JPH0778592A - Dielectric barrier discharge lamp - Google Patents
Dielectric barrier discharge lampInfo
- Publication number
- JPH0778592A JPH0778592A JP5246097A JP24609793A JPH0778592A JP H0778592 A JPH0778592 A JP H0778592A JP 5246097 A JP5246097 A JP 5246097A JP 24609793 A JP24609793 A JP 24609793A JP H0778592 A JPH0778592 A JP H0778592A
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- discharge
- dielectric barrier
- barrier discharge
- discharge vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、例えば、光化学反応用
の紫外線光源として使用される放電ランプの一種で、誘
電体バリヤ放電によってエキシマ分子を形成し、該エキ
シマ分子から放射される光を利用するいわゆる誘電体バ
リヤ放電ランプの改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is, for example, a kind of discharge lamp used as an ultraviolet light source for photochemical reaction, which forms excimer molecules by dielectric barrier discharge and utilizes the light emitted from the excimer molecules. To improve the so-called dielectric barrier discharge lamp.
【0002】[0002]
【従来の技術】本発明に関連した技術としては、例え
ば、日本国公開特許公報平2ー7353号があり、そこ
には、放電容器にエキシマ分子を形成する放電用ガスを
充填し、誘電体バリヤ放電(別名オゾナイザ放電あるい
は無声放電。電気学会発行改定新版「放電ハンドブッ
ク」平成1年6月再版7刷発行第263ページ参照)に
よってエキシマ分子を形成せしめ、該エキシマ分子から
放射される光を取り出す放射器、すなわち誘電体バリヤ
放電ランプについて記載されており、該放電容器は円筒
状であり、該放電容器の少なくとも一部は該誘電体バリ
ヤ放電の誘電体を兼ねており、該誘電体の少なくとも一
部は該エキシマ分子から放射される光に対して光透過性
であり、該光透過性誘電体の少なくとも一部に導電性網
状電極が設けられた誘電体バリヤ放電ランプ構造が記載
されている。上記のような誘電体バリヤ放電ランプは、
従来の低圧水銀放電ランプや高圧アーク放電ランプには
無い種々の特長を有しているため有用である。しかし、
上記のような誘電体バリヤ放電ランプは、従来のランプ
とは全く異なった構造のランプであるのにもかかわら
ず、ランプの保持方法について十分な検討がなされてい
ないという問題があった。2. Description of the Related Art As a technique related to the present invention, there is, for example, Japanese Patent Laid-Open Publication No. 2-7353, in which a discharge vessel is filled with a discharge gas for forming excimer molecules, and a dielectric is used. Barrier discharge (also known as ozonizer discharge or silent discharge. See the revised edition “Discharge Handbook” published by The Institute of Electrical Engineers of Japan, June 2001, Reprint 7th edition, page 263) forms excimer molecules, and the light emitted from the excimer molecules is extracted. A radiator, i.e. a dielectric barrier discharge lamp, is described, wherein the discharge vessel is cylindrical, at least a portion of the discharge vessel also serving as the dielectric of the dielectric barrier discharge, at least the dielectric A part of the dielectric layer is transparent to light emitted from the excimer molecule, and an electrically conductive mesh electrode is provided on at least a part of the transparent dielectric body. Body barrier discharge lamp structure is described. The dielectric barrier discharge lamp as described above,
It is useful because it has various features that conventional low-pressure mercury discharge lamps and high-pressure arc discharge lamps do not have. But,
The dielectric barrier discharge lamp as described above has a problem that the method for holding the lamp has not been sufficiently examined, although it has a completely different structure from the conventional lamp.
【0003】[0003]
【発明が解決しようとする課題】本発明の課題は、光の
取り出し効率が十分で、かつ、ランプの保持が容易であ
る誘電体バリヤ放電ランプを提供することである。SUMMARY OF THE INVENTION An object of the present invention is to provide a dielectric barrier discharge lamp which has a sufficient light extraction efficiency and is easy to hold.
