JPH0758376A - Metal vapor laser - Google Patents

Abstract

PURPOSE:To eliminate the impurities contained in a ceramic outer tube or bring them far from a laser generation area by providing an axial passage for fluid in the ceramic outer tube. CONSTITUTION:The electric energy supplied from a power source 11 is given as the energy to discharge buffer gas or metal vapor from inside a ceramic inner tube 1. The inside of the device is heated by discharge, and it generates metal vapor, so it becomes heat retaining structure by a ceramic outer tube 2 and a vacuum layer 6. Buffer gas flows in from buffer gas inflow and outflow ports 7a and 8a, and flows out of gas inflow outflow ports 7b and 8b. The impurities generated by the heat of the ceramic outer tube 2 flow together with the buffer gas passing the inside of the ceramic inner tube 1 and the passage 12 provided in the ceramic outer tube 2, and they can be discharged from a buffer gas inlet and out let port 8b without allowing impurities from flowing near the axis in the bore of the ceramic inner tube being a laser generation area.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal vapor laser generator using metal vapor such as copper or gold.

[0002]

2. Description of the Related Art FIG. 10 shows a general structure of a conventional metal vapor laser generator. FIG. 10 shows a ceramic inner cylinder 1, a ceramic outer cylinder 2, a laser window 4, a vacuum container 3,
Electrode 5, vacuum layer 6, buffer gas inflow / outflow ports 7a, 7
b, 8a, 8b, an electrically insulating layer dividing material 9, an insulating tube 10, and a power supply 11 to provide a metal vapor laser generator.
The electric charge supplied from the power supply 11 is discharged to the inside of the ceramic inner cylinder 1 through the vacuum container 3 and the electrode 5. The inside of the device is heated by electric discharge to generate metal vapor, and the ceramic outer cylinder 2 and the vacuum layer 6 form a heat retaining structure. The partial pressure of the buffer gas is several tens torr, and the generated metal vapor is about 0.1 to
It is rr.

As a conventional technique, a ceramic outer cylinder is provided with a thickness difference symmetrically in the axial direction and the radial direction to change the heat insulation performance in the axial direction, and a cylindrical outer cylinder is provided between the inner ceramic cylinder and the outer ceramic cylinder. There is a device in which a C-shaped spacer ring is provided between them to make it easier to evacuate and prevent discharge between the ceramic inner cylinder and the ceramic outer cylinder. As other conventional examples, JP-A-62-81078, JP-A-63-117476 and JP-A-1-
No. 214182 is cited.

[0004]

When the impurities contained in the ceramic outer cylinder flow out into the laser generation region, plasma is generated due to the low ionization potential of the impurities and discharge resistance. This impurity is Na ₂ O, for example, and its partial pressure is about 10 ⁴ to 10 ⁷ . As a result, impedance matching deteriorates, the electron density decreases, and laser generation is hindered. Because of the high temperature holding structure in the metal vapor laser,
Impurities are likely to be generated, resulting in a decrease in output due to an increase in density in the laser generation region. The problem has been the removal of impurities that cannot be eliminated during such manufacturing.

The laser generator disclosed in Japanese Unexamined Patent Publication No. 62-81078 aims to eliminate impurities by providing forced convection by using a fan and providing a gas purifier in the middle of the convection. However, installation of a fan that causes forced convection is not possible with a metal vapor laser in which the temperature inside the laser becomes high.

The metal vapor laser generator disclosed in Japanese Patent Laid-Open No. 63-117476 has a heat transfer path provided in the axial direction of the outer peripheral surface of the ceramic inner cylinder and the inner peripheral surface of the ceramic outer cylinder. The impurities generated in the ceramic outer cylinder have a temperature distribution that has a downward gradient from the inner peripheral surface toward the outer peripheral surface, and thus are diffused in the outer peripheral direction. Therefore, even if a channel for removing impurities is provided on the inner peripheral surface, the amount of impurities contained in the ceramic outer cylinder hardly changes.

In the metal vapor laser generator disclosed in Japanese Unexamined Patent Publication No. 1-214182, the flow path for removing impurities has a space for the thermal expansion absorption between the outer peripheral surface of the ceramic inner cylinder and the inner peripheral surface of the ceramic outer cylinder. The above-mentioned JP-A-63-1
Similar to Japanese Patent No. 17476, the amount of impurities contained in the ceramic outer cylinder hardly changes. Also, the second electrode is in contact with the ceramic inner cylinder, but this damages the end surface of the second electrode and the end surface of the ceramic inner cylinder, and the electrode material peeling from the second electrode mixes inside the laser and interferes with the laser output. become. Therefore, the second electrode must be spaced apart from the ceramic inner cylinder, which is a place where impurities generated from the ceramic outer cylinder are mixed.

