JPH0751273B2 - Substrate heating device - Google Patents

Substrate heating device

Info

Publication number
JPH0751273B2
JPH0751273B2 JP63005150A JP515088A JPH0751273B2 JP H0751273 B2 JPH0751273 B2 JP H0751273B2 JP 63005150 A JP63005150 A JP 63005150A JP 515088 A JP515088 A JP 515088A JP H0751273 B2 JPH0751273 B2 JP H0751273B2
Authority
JP
Japan
Prior art keywords
heating
hot air
chamber
exhaust port
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63005150A
Other languages
Japanese (ja)
Other versions
JPH01181966A (en
Inventor
直樹 鈴木
裕之 中
友英 広野
高畤 一柳
進 斉藤
孝夫 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63005150A priority Critical patent/JPH0751273B2/en
Publication of JPH01181966A publication Critical patent/JPH01181966A/en
Publication of JPH0751273B2 publication Critical patent/JPH0751273B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Tunnel Furnaces (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は回路基板上に塗布したクリーム半田を加熱溶融
して、電子部品を半田付けするための加熱装置に関する
ものである。
TECHNICAL FIELD The present invention relates to a heating device for soldering electronic parts by heating and melting cream solder applied on a circuit board.

従来の技術 家電製品に代表される様に、プリント基板(以下「P
板」と略記する。)上への電子部品の高密度実装技術に
おいて、リフロー炉を用いた素子の半田付工法が採用さ
れつつある。ここでは、このリフロー炉による半田付工
法を例に本加熱方法について説明する。リフロー工法
は、これまでの溶融ハンダ槽に素子の載ったP板をディ
ップするフロー工法と異なり、半田の微細粒子と、ペー
ストから成るクリーム状半田をP板の所定位置に塗布し
た後に素子を置き、赤外線により加熱溶融させて、半田
付けするというものである。
Conventional technology Printed circuit boards (hereinafter referred to as “P
It is abbreviated as “board”. ) In the high-density mounting technology of electronic parts on top, the soldering method of the element using the reflow furnace is being adopted. Here, the main heating method will be described by taking the soldering method using the reflow furnace as an example. The reflow method is different from the conventional flow method in which the P plate on which the element is placed is dipped in the molten solder bath, and the element is placed after the creamy solder consisting of fine solder particles and paste is applied to the P plate at a predetermined position. It is heated and melted by infrared rays and soldered.

以下図面を参照しながら、上述した従来の基板加熱装置
の一例について説明する。
An example of the conventional substrate heating apparatus described above will be described below with reference to the drawings.

第3図は、従来の基板加熱装置の概略構成を示す。第3
図において、1はコンベアで、2はP板、3は発熱体、
4は加熱室、5は冷却ファンである。加熱室4はトンネ
ル状でかつ内部が水平方向に空洞となっており、加熱室
4の上部に発熱体3が設置されていて加熱室4内をP板
2搬送用のコンベア1が走行するようになっている。
FIG. 3 shows a schematic structure of a conventional substrate heating apparatus. Third
In the figure, 1 is a conveyor, 2 is a P plate, 3 is a heating element,
Reference numeral 4 is a heating chamber, and 5 is a cooling fan. The heating chamber 4 has a tunnel shape and a hollow inside in the horizontal direction. The heating element 3 is installed on the upper part of the heating chamber 4 so that the conveyor 1 for transporting the P plate 2 travels in the heating chamber 4. It has become.

以上のように構成された基板加熱装置について、以下そ
の動作を説明する。一定速度vで動くコンベア1上で、
素子を載せたP板2は、一定の熱量を発生し続ける発熱
体3により加熱される。炉の前の前半部Aは予熱部で、
通常150℃前後にP板2を暖める。次いでB部で約250℃
に加熱し、半田付けを行い、その後、冷却ファン5で冷
却して取り出す。
The operation of the substrate heating device configured as described above will be described below. On the conveyor 1 that moves at a constant speed v,
The P plate 2 on which the element is placed is heated by the heating element 3 which continues to generate a certain amount of heat. The first half A in front of the furnace is the preheating section,
Normally, warm P board 2 around 150 ° C. Next, about 250 ° C in part B
Then, it is soldered, then cooled by the cooling fan 5 and taken out.

