JPH0777043B2 - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH0777043B2
JPH0777043B2 JP23896592A JP23896592A JPH0777043B2 JP H0777043 B2 JPH0777043 B2 JP H0777043B2 JP 23896592 A JP23896592 A JP 23896592A JP 23896592 A JP23896592 A JP 23896592A JP H0777043 B2 JPH0777043 B2 JP H0777043B2
Authority
JP
Japan
Prior art keywords
layer
magneto
recording medium
magnetic
optical recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP23896592A
Other languages
Japanese (ja)
Other versions
JPH05198025A (en
Inventor
元 町田
元治 田中
篤行 和多田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP23896592A priority Critical patent/JPH0777043B2/en
Publication of JPH05198025A publication Critical patent/JPH05198025A/en
Publication of JPH0777043B2 publication Critical patent/JPH0777043B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はキュリー温度が250℃
以下の強磁性酸化物からなる磁性薄層を有する光磁気記
録媒体に関する。さらに詳しくは、本発明はレーザー光
などの光熱によって情報を書き込み記録できる光磁気記
録媒体に関する。
The present invention has a Curie temperature of 250 ° C.
The present invention relates to a magneto-optical recording medium having a magnetic thin layer made of a ferromagnetic oxide. More specifically, the present invention relates to a magneto-optical recording medium on which information can be written and recorded by light heat such as laser light.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】従来、
非晶質磁性層を有する記録媒体を用いて光磁気記録を行
うことが知られている。しかしながら、これら非晶質磁
性層は酸化され易く酸化されると光磁気特性が劣化する
ために磁性層を形成した直後にその上に保護層を設ける
必要があるので製造上の難点がある。一方、フェライト
のような強磁性酸化物は比較的大きな光磁気特性を有す
ることが知られているが光磁気記録に応用するには不十
分でありしかもキュリー点も高いという問題があった。
2. Description of the Related Art Conventionally, the problems to be solved by the invention
It is known to perform magneto-optical recording using a recording medium having an amorphous magnetic layer. However, these amorphous magnetic layers are easily oxidized, and if they are oxidized, the magneto-optical characteristics are deteriorated. Therefore, it is necessary to provide a protective layer on the amorphous magnetic layer immediately after forming the magnetic layer, which is a manufacturing problem. On the other hand, a ferromagnetic oxide such as ferrite is known to have a relatively large magneto-optical characteristic, but it has a problem that it is insufficient for application to magneto-optical recording and has a high Curie point.

【0003】本発明は上記問題に鑑みてなされたもので
あって特定の金属で置換された鉄酸化物を磁性薄層に用
いることにより充分に大きな光磁気特性を有する光磁気
記録媒体を提供することを目的とする。また、本発明の
別の目的は酸化や腐蝕がなくかつ磁気特性の劣化がない
酸化物磁性膜を提供することである。さらに、本発明の
別の目的は光磁気記録媒体の材料としてキュリー温度が
250℃以下の酸化物磁性体を用いることである。
The present invention has been made in view of the above problems, and provides a magneto-optical recording medium having a sufficiently large magneto-optical characteristic by using an iron oxide substituted with a specific metal for a magnetic thin layer. The purpose is to Another object of the present invention is to provide an oxide magnetic film that is neither oxidized nor corroded and has no deterioration in magnetic characteristics. Still another object of the present invention is to use an oxide magnetic material having a Curie temperature of 250 ° C. or lower as a material for the magneto-optical recording medium.

【0004】[0004]

【課題を解決するための手段及び作用効果】本発明の光
磁気記録媒体は、透明基板上に、下記一般式化1で表わ
される強磁性酸化物からなる磁性薄層を設け、さらにこ
の磁性薄層上に透明誘電体層および反射層を順次設けた
ことを特徴とするものである。
In the magneto-optical recording medium of the present invention, a magnetic thin layer made of a ferromagnetic oxide represented by the following general formula 1 is provided on a transparent substrate, and the magnetic thin layer is further provided. It is characterized in that a transparent dielectric layer and a reflective layer are sequentially provided on the layer.

