JPH0758002A - Lithographic apparatus driving system - Google Patents

Abstract

PURPOSE:To form various types of lithographic directive files by imposing no burden on an operator as much as possible by a simple structure by a common forming method. CONSTITUTION:A pattern data file input unit 10 and a lithographic directive file forming unit 20 are so composed as to cope with any types in order to deal a plurality of types of lithographic apparatuses A-C with a simple structure. Unified lithographic directive file forming means 21 forms a unified lithographic directive file without respect to the type of the apparatus by a process common for the types of the apparatuses using a lithographic directive file forming data file according to a unified format formed by lithographic directive file forming data file forming means 12, and various type lithographic directive file forming means 22A-22C obtain lithographic directive files of various types of formats from the unified lithographic directive files. Thus, lithographic directive file forming processes are attempted to be made common, a system configuration is simplified, and an operator's burden is alleviated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drawing apparatus driving system, and more particularly to a system for performing a series of processing from the loading of a pattern data file to the driving of drawing on an object to be drawn by the drawing apparatus.

[0002]

2. Description of the Related Art Some integrated circuit manufacturers request the production of photomasks required for their manufacture to other companies that do not perform their own productions. Such an integrated circuit maker stores a pattern data file in a storage medium such as a magnetic tape and provides it to a photomask making maker, for example.
A specification sheet describing the size of the photomask, the layer name related to the photomask, the layout information of one or more pattern data forming the photomask, and the like is provided to request the creation of the photomask.

When the creation is requested in this way, the provided pattern data file is taken in by the pattern data file input device consisting of a personal computer or a workstation equipped with a predetermined peripheral device, and then the predetermined peripheral device is loaded. Drawing instruction file creation device (so-called CAD system,
An editor of the drive control device of the drawing device to be described later: the pattern data file input device may be composed of the same personal computer or the like), and the pattern data is arranged according to the description in the specification sheet and drawn. An instruction file is created, and the drawing instruction file is given to the drive control device of the drawing device, which is a personal computer or a workstation equipped with a predetermined peripheral device, through a communication line or a recording medium,
The drive control device drives and controls the drawing device in accordance with the contents of the drawing instruction file to create the requested photomask.

The pattern data file is information for specifying, for example, the shape of the latent image pattern of a partial section or the entire section of the resist surface, and the drawing instruction file is
It corresponds to each layer of the integrated circuit, and defines which pattern data is used and which position is written on the photomask blank and under what condition.

By the way, the electron beam drawing apparatus used for making the photomask is made by a plurality of manufacturers, and the electron beam drawing apparatuses of the respective makers have different drawing instruction file formats, and the drawing instruction files are different. The format of the pattern data file, which is a component of the file, is also different. 11 (a) and 11 (b) are examples of two types of pattern data files described according to different formats, and FIGS. 11 (c) and 11 (d).
Are examples of two types of drawing instruction files described according to different formats.

The above-described photomask making maker purchases more electron beam drawing apparatuses that can cope with recent high integration of integrated circuits, or prepares a plurality of kinds of electron beam drawing apparatuses so as to meet various requests. I am. That is, it has a plurality of electron beam drawing apparatuses having different drawing instruction file formats (pattern data file formats).

Therefore, as shown in FIG. 12, the pattern data file input device, the drawing instruction file creating device, and the drive control device of the drawing device described above are conventionally separated for each type A, B, and C of the electron beam drawing device. Was configured into.

That is, the electron beam writing apparatus 5 of type A
The drawing device drive system 1A for A is composed of a pattern data file input device 2A corresponding to the type A, a drawing instruction file creation device 3A and a drive control device 4A for the drawing device, and for the type B electron beam drawing device 5B. The drawing device drive system 1B is composed of a pattern data file input device 2B corresponding to the type B, a drawing instruction file creation device 3B, and a drive control device 4B of the drawing device, and a drawing device for a type C electron beam drawing device 5C. The drive system 1C is composed of a pattern data file input device 2C corresponding to the type C, a drawing instruction file creation device 3C, and a drive control device 4C of the drawing device, and for each type A, B, and C of the electron beam drawing device. It was a closed system.

