JPH0779578A - Vibration-wave motor - Google Patents

Abstract

PURPOSE:To provide a low-speed, high-torque type vibration-wave motor improved in the frictional surface of its vibrating body, decreased in speed, and increased in torque. CONSTITUTION:In a vibration-wave motor in which a member provided with a composite resin layer which forms a contact surface against a vibrating body 2 that excites vibration wave is press-contacted with the body 2 and the member press-contacted with the body 2 is frictionally moved against the body 2 by the vibration waves generates by the body 2, a nickel-phosphorus-based alloy film containing a eutectoid silicon carbide is formed on the frictional surface of the body 2 and the composite resin layer is formed of a base material composed of a thermoplastic resin containing carbon beads of 5-30mum in means particle size.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention produces a progressive vibration wave in a vibrating body by applying a voltage to an electro-mechanical energy conversion element, and makes a relative movement by friction drive with a member in contact with the vibrating body. The present invention relates to a friction material for a vibration wave motor that causes vibrations, particularly for a low-speed high-torque vibration wave motor.

[0002]

[Prior art]

<Prior Art 1> A conventional vibration wave motor has a Vickers hardness (H
_V ) has a maximum of about 400, and a thin ring-shaped piezoelectric element is fixed to the back surface of the ring-shaped vibrating substrate, and a member made of, for example, an aluminum alloy is used as a member that comes in contact with the piezoelectric element. Is a base material resin such as thermoplastic polyimide which is mixed and filled as a glassy carbon reinforcing material having an average particle diameter of 5 μm to 30 μm and fixed as a sliding body to form a moving body, and a moving body is generated. The moving body is relatively moved by the vibration wave.

In the conventional vibration wave motor described above, the non-thermoplastic aromatic polyimide or thermoplastic polyimide is used as the base material resin for the sliding body of the reinforced composite resin forming a part of the moving body. These resins are super heat-resistant resins and have little temperature dependency as material properties, and there is no torque down phenomenon due to softening of the resin material even with temperature rise during motor driving, and motor performance accuracy can be stabilized. It was from.

Further, the above-mentioned resin material is compounded and filled with glassy carbon as a reinforcing material because the sliding surface of a precipitation hardening type stainless steel which has been subjected to solution heat treatment and has a hardness of H _V of 400 This is because the properties of the sliding surface are always stable, and moreover, sufficient wear resistance is ensured even during long-term driving. Secondly, the material properties such as the elastic modulus of the sliding body are improved to improve the output. This was to improve the performance of the motor, and thirdly to improve the thermal conductivity of the sliding body to improve the performance of the motor such as efficiency.

<Prior Art 2> A conventional vibration wave motor is a martensitic stainless steel, for example, SUS420J2 ring-shaped vibrating body substrate. A composite resin layer made of a composite resin in which a matrix resin such as a non-thermoplastic aromatic polyimide or a thermoplastic polyimide is compounded and filled with a PAN-based or pitch-based carbon fiber as a reinforcing material is fixed to the surface, while aluminum is used. The Vickers hardness (H
_A sprayed film made of tungsten carbide and cobalt having a _{V of} about 1200 is formed, and the moving body is relatively moved by the progressive vibration wave generated in the moving body.

In the vibration wave motor of the prior art 2 described above, the base resin of the composite resin layer on the contact surface of the vibrating body is non-thermoplastic polyimide or thermoplastic resin polyimide. This is because the material has little temperature dependency as a physical property of the resin, there is no phenomenon of torque reduction due to the softening of the resin material even when the temperature rises when the motor is driven, and it is effective for stabilizing the performance accuracy of the motor. Further, the contact surface of the vibrating body is made of the composite resin in which carbon fiber is mixed and filled as the reinforcing material in the base material resin. Firstly, the sprayed film made of tungsten carbide and cobalt slides on the sliding surface of the moving body. This is because the properties of the moving surface are always stable, and sufficient wear resistance is guaranteed even during long-term driving. Secondly, the material properties such as elastic modulus are improved, and motor performance such as output and efficiency is improved. The third reason is to improve the thermal conductivity and improve the motor performance such as efficiency.

[0007]

DISCLOSURE OF THE INVENTION In the conventional vibration wave motor of the prior art 1, a non-thermoplastic polyimide or a thermoplastic polyimide is used as a glass for a sliding body made of a composite resin layer which provides a sliding surface of a moving body. By using the reinforced composite resin in which the carbon powder is mixed and filled, the performance and accuracy of the motor are stable even when the temperature is increased by driving the motor, and the abrasion resistance is sufficient even after long-time driving.

