JPH0421373A - Oscillation wave motor - Google Patents

Abstract

PURPOSE:To obtain an oscillation wave motor having excellent abrasion resistance in which fluctuation of torque is suppressed by forming a slider of a composite resin having Rockwell hardness (HRM) in the range of 80-110 and forming the frictional face of an oscillator through thermal spray of nickel base alloy or cobalt base alloy so that the frictional face has Vickers number (Hv) in the range of 500-850. CONSTITUTION:An oscillator 2 is secured with a piezoelectric element group 1 on the rear and the surface thereof serves as a frictional face. A mover 7 comprises a supporter 5 and a slider 6 bonded to the surface thereof. The slider 6 is formed as a composite resin layer and contacts with the sliding face of the oscillator 2. The composite resin layer is composed of a composite resin having Rockwell hardness (HRM) in the range of 80-110 whereas the frictional face of the oscillator 2 is formed through thermal spray of nickel base or cobalt base metallic alloy having Vickers number (Hv) in the range of 500-850.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention generates progressive vibration waves in a vibrating body by applying a voltage to an electro-mechanical energy conversion element, and generates a progressive vibration wave in a vibrating body by applying a voltage to an electric-mechanical energy conversion element. The present invention relates to a vibration wave motor that causes relative movement between the motors by friction drive, and particularly to a high-output vibration wave motor.

[Prior Art] Conventional vibration wave motors, particularly high-output vibration wave motors, have a thin ring-shaped piezoelectric element fixed to the back side of a ring-shaped vibrating body substrate made of stainless steel, for example, and tungsten carbide and tungsten carbide on the surface. A hard sliding surface is formed by thermally spraying a superhard material made of cobalt and further polished to form a vibrating body.On the other hand, as a member in contact with this, a support material such as an aluminum alloy with a glass transition point of 100 Thermoplastic resins above ℃, specifically polyimide (PI), polyamideimide (FAI), polyetherimide (PEI)
Polyetheretherketone (PEE), Polyethersulfone (PES) Polyarylate (PAR)
Heat-resistant resins such as polysulfone (PSF'), liquid crystalline aromatic polyester (LCP), and non-thermoplastic aromatic polyimide (Vl) are filled with reinforcing materials such as carbon fiber to form a reinforced composite resin layer. The sliding body is fixed and constructed, and the vibrating body and the contacting member are configured to move relative to each other by friction drive by progressive vibration waves generated in the vibrating body.

Note that the relative movement between the contacting member and the vibrating body may be either fixed or movable, but in the following description of this specification, the vibrating body will be explained for the sake of simplicity. This is shown as an example in which the contacting member is fixed and the contacting member is moved, and therefore the contacting member is referred to as a "moving body."

Now, in the conventional vibration wave motor mentioned above, the glass transition point of the reinforced composite resin layer forming a part of the moving body is 100.
The reason why we use a sliding body made of thermoplastic resin and non-thermoplastic aromatic polyimide resin as base materials is because these heat-resistant resins have low temperature dependence as a material property, and the temperature rise when the motor is driven is low. This is because there is no torque down phenomenon caused by softening of the resin material, and the performance accuracy of the motor remains stable for a while.

In addition, the reason why reinforcing materials such as carbon fibers are mixed and filled with the above-mentioned resin material is that 'tS1 has a sliding surface of a superhard material on the vibrating body side made of tungsten carbide and cobalt. This is to ensure that the properties of the moving surface are always stable and have sufficient wear resistance even during long-term operation.Secondly, the material properties such as the elastic modulus or hardness of the sliding body are increased, This is to improve motor performance such as output.
Furthermore, thirdly, the thermal conductivity of the sliding body is improved to improve motor performance such as efficiency.

[Problems to be Solved by the Invention] As mentioned above, the sliding body that provides the sliding surface of the moving body in the vibration wave motor is made of heat-resistant thermoplastic resin and non-thermoplastic polyimide resin with a glass transition point of 100°C or higher. By using a reinforced composite resin filled with carbon fiber, the performance and accuracy of the motor are stable even when the temperature rises due to motor drive, and the motor can be driven for a long time against the superhard material that forms the sliding surface of the vibrating body. However, the wear resistance is sufficient, and the motor performance such as output efficiency also shows high values.

However, the sliding surface of the moving body is made of a composite resin layer made of a heat-resistant thermoplastic resin reinforced with carbon fibers and a non-thermoplastic aromatic polyimide resin, on the hard sliding surface of the vibrating body made of a superhard material. When pressurized contact was made and driving was started at, for example, 4 kgc +++ and 1100 rpm as the rated operating conditions, there was a torque unevenness of about 5% with respect to the rated torque value, and further improvement was desired.

