JPH0760199B2 - X-ray irradiation device with irradiation area monitor - Google Patents

Description

TECHNICAL FIELD The present invention relates to an X-ray irradiation apparatus having an irradiation area monitor.

[Conventional technology]

As an X-ray irradiation device equipped with a conventional irradiation area monitor,
For example, there is one disclosed in JP-A-58-133239. As shown in FIG. 7, this is an X-ray transmission mirror 3 that transmits X-ray a but reflects visible light b such as laser light between the X-ray irradiator 1 and the X-ray irradiation target 2. Is installed such that its reflection surface 3A is located on the lower side in the X-ray irradiation direction and is inclined with respect to the irradiation X-ray axis P, and the visible ray b is at the X-ray transmission position Q of the reflection surface 3A. The visible light projector 4 is installed so that the reflected light axis P ₁ of the visible light b and the irradiation X-ray axis P are coaxial or substantially coaxial with each other.
In the figure, 5 is a collimator that narrows X-rays a and visible rays b into parallel rays, and 6 is a fluorescent X-ray analyzer for detecting fluorescent X-rays c emitted from the X-ray irradiation target 2,
Reference numeral 7 is a visible ray projection area detecting means.

[Problems to be solved by the invention]

However, according to the X-ray irradiating device having the above-mentioned configuration, the diameter of the X-ray irradiating region is at most about 1 mm, and the collimator 5 is used to make the diameter of the X-ray irradiating region small, for example, about several tens of μm. It is necessary to reduce the inner diameter of the and increase its length, but it is extremely difficult to construct in this way, and even if it is constructed in this way, an X-ray irradiation region having a desired diameter can be obtained. That is, it is difficult to sufficiently narrow down the visible light b that is the guide light, and it is difficult to monitor the irradiation position and the range of the X-ray that has a small irradiation area on the X-ray irradiation target. If the illuminator is tilted, it is almost impossible to perform accurate monitoring.

The present invention has been made in consideration of the above matters, and an object of the present invention is to reliably monitor an X-ray irradiation position and its range on an X-ray irradiation target even if the X-ray irradiation area is small. It is an object of the present invention to provide an X-ray irradiation device with an irradiation area monitor that can perform

[Means for solving problems]

In order to achieve the above-mentioned object, an X-ray irradiation apparatus with an irradiation area monitor according to the present invention includes a condenser lens provided at a position separated by a focal length from an X-ray irradiation object, and An X-ray guide tube that has a narrow passage through which the X-ray from the X-ray irradiator passes through the center of the optical axis and emits the X-ray toward the X-ray irradiation target, and the X-ray guide tube. A mirror provided between the X-ray irradiator and the condenser lens with the reflecting surface tilted so as to face the condenser lens while being inserted, and provided between the mirror and the condenser lens. Visible to the mirror such that a light blocking member having an asymmetrical light through hole in the up-down direction or the left-right direction and the axis of the light beam reflected by the reflecting surface of the mirror are parallel or substantially parallel to the X-ray guide tube. A visible light source that emits light rays It is characterized in that consists of.

[Action]

According to the above characteristic configuration, the laser beam and the X-ray are coaxial with each other by the mirror and the condenser lens, and the X-ray irradiation area can be monitored regardless of the rotation angle of the irradiation surface of the X-ray irradiation object. Can be done accurately. The image of visible light on the illuminated surface differs depending on whether the distance between the condenser lens and the illuminated surface of the X-ray illuminated object is equal to the focal length of the condenser lens. When a plurality of through holes are formed at asymmetrical positions, when the separation distance is equal to the focal length of the condenser lens, one spot is formed as an image on the illuminated surface, and the distance is the focal point. When the distance is smaller than the distance, an image which is not inverted vertically or horizontally is formed. When the distance is larger than the focal length, an image which is inverted vertically or horizontally is formed. Therefore, by observing how the image is formed on the irradiated surface, it is possible to know the position of the irradiated surface of the X-ray irradiated object, and based on that, move the condenser lens or the X-ray irradiated object appropriately. By doing so, it is possible to accurately irradiate a desired region of the X-ray irradiation target with X-rays.

〔Example〕

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 schematically shows an example of an X-ray irradiation apparatus with an irradiation area monitor according to the present invention. In FIG. 1, 11 is a laser tube as a visible light source for emitting a laser LB in the visible area,
Reference numeral 12 is a beam expander for expanding and adjusting the laser LB into parallel rays having a predetermined diameter, 13 is a polarizing plate for adjusting the light amount of the laser LB, and these members 11 to 13 are arranged in the housing 10 with their optical axes aligned with each other. It is provided. The housing 10
Is made of iron or lead, for example, to prevent X-rays from leaking to the outside, and also accommodates each member 14 to 24 described later.

Reference numeral 14 is an X-ray irradiator such as an X-ray tube provided so as to be substantially orthogonal to the laser tube 11 (laser LB), and 15 is an X-ray that guides the X-ray XB emitted from the X-ray irradiator 14. The guide tube is provided in a straight line substantially orthogonal to the projection direction of the laser LB and substantially horizontally. The X-ray guide tube 15 has a narrow passage formed therein so as to narrow the diameter of the X-ray XB to about 10 μm, and is made of, for example, glass or metal.
Reference numeral 16 is a holding member that is appropriately provided to hold the X-ray guide tube 15.