However, in the conventional vibration wave motor,
Since the rated value of low speed and high torque of 2.5 rpm and 8 kgcm could not be satisfied, improvement for higher torque was needed.

A first object of the present invention is to solve the above-mentioned problems, and to improve the friction surface of the vibrating body to achieve a low speed and a high torque, and to provide a low speed and a high torque type vibration wave motor satisfying the required characteristics. It's about to get.

A second object of the present invention is to form a composite resin which is more mass-producible and lower in cost than the moving body which provides the sliding surface of the moving body.

In the vibration wave motor of the prior art 2, both the composite resin on the contact surface of the vibrating body and the tungsten carbide and cobalt sprayed film on the sliding surface of the moving body are expensive and have problems in mass productivity. was there.

First, the non-thermoplastic polyimide resin, which is the base resin for the composite resin layer, is a resin material itself that is expensive and uses a compression molding method. Further, it is ground from a compression molded round bar. The processing cost was high because it was dumped. The thermoplastic polyimide resin is expensive in material, and needs to be annealed in order to promote crystallization after injection molding. At that time, shrinkage is large and post-processing by machining is required.

On the other hand, the tungsten carbide and cobalt films for hardening the sliding surface of the moving body are masked and subjected to the thermal spraying process, so that there is a problem in mass productivity. Also, in lapping the surface of the sprayed coating, the processing time is long and mass production is difficult.

[0014]

Means for Solving the Problems (and Actions) The vibration wave motor of the present invention made to solve the above problems provides a vibrating body in which a driving vibration wave is excited with a contact surface with the vibrating body. In the vibration wave motor, the member provided with the composite resin layer is brought into pressure contact, and the member in pressure contact with the vibrating body is relatively moved by frictional drive by the vibration wave generated in the vibrating body. A nickel-phosphorus-based alloy film co-deposited with silicon carbide is formed on the alloy film, and the alloy film is heat-treated to have a Vickers hardness (H _V ) of 900 to 1400, while the composite resin layer is formed into a base resin made of a thermoplastic resin. Average particle size 5-30μ
It is formed of a composite resin in which m-thick glassy carbon is mixed and filled in a weight ratio of 15 to 40%.

Further, in the vibration wave motor of the present invention made to solve the above second object, the base material resin of the composite resin layer is a thermoplastic resin such as polyether nitrile (PE).
N), any one of polyphenylene sulfide (PPS) and liquid crystalline wholly aromatic polyester (LCP)
Let's do it.

In order to increase the low speed and high torque of the vibration wave motor, it is necessary to increase the friction coefficient between the friction surface of the vibrating body and the composite resin layer providing the contact surface with the vibrating body. It is necessary that both the sliding surface of the composite resin layer of the moving body, which provides the contact surface between the friction surface of the body and the vibrating body, exhibit greater wear resistance.

In the present invention, the average particle size is 0.5 on the friction surface of the vibrating body of martensitic stainless steel (SUS420J2).
~ 3μm high hardness silicon carbide 8-20% by volume
The nickel-phosphorus-based alloy film, which was uniformly dispersed and co-deposited,
It is formed with a thickness of about 30 μm.

The components of the nickel-phosphorus-based alloy used at this time are Ni 82 to 98% and P 2 to 15%.

Further, in order to further improve the friction resistance of the Ni-P-SiC alloy film on the friction surface of the vibrating body by friction driving with the composite resin layer of the moving body, the alloy film is heat treated at 300 to 400 ° C. So that the Vickers hardness (H _V ) is 900 to 1400.

This is because the high-hardness silicon carbide fine powder is Ni
-P-SiC alloy film is removed from the film, this becomes an abrasive,
This is to prevent acceleration of wear of the partner composite resin layer.

In the present invention, carbon beads are compounded and filled as a reinforcing material for the composite resin layer of the moving body. The carbon beads are amorphous and isotropic glassy carbon having a glassy luster on the fracture surface. However, it has a lower hardness than carbon fiber, but because it is a slidable filler with excellent dispersibility, fluidity, or affinity for resins, it improves the abrasion resistance of the composite resin layer and improves the material properties such as elastic modulus. Is effective for.

