JPH0772931A - Parts positioning method - Google Patents

Parts positioning method

Info

Publication number
JPH0772931A
JPH0772931A JP5218420A JP21842093A JPH0772931A JP H0772931 A JPH0772931 A JP H0772931A JP 5218420 A JP5218420 A JP 5218420A JP 21842093 A JP21842093 A JP 21842093A JP H0772931 A JPH0772931 A JP H0772931A
Authority
JP
Japan
Prior art keywords
points
correction
diagonal
substrate
electronic component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5218420A
Other languages
Japanese (ja)
Inventor
Masato Matsuoka
真人 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5218420A priority Critical patent/JPH0772931A/en
Publication of JPH0772931A publication Critical patent/JPH0772931A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8112Aligning
    • H01L2224/81121Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818Bonding techniques
    • H01L2224/81801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01005Boron [B]

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Wire Bonding (AREA)
  • Control Of Position Or Direction (AREA)
  • Numerical Control (AREA)

Abstract

PURPOSE:To eliminate a dislocation defect due to erroneous detection by accurately judging the erroneous detection of the desired coordinate position of a positioning object as an error when it is performed. CONSTITUTION:When electronic parts are packaged by positioning on a substrate, the coordinate positions of diagonal two points A, B on the substrate and that of the diagonal two points C, D of the electronic parts in accordance with them are detected, and inclination correction quantity theta between each diagonal two points is calculated, and inclination can be corrected (101-104). After that, dislocation mean values in directions of X, Y between the diagonal two points A, C on one side of the substrate and the electronic parts and the diagonal two points B, D on the other side are found, and position correction in the directions of X, Y can be performed as the correction quantity (105-107). Position displocation quantity between each diagonal two points of the substrate and the electronic parts can be calculated similarly by the coordinate positions of the points A, B, C, and D after correction, and it is checked whether or not they show values less than an allowable value, then, the accuracy of positioning can be decided (108, 109).

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、基板上に電子部品等を
位置決めして実装する作業機械等における部品位置決め
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a component positioning method in a working machine or the like for positioning and mounting electronic components on a substrate.

【0002】[0002]

【従来の技術】従来、基板上へ電子部品を実装する場合
などで位置合せを必要とする作業機械では、例えば特開
昭59−2334号公報に記載のように、基板と電子部
品の各々対角2点を同一仮想座標上に置いて、対角2点
の傾きをどちらか一方の傾きに合せた後、基板、電子部
品各々の対角2点の中点を求めて、中点間のX方向、Y
方向の位置ずれを計算し、この位置ずれ量を基板と電子
部品の位置決め時の補正量として位置合せを行ってい
た。
2. Description of the Related Art Conventionally, in a working machine that requires alignment when mounting electronic parts on a board, for example, as described in Japanese Patent Application Laid-Open No. 59-2334, a pair of a board and an electronic part is paired. After placing the two corners on the same virtual coordinate and adjusting the inclination of the two diagonals to one of the two, the midpoints of the two diagonals of the board and the electronic component are calculated, and the midpoint between the midpoints is calculated. X direction, Y
The positional shift in the direction was calculated, and this positional shift was used as the correction amount when positioning the board and the electronic component.

【0003】上記従来技術の内容を図3により詳述す
る。図3において、1の白ドットを基板の電極パター
ン、2の黒ドットを電子部品の電極パターンとする。ま
た、傾き補正(θ補正)は電子部品を回転することで行
い、位置補正(XY補正)は基板を移動することで行う
とする。
The contents of the above conventional technique will be described in detail with reference to FIG. In FIG. 3, 1 white dot is the electrode pattern of the substrate and 2 black dots are the electrode pattern of the electronic component. Further, the tilt correction (θ correction) is performed by rotating the electronic component, and the position correction (XY correction) is performed by moving the substrate.

【0004】(1) 基板の電極パターン1内の対角2点
A,Bの座標位置(Ax,Ay),(Bx,By)、及
び、電子部品の電極パターン2内の対角2点C,Dの座
標位置(Cx,Cy)、(Dx,Dy)を各々検出す
る。
(1) Coordinate positions (Ax, Ay), (Bx, By) of two diagonal points A and B in the electrode pattern 1 of the substrate, and two diagonal points C in the electrode pattern 2 of the electronic component. , D coordinate positions (Cx, Cy) and (Dx, Dy) are detected.