An object of the present invention is to eliminate impurities contained in the ceramic outer cylinder at an early stage or to move away from the laser generation region so that the impurities do not flow out into the laser generation region and hinder the laser generation and stabilize the laser output. It is an object of the present invention to provide a metal vapor laser generator that can be realized.

[0009]

In order to achieve the above object, the first invention of the present application comprises a ceramic inner cylinder and a ceramic outer cylinder provided substantially coaxially with and in contact with the outside of the ceramic inner cylinder. The metal vapor laser generator is characterized in that a fluid passage is provided axially through the ceramic outer cylinder main body.

A second aspect of the present invention is a ceramic inner cylinder,
In a metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder which is provided substantially coaxially and in contact with the outer side of the ceramic inner cylinder, a fluid passage is provided axially through the ceramic outer cylinder main body. A circumferential passage communicating with the axial passage is provided.

A third aspect of the present invention is a ceramic inner cylinder,
In the metal vapor laser generator including the ceramic inner cylinder and the ceramic outer cylinder which is provided substantially coaxially and in contact with the outer side of the ceramic inner cylinder, a fluid passage is provided axially in the outer peripheral surface of the ceramic outer cylinder. It is characterized by.

The fourth invention of the present application is a ceramic inner cylinder,
In a metal vapor laser generator including a ceramic inner cylinder and a ceramic outer cylinder that is provided substantially in contact with the outer side of the ceramic inner cylinder, a fluid passage is provided on the outer peripheral surface of the ceramic outer cylinder in the axial direction, A circumferential passage communicating with the axial passage is provided.

A fifth aspect of the present invention is a ceramic inner cylinder,
In a metal vapor laser generator including the ceramic inner cylinder and a ceramic outer cylinder provided substantially in contact with the outer side of the ceramic inner cylinder, a fluid passage is provided on the inner peripheral surface of the ceramic outer cylinder over the entire axial length. It is characterized by.

A sixth aspect of the present invention is a ceramic inner cylinder,
In a metal vapor laser generator including a ceramic outer cylinder which is substantially coaxial with the ceramic outer cylinder and is provided in contact with the outer side of the ceramic inner cylinder, a fluid passage is formed on the inner peripheral surface of the ceramic outer cylinder over the entire axial length. It is characterized in that it is provided by a combination of a cylinder side groove and an inner cylinder side groove formed facing the outer cylinder side groove on the outer peripheral surface of the ceramic inner cylinder over the entire axial length.

The seventh invention of the present application is characterized in that, in the fifth invention or the sixth invention, the fluid passage is provided in a spiral shape.

The eighth invention of the present application includes a ceramic inner cylinder,
In the metal vapor laser generator including the ceramic inner cylinder and the ceramic outer cylinder which is provided substantially coaxially and in contact with the outer side of the ceramic inner cylinder, fluid passages are provided on the outer peripheral surface of the ceramic outer cylinder in the circumferential direction. It is characterized by.

A ninth aspect of the present invention is a ceramic inner cylinder,
In the metal vapor laser generator including the ceramic inner cylinder and the ceramic outer cylinder provided substantially coaxially and in contact with the outer side of the ceramic inner cylinder, a fluid passage is provided radially in the ceramic outer cylinder body. It is characterized by.

According to the tenth aspect of the present invention, in the ninth aspect, the ceramic outer cylinder is divided into two in the radial direction so as to have a double structure of an inner outer cylinder and an outer outer cylinder, and the inner outer cylinder and the outer outer cylinder are formed. The passages are arranged so as not to overlap each other.

According to the eleventh aspect of the present invention, in the ninth aspect, the fluid passage is formed so as to be inclined in the radial direction, and the inner side opening and the outer side opening of the passage are arranged so as not to overlap on the radial line. It is characterized by that.

The twelfth invention of the present application is the first to seventh inventions.
In any one of the inventions, the buffer gas inflow port and the outflow port are formed in the vicinity of the inflow port and the outflow port of the fluid passage.

