JPH07628U - XY stage - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide an XY stage having a simple structure and capable of easily setting a work piece on a work piece fixing jig. [Structure] Fixed guides 3 mounted orthogonally to each other on a stage 2 on the upper surface of a base 1, and fixed guides 3 respectively.
The slide block 4 supported by the fixed guide 3 is capable of reciprocating in the longitudinal direction and provided with fixing means 3 for the fixed guide. When the work fixing jig 6 having the positioning means 5 is brought into contact with the positioning means 5 and fixed by the fixing block 52 having the oval holes 53, the work fixing jig 6 is oriented in a predetermined direction with respect to the fixed guide 3.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an XY stage that can be used as a dimension measurement jig when positioning and fixing a work to be processed by cutting or polishing to a jig by external setup.

[0002]

[Prior art]

 Usually, when machine parts, mold parts, etc. are manufactured by cutting, punching, polishing, etc., the work is set directly on the table of the processing machine with the processing reference surface set, and the work table or tool It is manually adjusted while reciprocating the table or processing tool using a dial gauge or the like so that the predetermined surface of the work is accurately oriented in the moving direction, and is fixed with a clamp or magnet.

In this case, since the work orientation adjustment work is also required when changing the processing machine, the work is fixed in advance to the work fixing jig in a state in which the orientation is adjusted, and the plurality of processing machines are not fixed. There is also a method in which a receiving jig is provided so that the workpiece fixing jig can be accurately mounted in the desired direction, and the orientation of the workpiece can be determined simply by setting the workpiece fixing jig on the receiving jig. .

The work fixing jig is provided with a clamp, a magnet, etc. for fixing the work on the upper surface and has a reference end face, and the reference end face is brought into contact with a receiving jig on the table of the processing machine to be positioned. It Also, instead of the reference end surface of the jig, there is also one having a projection and a hole which are fitted to each other on the bottom surface of the jig and the upper surface of the receiving jig fixed to the processing machine.

When the workpiece is set in the correct position and orientation of the workpiece fixing jig, the fixing jig is placed on a table that moves in the XYZ axis directions such as a frying machine, and the dial gauge is fixed on the fixing jig surface. Adjust the direction of the fixing jig so that it does not tilt with respect to the moving direction of the table when the table is moved against the table, and then fix and fix the work on the fixing jig in the same way. As described above, the table of the processing machine is used for this setting work, and a measuring device such as a three-dimensional coordinate measuring machine is also used.

On the other hand, when the receiving jig is set on the table of the processing machine, the work fixing jig and the receiving jig are set on the table of the processing machine and the work fixing jig is adjusted in the same manner as described above. After adjusting so that there is no tilt with respect to the moving direction of the table, fix the receiving jig to the processing machine table.

[0007]

[Problems to be solved by the device]

 However, when setting the work piece on the work fixing jig, if the table of the work machine is used, the work piece cannot be processed while the adjustment is required, resulting in poor productivity. In addition, although it is possible to increase the operating rate of the processing machine by performing external setup using a measuring device such as a three-dimensional coordinate measuring machine, the measuring device is expensive and it is necessary to adjust the reference plane of the fixing jig each time. There is such a problem. The present invention has been made in view of these circumstances, and an object of the present invention is to provide an XY stage having a simple structure and capable of easily setting a work piece on a work fixing jig. It is in.

[0008]

[Means for Solving the Problems]

 In order to achieve the above object, according to the present invention, a base serving as a reference surface of the stage, fixed guides mounted on the base at right angles to each other, and reciprocating motions in the longitudinal direction of the guides supported by the fixed guides. It is characterized by including a slide block that is capable of being fixed to a fixed guide and a workpiece fixing jig positioning means that is positioned and installed on the base.

[0009]

[Action]

 As is apparent from the above configuration, according to the present invention, when the workpiece fixing jig is installed on the positioning means on the base, the workpiece is fixed in a predetermined direction with respect to the fixed guides which are parallel to the base surface and arranged at right angles. Become.

Both slide blocks are movable in parallel with the base surface, and serve as a dial gauge mounting base or a workpiece end surface abutting member.

[0011]

【Example】

 The invention will be described below with reference to FIGS. 1 and 2.

FIG. 1 is a plan view of an XY stage according to an embodiment of the present invention, and FIG. 2 is a perspective view of the XY stage according to the embodiment.

The base 1 is provided with a grip 11 on its side surface, and the upper surface thereof is a smooth stage 2. A fixed guide 3 having a triangular cross section is arranged on the stage 2 in a right-angled L-shape and fixed with a bolt 31. Further, a slide block 4 slidably contacting the fixed guide 3 and the stage 2 and capable of reciprocating in the longitudinal direction of the fixed guide 3 is provided, and a bolt 41 for fixing the fixed block 3 to the fixed guide 3 is attached to the slide block 4. .