【0005】(2) A、Bの座標値から基板の傾きθk
を、 θk =tan-1{(Ax−Bx)/(Ay−By)} (1) により求め、同様に、C,Dの座標値から電子部品の傾
きθcを、 θc =tan-1{(Cx−Cy)/(Cy−Dy)} (2) により求める。そして、傾き補正量(θ補正量)θを、 θ=θk−θc (3) により計算し、座標の原点を中心に、電子部品をθだけ
回転して基板の傾きに合わせる(θ補正)。
(2) Inclination θk of the substrate from the coordinate values of A and B
Is calculated by θ k = tan −1 {(Ax−Bx) / (Ay−By)} (1), and similarly, the inclination θc of the electronic component is calculated from the coordinate values of C and D, and θ c = tan −1 {(Cx-Cy) / (Cy-Dy)} (2) Then, the tilt correction amount (θ correction amount) θ is calculated by θ = θk−θc (3), and the electronic component is rotated by θ around the origin of the coordinates to match the tilt of the substrate (θ correction).

【0006】(3) 上記θ補正後、再び電子部品の対角
2点C,Dの座標位置(Cx,Cy)、(Dx,Dy)
を検出する。基板の対角2点A,Bの座標位置(Ax,
Ay)、(Bx,By)は元のままである。
(3) After the above θ correction, the coordinate positions (Cx, Cy) and (Dx, Dy) of two diagonal points C and D of the electronic component are again obtained.
To detect. Coordinate positions of two diagonal points A and B (Ax,
Ay) and (Bx, By) remain unchanged.

【0007】(4) 基板の対角2点A,Bの中心とθ補
正後の電子部品の対角2点C,Dの中点の間のX方向、
Y方向の位置ずれ量X,Yを、 X={(Ax+Bx)/2}−{(Cx+Dx)/2} (4) X={(Ay+By)/2}−{(Cy+Dy)/2} (5) により計算し、基板を該X、Yだけ移動する(XY補
正)。
(4) The X direction between the center of the two diagonal points A and B of the board and the midpoint of the two diagonal points C and D of the electronic component after θ correction,
The positional displacement amounts X and Y in the Y direction are expressed as follows: X = {(Ax + Bx) / 2}-{(Cx + Dx) / 2} (4) X = {(Ay + By) / 2}-{(Cy + Dy) / 2} (5 ), The substrate is moved by the X and Y (XY correction).

【0008】(5) XY補正後、再び基板の対角2点
A,Bの座標位置(Ax,Ay)、(Bx,By)を検
出する。θ補正後の電子部品の対角2点C、Dの座標位
置(Cx,Cy)、(Dx,Dy)は(3)で検出ずみ
である。
(5) After XY correction, the coordinate positions (Ax, Ay) and (Bx, By) of the two diagonal points A and B on the substrate are detected again. The coordinate positions (Cx, Cy) and (Dx, Dy) of the two diagonal points C and D of the electronic component after θ correction have been detected in (3).

【0009】(6) 上記XYθ補正後のA,B,C,D
の座標値を用いて、再び式(1)、(5)により傾き量
θ、位置ずれ量X,Yを計算し、|θ|≦Δθ、|X|
≦ΔX、|Y|≦ΔYが全て満足するかチエックする
(位置決めの一致性チエック)。なお、Δθ,ΔX,Δ
Yは各々の一致度許容値である。そして、θ,X,Yが
全て許容値以下であれば、基板に部品を実装する。
(6) A, B, C, D after the above XYθ correction
The inclination amount θ and the positional displacement amounts X and Y are calculated again by the equations (1) and (5) using the coordinate values of | θ | ≦ Δθ, | X |
Check whether ≦ ΔX and | Y | ≦ ΔY are all satisfied (positioning consistency check). Note that Δθ, ΔX, Δ
Y is each matching degree allowable value. Then, if all of θ, X, and Y are equal to or less than the allowable values, the component is mounted on the board.

