JPH0758663B2 - Thick film capacitors - Google Patents
Thick film capacitorsInfo
- Publication number
- JPH0758663B2 JPH0758663B2 JP1329101A JP32910189A JPH0758663B2 JP H0758663 B2 JPH0758663 B2 JP H0758663B2 JP 1329101 A JP1329101 A JP 1329101A JP 32910189 A JP32910189 A JP 32910189A JP H0758663 B2 JPH0758663 B2 JP H0758663B2
- Authority
- JP
- Japan
- Prior art keywords
- upper electrode
- thick film
- film capacitor
- capacitance
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、容量調整可能な厚膜コンデンサに関する。TECHNICAL FIELD The present invention relates to a capacitance-adjustable thick film capacitor.
従来の技術 第４図は従来の厚膜コンデンサの構成を示し、第５図は
第４図のＶ−Ｖ線に沿う断面図である。第４図および第
５図において、１はアルミナセラミック等の絶縁基板、
２はAg−Pd等の下部電極、３はAg−Pd等の櫛歯状の上部
電極、４はガラス系の誘電体層、５はオーバコートであ
る。これらは絶縁基板１上にスクリーン印刷法により所
定の形状に順次印刷、焼成を繰り返すことにより積層状
態で形成される。2. Description of the Related Art FIG. 4 shows the structure of a conventional thick film capacitor, and FIG. 5 is a sectional view taken along the line VV of FIG. 4 and 5, 1 is an insulating substrate such as alumina ceramic,
Reference numeral 2 is a lower electrode of Ag-Pd or the like, 3 is a comb-shaped upper electrode of Ag-Pd or the like, 4 is a glass-based dielectric layer, and 5 is an overcoat. These are formed in a laminated state on the insulating substrate 1 by sequentially printing a predetermined shape by screen printing and repeating firing.
このような厚膜コンデンサの静電容量は、次の式から求
めることができる。The capacitance of such a thick film capacitor can be obtained from the following formula.
Ｃ＝εｏ・ε・S/d ここで、εｏは比誘電率、εは誘電体材料の誘電率、Ｓ
は有効面積（下部電極と上部電極の重なり合った面
積）、ｄは誘電体層の厚さである。したがって、面積Ｓ
を変化させることにより厚膜コンデンサの静電容量を変
化させることができる。C = εo · ε · S / d where εo is the relative permittivity, ε is the permittivity of the dielectric material, and S
Is the effective area (the area where the lower electrode and the upper electrode overlap), and d is the thickness of the dielectric layer. Therefore, the area S
It is possible to change the capacitance of the thick film capacitor by changing.
上記従来例では、櫛歯状の上部電極３の櫛歯部分3aに対
し１本ずつレーザビームにより切断溝６を入れて他の部
分から切断することにより、上部電極３の面積を変え、
静電容量の調整を行なっている。In the above-mentioned conventional example, the area of the upper electrode 3 is changed by cutting the comb-teeth portion 3a of the comb-teeth-shaped upper electrode 3 one by one with the laser beam and cutting from the other portions.
The capacitance is being adjusted.
発明が解決しようとする課題 しかしながら、上記従来の厚膜コンデンサの櫛歯状上部
電極３のトリミングによる容量調整法では、容量値の調
整は、第３図に示すように、櫛歯部分3aを１本切断する
毎に2pFずつ段階的に調整され、容量値を連続的に微調
整することができないという問題があった。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in the conventional capacitance adjusting method by trimming the comb-teeth-shaped upper electrode 3 of the thick film capacitor, as shown in FIG. There is a problem that the capacitance value cannot be finely adjusted continuously because the capacitance is adjusted stepwise by 2 pF each time the main cutting is performed.
本発明は、このような従来の問題を解決するものであ
り、容量値を連続的に微調整することのできる優れた厚
膜コンデンサを提供することを目的とする。The present invention solves such a conventional problem, and an object thereof is to provide an excellent thick film capacitor capable of continuously finely adjusting the capacitance value.
課題を解決するための手段 本発明は、上記目的を達成するために、厚膜コンデンサ
の上部電極を中心部に円形の開口を有する円板状に形成
するようにしたものである。Means for Solving the Problems In order to achieve the above object, the present invention is configured such that an upper electrode of a thick film capacitor is formed in a disc shape having a circular opening in a central portion.
作用 したがって、本発明によれば、上部電極をその中心部か
ら扇型に切除することにより上部電極の面積を連続的に
変化させることができるため、容量調整を連続的に微調
整することがきるという効果を有する。Operation According to the present invention, therefore, the area of the upper electrode can be continuously changed by cutting the upper electrode in a fan shape from the center thereof, and thus the capacitance adjustment can be continuously finely adjusted. Has the effect.
実施例 第１図は本発明の一実施例の構成を示し、第２図は第１
図のII−II線に沿う断面図である。第１図および第２図
において、11はアルミナセラミック製の絶縁基板、12は
Ag−Pd合金製の矩形の下部電極、13はAg−Pd合金製の中
心部に円形開口14を有する円板状の上部電極、15はガラ
ス系の矩形の誘電体層、16はオーバコートである。これ
らは絶縁基板11上にスクリーン印刷法により所定の形状
に順次印刷、焼成を繰り返すことにより積層状態で形成
される。Embodiment FIG. 1 shows the configuration of an embodiment of the present invention, and FIG.
It is sectional drawing which follows the II-II line of a figure. 1 and 2, 11 is an insulating substrate made of alumina ceramic, and 12 is
A rectangular lower electrode made of Ag-Pd alloy, 13 is a disc-shaped upper electrode having a circular opening 14 in the center made of Ag-Pd alloy, 15 is a glass-based rectangular dielectric layer, and 16 is an overcoat. is there. These are formed on the insulating substrate 11 in a laminated state by sequentially printing and firing in a predetermined shape by a screen printing method.