The base material resin of the composite resin of the present invention is 150 ° C.
A thermoplastic resin of so-called super engineering plastic (engineered plastic) that can be used for a long time even at the above temperature is used, and as such heat resistant resin, crystalline polyimide (P), polyamide imide (PAI), polyether ether ketone are used. (PEEK), polyether nitrile (PEN), polyphenylene sulfide (PP
S), modified polyphenylene oxide (PPO), polycarbonate (PC), and wholly aromatic polyester (LCP) exhibiting liquid crystallinity are also known. Among the above resins, required characteristics are taken into consideration while considering mass productivity and price. A material satisfying the above conditions is selected as the base resin for the composite resin layer of the moving body.

On the other hand, the vibration wave motor of the present invention, which has been made to solve the above-mentioned problems of the prior art 2, makes contact with a moving body which is in pressure contact with a vibrating body made of an elastic material which produces a progressive traveling wave. In a vibration wave motor that forms a composite resin layer that provides a surface and relatively moves the moving body by frictional driving due to progressive vibration generated in the vibrating body, the composite resin layer of the vibrating body is made of a thermoplastic base material resin. 15% to 40% by weight of granular or spherical glassy carbon having an average particle size of 5 to 30 μm.
% Compound and fill.

Further, as the thermoplastic base material resin, polyether nitrile (PEN), polyphenylene sulfide (P
One of PS) and liquid crystal aromatic (LCP).

As a result, a composite resin obtained by compounding and filling a thermoplastic resin, which is a heat-resistant resin but relatively inexpensive, with glassy carbon beads having a lower hardness than carbon fiber as a reinforcing material and having dispersibility, fluidity and affinity. The layers are lower in price and can be obtained by solving the problem of mass productivity.

On the other hand, on the sliding surface of the moving body, the Vickers hardness (H
_V ) 800-Ni-P-SiC codeposited with silicon carbide
An alloy film is formed.

Then, if necessary, heat treatment is performed to obtain a Vickers hardness (H _V ) of 900 to 1400, which is the hardness of the conventional tungsten carbide and cobalt sprayed coating.

Since the nickel phosphate group-based alloy film co-deposited with silicon carbide has a uniform film thickness, it is easier to transfer the surface by lapping.

In order to reduce the torque of the vibration wave motor to a high speed, the friction coefficient between the composite resin layer that provides the contact surface of the vibrating body and the sliding surface of the moving body that makes pressure contact with the vibrating body is large. It is necessary that both the composite resin layer of the vibrating body and the sliding surface of the moving body exhibit greater abrasion resistance.

In the present invention, carbon beads are compounded and filled as a reinforcing material for the composite resin layer of the vibrating body. The carbon beads are amorphous and isotropic glassy carbon having a glassy luster on the fracture surface. However, it has a lower hardness than the carbon fiber used conventionally, but it is a slidable filler with excellent dispersibility, fluidity or affinity for resins, so it has improved wear resistance of the composite resin layer, elastic modulus, etc. It is effective for improving the physical properties of materials.

As the base material resin of the composite resin of the present invention, a so-called super engineering plastic thermoplastic resin that can be used at a temperature of 150 ° C. or higher for a long time is used, and as such heat resistant resin, crystalline polyimide (PI) or polyamide is used. Imide (PAI), polyether ether ketone (PEE)
K), polyether nitrile (PEN), polyphenylene sulfide (PPS), polyacetal (PO)
M), polybutylene terephthalate (PBT), amorphous polyetherimide (PEI), polyether sulfone (PES), polyarylate (PAR), polysulfone (RSF), modified polyphenylene oxide (DP)
O) and polycarbonate (PC) are also known as wholly aromatic polyesters (LCP) exhibiting liquid crystallinity. Among the above resins, the material satisfying the required characteristics in consideration of mass productivity and price is a vibrating body. Is selected as the base material resin for the composite resin layer.

In the present invention, on the other hand, silicon carbide having a high hardness and an average particle size of 0.5 to 3 μm is uniformly dispersed in a volume ratio of 8 to 20% and co-deposited on the sliding surface of a moving body made of an aluminum alloy. The nickel-phosphorus-based alloy film having a thickness of 20 to 30 μm is formed. The component of the nickel-phosphorus-based alloy used at this time is Ni8
2 to 98% and P2 to 15%.

Further, in order to further improve the wear resistance of the Ni-P-SiC alloy film on the sliding surface of the moving body by friction driving with the composite resin layer of the vibrating body, the alloy film is heat treated at 300 to 400 ° C. So that the Vickers hardness (H _V ) is 900 to 1400.

This is because the high-hardness silicon carbide fine powder is Ni.
This is because it is prevented from falling off from the -P-SiC alloy film and acting as an abrasive to promote wear of the partner composite resin layer.