【0010】[0010]

【発明が解決しようとする課題】上記従来技術は、基板
と電子部品の各々の電極パターンA〜Dの位置を別の位
置と誤まらずに検出したときは問題なく位置決めできる
が、例えば1ピッチずれて検出した場合には一致性チエ
ックで誤りが発見されず、電子部品がずれて実装されて
しまうという問題がある。これを図4により説明する。
なお、図4では、基板と電子部品の位置関係を分かりや
すくするために、電子部品側をXYθの3方向に動作さ
せるとしている。
According to the above-mentioned prior art, when the positions of the electrode patterns A to D of the substrate and the electronic component are detected without being mistaken as different positions, the positioning can be performed without any problem. If the pitch shift is detected, no error is found in the conformity check, and there is a problem that the electronic component is mounted with a shift. This will be described with reference to FIG.
Note that, in FIG. 4, in order to make the positional relationship between the substrate and the electronic component easy to understand, the electronic component side is operated in three directions of XYθ.

【0011】まず、補正前に基板の電極パターン1と電
子部品の電極パターン2が図4の(1)に示す状態にあ
り、各々、A,B′,C,D点の位置を検出したとす
る。但し、B′は誤検出位置で、本来は1ピッチ下のB
点を検出するものである。次に、先の式(1)、
(2)、(3)でθの補正量を計算し、電子部品をθだ
け回転する。θ補正後の状態を図4の(2)に示す。こ
こで、本来はθkにθ0を合せなければならないが、Bを
B′と誤検出しているためにθk′にθcを合せてしまう
為、AB′とCDの傾きは、合っているものの全体的に
はΔθ(θk=θk−θk′)分だけずれた形になってし
まう。
First, before correction, the electrode pattern 1 of the substrate and the electrode pattern 2 of the electronic component are in the state shown in FIG. 4A, and the positions of points A, B ', C and D are detected. To do. However, B'is an erroneous detection position, which is originally one pitch lower than B.
It is to detect points. Next, the above equation (1),
The correction amount of θ is calculated in (2) and (3), and the electronic component is rotated by θ. The state after θ correction is shown in (2) of FIG. Here, the original must be combined θ 0 to θ k, in order to become combined θ c to 'θ k to have been erroneously detected as' the B B, the slope of the CD and AB' is, suits However, the overall shape is shifted by Δθ (θk = θ k −θ k ′).

【0012】最後にXY方向の補正量を式(4)、
(5)で計算し、電子部品を移動する。このXY補正後
の状態を図4(3)に示す。この結果、AB′の中点E
とCDの中点Fとは一致するが、結局、BをB′と誤検
出した為にΔθだけ全体にずれて補正を行ってしまう。
更に、位置決めが正確に行なわれたか否かのチエック
も、補正後のA,B′,C,Dを再度検出してしまう
と、AB′とCDの傾きθは一致し、中点も一致してし
まう為に、エラーと判断されず、電子部品はずれて実装
されてしまう。
Finally, the correction amount in the XY directions is expressed by the equation (4),
The calculation is performed in (5), and the electronic component is moved. The state after this XY correction is shown in FIG. As a result, the midpoint E of AB '
And the midpoint F of the CD coincide with each other, but in the end, B is erroneously detected as B ′, so that the correction is performed by shifting the whole amount by Δθ.
Further, if the check whether or not the positioning is accurately performed is detected again after the corrections A, B ', C and D, the inclinations θ of AB' and CD match, and the midpoints also match. Therefore, it is not judged as an error and the electronic component is removed and mounted.

【0013】本発明の目的は、上記の様な誤検出をした
場合には確実にエラーと判断して部品を実装せず、正確
な位置決めが出来る部品位置決め方法を提供することに
ある。
It is an object of the present invention to provide a component positioning method capable of performing accurate positioning without deciding that an error has occurred and not mounting the component when the above-mentioned erroneous detection is made.

【0014】[0014]

【課題を解決するための手段】上記目的を達成するため
に、本発明は、傾き補正(θ補正)後、基板等の第1の
部品と電子部品等の第2の部品の一方の最外側の対角2
点AとC及び他方の最外側の対角2点BとD間の各々の
X方向、Y方向の位置ずれ量を求め、該X方向、Y方向
の各位置ずれ量の平均値を補正量としてXY方向の位置
合せを行うことを特徴とする。
In order to achieve the above object, the present invention provides an outermost one of a first component such as a substrate and a second component such as an electronic component after tilt correction (θ correction). Diagonal 2
Positional deviations in the X and Y directions between the points A and C and the other two outermost diagonal points B and D are calculated, and the average value of the positional deviations in the X and Y directions is corrected. Is characterized by performing alignment in the XY directions.