On the other hand, there is a space where the work fixing jig 6 can be mounted on the stage 2 in the L-shaped releasing direction of both the fixing guides 3, and the positioning means 5 for the work fixing jig 6 is provided.

In this embodiment, the side surface of the work fixing jig 6 is a right angle, and the positioning means 5 is a block whose end surface is a right angle. The two blocks are arranged so that the end surface abuts the side surface of the work fixing jig 6. Are arranged at right angles, and the positioning means 5 facing the fixed guide 3 is adjusted so as to be parallel to the fixed guide 3 and fixed with bolts 51. Further, the work fixing jig 6 is held by a fixing block 52 having an oval hole 53 so as not to move after being positioned, and can be fixed by tightening a bolt 54.

In the above-mentioned embodiment, the block having the right angled end is used as the positioning means 5 of the work fixing jig 6, but instead of this block, the projection for positioning is provided on the lower surface of the work fixing jig 6. Alternatively, while the holes are provided, holes or protrusions corresponding to the holes may be provided on the base.

Next, a method of using the embodiment of the present invention will be described with reference to FIG.

First, the magnetic stand 7 is placed and fixed on both slide blocks 4, and the dial gauge 8 is set via the arms thereof, and the dial gauge 8 is applied to the side surface of the positioning means 5 to slide. When the block 4 is moved, the parallelism between the positioning means 5 and the fixed guide 3 can be known. Therefore, if the parallelism is not obtained, adjust the parallelism.

After the work fixing jig 6 is brought into contact with the side surface of the positioning means 5, the fixing block 52 is gently pressed in the horizontal direction, and the bolt 54 is tightened to fix. Then, as described above, when the slide block 4 is moved by applying the dial gauge 8 to the upper surface and the side surface of the work fixing jig 6, the parallelism and the side surface between the upper surface of the work fixing jig 6 and the stage 2 surface are detected. Since the parallelism with the fixed guide 3 can be known, adjust the parallelism when it is not visible.

When the work 9 is placed on the work fixing jig 6 and the dial gauge 8 is applied to the upper surface and the side surface of the work 9 to move the slide block 4, the parallelism of the work 9 can be similarly known. If the parallelism between the upper surface and the side surface that is the reference surface of the work 9 is obtained, it means that the work 9 is correctly placed on the work fixing jig 6, and the screw hole 61 provided in the work fixing jig 6 is provided. Is fixed to the work fixing jig 6 by a toggle clamp (not shown) or the like.

Further, as shown in FIG. 2, the abutting member 42 whose upper portion protrudes toward the workpiece fixing jig 6 is placed on the front slide block 4 and the dial gauge 8 installed on one slide block 4 is abutted. When the slide block 4 on the front side is moved by contacting the protruding end surface of the member 42, the inclination of the protruding end surface of the contact member 42 can be known. Then, the protruding end surface of the abutting member 42 and the fixed guide 3 are adjusted in parallel, and fixed to the slide block 4 with the bolt 43, and at the same time, the bolt 41 of the slide block 4 is tightened and fixed to the fixed guide 3. When the side surface of 9 is brought into contact with the projecting end surface, the work 9 is properly installed on the work fixing jig 6.

[0022]

[Effect of device]

 As is clear from the above description, the XY stage of the present invention has a simple structure, and since the length measuring device and blocks of various shapes are mounted on the slide block, the work fixing jig and the work are parallel. Degree measurement and positioning can be done easily. Further, since the work fixing jig positioning means is provided on the stage, the work fixing direction can be easily determined and the work can be performed efficiently. In addition, it can be used for measuring the level difference of machined workpieces, which makes it easier to carry out external machining setups and inspections.

[Brief description of drawings]

FIG. 1 is a top view of an XY stage according to an embodiment of the present invention.

FIG. 2 is a perspective view of an XY stage according to an embodiment of the present invention.

[Explanation of symbols]

 1 Base 2 Stage 3 Fixing Guide 4 Slide Block 5 Positioning Means 6 Work Fixing Jig 7 Magnetic Stand 8 Dial Gauge 9 Work 11 Grip Hand 31 Bolt 41 Bolt 42 Abutting Member 43 Bolt 51 Bolt 52 Fixing Block 53 Oval Hole 54 Bolt 61 screw holes

Claims (1)

[Scope of utility model registration request] 1. A base, which is a reference surface of a stage, fixed guides mounted on the base so as to be orthogonal to each other, and means for fixing the fixed guides, which are supported by the fixed guides and are capable of reciprocating in the longitudinal direction of the guides. An XY stage comprising a slide block and a workpiece fixing jig positioning means that is positioned and installed on the base.