JPH0768621B2 - Continuous vacuum deposition equipment - Google Patents

Description

TECHNICAL FIELD The present invention relates to an apparatus for continuously vacuum-depositing on a flexible traveling substrate such as a plastic film or paper, and the above apparatus including a particularly preferable sealing device. Regarding

[Conventional technology]

Conventionally, continuous vacuum sealing devices have not been known because vacuum deposition on a plastic film, paper, etc. has been performed by a batch method. For reference, FIG. 6 shows a continuous vacuum sealing device for steel plates.

In FIG. 6, 1 is a traveling substrate, 2a, 2b, 2c, ... Are inlet seal rolls, 3a, 3b, 3c, ... Are outlet seal rolls, 4a, 4b, 4
are vacuum pumps, 5 is a vapor deposition device, 6a, 6b, 6c, ... are pressure chambers, 7 is a vapor deposition chamber, 8 is a deflector roll, and 9 is a winding roll.

The traveling substrate 1 passes through pressure chambers 6a, 6b, 6c, ... Divided by seal rolls 2a, 2b, 2c, ... Composed of a pair of pinch rolls, and then into a vapor deposition chamber 7 maintained at a predetermined vacuum degree. After reaching the temperature and being vapor-deposited by the vapor-depositing device 5 in the vapor-deposition chamber 7, it is carried out to the atmosphere through the output side seal rolls 3a, 3b, 3c ,.

Details of each seal roll are shown in FIG. 7 (A) and FIG. 7 (A).
FIG. 7B is a sectional view taken along the line III-III of FIG.

7A and 7B, 11 and 12 are a pair of pinch rolls, 14 is a seal bar, 16 is a casing, 17 is an upstream pressure chamber, 18 is a downstream pressure chamber, and 19a, 19b and 19c are Leakage gap, that is, 19a is a gap between the pinch roll 11 and the seal bar 14, 19b is a gap between the shaft end of the pinch roll 11 and the casing 16, and 19c is the traveling substrate 1 between the pinch rolls 11 and 12. It is a gap between parts.

The upstream pressure chamber 17 and the downstream pressure chamber 18 are the pinch rolls 11,
It is partitioned by 12 and the seal bar 14, and the gas flows from the upstream side to the downstream side through the slight leak gaps 19a, 19b, 19c.

[Problems to be Solved by the Invention]

In the vacuum seal device having the conventional configuration as shown in FIGS. 6 and 7, it is possible to reduce the area of the leak gaps 19a to 19c so as to reduce the gas flow rate from the upstream side to the downstream side. It is necessary to keep the capacity of 4b, 4c… small.

However, the gap between the rotating pinch rolls 11 and 12 and the fixed seal bar 14 or the casing 16 cannot be made smaller than a certain value to prevent contact,
There was a limit in reducing the leak gap area.

Further, when the gas flows through the leak gap, flapping of the traveling substrate 1 occurs, wrinkles occur on the traveling substrate 1, and the traveling substrate 1
There was a strong fear that it would lead to disconnection.

The present invention aims to propose a continuous vacuum vapor deposition apparatus equipped with a seal device that minimizes the leak gap area and suppresses the flow of gas into this gap as much as possible, so that the above-mentioned fluttering of the traveling substrate does not occur. To do.

[Means for Solving the Problems]

The present invention includes (1) continuously introducing a traveling substrate from the atmosphere into a vacuum chamber, performing vacuum deposition on the traveling substrate in the vacuum chamber,
In a continuous vacuum vapor deposition apparatus that is carried out into the atmosphere, the space from the atmosphere to the vacuum chamber is divided into a plurality of pressure chambers by seal rolls, and each seal roll is composed of one set of three pinch rolls to form two pinch rolls. Between the substrate to be introduced into the vacuum chamber and the substrate to be carried out into the atmosphere through, and the guide substrate is arranged in the pressure chamber, and the traveling substrate is wound at a wrap angle of 10 degrees or more with respect to the pinch roll. A continuous vacuum vapor deposition apparatus characterized by being attached, and (2) the traveling substrate is continuously led from the atmosphere to a vacuum chamber, and the traveling substrate is vacuum-deposited in the vacuum chamber, and then in the atmosphere. In the continuous vacuum vapor deposition apparatus carried out to, the space from the atmosphere to the vacuum chamber is divided into a plurality of pressure chambers by a sealing device, and each sealing device is provided with one sealing roll and sealing bars provided on both sides of the sealing roll. Configure and It is characterized in that a guide roll is arranged in the pressure chamber so that the substrate introduced into the vacuum chamber and the substrate discharged into the atmosphere are wound around the seal roll at a wrap angle of 10 degrees or more. It is a continuous vacuum deposition apparatus.