[0009]

In order to cope with such various kinds of electron beam drawing apparatuses, a photomask making maker may decide a dedicated operator for each kind of electron beam drawing apparatus. Conceivable. However, depending on the request situation, busy workers and leisure workers may occur, which is not preferable. Therefore, it is conceivable that one worker can handle all types of electron beam writing apparatuses. However, as described above, each type of electron beam drawing apparatus has a different drawing instruction file format or pattern data file format, and also different drawing instruction file creation methods (rules, etc.). The knowledge that the worker must acquire is enormous and it is not practical.

Therefore, the idea is to construct a single system for all types of electron beam drawing devices. In particular, it is conceivable to create a drawing instruction file that differs greatly depending on the type, regardless of the type.

However, hitherto, no single system capable of coping with such various kinds of electron beam drawing apparatuses has been provided. In order to allow the operator to create a drawing instruction file without being conscious of the type as much as possible, convert some or all information of each type of pattern data file into a certain type of pattern data file and use the same method It is conceivable that all types of electron beam lithography systems can be supported by recreating the drawing instruction file and converting the created drawing instruction file so that it corresponds to each type of electron beam lithography system. The processing unit (program or the like) for is complicated.

The present invention has been made in consideration of the above points, and a drawing apparatus capable of creating each type of drawing instruction file by a common processing method with a simple processing unit configuration without burdening an operator. It is intended to provide a drive system.

[0013]

SUMMARY OF THE INVENTION The present invention provides one or more pattern data file input devices for taking in a pattern data file consisting of information of element patterns of an overall pattern to be drawn on an object to be drawn, and one of the pattern data files. Provided in association with one or more drawing instruction file creation devices that create drawing instruction files that define how to apply at the time of drawing and each drawing device that drives and controls the drawing device based on the drawing instruction file and the pattern data file. The present invention relates to a drawing device drive system capable of driving a plurality of drawing devices of different types.

Then, each pattern data file input device (1) input means for each type of drawing device, which takes in a pattern data file having a different format depending on the type of drawing device, and (2) each input means Drawing instruction file creation data that takes out the information required to create the drawing instruction file from the information included in the pattern data file that is taken in by and draws it according to a common format that does not relate to the type of drawing device. A drawing instruction file creating data file creating means for creating a file, and each drawing instruction file creating device includes (1) pattern data file arrangement processing based on the drawing instruction file creating data file Unified drawing instruction file creating means for performing processing to create a unified drawing instruction file , And having a (2) from the created unified drawing instruction file, the drawing instruction file creating means for each type of drawing device for obtaining a type corresponding drawing instruction file according to the format corresponding to the type of rendering device.

[0015]

According to the present invention, the pattern data file input device and the drawing instruction file creating device are not compatible with each kind of drawing device, but which kind of drawing device so that a plurality of kinds of drawing devices can be handled with a simple configuration. It is configured to be compatible with.

In this case, the internal structures of the pattern data file input device and the drawing instruction file creation device are
If the configuration corresponding to each type of drawing device is simply provided in parallel, there is almost no difference from providing a pattern data file input device or drawing instruction file creation device for each type of drawing device, and There is also no improvement in the operation of the operator.

Therefore, in the present invention, each pattern data file input device takes in a pattern data file having a different format depending on the type of drawing device, in addition to the input means for each kind of drawing device, each of these inputs. For drawing instruction file creation, which takes out the information necessary to create the drawing instruction file from the information contained in the pattern data file fetched by the means and follows a common format that does not relate to the type of drawing device A drawing instruction file creating data file creating means for creating a data file is provided, and each drawing instruction file creating device performs processing including pattern data file arrangement processing based on the drawing instruction file creating data file. Create a unified drawing instruction file, Unified drawing instruction file And forming means, (2) from the created unified drawing instruction file, provided a drawing instruction file creating means for each type of drawing device for obtaining a type corresponding drawing instruction file according to the format corresponding to the type of rendering device.