発明が解決しようとする課題 しかしながら上記のような構成では、加熱室4外の雰囲
気からの加熱室4内への逆流あるいは、冷却ファン5に
よる加熱室4内への大気温度の雰囲気の逆流等が起こ
り、加熱室4内の温度不均一が発生し、部分的に半田付
けができない半田付不良が生じるという問題があった。
実際、熱電対を高温半田で固着されたP板2の温度を測
定すると均一性は±4%であった。また、発熱体3の調
整により、予熱部Aと半田付け加熱部Bをそれぞれ所定
の温度に保つことは非常に困難であった。
However, in the above-described configuration, there is a backflow from the atmosphere outside the heating chamber 4 into the heating chamber 4, or a backflow of the atmospheric temperature atmosphere into the heating chamber 4 due to the cooling fan 5 or the like. Then, the temperature in the heating chamber 4 becomes non-uniform, and there is a problem that a soldering failure in which soldering cannot be performed partially occurs.
Actually, when the temperature of the P plate 2 to which the thermocouple was fixed with the high temperature solder was measured, the uniformity was ± 4%. Moreover, it was very difficult to maintain the preheating part A and the soldering heating part B at predetermined temperatures by adjusting the heating element 3.

本発明は上記問題点に鑑み、加熱室内の温度均一性を向
上させ、予熱部、半田付け部をそれぞれ所定の温度に保
つ手段を設けることにより、半田付不良の改善と素子品
質の安定を図ることができる基板加熱装置を提供するも
のである。
In view of the above problems, the present invention improves temperature uniformity in the heating chamber and provides means for keeping the preheating portion and the soldering portion at predetermined temperatures, thereby improving soldering failure and stabilizing element quality. The present invention provides a substrate heating device capable of performing the above.

課題を解決するための手段 上記問題点を解決するために本発明は加熱手段を有した
トンネル状の加熱室と、基板を前記加熱室内で搬送する
ことができる手段とを有した基板加熱装置において、2
ヶ所から異なった温度の熱風を供給する熱風供給口を有
し、前記2ヶ所の熱風供給口の間に搬送される基板を阻
止しない範囲で対向する一対の仕切板を有し、前記仕切
板の間に排気口を有するものである。
Means for Solving the Problems In order to solve the above problems, the present invention relates to a substrate heating apparatus having a tunnel-shaped heating chamber having a heating unit, and a unit capable of transporting a substrate in the heating chamber. Two
There are hot air supply ports for supplying hot air of different temperatures from different locations, and a pair of partition plates facing each other is provided between the two hot air supply ports so as not to impede the conveyed substrate, and between the partition plates. It has an exhaust port.

作用 本発明は、加熱室に搬送基板を阻止しない範囲で対向す
る一対の仕切板を設け、仕切板を境として、各加熱室に
異なった所定の温度の熱風を供給することにより、各加
熱室の雰囲気温度を異なった所定の温度に保つことがで
きる。また仕切板を境として、仕切板間に排気口を設け
ることにより、各加熱室の所定の雰囲気温度による相互
作用を減少させることができ、よりいっそう各加熱室を
所定の温度に保つことができる。
Action The present invention provides the heating chambers with a pair of partition plates facing each other within a range that does not block the transfer substrate, and supplies hot air of different predetermined temperatures to the heating chambers with the partition plates as a boundary. The ambient temperature can be maintained at different predetermined temperatures. Further, by providing an exhaust port between the partition plates with the partition plate as a boundary, it is possible to reduce the interaction due to the predetermined ambient temperature of each heating chamber, and it is possible to further maintain each heating chamber at the predetermined temperature. .

実施例 以下本発明の一実施例の基板加熱装置について、図面を
参照しながら説明する。
Embodiment A substrate heating apparatus according to an embodiment of the present invention will be described below with reference to the drawings.

第1図は本発明の第1の実施例における基板加熱装置を
示すものである。
FIG. 1 shows a substrate heating apparatus according to the first embodiment of the present invention.