【0004】[0004]
【課題を解決するための手段】上記本発明の目的は、少
なくとも外形が概略円筒状である放電容器に誘電体バリ
ヤ放電によってエキシマ分子を形成する放電用ガスが充
填され、該放電容器の外壁の少なくとも一部は、該エキ
シマ分子から放射される光に対して光透過性であり、か
つ、該誘電体バリヤ放電の誘電体を兼ねており、該光透
過性誘電体の少なくとも一部に導電性網状電極が設けら
れた誘電体バリヤ放電ランプにおいて、該放電容器の少
なくとも一端に該導電性網状電極の外径以下の外径を有
する口金を設けた構成にすることによって達成される。
また、該口金がランプを冷却するための通気孔を有する
ように構成することによって、本発明の目的はよりいっ
そう達成される。An object of the present invention is to fill a discharge vessel having at least a substantially cylindrical outer shape with a discharge gas that forms excimer molecules by dielectric barrier discharge, and to form an outer wall of the discharge vessel. At least a part thereof is transparent to the light emitted from the excimer molecule, and also serves as a dielectric of the dielectric barrier discharge, and at least a part of the transparent dielectric is conductive. This is achieved by providing a dielectric barrier discharge lamp provided with a mesh electrode with a structure in which at least one end of the discharge vessel is provided with a base having an outer diameter equal to or smaller than the outer diameter of the conductive mesh electrode.
Further, the object of the present invention is further achieved by configuring the base so as to have a ventilation hole for cooling the lamp.
【0005】[0005]
【作用】本発明者等は、少なくとも外形が概略円筒状で
ある放電容器に誘電体バリヤ放電によってエキシマ分子
を形成する放電用ガスが充填され、該放電容器の外壁の
少なくとも一部は、該エキシマ分子から放射される光に
対して光透過性であり、かつ、該誘電体バリヤ放電の誘
電体を兼ねており、該光透過性誘電体の少なくとも一部
に導電性網状電極が設けられた誘電体バリヤ放電ランプ
において、光の取り出し効率について詳細な検討を行っ
たところ、光の取り出し効率は、該誘電体バリヤ放電ラ
ンプの保持方法、特に、該誘電体バリヤ放電ランプの端
部に設けた口金の構造に大きく作用されることを発見し
た。すなわち、口金の外径が該導電性網状電極の外径を
越えると、光取り出し効率が低下することを発見した。
さらに、この原因が、円筒状の誘電体バリヤ放電ランプ
独特の配光分布に起因することも発見した。図2は、配
光分布の説明図であって、直管状の蛍光ランプやハロゲ
ンランプの配光分布が、ランプの管軸に直角な方向の、
すなわちθがπ/2の方向の光出力を直径とした円状曲
線21になるのに対して、誘電体バリヤ放電ランプの配
光分布は、θが0およびπ付近において円状の分布より
も光出力が大きくなった分布22をしている。すなわ
ち、誘電体バリヤ放電ランプにおいては、その管軸に近
接した方向に放射される光の割合が蛍光ランプなどに比
較して大きく、従って、口金の外径が該導電性網状電極
の外径を越えると、光取り出し効率が低下する。すなわ
ち、口金の構造によって光出力、言い換えると光り取り
出し効率が低下するのは、円筒状誘電体バリヤ放電ラン
プに、特有の現象である。The inventors of the present invention have found that at least a part of the outer wall of the discharge vessel is filled with a discharge gas that forms excimer molecules by a dielectric barrier discharge in a discharge vessel having at least a substantially outer shape. A dielectric that is transparent to the light emitted from the molecule and that also serves as the dielectric of the dielectric barrier discharge, in which a conductive mesh electrode is provided on at least a part of the transparent dielectric. In the body barrier discharge lamp, the light extraction efficiency was examined in detail, and it was found that the light extraction efficiency was determined by the method of holding the dielectric barrier discharge lamp, in particular, the cap provided at the end of the dielectric barrier discharge lamp. It was discovered that it is greatly affected by the structure of. That is, it was discovered that when the outer diameter of the die exceeds the outer diameter of the conductive reticulated electrode, the light extraction efficiency decreases.