That is, the unified drawing instruction file creating means in each drawing instruction file creating device follows a common format created by the drawing instruction file creating data file creating means in each pattern data file input device that does not relate to the type of drawing device. By using the drawing instruction file creation data file, a common format unrelated to the drawing apparatus type (mainly pattern data file placement processing) is used to create a drawing instruction file in a uniform format not related to the drawing apparatus type. The drawing instruction file creating means for the type of drawing apparatus obtains the drawing instruction file according to the format according to the type of the drawing apparatus from the unified drawing instruction file, thereby commonizing the creation processing of the drawing instruction file. Simplified configuration and operator burden It was to achieve a reduction.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (A) Overall Configuration and Operation of Embodiments An embodiment of a drawing apparatus drive system according to the present invention will be described in detail below with reference to the drawings.

Here, FIG. 1 functionally shows the overall construction of this embodiment. The drawing apparatus driving system 1 of this embodiment is designed to drive control the electron beam drawing apparatuses A, B, and C for each of the three types, and as shown in FIG. 1, a pattern data file input device 10 and a drawing instruction. File creation device 20, each type of drawing device A, B,
C drive control devices 30A, 30B, 30C are LAN 40
It is configured to be connected via.

The pattern data file input device 10 is
It consists of a personal computer or workstation equipped with peripheral devices such as a keyboard, display, magnetic tape reader, hard disk, etc. Pattern data file input device 1
0 is functionally different (mainly the functions are divided from the software side), and each type of electron beam drawing apparatus A, B, C
The input unit 11A for device A, the input unit 11B for device B, and the input unit 11C for device C, which respectively capture the pattern data files according to the above, a header file generation unit 12 for generating a header file described later, and a generated header file. The header file transfer unit 13 transfers the drawing instruction file creating device 20 (there is also a storage unit for a header file and a pattern data file).

The drawing instruction file creating device 20 is composed of a personal computer, a workstation or the like equipped with a peripheral device such as a keyboard, a mouse, a display and a hard disk.
Functionally (the function is divided mainly from the aspect of software), the drawing instruction file creating device 20 creates a drawing instruction file in a uniform format based on a header file, and a unified drawing instruction file creating unit 21. Drawing instruction file creation unit 22A for device A, drawing instruction file creation unit 22B for device B, drawing for device C that obtains drawing instruction files for the electron beam drawing apparatuses A, B, and C of the target type from the instruction file The instruction file creating unit 22C and the drawing instruction file transfer unit 23 that transfers the created drawing instruction file to the pattern data file input device 10 (there is also a storage unit for various files).

Drive control devices 30A, 30 of the respective drawing devices
Each of B and 30C is a personal computer, a workstation or the like equipped with a peripheral device such as a keyboard, a display and a hard disk. Each drive control device 30A, 30B,
Each of the functional units 30C has a function (mainly the functions are divided from the software side) to transfer and receive a drawing instruction file and a pattern data file related to drawing from the pattern data file input device 10 to receive the file receiving unit 3.
1A, 31B, 31C and a drawing unit 32 for causing the drawing devices A, B, C to execute drawing in accordance with the received file contents.
It is composed of A, 32B and 32C.

Next, the schematic operation of the drawing apparatus drive system 1 having the above-described functional configuration will be described with reference to FIG. 2 in addition to FIG.

For example, A instructed to import a file
The device input unit 11A takes in the device A pattern data file stored in a recording medium such as a magnetic tape into the pattern data file input device 10 (step 1).
00). The header file generation unit 12 linked to each of the input units 11A, 11B, and 11C includes the information necessary for creating the drawing instruction file (for example, the pattern data file Necessary information for arranging on a static photomask blank) and generate a header file according to a unified format that does not relate to the device type (step 1
01). Such a header file is transferred to the drawing instruction file creating device 20 by the header file transfer unit 13 (step 102).

In the drawing instruction file creating device 20,
The unified drawing instruction file creation unit 21 performs 1 or 2 for the virtual photomask blank based on the information of the header file of the unified format which is transferred and internally stored according to the instruction content of the operator regardless of the device type. A unified drawing instruction file is created by deciding the layout of the above pattern data files (step 10).
3). When the unified drawing instruction file is created in this manner, the drawing instruction file 22A for the A device relating to the type of the drawing apparatus A that is the target now follows the unified drawing instruction file according to the format for the drawing apparatus A. To create the final drawing instruction file (step 1
04). The drawing instruction file thus created is transferred to the pattern data file input device 10 by the drawing instruction file transfer unit 23 (step 10).
5).