[0021]

In the metal vapor laser, the laser generation region is a high temperature region where the metal vapor exists, and the vacuum container surrounding this is in contact with the outside air, so that the temperature is close to the outside air temperature, and the ceramic outer cylinder in the middle is in the radial direction. A considerable temperature difference occurs. When a fluid passage is provided in the ceramic outer cylinder, impurities are deposited and evaporated from the passage surface on the high temperature side, that is, from the position close to the central axis in the radial direction. These vapors adhere to the low temperature side, that is, at a position away from the central axis in the radial direction, and move away from the laser generation region.

Further, by providing a passage through which the fluid can flow in and out in the axial direction in the ceramic outer cylinder, the impurities generated from the ceramic outer cylinder at high temperature are conventionally discharged by diffusion inside the ceramic outer cylinder. It can be easily discharged as a gas through the ceramic outer cylinder.

That is, in the first to eleventh inventions, a passage is provided in the ceramic outer cylinder to promote the distance of impurities from the laser generation region and the elimination of impurities. The invention is to eliminate the impurities released from the ceramic outer cylinder in contact with the passage to the outside,
The eighth invention to the eleventh invention promotes a long distance of impurities from the laser generation region. A twelfth aspect of the present invention relates to a buffer gas inflow / outflow structure in the metal vapor laser generator, wherein a buffer gas is actively provided in a passage provided in the ceramic outer cylinder so as to prevent impurities discharged from the ceramic outer cylinder from diffusing into a laser generation region. Is something that flows.

[0024]

FIG. 1 shows an embodiment of the first invention of the present application.
1A is a sectional view, and FIG. 1B is a sectional view taken along the line AA of FIG. In this embodiment, a ceramic inner cylinder 1, a ceramic outer cylinder 2 having a passage 12 through which a fluid can flow in and out in the axial direction,
A metal vapor laser generator including a laser window 4, a vacuum container 3, an electrode 5, a vacuum layer 6, buffer gas inflow / outflow ports 7a, 7b, 8a, 8b, an electrically insulating layer dividing material 9, an insulating cylinder 10, and a power supply 11. Is. In this embodiment, the outer cylinder 2 has a total length of about 3000 mm and a thickness of about 20 mm. The thickness of the inner cylinder 1 is about 5 mm. The electric energy supplied from the power source 11 is applied as discharge energy of the buffer gas and the metal vapor in the ceramic inner cylinder 1 through the vacuum container 3 and the electrode 5. The inside of the device is heated by electric discharge to generate metal vapor, and the ceramic outer cylinder 2 and the vacuum layer 6 form a heat retaining structure. The buffer gas is the buffer gas inflow / outflow port 7
a, 8a, and buffer gas inflow / outflow ports 7b, 8
b. Since the buffer gas passes through the inside of the ceramic inner cylinder 1 and the passage 12 provided in the ceramic outer cylinder 2, the impurities generated due to the high temperature of the ceramic outer cylinder 2 flow with the impurities and the ceramic inner cylinder 1 which is the laser generation region. Impurities are discharged from the buffer gas inflow / outflow port 8b without flowing out to a position closer to the central axis than the inner diameter of.

FIG. 2 shows an embodiment of the second invention of the present application.
2A is a cross-sectional view, and FIG. 2B is a perspective view of a main part of FIG. 2A. In this embodiment, a ceramic inner cylinder 1, a ceramic outer cylinder 2 having a linear axial passage 12 through which a fluid can flow in and out at a radial intermediate position, and a circumferential passage 12 in the circumferential direction, a laser window 4, a vacuum container. 3, a metal vapor laser generator including an electrode 5, a vacuum layer 6, buffer gas inflow / outflow ports 7a, 7b, 8a, 8b, an electrically insulating layer dividing material 9, an insulating cylinder 10, and a power supply 11. The electric energy supplied from the power source 11 is applied as discharge energy of the buffer gas and the metal vapor in the ceramic inner cylinder 1 through the vacuum container 3 and the electrode 5. The inside of the device is heated by electric discharge to generate metal vapor, and the ceramic outer cylinder 2 and the vacuum layer 6 form a heat retaining structure. The buffer gas is the buffer gas inflow / outflow port 7
a, 8a, and buffer gas inflow / outflow ports 7b, 8
b. Impurities generated when the temperature of the ceramic outer cylinder 2 becomes high generate a temperature difference in the radial direction of the ceramic outer cylinder and move to the outside by diffusion. In the process of moving the impurities to the outside, the diffusion speed is accelerated by the circumferential passage 12 and the axial passage 12 provided at the radial middle position of the ceramic outer cylinder 2.
Flow along with the buffer gas that passes through, and impurities are discharged from the buffer gas inflow / outflow port 8b without flowing out to a position closer to the central axis than the inner diameter of the ceramic inner cylinder, which is the laser generation region. Further, the impurities that have moved further to the outside are concentrated to the outside and are prevented from flowing out to a position closer to the central axis than the inner diameter of the ceramic inner cylinder, which is the laser generation region.