【0015】また、θXY補正後の位置決めの一致性チ
ェックの際も、同様に、第1の部品と第2の部品の一方
の側の対角2点AとC及び他方の側の対角2点BとD間
の各々のX方向、Y方向の位置ずれ量を求め、各位置ず
れ量が許容値以下か否かチェックして、位置決めの正確
性を判定することを特徴とする。
Also, when checking the matching of the positioning after the θXY correction, similarly, two diagonal points A and C on one side of the first component and the second component and a diagonal angle 2 on the other side of the second component. It is characterized in that the positional deviation amount in each of the X and Y directions between the points B and D is obtained, and whether or not each positional deviation amount is equal to or less than an allowable value is checked to determine the positioning accuracy.

【0016】[0016]

【作用】基板等の第1の部品と電子部品等の第2の部品
の各最外側の対角2点間のずれ量に着目することによ
り、座標位置の誤検出があった場合、従来の中点間のず
れ量では判別できなかったものが、必ずエラーと判別で
き、正確な位置決めが可能になる。
When the erroneous detection of the coordinate position is detected by paying attention to the shift amount between the two outermost diagonal points of the first component such as the substrate and the second component such as the electronic component, the conventional What could not be identified by the amount of deviation between the midpoints can always be identified as an error, and accurate positioning becomes possible.

【0017】[0017]

【実施例】以下、本発明の一実施例について図面により
詳述する。
An embodiment of the present invention will be described in detail below with reference to the drawings.

【0018】図1に、基板上に電子部品を位置決めして
実装する装置の概略構成を示す。図において、ボンディ
ングヘッド10の先端に電子部品11が吸着され、XY
テーブル12上には基板13が載置されている。電子部
品11の電極パターンはプリズム14、ミラー15を通
って検出器16で検出される。基板13の電極パターン
はプリズム14、ミラー17を通って検出器18で検出
される。制御部19は、検出器16,18で検出される
電子部品11と基板13の電極パターンを入力して、ま
ず、θ補正量を計算し、ボンディングヘッド10をZ軸
中心に回転して電子部品11のθ補正を行い、次に、X
Y方向の位置ずれ量を計算し、XYテーブル12をXお
よびY方向に移動して基板13のXY補正を行う。この
θXY補正後、制御部19では、再度、電子部品11と
基板13の電極パターンを入力して、θXY補正量を計
算し、各々許容値以下であれば、ボンディングヘッドを
降下して電子部品11を基板13上に搭載し、実装作業
に移る。
FIG. 1 shows a schematic configuration of an apparatus for positioning and mounting electronic components on a board. In the figure, the electronic component 11 is attracted to the tip of the bonding head 10,
A substrate 13 is placed on the table 12. The electrode pattern of the electronic component 11 passes through the prism 14 and the mirror 15 and is detected by the detector 16. The electrode pattern on the substrate 13 passes through the prism 14 and the mirror 17, and is detected by the detector 18. The control unit 19 inputs the electronic components 11 and the electrode patterns of the substrate 13 detected by the detectors 16 and 18, first calculates the θ correction amount, and rotates the bonding head 10 around the Z axis to rotate the electronic components. 11 θ correction, then X
The position shift amount in the Y direction is calculated, the XY table 12 is moved in the X and Y directions, and the XY correction of the substrate 13 is performed. After this θXY correction, the control unit 19 inputs the electrode patterns of the electronic component 11 and the substrate 13 again and calculates the θXY correction amount. Is mounted on the substrate 13 and the mounting operation is started.

【0019】図2に、図1の制御部19の処理フローチ
ャートを示す。以下、図2に従って本発明にかかる部品
位置決め方法の一実施例を説明するが、本実施例でも、
図4で説明したように、基板の電極パターン1上に電子
部品の電極パターン2を位置合わせするとし、この時、
基板の電極パターン1上のBの位置を1ピッチ上のB′
の位置と誤って検出した場合について説明する。
FIG. 2 shows a processing flowchart of the control unit 19 of FIG. Hereinafter, an embodiment of the component positioning method according to the present invention will be described with reference to FIG.
As described with reference to FIG. 4, the electrode pattern 2 of the electronic component is aligned with the electrode pattern 1 of the substrate. At this time,
The position of B on the electrode pattern 1 of the substrate is set to B ′ one pitch above.
The case where the position is erroneously detected will be described.