Furthermore, we have found that this cause is due to the light distribution unique to the cylindrical dielectric barrier discharge lamp. FIG. 2 is an explanatory view of the light distribution, in which the light distribution of a straight-tube fluorescent lamp or a halogen lamp is in a direction perpendicular to the tube axis of the lamp.
That is, while θ is a circular curve 21 whose diameter is the light output in the direction of π / 2, the light distribution of the dielectric barrier discharge lamp is closer to 0 and π than the circular distribution. The distribution 22 is such that the light output is increased. That is, in the dielectric barrier discharge lamp, the proportion of light emitted in the direction close to the tube axis is larger than that in a fluorescent lamp, and therefore the outer diameter of the base is smaller than the outer diameter of the conductive mesh electrode. If it exceeds, the light extraction efficiency decreases. That is, it is a phenomenon peculiar to the cylindrical dielectric barrier discharge lamp that the light output, in other words, the light extraction efficiency is lowered due to the structure of the base.
【0006】少なくとも外形が概略円筒状である放電容
器に誘電体バリヤ放電によってエキシマ分子を形成する
放電用ガスが充填され、該放電容器の外壁の少なくとも
一部は、該エキシマ分子から放射される光に対して光透
過性であり、かつ、該誘電体バリヤ放電の誘電体を兼ね
ており、該光透過性誘電体の少なくとも一部に導電性網
状電極が設けられた誘電体バリヤ放電ランプにおいて、
該放電容器の少なくとも一端に該導電性網状電極の外径
以下の外径を有する口金を設けると、まず第一に光の取
り出し効率を低下させること無く、第二に太く、かつ、
複雑な構造をした同軸円筒の端部を直接支持する場合に
比較し、ランプの位置を容易に、精密に設定出来るよう
になる。なお、本発明における口金とは、誘電体バリヤ
放電ランプの放電容器とは独立したランプ保持を目的と
した構造物で、接着剤等による接着、あるいは圧入など
によって放電容器に固着されているものをいう。さら
に、この発明における該導電性網状電極の外径とは、放
電容器に装着した状態で測定された網状電極の外径であ
る。たとえば、直径dmmの素線を交差させた円筒状網
を直径Dmmの放電容器に装着した場合の該導電性網状
電極の外径は、素線の「重なり」の関係でdの4倍とD
の和になる。At least a part of the outer wall of the discharge vessel is filled with a discharge gas that forms excimer molecules by a dielectric barrier discharge in a discharge vessel having at least a substantially cylindrical outer shape, and light emitted from the excimer molecules. In the dielectric barrier discharge lamp, which is light transmissive to, and also serves as a dielectric of the dielectric barrier discharge, and in which at least a part of the light transmissive dielectric is provided with a conductive mesh electrode,
Providing at least one end of the discharge container with a base having an outer diameter equal to or less than the outer diameter of the conductive reticulated electrode, first of all without decreasing the light extraction efficiency, secondly thick, and
The position of the lamp can be set easily and precisely as compared with the case where the end of a coaxial cylinder having a complicated structure is directly supported. Incidentally, the base in the present invention is a structure for the purpose of holding the lamp independent of the discharge vessel of the dielectric barrier discharge lamp, which is fixed to the discharge vessel by adhesion with an adhesive or by press fitting. Say. Further, the outer diameter of the conductive reticulated electrode in the present invention is the outer diameter of the reticulated electrode measured in the state of being mounted in the discharge vessel. For example, the outer diameter of the conductive reticulated electrode when a cylindrical net having diameters of dmm crossed with each other is attached to a discharge vessel having a diameter of Dmm is 4 times d and D due to the "overlap" of the wires.