FIG. 3 shows an embodiment of the third invention of the present application.
FIG. 3A is a sectional view, and FIG. 3B is a perspective view of a main part of FIG. In this embodiment, a ceramic inner cylinder 1, a ceramic outer cylinder 2 having a passage 12 through which a fluid can flow in and out, a laser window 4, a vacuum container 3, an electrode 5, a vacuum layer 6, a buffer gas inflow / outflow port 7a, 7b, 8a, 8b, an electrically insulating layer dividing material 9, an insulating cylinder 10, and a power supply 11 to provide a metal vapor laser generator. The electric energy supplied from the power source 11 is applied as discharge energy of the buffer gas and the metal vapor in the ceramic inner cylinder 1 through the vacuum container 3 and the electrode 5. The inside of the device is heated by electric discharge to generate metal vapor, and the ceramic outer cylinder 2 and the vacuum layer 6 form a heat retaining structure. The buffer gas is the buffer gas inflow / outflow port 7
a, 8a, and buffer gas inflow / outflow ports 7b, 8
b. Impurities generated when the temperature of the ceramic outer cylinder 2 becomes high generate a temperature difference in the radial direction of the ceramic outer cylinder and move to the outside by diffusion. The moved impurities flow together with the buffer gas passing through the passage 12 provided outside the ceramic outer cylinder 2, and the buffer gas inflow / outflow port 8b does not flow out to a position closer to the central axis than the inner diameter of the ceramic inner cylinder which is the laser generation region. More discharged.

FIG. 4 shows an embodiment of the fourth invention of the present application.
4A is a cross-sectional view, and FIG. 4B is a perspective view of a main part of FIG. 4A. In this embodiment, a ceramic inner cylinder 1, a ceramic outer cylinder 2 having a passage 12 through which a fluid can flow in and out and a circumferential passage 12 in the circumferential direction, a laser window 4, a vacuum container 3, an electrode 5, a vacuum layer 6, Buffer gas inflow / outflow ports 7a, 7b, 8
a, 8b, electric insulation layer dividing material 9, insulation cylinder 10, power supply 11
It is a metal vapor laser generator composed of. Power supply 1
The electric energy supplied from 1 is the vacuum container 3, the electrode 5
And is given as discharge energy of the buffer gas and metal vapor in the ceramic inner cylinder 1. The inside of the device is heated by electric discharge to generate metal vapor, and the ceramic outer cylinder 2 and the vacuum layer 6 form a heat retaining structure. Buffer gas
The gas flows in from the buffer gas inflow / outflow ports 7a and 8a and flows out from the buffer gas inflow / outflow ports 7b and 8b. Impurities generated when the temperature of the ceramic outer cylinder 2 becomes high generate a temperature difference in the radial direction of the ceramic outer cylinder and move to the outside by diffusion.
The moved impurities are accelerated in diffusion speed by the passages 12 provided in the outer circumferential direction of the ceramic outer cylinder 2, and the axial passages 1
2 flows along with the buffer gas passing through 2, and the impurities are discharged from the buffer gas inflow / outflow port 8b without flowing out to a position closer to the central axis than the inner diameter of the ceramic inner cylinder, which is the laser generation region.

Next, an embodiment of the fifth invention of the present application will be described. In this structure, the fluid passage 12 is provided straight on the inner peripheral surface of the ceramic outer cylinder 2 over the entire axial length. Further, an embodiment of the sixth invention of the present application will be described with reference to FIG. FIG. 5 is a sectional view of a main part. In the present embodiment, the fluid passage is formed straight on the inner peripheral surface of the ceramic outer cylinder over the entire length in the axial direction, and the outer cylinder side groove is formed on the outer peripheral surface of the ceramic inner cylinder over the entire axial length. It is provided by combining with the inner cylinder side groove. The impurities moved into the passage 12 flow together with the buffer gas passing through the axial passage 12, and the impurities do not flow out to a position closer to the central axis than the inner diameter of the ceramic inner cylinder, which is the laser generation region, from the buffer gas inflow / outflow port 8b. Is discharged.