【0020】(1) 基板の電極パターン1内の対角2点
A,Bの座標位置を検出する(ステップ101)。ただ
し、図4において、Bの位置は1ピッチ上のB′の位置
を誤って検出したとする。
(1) The coordinate positions of two diagonal points A and B in the electrode pattern 1 on the substrate are detected (step 101). However, in FIG. 4, it is assumed that the position of B erroneously detects the position of B'one pitch higher.

【0021】(2) 電子部品の電極パターン2内の対角
2点C,Dの座標位置を検出する(ステップ102)。
(2) The coordinate positions of two diagonal points C and D in the electrode pattern 2 of the electronic component are detected (step 102).

【0022】(3) A,B′(本来はB)の座標値か
ら、先の式(1)により基板の傾きθk′(本来はθk
を求め、CとDの座標値から、同じく先の式(2)によ
り電子部品の傾きθcを求め、更に式(3)により傾き
補正量θを計算する。
[0022] (3) A, B 'from the coordinate values of (originally B), the inclination theta k substrate by the preceding formula (1)' (originally theta k)
Then, from the coordinate values of C and D, the inclination θ c of the electronic component is calculated by the above equation (2), and the inclination correction amount θ is calculated by the equation (3).

【0023】(4) XYZ座標のZ軸を中心に、電子部
品をθだけ回転して基板の傾きθk′(本来はθk)に
合わせる(ステップ104)。図5の(1)に、このθ
補正後の状態を示す。BをB′と誤検出してθ補正を行
ったため、Δθ(Δθ=θk−θk′)分だけずれた形で
θ補正を行っている。
(4) The electronic component is rotated by θ about the Z axis of the XYZ coordinates to match the inclination θ k ′ (original θ k ) of the substrate (step 104). This (θ) is shown in (1) of FIG.
The state after correction is shown. Since B is erroneously detected as B ′ and θ correction is performed, θ correction is performed in a form shifted by Δθ (Δθ = θ k −θ k ′).

【0024】(5) θ補正後の電子部品の電極パターン
2内の対角2点C,Dの座標位置を検出する(ステップ
105)。
(5) The coordinate positions of two diagonal points C and D in the electrode pattern 2 of the electronic component after θ correction are detected (step 105).

【0025】(6) θ補正後のA,B′(本来はB)、
C,Dの座標値より、基板と電子部品間のX方向、Y方
向の位置ずれ量X,Yを式(6),(7)により計算す
る(ステップ106)。
(6) A, B '(original B) after θ correction,
From the coordinate values of C and D, the positional displacement amounts X and Y in the X and Y directions between the board and the electronic component are calculated by the equations (6) and (7) (step 106).

【0026】 X=(x1+x2)/2 (6) Y=(y1+y2)/2 (7) 即ち、図5の(1)に示すように、基板の電極パターン
1と電子部品の電極パターン2の一方の最外側対角2点
AとCのXY方向のずれ量x1とy1を計算し、同様に、
他方の最外側対角2点B′(本来はB)とDのずれ量x
2とy2を計算する。そして、この対角2点間のX,Y方
向の各々のずれ量の平均値をXY補正量とする。
X = (x 1 + x 2 ) / 2 (6) Y = (y 1 + y 2 ) / 2 (7) That is, as shown in (1) of FIG. The displacement amounts x 1 and y 1 in the XY directions of the two outermost diagonal points A and C of the electrode pattern 2 are calculated, and similarly,
The amount of deviation x between the other two outermost diagonal points B '(originally B) and D
Calculate 2 and y 2 . Then, the average value of the deviation amounts in the X and Y directions between the two diagonal points is set as the XY correction amount.

【0027】(7) ステップ106で求めたXY補正量
により、XY方向の位置補正を行う(ステップ10
7)。図5の(2)に、XY補正後の状態を示す。な
お、図5の(2)では、基板と電子部品の位置関係を分
かりやすくするために、電子部品側を移動してXY補正
を行った状態を示しているが、図1の構成では、XY補
正は基板側を移動することで行われることになる。
(7) The position correction in the XY directions is performed based on the XY correction amount obtained in step 106 (step 10
7). FIG. 5B shows the state after XY correction. Note that, in (2) of FIG. 5, in order to make it easier to understand the positional relationship between the substrate and the electronic component, the electronic component side is moved to perform the XY correction, but in the configuration of FIG. The correction is performed by moving the substrate side.