第1図において、6は予備加熱室、7は半田付加熱室、
8は仕切板、9は熱風供給口、10は発熱体、11はP板、
12は搬送コンベア、13は冷却ファンである。
In FIG. 1, 6 is a preheating chamber, 7 is a soldering heat chamber,
8 is a partition plate, 9 is a hot air supply port, 10 is a heating element, 11 is a P plate,
12 is a conveyor and 13 is a cooling fan.

以上のように構成された基板加熱装置について、以下そ
の動作を説明する。
The operation of the substrate heating device configured as described above will be described below.

まずクリーム半田を塗布したチップ実装P板11は搬送コ
ンベア12に載せられ、予備加熱室6に送られ、発熱体10
によって150℃前後に加熱される。次に半田付加熱室7
に送られ、発熱体10及び熱風供給口9から供給される25
0℃前後の熱風によって、P板は約250℃に加熱され、最
終的には冷却ファン13によって冷却され、取り出され
る。
First, the chip-mounted P board 11 to which cream solder is applied is placed on the conveyor 12 and sent to the preheating chamber 6 to generate the heating element 10.
It is heated to around 150 ℃. Next, the solder addition heat chamber 7
And is supplied from the heating element 10 and the hot air supply port 9 25
The P plate is heated to about 250 ° C. by hot air around 0 ° C., and finally cooled by the cooling fan 13 and taken out.

以上のように本実施例によれば、一定温度の熱風を加熱
室に供給することにより、気流の流れとして、半田付加
熱室7内から半田付加熱室7外へと流れ、半田付加熱室
7内へ外気が流れ込むことがないため、半田付加熱室内
の温度均一化を図ることができる。また所定の温度の熱
風を供給することにより、所定の温度に半田付加熱室7
を保つことができ、温度不均一による半田不良率を低減
することができる。
As described above, according to the present embodiment, by supplying hot air having a constant temperature to the heating chamber, the air flow flows from inside the solder addition heat chamber 7 to outside the solder addition heat chamber 7, and the solder addition heat chamber 7 Since the outside air does not flow into the inside of the solder 7, the temperature in the solder addition heat chamber can be made uniform. Further, by supplying hot air at a predetermined temperature, the solder addition heat chamber 7 is brought to a predetermined temperature.
Can be maintained, and the defective solder rate due to uneven temperature can be reduced.

実際、P板11に熱電対を高温半田に固着して温度を測定
すると、均一性は±1.5%に向上した。
Actually, when the thermocouple was fixed to the P plate 11 with the high temperature solder and the temperature was measured, the uniformity was improved to ± 1.5%.

次に、本発明の第2の実施例について、図面を参照しな
がら説明する。
Next, a second embodiment of the present invention will be described with reference to the drawings.

第2図は本発明の第2の実施例における基板加熱装置を
示すものである。
FIG. 2 shows a substrate heating apparatus according to the second embodiment of the present invention.

第2図において,14は予備加熱室、15は半田付加熱室、1
6は仕切板、17は第一熱風供給口、18は第二熱風供給
口、19は発熱体、20はP板、21は搬送コンベア、22は冷
却ファン、23は上部排気口、24は下部排気口である。
In FIG. 2, 14 is a preheating chamber, 15 is a soldering heat chamber, 1
6 is a partition plate, 17 is a first hot air supply port, 18 is a second hot air supply port, 19 is a heating element, 20 is a P plate, 21 is a conveyor, 22 is a cooling fan, 23 is an upper exhaust port, and 24 is a lower part. It is an exhaust port.

以上のように構成された基板加熱装置について、以下そ
の動作を説明する。
The operation of the substrate heating device configured as described above will be described below.