次に上記実施例における容量調整動作について説明す
る。まずこの厚膜コンデンサをレーザトリミング装置に
セットし、レーザビームを上部電極13の中心部から放射
方向に移動させて切断溝17を入れる。次に、この切断溝
17から角度θをもって同様に放射方向に切断溝18を入れ
て、上部電極13を扇形に切除する。これにより切断溝17
および18により囲まれた部分は上部電極13の他の部分か
ら電気的に切り離されるので、その減少した面積分だけ
静電容量が小さくなる。Next, the capacity adjusting operation in the above embodiment will be described. First, the thick film capacitor is set in the laser trimming device, and the laser beam is moved in the radial direction from the center of the upper electrode 13 to form the cutting groove 17. Then this cutting groove
Similarly, a cutting groove 18 is formed in the radial direction at an angle θ from 17 to cut the upper electrode 13 into a fan shape. This allows the cutting groove 17
Since the portion surrounded by and 18 is electrically separated from the other portion of the upper electrode 13, the capacitance becomes smaller by the reduced area.
このように、上記実施例によれば、上部電極13から切除
される面積は、切断溝17と18とがなす角度θによって決
まるので、容量値の調整も第３図に示すように角度θを
適切に変化させることにより容易に連続的に微調整する
ことができるという利点を有する。As described above, according to the above-described embodiment, the area cut off from the upper electrode 13 is determined by the angle θ formed by the cutting grooves 17 and 18, so that the capacitance value can be adjusted by changing the angle θ as shown in FIG. It has an advantage that it can be easily and continuously fine-tuned by appropriately changing it.
発明の効果 本発明は、上記実施例から明らかなように、上部電極を
中心部に円形開口を有する円板状に形成したので、上部
電極を中心部から扇形に切除することにより、容量値を
連続的に微調整することができるという効果を有する。EFFECTS OF THE INVENTION As apparent from the above-described embodiment, the present invention forms the upper electrode in the shape of a disk having a circular opening in the center, so by cutting the upper electrode in a fan shape from the center, the capacitance value is reduced. It has the effect that fine adjustment can be performed continuously.
第１図は本発明の一実施例における厚膜コンデンサの概
略平面図、第２図は第１図のII−II線に沿う断面図、第
３図は同厚膜コンデンサにおける容量調整特性図、第４
図は従来の厚膜コンデンサの概略平面図、第５図は第４
図のＶ−Ｖ線に沿う断面図、第６図は従来の厚膜コンデ
ンサにおける容量調整特性図である。 １、11…絶縁基板、２、12…下部電極、３、13…上部電
極、14…円形開口、４、15…誘電体層、５、16…オーバ
コート、17、18…切断溝。1 is a schematic plan view of a thick film capacitor according to an embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II of FIG. 1, and FIG. 3 is a capacitance adjustment characteristic diagram of the thick film capacitor. Fourth
The figure is a schematic plan view of a conventional thick film capacitor, and FIG.
FIG. 6 is a sectional view taken along the line VV in FIG. 6, and FIG. 6 is a capacitance adjustment characteristic diagram of a conventional thick film capacitor. 1, 11 ... Insulating substrate, 2, 12 ... Lower electrode, 3, 13 ... Upper electrode, 14 ... Circular opening, 4, 15 ... Dielectric layer, 5, 16 ... Overcoat, 17, 18 ... Cutting groove.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 石垣 功 神奈川県横浜市港北区綱島東４丁目３番１ 号 松下通信工業株式会社内 (56)参考文献 特開 昭60−102727（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Isao Ishigaki 4-3-1 Tsunashima-higashi, Kohoku-ku, Yokohama-shi, Kanagawa Matsushita Communication Industrial Co., Ltd. (56) Reference JP-A-60-102727 (JP, A)
Claims (1)
電体層および上部電極を備え、前記上部電極が中心部に
円形開口を有する円板状に形成されるとともに、この上
部電極の中心部の円形開口より外周に至るまでの間に切
断溝を扇形状に形成して成り、下部電極と相対する上部
電極の面積が連続的に変化するようにしたことを特徴と
する厚膜コンデンサ。1. A lower electrode, a dielectric layer, and an upper electrode, which are sequentially laminated on an insulating substrate, wherein the upper electrode is formed in a disk shape having a circular opening in the center, and the center of the upper electrode is formed. A thick film capacitor, characterized in that a cutting groove is formed in a fan shape from the circular opening of the portion to the outer circumference, and the area of the upper electrode facing the lower electrode is continuously changed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1329101A JPH0758663B2 (en) | 1989-12-19 | 1989-12-19 | Thick film capacitors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1329101A JPH0758663B2 (en) | 1989-12-19 | 1989-12-19 | Thick film capacitors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03190117A JPH03190117A (en) | 1991-08-20 |
| JPH0758663B2 true JPH0758663B2 (en) | 1995-06-21 |
Family
ID=18217621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1329101A Expired - Lifetime JPH0758663B2 (en) | 1989-12-19 | 1989-12-19 | Thick film capacitors |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0758663B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010035453A1 (en) * | 2010-08-26 | 2012-03-01 | Conti Temic Microelectronic Gmbh | Multi-level PCB for high-frequency applications |
| JP6097540B2 (en) | 2012-01-17 | 2017-03-15 | ローム株式会社 | Chip capacitor and manufacturing method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60102727A (en) * | 1983-11-09 | 1985-06-06 | 松下電器産業株式会社 | Trimming condenser and method of producing same |
-
1989
- 1989-12-19 JP JP1329101A patent/JPH0758663B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03190117A (en) | 1991-08-20 |
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