The operator inputs the specific information of the object to be drawn into, for example, the drive control device 30A for the device A. At this time,
File receiving unit 31A of drive control device 30A for device A
Causes the pattern data file input device 10 to transfer the drawing instruction file relating to the drawing target and the pattern data file related to the drawing instruction file (step 106). The drawing unit 32A inserts the pattern data section of the pattern data file into the layout information of the received pattern data file of the drawing instruction file, determines the position to be irradiated with the electron beam while scanning, and drives the drawing apparatus A. The drawing apparatus A is caused to execute drawing on the drawing target (step 107).

As described above, the header file generator 12
A series of drawing operations are executed while utilizing a functional unit that operates regardless of the device type, such as the unified drawing instruction file creating unit 21.

(B) Pattern data file input device 1
Details of 0 Next, details of the pattern data file input device 10 will be described in detail with reference to the drawings.

FIG. 3 schematically shows the hardware configuration of the pattern data file input device 10. The pattern data file input device 10 includes a central processing unit (CPU: a program memory is included here) 50, a working memory 51, and a pattern data file input device (magnetic tape reader) 52.
A user interface device (keyboard, display, etc.) 53, a hard disk device 54,
It is composed of a communication control circuit 55.

The CPU 50 has an A device input program 50a, a B device input program 50b, a C device input program 50c, and a header file generation program 5.
0d and a header file transfer program 50e are installed. The hard disk device 54 also has storage areas 54a, 54b, and 54c for the pattern data file, the header file, and the drawing instruction file.

FIG. 4 is an explanatory diagram of the pattern data file. 4A shows an image of the pattern data file, and FIG. 4B shows the data structure of the pattern data file.

As shown in FIG. 4 (a), the pattern data file has a rectangular area R0 having a specific size and an area R1 to which an electron beam is irradiated by the drawing device (A, B or C) and an irradiation area. The area R2 which is not covered is clarified together with information such as the minimum position accuracy (address size: usually, it corresponds to the spot diameter of the irradiation electron beam). The size of the area R0 is defined by vertical and horizontal lengths (window size: drawing area limit) X and Y. Then, as shown in FIG. 4B, the pattern data file includes a header part HEA and a data part DAT.
The position data of the region R1 irradiated with the electron beam (or the region R2 not irradiated with the electron beam) is inserted into the header HEA, and data other than this position data, for example,
The pattern data file name, address size, window size, etc. are inserted.

The format of the pattern data file differs depending on the device types A, B, and C, but any pattern data file has a header part HEA and a data part DA.
The header portion HEA is made up of various information as described above.
And inserted into the data section DAT.

FIG. 5 shows a header file generated by the pattern data file input device 10. Each header file has a uniform format that is unrelated to the device type, and at least the pattern data file name, the address size, and the window size are the constituent information. These data are the minimum data necessary for the process of arranging the pattern data file on the photomask blank as the drawing target. To create the drawing instruction file, data other than the data necessary for the layout process is also necessary. If the pattern data file has data other than the above-mentioned data that is necessary to create the drawing instruction file, include these data in the header file as well. You can

As described above, the conversion conforming to the unified format is performed only on the predetermined information in the header part, and the header part has a capacity of about 1% of the data part.
The conversion is easier than when converting the entire pattern data file so as to follow the unified format.

From the photomask making requester, the pattern data file 56 having the above-mentioned data structure is recorded on a recording medium (for example, magnetic tape) and supplied.

FIG. 6 shows the processing procedure of the pattern data file input device 10 (including operator's operation).

After loading the supplied recording medium into the pattern data file input device (magnetic tape reading device) 52, the operator specifies the device type and reads it using the user interface device (keyboard) 53. Instruct (step 110). At this time, C
The PU 50 is an input program (50 for the instructed device).
a, 50b or 50c is executed, the pattern data file input device (magnetic tape reader) 52 is caused to read, and the read pattern data file is stored in the pattern data file storage area 54a of the hard disk device 54 (step 111). ).