[0035]

【Example】

<First Embodiment> FIG. 1 is a longitudinal sectional view showing a first embodiment of a vibration wave motor according to the present invention, FIG. 2 (a) is an electrode configuration diagram, and FIG. 2 (b) is a developed side surface of a stator. 3 and 4 show a compression spring member for pressurization.

In the figure, reference numeral 1 denotes a thin annular piezoelectric element having a thickness of 6, which is made of an elastic material and has four protrusions at equal intervals for every 2 / λ of the vibration wavelength (λ) for driving. The solid electrode surface is fixed to the vibrating body 2 formed over the circumference to form a stator.

The electrode structure on the other surface of the piezoelectric element 1 is, as shown in FIG. 2A, at a pitch of λ / 2 so that the expansion and contraction polarities are alternately opposite to the wavelength λ of the frequency to be excited. A polarized A electrode group for driving (A _{1 to} A ₈ ), a B electrode group (B _{1 to} B ₈ ), and λ / which is between these A and B electrodes and detects the vibration state of each electrode group 4 pitch vibration detection electrodes S _A and S _B, and three other common electrodes G for adhesion
It consists of

The driving B electrode group (B _{1 to} B ₈ ) is arranged at a pitch deviated by 3 / 4λ from the driving A electrode group (A _{1 to} A ₈ ) while the vibration detecting electrode S _A is arranged. And S _B are A electrode groups (A _{1 to} A ₈ ) for driving and B electrode groups (B ₁ to A ₈ ).
B ₈ ), which are arranged around the substantially antinode position of each standing wave.

In FIG. 2B, the protrusion of the vibrating body 2 is formed by forming a slit having a constant width (t) with respect to the axis, where H is the total height of the vibrating body 2 and h is the slit depth. That's it.

Further, as shown in FIG. 2B, the center point of the vibration detecting electrodes S _A and S _B of the piezoelectric element 1 is the vibrating body 2.
Since the stator is aligned with the central point of the slit part, the central points of the driving A electrode group (A _{1 to} A ₈ ) or B electrode group (B _{1 to} B ₈ ) are all central points of the slit part. Conforms to.

In FIG. 1, the piezoelectric element 1 is an epoxy adhesive having heat resistance, and is concentric with the back surface of the vibrating body 2 and the vibrating body 2 is provided.
The electrode configuration as described above is specified and fixed to the slit position of.

Reference numeral 3 denotes a housing made of a material having excellent heat conductivity, and the vibrating body 2 is firmly fixed with screws 4 via a thin disk portion 2a on the inner diameter side of the contact portion of the vibrating body 2.

A first ball bearing 11 is provided with an outer ring 11a fixed to the inner diameter fitting portion at the center of the housing 3.

Reference numeral 100 denotes a rotary shaft which forms an output shaft in which a flange portion 100c is fixed in the middle by, for example, shrink fitting,
The one end 100a is supported by the inner ring of the first ball bearing 11 so as to be slidable in the axial direction, and the other end 100b is a bearing that projects from the center of the housing cover 108 to the side opposite to the housing 3. Second provided by fixing the outer ring 12a to the fitting portion 108a
Is supported by the inner ring 12b of the ball bearing 12 so as to be slidable in the axial direction.

The other end 100b of the rotary shaft 100 is provided with an inner diameter fitting portion 100e and a fixing screw hole 100d for fixing an input shaft of an encoder (not shown). Reference numeral 215 denotes a cylindrical intermediate member that is concentrically fixed to the flange portion 100c of the rotary shaft 100 with a screw 116, and an annular moving body 7 is concentrically fitted and provided at the outer peripheral end.

The moving body 7 is formed of an annular sliding body 6 made of a composite resin and a support body 5 made of, for example, an aluminum alloy, which is concentrically fixed to the sliding body 6 with an epoxy adhesive. 6 contacts the sliding surface 2b of the vibrating body 2.

The moving body 7 is supported by the thick flange portion 215a of the cylindrical intermediate member 215 via the rubber elastic sheet 17 at the bottom thereof.

The intermediate member 215 has a recess 215b in its inner diameter.
Is formed, the axial load generated by the diaphragm-shaped compression spring member 114 shown in FIG. 3 provided between the wall 215c of the recess 215b and the inner ring 12a of the second ball bearing 12 is an elastic sheet. The sliding surface 2b of the vibrating body 2 and the sliding body 6 of the moving body 7 are pressed and brought into contact with each other through the member 17 in the axial direction of the support body 5.