Moreover, when operated for a long time, for example, 1,000 hours under relatively high rated output conditions, even with carbon fiber-reinforced composite resin, wear of 3 micrometers (MIll) or more was observed, and the layer It was hoped that the friction material would be improved.

Thermal sprayed friction surfaces made of tungsten carbide and cobalt with a film thickness of approximately 50 to 100 μm have very poor thermal conductivity, so there is a problem with heat dissipation to the moving body made of composite resin and support, and the vibrating body It was also a contributing factor to the rise in temperature.

The purpose of the present invention, which was made from such a viewpoint, is to provide a non-fibrous composite resin that can reduce torque fluctuations (unevenness) at high temperatures and high loads, and to reduce wear of this non-fibrous composite resin. It is an object of the present invention to provide a vibration wave motor having excellent wear resistance by forming a friction surface of a vibrating body which is as small as possible and which does not cause scratches or the like on its own friction surface.

In this case, it is assumed that the friction surface of the vibrating body has particularly excellent corrosion resistance and that there is little occurrence of rust, etc. Furthermore, the friction surface with improved thermal conductivity suppresses the temperature rise of the vibrating body and generates vibration waves with improved efficiency. Our goal is to provide motors.

Another object of the present invention is to find a cheaper friction surface hardening treatment method instead of the conventional thermal spraying of tungsten carbide and cobalt, and to provide a high-output vibration wave motor that can be easily mass-produced.

[Means and operations for solving the problems] A feature of the vibration wave motor of the present invention achieved in order to achieve the above object is to provide a vibrating body that generates progressive vibration waves with a contact surface with the vibrating body. A vibration wave motor in which a member provided with a composite resin layer is brought into pressure contact and a vibrating body and the member in pressure contact are moved relative to each other by frictional drive by progressive vibration waves generated in the vibrating body. The layer is made of a base material of thermoplastic resin with a glass transition point of 100°C or higher and non-thermoplastic aromatic polyimide resin, and is filled with a friction modifier and, if necessary, a non-fibrous type wear resistance improver. Well hardness (HRM
) is made of a composite resin with a diameter of 80 to 110, and the other friction material, the vibrating body, is made of martensitic stainless steel, and a nickel-based alloy or cobalt-based alloy containing an amorphous phase is applied to the friction surface by thermal spraying. This forms a film of 5 μm to 50 μm at maximum, preferably about 15 μm, and provides a friction surface with a Vickers hardness (lv) of 500 to 850.

The vibration wave motor of the present invention typically generates progressive vibration waves in an annular vibrating body provided with this drive phase by applying a voltage to a drive layer consisting of an electro-mechanical energy conversion element. The movable body is configured as a vibration wave motor that frictionally drives a movable body that is in pressurized contact with the vibrating body, and the movable body has a support body made of a thermally conductive aluminum alloy, etc., and is integrated with this support body. and the composite resin layer which provides a sliding surface that contacts the vibrating body.

The composite resin layer of the vibration wave motor of the present invention is formed of a non-fiber type composite resin that is not filled with reinforcing fibers such as carbon fibers as in the conventional example.

Composite resin filled with carbon fiber has high hardness, high elastic modulus, and high thermal conductivity, so motor output or efficiency is high, and composite resin has excellent wear resistance.
For example, the diameter is 7 μm and the length is 100 μm on the sliding surface of the composite resin.
The micrometer carbon fibers had no directionality and were dispersed and scattered, and this non-uniformity of the sliding surface caused torque unevenness.

In the present invention, in order to improve the torque unevenness mentioned above, the composite resin is made of a thermoplastic resin that is super heat resistant, has a relatively large flexural modulus, is high in hardness, and has a glass transition point of 100°C or higher, or a non-thermoplastic aromatic polyimide resin. This is filled with solid lubricants such as fluororesin, lead oxide, and amorphous graphite as friction modifiers, and if necessary, spherical or granular glassy carbon, metallic molybdenum powder, and calcium carbonate. A non-fibrous reinforcing material such as powder was added as a wear modifier.

The friction modifier is typically 30% by weight relative to the base material.
% or less of lead compound powder such as lead monoxide, and 5% by weight
Particularly preferred is the simultaneous addition of 40% to 40% of a fluororesin such as tetrafluoroethylene.

The above-mentioned tetrafluoroethylene resin is a low friction coefficient resin, so if the filling amount is too large, the friction coefficient will become small.
Since the material strength and abrasion resistance decrease, the above range is set.