The operator uses the user interface device (keyboard) 53 to instruct the generation of the header file (step 112). At this time, CPU5
0 executes the header file generation program 50d, extracts the data (pattern data file name, address size, window size, etc.) to be included in the header file from the pattern data file, and converts the data so as to follow the unified format. A header file is generated and stored in the header file storage area 54b of the hard disk device 54 (steps 113 and 11).
4). Note that the header file generation program 50d
Is a part corresponding to each device type for extracting and converting predetermined data, and a part common to each device type for arranging and storing the data according to the format of the header file.

When a header file for each pattern data file instructed in this way is generated and stored in the hard disk device 54, the CPU 50 automatically or based on an instruction from the operator, a header file transfer program. 50e is started, and each header file recorded in the header file storage area 54b in the hard disk device 54 is transferred to the drawing instruction file creating device 20 under the control of the communication control circuit 55 (step 115).

The operator may add information necessary for creating the drawing instruction file such as the layer name and the chip name to the header file by using the user interface device (keyboard) 53.

(C) Details of Drawing Instruction File Creating Device 20 Next, a drawing instruction file creating device that receives a header file from the pattern data file input device 10 and sends the created drawing instruction file to the pattern data file input device 10 Details of 20 will be described in detail with reference to the drawings.

FIG. 7 schematically shows the hardware configuration of the drawing instruction file creating apparatus 20. The drawing instruction file creating device 20 includes a central processing unit (CPU:
Here, it is assumed that the program memory is included) 60,
Working memory 61 and user interface device (mouse, keyboard, display, etc.) 62
And a hard disk device 63 and a communication control circuit 64.

The CPU 60 has a unified drawing instruction file creation program (for example, a type of CAD program) 60.
a, A device file conversion program 60b, B device file conversion program 60c, C device file conversion program 60d, and file transfer program 60e
Is installed. Further, the hard disk device 63 is
It has storage areas 63a and 63b for the header file and the drawing instruction file.

FIG. 8 shows a processing procedure of the drawing instruction file creating apparatus 20 (including operator's operation). Further, FIG. 9 shows a display example of the display screen at the time of the arrangement processing of the pattern data file, and FIG. 10 is an explanatory diagram of the drawing instruction file.

The processing in the drawing instruction file creating apparatus 20 will be described below with reference mainly to FIG. 8 and, if necessary, FIGS. 9 and 10.

The CPU 60 which recognizes the arrival of the header file output from the pattern data file input device 10 to the LAN 40 by the notification from the communication control circuit 64.
Sequentially stores the arrived header files in the header file storage area 63a of the hard disk device 63 (step 120).

In the state where the header file relating to the pattern data file to be arranged in this way is stored in the hard disk device 63, the operator gives an instruction to start the pattern data file arrangement process by using, for example, a keyboard. The CPU 60 starts the unified drawing instruction file creation program 60a (step 1
21). Then, for example, first, a bibliographical information such as a mask size that defines the size of the photomask blank to be written, and a layer name that defines which layer of which semiconductor product the photomask blank to be written relates to The operator is prompted by the display to enter items (the device type may be entered at this time), and in response to this, the information entered using the keyboard is taken in, and part or all of the taken information is taken. The display is confirmed (step 122). The mask size and the layer name thus fetched are stored in the working memory 61.

Regarding such bibliographical items and information such as the arrangement position of the pattern data file described later,
It is given by the requester of the photomask creation, for example, by a specification sheet made of non-electronic paper.

The CPU 60 displays on the display screen a pseudo-photomask blank surface corresponding to the mask size and having a clear coordinate system in a window (step 123), and at the same time, the pattern data file name and the layout position relating to the layout. Prompts the operator to
In response, the operator takes in the pattern data file name and layout position designated by the keyboard or mouse, and updates the window display contents on the surface of the pseudo photomask blank according to the taken information and the information in the header file. At the same time, the information to be included in the drawing instruction file is determined and stored in the working memory 61 (12
4, 125). Such arrangement input processing is repeated until the end of arrangement input is instructed (step 12).
6).