【化1】 [Chemical 1]

【0005】次に、本発明を図面を参照しつつ詳細に説
明する。第1図に示すように、本発明の光磁気記録媒体
は透明基板1上に磁性薄層2を設け、さらにこの上に透
明誘電体層3および反射層4を順次設けたものである。
酸化防止層5は必要に応じて設けることができる。透明
基板としては、ガラス、石英ガラス、耐熱性プラスチッ
クなどを用いることができる。基板上の酸化物磁性薄層
の厚さは100〜30000Å程度で好ましくは300
〜5000Åである。次に、この酸化物磁性薄層に屈折
率2程度の透明誘電体層1000〜5000Å程度を形
成させる。さらに、この透明誘電体層上に反射層例えば
Cu、Au、Ag、Pt、Alなどを500〜1000
0Å程度形成させ、さらに必要に応じてこの上に酸化防
止層としてSiO2、TiO2などの酸化物を形成させる
ことができる。
Next, the present invention will be described in detail with reference to the drawings. As shown in FIG. 1, the magneto-optical recording medium of the present invention comprises a magnetic thin layer 2 provided on a transparent substrate 1, and a transparent dielectric layer 3 and a reflective layer 4 provided in this order on the magnetic thin layer 2.
The antioxidant layer 5 can be provided if necessary. As the transparent substrate, glass, quartz glass, heat resistant plastic or the like can be used. The thickness of the oxide magnetic thin layer on the substrate is about 100 to 30000Å, preferably 300.
It is ~ 5000Å. Next, a transparent dielectric layer 1000 to 5000 Å having a refractive index of about 2 is formed on this oxide magnetic thin layer. Further, a reflective layer such as Cu, Au, Ag, Pt, or Al is provided on the transparent dielectric layer in an amount of 500 to 1000.
About 0Å may be formed, and if necessary, an oxide such as SiO 2 or TiO 2 may be formed thereon as an antioxidant layer.

【0006】本発明における酸化物磁性薄層を構成する
強磁性酸化物は下記一般式化1で表わされるものであっ
てキュリー温度が250℃以下である。一般に酸化物磁
性体はキュリー温度が400℃以上と高いことから従来
光磁気メモリー材料として使用できないとされている。
The ferromagnetic oxide constituting the oxide magnetic thin layer in the present invention is represented by the following general formula 1 and has a Curie temperature of 250 ° C. or lower. It is generally said that the oxide magnetic material cannot be used as a conventional magneto-optical memory material because of its high Curie temperature of 400 ° C. or higher.

【化1】 (式中、各記号の意味は上述したとおりである)本発明
者は酸化物の組成とキュリー温度との間に特定の関係が
あることを見出し酸化物磁性体の光磁気記録媒体への利
用を可能にしたのである。ここで本発明において用いら
れる代表的な強磁性酸化物を例にとってその組成とキュ
リー温度との関係を説明すれば第2図に示したようにな
る。上記化1の強磁性酸化物がx=0のときはキュリー
温度が500℃となるがFe原子を特定の金属で置換す
るとつまりx成分量に応じてキュリー温度が低下するこ
とが明らかである。また、このようにキュリー温度の低
い酸化物磁性体でも磁気光学効果が回転性能を十分維持
している。例えば、CoM0.9Fe1.14では膜厚が2
000Åの場合7000Åの波長でカー回転角(2θ
k)は1゜程度になる。本発明の磁性薄層は上記のよう
なキュリー温度の低い強磁性酸化物をスパッタリング
法、蒸着法、イオンプレーティング法などによって透明
基板上に形成して得られる。
[Chemical 1] (In the formula, the meaning of each symbol is as described above.) The present inventors have found that there is a specific relationship between the composition of the oxide and the Curie temperature, and use of the oxide magnetic material in a magneto-optical recording medium. Was made possible. Here, the relationship between the composition and the Curie temperature of a typical ferromagnetic oxide used in the present invention will be described as shown in FIG. When the ferromagnetic oxide of the above chemical formula 1 has a Curie temperature of 500 ° C. when x = 0, it is clear that when the Fe atom is replaced with a specific metal, that is, the Curie temperature decreases according to the amount of the x component. In addition, even with an oxide magnetic material having a low Curie temperature, the magneto-optical effect sufficiently maintains the rotation performance. For example, CoM 0. 9 Fe 1. 1 in O 4 thickness 2
In the case of 000Å, the Kerr rotation angle (2θ
k) is about 1 °. The magnetic thin layer of the present invention is obtained by forming a ferromagnetic oxide having a low Curie temperature as described above on a transparent substrate by a sputtering method, a vapor deposition method, an ion plating method or the like.