The above-mentioned lead oxide powder and tetrafluoroethylene resin powder are both effective as solid lubricants to supplement the lubricity of the base material thermoplastic resin or non-thermoplastic resin, and are effective against the sliding surface of the vibrating body. When the sliding surface of the composite resin layer is frictionally driven, the -lead oxide powder has the effect of transferring the polytetrafluoroethylene resin coating to the sliding surface of the vibrating body, which constantly maintains the coefficient of friction, especially during sliding at high temperatures. It is an effective substance for stabilization.

The above-mentioned lubricants, such as lead compounds such as lead oxide powder and fluororesin powders such as tetrafluoroethylene resin, are used in consideration of their adhesion to the base material, thermoplastic resin or non-thermoplastic aromatic polyimide resin. In order to ensure the abrasion resistance and material strength of the composite resin layer, it is preferable that the average particle size is, for example, 20 μm or less. Note that tetrafluoroethylene resin (PTFE)
) is a low friction coefficient resin, so if the amount filled is large, the friction coefficient becomes small, but the material strength and wear resistance decrease.

Further, the composite resin layer may be further filled with transition metal powder as necessary for the purpose of improving wear resistance and improving stability against temperature changes of the sliding surface. Specific examples of such transition metal powders include tungsten, molybdenum, chromium, cobalt, titanium, and nickel.
Examples include cases in which at least one type of molybdenum powder (10 μm or less) or 15% or less molybdenum powder (5 μm or less) is added.

The composite resin layer of the present invention may further be filled with a non-fibrous wear resistance improver, if necessary. Specifically, as such a non-fibrous type wear resistance improver, amorphous non-oriented spherical or granular glassy carbon having an average particle size of 10 to 30μ0 is produced by heat-treating a phenolic resin at around 800 to 2000°C. For example, a case where spherical glassy carbon is filled and mixed in a weight ratio of 5 to 40% to the base material is particularly preferred. By filling this wear-resistant filler, the first
Even when the vibrating body has a sliding surface made of carbide material, the properties of the sliding surface of the moving body are always stable and exhibit sufficient wear resistance even during long-term operation. The second reason is that the physical properties of the material such as the elastic modulus of the sliding surface of the moving body can be increased, and the motor performance such as output can be improved. Thirdly, by improving the thermal conductivity of the composite resin layer, motor performance such as efficiency can be improved.

Further, as a wear resistance improver, powdered reinforcing materials such as calcium carbonate, magnesium carbonate, and antimony trioxide, which have a lower hardness than the above-mentioned metal molybdenum powder or spherical glassy carbon, may be filled. In this case, the amount filled in the base material is 20% or less by weight.

The base resin of the composite resin layer is a thermoplastic resin with high heat resistance, that is, the glass transition point is generally 100°C to 280°C.
, preferably a thermoplastic resin having a glass transition point of 250°C to 280°C.

Examples of such thermoplastic resin include polyimide (
PI), polyamideimide (FAI), polyetherimide (PEI), polyetheretherketone (P
EEK), polyethersulfone (PES), polyarylate (PAR), polysulfone (PSE), liquid crystalline aromatic polyester (LCP), etc. More specifically, polyimide (PI) is most preferred, and this thermoplastic polyimide rTPI (trade name: manufactured by Mitsui Toatsu Chemical Co., Ltd.) has particularly high heat resistance among thermoplastic resins, with a glass transition point of 250°C and a melting point of 382°C. A non-thermoplastic aromatic polyimide resin is used as the base resin of another composite resin layer.

This aromatic polyimide resin is a non-thermoplastic resin, and typically contains biphenyltetracarboxylic anhydride, an aromatic diamine condensate (“Ubilex” (trade name, manufactured by Ube Industries, Ltd.)), and pyromellitic anhydride. An example is a condensate of diaminodiphenyl ether ("Vespul" (trade name: manufactured by DuPont)). This condensate has excellent properties at high temperatures among a wide range of plastics. For example, the heat distortion temperature at a load of 18.8 kg/cm' is 350°C, and it is common even at a continuous use temperature of 260°C. This shows the strength of engineering plastics at room temperature.

By the way, when the above-mentioned non-fiber type composite resin sliding material is combined with a conventional vibrating body coated with tungsten carbide and cobalt, the hardness of the friction surface of the vibrating body is 1000 or more on Vickers hardness. Perhaps because the cobalt sprayed surface has low toughness, when polishing the friction surface with silicon carbide (SiC) particles, missing concave parts are formed and the sprayed material is chipped, which accelerates wear. Sometimes it happened. Also, tungsten carbide and cobalt thermal spraying materials are 0.15Kcal/cm sec
t: Since the thermal conductivity was low, heat dissipation was insufficient and there was a problem in terms of the temperature rise of the vibrating body.