【0028】(8) XY補正後の基板の電極パターン1
内の対角2点A,B′(本来はB)の座標位置を検出す
る(ステップ108)。なお、XY補正も電子部品を移
動して行う場合には、当然ながら電子部品の対角2点
C,Dの座標位置を検出することになる。
(8) Electrode pattern 1 on the substrate after XY correction
The coordinate positions of the two diagonal points A and B '(originally B) are detected (step 108). When the electronic component is also moved for the XY correction, the coordinate positions of the two diagonal points C and D of the electronic component are naturally detected.

【0029】(9) θXY補正後のA,B′(本来は
B)、C,Dの座標値を用いて該θXY位置決めの一致
性チェックを行う(ステップ109)。
(9) The θXY positioning matching is checked using the coordinate values of A, B '(original B), C, D after θXY correction (step 109).

【0030】この場合、傾き量θは先の式(1)〜
(3)により計算し、それが許容値以下か否かチェック
するが、XY方向の位置ずれは、図5の(2)に示すよ
うに、基板と電子部品の各対角2点AとC,B′(本来
はB)とD間のX,Y方向のずれ量x1′,y2′,
2′,y2′を各々求め、これら4つの量が各々許容値
以下か否かチェックすることで、一致性を判定する。こ
の結果、従来は中点付近のずれ量しかわからなかった
為、全体がずれていた場合、不合格(NG)と検知でき
なかったが、本実施例では基板と電子部品の電極パター
ンの最外側対角2点のXY方向の位置ずれ量を計算する
ことで、色々な異常検出の場合に対応が可能となる。
In this case, the amount of inclination θ is expressed by the above equations (1) to
It is calculated by (3), and it is checked whether it is less than or equal to the allowable value. However, as shown in (2) of FIG. 5, the displacement in the XY directions is two diagonal points A and C between the substrate and the electronic component. , B ′ (original B) and D in the X and Y directions, x 1 ′, y 2 ′,
x 2 ′ and y 2 ′ are respectively obtained, and whether or not these four amounts are each less than or equal to the allowable value is checked to determine coincidence. As a result, conventionally, only the amount of deviation near the midpoint was known, and therefore, if the entire deviation occurred, it could not be detected as a failure (NG), but in the present embodiment, the outermost part of the electrode pattern of the substrate and the electronic component was detected. By calculating the amount of displacement of the two diagonal points in the XY directions, various abnormalities can be dealt with.

【0031】(10) θXY方向のずれ量がすべて許容値
以下であれば電子部品を基板へ搭載・実装し(ステップ
110)、許容値を満足していない場合はエラー処理を
行う(ステップ111)。
(10) If all the deviation amounts in the θXY directions are equal to or less than the allowable value, the electronic component is mounted and mounted on the substrate (step 110), and if the allowable value is not satisfied, error processing is performed (step 111). .

【0032】以上、本発明の実施例として基板上へ電子
部品を実装する場合について説明したが、本発明はこれ
に限らず、一般に部品間の位置合せが必要な場合に広く
適用可能であることは云うまでもない。
The case of mounting electronic components on a substrate has been described above as an embodiment of the present invention. However, the present invention is not limited to this, and is generally applicable to a case where alignment between components is generally required. Needless to say.

【0033】[0033]

【発明の効果】以上の説明から明らかに如く、本発明に
よれば、位置決め対象物上の所望座標位置の誤検出によ
る位置ずれ不良を無くすことができ、正確な位置決めが
可能になる。
As is apparent from the above description, according to the present invention, it is possible to eliminate the positional deviation defect due to the erroneous detection of the desired coordinate position on the positioning object, and it is possible to perform the accurate positioning.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明が適用される位置決め装置の一実施例の
概略構成図である。
FIG. 1 is a schematic configuration diagram of an embodiment of a positioning device to which the present invention is applied.

【図2】本発明方法の一実施例を説明するための処理フ
ローチャートである。
FIG. 2 is a processing flowchart for explaining an embodiment of the method of the present invention.

【図3】基板と電子部品のパターンの関係を示す図であ
る。
FIG. 3 is a diagram showing a relationship between a board and a pattern of an electronic component.

【図4】従来の位置決め方法を説明するための具体例を
示す図である。
FIG. 4 is a diagram showing a specific example for explaining a conventional positioning method.