まずクリーム半田を塗布したチップ実装P板20は、搬送
コンベア21に載せられ、予備加熱室14に送られる。発熱
体19及び、第二熱風供給口18から供給される約150℃1m/
sの熱風によって予備加熱室14内には、約150℃前後の雰
囲気の均熱ゾーンが形成されており、P板20も、予備加
熱室14内で約150℃に均一に加熱される。次に半田付加
熱室15に搬送され、発熱体19及び、第一熱風供給口17か
ら供給される約230℃,1m/sの熱風によって形成された均
熱ゾーン内で、P板20は約250℃に加熱される。その
後、冷却ファン22で冷却され取り出される。また、予備
加熱室14と半田付加熱室15の各々に異なった温度の熱風
を供給しているため、互いの雰囲気の影響を少なくする
ために、上部排気口23(排気速度0.5m/sと下部排気口24
(排気速度0.5m/s)で排気を行なっている。
First, the chip mounting P board 20 coated with cream solder is placed on the conveyor 21 and sent to the preheating chamber 14. About 150 ° C 1m / that is supplied from the heating element 19 and the second hot air supply port 18
The hot air of s forms a soaking zone of an atmosphere of about 150 ° C. in the preheating chamber 14, and the P plate 20 is also uniformly heated to about 150 ° C. in the preheating chamber 14. Next, the P plate 20 is transported to the solder addition heat chamber 15 and is heated in the heat equalizing zone formed by the heating element 19 and the hot air of about 230 ° C. and 1 m / s supplied from the first hot air supply port 17 It is heated to 250 ° C. Then, it is cooled by the cooling fan 22 and taken out. Further, since hot air of different temperature is supplied to each of the preheating chamber 14 and the solder addition heat chamber 15, in order to reduce the influence of each other's atmosphere, the upper exhaust port 23 (exhaust speed 0.5 m / s and Lower exhaust port 24
Exhaust is performed at (exhaust speed 0.5m / s).

以上のように本実施例によれば、予備加熱室14と半田付
加熱室15の間に仕切板16を設け、予備加熱室14と半田付
加熱室15にそれぞれに異なった所定の温度の熱風を供給
することにより、各加熱室の雰囲気温度を異なった所定
の温度に保つことができ、また熱風送風の効果により均
熱な領域を拡大することができる。また、仕切板16を境
として、仕切板16近傍に上部排気口23と下部排気口24を
設けることにより、予熱加熱室14と半田付加熱室15の所
定の雰囲気温度による相互作用を減少させることがで
き、よりいっそう加熱室を所定の温度に保つことができ
る。
As described above, according to the present embodiment, the partition plate 16 is provided between the preheating chamber 14 and the solder addition heat chamber 15, and the preheating chamber 14 and the solder addition heat chamber 15 have hot air of different predetermined temperatures. By supplying the above, it is possible to maintain the ambient temperature of each heating chamber at different predetermined temperatures, and it is possible to expand the soaking region by the effect of hot air blowing. Further, by providing the upper exhaust port 23 and the lower exhaust port 24 in the vicinity of the partition plate 16 with the partition plate 16 as a boundary, it is possible to reduce the interaction between the preheating heating chamber 14 and the solder addition heat chamber 15 due to a predetermined ambient temperature. Therefore, the heating chamber can be maintained at a predetermined temperature.

次に、本発明の第3の実施例について、図面を参照しな
がら説明する。
Next, a third embodiment of the present invention will be described with reference to the drawings.

第3の実施例における基板加熱装置は、第2の実施例の
第2図と全く同じ構造であり、違うのは、上部排気口23
の排気速度は0.2m/s、下部排気口24の排気速度は0.8m/s
であることである。
The substrate heating apparatus in the third embodiment has exactly the same structure as that of FIG. 2 of the second embodiment, except that the upper exhaust port 23
Has an exhaust speed of 0.2 m / s and the lower exhaust port 24 has an exhaust speed of 0.8 m / s
Is to be.

この場合の基板加熱装置について、以下その動作を説明
する。
The operation of the substrate heating device in this case will be described below.

動作は第2の実施例と同じであるが、違うのは、第一熱
風供給口17(温度230℃,流入速度1m/s)と第二熱風供
給口18(温度150℃,流入速度1m/s)から供給される熱
風の気流流れを乱さないため、上部排気口22の排気速度
を0.2m/s,下部排気口24の排気速度を0.8m/sとしたこと
にある。
The operation is the same as that of the second embodiment, except that the first hot air supply port 17 (temperature 230 ° C., inflow speed 1 m / s) and the second hot air supply port 18 (temperature 150 ° C., inflow speed 1 m / s) In order not to disturb the flow of hot air supplied from (s), the exhaust speed of the upper exhaust port 22 is set to 0.2 m / s and the exhaust speed of the lower exhaust port 24 is set to 0.8 m / s.