In the present invention, a metal alloy mainly composed of nickel or cobalt is coated on martensitic stainless steel etc. in a film thickness of 5 μm.
It emits a maximum of about 50 μm from m, lowers the hardness of the friction surface compared to conventional tungsten carbide and cobalt, forms a mirror surface without recesses, and further improves thermal conductivity.

The martensitic stainless steel mentioned above is 13% chromium steel (JIS: 5us420J2) or 17% chromium steel (JIS: 5us630) which is a precipitation hardening type stainless steel.
) etc., but such martensitic stainless steel has a thermal expansion coefficient of approximately 10 x 10-'deg-'', and has a low thermal expansion coefficient between the thin disc-shaped piezoelectric element adhesively fixed to the back surface of the vibrating body. Since the difference in thermal expansion coefficient is small, it is advantageous in terms of peeling or destruction of the piezoelectric element even when heat generation becomes large.

If necessary, the mantenside stainless steel may be heat treated to improve its hardness before the thermal spraying material is sprayed onto the friction surface.

In other words, 13% chromium steel (sus420J2) is quenched and tempered to have a Vickers hardness of approximately 630 (C) IV), and 17% chromium steel (5us630) is subjected to solution heat treatment or further precipitation hardening heat treatment to achieve Vickers hardness. Sa(H
v) is used as about 380 to 420.

The thermal spraying material of the present invention is a composite powder containing 12% by weight of metallic cobalt in a ceramic ring called tungsten carbide, whereas the thermal spraying material of the present invention is a metal alloy.
One specific example is a nickel (Ni) based alloy powder,
In addition to chromium (Cr), heat-resistant metals such as molybdenum (Mo) and tungsten (W), boron (B) and carbon (C) are added. The porosity is 0.2 (Vo
A dense film with a hardness of 1%) or less is formed, and the film has a Rockwell hardness C scale (IRc) of 40 to 45, and has excellent wear resistance and corrosion resistance.

Another specific example is cobalt (Co)-based alloy powder, in which tungsten (W), a heat-resistant metal, and carbon (C) are added in addition to chromium (Cr) and nickel (Ni), and it has excellent wear resistance at high temperatures. It has corrosion resistance and porosity of 1 (Vo1%
), and its Rockwell hardness C scale ()IRC) is said to be 34.5.

The friction surface of the vibrating body sprayed with a metal alloy such as nickel-based or cobalt-based alloy can be selected depending on the material characteristics such as hardness of the non-fibrous composite resin that is the mating friction material.

[Example] The present invention will be described below based on embodiments shown in the drawings.

FIG. 1 is a longitudinal sectional view showing an embodiment of a vibration wave motor according to the present invention.

In this figure, 2 is an annular vibrating body substrate made of a metal member such as stainless steel, and on the back side of the substrate, a group of thin annular piezoelectric elements 1 are connected concentrically with a heat-resistant epoxy resin adhesive. The sliding surface on the front side has a comb-like shape with a large number of grooves cut in the axial direction in the circumferential direction in order to increase the vibration amplitude of the progressive vibration wave.

3 is a housing made of a highly thermally conductive metal material, and a first ball bearing 11 is provided in the center of the housing, and the vibrating body 2 is screwed concentrically with the axis of the first ball bearing 11. It is fixed at 4.

Reference numeral 10 denotes an output shaft having a flange portion 10c formed in the middle, one end side 10a of which is supported through the inner ring of the first ball bearing 11 so as to be able to slide in the axial direction, and the other end side 10b is an output shaft. , is axially slidably and rotatably penetrated through an inner ring of a second ball bearing 12 (described later) and a shaft hole of a spring pressure adjusting nut member 18 (described later). 15 is the above output shaft 10
It is a disk-shaped intermediate member fixed to the flange portion 10c of the flange portion 10c with screws 16, and a movable body 7 formed in an annular shape is concentrically fitted and fixed to the outer peripheral end of the disk-shaped intermediate member.

The moving body 7 includes an annular support 5 made of a highly thermally conductive metal such as an aluminum alloy, and a sliding body 6 concentrically bonded to the surface of the support 5 with a heat-resistant epoxy adhesive. In this example, the sliding body 6 has a thickness of 1, for example.
It is formed as a composite resin layer having the formulation and structure described later as a ring-shaped body of mm. This sliding body 6 contacts the sliding surface of the vibrating body 2.