Reference numeral 108 denotes a housing cover, and the housing 3 is secured by screws 9
A bearing fitting hole 108a is formed in the central portion of the bearing fitting hole 108a so as to face the housing 3 side, and the second ball bearing 12 is fitted into the bearing fitting hole 108a. The outer ring 12a is fixed with an adhesive.

The above is the basic structure of the low-speed high-torque oscillatory wave motor of the present embodiment, in which the axial load generated by the compression spring member 114 for pressurization is a cylindrical thick intermediate portion having a relatively large thickness. It is added to the moving body 7 via the member 215.

Table 1 shows the required characteristics for the vibration wave motor of the present invention, and Table 2 shows the main design specifications.

[0052]

[Table 1]

[0053]

[Table 2]

Table 3 shows the materials of the conventional type (comparative example) and the vibrating body of this example, the hardening treatment of the friction surface, and the hardness measured by the micro Vickers hardness meter.

Further, Table 4 shows the constitutions of the composite resins of the conventional type (comparative example) and this embodiment, that is, the base material resin, the reinforcing material and the filling amount of the reinforcing material, the flexural modulus and the Rockwell hardness of the composite resin ( M
The hardness of (scale) is shown.

[0056]

[Table 3]

[0057]

[Table 4]

First, as shown in Table 2 and Table 3 as the vibrating body 2 of the embodiment of FIG. 1, martensitic stainless steel (SU
A vibrating body having a predetermined size and slit is manufactured in S420J2), and the friction surface is subjected to electroless nickel plating to deposit silicon carbide having an average particle size of 1 μm in a volume ratio of 12% and a thickness of 2
A 5 μm Ni-P-SiC alloy film was formed.

The alloy film surface of the friction surface is lapped to obtain a flatness of 2 μm or less and a surface roughness of the center line average roughness (R
It was finished to 0.02 μm or less in a).

Next, as shown in Table 2 and Table 4 as the sliding body 6 of the embodiment of FIG. 1, glassy carbon (made by Nippon Carbon, carbon microbead ICB-102, which is a reinforcing material).
0) 6% by weight of thermoplastic resin which is a base material resin (6 kinds (Examples)) and liquid crystalline aromatic polyester resin (Examples), molded by injection molding method, and ground to a predetermined size After that, it was fixed to the aluminum alloy support 5 with an epoxy adhesive.

Then, the sliding surface of the sliding body 6 is lapped to obtain a flatness of 3 μm or less and a surface roughness of the center line average roughness (R
In a), it was finished to 0.05 μm or less.

The comparative examples in Table 4 and the sliding bodies of the comparative examples are composite resins which have been used conventionally, and the comparative example is a non-thermoplastic aromatic polyimide resin which is a condensation product of biphenyltetracarboxylic dianhydride and aromatic diamine. 25% by weight of glassy carbon, which is a reinforcing material, is blended, and heat compression molding is performed.
After that, it is cut into a predetermined size.

In Comparative Example, 30% by weight of glassy carbon was blended with thermoplastic polyimide resin, molded by injection molding method, heat treated to promote crystallization, and then cut into a predetermined size. Is.

Table 5 shows a combination of the working example and the comparative example of the vibrating body and the working example and the comparative example of the composite resin sliding body.
3 shows the evaluation result of the low-speed high-torque vibration wave motor having the structure of FIG.

The evaluation items are rating, rotation accuracy and life.
Of the torque value range at 22.5 rpm.

That is, when 8 kgcm or more is obtained at 22.5 rpm, "○", 7-8 kgcm is "△", 7 kgc
The value of m or less was defined as "x".

Next, the rotation accuracy is 1 kgc at 33.3 rpm.
It was evaluated in the range of the wow and flutter value when continuous operation was performed for 24 hours under a load of m. That is 0.0
Less than 3% RMS is "○", 0.03 to 0.04% RMS
Is “Δ” and 0.04% or more is “x”.

The lifespan of the composite resin sliding body after 500 hours of continuous operation with no load of 33.3 rpm was relatively evaluated, and was designated as "○", "△", "x".

[0069]

[Table 5]

Looking first at the evaluation results of the friction surface of the vibrating body in Table 5, the comparative example of the composite resin sliding body and the vibrating body example (invention) combined therewith were compared with the comparative example (conventional type). The torque has been increased and improved. This is Ni-P
This is because the coefficient of friction of the SiC alloy film is larger than that of precipitation hardening stainless steel. Further, there is a tendency that the rotation accuracy is improved, but it is considered that this is because the abrasion powder of the composite resin is less likely to adhere to the Ni-P-SiC alloy film.