【0007】さらに、本発明の特徴は充分なカー回転角
を得るために酸化物磁性薄層上に透明誘電体層を設ける
ことである。ここで膜の構成とカー回転角との関係を図
面について説明すると、第3図(A)および(B)は従
来の構成を示すものであって(A)は(ガラス)基板1
上に磁性層2(膜厚4000Å)を設けた例を示しそし
て(B)は基板1上に磁性層2(膜厚200Å)および
反射層4を順次設けた例を示す。第1図に示すように磁
性層2(膜厚300Å)上に透明誘電体層3を設けた本
発明のもの(以下、(C)と略記する)と比較する。
(A)、(B)および(C)のいずれの場合においても
カー回転角の測定は基板側から行った。第4図は膜の構
成とカー回転角との関係を示したものであって、(A)
は磁性層が厚い場合で媒体表面からの反射のみのカー回
転角であり、(B)は磁性層は薄膜で光透過可能で反射
層で光が反射されるので回転角が増大する。そして
(C)は(B)にさらに誘電体層を設けたものであって
磁性層との相互作用により反射光が小さくなり結果とし
て回転角が増大する。上述したように、本発明では透明
誘電体層を設けることによりカー回転角が増大する。
Further, a feature of the present invention is to provide a transparent dielectric layer on the thin oxide magnetic layer in order to obtain a sufficient Kerr rotation angle. Here, the relationship between the film structure and the Kerr rotation angle will be described with reference to the drawings. FIGS. 3A and 3B show a conventional structure, where FIG. 3A shows a (glass) substrate 1.
An example in which the magnetic layer 2 (film thickness 4000Å) is provided on the top is shown, and (B) shows an example in which the magnetic layer 2 (film thickness 200Å) and the reflection layer 4 are sequentially provided on the substrate 1. As shown in FIG. 1, a comparison is made with that of the present invention (hereinafter abbreviated as (C)) in which a transparent dielectric layer 3 is provided on a magnetic layer 2 (film thickness 300Å).
In each of (A), (B) and (C), the Kerr rotation angle was measured from the substrate side. FIG. 4 shows the relationship between the structure of the film and the Kerr rotation angle.
In the case where the magnetic layer is thick, is the Kerr rotation angle only for reflection from the medium surface, and in (B), the rotation angle is increased because the magnetic layer is a thin film that can transmit light and the light is reflected by the reflection layer. Further, (C) is a structure in which a dielectric layer is further provided on (B), and the reflected light becomes small due to the interaction with the magnetic layer, and as a result, the rotation angle increases. As described above, in the present invention, the Kerr rotation angle is increased by providing the transparent dielectric layer.

【0008】[0008]

【実施例】以下に実施例を掲げて本発明をさらに詳しく
説明するが、本発明はここに例示の実施例に限定される
ものではない。
The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to the examples illustrated herein.

【0009】実施例1 下記一般式化2の微粉末を焼結して直径5cm、厚さ1
mmのターゲットを作成した。次に、ガラス基板上に総
ガス圧60mTorrおよび酸素分圧0.3mTorr
で膜作製速度を25Å/分にしてスパッタリングによっ
て膜厚500Åの磁性薄層を得た。この磁性薄層上に、
膜厚2000〜3000ÅのSiO2透明誘電体層、膜
厚3000ÅのCu反射層および膜厚2000ÅのSi
2酸化防止層をスパッタリングによって順次積層させ
た。
Example 1 A fine powder of the following general formula 2 was sintered to have a diameter of 5 cm and a thickness of 1
A mm target was created. Next, on the glass substrate, the total gas pressure is 60 mTorr and the oxygen partial pressure is 0.3 mTorr.
At a film production speed of 25Å / min, a magnetic thin layer having a film thickness of 500Å was obtained by sputtering. On this magnetic thin layer,
SiO 2 transparent dielectric layer with a film thickness of 2000 to 3000Å, Cu reflective layer with a film thickness of 3000Å and Si with a film thickness of 2000Å
The O 2 antioxidant layer was sequentially deposited by sputtering.