[Action]

According to the present invention, since the upstream seal roll and the downstream seal roll are integrated and the number of seal rolls is reduced, the total number of seal gaps is reduced, so that the seal gap area is structurally reduced. Therefore, the sealing performance is improved,
Vacuum pump capacity is reduced.

Further, in the present invention, since the traveling substrate is wound around the seal roll, the traveling substrate does not flutter near the seal roll, which is greatly affected by the leak gas flow.

〔Example〕

1 and 2 (A) and (B) are views showing an example of the device of the present invention.

1 is an overall explanatory view, FIG. 2 (A) is a partially detailed view of FIG. 1, and FIG. 2 (B) is a sectional view taken along the line I-I of FIG. 2 (A).

In FIG. 1, the same reference numerals as those in FIGS. 6 and 7 indicate the same parts as those in FIGS. 6 and 7, and 2'a, 2'b, 2'c ... are seals composed of a set of three pinch rolls. It is a roll and serves both as an inlet side seal roll and an outlet side seal roll.

As shown in FIGS. 2A and 2B, these seal rolls are composed of a set of three pinch rolls 11 ', 12', 13 ', and the pinch rolls 11' and 13 'are not shown. It is rotationally driven by a drive device. As described above, according to the seal roll including the set of three pinch rolls, the total leak gaps 19a to 19a
Since the number of 9c is reduced compared to the conventional structure, the total value of the leak gap area can be structurally reduced, and the sealing performance is improved.

Further, as shown in FIG. 1, the guide rolls 20 provided between the seal rolls (that is, in the pressure chambers 6a, 6b, 6c ...)
The wrap angle of the traveling substrate 1 with respect to the seal roll is secured by a, 20b, 20c, ... Even if a leak gas is generated, the fluttering of the traveling substrate 1 due to the leak gas is extremely small.

According to the experiments conducted by the present inventors, as shown in FIG. 3 (A), it is appropriate that the winding angle is 10 degrees or more, and if the winding angle is 10 degrees or more, the fluttering of the traveling substrate is not a problem.

Note that FIG. 3 (A) is obtained as a result of an experiment conducted in the manner shown in FIG. 3 (B). That is, in FIG. 3 (B), a seal roll 101 having a diameter of 80 mm and a diameter of 90 m
Width of 400 mm and thickness of 12 μm and 20 between the m seal rolls 102
Two μm-sized films (running substrates) 1 are run respectively. Then, the guide roll 103 in the vacuum chamber 105 and the guide roll 104 in the atmosphere are moved between the arrows α to move the film 1
The angle of wrapping of the film with respect to the seal roll 101 was changed, and the flapping state (amplitude) of the film 1 at the portion indicated by the dotted line β was visually evaluated.
At this time, the pressure before and after the seal rolls 101 and 102 is the maximum gas flow rate passing between the seal rolls 101 and 102, and the atmospheric pressure and 36
The inside of the vacuum chamber 105 was evacuated by a roots-type vacuum pump in the direction of the arrow γ so that the pressure was 0 Torr, and the pressure in the vacuum chamber 105 was adjusted to 360 Torr.

4 and 5 (A) and (B) are views showing another example of the device of the present invention.

4 is an overall explanatory view, FIG. 5 (A) is a partially detailed view of FIG. 4, and FIG. 5 (B) is a sectional view taken along the line II-II of FIG. 5 (A).

In FIG. 4, the same reference numerals as those in FIGS. 6 and 7 indicate the same parts as those in FIGS. 6 and 7, and 2 ″ a, 2 ″ b, 2 ″ c ... are seal rolls formed by one seal roll. Yes, it also serves as an inlet-side seal roll and an outlet-side seal roll.
2c are each rotationally driven by a driving device (not shown).

As shown in FIGS. 5 (A) and 5 (B), these seal rolls constitute a seal device together with seal bars 14 and 14 arranged on both sides of one seal roll 2 ″. According to this, since the total leakage gaps 19a and 19b are reduced as compared to the conventional structure, the total value of the leakage gap areas can be structurally reduced, and the sealing performance is improved.