Reference numeral 17 is a mirror provided between the X-ray irradiator 14 and a condenser lens 19 described later, and its reflecting surface 17A has an X-ray guide tube 1
It is provided so as to form a predetermined angle (for example, an angle α in the drawing is 45 degrees) with the installation direction of 5 (hereinafter, referred to as an X-ray irradiation axis, indicated by a symbol J), and with respect to the X-ray irradiation axis J. The laser LB incident from a direction of about 90 degrees is bent by 90 degrees so as to be a parallel laser LB 'along the X-ray irradiation axis J and reflected. Then, a hole 18 for inserting the X-ray guide tube 15 is formed at substantially the center of the mirror 17.

Reference numeral 19 is a condenser lens provided near the tip side of the X-ray guide tube 15 and made of, for example, a convex lens, the optical axis of which is parallel to the X-ray irradiation axis J, and the X-ray guide tube 15 is located approximately at the center. There is formed a hole 20 for inserting the.

An alignment mechanism (not shown) is provided independently for each of the mirror 17 and the condenser lens 19.

Reference numeral 21 denotes an X-ray irradiation target, which is provided at the focal position of the condenser lens 19 and can be moved in any of the front-back, up-down and left-right directions by a holder (not shown), and with respect to the X-ray guide tube 15. It is held so that the angle of the irradiation surface can be set arbitrarily.

Reference numeral 22 denotes a disc-shaped light-shielding member provided between the mirror 17 and the condenser lens 19 and in the illustrated embodiment in the vicinity of the condenser lens 19. As shown in FIG. A hole 23 through which the line guide tube 15 is inserted is formed, and further five light beam through holes 24 are provided at positions where a concentric circle centered on the hole 23 is divided into five equal parts.

Next, the operation of the X-ray irradiating apparatus with the irradiation area monitor having the above structure will be described with reference to FIG.

First, the optical axes of the laser tube 11, the beam expander 12, and the polarizing plate 13 are aligned with each other, and the laser LB 'reflected by the mirror 17 is reflected by the X-rays by the respective alignment mechanisms of the mirror 17 and the condenser lens 19. Parallel to irradiation axis J (coaxial)
Adjust so that

In the state adjusted in this way, the X-ray irradiation target 21
Is at the position B in FIG. 3, and the separation distance between the irradiation surface 21A of the X-ray irradiation target 21 and the condenser lens 19 (hereinafter, referred to as distance L) is the focal length of the condenser lens 19 (hereinafter, distance). Equal to F), the reflected laser L from the mirror 17
B'is a light beam through hole 24 of the light blocking member 22 and the condenser lens 19
By passing through, an image is formed as one point on the irradiated surface 21A, and this image formation point coincides with the irradiation position of the X-ray XB.

When the X-ray irradiation object 21 is at the position A in FIG. 3 and the distance L is shorter than the distance F, the laser LB '
Is an image that is not inverted in the vertical direction by passing through the light beam through holes 24 of the light shielding member 22 and the condenser lens 19, that is,
The same image (five spots) as the arrangement state of the light beam through holes 24 formed in the light shielding member 22 is formed on the irradiation surface 21A.

Further, the X-ray irradiation object 21 is at the position C in FIG. 3,
When the distance L is longer than the distance F, the laser LB 'passes through the light beam through holes 24 of the light shielding member 22 and the condenser lens 19 to form an image inverted in the vertical direction, that is, the light shielding member 22. An image (five spots) whose vertical direction is completely opposite to the arranged state of the formed light beam through holes 24 ... Is formed on the irradiated surface 21A.

Then, in the above cases (1) and (2), the condenser lens 19 or the X-ray irradiation target 21 is moved in the horizontal direction (direction shown by an arrow XY in FIG. 3) by a predetermined distance so that the distance L becomes equal to the distance F. do it.

As shown in the above embodiment, the light blocking member 22 provided on the upstream side of the condenser lens 19 is provided with the light beam through holes 24 ... Asymmetrically in the vertical direction.
Depending on the size of the distance L between the irradiation surface 21A of the X-ray irradiation object 21 and the X-ray irradiation object 21, the image formed by the laser LB 'passing through the light beam through holes 24 and the condenser lens 19 on the irradiation surface 21A. Different from this, it can be determined whether or not the focus position of the condenser lens 19 is present.

Then, in the above-mentioned state, if the position where the X-ray XB is irradiated onto the irradiation surface 21A and the position where the laser LB 'is focused are completely coincident with each other, the X-ray irradiation axis of the irradiation surface 21A. Even if the angle with respect to J changes, the two will match regardless of this. Therefore, the X-rays on the irradiated surface 21A can be confirmed by visually or observing the position where the laser LB 'is irradiated on the irradiated surface 21A. It becomes possible to monitor the irradiation area of XB, and X
It is possible to irradiate the line XB accurately.