Next, looking at the evaluation results of the composite resin sliding body,
With respect to the rated torque magnitude, improvement was observed in the composite resin of the example and the composite resin of the comparative example.
, And the composite resin of the comparative example are equivalent,
Only the composite resin of No. 1 showed a small torque.

The composite resins of the examples were the softest in terms of hardness shown in Table 4, and the base resin had a specific crystallinity, so that the abrasion coefficient was large and the torque was large.

The composite resin of the examples is a liquid crystalline wholly aromatic polyester resin in which the molecules are solidified while being oriented in the flow direction during the cooling process of injection molding, and a large torque can be obtained due to the multilayer structure in the thickness direction. Is.

In the evaluation of the rotation accuracy, the composite resin of the comparative example is equivalent to the embodiment ,,, and.
And the comparative example was a little bad.

It is considered that the low rotational accuracy of the examples is due to a large amount of wear compared with other composite resins. In addition, it is considered that the composite resin of the comparative example has a little amount of abrasion powder partially adhered to the friction surface of the vibration body.

In the evaluation results of the life, a large amount of wear was found in Examples and. The linear polyphenylene sulfides of the Examples showed wear powder that was "smoother" than the other materials. Both the examples and are amorphous thermoplastic resins, and are materials having ordinary weaknesses in slidability. However, the polyether sulfone (PE
S) and the like can be expected to improve wear resistance by increasing the filling amount of the reinforcing material.

In the composition of the composite resin of this example shown in Table 4, the liquid crystalline aromatic polyester of the example was Zider (trade name) manufactured by Amoco Co., Ltd. Sumitomo Chemical's Econole E600
0, E2000, Vectra A9 from Hoechst Celanese
There are 50 mag.

A composite resin sliding body has been investigated using carbon microbeads ICB-1020 manufactured by Nippon Carbon Co., Ltd. as carbon beads as a reinforcing material. Bellbell C-2000 manufactured by Kanebo and Glasspon-P manufactured by Owada Carbon Co., Ltd. are used as carbon beads. Kureha MH manufactured by Kureha Chemical Industry, Unibex GCP manufactured by Unitika, or the like may be used.

<Second Embodiment> This embodiment has the same basic structure as that of the embodiment shown in FIG. 1 described above, except that in the first embodiment, the sliding body 6 is located on the moving body side. On the other hand, in the second embodiment, it is provided on the side of the vibrating body, and the sliding body 6 is formed of a composite resin layer.
All protrusions are fixed with epoxy adhesive.

Further, the sliding body 6 composed of the composite resin layer
The moving body 7 that comes into pressure contact with
A nickel-phosphorus-based alloy film that co-deposits silicon carbide is formed.

Table 6 shows the required characteristics for the vibration wave motor of this embodiment, and Table 7 shows the main design specifications.

[0082]

[Table 6]

[0083]

[Table 7]

Table 8 shows the hardness of the sliding surfaces of the moving bodies of the conventional type (comparative example) and the second example and the hardness measured by the micro Vickers hardness meter.

Table 9 shows the base material of the sliding body 6 made of the composite resin layer of the conventional type (comparative example) and the vibrating body in the second embodiment, the reinforcing material, and the filling amount of the reinforcing material, and the bending of the composite resin. The elastic modulus and the Rockwell hardness (hardness on the M scale) are shown.

[0086]

[Table 8]

[0087]

[Table 9]

As shown in Table 7 and Table 8 as the moving body 5'in the second embodiment, silicon carbide having an average particle diameter of 1 μm and made of an aluminum alloy and having a mean particle size of 1 μm is used in a volume ratio of 12 on the sliding surface. % Ni-P-Si having a thickness of 25 μm for eutectoid
A C alloy film was formed. The sliding surface of the moving body 5'has an outer diameter of 68 (mm) and an inner diameter of 64 (mm).

The alloy film surface of the sliding surface was lapped to obtain a flatness of 3 μm or less and a surface roughness of the center line average roughness (R
Finished to 0.05 μm in a).

Next, as shown in Tables 7 and 9, glass-like carbon (manufactured by Nippon Carbon Co., Ltd., carbon microbead ICB-1020), which is a reinforcing material, was used in a weight ratio as a sliding body 6'made of the composite resin of the vibrating body 2. 30%, 6 kinds of thermoplastic resin as a base material resin (Examples ~) and liquid crystalline wholly aromatic polyester resin (Examples) were mixed and molded by an injection molding method, and then φ67.5 x φ64.5. × 0.6 ^t
A (mm) ring-shaped composite resin layer was produced and concentrically fixed to the vibrating body 2 of martensitic stainless steel (SUS420J2) using an epoxy adhesive. Then, in order to leave the composite resin layer only on the protruding surface of the vibrating body 2, the extra composite resin layer was removed.