以上のように第3の実施例について、予備加熱室14と半
田付加熱室15の間に仕切板を設け、予備加熱室14と半田
加熱室15それぞれに異なった所定の温度の熱風を供給す
ることにより、各加熱室の雰囲気温度を異なった所定の
温度に保つことができ、また熱風送風の効果により均熱
な領域を拡大することができる。また仕切板16を境とし
て、仕切板16近傍に上部排気口23と下部排気口24を設
け、上部排気口23の排気速度より下部排気口24の排気速
度を大きくすることにより、供給された熱風の流れを乱
すことなく、予備加熱室14と半田付加熱室15の所定の雰
囲気温度による相互作用を減少させることができ、より
いっそう予備加熱室14と半田付加熱室15をそれぞれ所定
の温度に保つことができる。
As described above, in the third embodiment, a partition plate is provided between the preheating chamber 14 and the solder addition heating chamber 15, and hot air having different predetermined temperatures is supplied to the preheating chamber 14 and the solder heating chamber 15, respectively. As a result, the ambient temperature of each heating chamber can be maintained at different predetermined temperatures, and the uniform heating area can be expanded by the effect of hot air blowing. Also, with the partition plate 16 as a boundary, an upper exhaust port 23 and a lower exhaust port 24 are provided in the vicinity of the partition plate 16, and the exhaust speed of the lower exhaust port 24 is made higher than the exhaust speed of the upper exhaust port 23 to supply the hot air supplied. It is possible to reduce the interaction between the preheating chamber 14 and the solder addition heat chamber 15 due to the predetermined ambient temperature without disturbing the flow of the heat treatment, and to further bring the preheating chamber 14 and the solder addition heat chamber 15 to the predetermined temperatures. Can be kept.

なお、本発明の第二及び第三の実施例において、上部排
気口23と下部排気口24としたが、下部排気口24のみでも
良い。
Although the upper exhaust port 23 and the lower exhaust port 24 are used in the second and third embodiments of the present invention, only the lower exhaust port 24 may be used.

又、本発明の発熱体10,19は上部のみとしたが、上下両
放から加熱しても良い。
Further, although the heating elements 10 and 19 of the present invention are provided only in the upper part, they may be heated from both upper and lower sides.

又、本発明の第一,第二及び第三の実施例において、P
板冷却用に冷却ファン13,22を取り付けたが、無くても
良い。
In the first, second and third embodiments of the present invention, P
Although the cooling fans 13 and 22 are attached for cooling the plate, they may be omitted.

また、これまで基板のリフロー半田付けを例に説明した
が、この内容は一般の任意の基板加熱に適用できること
は言うまでもない。
Also, the reflow soldering of the substrate has been described as an example, but it goes without saying that this content can be applied to any general substrate heating.

発明の効果 本発明によれば、加熱室に搬送基板を阻止しない範囲で
対抗する一対の仕切板を設け、仕切板を境として、各加
熱室に異なった所定の温度の熱風を供給することによ
り、各加熱室の雰囲気温度を異なった所定の温度に保つ
ことができる。また仕切板を境として、仕切板間に排気
口を設けることにより、各加熱室の所定の雰囲気温度に
よる相互作用を減少させることができ、よりいっそう各
加熱室を所定の温度に保つことができる。
EFFECTS OF THE INVENTION According to the present invention, the heating chamber is provided with a pair of partition plates that oppose each other within a range that does not block the transfer substrate, and the partition plates serve as boundaries to supply hot air of different predetermined temperatures to each heating chamber. The ambient temperature of each heating chamber can be maintained at different predetermined temperatures. Further, by providing an exhaust port between the partition plates with the partition plate as a boundary, it is possible to reduce the interaction due to the predetermined ambient temperature of each heating chamber, and it is possible to further maintain each heating chamber at the predetermined temperature. .

