側に回動ヨーク
に固着したミラー取付具を配設し、光源よりの光が前記
ミラー取付具に設けたミラーへ反射して、ミラー取付具
の孔部を通過して外部へ照射することを特徴とする光路
を具えた揺動型アクチュエータ。
3. The light source according to claim 1, wherein a light source is provided outside one end of a hollow portion formed at the center of the fixed shaft, and a mirror attachment fixed to a rotating yoke is provided outside the other end. An oscillating actuator having an optical path, which is characterized in that the light is reflected by a mirror provided in a mirror fixture and passes through a hole of the mirror fixture to irradiate the outside.
【請求項4】 請求項1、2又は3において、基板上又
は回動ヨーク内側に設けたコイルのリード線を固定軸の
中心空洞部より引き出してなる揺動型アクチュエータ。
4. The oscillating actuator according to claim 1, 2 or 3, wherein a lead wire of a coil provided on the substrate or inside the rotary yoke is pulled out from a central hollow portion of a fixed shaft.
JP35824292A 1992-12-25 1992-12-25 Oscillating actuator Expired - Lifetime JPH078125B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35824292A JPH078125B2 (en) 1992-12-25 1992-12-25 Oscillating actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35824292A JPH078125B2 (en) 1992-12-25 1992-12-25 Oscillating actuator

Publications (2)

Publication Number Publication Date
JPH06197509A JPH06197509A (en) 1994-07-15
JPH078125B2 true JPH078125B2 (en) 1995-01-30

Family

ID=18458273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35824292A Expired - Lifetime JPH078125B2 (en) 1992-12-25 1992-12-25 Oscillating actuator

Country Status (1)

Country Link
JP (1) JPH078125B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002300766A (en) * 2001-03-30 2002-10-11 Hitachi Metals Ltd Swing motor and stage device
JP2016182569A (en) * 2015-03-26 2016-10-20 日本電産コパル株式会社 Vibration actuator
CN109689226A (en) * 2016-09-13 2019-04-26 阿尔卑斯阿尔派株式会社 Oscillation actuator and electronic equipment

Also Published As

Publication number Publication date
JPH06197509A (en) 1994-07-15

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