An example of the layout input process will be described more specifically. Given the pattern data file name, the CPU
The reference numeral 60 extracts the header file having the file name from the hard disk device 63, recognizes the window size, and makes a rectangular area having the window size coincide with a cursor at a predetermined point such as the center or any corner. As described above, the pseudo-photomask blank surface is displayed, and the coordinate values of the predetermined points are also displayed. When the cursor is moved by the mouse, these are updated and displayed.
Then, when the mouse is clicked, the display of the rectangular area and the coordinate value of the predetermined point is fixed, and the pattern data file name and the address included in the header file are determined as the arrangement of the pattern data file is confirmed. The size and the coordinate value of the predetermined point (arrangement coordinate) are organized and stored in the working memory 61 as a set of information. Information of each set is organized and stored in association with bibliographical information such as mask size and layer name.

The information obtained when the layout input is completed can be regarded as a drawing instruction file in a unified format that does not relate to the device type.

When the header file includes information such as layer name, it is confirmed by the layer name or the like whether or not the file having the designated pattern data file name is the placement target. Is also good.

In FIG. 9, the pattern data file name is AA.
AAAAA. AA and BBBBBBB. It is an example of a display screen when the arrangement of two pattern data files of BB is confirmed. As shown in FIG. 9, the window sizes of these pattern data files are superimposed and displayed on the pseudo photomask blank PHO.

When the end of the layout input is instructed, the CPU 6
0 takes in the device type (or recognizes the device type if it has already been input when inputting bibliographic items), starts the file conversion program 60b, 60c or 60d for that device type, and starts working. The bibliographical information such as the mask size and the layer name stored in the memory 61, and the pattern data file name, the address size and the predetermined point coordinate value (arrangement coordinate) stored in association with this information,
The drawing instruction file is converted so as to conform to the format of the drawing instruction file for the device type, and a final drawing instruction file is created and stored in the hard disk device 63 (step 12).
7).

Thus, although the format differs depending on the type of the apparatus, as shown in FIG. 10, in addition to the bibliographical information such as the photomask size and the layer name, the pattern data file name, the address size and the arrangement coordinates are included. A drawing instruction file similar to that created by the conventional system can be obtained.

When the drawing instruction file for a certain device type is created and stored in the hard disk device 63 as described above, the CPU 60 starts the file transfer program 60e automatically or based on the operator's instruction. Then, the drawing instruction file recorded in the hard disk device 63 is transferred to the pattern data file input device 20 under the control of the communication control circuit 64 (step 128).

Since the structures and operations of the drawing devices A, B, C and their drive control devices 30A, 30B, 30C are the same as the conventional ones, detailed description thereof will be omitted.

(D) Effects of the Embodiment As described above, according to the above embodiment, the information necessary for creating the drawing instruction file such as the minimum necessary information for arranging the pattern data file is included. Since a header file that follows a uniform format that is independent of the device type is created and a unified drawing instruction file is created (mainly pattern data file placement processing) using the information in that header file It is possible to make the drawing instruction file creation operation, which was greatly different depending on the device type, irrespective of the device type, and the operator does not need to know all the formats of the device of multiple types,
The burden on the operator can be reduced, and even an operator with a low degree of skill can easily perform the work of arranging the pattern data file.

Further, according to the above-described embodiment, in the drawing instruction file creating process, the necessary information is obtained not from the pattern data file itself but from the header file. Therefore, the drawing instruction file is created. The storage capacity in the drawing instruction file creation device 20 required for processing can be markedly reduced compared to the conventional case (for example, 1 /
(About 100). As a result, it is possible to reduce the cost and occupied space of the disk device viewed from the entire system, as compared with the conventional system.

Further, according to the above-described embodiment, since the header file is created and the unified drawing instruction file is created using this header file, there are many programs that are common to the device types, and there are many programs for each device type. The software configuration can be simplified as compared with the case where the processing programs are simply aggregated.

(E) Other Embodiments In the above embodiment, one pattern data file input device and one drawing instruction file creation device are shown, but two or more devices may be provided.

Further, in the above embodiment, the pattern data file input device and the drawing instruction file creating device are constituted by separate information processing devices (for example, personal computers), but the same information processing device is used as a pattern. The data file input device and the drawing instruction file creation device may be selectively used.

Further, in the above embodiment, the pattern data file input device, the drawing instruction file creating device and the drive control device are connected by the LAN. However, information is recorded between each device by a recording medium such as a floppy disk. May be given and received.