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の第一の実施例における基板加熱装置の
断面図、第2図は本発明の第二の実施例における基板加
熱装置の断面図、第3図は従来の基板加熱装置の断面図
である。 6,14……予備加熱室、7,15……半田加熱室、8,16……仕
切板、9……熱風供給口、17……第一熱風供給口、18…
…第二熱風供給口、10,19……発熱体、11,20……P板、
12,21……搬送コンベア、23……上部排気口、24……下
部排気口。
FIG. 1 is a sectional view of a substrate heating apparatus in a first embodiment of the present invention, FIG. 2 is a sectional view of a substrate heating apparatus in a second embodiment of the present invention, and FIG. 3 is a conventional substrate heating apparatus. FIG. 6,14 ... Preheating chamber, 7,15 ... Solder heating chamber, 8,16 ... Partition plate, 9 ... Hot air supply port, 17 ... First hot air supply port, 18 ...
… Second hot air supply port, 10,19 …… Heating element, 11,20 …… P plate,
12,21 …… Conveyor, 23 …… Upper exhaust port, 24 …… Lower exhaust port.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 一柳 高畤 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 斉藤 進 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 内藤 孝夫 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (56)参考文献 特開 昭63−278668(JP,A) 特開 昭51−101863(JP,A) 実開 昭61−4870(JP,U) ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Takahata Ichiyanagi 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Susumu Saito, 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd. (72) Inventor Takao Naito 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) Reference JP-A 63-278668 (JP, A) JP-A 51-101863 (JP, A) 61-4870 (JP, U)

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】加熱手段を有したトンネル状の加熱室と、
基板を前記加熱室内で搬送することができる手段とを有
した基板加熱装置において、2ヶ所から異なった温度の
熱風を供給する熱風供給口を有し、前記2ヵ所の熱風供
給口の間に搬送される前記基板を阻止しない範囲で対向
する一対の仕切板を有し、前記仕切板間には排気口を有
することを特徴とする基板加熱装置。
1. A tunnel-shaped heating chamber having heating means,
A substrate heating apparatus having means for transporting a substrate in the heating chamber, having hot air supply ports for supplying hot air of different temperatures from two locations, and transporting between the two hot air supply ports A substrate heating device having a pair of partition plates facing each other within a range that does not block the substrate to be formed, and having an exhaust port between the partition plates.
【請求項2】対向する一対の仕切板の真下に下部排気口
を有することを特徴とする特許請求の範囲第1項記載の
基板加熱装置。
2. A substrate heating apparatus according to claim 1, further comprising a lower exhaust port directly below a pair of opposing partition plates.
【請求項3】仕切板間に設けられた排気口の排気速度が
下部排気口の排気速度より小さいことを特徴とする特許
請求の範囲第1項記載の基板加熱装置。
3. The substrate heating apparatus according to claim 1, wherein the exhaust speed of the exhaust port provided between the partition plates is smaller than the exhaust speed of the lower exhaust port.
JP63005150A 1988-01-13 1988-01-13 Substrate heating device Expired - Fee Related JPH0751273B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63005150A JPH0751273B2 (en) 1988-01-13 1988-01-13 Substrate heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63005150A JPH0751273B2 (en) 1988-01-13 1988-01-13 Substrate heating device

Publications (2)

Publication Number Publication Date
JPH01181966A JPH01181966A (en) 1989-07-19
JPH0751273B2 true JPH0751273B2 (en) 1995-06-05

Family

ID=11603248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63005150A Expired - Fee Related JPH0751273B2 (en) 1988-01-13 1988-01-13 Substrate heating device

Country Status (1)

Country Link
JP (1) JPH0751273B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2506695Y2 (en) * 1990-08-04 1996-08-14 三菱電機株式会社 Printed circuit board cooling device
JPH0753807Y2 (en) * 1990-08-13 1995-12-13 千住金属工業株式会社 Reflow furnace
JP7110127B2 (en) * 2019-01-16 2022-08-01 日本碍子株式会社 heat treatment furnace

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS614870U (en) * 1984-06-08 1986-01-13 千住金属工業株式会社 reflow oven
JPH0665434B2 (en) * 1987-05-11 1994-08-24 エイティックテクトロン株式会社 Reflow soldering equipment

Also Published As

Publication number Publication date
JPH01181966A (en) 1989-07-19

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