The moving body 7 is supported by an intermediate member 15 via a rubber elastic sheet member 17 provided at the bottom thereof, and the flange portion 10 of the output shaft 10 is supported by an intermediate member 15.
The axial load generated by the coiled compression spring member 14 elastically mounted between C and the second ball bearing 12 is applied in the axial direction of the support body 5 via this elastic sheet member 17. The sliding surface of the vibrating body 2 and the sliding body 6 of the movable body 7 are brought into pressure contact.

Reference numeral 8 denotes a housing cover of the vibration wave motor, which is fixed to the housing 3 with screws 9. A second ball bearing 12 is fitted into the bearing fitting hole 8b formed in the center thereof so as to be able to slide in the axial direction. 8c is formed, and a spring pressure adjusting nut member 18 is screwed thereto. The spring pressure adjusting nut member 18 is in contact only with the outer ring 12a of the second ball bearing 12, and the inner ring 12b of the second ball bearing 12 is provided to be slidable in the axial direction and rotatable with respect to the pressure shaft 10. and two small holes 18a formed in the spring pressure adjusting nut member 18.
, 18a, for example, by inserting an insertion rod of a jig (not shown) having two insertion rods at its tip and turning it clockwise, the spring pressure adjustment nut member 18 is moved to the left in the figure. While spiraling, the second ball bearing 12 can be pushed in the same direction to compress the compression spring member 14 to increase the spring force, and by turning in the opposite direction, the compression spring member 14 can be expanded and the spring force can be weakened. This makes it possible to adjust the axial load of the output shaft 10 by the deflection of the spring. Note that after adjusting the axial load of the output shaft 10, adhesive is poured into the small hole 8a of the housing cover 8 to seal the outer ring 1 of the second Hall bearing 12.
2a is usually fixed to the housing cover 8.

Further, one end of the compression spring member 14 and the second ball bearing 12
A spacer 13 is arranged between the second ball bearing 12 and the inner ring 12b of the second ball bearing 12, and one end of the compression spring member 14 comes into contact with the spacer 13 so that the output shaft can rotate smoothly without any hindrance. ing. The compression spring member 14 preferably has a spring constant as small as possible in order to reduce fluctuations in axial load due to deflection.

As shown in FIG. 2, the piezoelectric element 1 of the vibrating body 2 described above includes a drive piezoelectric element group 1a and a B piezoelectric element group 1b, each of which is polarized as shown, and two piezoelectric element groups 1a and 1b for detecting the vibration state. Piezoelectric element 1c for vibration detection and common type 8ild for grounding
The B piezoelectric element group 1b is arranged at a pitch shifted by 174 of the wavelength (λ) of the frequency to be excited with respect to the A piezoelectric element group 1a.

By applying frequency voltages whose phases are 90° different from each other to the A piezoelectric element group 1a and the B piezoelectric element group 1b, progressive vibration waves are generated on the surface of the vibrating body 2, and the above-mentioned vibration waves are generated on the surface of the vibrating body 2. The 5lI1 body 7, which is brought into pressure contact with each other, is frictionally driven,
The output shaft 10 is rotated via the intermediate member 15.

In order to study the material of the sliding body 6, which is the composite resin layer of the moving body 7, for the vibration wave motor having the above configuration, a sliding body having an outer diameter of 68 mm and an inner diameter of 64 mm was prepared with the composition shown in the table below.
A ring-shaped piece with a thickness of 1 mm was adhesively fixed to an annular aluminum alloy support using an epoxy adhesive.

The sliding bodies in the examples were made of non-thermoplastic polyimide (PI) or a thermoplastic resin with a glass transition point of 100°C or higher as the base material, and the non-fibrous fillers listed in the table were blended as shown below. be.

Example ■: As a base material, a non-thermoplastic aromatic polyimide resin ("Corbilex" (trade name: manufactured by Ube Industries, Ltd.)), which is a condensate of biphenyltetracarboxylic dianhydride and directional group diamine, was used. As non-fibrous fillers, 8.5% by weight of tetrafluoroethylene resin powder ((PTFE) average particle size 9 μm) and -lead oxide powder (average particle size 10 μm) were used.
The sample was filled to a weight ratio of 6.0%, compression molded, and cut into a 1 mm ring-shaped sliding body.

Example ■: Filling amount of tetrafluoroethylene resin powder was 9.4
%, and a sliding body was produced in the same manner as in Example 2, except that 6.5% by weight of molybdenum powder was added.