FIG. 6 shows an embodiment of the seventh invention of the present application.
6A is a sectional view, and FIG. 6B is a perspective view of a main part of FIG. 6A. In this embodiment, a ceramic inner cylinder 1, a ceramic outer cylinder 2 having a spiral passageway 12 through which a fluid can flow in and out, a laser window 4, a vacuum container 3, an electrode 5, a vacuum layer 6, a buffer gas inflow / outflow port. The metal vapor laser generator comprises 7a, 7b, 8a, 8b, an electrically insulating layer dividing material 9, an insulating tube 10 and a power supply 11. The electric energy supplied from the power source 11 is applied as discharge energy of the buffer gas and the metal vapor in the ceramic inner cylinder 1 through the vacuum container 3 and the electrode 5. The inside of the device is heated by electric discharge to generate metal vapor, and the ceramic outer cylinder 2 and the vacuum layer 6 form a heat retaining structure. The buffer gas flows in through the buffer gas inflow / outflow ports 7a and 8a, and the buffer gas inflow / outflow port 7
b, 8b. The impurities generated by the high temperature of the ceramic outer cylinder 2 are generated by the buffer gas in the ceramic inner cylinder 1.
Of the buffer gas inflow and outflow without flowing out of the impurities to a position closer to the central axis than the inner diameter of the ceramic inner cylinder 1 which is a laser generation region without passing through the passage 12 provided in the ceramic outer cylinder 2. It is discharged from 8b. At this time, the discharge tries to flow to the outside as much as possible due to the skin effect, but since the resistance becomes larger than that inside the ceramic inner cylinder 1 due to the provision of the spiral passage, the charge injected inside the laser generator is more It is possible to effectively flow into the inside of the ceramic inner cylinder 1 which is the laser generation region.

FIG. 7 shows an embodiment of the eighth invention of the present application.
7A is a sectional view, and FIG. 7B is a perspective view of a main part of FIG. 7A. In this embodiment, a ceramic inner cylinder 1, a ceramic outer cylinder 2 having a passage 12 through which a fluid can flow in and out in the outer circumferential direction,
A metal vapor laser generator including a laser window 4, a vacuum container 3, an electrode 5, a vacuum layer 6, buffer gas inflow / outflow ports 7a, 7b, 8a, 8b, an electrically insulating layer dividing material 9, an insulating cylinder 10, and a power supply 11. Is. The electric energy supplied from the power supply 11 passes through the vacuum container 3 and the electrode 5, and the ceramic inner cylinder 1
It is applied as the discharge energy of the buffer gas and metal vapor inside. The inside of the device is heated by electric discharge to generate metal vapor, and the ceramic outer cylinder 2 and the vacuum layer 6 form a heat retaining structure. The buffer gas flows in through the buffer gas inflow / outflow ports 7a, 8a, and the buffer gas inflow / outflow port 7b,
It is made to flow out from 8b. The impurities generated when the temperature of the ceramic outer cylinder 2 becomes high cause a temperature difference in the radial direction of the ceramic outer cylinder 2 and move to the outside by diffusion. The moved impurities are discharged from the ceramic outer cylinder 2 with the diffusion speed being accelerated by the passage 12 provided in the outer circumferential direction of the ceramic outer cylinder 2.