Is the sum of
【0007】該口金をランプを冷却するための通気孔を
有する構造にすると、ランプの冷却が容易になり、高出
力の誘電体バリヤ放電ランプが容易に得られる。該口金
をシリコンゴムあるいはフッ素樹脂で構成すると、該材
料は弾力性があるので、該口金を放電容器の端部に取り
付け易い、電極に接続したリード線が取り出しやすいと
いう利点が生じる。If the base has a structure having a vent hole for cooling the lamp, the lamp can be easily cooled, and a high output dielectric barrier discharge lamp can be easily obtained. When the base is made of silicone rubber or fluororesin, the material is elastic, and therefore, there are advantages that the base is easy to attach to the end of the discharge vessel and the lead wire connected to the electrode is easy to take out.
【0008】[0008]
【実施例】本発明の一実施例である同軸円筒形誘電体バ
リヤ放電ランプの概略図を図1に示す。放電容器1は全
長約150mmの石英ガラス製で、外径14mmの内側
管2、肉厚1mm内径約25mmの外側管3を同軸に配
置して中空円筒状にしたものである。外側管3は誘電体
バリヤ放電の誘電体バリヤと光取り出し窓を兼用してお
り、外面には光を透過する金属製網状電極4が設けられ
ている。内側管2の外表面には光反射板を兼ねたアルミ
ニウム電極5が設けられている。20は、アルミニウム
電極5を機械的、化学的に保護する目的で設けた付加型
のシリコンゴムからなる保護膜である。また、放電容器
1の一端にバリウムゲッタ6が設けられている。網状電
極4は、軸方向に伸縮性のあるシームレスに編んだ円筒
状網で、該円筒状金属網のなかに放電容器1を挿入し、
ランプの軸方向に引っ張ることによって外側管3の外側
に密接された網状電極5が形成される。従って、該円筒
状網電極の外径は、約27.4mmになる。該放電容器
の両端に、シリコンゴムからなり、外径が24mmで、
通気孔12,13を有する口金10、11を、シリコン
ゴム系の接着材を使用いて装着した。接着材は図示して
いない。1 is a schematic view of a coaxial cylindrical dielectric barrier discharge lamp according to an embodiment of the present invention. The discharge vessel 1 is made of quartz glass having a total length of about 150 mm, and an inner tube 2 having an outer diameter of 14 mm and an outer tube 3 having a wall thickness of 1 mm and an inner diameter of about 25 mm are coaxially arranged to form a hollow cylinder. The outer tube 3 also serves as a dielectric barrier for a dielectric barrier discharge and a light extraction window, and a metal mesh electrode 4 that transmits light is provided on the outer surface. An aluminum electrode 5 also serving as a light reflection plate is provided on the outer surface of the inner tube 2. Reference numeral 20 is a protective film made of an addition type silicone rubber provided for the purpose of mechanically and chemically protecting the aluminum electrode 5. A barium getter 6 is provided at one end of the discharge vessel 1. The mesh electrode 4 is a seamlessly knitted cylindrical mesh that is elastic in the axial direction. The discharge vessel 1 is inserted into the cylindrical metal mesh,
By pulling in the axial direction of the lamp, a mesh electrode 5 is formed in close contact with the outside of the outer tube 3. Therefore, the outer diameter of the cylindrical mesh electrode is about 27.4 mm. Both ends of the discharge vessel are made of silicone rubber and have an outer diameter of 24 mm,
The bases 10 and 11 having the ventilation holes 12 and 13 were attached using a silicone rubber adhesive. The adhesive is not shown.