Example ■: Thermoplastic polyimide F ('TPIJ: (trade name) manufactured by Mitsui Toatsu Chemical Co., Ltd.) was filled with 3.0% by weight of tetrafluoroethylene resin powder, and further filled with 12.0% of glassy carbon. Fill and fill the table, injection mold and cut to 1mm.
It was made into a ring-shaped sliding body.

Example ■: Tetrafluoroethylene resin powder at a weight ratio of 7.0
A sliding body was produced in the same manner as in Example (2) except that 10.0% of calcium carbonate powder was added.

As Comparative Example (2), a ring-shaped sliding body similar to that of the Example was manufactured by filling the above-mentioned non-thermoplastic aromatic polyimide resin with 15% by weight of carbon fiber as an abrasion modifier.

Table 1 shows the glass transition point, flexural modulus, and Rockwell hardness (HRM) of the composite resin.

The flexural modulus and Rockwell hardness were measured by manufacturing a plate-shaped body and using the method described below.

Measurement of flexural modulus: A plate with a thickness of 3.2 mm was used based on ASTM D792.

Rockwell hardness measurement: Based on ASTM D785.

Looking at the thermal properties of the composite resins in Table 1, there are no properties that correspond to the glass transition point of non-thermoplastic aromatic polyimide.

The glass transition point of other thermoplastic polyimides is 250°C, and it can be seen that the composite resins of the comparative example and all examples, including the aromatic polyimide, are extremely heat resistant.

Comparative example ■ was filled with carbon fiber as a reinforcing material to improve wear resistance, lubricity, and thermal conductivity, so the flexural modulus was particularly improved, and the Rockwell hardness also showed the highest value in the table. There is.

The non-thermoplastic polyimide composite resins of Examples ■ and ■ are as follows:
Since tetrafluoroethylene resin powder or the like is filled and blended as a friction modifier, the values of both the flexural modulus and hardness are lower than those of the original base material resin.

In addition, the thermoplastic polyimide composite resins of Examples ■ and ■ are as follows:
Since glassy carbon or calcium carbonate was added as a filler in addition to the tetrafluoroethylene resin, the flexural modulus was higher than that of the original base resin, but the hardness was lower. The hardness of thermoplastic polyimide can be improved by annealing to promote crystallization, and the Rockwell hardness of the composite resins of Examples (1) and (2) is 101 and 106.

Table 2 shows the grade, heat treatment and thermal spraying grade of the martensitic stainless steel of the vibrating body, and the hardness measured with a micro-Vickers hardness meter.

Comparative Example I and Examples I and 11 were made of 13% chromium steel (Jis
:5us420J2) vibrating body Tizuremo quenching and tempering to improve Vickers hardness (Hv) to about 530. Example III is a 17% chromium steel (Sus) that is solution heat treated and has a Vickers hardness (Hv) of about 380.
630), and no subsequent precipitation hardening heat treatment was performed.

Powder material (manufactured by Daiichi Metco Co., Ltd.) was used for all thermal spraying materials on the friction surfaces.

Comparative Example I is 12% cobalt-tungsten carbide (
Transcript: 71VFNS) was plasma sprayed, 100μ
After forming a film with a thickness of m, it is polished to form a mirror surface with a thickness of approximately 80 μm.

Examples I and III are nickel-based powders (note: 7
00F) was plasma sprayed to form an amorphous film with a thickness of about 15 μm, and then polished to form a mirror surface with a thickness of about 10 μm.

In Example II, a cobalt-based nickel chromium tungsten alloy (transcription: 45VFNS) was blasted to form a film of about 15 μm, and then polished to form a mirror surface of about 10 μm thick.

The hardness was measured using a micro Vickers hardness meter under a load of 50 gf, and the results are shown in Table 2. Comparative Example I was 1.
．． In contrast, the friction surface hardness of the nickel-based thermal sprayed materials of Examples I and III was 650 to 850 on Vickers hardness, and the friction surface hardness of the cobalt-based thermal sprayed material of Example [1] was approximately 600 to 850. 700, and it was confirmed that the difference was significant.

The vibrating body 2 was formed into an annular shape with a diameter of 73'mm and an axial dimension of 7mm.

Table 3 shows the combination of the high pressure vibration wave motor having the structure shown in FIG. 1, which was manufactured by combining the composite resin sliding body shown in Table 1 and the vibrating body shown in Table 2, and the evaluation results of the motor.

Evaluation items include initial wear and torque unevenness of the vibrating body and composite resin, as well as rated output and maximum efficiency.

[Initial wear]: After 100 hours of continuous operation at rated (4 kgcm, 10,100 rP), the amount of wear and the amount of wear on the composite resin sliding surface was measured, and the amount of acid generated in scratches on the friction surface of the vibrating body was measured. Divided into tiny pieces.