【化2】 (但し、0.75≦x≦1.3)[Chemical 2] (However, 0.75 ≦ x ≦ 1.3)

【0010】このようにして作成した記録媒体を1方向
に磁化させ、次にこの1部に磁化の方向と逆の磁界を
0.3KOe〜1KOe印加しながら、レーザー出力1
0mW、媒体面約5mWの800nmの半導体レーザー
を5μsパルス照射して磁化反転させた。これにレーザ
ーを媒体面に0.5〜2mW程度照射させ、媒体面より
もどった光のカー回転角を測定した。2θkは1.3〜
2.4゜であった。x=0.9〜1.0の組成の時に2
θkはピークの値を示した。
The recording medium prepared in this manner is magnetized in one direction, and then a magnetic field of 0.3 KOe to 1 KOe opposite to the direction of magnetization is applied to this part while laser output 1 is applied.
The magnetization was reversed by irradiating an 800 nm semiconductor laser with 0 mW and a medium surface of about 5 mW for 5 μs pulse. The medium surface was irradiated with a laser for about 0.5 to 2 mW, and the Kerr rotation angle of the light returning from the medium surface was measured. 2θk is 1.3 ~
It was 2.4 °. 2 when the composition is x = 0.9 to 1.0
θk is the peak value.

【0011】この記録媒体の磁性薄層は100℃で7日
間保存後も表1に示すように磁気特性の劣化はなかっ
た。これに対しアモルファス磁性合金膜は酸化および結
晶化が起り磁気特性が著しく低下した。
As shown in Table 1, the magnetic thin layer of this recording medium did not deteriorate in magnetic properties even after being stored at 100 ° C. for 7 days. On the other hand, the amorphous magnetic alloy film was oxidized and crystallized, and the magnetic properties were significantly deteriorated.

【0012】[0012]

【表1】 [Table 1]

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の光磁気記録媒体の構成例を示す断面図
である。
FIG. 1 is a sectional view showing a configuration example of a magneto-optical recording medium of the present invention.

【図2】強磁性酸化物の組成とキュリー温度との関係を
示すグラフである。
FIG. 2 is a graph showing the relationship between the composition of ferromagnetic oxide and the Curie temperature.

【図3】従来の光磁気記録媒体の構成例を示す断面図で
ある。
FIG. 3 is a sectional view showing a configuration example of a conventional magneto-optical recording medium.

【図4】光磁気記録媒体の構成とカー回転角との関係を
示すグラフである。
FIG. 4 is a graph showing the relationship between the configuration of a magneto-optical recording medium and the Kerr rotation angle.

【符号の説明】[Explanation of symbols]

1 透明基板 2 磁性薄層 3 透明誘電体層 4 反射層 5 酸化防止層 1 Transparent Substrate 2 Magnetic Thin Layer 3 Transparent Dielectric Layer 4 Reflective Layer 5 Antioxidant Layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 透明基板上に、下記一般式化1で表され
る強磁性酸化物からなる磁性薄層を設け、さらにこの磁
性薄層上に透明誘電体層および反射層を順次設けたこと
を特徴とする、光磁気記録媒体。 【化1】
1. A magnetic thin layer made of a ferromagnetic oxide represented by the following general formula 1 is provided on a transparent substrate, and a transparent dielectric layer and a reflective layer are sequentially provided on the magnetic thin layer. A magneto-optical recording medium characterized by: [Chemical 1]
JP23896592A 1992-08-13 1992-08-13 Magneto-optical recording medium Expired - Lifetime JPH0777043B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23896592A JPH0777043B2 (en) 1992-08-13 1992-08-13 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23896592A JPH0777043B2 (en) 1992-08-13 1992-08-13 Magneto-optical recording medium

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15457482A Division JPS5945644A (en) 1982-09-07 1982-09-07 Photomagnetic recording medium

Publications (2)

Publication Number Publication Date
JPH05198025A JPH05198025A (en) 1993-08-06
JPH0777043B2 true JPH0777043B2 (en) 1995-08-16

Family

ID=17037931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23896592A Expired - Lifetime JPH0777043B2 (en) 1992-08-13 1992-08-13 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH0777043B2 (en)

Also Published As

Publication number Publication date
JPH05198025A (en) 1993-08-06

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