【0009】放電容器の放電空間7に放電用ガスとして
キセノンガスを300Torr封入した。周波数20キ
ロヘルツの電源8でランプ長1cmあたり2ワットの電
力で放電させたところ、172nmとその付近の紫外線
が高効率で放射された。該口金が該導電性網状電極の外
径未満の外径を有するので、光の取り出し効率を低下さ
せること無く、さらに、太く、かつ、複雑な構造をした
同軸円筒の端部を直接支持する場合に比較し、ランプの
位置を容易に、精密に設定することが出来た。また、該
口金に設けた通気孔に窒素ガスを流してランプを冷却す
ることにより、前記の3倍の電気入力で点灯しても、効
率が低下しない高出力の誘電体バリヤ放電ランプ得られ
た。さらに、口金の材質がシリコンゴムなので、弾力性
があるので放電容器への装着が容易に行え、かつ172
nmとその付近の紫外線に対しても十分な耐性があるの
で十分な寿命を有するなどの利点が生じた。The discharge space 7 of the discharge vessel was filled with 300 Torr of xenon gas as a discharge gas. When the electric power was discharged from the power source 8 having a frequency of 20 kHz at a power of 2 watts per 1 cm of the lamp length, the ultraviolet rays at 172 nm and its vicinity were radiated with high efficiency. Since the base has an outer diameter smaller than the outer diameter of the conductive reticulated electrode, it directly supports the end of a coaxial cylinder having a thick and complicated structure without lowering the light extraction efficiency. It was possible to easily and precisely set the position of the lamp compared to. Further, by flowing nitrogen gas into the vent hole provided in the base to cool the lamp, a high output dielectric barrier discharge lamp which does not decrease in efficiency even when the lamp is lit with the electric input of 3 times as above was obtained. . Further, since the material of the base is silicon rubber, it has elasticity and can be easily attached to the discharge vessel.
Since it has sufficient resistance to ultraviolet rays in the wavelength region of nm and its vicinity, it has an advantage of having a sufficient life.
【0010】シリコンゴムの代わりに、フッ素樹脂の口
金を使用しても上記実施例と同様の効果が得られた。ま
た、セラミックスあるいは金属の口金を使用しても、光
の取り出し効率を低下させることが無く、ランプの位置
を容易に、精密に設定することが出来などの効果が得ら
れることは、自明である。Even if a fluororesin base was used instead of silicon rubber, the same effect as in the above-mentioned embodiment was obtained. Moreover, it is obvious that the use of a ceramic or metal base does not lower the light extraction efficiency and can easily and precisely set the position of the lamp. .
【0011】[0011]
【発明の効果】上記したように、本発明によれば、光の
取り出し効率が十分で、かつ、ランプの保持が容易であ
る誘電体バリヤ放電ランプをを提供できる。As described above, according to the present invention, it is possible to provide a dielectric barrier discharge lamp having sufficient light extraction efficiency and easy lamp holding.
【図1】本発明の誘電体バリヤ放電ランプの実施例の説
明図である。FIG. 1 is an explanatory view of an embodiment of a dielectric barrier discharge lamp of the present invention.
【図2】配光分布の説明図である。FIG. 2 is an explanatory diagram of a light distribution distribution.
1 放電容器 2 内側管 3 外側管 4 円筒状網電極 5 アルミニウム電極 6 ゲッタ 8 電源 10,11 口金 12,13 通気孔 1 Discharge container 2 Inner tube 3 Outer tube 4 Cylindrical mesh electrode 5 Aluminum electrode 6 Getter 8 Power supply 10,11 Base 12,13 Vent hole
───────────────────────────────────────────────────── フロントページの続き (72)発明者 竹元 史敏 兵庫県姫路市別所町佐土1194番地 ウシオ 電機株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Fumitoshi Takemoto 1194 Sado, Bessho Town, Himeji City, Hyogo Prefecture Ushio Electric Co., Ltd.
Claims (3)
体バリヤ放電によってエキシマ分子を形成する放電用ガ
スが充填され、該放電容器の外壁の少なくとも一部は、
該エキシマ分子から放射される光に対して光透過性であ
り、かつ、該誘電体バリヤ放電の誘電体を兼ねており、
該光透過性誘電体の少なくとも一部に導電性網状電極が
設けられた誘電体バリヤ放電ランプにおいて、該放電容
器の少なくとも一端に該導電性網状電極の外径以下の外
径を有する口金を設けたことを特徴とした誘電体バリヤ
放電ランプ。1. A discharge vessel having a substantially cylindrical outer shape is filled with a discharge gas for forming excimer molecules by dielectric barrier discharge, and at least a part of an outer wall of the discharge vessel is formed.