[Torque unevenness]: Torque unevenness was measured using a low-speed torque detector (manufactured by Ono Seiki Co., Ltd.) when continuously driven for 20 minutes at the rated value, and the results were divided into O1△ based on the amount of variation.

[Rated output maximum efficiency]: Measure the motor characteristics of torque vs. output and torque vs. efficiency using the above-mentioned low distortion torque detector, find the output and maximum efficiency at the rated torque (4 kgcm), and calculate ◎, ○, and Shown separately as △.

Separately, a corrosion resistance test was conducted by incorporating the vibrator shown in Table 2 into a motor.

We conducted a thermal cycle test in which the motor was driven three times in an environment of 60 degrees Celsius and 60% humidity, and another at -30 degrees Celsius. After leaving it for a while, we disassembled the motor and checked the rust on the friction surface of the vibrating body. Observed.

The results were similar to the tungsten carbide and cobalt thermally sprayed friction surfaces of Comparative Example (1), and no rust was observed on the friction surfaces of Examples I to III.

[Initial Wear] Looking at the initial wear results in Table 3, as in Comparative Example I, the tungsten carbide and cobalt friction surfaces have particularly high hardness, so there is almost no need to consider the initial wear of the vibrating body, and the It is sufficient to consider the wear of the composite resin material, and the example
It was found that non-thermoplastic polyimide composite resins can also be used in terms of early wear.

In the combination of the vibrating body with the nickel-based thermal sprayed surface and the composite resin in Example I, a composite resin in which carbon fiber is blended with non-thermoplastic polyimide (comparative example) and a composite resin in which glassy carbon etc. are blended in thermoplastic polyimide (example) are used. Example ■) Initial wear was observed for some reason.

In the combinations of the vibrating body of the cobalt-based blasting surface of Example 11 and the composite resin of Example, Example 2 is a combination of non-thermoplastic polyimide with molybdenum (MO), etc., and thermoplastic polyimide with calcium carbonate (CaCO8), etc. Initial wear was observed in the composite resin of Example (1) containing the following.

Furthermore, regarding the combination of a vibrating body with a nickel-based sprayed surface of precipitation-hardened stainless steel and a composite resin, examples ① and ② in which glassy carbon or calcium carbonate, etc. were blended with thermoplastic polyimide, showed that both the vibrating body and the composite resin were combined. Initial wear was also cited.

As mentioned above, when the composite resins of Examples ■, ■, ■, and ■ are combined with the vibrating bodies of Examples I, II, and III, the combination of Example ■ in which no reinforcing material is specifically blended with the non-thermoplastic polyimide No initial wear was observed in either the vibrator or the composite resin, showing the best wear resistance. In addition, a composite resin made of non-thermoplastic polyimide mixed with minute metal molybdenum particles (Example ■) also showed good abrasion resistance.
The composite resins of Examples (1) and (2) in which glassy carbon, calcium carbonate, etc. were blended with thermoplastic polyimide had poor abrasion resistance. The cause of this seems to be the size of the particles of spheroidal graphite and calcium carbonate blended as reinforcing agents, as well as the adhesion to the base resin, in addition to the characteristics of the base resin, and there seems to be ample possibility of improvement. .

[Torque unevenness] Next, regarding torque unevenness, when looking at the combination of the composite resin sliding surface of Comparative Example ■ and Example 1 for the vibrators of Comparative Example I and Example 1, it is found that carbon fiber is added to non-thermoplastic polyimide. The compounded composite resin (comparative example ■) had a torque fluctuation of about 5% and was rated ``△'', whereas even the same non-thermoplastic polyimide had non-thermoplastic resins such as tetrafluoroethylene resin and lead monoxide. Composite resin containing fiber filler (Example ■
), the amount of torque fluctuation was significantly improved to around 2%, resulting in an "O" rating.

Example I% The torque fluctuations in combinations of the composite resins of Examples ■, ■, ■, and ■ with respect to the vibrators of II and III are shown in Table 3. Permissible combinations have not been evaluated.

Composite resin example (■) is a relatively high-strength, non-thermoplastic polyimide resin that is filled with fine metal molybdenum powder of 5 μm or less, making the surface texture of the sliding surface relatively uniform and providing stable friction drive. seems to have become possible.

In addition, in Example 2, glassy carbon having a particle size of about 10 μm and having a higher strength or hardness than metal molybdenum powder was dispersed and filled into thermoplastic polyimide, which has a relatively low strength compared to non-thermoplastic polyimide. Torque fluctuations were severe, and improvements such as annealing to increase the hardness of the base resin were required.