FIG. 8 shows an embodiment of the ninth invention and the tenth invention of the present application. FIG. 8A is a sectional view and FIG. 8B is FIG.
It is a principal part perspective view of (a). A ninth aspect of the invention is a fluid passage 1.
2 is provided in the main body of the ceramic outer cylinder 2 in the radial direction. In a tenth aspect of the invention, the ceramic outer cylinder 2 is divided into two in a radial direction to have a double structure of an inner outer cylinder 2a and an outer outer cylinder 2b, and the passage 12 formed in the inner outer cylinder 2a and the outer outer cylinder 2b. Are arranged so that they do not overlap each other. That is, in this embodiment, the ceramic inner cylinder 1,
A ceramic outer cylinder 2, a laser window 4, a vacuum container 3, an electrode 5, a vacuum layer 6, a buffer gas inflow / outflow port, which has a double structure divided in two in the radial direction and is formed by cutting out a passage 12 which is a cylindrical hole in the radial direction. The metal vapor laser generator comprises 7a, 7b, 8a, 8b, an electrically insulating layer dividing material 9, an insulating tube 10 and a power supply 11. The electric energy supplied from the power source 11 is applied as discharge energy of the buffer gas and the metal vapor in the ceramic inner cylinder 1 through the vacuum container 3 and the electrode 5. The inside of the device is heated by electric discharge to generate metal vapor, and the ceramic outer cylinder 2 and the vacuum layer 6 form a heat retaining structure. The buffer gas is the buffer gas inflow / outflow port 7
a, 8a, and buffer gas inflow / outflow ports 7b, 8
b. The impurities generated when the temperature of the ceramic outer cylinder 2 becomes high cause a temperature difference in the radial direction of the ceramic outer cylinder 2 and move to the outside by diffusion. The impurities moving at this time are accelerated in diffusion speed by the passage 12 provided in the ceramic outer cylinder 2, gathered outside the ceramic outer cylinder 2, and are discharged from the ceramic outer cylinder 2. Further, since the passages 2 are arranged so as not to overlap each other in the radial direction in the double structure, the circumferential temperature non-uniformity does not occur in the laser generation region.

An eleventh embodiment of the present invention will be described with reference to FIG. FIG. 9 is a longitudinal sectional view of a main part. The present embodiment corresponds to the fluid passage 12 of the ninth aspect of the invention that is formed to be inclined in the radial direction, and that the inner opening 13a and the outer opening 13b of the passage 12 do not overlap on the radial line. It was placed in. Since the passages 2 are arranged so as not to overlap each other in the radial direction in this manner, the effect of discharging the impurities and the effect of not causing the circumferential temperature nonuniformity in the laser generation region can be obtained.

A twelfth invention is the metal vapor laser generator according to any one of the above, wherein the buffer gas inlets 7a, 8a and the outlets 7b, 8b are the passages 12 for the fluid.
Is formed in the vicinity of the inflow port and the outflow port. As a result, the impurities discharged from the ceramic outer cylinder 2 actively flow the buffer gas through the passage 12 provided in the ceramic outer cylinder 2, so that the impurities are not diffused into the laser generation region.

[0034]

According to the present invention, since a hole, that is, a fluid passage, is provided in a ceramic outer cylinder having heat insulation performance, impurities generated from the inside of the ceramic outer cylinder are prevented from flowing out to the laser generation region, and the distance is increased and exhausted. Is possible. As a result, it is possible to prevent the laser output from decreasing and stabilize the output.

[Brief description of drawings]

1 shows an embodiment of a metal vapor laser generator according to the first invention of the present application, FIG. 1 (a) is a sectional view, and FIG. 1 (b) is FIG.
It is the sectional view on the AA line of (a).

2 shows an embodiment of a metal vapor laser generator according to the second invention of the present application, FIG. 2 (a) is a sectional view, and FIG. 2 (b) is FIG.
It is a principal part perspective view of (a).

3 shows an embodiment of a metal vapor laser generator according to the third invention of the present application, FIG. 3 (a) is a sectional view, and FIG. 3 (b) is FIG.
It is a principal part perspective view of (a).

FIG. 4 shows an embodiment of a metal vapor laser generator according to the fourth invention of the present application, FIG. 4 (a) is a sectional view, and FIG. 4 (b) is FIG.
It is a principal part perspective view of (a).

FIG. 5 is a cross-sectional view of essential parts of an embodiment of a metal vapor laser generator according to the sixth invention of the present application.

6 shows an embodiment of a metal vapor laser generator according to the seventh invention of the present application, FIG. 6 (a) is a sectional view, and FIG. 6 (b) is FIG.
It is a principal part perspective view of (a).

7 shows an embodiment of a metal vapor laser generator according to the eighth invention of the present application, FIG. 7 (a) is a sectional view, and FIG. 7 (b) is FIG.
It is a principal part perspective view of (a).

FIG. 8 shows an embodiment of the metal vapor laser generator according to the ninth and tenth inventions of the present application, FIG.
FIG. 8B is a perspective view of a main part of FIG.

FIG. 9 is a longitudinal sectional view of an essential part of an embodiment of a metal vapor laser generator according to the eleventh invention of the present application.