Is transparent to the light emitted from the excimer molecule, and also serves as the dielectric of the dielectric barrier discharge,
In a dielectric barrier discharge lamp in which a conductive mesh electrode is provided on at least a part of the light-transmitting dielectric, a base having an outer diameter equal to or smaller than the outer diameter of the conductive mesh electrode is provided on at least one end of the discharge vessel. Dielectric barrier discharge lamp characterized by
を有することを特徴とした請求項1に記載の誘電体バリ
ヤ放電ランプ。2. The dielectric barrier discharge lamp according to claim 1, wherein the base has a vent hole for cooling the lamp.
脂であることを特徴とした請求項1に記載の誘電体バリ
ヤ放電ランプ。3. The dielectric barrier discharge lamp according to claim 1, wherein the base is silicon rubber or fluororesin.
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24609793A JP3178184B2 (en) | 1993-09-08 | 1993-09-08 | Dielectric barrier discharge lamp |
TW086106221A TW348262B (en) | 1993-09-08 | 1994-09-01 | Dielectric barrier discharge lamp |
TW083108047A TW324106B (en) | 1993-09-08 | 1994-09-01 | Dielectric barrier layer discharge lamp |
EP94114054A EP0642153B1 (en) | 1993-09-08 | 1994-09-07 | Dielectric barrier discharge lamp |
DE69402491T DE69402491T2 (en) | 1993-09-08 | 1994-09-07 | Dielectric limited discharge lamp |
DE69419163T DE69419163T2 (en) | 1993-09-08 | 1994-09-07 | Discharge lamp with the electrical barrier |
EP96103794A EP0721204B1 (en) | 1993-09-08 | 1994-09-07 | Dielectric barrier discharge lamp |
US08/303,033 US5581152A (en) | 1993-09-08 | 1994-09-08 | Dielectric barrier discharge lamp |
KR1019940022656A KR100238642B1 (en) | 1993-09-08 | 1994-09-08 | Dielectric barrier discharge lamp |
KR1019990026316A KR100268706B1 (en) | 1993-09-08 | 1999-07-01 | Dielectric barrier discharge lamp |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24609793A JP3178184B2 (en) | 1993-09-08 | 1993-09-08 | Dielectric barrier discharge lamp |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0778592A true JPH0778592A (en) | 1995-03-20 |
JP3178184B2 JP3178184B2 (en) | 2001-06-18 |
Family
ID=17143450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24609793A Expired - Fee Related JP3178184B2 (en) | 1993-09-08 | 1993-09-08 | Dielectric barrier discharge lamp |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3178184B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000106147A (en) * | 1998-09-29 | 2000-04-11 | Orc Mfg Co Ltd | Gas cooled type dielectric barrier discharge lamp |
JP2001283784A (en) * | 2000-03-30 | 2001-10-12 | Ushio Inc | Dielectric barrier discharge lamp apparatus |
KR100535928B1 (en) * | 1999-07-05 | 2005-12-09 | 우시오덴키 가부시키가이샤 | Dielectric barrier discharge lamp |
JP2019204728A (en) * | 2018-05-25 | 2019-11-28 | ウシオ電機株式会社 | Excimer lamp |
-
1993
- 1993-09-08 JP JP24609793A patent/JP3178184B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000106147A (en) * | 1998-09-29 | 2000-04-11 | Orc Mfg Co Ltd | Gas cooled type dielectric barrier discharge lamp |
KR100535928B1 (en) * | 1999-07-05 | 2005-12-09 | 우시오덴키 가부시키가이샤 | Dielectric barrier discharge lamp |
JP2001283784A (en) * | 2000-03-30 | 2001-10-12 | Ushio Inc | Dielectric barrier discharge lamp apparatus |
JP2019204728A (en) * | 2018-05-25 | 2019-11-28 | ウシオ電機株式会社 | Excimer lamp |
KR20190134461A (en) * | 2018-05-25 | 2019-12-04 | 우시오덴키 가부시키가이샤 | Excimer lamp |
Also Published As
Publication number | Publication date |
---|---|
JP3178184B2 (en) | 2001-06-18 |
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