Furthermore, in the above embodiment, the drawing device is an electron beam drawing device, but it may be an optical drawing device. The object to be drawn is not limited to the photomask blank, but may be a wafer (in this case, direct drawing is adopted). Drawing is not limited to scanning drawing, and irradiation collective drawing may be used in an optical drawing apparatus or the like.

In the above embodiment, each type of drawing device is shown as one, but two or more drawing devices of the same type may be provided.

[0068]

As described above, according to the present invention, a pattern data file input device and a drawing instruction file creating device are provided in common to a plurality of types of drawing devices, and the pattern data file input device creates a pattern data file. At the time of importing, of the information contained in the imported pattern data file, the information necessary to create the drawing instruction file is extracted and a drawing instruction file creation data file is created. Based on the above, a unified drawing instruction file that does not relate to the type of drawing device is created, and this unified drawing instruction file is converted to a drawing instruction file for each device type. It is possible to realize a drawing device drive system capable of creating each kind of drawing instruction file with various processing unit configurations.

[Brief description of drawings]

FIG. 1 is a block diagram showing an overall configuration of a drawing apparatus drive system according to an embodiment.

FIG. 2 is a flowchart showing a schematic overall process of an embodiment.

FIG. 3 is a block diagram showing a configuration of a pattern data file input device according to an embodiment.

FIG. 4 is an explanatory diagram of a pattern data file.

FIG. 5 is an explanatory diagram of a header file.

FIG. 6 is a flowchart showing processing of the pattern data file input device of the embodiment.

FIG. 7 is a block diagram showing a configuration of a drawing instruction file creating apparatus according to an embodiment.

FIG. 8 is a flowchart showing a process of the drawing instruction file creating device according to the embodiment.

FIG. 9 is an explanatory diagram showing a display example of a display screen at the time of arrangement processing of a pattern data file.

FIG. 10 is an explanatory diagram of a drawing instruction file.

FIG. 11 is an explanatory diagram showing a variety of formats of pattern data files and the like.

FIG. 12 is a block diagram showing a conventional configuration.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Drawing device drive system, A, B, C each kind of drawing device, 10 Pattern data file input device, 11A, 11B, 11C Each kind of drawing device input part (input means), 12 Header file generation part (drawing instruction File creation data file creating means), 20 drawing instruction file creating device, 21 unified drawing instruction file creating unit (creating means), 22A, 22B, 22C drawing instruction file creating unit (creating means) for each type of drawing device, 30A , 30B, 30C drive control device.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takeshi Noguchi 2-7-5 Nakaochiai, Shinjuku-ku, Tokyo Inside Hoya Co., Ltd. (72) Shinichi Murata 2-7-5 Nakaochiai, Shinjuku-ku, Tokyo Hoya Co., Ltd. (72) Inventor Satoshi Yamamoto 2-7-5 Nakaochiai, Shinjuku-ku, Tokyo Hoya Co., Ltd.

Claims (1)

[Claims] 1. A one or more pattern data file input device for taking in a pattern data file consisting of information of an entire pattern to be drawn on an object to be drawn or its element pattern, and a method of applying each pattern data file at the time of drawing. One or more drawing instruction file creating devices that create specified drawing instruction files, and a drive control device that is provided corresponding to each drawing device that drives and controls the drawing device based on the drawing instruction file and the pattern data file. A pattern writing device driving system capable of driving a plurality of pattern writing devices of different types, wherein each pattern data file input device fetches a pattern data file having a different format depending on the type of pattern writing device. The input means for the device and the pattern data captured by each of these input means A drawing instruction file that takes out the information required to create a drawing instruction file from the information contained in the data file and creates a drawing instruction file creation data file that follows a common format that does not relate to the type of drawing device. A drawing data file creating means, wherein each of the drawing instruction file creating devices performs a process including a layout process of the pattern data file on the basis of the drawing instruction file creating data file to obtain a unified drawing instruction file. And a drawing instruction file creating means for each type of drawing device that obtains a type corresponding drawing instruction file that complies with the format according to the type of drawing device from the created uniform drawing instruction file. A drawing apparatus drive system characterized by having.