FIG. 10 is a cross-sectional view showing a conventional example of a metal vapor laser generator.

[Explanation of symbols]

 1 Ceramic Inner Cylinder 2 Ceramic Outer Cylinder 3 Vacuum Container 4 Laser Window 5 Electrode 6 Vacuum Layer 7a Buffer Gas Inlet Outlet 7b Buffer Gas Inlet Outlet 8a Buffer Gas Inlet Outlet 8b Buffer Gas Inlet Outlet 9 Electrical Insulation Layer Splitter 10 Insulation cylinder 11 Power supply 12 Fluid passage

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshio Midorikawa 3-2-2 Sachimachi, Hitachi City, Ibaraki Prefecture Hitachi New Clear Engineering Co., Ltd. (72) Inventor Hideki Yamai 3-chome, Saitama Town, Hitachi City, Ibaraki Prefecture 2-2 Hitachi Hitachi Engineering Co., Ltd. (72) Inventor Hiroshi Kameyama 3-2-2, Saiwaicho, Hitachi City, Ibaraki Prefecture Hitachi Nuclear Engineering Co., Ltd.

Claims (12)

[Claims] 1. A metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder provided substantially coaxially with and in contact with the outer surface of the ceramic inner cylinder, wherein a fluid passage has a ceramic outer cylinder main body portion. A metal vapor laser generator characterized in that it is provided so as to penetrate in the axial direction. 2. A metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder provided substantially coaxially with and in contact with the outside of the ceramic inner cylinder, wherein a fluid passage has a ceramic outer cylinder body portion. A metal vapor laser generator, wherein the metal vapor laser generating device is provided with a circumferential passage that is provided so as to penetrate in the axial direction and that communicates with the passage in the axial direction. 3. A metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder provided substantially coaxially with and in contact with the outside of the ceramic inner cylinder, wherein a fluid passage has an outer peripheral surface of the ceramic outer cylinder. A metal vapor laser generator characterized in that it is provided in the axial direction. 4. A metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder provided substantially coaxially with and in contact with the outside of the ceramic inner cylinder, wherein a fluid passage has a ceramic outer cylinder outer peripheral surface. The metal vapor laser generator according to claim 1, further comprising a circumferential passage that is provided in the axial direction and that communicates with the axial passage. 5. A metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder provided substantially coaxially with and in contact with the outside of the ceramic inner cylinder, wherein a fluid passage has a ceramic outer cylinder inner circumference. A metal vapor laser generator characterized in that the surface is provided over the entire length in the axial direction. 6. A metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder provided substantially coaxially with and in contact with the outer surface of the ceramic inner cylinder, wherein a fluid passage has a ceramic outer cylinder inner circumference. A combination of an outer cylinder side groove formed over the entire length in the axial direction on the surface, and an inner cylinder side groove formed over the entire length in the axial direction on the outer peripheral surface of the ceramic inner cylinder facing the outer cylinder side groove. Metal vapor laser generator. 7. The metal vapor laser generator according to claim 5, wherein the fluid passage is provided in a spiral shape. 8. A metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder provided substantially coaxially with and in contact with the outside of the ceramic inner cylinder, wherein a fluid passage has a ceramic outer cylinder outer peripheral surface. A metal vapor laser generator characterized in that the metal vapor laser generator is provided in the circumferential direction. 9. A metal vapor laser generator comprising a ceramic inner cylinder and a ceramic outer cylinder which is provided substantially coaxially with and in contact with the outside of the ceramic inner cylinder, wherein a fluid passage is in the ceramic outer cylinder body. A metal vapor laser generator characterized in that it is provided in the radial direction. 10. The metal vapor laser generator according to claim 9, wherein the ceramic outer cylinder is divided into two in the radial direction to have a double structure of an inner outer cylinder and an outer outer cylinder, and the inner outer cylinder and the outer outer cylinder. The metal vapor laser generator according to claim 1, wherein the passages formed in the cylinder are arranged so as not to overlap each other. 11. The metal vapor laser generator according to claim 9, wherein the fluid passage is formed to be inclined in the radial direction, and the inner surface side opening and the outer surface side opening of the passage do not overlap on the radial line. A metal vapor laser generator characterized in that it is arranged in. 12. The metal vapor laser generator according to claim 1, wherein the buffer gas inlet and outlet are formed in the vicinity of the fluid passage inlet and outlet. Characteristic metal vapor laser generator.