Then, the sliding surface of the sliding body which is the composite resin layer of the vibrating body 2 was lapped so that the flatness was 2 μm or less and the surface roughness was 0.02 μm or less in the center line average roughness (Ra).

The comparative examples of Table 9 and the composite resins thereof are conventionally used materials. The comparative example is a non-thermoplastic aromatic polyimide resin which is a condensate of biphenyltetracarboxylic dianhydride and aromatic diamine. A DAN-based carbon fiber, which is a material, is mixed in a weight ratio of 15%, heat compression molded, and then cut to a predetermined size.

In the comparative example, 30% by weight of pitch-based carbon fiber was blended with thermoplastic polyimide resin, and the mixture was molded by injection molding, heat-treated and crystallized to obtain a predetermined size. It was carved out.

Table 10 shows the evaluation results of the low-speed high-torque vibration wave motor having the structure of FIG. 1 manufactured by combining the moving body example and the comparative example and the vibrating body composite resin layer example and the comparative example. is there.

The evaluation items are rating, rotation accuracy and life, which correspond to the required characteristics of Table 6, and the rating is 22.5 rpm.
It evaluated in the range of the torque value in.

That is, when 8 kgcm or more is obtained at 22.5 rpm, "○", 7-8 kgcm is "△", 7 kgc
The value of m or less was defined as "x".

Next, the rotation accuracy is 1 kgc at 33.3 rpm.
It was evaluated in the range of the wow and flutter value when continuous operation was performed for 24 hours under a load of m. That is 0.0
3 RPM or less is “◯”, 0.03 to 0.04% RMS is “Δ”, and 0.04 or more is “X”.

As for the life, the amount of wear of the vibrator composite resin layer after 500 hours of continuous operation with no load of 33.3 rpm was designated as relative evaluation “◯”, “Δ” and “x”.

[0099]

[Table 10]

First, looking at the evaluation results of the sliding surface of the moving body in Table 10, in the comparative example of the composite resin layer of the vibrating body and the working example and the comparative example combined therewith, the rated torque and rotation Although the accuracy was almost the same, the life of the moving body of the example was slightly worse. The Ni-P-SiC alloy film has almost the same friction coefficient as the tungsten carbide and cobalt sprayed films, but the Ni-P hardness is higher than that of the carbon fiber.
-It is considered that the SiC alloy film is rather weak, and wear of the vibrator composite resin layer is promoted by the SiC fine powder that falls off.

Next, looking at the evaluation results of the composite resin layer of the vibrating body, in the rated torque magnitude, improvement was observed in the composite resin of the example and the composite resin of the comparative example. The composite resins of the comparative examples were equivalent, and only the composite resin of the example showed a small torque.

The composite resins of the examples were the softest in terms of hardness (Table 9), and because the base material resin was amorphous, the wear coefficient was large and the torque was large.

The composite resin of the examples is a liquid crystalline wholly aromatic polyester resin in which the molecules are solidified while being oriented in the flow direction during the cooling process of injection molding, and a large torque can be obtained due to the multilayer structure in the thickness direction. It is a thing.

In the evaluation of the rotation accuracy, the composite resin of the comparative example was about the same level as the examples ,,, and, and the examples and the comparative examples were slightly bad.

It is considered that the low rotational accuracy of the example is due to the large amount of wear compared with other composite resins. In addition, it is considered that the composite resin of the comparative example has a slight amount of abrasion powder partially adhered to the friction surface of the vibration body.

In the evaluation results of the life, a large amount of wear was noticeable in Examples and.

The linear polyphenylene sulfides of the examples showed abrasion powder that was “smooth” compared to the other materials. All of the examples and are amorphous thermoplastic resins, and are materials having inherent weaknesses in slidability. However, in the polyether sulfone (PES) and the like of the examples, the wear resistance can be expected to be improved by increasing the filling amount of the reinforcing material.

[0108]

As described above, according to the present invention, silicon carbide having an average particle diameter of 1 μm is added to the friction surface of the vibrating body in a volume ratio of 1: 1.
A 2% eutectoid nickel-phosphorus-based alloy film was formed to increase the friction coefficient, and heat treatment was performed to obtain a vibrating body friction surface with high hardness, which enabled low-speed and high-torque friction and wear of the vibrating body friction surface. Since stable friction drive with less amount of rotation is performed, the rotation accuracy is improved, and it becomes possible to reduce the wear of the composite resin sliding body and improve the life of the vibration wave motor.