【図5】本発明の位置決め方法を説明するための具体例
を示す図である。
FIG. 5 is a diagram showing a specific example for explaining the positioning method of the present invention.

【符号の説明】[Explanation of symbols]

10 ボンディングヘッド 11 電子部品 12 XYテーブル 13 基板 16,18 検出器 19 制御部 10 Bonding Head 11 Electronic Component 12 XY Table 13 Substrate 16, 18 Detector 19 Control Section

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 // G05B 19/18 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 6 Identification number Office reference number FI technical display location // G05B 19/18

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 部品間の自動位置決め方法であって、第
1の部品上の対角2点A,Bと第2の部品上の対角2点
C,Dの座標位置を検出して、一方の対角2点の傾きを
他方の対角2点の傾きに合せた後、第1の部品と第2の
部品の一方の側の対角2点AとC及び他方の側の対角2
点BとD間の各々のX方向、Y方向の位置ずれ量を求
め、該X方向、Y方向の各位置ずれ量の平均値を補正量
としてXY方向の位置合せを行うことを特徴とする部品
位置決め方法。
1. An automatic positioning method between parts, comprising detecting the coordinate positions of two diagonal points A and B on the first part and two diagonal points C and D on the second part. After matching the inclinations of two diagonal points on one side with the inclinations of two diagonal points on the other side, two diagonal points A and C on one side of the first part and the second part and a diagonal side on the other side Two
It is characterized in that the amount of positional deviation in each of the X and Y directions between the points B and D is obtained, and the alignment in the XY direction is performed using the average value of the amount of positional deviation in each of the X and Y directions as a correction amount. Parts positioning method.
【請求項2】 請求項1記載の部品位置決め方法におい
て、XY方向の位置合せ後、第1の部品と第2の部品の
一方の側の対角2点AとC及び他方の側の対角2点Bと
D間の各々のX方向、Y方向の位置ずれ量を求め、各位
置ずれ量が許容値以下か否かチェックして、位置量決め
の正確性を判定することを特徴とする部品位置決め方
法。
2. The component positioning method according to claim 1, wherein after the alignment in the XY directions, two diagonal points A and C on one side of the first and second components and a diagonal point on the other side. It is characterized in that the amount of positional deviation between each of the two points B and D in the X and Y directions is obtained, and whether or not each amount of positional deviation is below an allowable value is checked to determine the accuracy of the positional amount determination. Parts positioning method.
JP5218420A 1993-09-02 1993-09-02 Parts positioning method Pending JPH0772931A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5218420A JPH0772931A (en) 1993-09-02 1993-09-02 Parts positioning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5218420A JPH0772931A (en) 1993-09-02 1993-09-02 Parts positioning method

Publications (1)

Publication Number Publication Date
JPH0772931A true JPH0772931A (en) 1995-03-17

Family

ID=16719638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5218420A Pending JPH0772931A (en) 1993-09-02 1993-09-02 Parts positioning method

Country Status (1)

Country Link
JP (1) JPH0772931A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998033217A1 (en) * 1997-01-24 1998-07-30 Rohm Co., Ltd. Semiconductor device and method for manufacturing thereof
WO2019009095A1 (en) * 2017-07-06 2019-01-10 メイショウ株式会社 Component mounting device and program for mounting component
JP2019016774A (en) * 2017-07-06 2019-01-31 メイショウ株式会社 Component mounting device and component mounting program
CN111552229A (en) * 2020-04-03 2020-08-18 中国航发哈尔滨东安发动机有限公司 Single machine calculation-free point and automatic alignment processing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998033217A1 (en) * 1997-01-24 1998-07-30 Rohm Co., Ltd. Semiconductor device and method for manufacturing thereof
WO2019009095A1 (en) * 2017-07-06 2019-01-10 メイショウ株式会社 Component mounting device and program for mounting component
JP2019016774A (en) * 2017-07-06 2019-01-31 メイショウ株式会社 Component mounting device and component mounting program
CN111552229A (en) * 2020-04-03 2020-08-18 中国航发哈尔滨东安发动机有限公司 Single machine calculation-free point and automatic alignment processing method
CN111552229B (en) * 2020-04-03 2023-05-02 中国航发哈尔滨东安发动机有限公司 Single machine calculation-free point and automatic alignment processing method

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