Further, as shown in FIG. 4, the guide rolls 20 provided between the seal rolls (that is, in the pressure chambers 6a, 6b, 6c ...)
The wrapping angle of the traveling substrate 1 around the seal roll is maintained at a certain level by a, 20b, 20c ... Even if a leak gas should occur, the fluttering of the traveling substrate due to the leak gas is extremely small.
Therefore, there is no risk that the traveling board 1 will be cut by coming into contact with the seal bars 14, 14.

According to the experiments conducted by the present inventors, this wrap angle is the same as the above-mentioned third wrap angle.
As shown in FIG. 6B, 10 degrees or more is suitable, and if the winding is performed at 10 degrees or more, the problem of fluttering of the traveling substrate is eliminated.

〔The invention's effect〕

According to the device of the present invention, since the leak gap in the seal roll portion is reduced, the sealing performance is improved.

Further, according to the device of the present invention, since the traveling substrate is wound around the seal roll at a wrapping angle of 10 degrees or more, fluttering of the traveling substrate is eliminated even if a small amount of leak gas is generated, and wrinkling of the traveling substrate occurs, There is no fear of cutting.

[Brief description of drawings]

1 and 2 (A) and (B) are views showing an example of the device of the present invention, FIG. 1 is an overall explanatory view, and FIG. 2 (A) is a partial detailed view of FIG. 2 (B) is a sectional view taken along the line I-I of FIG. 2 (A), FIG. 3 (A) is a graph showing the effect of the present invention, and FIG. 3 (B) is FIG. 3 (A). 4 and 5 (A) and (B) are views showing other examples of the device of the present invention, and FIG. 4 is an overall explanatory view and FIG. 5 (A).
Is a partial detailed view of FIG. 4, and FIG. 5 (B) is of FIG. 5 (A).
II-II line sectional arrow view, FIG.6 and FIG.7 (A), (B)
FIG. 4 is a configuration diagram of a conventional device. 1 …… Running substrate 2′a, 2′b, 2′c, 2 ″ a, 2 ″ b, 2 ″ c, 2 ″ …… Seal roll 2a, 2b, 2c …… Inlet seal roll 3a, 3b, 3c …… Outside seal roll 4a, 4b, 4c …… Vacuum pump 5 …… Evaporation equipment 6a, 6b, 6c …… Pressure chamber 7 …… Deposition chamber 8 …… Deflector roll 9 …… Coil roll 11 ′, 12 ′, 13 ′, 11,12 …… Pinch roll 14 …… Seal bar 16 …… Casing 17 …… Upstream pressure chamber 18 …… Downstream pressure chamber 19a, 19b, 19c …… Leak gap 20a, 20b, 20c… … Guide roll

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Heisaburo Furukawa 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries, Ltd. Hiroshima Plant (72) Susumu Kamikawa 4-chome, Kannon Shinmachi, Nishi-ku, Hiroshima Prefecture 6-22 No. 22 Mitsubishi Heavy Industries Ltd. Hiroshima Works

Claims (2)

[Claims] 1. A continuous vacuum vapor deposition apparatus in which a traveling substrate is continuously introduced from the atmosphere into a vacuum chamber, the traveling substrate is vacuum-deposited in the vacuum chamber, and then the substrate is carried out into the atmosphere. Is divided into a plurality of pressure chambers by a seal roll, each seal roll is composed of one set of three pinch rolls, and the space between the two pinch rolls is carried into the atmosphere and the substrate introduced into the vacuum chamber. A continuous vacuum vapor deposition apparatus in which a substrate is passed through and a guide roll is arranged in the pressure chamber so that the traveling substrate is wound around the pinch roll at a wrap angle of 10 degrees or more. 2. A continuous vacuum vapor deposition apparatus in which a traveling substrate is continuously introduced from the atmosphere into a vacuum chamber, the traveling substrate is vacuum-deposited in the vacuum chamber, and then the substrate is carried out into the atmosphere. It is divided into a plurality of pressure chambers by a seal device between
Each sealing device is composed of one sealing roll and sealing bars provided on both sides of the sealing roll, and guide rolls are arranged in the pressure chamber, and the sealing device is carried into the substrate and the atmosphere introduced into the vacuum chamber. The continuous vacuum vapor deposition apparatus is characterized in that the substrate is wound around the seal roll at a wrap angle of 10 degrees or more.