Conventionally effective non-thermoplastic polyimides and thermoplastic polyimides have been used. However, by blending and filling an appropriate amount of glassy carbon, a lower cost thermoplastic resin or liquid crystalline resin slide is injected. It has become possible to manufacture by mass production such as molding.

On the other hand, a nickel-phosphorus-based alloy film in which 12% by volume of silicon carbide having an average particle size of 1 μm is co-deposited on the sliding surface of the moving body instead of the expensive and mass-producible sprayed film made of tungsten carbide and cobalt To obtain a moving body sliding surface with high hardness by heat treatment, and to replace the non-thermoplastic polyimide or thermoplastic polyimide, which is expensive and has low mass productivity, with the composite resin layer of the vibrator at a low price. Adopting a thermoplastic resin or liquid crystalline resin that can be injection molded, compounding and filling glassy carbon with a hardness lower than carbon fiber as a reinforcing material,
Compared to conventional vibration wave motors, it is possible to achieve low speed and high torque equivalent to or higher than that of conventional vibration wave motor, less wear of the composite resin layer of the vibration body and improved rotation accuracy, and less wear of the composite resin layer of the vibration body. It is possible to provide a low-speed high-torque vibration wave motor having an improved life.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of an embodiment of a vibration wave motor according to the present invention.

FIG. 2 shows an electrode configuration and the like of the vibrating body shown in FIG. 1, (a)
Is a plan view showing an electrode configuration, and FIG. 6B is a developed side view of the vibrating body.

FIG. 3 is a plan view of the compression spring member shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Piezoelectric element 2 ... Vibrating body 5 ... Support body 6 ... Sliding body 7 ... Moving body

Claims (13)

[Claims] 1. A member that is brought into pressure contact with a member provided with a composite resin layer that provides a contact surface with the vibrating body to the vibrating body in which a driving vibration wave is excited, and is brought into pressure contact with the vibrating body. In a vibration wave motor in which a vibration wave generated in a vibrator vibrates relative to each other by friction drive, a nickel-phosphorus-based alloy film co-deposited with silicon carbide is formed on the friction surface of the vibrator, and the composite resin layer is made of thermoplastic resin. A vibration wave motor characterized in that a base material resin made of resin is filled with carbon beads having an average particle diameter of 5 μm to 30 μm. 2. The vibration wave motor according to claim 1, wherein the friction surface of the driving body is heat-treated to have a Vickers hardness (H _V ) of 900 to 1400. 3. The vibration wave motor according to claim 1, wherein the carbon beads of the composite resin layer are granular or spherical glassy carbon. 4. The vibration wave motor according to claim 1, wherein the carbon beads in the composite resin layer account for 15 to 40% by weight. 5. The vibration wave motor according to claim 1, wherein the thermoplastic resin is polyether nitrile. 6. The vibration wave motor according to claim 1, wherein the thermoplastic resin is polyphenylene sulfide. 7. The vibration wave motor according to claim 1, wherein the thermoplastic resin is liquid crystalline wholly aromatic polyester. 8. A vibrating body made of an elastic material in which a driving vibration wave is excited is formed with a composite resin layer that provides a contact surface with a moving body that makes pressure contact with the vibrating body, and vibrates the moving body. A vibration wave motor in which a vibration wave generated in a body is moved relative to each other by frictional driving. In a composite resin layer of the vibration body, a matrix resin made of a thermoplastic resin and carbon beads having an average particle diameter of 5 μm to 30 μm are mixed and filled. A vibration wave motor characterized by being made of resin. 9. The vibration wave motor according to claim 8, wherein the carbon beads of the composite resin layer are granular or spherical glassy carbon. 10. The vibration wave motor according to claim 8, wherein the carbon beads in the composite resin layer account for 15 to 40% by weight. 11. The vibration wave motor according to claim 8, wherein the thermoplastic resin is any one of polyether nitrile, polyphenylene sulfide, and liquid crystalline aromatic polyester. 12. The vibration wave motor according to claim 8, wherein a nickel-phosphorus-based alloy film in which silicon carbide is co-deposited is formed on the sliding surface of the moving body. 13. The vibration wave motor according to claim 12, wherein the sliding surface of the moving body is heat treated to have a Vickers hardness (H _V ) of 900 to 1400.