Further, according to the above-mentioned embodiment, if the laser LB 'entering the condenser lens 19 is not parallel to the optical axis of the condenser lens 19 (or perpendicular to the lens surface), it is imaged on the irradiated surface 21A. Since the number of spots to be reduced decreases or even if all the images are formed, the brightness becomes uneven. Therefore, it is possible to confirm how the laser LB ′ enters the condenser lens 19.

The present invention is not limited to the above embodiment, and for example, as shown in FIG. 4, a hole for penetrating a light beam formed in the light shielding member 22 is asymmetric in the vertical direction (symmetric in the horizontal direction). It may be formed in one single hole 25.

Further, the light beam through holes 24, 25 may be asymmetrical in the left-right direction, or may be asymmetrical in any of the vertical and horizontal directions.

5 and 6 show still another embodiment of the present invention. In this embodiment, the member for holding the X-ray guide tube 15 also serves as the light shielding member. That is, in both figures, 3
Reference numerals 0, 30, 30 are light guide pipes made of a metal such as stainless steel or aluminum, or another material, and these light guide pipes 30, 30, 30 are parallel to each other and are formed by overlapping in a triangular cross section. Space of inverted triangular shape
The X-ray guide tube 15 is inserted into the inside of the tube 31 and is held horizontally. The internal space 32, 32, 32 of each light guide pipe 30, 30, 30 is a laser L reflected by the mirror 17.
It is formed in the light beam through hole through which B ′ passes.

The X-ray irradiating apparatus with the irradiation area monitor configured in this way also operates in the same manner as in the above-mentioned embodiment, and therefore its explanation is omitted. Further, in this embodiment, there is an advantage that the X-ray guide tube 15 can be more surely held horizontally and in a straight line.

Further, in each of the above embodiments, for example, the laser tube 11, the beam expander 12, and the polarizing plate 13 are housed in the housing tube with their optical axes aligned, and the housing tube is housed in the housing 10. Good.

Further, the angle α formed by the mirror 17 and the X-ray irradiation axis J is not always 45.
Needless to say, it is not necessary to set the angle in degrees, the angle may be set to any angle, and the laser LB ′ reflected by the mirror 17 may be coaxial with the X-ray irradiation axis J.

〔The invention's effect〕

As described above, the X-ray irradiation apparatus with the irradiation area monitor according to the present invention allows the laser beam and the X-rays to be coaxial with each other by the mirror and the condenser lens, and the upper and lower sides on the upstream side of the condenser lens. Since the light blocking member having the asymmetrical light through holes in the horizontal direction or in the horizontal direction is provided, it is possible to accurately monitor the X-ray irradiation area regardless of the rotation angle of the irradiation surface of the X-ray irradiation object. By observing how the image is formed on the irradiated surface, it is possible to know the position of the irradiated surface of the X-ray irradiated body, and based on that, move the condenser lens or the X-ray irradiated body appropriately. By doing so, it is possible to accurately irradiate a desired region of the X-ray irradiation target with X-rays.

In particular, the present invention is effective when the X-ray irradiation area on the surface to be irradiated is minute (for example, about 10 μm in diameter).

[Brief description of drawings]

1 to 3 show an embodiment of the present invention, FIG. 1 is an explanatory view showing an example of an X-ray irradiation apparatus with an irradiation area monitor according to the present invention, and FIG. 2 shows an example of a light shielding member. Plan view,
FIG. 3 is an operation explanatory diagram. FIG. 4 is a plan view showing another example of the light shielding member. 5 and 6 show still another embodiment of the present invention, FIG. 5 is an explanatory view showing an example of an X-ray irradiation apparatus with an irradiation area monitor, and FIG. 6 is a perspective view showing a main part. . FIG. 7 is an explanatory diagram showing a conventional technique. 11 ... Laser tube (visible light source), 14 ... X-ray irradiator, 15 ...
... X-ray guide tube, 17 ... Mirror, 17A ... Reflecting surface, 19 ... Condensing lens, 21 ... X-ray irradiated object, 22 ... Shading member, 24,25,32 ... Ray penetration hole, 30 …… Holding member and light blocking member, LB …… Laser (visible light), XB …… X ray, J…
... X-ray irradiation axis.

Claims (1)

[Claims] 1. A condenser lens provided at a position separated by a focal length from an X-ray irradiation object, and an X-ray from an X-ray irradiator passing through an optical axis center of the condenser lens. The X-ray guide tube which has a narrow passage for emitting the X-ray toward the X-ray irradiation target and the X-ray guide tube are inserted, and the reflection surface is inclined so as to face the condenser lens side. A mirror provided between the X-ray irradiator and a condenser lens, and a light-shielding member provided between the mirror and the condenser lens and having a light beam through hole that is asymmetric in the vertical direction or the horizontal direction, An irradiation area monitor, comprising a visible light source that emits visible light to the mirror so that the axis of the light reflected by the reflecting surface of the mirror is parallel or substantially parallel to the X-ray guide tube. X-ray irradiation device.