In Example 2, calcium carbonate powder, which has lower strength and hardness than metal molybdenum powder, was dispersed and filled, but the fluctuation in torque was still large, probably because the particle size was too large.

[Rated output, maximum efficiency When evaluating the vibrating body and composite resin material from the rated output or maximum efficiency of the commuter, the vibrating body made of tungsten carbide and cobalt thermal sprayed materials (Comparative Example I) had the best performance, followed by the nickel-based material. , followed by cobalt-based materials.

These differences in properties are the characteristics of thermal spray materials (hardness, lubricity, etc.)
This is thought to be due to the surface accuracy of the friction surface, but tungsten carbide and cobalt have the largest surface roughness with depressions observed on the sprayed surface, while the cobalt-based sprayed surface has the smallest porosity and has a dense friction surface. The nickel-based sprayed surface has an intermediate friction surface, and friction test results have confirmed that the friction coefficient between it and the composite resin sliding surface is different.

Next, when comparing the performance of composite resin sliding bodies, the composite resin of Example ■, in which thermoplastic polyimide is filled with tetrafluoroethylene resin as a friction modifier and glassy carbon as a wear modifier, has the highest performance. Despite having a small coefficient of friction, it had the highest performance overall.

Possible reasons for this include its lower hardness, elasticity, etc. than other resins, as well as its high thermal conductivity.

[Effects of the Invention] As explained above, according to the present invention, it is possible to obtain the effect of improving the torque unevenness when the rated number of people is present, to prevent scratches from occurring on the vibrating body friction surface, and to prevent the vibrating body friction surface and the composite resin from being damaged. This has the effect of minimizing wear on sliding surfaces.

In addition, conventionally, when spraying tungsten carbide and cobalt to a thickness of 100 μm on the friction surface of a vibrating body with comb teeth, the vibrating body was fixed with cement to prevent the spraying material from adhering to surfaces other than the friction surface, which was expensive and There were problems with mass production. However, in the present invention, we decided to use a non-fiber type composite resin that has relatively low hardness and excellent abrasion characteristics against the mating material, so we used a metal alloy with low hardness but high toughness to make it thinner than conventional examples. 50. Since it is now sufficient to thermally spray the vibrating body to a thickness of 100 mm, it is no longer necessary to fix the vibrating body with cement, resulting in significant cost reductions and improved mass production.

Furthermore, it has become possible to use low-cost metal alloys instead of thermal spraying of tungsten carbide and cobalt, resulting in cost reductions in terms of material costs.

[Brief explanation of drawings]

FIG. 1 is a vertical cross-sectional view showing an outline of the configuration of a vibration wave motor constructed according to the present invention, and FIG. 2 is a plan view illustrating the arrangement of a group of piezoelectric elements constituting a vibrating body. 1... Piezoelectric element 2... Vibrating body 5... Supporting body 6... Sliding body 7... Moving body 5... Intermediate member 7... Elastic sheet member and 4 others Figure Figure

Claims (1)

[Claims] 1. A member having a composite resin layer that provides a contact surface with the vibrating body is brought into pressurized contact with a vibrating body that generates progressive vibration waves, and the member is brought into pressurized contact with the vibrating body. In a vibration wave motor that relatively moves by friction drive by progressive vibration waves generated in the vibrating body, the composite resin layer has a Rockwell hardness (H
The friction surface of the vibrating body is made of a composite resin with a Vickers hardness (H_V) of 500.
A vibration wave motor characterized in that it is formed by thermal spraying a nickel-based or cobalt-based metal alloy of No. 850. 2. A vibration wave motor characterized in that the coating of the nickel-based metal alloy according to claim 1 forms an amorphous phase. 3. A vibration wave motor characterized in that the nickel-based or cobalt-based metal alloy of claim 1 contains chromium and tungsten. 4. A vibration wave motor characterized in that the nickel-based or cobalt-based metal alloy film according to claim 1 has a thickness in the range of 5 μm to 50 μm. 5. A vibration wave motor characterized in that the base material resin of the composite resin according to claim 1 is a non-thermoplastic aromatic polyimide resin. 6. The base material resin of the composite resin of claim 1 has a glass transition point of 1.
A vibration wave motor characterized by being made of thermoplastic resin with a temperature of 00°C or higher. 7. A vibration wave motor according to claim 1, wherein the base material of the vibrating body is martensitic stainless steel. 8. A vibration wave motor characterized in that the composite resin according to claim 1 is a non-fiber type composite resin.